Method for circulating, refluxing and supplementing mixed electroplating liquid by utilizing venturi tube

Abstract

The invention provides a method for circulating, refluxing and supplementing a mixed electroplating solution by utilizing a Venturi tube, which comprises the following steps: constructing a circulating system comprising a solution storage module, a main circulating pipeline, a refluxing pipeline and the Venturi tube, forming a low-pressure area by utilizing the jet flow effect of the Venturi tube, and efficiently sucking and mixing the recovered electroplating solution and the supplemented solution, the jet pipe extends to the initial position of the contraction section to form an annular mixing channel, and the throat pipe diameter and the jet pipe are designed to be equal in diameter to generate violent turbulence mixing. The device realizes efficient and uniform mixing of electroplating liquid, has the advantages of leakage prevention, backflow prevention and simplified structure, and remarkably improves the stability and reliability of an electroplating process. The invention relates to the field of TGV electroplating processes.

Description

Technical Field

[0001] The present invention relates to the field of TGV electroplating technology, and in particular to a method for circulating, refluxing and replenishing a mixed electroplating solution by using a Venturi tube. Background Art

[0002] In the field of TGV electroplating process, the circulation, reflux and replenishment mixing of the plating solution are key links affecting the quality of electroplating. In the traditional method, the circulation reflux pipe, the plating tank reflux pipe and the liquid addition pipe are usually directly connected to the plating liquid tank to achieve liquid mixing. However, this method has the problems of low liquid mixing efficiency and high risk of leakage due to multiple pipe openings. In addition, if a solution is adopted in which multiple liquids are mixed and then uniformly injected into the liquid storage tank, due to the lack of an effective anti-backflow design, the liquid in the plating tank reflux pipe and the liquid addition pipe is prone to backflow due to pressure imbalance, affecting process stability.

[0003] In the existing technology, some solutions attempt to improve the mixing effect by adding independent pump bodies, mechanical stirring structures or complex valve systems. However, such designs not only increase equipment costs, but also increase maintenance difficulties due to the increase in mechanical components. At the same time, although conventional jet mixing devices can improve the mixing efficiency, it is difficult to take into account the simultaneous suction of multiple liquids and the need to prevent backflow in the electroplating liquid circulation system. Especially in high-frequency liquid replenishment and circulation scenarios, the mixing uniformity and system reliability are difficult to meet the requirements of precision electroplating processes.

[0004] Therefore, there is an urgent need for a method for mixing the plating solution for circulation, reflux and replenishment using a venturi tube to solve the above problems. Summary of the Invention

[0005] In response to the above-mentioned defects of the prior art, the present invention provides a method for circulating, refluxing and replenishing the mixed plating liquid using a Venturi tube, aiming to solve the problems of low mixing efficiency, high risk of leakage, easy backflow and complex and difficult equipment maintenance in the electroplating liquid circulation mixing system in the prior art.

[0006] To achieve the above object, the technical solution adopted by the present invention is: a method for circulating, refluxing and replenishing a mixed electroplating solution using a venturi tube, comprising the following steps:

[0007] S1: System Construction:

[0008] S11: Provides liquid storage module, main circulation pipeline, return pipeline, liquid replenishment pipeline, Venturi tube, electroplating module and liquid replenishment module;

[0009] S12: connecting the output end of the liquid storage module to the input end of the main circulation pipeline, and dividing the output end of the main circulation pipeline into a first branch pipeline and a second branch pipeline, wherein: the first branch pipeline is connected to the input end of the electroplating module, and the second branch pipeline is connected to the jet tube inlet end of the venturi tube;

[0010] S13: connecting the output end of the electroplating module to the first suction inlet of the venturi tube through a reflux pipeline, and connecting the output end of the fluid replenishment module to the second suction inlet of the venturi tube through a fluid replenishment pipeline;

[0011] S2: Fluid mixing operation:

[0012] S21: delivering high-voltage electroplating liquid to the jet tube through the second branch pipeline;

[0013] S22: Using the jet effect of the Venturi tube, a low pressure area is formed at the first suction inlet and the second suction inlet;

[0014] S23: sucking the recovered electroplating solution in the reflux pipeline and the replenishing solution in the replenishing pipeline through the low-pressure area;

[0015] S24: At the throat of the contraction section of the venturi tube, the high-pressure plating liquid output through the jet tube is mixed with the recovered plating liquid and the replenishing liquid sucked in by high-speed impact;

[0016] S3: Mixed liquid reflux:

[0017] S31: The mixed fluid is delivered to the input end of the liquid storage module through the output end of the venturi tube.

[0018] Based on the above, a method for mixing, circulating, refluxing, and replenishing plating solutions using a venturi tube has the beneficial effect of solving the problems of low mixing efficiency, high risk of leakage, easy backflow, and complex and difficult equipment maintenance in the existing plating solution circulation and mixing systems. The main advantages are:

[0019] 1. The present invention forms a low-pressure zone through the jet action of the Venturi tube, efficiently sucking the recovered electroplating solution in the return line and the replenishing liquid in the replenishing line, and then mixing them through high-speed impact at the throat of the contraction section to achieve synchronous and uniform mixing of multiple liquids, significantly improving the mixing efficiency;

[0020] 2. The present invention integrates the main circulation pipeline, return pipeline and liquid replenishment pipeline through the Venturi tube, reducing the number of openings for direct access to the liquid storage module in traditional multi-pipelines, thereby reducing the risk of leakage;

[0021] 3. The present invention utilizes the jet action of the Venturi tube to form a stable low-pressure zone outside the first and second suction inlets, and naturally draws in reflux fluid and replenishment fluid through the principle of fluid dynamics, without the need for additional valve control, thus fundamentally avoiding backflow.

[0022] 4. The present invention adopts a single venturi tube to replace the traditional mechanical stirring or complex valve system, reducing the number of mechanical parts, simplifying the equipment structure, and reducing maintenance costs and workload.

[0023] Furthermore, the output end of the jet tube extends to the starting position of the contraction section of the venturi tube, and an annular mixing channel is formed between the outer wall of the jet tube and the inner wall of the venturi tube at the starting position of the contraction section, which is used to guide the recovery of the electroplating solution and the replenishment of the liquid medicine.

[0024] Based on the above, the beneficial effect of extending the output end of the jet tube to the starting position of the contraction section is to optimize the fluid guidance path and solve the problem of uneven fluid dispersion in traditional jet mixing; the beneficial effect of the outer wall of the jet tube and the inner wall of the Venturi tube forming an annular mixing channel is to enhance the fluid mixing efficiency and solve the problem of turbulent interference during the synchronous inhalation of multiple liquid streams.

[0025] Furthermore, the diameter of the throat of the contraction section is the same as the diameter of the jet tube, with an allowable error range of ±5%.

[0026] Based on the above, the present invention achieves a dual mixing enhancement effect on the basis of the annular mixing channel by designing the throat diameter of the contraction section and the jet tube to be the same size: on the one hand, when the premixed liquid enters the throat from the annular mixing channel, the proportional design of the tube diameter causes the fluid cross-sectional area to drop sharply, resulting in a strong extrusion effect and high-speed jet, which completely solves the problem of insufficient mixing caused by insufficient flow rate in traditional mixing devices; on the other hand, this equal-diameter transition design causes the liquid preliminarily mixed in the annular channel to undergo instantaneous pressurization and acceleration in the throat, forming violent turbulence, and completing secondary enhanced mixing without the need for additional mixing devices, thus overcoming the process bottleneck of the existing technology that premixed liquids need to be processed in stages. Through fluid dynamics optimization, this design simultaneously achieves the process requirements of preliminary mixing and ultimate mixing in a single structure.

[0027] Furthermore, the method is also applicable to the mixing circulation of other mixed liquids in the surface treatment process.

[0028] Furthermore, the first suction inlet and the second suction inlet are spaced apart and distributed along the axial direction of the venturi tube, and are respectively communicated with the annular mixing channel.

[0029] In order to more clearly illustrate the above features of the present invention and the objects to be achieved, the present invention will be further described below with reference to the accompanying drawings and specific embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 : is a schematic diagram of the present invention;

[0031] Figure 2 : is a schematic diagram of the structure of the Venturi tube of the present invention;

[0032] Figure 3 : It is a flow chart of the main structure steps of the present invention;

[0033] Figure 4: It is a flow chart of substructure steps of the present invention.

[0034] Explanation of the accompanying figures: 1-liquid storage module, 2-main circulation pipeline, 21-first branch pipeline, 22-second branch pipeline, 3-reflux pipeline, 4-fluid replenishment pipeline, 5-Venturi tube, 51-jet tube, 52-first suction inlet, 53-second suction inlet, 54-contraction section, 55-annular mixing channel, 6-electroplating module, 7-fluid replenishment module. DETAILED DESCRIPTION

[0035] See also Figures 1-4 As shown, a method for circulating, refluxing and replenishing a mixed electroplating solution using a venturi tube comprises the following steps:

[0036] S1: System Construction:

[0037] S11: Provide a liquid storage module 1, a main circulation pipeline 2, a return pipeline 3, a liquid replenishment pipeline 4, a venturi tube 5, an electroplating module 6 and a liquid replenishment module 7;

[0038] S12: Connecting the output end of the liquid storage module 1 to the input end of the main circulation pipeline 2. The output end of the main circulation pipeline 2 is divided into a first branch pipeline 21 and a second branch pipeline 22, wherein: the first branch pipeline 21 is connected to the input end of the electroplating module 6, and the second branch pipeline 22 is connected to the inlet end of the jet tube 51 of the venturi tube 5;

[0039] S13: Connecting the output end of the electroplating module 6 to the first suction inlet 52 of the venturi tube 5 through the reflux line 3, and connecting the output end of the rehydration module 7 to the second suction inlet 53 of the venturi tube 5 through the rehydration line 4;

[0040] S2: Fluid mixing operation:

[0041] S21: delivering high-voltage electroplating liquid to the jet tube 51 through the second branch pipe 22;

[0042] S22: Using the jet effect of the Venturi tube 5, a low-pressure area is formed at the first suction inlet 52 and the second suction inlet 53;

[0043] S23: The recovered electroplating solution in the reflux line 3 and the replenishing solution in the replenishing line 4 are sucked in through the low-pressure area;

[0044] S24: At the throat of the contraction section 54 of the venturi tube 5, the high-pressure plating liquid output through the jet tube 51 is mixed with the recovered plating liquid and the replenishing liquid by high-speed impact;

[0045] S3: Mixed liquid reflux:

[0046] S31 : delivering the mixed fluid to the input end of the liquid storage module 1 through the output end of the venturi tube 5 .

[0047] In this embodiment, the output end of the jet tube 51 extends to the starting position of the contraction section 54 of the venturi tube 5, and an annular mixing channel 55 is formed between the outer wall of the jet tube 51 and the inner wall of the venturi tube 5 at the starting position of the contraction section 54, which is used to guide the recovery of the electroplating solution and the replenishment of the liquid.

[0048] In this embodiment, the diameter of the throat of the contraction section 54 is the same as the diameter of the jet tube 51 , with an allowable error range of ±5%.

[0049] In this embodiment, the method is also applicable to the mixed circulation of other mixed liquids in the surface treatment process, and the other mixed liquids include but are not limited to cleaning liquid, developing liquid, etching liquid and stripping liquid.

[0050] In this embodiment, the first suction inlet 52 and the second suction inlet 53 are spaced apart along the axial direction of the venturi tube 5 and are respectively communicated with the annular mixing channel 55 .

[0051] In summary, the specific embodiments of the present invention are as follows:

[0052] During the operation of the system, the electroplating liquid in the liquid storage module 1 is transported through the main circulation pipeline 2 and enters the electroplating module 6 through the first branch pipeline 21 for electroplating operation. At the same time, the high-pressure electroplating liquid is transported to the jet tube 51 of the venturi tube 5 through the second branch pipeline 22. When the high-pressure electroplating liquid flows through the jet tube 51, a high-speed jet is generated at the contraction section 54 of the venturi tube 5. According to the Bernoulli principle, a stable low-pressure area is formed at the first suction inlet 52 and the second suction inlet 53. This low-pressure area, through fluid adsorption, simultaneously absorbs the recycled electroplating liquid after use in the electroplating module 6 through the reflux pipeline 3 and the fresh liquid from the rehydration module 7 through the rehydration pipeline 4 into the interior of the venturi tube 5;

[0053] In particular, the jet tube 51 extends to the starting position of the contraction section 54, so that an annular mixing channel 55 is formed between the outer wall of the jet tube 51 and the inner wall of the venturi tube 5. The recovered plating solution and the replenishing liquid enter the annular channel through the first suction inlet 52 and the second suction inlet 53 to complete preliminary mixing. Then, they merge with the high-pressure plating liquid output by the jet tube 51 in the throat area of ​​the contraction section 54. Since the throat diameter is designed to be equal to that of the jet tube 51 (an error of ±5% is allowed), the fluid cross-sectional area suddenly decreases, resulting in a violent squeezing effect, so that the mixed liquid achieves fully uniform ultimate mixing under high-speed turbulent conditions. Finally, the mixed plating solution returns to the liquid storage module 1 through the output end of the venturi tube 5, forming a complete circulation system.

[0054] It should be noted that the method is also applicable to the mixing and circulation of other mixed liquids in surface treatment processes, including but not limited to cleaning liquids, developing liquids, etching liquids, and stripping liquids. Specific application scenarios include: mixing cleaning liquids of different proportions in semiconductor wafer cleaning processes; circulating and mixing developing liquids and replenishing liquids in photolithography processes; mixing etching liquids and regeneration liquids in PCB board manufacturing processes; and mixing stripping liquids and diluents in degumming processes. These application scenarios all require efficient liquid mixing and circulation systems, and the Venturi tube mixing device of the present invention can perfectly meet these process requirements.

[0055] During the liquid mixing process, the axially spaced first suction inlet 52 and the second suction inlet 53 are connected to the annular mixing channel 55 to ensure the orderly introduction and premixing of liquids from different sources. The entire system realizes self-driven mixing of fluids through the unique structure of the Venturi tube 5, without the need for additional mechanical stirring devices, which not only ensures the mixing quality but also simplifies the system structure.

[0056] The above description is only the optimal solution embodiment of the present invention and is not intended to limit the present invention. Various modifications or substitutions made by those skilled in the art without departing from the essence and protection scope of the present invention should also be within the protection scope of the present invention.

Claims

1. A method for circulating, refluxing and replenishing a mixed electroplating solution using a venturi tube, characterized in that: The following steps are involved: S1: System Construction: S11: providing a liquid storage module (1), a main circulation pipeline (2), a return pipeline (3), a liquid replenishment pipeline (4), a venturi tube (5), an electroplating module (6) and a liquid replenishment module (7); S12: connecting the output end of the liquid storage module (1) to the input end of the main circulation pipeline (2), wherein the output end of the main circulation pipeline (2) is divided into a first branch pipeline (21) and a second branch pipeline (22), wherein: the first branch pipeline (21) is connected to the input end of the electroplating module (6), and the second branch pipeline (22) is connected to the inlet end of the jet tube (51) of the venturi tube (5); S13: connecting the output end of the electroplating module (6) to the first suction inlet (52) of the venturi tube (5) through the return line (3), and connecting the output end of the fluid replenishment module (7) to the second suction inlet (53) of the venturi tube (5) through the fluid replenishment line (4); S2: Fluid mixing operation: S21: delivering high-voltage electroplating liquid to the jet tube (51) through the second branch pipeline (22); S22: utilizing the jet action of the Venturi tube (5) to form a low-pressure area at the first suction inlet (52) and the second suction inlet (53); S23: The recovered electroplating solution in the reflux line (3) and the replenishing solution in the replenishing line (4) are sucked in through the low-pressure zone; S24: At the throat of the contraction section (54) of the venturi tube (5), the high-pressure electroplating liquid output through the jet tube (51) is mixed with the recovered electroplating liquid and the supplementary liquid by high-speed impact; S3: Mixed liquid reflux: S31: The mixed fluid is transported to the input end of the liquid storage module (1) through the output end of the venturi tube (5).

2. The method for circulating, refluxing, and replenishing a mixed electroplating solution using a venturi tube according to claim 1, characterized in that: The output end of the jet tube (51) extends to the starting position of the contraction section (54) of the venturi tube (5), and an annular mixing channel (55) is formed between the outer wall of the jet tube (51) and the inner wall of the venturi tube (5) at the starting position of the contraction section (54) for guiding the recovery of the electroplating solution and the replenishment of the liquid medicine.

3. The method for circulating, refluxing, and replenishing a mixed electroplating solution using a venturi tube according to claim 1, characterized in that: The throat diameter of the contraction section (54) is the same as the diameter of the jet tube (51), with an allowable error range of ±5%.

4. The method for circulating, refluxing, and replenishing a mixed electroplating solution using a venturi tube according to claim 1, characterized in that: The method is also applicable to the mixing circulation of other mixed liquids in the surface treatment process.

5. The method for circulating, refluxing and replenishing a mixed electroplating solution using a venturi tube according to claim 2, characterized in that: The first suction inlet (52) and the second suction inlet (53) are spaced apart along the axial direction of the Venturi tube (5) and are respectively connected to the annular mixing channel (55).

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