Pneumatic connector for utility supply
By designing a pneumatic connector containing elastic support check balls and multi-layer elastomers, the stable pneumatic connection problem of public facilities in semiconductor manufacturing is solved, and the leakage-free connection effect is achieved, which is suitable for the needs of pneumatic connections in semiconductor manufacturing.
Patent Information
- Application Number
- CN202411073459.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Priority Date
- 2024-02-21
- Filing Date
- 2024-08-06
- Publication Date
- 2025-08-22
AI Technical Summary
In the prior art, it is difficult for public facilities to achieve stable pneumatic connections during semiconductor manufacturing, resulting in leakage problems.
The pneumatic connector design is adopted including the first and second connecting members and valve body, and the check ball and multi-layer elastomeric structure with elastic support are used to ensure that the flow channel does not leak during connection, and stable connection is achieved through the compression of the multi-stage elastomer and the cooperation of the contact surface airtight members.
It effectively prevents gas leakage, ensures the stability and reliability of utilities supply, and is suitable for the demand for pneumatic connections during semiconductor manufacturing.
Smart Images
Figure CN120521080A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to a pneumatic connector for utility pneumatic connections. Background Art
[0002] Generally speaking, the semiconductor manufacturing process requires various utilities, such as air, nitrogen, vacuum, pure water (DW), power supply, etc. During the manufacturing process, it is very important to ensure the smooth supply of utilities.
[0003] For example, during the semiconductor device packaging process, testers and sorters are used to perform electrical inspections on the assembled unit semiconductor devices. The sorter receives electrical signals and performs mechanical actions to connect the semiconductor devices to contactors connected to the tester to inspect their electrical characteristics. Based on the inspection results, the semiconductor devices are classified as defective or non-defective. The semiconductor devices are then unloaded onto semiconductor packaging carriers such as tubes and trays.
[0004] Prior art literature Patent Literature (Patent Document 1) Patent Publication No. 10-2000-0015678 (Published on March 15, 2000) Summary of the Invention The present invention is directed to providing a pneumatic connector for utility supply that is capable of preventing leaks and establishing a stable pneumatic connection between a utility supply end and a utility receiving end of manufacturing equipment.
[0005] To achieve this purpose, a pneumatic connector for utility supply according to the present invention includes: a first connecting member, which is arranged on either the utility supply end or the utility receiving end; a first valve body, which is arranged on the first connecting member and has a first check ball elastically supported, and the flow channel is opened and closed by the first check ball; a second connecting member, which is arranged on the other of the utility supply end or the utility receiving end and is connected to the first connecting member; and a second valve body, which is arranged on the second connecting member and has a second check ball elastically supported, and the flow channel is opened and closed by the second check ball, wherein the second valve body includes: a main body; a first floating body elastically supported on the main body; and a second floating body elastically supported on the first floating body so that a part protrudes to the outside of the first floating body, and elastically supports the second check ball so that a part of the second check ball protrudes to the outside of the first floating body.
[0006] Preferably, the second floating body of the second valve body protrudes a certain height relative to the contact surface of the first floating body in contact with the first valve body, and the second check ball protrudes higher than the protruding height of the second floating body.
[0007] Preferably, the first valve body and the second valve body further include an airtight member, and the airtight member is provided on at least one of the two contact surfaces facing each other to maintain airtightness.
[0008] Preferably, it includes: a first elastomer, elastically supporting the main body and the first floating body; a second elastomer, elastically supporting the first floating body and the second floating body; and a third elastomer, elastically supporting the second floating body and the second check ball, wherein the elastic modulus of the first elastomer is greater than that of the second elastomer, and the elastic modulus of the second elastomer is greater than that of the third elastomer.
[0009] More preferably, the second valve body further includes: a valve stem fixed on the second floating body and supporting the third elastic body.
[0010] According to the present invention, a pneumatic connector for utility supply includes: a first connecting member, which is arranged on either the utility supply end or the utility receiving end; a first valve body, which is arranged on the first connecting member and has a first check ball elastically supported, and the flow channel is opened and closed by the first check ball; a second connecting member, which is arranged on the other of the utility supply end or the utility receiving end and is connected to the first connecting member; and a second valve body, which is arranged on the second connecting member and has a second check ball elastically supported, and the flow channel is opened and closed by the second check ball, wherein the second valve body includes: a main body; a first floating body, which is elastically supported on the main body; and a second floating body, which is elastically supported on the first floating body, a part of which protrudes to the outside of the first floating body, and elastically supports the second check ball, so that a part of the second check ball protrudes to the outside of the first floating body, thereby minimizing the possibility of leakage when the two valve bodies are connected, ensuring a reliable pneumatic connection. BRIEF DESCRIPTION OF THE DRAWINGS
[0011] Figure 1 (a) and (b) are structural diagrams showing a disconnected state and a connected state of a pneumatic connector for utility supply according to an embodiment of the present invention, respectively.
[0012] Figure 2 is a cross-sectional view of a pneumatic connector for utility supply according to an embodiment of the present invention.
[0013] Figures 3 to 6is a cross-sectional view illustrating a pneumatic connector connection process for utility supply according to an embodiment of the present invention.
[0014] Description of Reference Numerals 1: pneumatic connector for utility supply; 110: first connecting member; 120: first valve body; 121: first check ball; 210: second connecting member; 220: second valve body; 221: second check ball; 222: main body; 223: first floating body; 224: second floating body; S1: first elastic body; S2: second elastic body; S3: third elastic body; S4: fourth elastic body. DETAILED DESCRIPTION
[0015] The description of certain structures or functions proposed in the embodiments of the present invention is only used to illustrate the embodiments according to the concept of the present invention. The embodiments according to the concept of the present invention can be implemented in various forms. In addition, it should not be interpreted as being limited to the embodiments described in this specification, but should be understood to include all modifications, equivalents or replacements within the scope of the concept and technology of the present invention.
[0016] The present invention will be described in detail below with reference to the accompanying drawings.
[0017] Figure 1 (a) and (b) are structural diagrams showing a disconnected state and a connected state of a pneumatic connector for utility supply according to an embodiment of the present invention, respectively.
[0018] Reference Figure 1 In (a) and (b), the pneumatic connector 1 for utility supply according to an embodiment of the present invention includes a first connecting member 110 , a first valve body 120 , a second connecting member 210 and a second valve body 220 .
[0019] The first connecting member 110 and the second connecting member 210 are respectively arranged at the utility receiving end and the utility supply end, and may include male and female connecting guide members. In this embodiment, the connecting guide members are guide arms 211 protruding from the second connecting member 120 in the connection direction and guide grooves 111 formed in the first connecting member 110. The guide grooves 111 correspond to the guide arms 211 and are inserted into the guide grooves 111. Such guide members may have various shapes as long as they are capable of connecting the first connecting member 110 and the second connecting member 210. Furthermore, although not shown, a locking member may be provided to mechanically lock or unlock the connection between the first connecting member 110 and the second connecting member 210.
[0020] The first valve body 120 is disposed on the first flow passage 112 of the first connecting member 110 and has a resiliently supported first check ball 121. The flow passage is opened and closed by the first check ball 121. Preferably, the first check ball 121 is resiliently supported within the first valve body 120 such that at least a portion thereof protrudes outside the first valve body 120.
[0021] The second valve body 220 is disposed on the second flow passage 212 of the second connecting member 210 and has a resiliently supported second check ball 221. The flow passage is opened and closed by the second check ball 221. Preferably, the second check ball 221 is resiliently supported within the second valve body 210 such that at least a portion thereof protrudes outside the second valve body 210.
[0022] When the first valve body 120 and the second valve body 220 are kept apart, the check balls 121 and 221 of the respective valve bodies 120 and 220 block the pneumatic connection between the first connecting member 110 and the second connecting member 210. On the other hand, when the first connecting member 110 and the second connecting member 210 are connected, the check balls 121 and 221 of the first valve body 120 and the second valve body 220 are pushed inward, thereby connecting the supply end and the receiving end of the utility (pneumatic) to each other.
[0023] In particular, in the present invention, the contact process between the first valve body 120 and the second valve body 220 consists of two stages, thereby minimizing leakage that may occur when the first valve body 120 and the second valve body 220 are connected.
[0024] Hereinafter, the structure of each valve body as an important component of the present invention will be described in detail with reference to the accompanying drawings. Figure 2 is a cross-sectional view of a pneumatic connector for utility supply according to an embodiment of the present invention.
[0025] Reference Figure 2 The second valve body 220 includes a first check ball 221 , a main body 222 , a first floating body 223 and a second floating body 224 .
[0026] The main body 222 is hollow and forms the primary exterior of the second valve body. It is assembled with the second connecting member. The main body 222 is provided with a first elastic member S1 that elastically supports the first floating body 223. A first locking protrusion 222a, curved along the inner diameter, is provided at the lower end of the main body 222. The first floating body 223 is inserted into the main body 222 and elastically supported by the first elastic member S1. Its lower end is supported by the first locking protrusion 222a. In this embodiment, the first floating body 223 defines the first flow channel 212.
[0027] The second floating body 224 is inserted into the first floating body 223 and elastically supported by the second elastomer S2. A second locking protrusion 222a supporting the second check ball 221 is provided at the external opening end of the flow channel. The diameter of the opening is smaller than the diameter of the second check ball 221, and a second locking protrusion 222a is formed on the opening.
[0028] The second floating body 224 is elastically supported on the first floating body 223 by the second elastomer S2, so that a portion of it protrudes to the outside of the first floating body 223 by a certain height d1, and a third elastomer S3 is provided on the second floating body 224 to elastically support the second check ball 221, so that a portion of the second check ball 221 protrudes to the outside of the first floating body 223.
[0029] Preferably, the second floating body 224 further includes a first airtight member 225 to maintain airtightness at its face-to-face contact with the first valve body 120. This first airtight member 225 may be, for example, a known O-ring. While the first airtight member 225 is provided on the second floating body 224 in this embodiment, it may also be provided around the open end of the first floating body 223 to seal against the first valve body 120.
[0030] The second valve body 220 has a contact surface with the first floating body 223 that contacts the first valve body 120. The first floating body 223 protrudes by a certain height d1, and the second check ball 221 protrudes by a certain height d2 that is higher than the protruding height d1 (d1) of the first floating body 223. <d2)。
[0031] Preferably, the second valve body 220 also includes: a first valve stem 226, which is fixed on the first floating body 223 and is arranged on the flow channel to support the third elastomer S3; and a first guide rod 226a, which extends from the first valve stem 226 so that a portion of the third elastomer S3 is inserted therein.
[0032] Preferably, the elastic modulus of the first elastic body S1 is greater than that of the second elastic body S2, and the elastic modulus of the second elastic body S2 is greater than that of the third elastic body S3. Therefore, when the second valve body 220 and the first valve body 120 come into contact, the third elastic body S3, the second elastic body S2, and the first elastic body S1 are compressed in sequence, causing the second check ball 221 to be inserted into the inside of the second floating body 224 (compressed by the third elastic body), and the first floating body 223 to be inserted into the inside of the main body 222 (compressed by the second and third elastic bodies).
[0033] The first valve body 120 is hollow and forms the primary exterior of the first valve body. It is assembled with the first connecting member. A second airtight member 126 is preferably provided to maintain the airtightness of the first connecting member. The first valve body 120 has a second locking protrusion 120a at the outer open end of the flow passage, which supports the first check ball 121. This open end has a smaller diameter than the first check ball 121 and is formed with the second locking protrusion 120a. The first valve body 120 may also include a second valve stem 124 that supports the fourth elastic member S4, and a second guide rod 124a that extends from the second valve stem 124, into which a portion of the fourth elastic member S4 is inserted.
[0034] The first valve body 120 protrudes by a certain height d3 relative to the contact surface with the second valve body 220 , so that a portion of the first check ball 121 protrudes outward.
[0035] Preferably, the first valve body 120 further includes a valve body head 122 connected to the first connecting member and protruding outward, and an outer diameter d1 of the valve body head 122 is smaller than an inner diameter d2 of the open end of the main body portion 222 .
[0036] Figures 3 to 6 is a cross-sectional view illustrating a pneumatic connector connection process for utility supply according to an embodiment of the present invention.
[0037] Reference Figure 3 and Figure 6 Describing the connection process of the pneumatic connector for utility supply according to the present invention structured as described above, for ease of understanding, the first valve body 120 is fixed and the second valve body 220 can be moved to connect the first valve body 120 and the second valve body 220.
[0038] like Figure 3 and Figure 4 As shown, the second valve body 220 moves downward, causing the first check ball 121 and the second check ball 221 to contact and push each other (refer to Figure 3 ), as the second elastic body S2 and the fourth elastic body S4 are compressed, the first check ball 121 and the second check ball 221 are retracted into the first valve body 120 and the second floating body 224 respectively, so that the flow passages of the first valve body 120 and the second valve body 220 begin to connect (refer to Figure 4 On the other hand, when the first check ball 121 and the second check ball 221 are completely retracted into the first valve body 120 and the second floating body 224 , the upper surface of the valve body head 122 is in close contact with the lower surface of the second floating body 224 .
[0039] Next, if Figure 5 and Figure 6As shown, as the second valve body 220 continues to move downward, the first elastic body S2 is compressed, the second floating body 224 retracts into the inside of the first floating body 223, and the first floating body 223 retracts into the inside of the main body 222, thereby completely connecting the flow passages of the first valve body 120 and the second valve body 220. Furthermore, when the flow passages of the first valve body 120 and the second valve body 220 are connected, the first airtight member 225 disposed between the contact surface of the first valve body 120 and the floating body 223 enhances the sealing effect.
[0040] The disconnection sequence of the first valve body 120 and the second valve body 220 is opposite to the connection process. The first valve body 120 and the second valve body 220 are separated, and each check ball 121 , 221 is pushed outward to block the flow passage of each valve body 120 , 220 .
[0041] On the other hand, in the present embodiment, the first connecting member 110 having the first valve body 120 and the second connecting member 210 having the second valve body 220 are described as being respectively arranged at the utility receiving end and the utility supply end, but they can be arranged in reverse, one of the first connecting member 110 and the second connecting member 210 is fixed and the other can be moved to connect the first valve body 120 and the second valve body 210, or the first connecting member 110 and the second connecting member 210 can move together to connect the first valve body 120 and the second valve body 210.
[0042] The present invention is not limited to the aforementioned embodiments and drawings, and it is obvious to those skilled in the art that various substitutions, modifications and alterations may be made to the present invention without departing from the technical concept of the present invention.
Claims
1. A pneumatic connector for utility supply, characterized in that include: a first connecting member provided on either the utility supply end or the utility receiving end; a first valve body, disposed on the first connecting member and having a first elastically supported check ball, through which the flow passage is opened and closed; a second connecting member provided on the other of the utility supply end or the utility receiving end and connected to the first connecting member; and The second valve body is provided on the second connecting member and has a second check ball which is elastically supported, and the flow passage is opened and closed by the second check ball, wherein: The second valve body includes: Main body; a first floating body elastically supported on the main body; and The second floating body is elastically supported on the first floating body, a portion of which protrudes outside the first floating body, and elastically supports the second check ball so that a portion of the second check ball protrudes outside the first floating body.
2. The pneumatic connector for utility supply according to claim 1, characterized in that: The second floating body of the second valve body protrudes a certain height relative to the contact surface of the first floating body that contacts the first valve body, and the second check ball protrudes higher than the protruding height of the second floating body.
3. The pneumatic connector for utility supply according to claim 1, wherein The first valve body and the second valve body further include an airtight member provided on at least one of two contact surfaces facing each other to maintain airtightness.
4. The pneumatic connector for utility supply according to claim 1 , further comprising: a first elastic body elastically supporting the main body and the first floating body; a second elastic body elastically supporting the first floating body and the second floating body; and a third elastic body elastically supporting the second floating body and the second check ball, wherein The elastic modulus of the first elastic body is greater than that of the second elastic body, and the elastic modulus of the second elastic body is greater than that of the third elastic body.
5. The pneumatic connector for utility supply according to claim 1 , the second valve body further comprising: The valve stem is fixed on the second floating body and supports the third elastic body.