Gas inlet device for epitaxial furnace

Abstract

This invention belongs to the field of epitaxial growth technology, specifically an epitaxial furnace gas inlet device, including a furnace body. An inlet cylinder is connected to one side of the furnace body. A rotating ring is sleeved on the surface of the inlet cylinder. Multiple first magnetic blocks are uniformly fixed to the annular circumference of the rotating ring, and a toothed ring is fixed to the side of the rotating ring. This epitaxial furnace gas inlet device, by incorporating the toothed ring, allows the first magnetic blocks on the rotating ring surface to rotate synchronously when the toothed ring rotates during use. The first magnetic blocks and second magnetic blocks are magnetically attracted, and the second magnetic blocks, under the influence of the magnetic force, drive a rotating plate to rotate synchronously. The rotating plate drives the rotating cylinder to rotate, which in turn drives a stirring rod to rotate. The stirring rod mixes the process gas inside the inlet cylinder during rotation. The entire process does not require the output end of a drive motor to be inserted into the inlet cylinder, avoiding frictional heat generation that accelerates the aging of the sealing gasket, thus promoting long-term use and achieving further optimization of the existing inlet container stirring structure.

Description

Technical Field

[0001] This invention belongs to the field of epitaxial growth technology, specifically an epitaxial furnace gas inlet device. Background Technology

[0002] Silicon carbide semiconductors possess excellent properties such as a large bandgap, excellent stability, high thermal conductivity, high critical breakdown field strength, and high saturated electron drift velocity, making them ideal semiconductor materials for fabricating high-temperature, high-frequency, high-power, and high-radiation power electronic devices. Compared to traditional silicon devices, silicon carbide devices can operate normally under electric field strengths 10 times greater than those of silicon devices. Furthermore, the silicon carbide material used to fabricate silicon carbide devices is typically silicon carbide epitaxial wafers grown on silicon carbide substrates.

[0003] A silicon carbide epitaxial furnace is a reaction chamber used to grow silicon carbide epitaxial wafers. CVD (chemical vapor deposition) is typically used to grow these wafers. Therefore, an inlet container is installed outside the furnace to receive external process gases and mix different process gases. The mixed process gases are then injected into the furnace through conduits for CVD. This process requires thorough mixing of the different process gases within the inlet container. Current inlet methods involve setting up multiple branch pipes connected to a main pipe, controlling the gas from the branch pipes to enter the main pipe at different times for mixing. To improve the mixing process... To ensure uniform mixing, an internal stirring structure is installed in the air intake container. An external motor drives this structure, with its output end penetrating the air intake container and connecting to the stirring structure. During actual use, maintaining a tight seal is crucial. A sealing gasket must be installed at the point where the external motor output end penetrates the air intake container, and its sealing performance must be checked regularly to prevent aging and compromised sealing. The continuous rotation of the external motor output end generates friction with the sealing gasket, which generates heat and accelerates its aging, hindering long-term use. Therefore, the existing air intake container stirring structure requires further optimization.

[0004] Therefore, the present invention provides an epitaxial furnace air inlet device. Summary of the Invention

[0005] In order to overcome the shortcomings of the prior art, at least one technical problem raised in the background art is solved.

[0006] The technical solution adopted by the present invention to solve its technical problem is as follows: The present invention provides an epitaxial furnace gas inlet device, including a furnace body, a gas inlet cylinder connected to one side of the furnace body, a rotating ring sleeved on the surface of the gas inlet cylinder, a plurality of first magnetic blocks uniformly fixed to the annular circumference of the rotating ring, a toothed ring fixed to the side of the rotating ring, a gear meshing with the bottom end of the toothed ring, and a drive motor externally connected to the gear for driving the gear to rotate.

[0007] The air intake cylinder has a rotating blade inside, which is rotatably connected to the inner wall of the end of the air intake cylinder. Multiple second magnetic blocks are uniformly fixed to the annular circumference of the rotating blade. The first magnetic block and the second magnetic block are magnetically attracted to each other. A rotating cylinder is fixed to the side of the rotating blade, and multiple stirring rods are fixed to the side of the rotating cylinder. An air intake pipe is connected to the end of the air intake cylinder.

[0008] Preferably, the surface of the rotating cylinder is provided with a plurality of first through holes, the first through holes are provided at the connection position between the rotating cylinder and the stirring rod, the inside of the stirring rod is provided with a through cavity communicating with the first through holes, the side of the rotating plate is provided with a through hole, the rotating cylinder is connected to the through hole, and the end of the air inlet pipe located inside the air inlet cylinder is connected to the through hole and rotatably connected.

[0009] Preferably, a filling block is inserted into the interior of the through cavity, a groove is formed on the side of the filling block, a slider is slidably connected inside the groove, a connecting spring is fixed between the slider and the inner wall of the groove, a support block is fixed to the side of the slider outside the groove, an inclined plate is provided at the end of the support block near the stirring rod and fixed to the surface of the stirring rod, the inclined surface of the support block and the inclined plate are slidably connected, a fixing plate is fixed to the end of the filling block outside the through cavity, a guide rod is fixed to the surface of the fixing plate and the guide rod passes through the stirring rod.

[0010] Preferably, the surface of the rotating cylinder is evenly provided with a plurality of second through holes, and the surface of the rotating cylinder is fixedly connected with a plurality of air tubes communicating with the second through holes. An air block is slidably connected inside the air tube. The air block is located at the end of the air tube away from the rotating cylinder. A buffer spring is fixedly connected to the side of the air block. A bracket is fixedly connected to the end of the buffer spring away from the air block. The bracket is fixedly connected to the inner wall of the air tube.

[0011] The rotating cylinder has multiple sealing plates fixed inside for sealing the second through hole. The sealing plate has an air hole communicating with the second through hole on the side facing the center of the rotating cylinder. An inflatable air bladder is fixed on the side of the sealing plate facing the center of the rotating cylinder.

[0012] Preferably, during the process of the rotating cylinder slowing down and coming to a standstill, the expansion bladder remains inflated even when the through cavity inside the stirring rod is blocked by the filling block.

[0013] Preferably, a pair of limiting rings are fitted onto the surface of the air intake cylinder, and the pair of limiting rings restrict the position of the rotating ring and the toothed ring on the air intake cylinder.

[0014] Preferably, a pair of limiting rings are rotatably provided with multiple balls on opposite sides.

[0015] Preferably, an air pump is connected to the surface of the air inlet cylinder.

[0016] Preferably, the center of the rotating plate coincides with the center of the rotating ring.

[0017] Preferably, the internal structure of the air intake cylinder is made of corrosion-resistant plastic.

[0018] The beneficial effects of this invention are as follows:

[0019] 1. The epitaxial furnace gas inlet device of the present invention, by setting a toothed ring; when the toothed ring rotates during use, it drives the first magnetic block on the surface of the rotating ring to rotate synchronously. The first magnetic block and the second magnetic block have magnetic attraction. Therefore, when the first magnetic block rotates, the second magnetic block will drive the rotating plate to rotate synchronously under the action of magnetic force. The rotating plate drives the rotating cylinder to rotate, and the rotating cylinder drives the stirring rod to rotate. When the stirring rod rotates, it mixes the process gas inside the gas inlet cylinder. The whole process does not require the output end of the drive motor to be inserted into the gas inlet cylinder, avoiding frictional heat generation that leads to accelerated aging of the sealing gasket, which is beneficial for long-term use and realizes further optimization of the existing gas inlet container stirring structure.

[0020] 2. The epitaxial furnace air intake device of the present invention includes a limiting ring; a pair of limiting rings restrict the position of the rotating ring and the toothed ring on the air intake cylinder; preventing the rotating ring and the toothed ring from moving on the surface of the air intake cylinder, which would cause the toothed ring and the drive gear to lose their meshing position. Attached Figure Description

[0021] The invention will now be further described with reference to the accompanying drawings.

[0022] Figure 1 This is a perspective view of the present invention;

[0023] Figure 2 This is a side view of the present invention;

[0024] Figure 3 This is a schematic diagram of the toothed ring connection structure of the present invention;

[0025] Figure 4 This is a schematic diagram of the air intake cylinder of the present invention;

[0026] Figure 5 This is a schematic diagram of the internal structure of the air intake cylinder of the present invention;

[0027] Figure 6 This is a schematic diagram of the rotating cylinder of the present invention;

[0028] Figure 7 This is a schematic diagram of the stirring rod connection structure of the present invention;

[0029] Figure 8 This is a schematic diagram of the slider connection structure of the present invention;

[0030] Figure 9 This is a schematic diagram of the air tube connection structure of the present invention;

[0031] Figure 10 This is a schematic diagram showing the position of the inflatable block in this invention;

[0032] Figure 11 This is a schematic diagram of the inflatable block connection structure of the present invention.

[0033] In the diagram: 1. Furnace body; 11. Air inlet cylinder; 2. Rotating ring; 21. First magnetic block; 22. Gear ring; 23. Drive gear; 24. Drive motor; 3. Rotating plate; 30. Second magnetic block; 31. Rotating cylinder; 32. Stirring rod; 33. First through hole; 34. Filling block; 341. Fixing plate; 342. Guide rod; 35. Slide groove; 36. Sliding block; 37. Connecting spring; 38. Support block; 39. Inclined plate; 4. Second through hole; 41. Air inlet pipe; 42. Sealing plate; 43. Expansion airbag; 44. Air inlet block; 45. Buffer spring; 46. Bracket; 5. Air inlet pipe. Detailed Implementation

[0034] To make the technical means, creative features, objectives and effects of this invention easier to understand, the invention will be further described below in conjunction with specific embodiments.

[0035] like Figures 1 to 2 As shown, an epitaxial furnace air intake device according to an embodiment of the present invention includes a furnace body 1. An air intake cylinder 11 is connected to one side of the furnace body 1. A rotating ring 2 is sleeved on the surface of the air intake cylinder 11. A plurality of first magnetic blocks 21 are uniformly fixed to the annular circumferential surface of the rotating ring 2. A toothed ring 22 is fixed to the side of the rotating ring 2. A gear 23 is meshed with the bottom end of the toothed ring 22. A drive motor 24 is externally connected to the gear 23. The drive motor 24 is used to drive the gear 23 to rotate.

[0036] The air intake cylinder 11 is rotatably equipped with a rotating plate 3. The rotating plate 3 is rotatably connected to the inner wall of the end of the air intake cylinder 11. Multiple second magnetic blocks 30 are uniformly fixed to the annular circumferential surface of the rotating plate 3. The first magnetic block 21 and the second magnetic block 30 are magnetically attracted. A rotating cylinder 31 is fixed to the side of the rotating plate 3. Multiple stirring rods 32 are fixed to the side of the rotating cylinder 31. An air intake pipe 5 is connected to the end of the air intake cylinder 11.

[0037] In actual use, the air intake container needs to be kept sealed. A sealing gasket needs to be installed at the point where the external motor output end passes through the air intake container, and the sealing effect of the gasket needs to be checked regularly to avoid aging of the gasket affecting the sealing effect. However, when the external motor output end rotates continuously, it will rub against the sealing gasket, and the friction will generate heat, which will accelerate the aging of the sealing gasket. Therefore, the existing air intake container stirring structure needs further optimization. To solve the above problems, the embodiment of the present invention sets up a toothed ring 22, a rotating plate 3, etc. The specific usage process is as follows: In use, an air pump body is connected to the air intake pipe 5. The air pump body fills the air intake cylinder 11 with external process gas through the air intake pipe 5, and then controls the drive motor 24 to start. The drive motor 24 drives the starter. The gear 23 rotates, driving the gear ring 22 to rotate on the surface of the air inlet cylinder 11. When the gear ring 22 rotates, it will drive the first magnetic block 21 on the surface of the rotating ring 2 to rotate synchronously. The first magnetic block 21 and the second magnetic block 30 have magnetic attraction. Therefore, when the first magnetic block 21 rotates, the second magnetic block 30 will drive the rotating plate 3 to rotate synchronously under the action of magnetic force. The rotating plate 3 drives the rotating cylinder 31 to rotate. The rotating cylinder 31 will drive the stirring rod 32 to rotate. When the stirring rod 32 rotates, it mixes the process gas inside the air inlet cylinder 11. The whole process does not require the output end of the drive motor 24 to be inserted into the air inlet cylinder 11, avoiding frictional heat generation that leads to accelerated aging of the sealing gasket, which is beneficial for long-term use and realizes further optimization of the existing air inlet container stirring structure.

[0038] It should be noted that an air pump is installed between the furnace body 1 and the air inlet cylinder 11. After the process gas is mixed in the air inlet cylinder 11, the mixed process gas can be injected into the furnace body 1 through the air pump.

[0039] The surface of the rotating cylinder 31 is provided with multiple first through holes 33. The first through holes 33 are located at the connection between the rotating cylinder 31 and the stirring rod 32. The inside of the stirring rod 32 is provided with a through cavity that communicates with the first through holes 33. The side of the rotating plate 3 is provided with a through hole. The rotating cylinder 31 is connected to the through hole. One end of the air inlet pipe 5 located inside the air inlet cylinder 11 is connected to the through hole and is rotatably connected. When process gas is injected into the air inlet cylinder 11 through the air inlet pipe 5, the air inlet pipe 5 will inject the process gas into the rotating cylinder 31 through the through hole, and then enter the through cavity inside the stirring rod 32 through the first through hole 33. Finally, it will be discharged through the through cavity. As the stirring rod 32 rotates inside the air inlet cylinder 11, the process gas will be discharged at different positions in the air inlet cylinder 11, thereby accelerating the mixing speed of the process gas and improving the mixing efficiency of the process gas.

[0040] A filling block 34 is inserted into the interior of the through cavity. A groove 35 is formed on the side of the filling block 34. A slider 36 is slidably connected inside the groove 35. A connecting spring 37 is fixed between the slider 36 and the inner wall of the groove 35. A support block 38 is fixed to the side of the slider 36 outside the groove 35. An inclined plate 39 is fixed to the surface of the stirring rod 32 at the end of the support block 38 near the stirring rod 32. The inclined surfaces of the support block 38 and the inclined plate 39 are slidably connected. A fixing plate 341 is fixed to the end of the filling block 34 outside the through cavity. A guide rod 342 is fixed to the surface of the fixing plate 341 and passes through the stirring rod 32. When the stirring rod 32 rotates, the support block 38 is subjected to centrifugal force, causing the support block 38 to drive the slider 36 to move away from the rotating cylinder 31. The slider 36 slides in the groove 35, compressing the connecting spring 37. When the support block 38 moves, the bottom end of the support block 38 will move along the inclined surface of the inclined plate 39. The stirring rod 32 moves, supported by the inclined surface of the inclined plate 39, which in turn drives the support block 38 to move linearly relative to the stirring rod 32. The support block 38 drives the filling block 34 to move synchronously through the slider 36. When the filling block 34 moves, it opens the blocked through cavity, allowing the process gas entering the rotating cylinder 31 to enter the through cavity in the stirring rod 32 through the first through hole 33, and then exit through the through cavity. During this process, the fixing plate 341 drives the guide rod 342 to move synchronously. Since the guide rod 342 passes through the stirring rod 32, the filling block 34 will move linearly relative to the through cavity and will not leave the through cavity. When the process gas is mixed, the stirring rod 32 stops rotating. Then, under the action of the connecting spring 37, the slider 36 drives the support block 38 to reset. When the support block 38 returns to the initial position, the filling block 34 synchronously resets to the position of blocking the through cavity. The through cavity is blocked, preventing the process gas inside the air inlet cylinder 11 from flowing back into the through cavity.

[0041] The surface of the rotating cylinder 31 is evenly provided with a plurality of second through holes 4. The surface of the rotating cylinder 31 is fixedly connected with a plurality of air tubes 41 communicating with the second through holes 4. An air block 44 is slidably connected inside the air tube 41. The air block 44 is located at the end of the air tube 41 away from the rotating cylinder 31. A buffer spring 45 is fixedly connected to the side of the air block 44. A bracket 46 is fixedly connected to the end of the buffer spring 45 away from the air block 44. The bracket 46 is fixedly connected to the inner wall of the air tube 41.

[0042] Multiple sealing plates 42 for sealing the second through hole 4 are fixedly connected inside the rotating cylinder 31. The sealing plate 42 has an air hole communicating with the second through hole 4 on the side facing the center of the rotating cylinder 31. An inflatable air bladder 43 is fixedly connected to the side of the sealing plate 42 facing the center of the rotating cylinder 31.

[0043] When the rotating cylinder 31 is not rotating, the air block 44 inside the air inlet pipe 41 is pulled towards the sealing plate 42 under the action of the buffer spring 45. The air inside the air inlet pipe 41 is squeezed through the air hole opened on the side of the sealing plate 42 and injected into the expansion bladder 43, causing the expansion bladder 43 to expand inside the rotating cylinder 31, driving the process gas inside the rotating cylinder 31 into the through cavity inside the stirring rod 32. When the rotating cylinder 31 rotates, the air block 44 returns to a position away from the sealing plate 42 under the action of centrifugal force, thereby causing the expansion bladder 43 to contract and stop expanding to avoid affecting the flow of process gas inside the rotating cylinder 31.

[0044] During the deceleration and cessation process of the rotating cylinder 31, the expansion bladder 43 remains inflated even when the through cavity inside the stirring rod 32 is blocked by the filling block 34. This allows the process gas inside the rotating cylinder 31 to be squeezed into the through cavity inside the stirring rod 32 during the deceleration process. As the rotating cylinder 31 further decelerates, the filling block 34 will further reset and squeeze out the process gas inside the through cavity. Finally, the through cavity is blocked, realizing the evacuation of the process gas inside the rotating cylinder 31 and avoiding the residue from affecting the purity of the subsequent process gas.

[0045] A pair of limiting rings 25 are fitted onto the surface of the air intake cylinder 11. The pair of limiting rings 25 restrict the position of the rotating ring 2 and the toothed ring 22 on the air intake cylinder 11; to prevent the rotating ring 2 and the toothed ring 22 from moving on the surface of the air intake cylinder 11, which would cause the toothed ring 22 to lose its meshing position with the drive gear 23.

[0046] Multiple balls are rotatably arranged on the opposite side of a pair of limit rings 25; this reduces the friction between the rotating ring 2 and the toothed ring 22, prevents frictional wear between the rotating ring 2 and the toothed ring 22, and extends the service life of the rotating ring 2 and the toothed ring 22.

[0047] An air pump 110 is connected to the surface of the air inlet cylinder 11. During initial use, the air pump 110 expels the air inside the air inlet cylinder 11 to ensure the purity of the process gas that is subsequently introduced. The center of the rotating plate 3 coincides with the center of the rotating ring 2, so that the straight line position of the corresponding first magnetic block 21 and the second magnetic block 30 is minimized, and the magnetic attraction between the corresponding first magnetic block 21 and the second magnetic block 30 is maximized, ensuring the effect of driving the rotating plate 3 to rotate by magnetic force.

[0048] The internal structure of the air intake cylinder 11 is made of corrosion-resistant plastic, which improves the service life of the air intake cylinder 11 and its internal structure.

[0049] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. An epitaxial furnace gas inlet device, characterized in that: The furnace includes a furnace body, an air inlet cylinder is connected to one side of the furnace body, a rotating ring is sleeved on the surface of the air inlet cylinder, a plurality of first magnetic blocks are uniformly fixed to the annular circumference of the rotating ring, a toothed ring is fixed to the side of the rotating ring, a gear is meshed with the bottom end of the toothed ring, and a drive motor is externally connected to the gear for driving the gear to rotate. The air intake cylinder has a rotating blade inside, which is rotatably connected to the inner wall of the end of the air intake cylinder. Multiple second magnetic blocks are uniformly fixed to the annular circumference of the rotating blade. The first magnetic block and the second magnetic block are magnetically attracted to each other. A rotating cylinder is fixed to the side of the rotating blade, and multiple stirring rods are fixed to the side of the rotating cylinder. An air intake pipe is connected to the end of the air intake cylinder.

2. An epitaxial furnace gas inlet device according to claim 1, wherein: The surface of the rotating cylinder is provided with a plurality of first through holes, the first through holes being located at the connection position between the rotating cylinder and the stirring rod. The interior of the stirring rod is provided with a through cavity communicating with the first through holes. The side of the rotating plate is provided with a through hole, the rotating cylinder is communicating with the through hole, and the end of the air inlet pipe located inside the air inlet cylinder is communicating with and rotatably connected to the through hole.

3. An epitaxial furnace gas inlet apparatus according to claim 2, wherein: A filling block is inserted into the interior of the through cavity. A groove is formed on the side of the filling block. A slider is slidably connected inside the groove. A connecting spring is fixed between the slider and the inner wall of the groove. A support block is fixed to the side of the slider outside the groove. An inclined plate is fixed to the surface of the stirring rod at the end of the support block near the stirring rod. The inclined surfaces of the support block and the inclined plate are slidably connected. A fixing plate is fixed to the end of the filling block outside the through cavity. A guide rod is fixed to the surface of the fixing plate. The guide rod passes through the stirring rod.

4. The epitaxial furnace gas inlet device according to claim 3, characterized in that: The rotating cylinder has a plurality of second through holes evenly distributed on its surface. The rotating cylinder has a plurality of air tubes that communicate with the second through holes fixedly connected to its surface. An air block is slidably connected inside the air tube. The air block is located at the end of the air tube away from the rotating cylinder. A buffer spring is fixedly connected to the side of the air block. A bracket is fixedly connected to the end of the buffer spring away from the air block. The bracket is fixedly connected to the inner wall of the air tube. The rotating cylinder has multiple sealing plates fixed inside for sealing the second through hole. The sealing plate has an air hole communicating with the second through hole on the side facing the center of the rotating cylinder. An inflatable air bladder is fixed on the side of the sealing plate facing the center of the rotating cylinder.

5. The epitaxial furnace gas inlet device according to claim 4, characterized in that: During the process of the rotating cylinder slowing down and coming to a stop, the expansion bladder is first inflated to fill the inside of the rotating cylinder, and then the through cavity inside the stirring rod is sealed by the filling block.

6. The epitaxial furnace gas inlet device according to claim 1, characterized in that: A pair of limiting rings are fitted onto the surface of the air intake cylinder, which restrict the position of the rotating ring and the toothed ring on the air intake cylinder.

7. The epitaxial furnace gas inlet device according to claim 6, characterized in that: A pair of limit rings are rotatably equipped with multiple balls on opposite sides.

8. The epitaxial furnace gas inlet device according to claim 1, characterized in that: An air pump is connected to the surface of the air inlet cylinder.

9. The epitaxial furnace gas inlet device according to claim 1, characterized in that: The center of the rotating plate coincides with the center of the rotating ring.

10. The epitaxial furnace gas inlet device according to claim 1, characterized in that: The internal structure of the air intake cylinder is made of corrosion-resistant plastic.

Images