Flexible substrate processing device

Abstract

The invention discloses a flexible substrate processing device, and relates to the technical field of flexible device manufacturing, the flexible substrate processing device specifically comprises a feeding structure, a cleaning structure and a flexible substrate fixing assembly, and an inner cavity of the feeding structure is provided with a first conveying assembly matched with the flexible substrate fixing assembly; the discharging end of the feeding structure communicates with the feeding end of the cleaning structure, a blowing assembly and a freezing assembly are arranged between the feeding end and the discharging end of the feeding structure, the blowing assembly is located on the side, close to the feeding end of the feeding structure, of the freezing assembly, and a spraying disc and a dry ice spraying gun are arranged at the top end of an inner cavity of the cleaning structure; and an isolation spraying plate is arranged between the spraying disc and the dry ice spraying gun. According to the flexible substrate processing device, the composite processing technology of blowing, freezing, spraying cleaning and dry ice cleaning is adopted, cleaning of residual impurities on the surface of the flexible substrate is achieved, the blowing procedure and the freezing procedure are achieved in the feeding process of the flexible substrate, and the working efficiency of the device is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of flexible device manufacturing, in particular to a flexible substrate processing device. Background Art

[0002] A flexible substrate is a bendable circuit substrate made of flexible materials. It has the characteristics of lightweight, foldability, and high integration. It is widely used in flexible displays, wearable devices, flexible sensors and other fields. Compared with traditional rigid circuit boards, flexible substrates can adapt to complex three-dimensional spatial layouts and significantly improve the design freedom and portability of electronic products.

[0003] During the manufacturing process, flexible substrates usually need to be adhered to a rigid support substrate for precision processing (such as photolithography, coating, etc.), and then peeled off after the device is completed to release its flexible function. For example, the manufacturing of flexible OLED screens requires laser peeling or chemical peeling technology to separate the PI substrate from the glass carrier. However, the surface of the flexible substrate after peeling often retains glue layers, particulate contaminants and micro-defects, and cleaning and repair processes are required to ensure the reliability of subsequent processes.

[0004] Currently, wet cleaning is a commonly used technology for flexible substrate processing, but flexible materials are prone to swelling in highly polar solvents, resulting in dimensional instability or degradation of mechanical properties; and particles with smaller particle sizes are easily adsorbed on flexible substrates due to van der Waals forces, making wet cleaning removal efficiency low; based on this, the present application proposes a flexible substrate processing device. Summary of the Invention

[0005] The present invention provides a flexible substrate processing device, which solves the problems raised in the above background technology, that is, during the cleaning process, the flexible substrate is prone to swelling and deformation, and particles with smaller particle sizes are easily adsorbed on the flexible substrate due to van der Waals forces, resulting in low wet cleaning removal efficiency.

[0006] The present invention provides the following technical solution: a flexible substrate processing device, comprising a feeding structure, a cleaning structure, and a flexible substrate fixing assembly, wherein an inner cavity of the feeding structure is provided with a first conveying assembly adapted to the flexible substrate fixing assembly, a discharge end of the feeding structure is communicated with a feed end of the cleaning structure, a purge assembly and a freezing assembly are provided between the feed and discharge ends of the feeding structure, the purge assembly being located on a side of the freezing assembly near the feed end of the feeding structure, a spray tray and a dry ice spray gun being provided at the top end of the inner cavity of the cleaning structure, an isolation spray plate being provided between the spray tray and the dry ice spray gun, a second conveying assembly being provided at the bottom end of the inner cavity of the cleaning structure, an exhaust plate being provided at the air outlet end of the cleaning structure, and a first exhaust fan being provided outside the cleaning structure, an air inlet end of the first exhaust fan being connected to the air outlet end of the exhaust plate, an air outlet end of the first exhaust fan being connected to the air inlet end of the isolation spray plate via a first connecting pipe, and an air outlet end of the first exhaust fan being connected to the air inlet end of the purge assembly via a heat exchange assembly.

[0007] Preferably, the loading structure includes a first shell, and a first conveying component is provided on both sides of the inner cavity of the first shell. The first conveying component includes a conveyor mesh belt, and the outer surface of the conveyor mesh belt is evenly provided with support plates. The support plates between the two conveyor mesh belts are in a state of mutual alignment and form a bearing seat adapted to the flexible substrate fixing component.

[0008] Preferably, the flexible substrate fixing assembly includes a base, a groove is provided in the middle of the top of the base, the inner cavity of the groove is movably connected to a rotating mesh tube, the top of the rotating mesh tube is connected to a vacuum suction cup, and the top of the vacuum suction cup is provided with a flexible pad.

[0009] Preferably, the purge assembly includes a purge plate arranged on one side of the top end of the first shell and a second exhaust fan arranged on the other side of the top end of the first shell, the air inlet end of the second exhaust fan is provided with an exhaust plate, the exhaust plate and the purge plate are at the same height, the air inlet end of the purge plate is connected to the cooling fluid outlet of the heat exchange assembly through a purge pipe, and a first pressure relief valve is provided at one end of the purge pipe.

[0010] Preferably, the refrigeration component includes a cold air circulation unit arranged outside the first shell, a blowing plate connected to the air outlet end of the cold air circulation unit and an air suction plate connected to the return end of the cold air circulation unit, a second pressure relief valve is provided on the blowing plate, the air outlet end of the second pressure relief valve is connected to the return end of the cold air circulation unit, and a blowing plate is provided on the inner side of a straight section of a conveyor mesh belt, and a suction plate is provided on the inner side of the straight section of the other conveyor mesh belt, and the blowing plate and the suction plate are at the same height.

[0011] Preferably, a discharge port is provided on the side of the first shell close to the cleaning structure, and a push plate is provided on the side of the first shell away from the cleaning structure. The push plate is adapted to the discharge port and is connected to the first shell through an electric telescopic rod.

[0012] Preferably, the cleaning structure includes a second shell, a feed port is provided at one end of the second shell, a vacuum plate is provided at the other end of the second shell, a discharge port is provided on the vacuum plate, and the second conveying component extends to the outside of the cleaning structure through the discharge port at one end away from the feeding structure.

[0013] Preferably, the spray plate is connected to the top of the inner cavity of the second shell through a lifting structure, and the liquid inlet end of the spray plate is connected to a liquid inlet pipe.

[0014] Preferably, the dry ice spray gun is connected to the second shell through a movable structure, and a drain pipe is provided on one side of the bottom end of the second shell.

[0015] Preferably, the heat exchange component includes a heat exchanger, the heat exchange fluid channel inlet end of the heat exchanger is connected to the air outlet end of the first exhaust fan through an inlet pipe, the cooling fluid channel inlet end of the heat exchanger is connected to the air outlet end of the blower through an air inlet pipe, and the cooling fluid channel discharge end of the heat exchanger is connected to the air inlet end of the purge component.

[0016] Compared with the prior art, the present invention has the following beneficial effects: 1. This flexible substrate processing device uses a composite treatment process of purging, freezing, spray cleaning, and dry ice cleaning to clean residual impurities on the surface of the flexible substrate, reduce the adhesion between the impurities and the flexible substrate, improve impurity removal efficiency, increase the molecular chain density of the flexible substrate, and reduce the probability of swelling of the flexible substrate during the cleaning process. The purging and freezing processes are implemented during the flexible substrate loading process, improving the working efficiency of the device. The speed of air exchange between the loading structure and the external environment is low, reducing the impact of the external environment on the internal environment of the first shell and reducing the energy consumption of the device.

[0017] 2. The flexible substrate processing device fixes the flexible substrate to reduce the probability of deformation of the flexible substrate during the processing process; and the waste gas generated during the dry ice cleaning process can be reused. A part of the waste gas can cool the purge air to achieve low-temperature purge of the flexible substrate, improve the purge effect of the flexible substrate, and pre-cool the flexible substrate, thereby reducing the power consumption of the freezing component. The other part of the waste gas can be sprayed between the spray disk and the dry ice spray gun through the isolation spray plate to form an air wall to intercept the liquid splashing during the spraying process, thereby preventing the spray liquid from affecting the dry ice cleaning of the flexible substrate. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1This is a front view of the structure of the present invention; Figure 2 It is a schematic diagram of the back side of the structure of the present invention; Figure 3 This is a schematic diagram of the back side of the structural loading structure of the present invention; Figure 4 This is a schematic diagram of the internal structure of the structural feeding structure of the present invention; Figure 5 The structure of the present invention Figure 4 Front view schematic diagram; Figure 6 This is a schematic diagram of the cleaning structure of the present invention; Figure 7 This is a schematic diagram of the interior of the cleaning structure of the present invention; Figure 8 This is an exploded schematic diagram of the flexible substrate fixing assembly of the present invention; Figure 9 The structure of the present invention Figure 8 Schematic diagram looking up.

[0019] In the figure: 1. First shell; 2. Second shell; 3. Cold air circulation unit; 4. Purge plate; 5. Purge pipe; 6. Dry ice cleaning machine; 7. Lifting structure; 8. Liquid inlet pipe; 9. Second servo motor; 10. First exhaust fan; 11. First connecting pipe; 12. Exhaust pipe; 13. Blower; 14. First pressure relief valve; 15. Exhaust plate; 16. Conveyor belt; 17. First servo motor; 18. Second exhaust fan; 19. Conveyor mesh belt; 20. Discharge port; 21. Synchronous roller; 22. Support plate; 23. Inner isolation plate; 24. Blowing plate; 25. Second pipeline; 26. Second pressure relief valve; 27. Electric telescopic rod; 28. Push plate; 29. ​​Air suction plate; 30. First pipeline; 31. Base; 32. Groove; 33. Rotating mesh tube; 34. Vacuum suction cup; 35. Flexible pad; 36. Third servo motor; 37. Power supply; 38. Vacuum pump; 39. Feed port; 40. Air inlet pipe; 41. Inlet pipe; 42. Heat exchanger; 43. Spray plate; 44. Isolation spray plate; 45. First hydraulic telescopic rod; 46. Second hydraulic telescopic rod; 47. Dry ice spray gun; 48. Sealing pad; 49. Drain pipe. DETAILED DESCRIPTION

[0020] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0021] The present invention provides an embodiment: please refer to Figures 1-9A flexible substrate processing device includes a feeding structure, a cleaning structure and a flexible substrate fixing component. The feeding structure includes a first shell 1. A first conveying component is provided on both sides of the inner cavity of the first shell 1. The first conveying component includes a conveying mesh belt 19, two synchronous rollers 21 and a first servo motor 17. The top and bottom ends of the inner cavity of the first shell 1 are movably connected with synchronous rollers 21. The two synchronous rollers 21 are connected through the conveying mesh belt 19. The first servo motor 17 is connected to the first shell 1. The end of the output shaft of the first servo motor 17 is connected to the synchronous roller 21 through a reducer. When the first servo motor 17 rotates, it can drive the synchronous roller 21 connected thereto to rotate, and the synchronous roller 21 drives the conveying mesh belt 19 to rotate.

[0022] The outer surface of the conveyor mesh belt 19 is evenly provided with support plates 22. The support plates 22 between the two conveyor mesh belts 19 are aligned with each other and form a bearing seat adapted to the flexible substrate fixing assembly. Figure 4 and Figure 5 As shown, the inner cavity of the first housing 1 is provided with an inner isolation plate 23, the outer sidewall of which contacts the inner sidewall of the straight section of the conveyor mesh belt 19. Sealing gaskets 48 are connected to both sides of the inner cavity of the first housing 1, and the end of the support plate 22 away from the conveyor mesh belt 19 can contact the sealing gasket 48. The provision of the inner isolation plate 23 and the sealing gasket 48 can reduce the speed of air exchange between the first housing 1 and the external environment, thereby reducing the impact of the external environment on the internal environment of the first housing 1.

[0023] The feeding end of the loading structure is located at the top of the first housing 1. A discharge port 20 is provided on one side of the bottom end of the first housing 1. Discharge port 20 serves as the discharge end of the loading structure and is compatible with the flexible substrate fixing assembly. A push plate 28 is provided on the side of the first housing 1 away from the discharge port 20. Push plate 28 is compatible with the discharge port 20 and is connected to the first housing 1 via an electric telescopic rod 27. The position of push plate 28 can be changed under the action of the electric telescopic rod 27. During the loading process, when the flexible substrate fixing assembly is aligned with the discharge port 20, the electric telescopic rod 27 drives the push plate 28 to move, and the push plate 28 can push the flexible substrate fixing assembly out of the discharge port 20.

[0024] A purge assembly and a freezing assembly are provided between the feed end and the discharge end of the feeding structure. The purge assembly is located on the side of the freezing assembly close to the feed end of the feeding structure. The purge assembly includes a purge plate 4 provided on one side of the top of the first shell 1 and a second exhaust fan 18 provided on the other side of the top of the first shell 1. The air inlet end of the second exhaust fan 18 is provided with an exhaust plate, and the exhaust plate and the purge plate 4 are at the same height. The air inlet end of the purge plate 4 is provided with a purge pipe 5, and one end of the purge pipe 5 is provided with a first pressure relief valve 14. Through the provision of the purge assembly, when the flexible substrate placed on the flexible substrate fixing assembly moves between the purge plate 4 and the exhaust plate, the air flow ejected by the purge plate 4 can achieve the purge of the flexible substrate. The impurity air generated during the purge process can be discharged under the action of the second exhaust fan 18. Moreover, when the exhaust plate and the purge plate 4 are blocked by the flexible substrate fixing assembly, the excess gas in the purge pipe 5 is discharged through the first pressure relief valve 14, thereby ensuring the safety of the purge assembly.

[0025] The refrigeration component includes a cold air circulation unit 3 arranged outside the first shell 1, a blowing plate 24 connected to the air outlet end of the cold air circulation unit 3 and an air suction plate 29 connected to the return end of the cold air circulation unit 3, a second pressure relief valve 26 is provided on the blowing plate 24, the air outlet end of the second pressure relief valve 26 is connected to the return end of the cold air circulation unit 3, and a blowing plate 24 is provided on the inner side of the straight section of one conveyor mesh belt 19, and an air suction plate 29 is provided on the inner side of the straight section of the other conveyor mesh belt 19, the blowing plate 24 and the air suction plate 29 are at the same height, the air outlet end of the blowing plate 24 is in contact with the conveyor mesh belt 19, and the air inlet end of the air suction plate 29 is in contact with the other conveyor mesh belt 19. When the present application is in use, the gas blown out by the blowing plate 24 passes through the conveyor mesh belt 19 and can be blown onto the flexible substrate, thereby cooling the flexible substrate, and the air after heat exchange flows back to the cold air circulation unit 3 through the air suction plate 29. The cold air circulation unit 3 is a prior art. In one embodiment of the present application, the cold air circulation unit 3 cools the air discharged from the circulating fan through a liquid nitrogen freezer. The cooled air enters the inner cavity of the blowing plate 24 through the first pipe 30. The blowing plate 24 can transport the cooled air to the location of the flexible substrate, so that the flexible substrate is gradually cooled in the cold air environment. The air after heat exchange enters the air inlet end of the circulating fan through the second pipe 25 under the action of the circulating fan, realizing cold air circulation refrigeration.

[0026] From the above description, it can be seen that during use, the present device utilizes the loading structure to realize continuous loading of the flexible substrate to be processed, and during the loading process of the flexible substrate, the purge component is utilized to remove the floating dust adhering to the surface of the flexible substrate, and the freezing component is utilized to cool the flexible substrate, thereby reducing the adhesion between the dirt and the flexible substrate, making the dirt brittle, and improving the cleaning efficiency of the flexible substrate. In addition, during the loading process, under the synergistic action of the inner isolation plate 23 and the sealing gasket 48, the speed of air exchange between the first shell 1 and the external environment can be reduced, so that the inside of the first shell 1 is kept at a low temperature, so that the flexible substrate can be pre-cooled, thereby increasing the cooling speed of the flexible substrate and reducing the energy consumption of the present device.

[0027] The discharge end of the feeding structure is communicated with the feed end of the cleaning structure. The cleaning structure includes a second shell 2. One end of the second shell 2 is provided with a feed port 39. The discharge port 20 is in a communicated state with the feed port 39. The other end of the second shell 2 is provided with an air extraction plate 15. The air extraction plate 15 is provided with a discharge port. The inner cavity of the second shell 2 is provided with a second conveying assembly. The second conveying assembly is used to convey the flexible substrate fixing assembly. The end of the second conveying assembly away from the feeding structure extends to the outside of the cleaning structure through the discharge port. In one embodiment of the present application, the second conveying assembly includes a conveyor belt 16, a drive roller and a second servo motor 9. The inner cavity of the second shell 2 Transmission rollers are provided on the outside of the cavity and the second shell 2, and the two transmission rollers are connected through a conveyor belt 16. The second servo motor 9 is connected to the second shell 2, and the end of the output shaft of the second servo motor 9 is connected to a transmission roller through a reducer. When the second servo motor 9 rotates, it can drive the transmission roller connected to it to rotate, and the transmission roller drives the conveyor belt 16 to rotate. Holes are evenly provided on the conveyor belt 16, and the top of the conveyor belt 16 and the bottom of the discharge port 20 are at the same height. With this arrangement, under the action of the push plate 28, the flexible substrate fixing assembly can be pushed onto the conveyor belt 16, and the second conveying assembly can drive the flexible substrate to move inside the second shell 2.

[0028] A spray pan 43 and a dry ice spray gun 47 are provided at the top of the inner cavity of the cleaning structure. The spray pan 43 is located on the side of the dry ice spray gun 47 near the feed port 39. The spray pan 43 is connected to the top of the inner cavity of the second shell 2 via a lifting structure 7. The lifting structure 7 can be a hydraulic telescopic rod in the prior art. The liquid inlet end of the spray pan 43 is connected to a liquid inlet pipe 8. When in use, the lifting structure 7 is used to adjust the height of the spray pan 43 as needed. The cleaning liquid for cleaning the flexible substrate enters the inner cavity of the spray pan 43 through the liquid inlet pipe 8 and is sprayed onto the flexible substrate through the spray holes provided at the bottom of the inner cavity of the spray pan 43, thereby achieving spray cleaning of the flexible substrate. A drain pipe 49 is provided on one side of the bottom end of the second shell 2, and the sewage generated during the cleaning process is discharged through the drain pipe 49.

[0029] A dry ice cleaning machine 6 is provided on the outside of the second shell 2. The dry ice spray gun 47 of the dry ice cleaning machine 6 is connected to the second shell 2 via a movable structure. The dry ice cleaning machine 6 is a prior art and will not be described in detail here. The dry ice spray gun 47 can move horizontally and vertically under the action of the movable structure, and the position of the dry ice spray gun 47 can be changed to achieve cleaning of multiple positions of the flexible substrate. In one embodiment of the present application, the movable structure includes a first hydraulic telescopic rod 45 and a second hydraulic telescopic rod 46. The second hydraulic telescopic rod 46 is connected to the second shell 2. The output shaft end of the second hydraulic telescopic rod 46 is connected to the first hydraulic telescopic rod 45. The output shaft end of the first hydraulic telescopic rod 45 is connected to the dry ice spray gun 47. Under the action of the first hydraulic telescopic rod 45, the dry ice spray gun 47 can move horizontally. Under the action of the second hydraulic telescopic rod 46, the dry ice spray gun 47 can change its height.

[0030] An isolation spray plate 44 is provided between the spray disc 43 and the dry ice spray gun 47. A first exhaust fan 10 is provided outside the cleaning structure. The air inlet end of the first exhaust fan 10 is connected to the air outlet end of the exhaust plate 15 through the exhaust pipe 12. The air outlet end of the first exhaust fan 10 is connected to the air inlet end of the isolation spray plate 44 through the first connecting pipe 11. Under the action of the first exhaust fan 10, the gas generated during the dry ice cleaning process can be pumped into the inner cavity of the isolation spray plate 44. The gas in the inner cavity of the isolation spray plate 44 is sprayed between the spray disc 43 and the dry ice spray gun 47, forming an air wall, which can intercept the liquid splashing during the spraying process, thereby facilitating dry ice cleaning of flexible substrates. The outlet of the first exhaust fan 10 is connected to the air inlet of the purge assembly via a heat exchange assembly. The heat exchange assembly includes a heat exchanger 42, which is conventional and can be a tubular heat exchanger. The heat exchange fluid channel inlet of heat exchanger 42 is connected to the outlet of the first exhaust fan 10 via an inlet pipe 41. The cooling fluid channel inlet of heat exchanger 42 is connected to the outlet of blower 13 via an air inlet pipe 40. The cooling fluid channel outlet of heat exchanger 42 is connected to the air inlet of the purge assembly via a purge pipe 5. One end of the purge pipe 5 is provided with a first pressure relief valve 14. The heat exchange assembly allows the carbon dioxide generated after dry ice cleaning to cool the purge gas, achieving pre-cooling of the flexible substrate, reducing the adhesion between impurities and the flexible substrate, and improving the impurity removal effect of the flexible substrate. Furthermore, the air inlet of blower 13 is provided with an air filter. The air filter uses an activated carbon filter to filter impurities in the air, preventing the introduction of new impurities during the purge process.

[0031] The flexible substrate fixing assembly includes a base 31, with a groove 32 disposed in the middle of the top portion of the base 31. A rotating mesh tube 33 is movably connected to the inner cavity of the groove 32. A vacuum suction cup 34 is connected to the top of the rotating mesh tube 33. A flexible pad 35, which can be made of rubber, is mounted on the top of the vacuum suction cup 34. The base 31 also houses a third servo motor 36, a power supply 37, and a vacuum pump 38. The output shaft of the third servo motor 36 is connected to the rotating mesh tube 33 via a reducer. The air inlet of the vacuum pump 38 is connected to the inner cavity of the groove 32. The vacuum pump 38 creates a negative pressure connection between the flexible substrate placed on the flexible pad 35 and the vacuum suction cup 34, thereby securing the flexible substrate. The power supply 37 can be a conventional lithium battery.

[0032] The electrical appliances involved in this application are all existing technologies. Those skilled in the art can select appropriate models according to their needs. No limitation or detailed description is made here. Those skilled in the art understand the working principles and connection methods of the electrical appliances involved in this application. Through these people, all the electrical appliances in this application are connected to their corresponding power supplies through wires, and according to actual conditions, appropriate controllers are selected to meet control requirements. For specific connections and control sequences, please refer to the description below. The electrical connections between the electrical components are completed in a sequential working order. The detailed connection methods are well known in the art. The following mainly introduces the working principles and processes, and no further explanation of electrical appliance control is given.

[0033] In summary, when the flexible substrate processing device is used, the flexible substrate to be processed is placed on the flexible pad 35, the vacuum pump 38 is started, and the negative pressure connection between the flexible substrate and the vacuum suction cup 34 is achieved. The flexible substrate fixing assembly with the flexible substrate is placed on the supporting seat, and the two first servo motors 17 are used in conjunction with each other. Under the action of the two first servo motors 17, the supporting seat moves downward, and the supporting seat drives the flexible substrate to move downward. During the downward movement of the flexible substrate, the purge assembly is used to achieve dust cleaning, and the freezing assembly is used to achieve freezing. When the flexible substrate fixing assembly is aligned with the discharge port 20, the electric telescopic rod 27 drives the push plate 28 to push the flexible substrate fixing assembly onto the second conveying assembly, and the second conveying assembly drives the flexible substrate to move downward in the second housing. 2 moves in the inner cavity of the device. During this process, the flexible substrate is spray-cleaned and then dry-ice-cleaned. The cleaned flexible substrate is moved to the outside of the device. Under the action of the first exhaust fan 10, a portion of the gas generated during the dry ice cleaning process is pumped into the inner cavity of the isolation spray plate 44. The gas in the inner cavity of the isolation spray plate 44 is sprayed between the spray disk 43 and the dry ice spray gun 47, forming an air wall, which can intercept the liquid splashed during the spraying process, thereby facilitating dry ice cleaning of the flexible substrate. Another portion of the gas generated during the dry ice cleaning process cools the air entering the heat exchanger 42 in the heat exchanger 42. The cooled air enters the purge plate 4 along the purge pipe 5, thereby achieving low-temperature purge of the flexible substrate and improving the impurity removal efficiency.

[0034] The standard parts used in the present invention are all purchased from the market according to actual application requirements, and special-shaped parts can be customized according to the description in the specification and drawings. The specific connection method of each structure adopts conventional technical means such as mature bolt connection in the existing technology. The machinery, parts and equipment all adopt conventional models in the existing technology, which will not be described in detail here, and the materials of the various structural components of this application can be selected according to requirements, without limitation. The contents not described in detail in this specification belong to the existing technology known to professional and technical personnel in this field. Although the embodiments of the present invention have been shown and described, it can be understood by ordinary technicians in this field that various changes, modifications, replacements and modifications can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the attached claims and their equivalents.

Claims

1. A flexible substrate processing device, comprising a loading structure, a cleaning structure, and a flexible substrate fixing assembly, characterized in that: The inner cavity of the feeding structure is provided with a first conveying component adapted to the flexible substrate fixing component, the discharge end of the feeding structure is communicated with the feed end of the cleaning structure, a purge component and a freezing component are provided between the feed end and the discharge end of the feeding structure, the purge component is located on a side of the freezing component close to the feed end of the feeding structure, a spray plate (43) and a dry ice spray gun (47) are provided at the top of the inner cavity of the cleaning structure, and an isolation spray plate (44) is provided between the spray plate (43) and the dry ice spray gun (47). A second conveying assembly is provided at the bottom end of the inner cavity of the cleaning structure, an exhaust plate (15) is provided at the air outlet end of the cleaning structure, and a first exhaust fan (10) is provided outside the cleaning structure, the air inlet end of the first exhaust fan (10) is connected to the air outlet end of the exhaust plate (15), the air outlet end of the first exhaust fan (10) is connected to the air inlet end of the isolation spray plate (44) through a first connecting pipe (11), and the air outlet end of the first exhaust fan (10) is connected to the air inlet end of the purge assembly through a heat exchange assembly.

2. The flexible substrate processing device according to claim 1, wherein: The feeding structure comprises a first shell (1), first conveying assemblies are provided on both sides of the inner cavity of the first shell (1), the first conveying assembly comprises a conveying mesh belt (19), support plates (22) are evenly provided on the outer surface of the conveying mesh belt (19), and the support plates (22) between the two conveying mesh belts (19) are in a mutually aligned state and form a bearing seat adapted to the flexible substrate fixing assembly.

3. The flexible substrate processing device according to claim 1, wherein: The flexible substrate fixing assembly comprises a base (31), a groove (32) is provided in the middle of the top of the base (31), a rotating mesh tube (33) is movably connected to the inner cavity of the groove (32), a vacuum suction cup (34) is connected to the top of the rotating mesh tube (33), and a flexible pad (35) is provided on the top of the vacuum suction cup (34).

4. The flexible substrate processing device according to claim 2, wherein: The purge assembly comprises a purge plate (4) arranged on one side of the top end of the first shell (1) and a second exhaust fan (18) arranged on the other side of the top end of the first shell (1), the air inlet end of the second exhaust fan (18) is provided with an exhaust plate, the exhaust plate and the purge plate (4) are at the same height, the air inlet end of the purge plate (4) is connected to the cooling fluid outlet of the heat exchange assembly through a purge pipe (5), and one end of the purge pipe (5) is provided with a first pressure relief valve (14).

5. The flexible substrate processing device according to claim 2, wherein: The refrigeration assembly includes a cold air circulation unit (3) arranged outside the first shell (1), a blowing plate (24) connected to the air outlet end of the cold air circulation unit (3), and an air suction plate (29) connected to the return end of the cold air circulation unit (3), the blowing plate (24) is provided with a second pressure relief valve (26), the air outlet end of the second pressure relief valve (26) is connected to the return end of the cold air circulation unit (3), and the blowing plate (24) is provided on the inner side of the straight section of one conveyor mesh belt (19), and the air suction plate (29) is provided on the inner side of the straight section of the other conveyor mesh belt (19), and the blowing plate (24) and the air suction plate (29) are at the same height.

6. The flexible substrate processing device according to claim 2, wherein: A discharge port (20) is provided on a side of the first shell (1) close to the cleaning structure, and a push plate (28) is provided on a side of the first shell (1) away from the cleaning structure. The push plate (28) is adapted to the discharge port (20), and the push plate (28) is connected to the first shell (1) via an electric telescopic rod (27).

7. The flexible substrate processing device according to claim 1, wherein: The cleaning structure comprises a second shell (2), one end of the second shell (2) is provided with a feed port (39), the other end of the second shell (2) is provided with an air extraction plate (15), the air extraction plate (15) is provided with a discharge port, and the end of the second conveying assembly away from the feeding structure extends to the outside of the cleaning structure through the discharge port.

8. The flexible substrate processing device according to claim 7, characterized in that: The spray plate (43) is connected to the top of the inner cavity of the second shell (2) via a lifting structure (7), and the liquid inlet end of the spray plate (43) is connected to a liquid inlet pipe (8).

9. The flexible substrate processing device according to claim 7, characterized in that: The dry ice spray gun (47) is connected to the second shell (2) via a movable structure, and a liquid drain pipe (49) is provided on one side of the bottom end of the second shell (2).

10. The flexible substrate processing device according to claim 7, characterized in that: The heat exchange assembly comprises a heat exchanger (42), wherein the heat exchange fluid channel inlet end of the heat exchanger (42) is connected to the air outlet end of the first exhaust fan (10) via an inlet pipe (41), the cooling fluid channel inlet end of the heat exchanger (42) is connected to the air outlet end of the blower (13) via an air inlet pipe (40), and the cooling fluid channel outlet end of the heat exchanger (42) is connected to the air inlet end of the purge assembly.

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