Vacuum coating production line transfer system

Abstract

The application discloses a transfer system of a vacuum coating production line, which comprises a transfer device and a plurality of process chambers arranged around the transfer device. The transfer device comprises a rotating seat, a plurality of transfer manipulators for transferring workpiece carriers, and a rotating drive assembly for driving the rotating seat to rotate. The rotating seat is rotatably installed and can move to the position of any process chamber with the transfer manipulators. The transfer manipulators are installed on the rotating seat in a manner that can adjust the position around the rotating axis of the rotating seat through a position adjusting assembly. The transfer system of the vacuum coating production line has the advantages of simple structure, low manufacturing and maintenance cost, low control difficulty, stable and reliable transfer of workpiece carriers, flexible use, etc.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum coating equipment, in particular to a transfer system of a vacuum coating production line. BACKGROUND

[0002] Multi-chamber vacuum coating production line is the core equipment for modern coating industry to realize large-scale, high-efficiency and high-quality production. Such production line is usually composed of multiple process chambers connected in sequence and a supporting workpiece carrier conveying system.

[0003] In the current mainstream multi-chamber vacuum coating production line design, the process chambers are generally arranged in a linear series connection layout. Each process chamber is equipped with a set of independently driven conveying devices (such as rollers, chains or conveyors, etc.). When the workpiece carrier needs to be transferred between process chambers, the end-to-end connection of the conveying devices in adjacent process chambers is used to realize the transmission.

[0004] However, this traditional layout and conveying method has the following significant defects:

[0005] 1. Low space utilization: Linear series connection leads to linear growth of the overall length of the production line with the number of process chambers, occupying a large amount of factory space. Especially when there are many process steps (large number of process chambers), the excessively long linear layout has high requirements for the site and the problem of space waste is particularly prominent.

[0006] 2. Complex, high-cost and difficult-to-control conveying system: Each process chamber needs to be equipped with a set of independent driving mechanisms (motors, transmissions, control systems, etc.), resulting in complex equipment structure and numerous parts.

[0007] 3. Multiple independent driving systems significantly increase the manufacturing and maintenance costs of the equipment. Coordinating the actions of multiple independent driving units to achieve precise synchronization and relay transmission is complex in control logic and difficult in debugging and maintenance. The conveying system set in the process chamber occupies a lot of space, increases the overall structural size of the process chamber, and affects the installation and layout of other functional devices in the process chamber.

[0008] 4. Poor stability and positioning accuracy of workpiece carrier conveying: When the workpiece carrier is transferred between adjacent chambers, it needs to be handed over multiple times between two independently driven conveying devices. Each handover has the risk of cumulative positioning error, making it difficult to ensure high-precision and high-repeatability positioning of the carrier in the chamber and during the handover process. Synchronization deviation or mechanical clearance between driving units can easily cause the carrier to shake, jam or shift during transmission. SUMMARY

[0009] The technical problem solved by the present application is to overcome the deficiencies of the prior art, and to provide a transfer system for a vacuum coating production line, which is simple in structure, low in manufacturing and maintenance cost, low in control difficulty, stable and reliable in workpiece carrier transfer, and flexible in use.

[0010] To solve the above technical problems, the present application adopts the following technical solutions:

[0011] The transfer system for the vacuum coating production line comprises a transfer device and a plurality of process chambers arranged around the transfer device, the transfer device comprises a rotating seat, a plurality of transfer manipulators for transferring workpiece carriers, and a rotating drive assembly for driving the rotating seat to rotate, the rotating seat is rotatably installed and can move to the position of any process chamber with the transfer manipulators.

[0012] As a further improvement of the above technical solutions:

[0013] The position adjusting assembly comprises a moving seat connected to the transfer manipulator and a track provided on the rotating seat, the moving seat is installed on the track through a guide mechanism and can move along the track, and the position adjusting assembly further comprises a driving mechanism for driving the moving seat to move along the track to adjust the position.

[0014] The transfer manipulator comprises a base, an extension arm, and a clamp for picking and placing the workpiece carrier, the base is installed on the moving seat, the extension arm is installed on the base in a horizontal reciprocating manner through a translation assembly, and the clamp is installed on the extension arm in a height-adjustable manner through a lifting assembly.

[0015] The guide mechanism cooperates with the track to keep the horizontal reciprocating direction of the extension arm of the transfer manipulator always perpendicular to the rotating axis of the rotating seat.

[0016] The track extends along a circular arc trajectory with the rotating axis of the rotating seat as the center, the guide mechanism comprises a plurality of rollers rotatably installed on the moving seat, the plurality of rollers are separately provided on both sides of the track and clamp the track to guide the movement of the moving seat along the track.

[0017] The track is provided with a convex track portion, and the rollers are provided with an annular positioning groove clamped on the convex track portion.

[0018] The translation assembly comprises two first guide mechanisms arranged on both sides of the telescopic arm and a first driving mechanism for driving the horizontal reciprocating movement of the telescopic arm, the first guide mechanism comprises a first guide rail mounted on the telescopic arm and a first sliding block mounted on the base, the first guide rail and the first sliding block are in guiding cooperation, the first driving mechanism comprises a first gear rack mounted on the telescopic arm and a first gear mounted on the base and driven to rotate by a first motor, the first gear is in meshing with the first gear rack.

[0019] The lifting assembly comprises two second guide mechanisms and a second driving mechanism for driving the lifting movement of the clamp, the second guide mechanism comprises a second guide rail mounted on the clamp and a second sliding block mounted on the telescopic arm, the second guide rail and the second sliding block are in guiding cooperation, the second driving mechanism comprises a second gear rack mounted on the clamp and a second gear mounted on the telescopic arm and driven to rotate by a second motor, the second gear is in meshing with the second gear rack.

[0020] The position adjusting assembly enables the transfer robot to adjust the position between at least two adjacent process chambers.

[0021] The driving mechanism comprises a ring-shaped belt, a plurality of steering wheels 55 and a driving wheel driven to rotate by a rotary driving member, the driving wheel and the steering wheels are rotatably mounted on the rotating seat, the ring-shaped belt is wound around the driving wheel and the steering wheels, the ring-shaped belt has a driving section, the driving section is located on the side of the track corresponding to the rotating axis of the rotating seat, and the driving section is connected with the moving seat.

[0022] The moving seat and the driving section are connected through a movable connecting mechanism, the movable connecting mechanism allows the moving seat and the driving section to move away from and close to each other in the radial direction of the rotating seat.

[0023] The movable connecting mechanism comprises two connecting rods fixedly arranged on the moving seat and a connecting block connected to the driving section, the connecting block is inserted between the two connecting rods, and the two ends of the connecting block are provided with limiting portions for preventing the connecting block from escaping from the space between the two connecting rods.

[0024] The driving mechanism comprises a gear rack mounted on the track and a gear mounted on the moving seat and driven to rotate by a rotary driving member, the gear is in meshing with the gear rack.

[0025] Compared with the prior art, the present application has the following advantages:

[0026] The transfer system of the vacuum coating production line of the present application, a plurality of process chambers are arranged around the transfer device, only one rotating seat, a plurality of transfer manipulators and a set of rotating drive assemblies are provided, so as to realize taking and placing the workpiece carrier of each process chamber and transferring the workpiece carrier between each process chamber, the structure is simple and compact, the equipment manufacturing and maintenance cost is low, the control difficulty is low, the workpiece carrier does not need to be handed over for many times during the transfer process, the high precision and high repeatability positioning during the transfer process of the workpiece carrier can be ensured, the precision, stability and reliability of the workpiece carrier transfer are improved, meanwhile, the conveying system does not need to be arranged in the process chamber, the size of the process chamber can be reduced, the installation and layout of other functional devices in the process chamber are facilitated, in addition, the transfer manipulator can adjust the position on the rotating seat around the rotating shaft of the rotating seat, each transfer manipulator can also independently move the workpiece carrier within a certain range, the requirements of different production processes and production technologies are met, and the use flexibility is high. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 It is a top view structural schematic diagram of the transfer system in embodiment 1.

[0028] Figure 2 It is a front view structural schematic diagram of the transfer device in embodiment 1.

[0029] Figure 3 It is a top view structural schematic diagram of the transfer device in embodiment 1.

[0030] Figure 4 It is a three-dimensional structural schematic diagram of the position adjusting assembly in embodiment 1.

[0031] Figure 5 It is a bottom view structural schematic diagram of the position adjusting assembly in embodiment 1.

[0032] Figure 6 It is a three-dimensional structural schematic diagram of the transfer manipulator in embodiment 1.

[0033] Figure 7 It is a front view structural schematic diagram of the transfer manipulator in embodiment 1.

[0034] LEGEND:

[0035] 1, process chamber; 2, rotating seat; 3, transfer manipulator; 31, base; 32, telescopic arm; 33, clamp; 34, translation assembly; 35, lifting assembly; 4, rotating drive assembly; 5, position adjusting assembly; 51, moving seat; 52, track; 521, convex rail part; 53, roller; 531, annular positioning groove; 54, drive wheel; 55, steering wheel; 56, annular belt; 561, driving section; 57, connecting rod; 58, connecting block; 581, limiting part; 100, workpiece carrier. DETAILED DESCRIPTION

[0036] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0037] Example 1

[0038] like Figures 1 to 3 As shown, the transfer system of the vacuum coating production line in this embodiment includes a transfer device and multiple process chambers 1 arranged around the transfer device. The process chambers 1 do not have a conveying system for transporting workpiece carriers 100. The transfer device includes a rotating seat 2, multiple transfer manipulators 3 for transporting workpiece carriers 100, and a rotation drive assembly 4 for driving the rotating seat 2 to rotate. The rotating seat 2 is rotatably installed and can move the transfer manipulators 3 to any position in the process chamber 1 by rotation. The transfer manipulators 3 are installed on the rotating seat 2 by a position adjustment assembly 5 so that their positions can be adjusted around the rotation axis of the rotating seat 2. The transfer system of this vacuum coating production line has multiple process chambers 1 arranged around the transfer device. It only requires one rotating seat 2, multiple transfer robots 3, and a set of rotation drive components 4 to realize the picking and placing of workpiece carriers 100 in each process chamber 1 and the transfer of workpiece carriers 100 between process chambers 1. Its structure is simple and compact, with low equipment manufacturing and maintenance costs and low control difficulty. The workpiece carriers 100 do not need to be handed over multiple times during the transfer between process chambers 1, which can ensure high precision and high repeatability of positioning of workpiece carriers 100 during the transfer process, improve the accuracy and stability of workpiece carrier transfer. At the same time, there is no need to set up a conveying system in the process chamber 1, which can reduce the size of the process chamber 1 and facilitate the installation and layout of other functional devices in the process chamber 1. In addition, the transfer robots 3 can adjust their position on the rotating seat 2 around the rotation axis of the rotating seat 2. Each transfer robot 3 can also move independently within a certain range to transfer the workpiece carriers 100, which can transfer the workpiece carriers 100 between process chambers 1 more flexibly to meet the needs of different production processes and production techniques. Its usage flexibility is high.

[0039] In this embodiment, the position adjustment component 5 includes a movable seat 51 connected to the transfer robot 3 and a track 52 disposed on the rotating seat 2. The movable seat 51 is mounted on the track 52 by a guide mechanism and can move along the track 52. The position adjustment component 5 also includes a drive mechanism for driving the movable seat 51 to move along the track 52 to adjust its position. This position adjustment component 5 has a simple structure and low cost.

[0040] In this embodiment, as Figure 6 and Figure 7As shown, the transfer robot 3 comprises a base 31, a telescopic arm 32 and a gripper 33 for taking and placing the workpiece carrier 100, the base 31 is mounted on the moving seat 51, the telescopic arm 32 is mounted on the base 31 in a horizontal reciprocating manner through a translation assembly 34, and the gripper 33 is mounted on the telescopic arm 32 in a height-adjustable manner through a lifting assembly 35. The translation assembly 34 drives the telescopic arm 32 to reciprocate horizontally to bring the workpiece carrier 100 into and out of the process chamber 1, and the lifting assembly 35 drives the gripper 33 to move to different heights to lower and lift the workpiece carrier 100, thereby achieving taking and placing the workpiece carrier 100 and bringing the workpiece carrier 100 into the process chamber 1. The transfer robot 3 has the advantages of simple structure, easy control and stable and reliable operation. The above-mentioned gripper 33 adopts a conventional mechanism for taking and placing the workpiece carrier 100.

[0041] In this embodiment, the guide mechanism cooperates with the track 52 to keep the horizontal reciprocating direction of the telescopic arm 32 of the transfer robot 3 always perpendicular to the rotation axis of the rotating seat 2. When the transfer robot 3 moves to the position of each process chamber 1, the path of the horizontal reciprocating movement of the telescopic arm 32 driving the gripper 33 is consistent with the relative angle of each process chamber 1. In this way, even if the inlet and outlet of the process chamber 1 are arranged relatively narrow, the telescopic arm 32 can still drive the gripper 33 to normally enter and exit each process chamber 1 and take and place the workpiece carrier 100 in a set position and posture, ensuring the accuracy and stable reliability of taking and placing the workpiece carrier 100 and reducing the control difficulty.

[0042] In this embodiment, as shown in Figure 4 and Figure 5 As shown, the track 52 extends along a circular arc trajectory centered on the rotation axis of the rotating seat 2, and the guide mechanism comprises a plurality of rollers 53 rotatably mounted on the moving seat 51, and the plurality of rollers 53 are arranged on both sides of the track 52 and clamp the track 52 to guide the movement of the moving seat 51 along the track 52. The assembly structure of the plurality of rollers 53 and the track 52 can ensure that the horizontal reciprocating direction of the telescopic arm 32 of the transfer robot 3 is perpendicular to the rotation axis of the rotating seat 2 when the transfer robot 3 moves to any position along the track 52, and has the advantages of simple structure, low cost and good stability of the transfer robot 3.

[0043] In this embodiment, the track 52 is provided with a convex track portion 521, and the roller 53 is provided with an annular positioning groove 531 clamped on the convex track portion 521, which can improve the stability, movement accuracy and carrying capacity of the transfer robot 3.

[0044] In the embodiment, the translation assembly 34 comprises two first guide mechanisms arranged on both sides of the telescopic arm 32 and a first driving mechanism for driving the horizontal reciprocating movement of the telescopic arm 32. The first guide mechanism comprises a first guide rail mounted on the telescopic arm 32 and a first sliding block mounted on the base 31. The first guide rail and the first sliding block are in guiding cooperation. The first driving mechanism comprises a first rack mounted on the telescopic arm 32 and a first gear mounted on the base 31 and driven to rotate by a first motor. The first gear is in meshing engagement with the first rack. The rotation of the first gear driven by the first motor can force the telescopic arm 32 to move horizontally and reciprocatingly through the first rack. The translation assembly 34 has simple structure, is easy to control and is stable and reliable in operation.

[0045] In the embodiment, the lifting assembly 35 comprises two second guide mechanisms and a second driving mechanism for driving the lifting movement of the clamp 33. The second guide mechanism comprises a second guide rail mounted on the clamp 33 and a second sliding block mounted on the telescopic arm 32. The second guide rail and the second sliding block are in guiding cooperation. The second driving mechanism comprises a second rack mounted on the clamp 33 and a second gear mounted on the telescopic arm 32 and driven to rotate by a second motor. The second gear is in meshing engagement with the second rack. The rotation of the second gear driven by the second motor can force the clamp 33 to lift and move through the second rack. The lifting assembly 35 has simple structure, is easy to control and is stable and reliable in operation.

[0046] In the embodiment, the position adjusting assembly 5 enables the transfer robot 3 to adjust the position between two adjacent process chambers 1. That is, each transfer robot 3 can transfer the workpiece carrier 100 between two adjacent process chambers 1 through the position adjusting assembly 5. In other embodiments, the position adjusting assembly 5 can also be configured to enable the transfer robot 3 to adjust the position between three or more adjacent process chambers 1.

[0047] In the embodiment, the driving mechanism comprises a driving wheel 54 driven to rotate by a rotary driving member, a plurality of deflection wheels 55 and a looped belt 56. The driving wheel 54 and the deflection wheels 55 are rotatably mounted on the rotating seat 2. The looped belt 56 is wound around the driving wheel 54 and the deflection wheels 55. The looped belt 56 has a driving section 561. The driving section 561 is located on the side of the track 52 corresponding to the rotating axis of the rotating seat 2 and is connected to the moving seat 51. The rotation of the driving wheel 54 driven by the rotary driving member can make the looped belt 56 move forward and backward, and the driving section 561 correspondingly move reciprocatingly, thereby driving the moving seat 51 to move reciprocatingly along the track 52, so as to adjust the position of the transfer robot 3. The driving mechanism has the effect of buffering because the looped belt 56 is used to drive the moving seat 51. The impact during starting and stopping is small, the shaking amplitude of the transfer robot 3 can be reduced, the transfer robot 3 is not easy to be damaged, and the requirements for the structural strength and rigidity of the mechanical arm are reduced. Preferably, the driving wheel 54 and the deflection wheels 55 are gears, and the looped belt 56 is a toothed belt, which has high precision.

[0048] In the embodiment, the moving seat 51 and the driving section 561 are connected through a movable connecting mechanism, which allows the moving seat 51 and the driving section 561 to move away from and close to each other in the radial direction of the rotating seat 2. In this way, the driving section 561 does not need to be strictly parallel to the track 52, and the moving seat 51 can be smoothly driven to reciprocate along the track 52, which can reduce the number of steering wheels 55 and the difficulty and cost of assembly and debugging.

[0049] In the embodiment, the movable connecting mechanism includes two connecting rods 57 fixed on the moving seat 51 and a connecting block 58 connected to the driving section 561, the connecting block 58 is inserted between the two connecting rods 57, and the two ends of the connecting block 58 are provided with limiting portions 581 to prevent the connecting block 58 from coming out of the space between the two connecting rods 57. The connecting rods 57 move relative to the connecting block 58 between the limiting portions 581 at the two ends of the connecting block 58. The movable connecting mechanism has a simple structure and is easy to manufacture and assemble.

[0050] The plurality of process chambers 1 in the embodiment can be configured to complete any one process in the coating process, such as cleaning, preheating, coating, etc., and the specific configuration can refer to the existing coating machine.

[0051] Embodiment 2

[0052] The transfer system of the vacuum coating production line in the embodiment is basically the same as that in Embodiment 1, and the main difference is that, in the embodiment, the driving mechanism includes a rack installed on the track 52 and a gear installed on the moving seat 51 and driven to rotate by a rotary driving member, and the gear is engaged with the rack. The rotary driving member can be an electric motor. The driving mechanism in the embodiment has a simpler structure and lower cost.

[0053] The above only describes the preferred embodiments of the present application, and the protection scope of the present application is not limited to the above embodiments. Any improvement and transformation obtained by those skilled in the art without departing from the technical concept of the present application should also be considered as the protection scope of the present application.

Claims

1. A transfer system for a vacuum coating production line, characterized in that: The system includes a transfer device and multiple process chambers (1) arranged around the transfer device. The transfer device includes a rotating seat (2), multiple transfer manipulators (3) for transferring workpiece carriers (100), and a rotation drive assembly (4) for driving the rotating seat (2) to rotate. The rotating seat (2) is rotatably mounted and can move the transfer manipulators (3) to any position in any process chamber (1) by rotation. The transfer manipulators (3) are mounted on the rotating seat (2) by a position adjustment assembly (5) in a manner that allows them to adjust their position around the rotation axis of the rotating seat (2). The position adjustment assembly (5) includes a movable seat (51) connected to the transfer manipulator (3) and a track (52) provided on the rotating seat (2). The movable seat (51) is installed on the track (52) by a guide mechanism and can move along the track (52). The position adjustment assembly (5) also includes a drive mechanism for driving the movable seat (51) to move along the track (52) to adjust its position.

2. The transfer system of the vacuum coating production line according to claim 1, characterized in that: The transfer robot (3) includes a base (31), a telescopic arm (32), and a clamp (33) for picking up and placing workpieces on a carrier (100). The base (31) is mounted on a movable seat (51). The telescopic arm (32) is mounted on the base (31) in a horizontal reciprocating motion via a translation component (34). The clamp (33) is mounted on the telescopic arm (32) in a height-adjustable manner via a lifting component (35).

3. The transfer system of the vacuum coating production line according to claim 2, characterized in that: The guiding mechanism works in conjunction with the track (52) to ensure that the horizontal reciprocating motion direction of the telescopic arm (32) of the transfer robot (3) is always perpendicular to the rotation axis of the rotating seat (2).

4. The transfer system of the vacuum coating production line according to claim 2, characterized in that: The track (52) extends along an arc-shaped trajectory centered on the rotation axis of the rotating seat (2). The guiding mechanism includes multiple rollers (53) rotatably mounted on the movable seat (51). The multiple rollers (53) are distributed on both sides of the track (52) and clamp the track (52) to guide the movable seat (51) to move along the track (52).

5. The transfer system of the vacuum coating production line according to claim 4, characterized in that: The track (52) is provided with a convex rail portion (521), and the roller (53) is provided with an annular positioning groove (531) that is fitted onto the convex rail portion (521).

6. The transfer system of the vacuum coating production line according to claim 2, characterized in that: The translation component (34) includes two first guide mechanisms disposed on both sides of the telescopic arm (32) and a first drive mechanism for driving the telescopic arm (32) to reciprocate horizontally. The first guide mechanism includes a first guide rail mounted on the telescopic arm (32) and a first slider mounted on the base (31). The first guide rail and the first slider are guided and engaged. The first drive mechanism includes a first rack mounted on the telescopic arm (32) and a first gear mounted on the base (31) and driven to rotate by a first motor. The first gear meshes with the first rack.

7. The transfer system of the vacuum coating production line according to claim 2, characterized in that: The lifting assembly (35) includes two second guide mechanisms and a second drive mechanism for driving the lifting motion of the clamp (33). The second guide mechanism includes a second guide rail mounted on the clamp (33) and a second slider mounted on the telescopic arm (32). The second guide rail and the second slider are guided and engaged. The second drive mechanism includes a second rack mounted on the clamp (33) and a second gear mounted on the telescopic arm (32) and driven to rotate by a second motor. The second gear meshes with the second rack.

8. The transfer system of the vacuum coating production line according to claim 1, characterized in that: The position adjustment component (5) enables the transfer robot (3) to adjust its position between at least two adjacent process chambers (1).

9. The transfer system of the vacuum coating production line according to any one of claims 1 to 8, characterized in that: The drive mechanism includes an annular belt (56), a plurality of steering wheels (55), and a drive wheel (54) driven to rotate by a rotary drive component. The drive wheel (54) and the steering wheels (55) are rotatably mounted on the rotating seat (2). The annular belt (56) is wound around the drive wheel (54) and the steering wheels (55). The annular belt (56) has a drive section (561). The drive section (561) is located on one side of the track (52) corresponding to the rotation axis of the rotating seat (2). The drive section (561) is connected to the movable seat (51).

10. The transfer system of the vacuum coating production line according to claim 9, characterized in that: The movable seat (51) and the drive section (561) are connected by a movable connection mechanism that allows the movable seat (51) and the drive section (561) to move away from and closer to each other in the radial direction of the rotating seat (2).

11. The transfer system of the vacuum coating production line according to claim 10, characterized in that: The movable connection mechanism includes two connecting rods (57) fixed on the movable seat (51) and a connecting block (58) connected to the drive section (561). The connecting block (58) is inserted between the two connecting rods (57), and the two ends of the connecting block (58) are provided with limiting parts (581) to prevent the connecting block (58) from coming out of the space between the two connecting rods (57).

12. The transfer system of the vacuum coating production line according to any one of claims 1 to 8, characterized in that: The drive mechanism includes a rack mounted on a track (52) and a gear mounted on a movable seat (51) and driven to rotate by a rotary drive member, the gear meshing with the rack.

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