Process automation method, device, equipment, medium and product

Abstract

The invention discloses a process automation method, device and equipment, a medium and a product, and relates to the technical field of microelectronic manufacturing. In response to an input operation in the interactive interface, obtaining target parameter information corresponding to the target process task; the target parameter information comprises a target process name, a target process parameter and equipment information; constructing a process task list corresponding to a target process task based on the target process name and the target process parameter; and controlling a target device to sequentially execute each target sub-task in the process task list based on the device information. By adopting the technical scheme, the process task list is constructed according to the parameter information corresponding to the process task, so that manual repeated operation for realizing lamination operation is avoided, the automation efficiency is improved, and the production efficiency is further improved.

Description

Technical Field

[0001] The present invention relates to the field of microelectronics manufacturing technology, and in particular to a process automation method, device, equipment, medium and product. Background Art

[0002] In an era of rapid chip development, lamination technology has profound implications for semiconductor manufacturing, display manufacturing, microelectronics, and materials science. Lamination technology enables the sequential deposition of multiple layers of material onto a single substrate, creating stacked structures with complex functions and performance. This is crucial for the design of multifunctional electronic devices and structures.

[0003] However, the existing lamination process requires manual switching operations each time to achieve lamination in actual production, and the degree of automation is low, which is not conducive to the precise control of thickness and uniformity. Moreover, continuous operation requires more manpower and a large workload, resulting in low production efficiency and high overall investment costs.

[0004] Based on this, how to realize the automated execution of the lamination process is an urgent problem to be solved in this field. Summary of the Invention

[0005] The present invention provides a process automation method, device, equipment, medium and product to solve the problem of how to improve the efficiency of lamination operations, realize the automated execution of lamination process operations, avoid investing more manpower and financial resources, which leads to reduced production efficiency, and realize the automated process of lamination operations.

[0006] According to one aspect of the present invention, there is provided a process automation method, comprising:

[0007] In response to an input operation in the interactive interface, target parameter information corresponding to the target process task is obtained; the target parameter information includes a target process name, target process parameters, and equipment information;

[0008] Constructing a process task list corresponding to the target process task based on the target process name and the target process parameters;

[0009] Based on the equipment information, the target equipment is controlled to sequentially execute each target subtask in the process task list.

[0010] According to another aspect of the present invention, there is provided a process automation device comprising:

[0011] A parameter information acquisition module is used to obtain target parameter information corresponding to a target process task in response to an input operation in the interactive interface; the target parameter information includes a target process name, target process parameters, and equipment information;

[0012] A process task list building module, used to build a process task list corresponding to the target process task based on the target process name and the target process parameters;

[0013] A control module is used to control the target device to sequentially execute each target subtask in the process task list based on the device information.

[0014] According to another aspect of the present invention, an electronic device is provided, comprising:

[0015] at least one processor; and

[0016] a memory communicatively connected to the at least one processor; wherein,

[0017] The memory stores a computer program that can be executed by the at least one processor. The computer program is executed by the at least one processor to enable the at least one processor to perform the process automation method according to any embodiment of the present invention.

[0018] According to another aspect of the present invention, a computer-readable storage medium is provided, wherein the computer-readable storage medium stores computer instructions, and the computer instructions are used to enable a processor to implement the process automation method described in any embodiment of the present invention when executed.

[0019] According to another aspect of the present invention, a computer program product is provided. The computer program product comprises a computer program. When the computer program is executed by a processor, the process automation method according to any embodiment of the present invention is implemented.

[0020] The technical solution of an embodiment of the present invention responds to input operations in an interactive interface to obtain target parameter information corresponding to a target process task; the target parameter information includes a target process name, target process parameters, and equipment information; a process task list corresponding to the target process task is constructed based on the target process name and target process parameters; and the target equipment is controlled based on the equipment information to sequentially execute each target subtask in the process task list. The above technical solution solves the problem of how to improve the efficiency of stacking operations, realizes the automated execution of stacking processes, avoids the investment of excessive manpower and financial resources that leads to reduced production efficiency, and realizes an automated process for stacking operations.

[0021] It should be understood that the content described in this section is not intended to identify the key or important features of the embodiments of the present invention, nor is it intended to limit the scope of the present invention. Other features of the present invention will become readily understood through the following description. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0023] Figure 1 is a flow chart of a process automation method provided according to an embodiment of the present invention;

[0024] Figure 2 is a flow chart of a process automation method provided according to an embodiment of the present invention;

[0025] Figure 3 This is a structural diagram of a process automation device provided according to an embodiment of the present invention;

[0026] Figure 4 It is a structural diagram of an electronic device for implementing the process automation method according to an embodiment of the present invention. DETAILED DESCRIPTION

[0027] In order to enable those skilled in the art to better understand the solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts should fall within the scope of protection of the present invention.

[0028] It should be noted that the terms "first", "second", etc. in the description and claims of the present invention and the above-mentioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that the numbers used in this way can be interchanged where appropriate so that the embodiments of the present invention described herein can be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions. For example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0029] In addition, it should be noted that the collection, storage, use, processing, transmission, provision and disclosure of the data to be processed involved in the technical solution of the present invention are in compliance with the provisions of relevant laws and regulations and do not violate public order and good morals.

[0030] Figure 1A flowchart of a process automation method is provided for an embodiment of the present invention. The embodiment of the present invention is applicable to the automatic execution of the lamination process in semiconductor manufacturing; in particular, it is applicable to the automatic execution of the coating process in semiconductor manufacturing. The method can be executed by the process automation device provided by the embodiment of the present invention. The process automation device can be implemented in the form of hardware and / or software, and the process automation device can be configured in a server. Figure 1 As shown, the method includes:

[0031] S110 , in response to an input operation in the interactive interface, obtaining target parameter information corresponding to the target process task; the target parameter information includes a target process name, target process parameters, and equipment information.

[0032] Among them, the interactive interface is an operable interface for executing process tasks, which realizes human-computer interaction with the user; the target process task is the stacking process in the field of semiconductor manufacturing, and in the embodiment of the present invention, it is preferably a coating process; the target process name is a specific stacking process, which can be a coating process; the target process parameters are parameter information corresponding to the target process, including the process batch information to which the target process belongs and the configuration information corresponding to the target process task; the equipment information is the hardware module specified for executing this target process task, and the equipment selection can be based on actual needs based on accuracy and speed.

[0033] Specifically, in response to the user's input in the interactive interface, the target parameter information corresponding to the target process task is obtained, including the target process name, parameter information and equipment information; for example: the parameters entered by the user are obtained on the parameter page, including the process type name, parameter setting, equipment selection, name and batch information.

[0034] In an optional embodiment of the present invention, after obtaining the target parameters corresponding to the target process task in response to the user's input operation, the relevant settings of this process task can be saved in response to the user's selection button operation; it can also respond to the user's search operation to view the corresponding operation records and results based on the process name entered by the user, so that the user can conveniently view the logs or historical records corresponding to the saved process tasks.

[0035] It is understandable that through user operations on the interactive interface, users can search and re-operate process tasks based on the process name, which makes it convenient for users to track past operation records and results, and re-set parameters based on historically saved records and results, which facilitates the reuse of processes without investing a lot of manpower, improves the efficiency of subsequent process task construction, and further improves production efficiency.

[0036] S120 : Constructing a process task list corresponding to the target process task based on the target process name and the target process parameters.

[0037] The process task list is a stacking operation list corresponding to a target process task, including each process task in this stacking process. The process task list may include at least one process content.

[0038] Specifically, a process task list corresponding to the current target process task is constructed according to the target process name and the target process parameters. The process task list includes at least one subtask in the current lamination operation.

[0039] It can be understood that under the coating process task, the coating task can be completed on multiple wafers, and films of different processes can be coated; the same process can also be repeated for coating. Compared with the existing coating, which requires the process task to be set up again after it is completed once, the efficiency of coating is improved, repetitive work is reduced, and the automated execution of the stacking process is realized.

[0040] Optionally, a process task list corresponding to the target process task is constructed based on the target process name and target process parameters, including:

[0041] creating at least one target subtask based on the target process name and the target process parameters;

[0042] In response to the sequential selection operation of at least one target subtask, a process task list corresponding to the target process task is obtained.

[0043] Among them, the target subtask is the subtask in the current target process task; the sequential selection operation is the dragging operation performed by the user on at least one target subtask on the interactive interface; the process task list is the subtasks corresponding to the target process task and the execution order of each subtask.

[0044] Specifically, at least one target subtask is created based on the target process name and target process parameters, and in response to the user's dragging operation on at least one target subtask, the order of at least one target subtask is adjusted, and the at least one target subtask after the adjusted order is determined as the process task list corresponding to the target process task.

[0045] In one optional aspect of the present invention, each target subtask in the process task list can be added, deleted, or modified in response to user input, and the process task list is updated in real time based on the modified subtasks. Specifically, a checkbox is placed next to each target subtask in the process task list, allowing users to insert, delete, or modify subtasks. If a user selects or cancels a subtask in the process task list, the system updates the modified process task list in real time to obtain the latest process task list.

[0046] It is understandable that the process task list can be updated in real time based on the user's input operations, ensuring that the user can immediately see the changes in the stacking process, making it convenient for the user to modify the process task list corresponding to the target process task in real time based on actual needs, thereby improving production efficiency.

[0047] In an optional feature of the present invention, the process task list can support users to search and filter subtasks. Specifically, when creating a stacking process, users can seamlessly switch between single processes and stacking processes. Based on the search box and filtering options, users can further filter by specific criteria, such as subtask name and process type.

[0048] It can be understood that by expressing the lamination operation as a process task list and based on the real-time update and screening and filtering functions of the process task list, compared with continuous operations that require more manpower and a larger workload, the lamination process can be automatically executed by setting up a process task list, and by setting up multiple functions of the process task list, the user's operating convenience is improved and production efficiency is further improved.

[0049] S130 , controlling the target equipment to sequentially execute each target subtask in the process task list based on the equipment information.

[0050] The target device is the device that performs the target process task and is selected based on the device information.

[0051] Specifically, after the target device is determined according to the device information, the target device is controlled to sequentially execute each target subtask in the process task list to complete the stacking operation of the target process task.

[0052] Optionally, after controlling the target device to execute each target subtask in the process task list based on the device information, the following steps are further included:

[0053] Get the execution status of each target subtask in the process task list; the execution status includes pending, in progress, completed or failed;

[0054] Set the background color of the execution status of each target subtask based on the status background color strategy.

[0055] Among them, the execution status of the target process is the execution status of each target subtask in the target equipment execution process execution list, which can be pending status, in progress status, completed status or failed status; the status background color strategy is the background color corresponding to the pre-set execution status, and the background color can be blue, gray, green and black.

[0056] Specifically, during the execution of the process task list, the execution status of the target subtask can be obtained, which may include pending status, in-progress status, completed status or failed status, and the background color is set based on the execution status of each target subtask according to the preset status background color strategy; for example: if the execution status of the target subtask is pending status, the background color of the target subtask is set to blue; if the execution status of the target subtask is in-progress status, the background color of the target subtask is set to gray; if the execution status of the target subtask is completed status, the background color of the target subtask is set to green; if the execution status of the target subtask is failed status, the background color of the target subtask is set to black.

[0057] It is understandable that by setting the background color of each target subtask in the process task list based on the execution status, it is convenient for users to check the execution status of each target subtask in the process task list in a timely manner. Combined with clear fonts and a color scheme with a strong sense of technology, it conveys technical professionalism and high-endness, improves users' ability to check the execution status of tasks in a timely manner during stacking operations, and can promptly check for emergencies in stacking operations based on the execution status of each target subtask, thereby improving the operational convenience of production personnel, reducing actual workload, and thus improving work efficiency.

[0058] The technical solution of the embodiment of the present invention is to obtain target parameter information corresponding to the target process task in response to input operations in the interactive interface; the target parameter information includes the target process name, target process parameters, and equipment information; a process task list corresponding to the target process task is constructed based on the target process name and target process parameters; and the target equipment is controlled to sequentially execute each target subtask in the process task list based on the equipment information. The above technical solution solves the problem of how to improve the efficiency of stacking operations, realizes the automated execution of stacking process operations, avoids the investment of more manpower and financial resources that leads to reduced production efficiency, and realizes the automated process of stacking operations.

[0059] Figure 2 This is a flowchart of a process automation method provided by an embodiment of the present invention. Based on the above embodiment, the embodiment of the present invention supplements the specific method of constructing a process task list corresponding to the target process task based on the target process name and target process parameters. It should be noted that for the part not described in detail in the embodiment of the present invention, please refer to the relevant description of other embodiments. Figure 2 As shown, the method includes:

[0060] S210 . In response to an input operation in the interactive interface, target parameter information corresponding to the target process task is obtained; the target parameter information includes a target process name, target process parameters, and equipment information.

[0061] S220: Construct an empty subtask based on the target process parameters.

[0062] The empty subtask is at least one subtask under the target process task, and is a subtask framework that only configures the process name and process type.

[0063] Specifically, an empty subtask is constructed according to information such as process type, parameter setting, name and product batch in the target process parameters.

[0064] S230 : Determine at least one initial process in an empty subtask from a preset process database based on the target process name to obtain a candidate subtask.

[0065] Among them, the preset process database is pre-set and has at least one initial process. The initial process is the minimum granularity of a single step in a subtask, and dynamic scheduling of subtasks is achieved through logical arrangement; the candidate subtask is an empty subtask that contains at least one initial process.

[0066] Specifically, at least one initial process is selected from a preset process database according to the process name, and the initial process is added to an empty subtask to obtain a candidate subtask.

[0067] In an optional embodiment of the present invention, the preset process database is a drop-down table on the interactive interface, which contains the names of the configured processes. Relevant technicians select multiple initial processes under the empty subtask based on the target process name, and update the initial processes to the empty subtask to obtain candidate subtasks.

[0068] S240 : Obtain a target subtask in response to a parameter configuration operation on at least one initial process in the candidate subtasks.

[0069] The parameter configuration operation may include a parameter setting operation and a sequence selection operation, and the target subtask is a candidate subtask after the configuration operation is performed on the initial process.

[0070] Specifically, relevant technical personnel input corresponding parameter configuration operations in the interactive interface, configure the parameters in the initial process according to the above parameter configuration operations, and adjust the order of at least one initial process to obtain the target subtask that can realize the stacking process.

[0071] Optionally, in response to a parameter configuration operation on at least one initial process in a candidate subtask, obtaining a target subtask includes:

[0072] In response to a configuration operation on fixed parameters of at least one initial process, at least one first candidate process is obtained; wherein the parameter status of the first candidate process includes a completed state and an uncompleted state;

[0073] Setting the background color of each first candidate process based on a preset background color strategy;

[0074] Deleting the first candidate process based on its background color to obtain a second candidate process;

[0075] In response to the sequential selection operation of the second candidate process, a target subtask is obtained.

[0076] Among them, the fixed parameters are the same parameters in at least one initial process; the preset background color strategy is the correspondence between the parameter status of the preset candidate process and the background color of the candidate process; and the second candidate process is the updated candidate process.

[0077] Specifically, in response to the fixed parameter configuration operation of at least one initial process by relevant technical personnel, at least one first candidate process is obtained, and the parameter status of the first candidate process includes a completed state and an unfinished state; the background color of at least one first candidate process is set according to a preset background color strategy, and the first candidate process is deleted according to the background color of the first candidate process to obtain a second candidate process; again in response to the sequential selection operation of the second candidate process by relevant technical personnel, the target subtask is obtained.

[0078] For example, a set of operation buttons will be provided next to each initial process on the interactive interface, including one-click setting and selection setting. After the user clicks the one-click setting, the corresponding parameters and parameter status of each initial process under the entire subtask will be set uniformly; and different background colors will be added to the initial process based on the parameter status; users can quickly undo the settings of a certain process, avoiding tedious manual operations and making the interactive interface more intuitive and easy to use.

[0079] In one optional aspect of the present invention, parameter configuration operations can include batch operations. For example, a checkbox is added before each initial process in the interactive interface, and the background color of the selected initial process changes to light green. Users can then select multiple initial processes and perform batch operations on the selected processes. It is understood that batch operations on initial processes reduce user operation steps and further reduce repetitive work, allowing for quick completion of batch settings for multiple processes and improving production efficiency.

[0080] In an optional embodiment of the present invention, the parameter configuration operation may include a clearing operation; for example: after the configuration of the second candidate process has been completed on the interactive interface, the clearing operation may be responded to to ensure that the parameters in the second candidate process are restored to the parameter state of the initial process; compared to the existing method of manually clearing one by one, the clearing operation can ensure that all parameter configuration operations are quickly reset, reducing the possibility of omissions or erroneous operations.

[0081] S250 : In response to the sequential selection operation of at least one target subtask, obtain a process task list corresponding to the target process task.

[0082] S260 , controlling the target equipment to sequentially execute each target subtask in the process task list based on the equipment information.

[0083] The embodiment of the present invention determines multiple process parameters and other steps under the target subtask based on the configuration operation of the subtask, completes the automatic configuration of the initial process through the interactive interface, ensures that the user interface is more intuitive and easy to use, improves the operational convenience of relevant technical personnel, and uses existing IT resources to achieve seamless docking on the basis of ensuring high integration and user intimacy, which can significantly improve production efficiency, optimize production management, reduce costs, and improve economic benefits; compared with purchasing a new set of commercial software, a certain purchase fee is required, and after the one-year free maintenance period, system maintenance fees are required every year; the embodiment of the present invention completes the configuration of process tasks and the parameter configuration of the task list under the stacking operation task by designing an interactive interface, with low investment cost and realizes the automatic execution of the stacking process.

[0084] Figure 3 Figure 3 is a schematic diagram of the structure of a process automation device according to an embodiment of the present invention. This embodiment of the present invention is applicable to automating the lamination process in semiconductor manufacturing, particularly the coating process. The process automation device can be implemented in hardware and / or software and can be configured in a server. The process automation device 300 includes a parameter information acquisition module 310, a process task list construction module 320, and a control module 330.

[0085] The parameter information acquisition module 310 is used to obtain target parameter information corresponding to the target process task in response to input operations in the interactive interface; the target parameter information includes the target process name, target process parameters and equipment information;

[0086] A process task list building module 320 is used to build a process task list corresponding to a target process task based on a target process name and target process parameters;

[0087] The control module 330 is used to control the target equipment to sequentially execute each target subtask in the process task list based on the equipment information.

[0088] The technical solution of the embodiment of the present invention is to obtain target parameter information corresponding to the target process task in response to input operations in the interactive interface; the target parameter information includes the target process name, target process parameters, and equipment information; a process task list corresponding to the target process task is constructed based on the target process name and target process parameters; and the target equipment is controlled to sequentially execute each target subtask in the process task list based on the equipment information. The above technical solution solves the problem of how to improve the efficiency of stacking operations, realizes the automated execution of stacking process operations, avoids the investment of more manpower and financial resources that leads to reduced production efficiency, and realizes the automated process of stacking operations.

[0089] Optionally, the process task list construction module 320 includes a subtask creation unit and a process task list construction unit:

[0090] a subtask creating unit, configured to create at least one target subtask based on a target process name and target process parameters;

[0091] The process task list construction unit is configured to obtain a process task list corresponding to a target process task in response to a sequential selection operation of at least one target subtask.

[0092] Optionally, the subtask creation unit includes an empty subtask creation subunit, a candidate subtask creation subunit, and a target subtask creation subunit:

[0093] The empty subtask creation subunit is used to construct an empty subtask based on the target process parameters;

[0094] A candidate subtask creation subunit is used to determine at least one initial process in an empty subtask from a preset process database based on a target process name to obtain a candidate subtask;

[0095] The target subtask creating subunit is configured to obtain the target subtask in response to a parameter configuration operation on at least one initial process in the candidate subtasks.

[0096] Optionally, the target subtask creates a subunit, which is specifically used to obtain at least one first candidate process in response to a configuration operation on fixed parameters of at least one initial process; wherein the parameter status of the first candidate process includes a completed state and an unfinished state; set the background color of each first candidate process based on a preset background color strategy; delete the candidate process based on the background color of the first candidate process to obtain a second candidate process; and obtain the target subtask in response to a sequential selection operation of the second candidate process.

[0097] Optionally, the process automation device 300 also includes a background color setting unit for obtaining the execution status of each target process in the process task list; the execution status includes pending, in progress, completed or failed; and the background color of the execution status of each target process is set based on the status background color strategy.

[0098] The process automation device provided in the embodiment of the present invention can execute the process automation method provided in any embodiment of the present invention, and has the corresponding functional modules and beneficial effects of the execution method.

[0099] According to an embodiment of the present invention, the present invention further provides an electronic device, a readable storage medium and a computer program product.

[0100] Figure 4 A schematic diagram of the structure of an electronic device 10 that can be used to implement an embodiment of the present invention is shown. The electronic device is intended to represent various forms of digital computers, such as laptop computers, desktop computers, workstations, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. The electronic device can also represent various forms of mobile devices, such as personal digital processing, cellular phones, smart phones, wearable devices (such as helmets, glasses, watches, etc.) and other similar computing devices. The components shown herein, their connections and relationships, and their functions are merely examples and are not intended to limit the implementation of the present invention described and / or claimed herein.

[0101] like Figure 4 As shown, the electronic device 10 includes at least one processor 11 and a memory, such as a read-only memory (ROM) 12, a random access memory (RAM) 13, etc., which is communicatively connected to the at least one processor 11. The memory stores a computer program that can be executed by the at least one processor. The processor 11 can perform various appropriate actions and processes according to the computer program stored in the read-only memory (ROM) 12 or the computer program loaded from the storage unit 18 into the random access memory (RAM) 13. Various programs and data required for the operation of the electronic device 10 can also be stored in the RAM 13. The processor 11, ROM 12, and RAM 13 are connected to each other via a bus 14. An input / output (I / O) interface 15 is also connected to the bus 14.

[0102] Multiple components in the electronic device 10 are connected to the I / O interface 15, including an input unit 16, such as a keyboard, a mouse, etc.; an output unit 17, such as various types of displays, speakers, etc.; a storage unit 18, such as a magnetic disk, an optical disk, etc.; and a communication unit 19, such as a network card, a modem, a wireless communication transceiver, etc. The communication unit 19 allows the electronic device 10 to exchange information / data with other devices via a computer network such as the Internet and / or various telecommunication networks.

[0103] The processor 11 may be any general-purpose and / or specialized processing component with processing and computing capabilities. Some examples of the processor 11 include, but are not limited to, a central processing unit (CPU), a graphics processing unit (GPU), various specialized artificial intelligence (AI) computing chips, various processors that run machine learning model algorithms, a digital signal processor (DSP), and any suitable processor, controller, microcontroller, etc. The processor 11 executes the various methods and processes described above, such as the process automation method.

[0104] In some embodiments, the process automation method can be implemented as a computer program tangibly embodied in a computer-readable storage medium, such as the storage unit 18. In some embodiments, part or all of the computer program can be loaded and / or installed on the electronic device 10 via the ROM 12 and / or the communication unit 19. When the computer program is loaded into the RAM 13 and executed by the processor 11, one or more steps of the process automation method described above can be performed. Alternatively, in other embodiments, the processor 11 can be configured to perform the process automation method in any other suitable manner (e.g., via firmware).

[0105] Various embodiments of the systems and techniques described herein can be implemented in digital electronic circuit systems, integrated circuit systems, field programmable gate arrays (FPGAs), application specific integrated circuits (ASICs), application specific standard products (ASSPs), system-on-chip systems (SOCs), programmable logic devices (CPLDs), computer hardware, firmware, software, and / or combinations thereof. These various embodiments can include being implemented in one or more computer programs that are executable and / or interpreted on a programmable system that includes at least one programmable processor, which can be a special purpose or general purpose programmable processor that can receive data and instructions from a storage system, at least one input device, and at least one output device, and transmit data and instructions to the storage system, the at least one input device, and the at least one output device.

[0106] Computer programs for implementing the methods of the present invention may be written in any combination of one or more programming languages. These computer programs may be provided to a processor of a general-purpose computer, a special-purpose computer, or other programmable data processing device, such that when the computer program is executed by the processor, the functions / operations specified in the flowcharts and / or block diagrams are implemented. The computer program may be executed entirely on the machine, partially on the machine, as a stand-alone software package, partially on the machine and partially on a remote machine, or entirely on a remote machine or server.

[0107] In the context of the present invention, computer-readable storage media can be tangible media that can contain or store a computer program for use with an instruction execution system, device or equipment or used in combination with an instruction execution system, device or equipment. Computer-readable storage media can include but are not limited to electronic, magnetic, optical, electromagnetic, infrared or semiconductor systems, devices or equipment, or any suitable combination of the foregoing. Alternatively, computer-readable storage media can be machine-readable signal media. More specific examples of machine-readable storage media can include electrical connections based on one or more lines, portable computer disks, hard disks, random access memories (RAM), read-only memories (ROM), erasable programmable read-only memories (EPROM or flash memory), optical fibers, portable compact disk read-only memories (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination of the foregoing.

[0108] To provide interaction with a user, the systems and techniques described herein can be implemented on an electronic device having: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to the user; and a keyboard and pointing device (e.g., a mouse or trackball) through which the user can provide input to the electronic device. Other types of devices can also be used to provide interaction with the user; for example, the feedback provided to the user can be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user can be received in any form (including acoustic input, voice input, or tactile input).

[0109] The systems and techniques described herein can be implemented in a computing system that includes back-end components (e.g., as a data server), or a computing system that includes middleware components (e.g., an application server), or a computing system that includes front-end components (e.g., a user computer with a graphical user interface or web browser through which a user can interact with implementations of the systems and techniques described herein), or a computing system that includes any combination of such back-end components, middleware components, or front-end components. The components of the system can be interconnected by any form or medium of digital data communication (e.g., a communication network). Examples of communication networks include: a local area network (LAN), a wide area network (WAN), a blockchain network, and the Internet.

[0110] A computing system may include clients and servers. The clients and servers are typically remote from each other and typically interact via a communication network. This client-server relationship arises through computer programs running on the respective computers, creating a client-server relationship. The server may be a cloud server, also known as a cloud computing server or cloud host. This server is a hosting product within the cloud computing service ecosystem that addresses the management difficulties and limited scalability of traditional physical hosting and VPS services.

[0111] It should be understood that the various forms of the processes shown above can be used to reorder, add, or delete steps. For example, the steps described in the present invention can be performed in parallel, sequentially, or in a different order, as long as the desired results of the technical solution of the present invention can be achieved. This is not limited herein.

[0112] The above specific embodiments do not limit the scope of protection of the present invention. Those skilled in the art will appreciate that various modifications, combinations, sub-combinations, and substitutions may be made based on design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention are intended to be included within the scope of protection of the present invention.

Claims

1. A process automation method, characterized in that: The method comprises: In response to an input operation in the interactive interface, target parameter information corresponding to the target process task is obtained; the target parameter information includes a target process name, target process parameters, and equipment information; Constructing a process task list corresponding to the target process task based on the target process name and the target process parameters; Based on the equipment information, the target equipment is controlled to sequentially execute each target subtask in the process task list.

2. The method according to claim 1, characterized in that The constructing a process task list corresponding to the target process task based on the target process name and the target process parameter includes: Creating at least one target subtask based on the target process name and target process parameters; In response to the sequential selection operation of the at least one target subtask, a process task list corresponding to the target process task is obtained.

3. The method according to claim 2, characterized in that The creating at least one target subtask based on the target process name and the target process parameters includes: Constructing an empty subtask based on the target process parameters; Determine at least one initial process in the empty subtask from a preset process database based on the target process name to obtain a candidate subtask; In response to a parameter configuration operation on at least one initial process in the candidate subtasks, a target subtask is obtained.

4. The method according to claim 3, characterized in that The step of obtaining a target subtask in response to a parameter configuration operation on at least one initial process in the candidate subtasks includes: In response to the configuration operation of the fixed parameters of the at least one initial process, at least one first candidate process is obtained; wherein the parameter status of the first candidate process includes a completed state and an uncompleted state; Setting the background color of each of the first candidate processes based on a preset background color strategy; Deleting the first candidate process based on the background color of the first candidate process to obtain a second candidate process; In response to the sequential selection operation of the second candidate process, the target subtask is obtained.

5. The method according to claim 1, wherein After controlling the target device to sequentially execute each target subtask in the process task list based on the device information, the method further includes: Obtaining the execution status of each target subtask in the process task list; the execution status includes pending, in progress, completed or failed; The background color of the execution status of each target subtask is set based on the status background color strategy.

6. A process automation device, characterized in that: include: A parameter information acquisition module is used to obtain target parameter information corresponding to a target process task in response to an input operation in the interactive interface; The target parameter information includes target process name, target process parameters and equipment information; A process task list building module, used to build a process task list corresponding to the target process task based on the target process name and the target process parameters; A control module is used to control the target device to sequentially execute each target subtask in the process task list based on the device information.

7. The device according to claim 6, wherein The process task list construction module includes a subtask creation unit and a process task list construction unit: The subtask creating unit is configured to create at least one target subtask based on the target process name and target process parameters; The process task list construction unit is configured to obtain a process task list corresponding to the target process task in response to a sequential selection operation of the at least one target subtask.

8. An electronic device, characterized in that: include: one or more processors; a memory for storing one or more programs; When the one or more programs are executed by the one or more processors, the one or more processors implement the process automation method according to any one of claims 1 to 5.

9. A computer-readable storage medium having a computer program stored thereon, characterized in that: When the program is executed by a processor, the process automation method according to any one of claims 1 to 5 is implemented.

10. A computer program product, characterized in that The computer program product comprises a computer program, which, when executed by a processor, implements the process automation method according to any one of claims 1 to 5.

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