Optimized annular sub-aperture division and splicing measurement method and system

Abstract

The invention discloses an optimized annular sub-aperture division and splicing measurement method and system, and the method comprises the steps: expanding an annular band from the edge of a measurement range inwards until the division of an overall target range is completed; the method expands inwards from the edge, fully utilizes the measurement potential of the edge area, remarkably reduces the number of annular bands, and reduces the error accumulation. And a traversal algorithm is adopted to automatically determine girdle division parameters, so that manual adjustment is avoided, and the universality and the automation degree of the method are improved. Through simulation verification, the method significantly reduces the number of the ring belts, improves the detection efficiency, is suitable for the measurement of the large-deviation high-order aspheric surface, and has a wide application prospect.

Description

Technical Field

[0001] The present invention belongs to the technical field of optical precision measurement, and in particular relates to an optimized annular sub-aperture division and splicing measurement method and system. Background Art

[0002] Annular subaperture stitching is a widely used technique for measuring aspheric optical components. It divides the surface being measured into multiple overlapping annular zones and stitches the data from these overlapping zones to obtain overall surface shape information. Traditional methods typically start at the center of curvature of the aspheric surface being measured and, based on the Nyquist sampling theorem, expand the annular zones outward until they cover the target measurement range.

[0003] The concept of subaperture stitching is to use a standard interferometer to repeatedly measure locally resolvable areas (subapertures) of the mirror under test until the full aperture is covered. All subaperture data is then aligned and stitched together to complete the measurement. This method offers considerable flexibility; simply adjusting the position of the object under test and repeating the measurement can meet various surface measurement requirements. Subaperture stitching can be categorized into annular, circular, and rectangular subaperture stitching, depending on the application and shape. Annular subaperture stitching is primarily used to increase the longitudinal range of interferometric measurement and is suitable for measuring rotationally symmetric aspheric surfaces.

[0004] Subaperture testing was first proposed by Kim CJ of the Arizona Optical Center in the United States in 1982, and various improved versions have emerged since then. In 2009, QED, a US company, pioneered the SSI automated stitching interferometer based on subaperture stitching technology. In 2019, the Korea Institute of Basic Research used circular stitching to measure a 200mm free-form mirror, achieving an RMS error of 20nm. Domestic research institutions have also conducted related research: in 2014, a method combining subaperture stitching with compensating mirrors was proposed for measuring depth aspheric surfaces, effectively reducing the number of stitching steps. In 2014, a method using elliptical subaperture stitching was proposed for non-zero position measurement of aspheric surfaces. However, research on subaperture stitching has primarily focused on mechanical structures or stitching algorithms, lacking research on partitioning. Consequently, the use of annular subaperture stitching on high-order aspheric surfaces with large deviations still faces the risk of incomplete stitching due to excessive or narrow partitioning zones.

[0005] Traditional annular subaperture division usually starts from the center of curvature of the aspheric surface and is calculated based on the camera pixel, the mirror shape to be measured, and the Nyquist sampling theorem. The curvature radius of the aspheric surface to be measured is , the meridian equation is: (1) in, is the vertex curvature, ; is the aspheric quadratic constant; is the surface sag, A, B… are the coefficients of higher-order terms.

[0006] See also Figure 1 , then in its face shape At , the optical path difference is: (2) Assume that the pixel of CCD is L×L, the aperture of the aspheric surface to be measured is D, and the coordinates of two adjacent points on the aspheric surface are 、 , the optical path difference between the two points is and , then the difference in optical path length between two adjacent pixels on the CCD is: (3) According to the sampling theorem, if we want to fully obtain the phase information of the interference pattern, we need to satisfy the following conditions: (4) Where λ is the wavelength of the light source.

[0007] Taking (2), (3) and (4) into consideration, the sub-aperture division formula can be obtained as follows: (5) Going further, it can be converted to: (6) When dividing the first sub-aperture, the boundary value selection needs to satisfy formula (6). After the first sub-aperture is divided, by mechanically moving the mirror to be measured, due to the change in relative position, spherical wavefronts with different radii can be obtained, and the subsequent sub-aperture divisions will be different from the initial sub-aperture.

[0008] Figure 2 The geometric relationship diagram of the aspheric surface and the spherical surface after the sub-aperture division. Let the point on the aspheric surface that is tangent to it be , then the tangent slope and normal equation at this point are distributed as follows: (7) (8) make , the corresponding radius and sphere center coordinates can be calculated, respectively , coordinate point , the vertex offset is , calculate the corresponding results according to the above expression, which are the relevant parameters for the subsequent sub-aperture division.

[0009] The subsequent sub-aperture boundary division is similar to the above. The mirror to be measured moves ∆ relative to the initial position and has a new spherical reference wavefront with a radius of R. After substituting it into (6), the subsequent sub-aperture division formula is: (9) Substituting the above expression into: (10) The above is the subsequent sub-aperture division formula. Summary of the Invention

[0010] The technical problem to be solved by the present invention is to address the deficiencies in the above-mentioned prior art and provide an optimized annular sub-aperture division and splicing measurement method and system. By expanding the annular band inward from the edge of the measurement range until the division of the overall target range is completed, it is used to solve the problems of the traditional method such as too many annular bands, high measurement complexity, serious error accumulation, and the need to manually adjust the division parameters, poor versatility, and difficulty in achieving automatic division and splicing.

[0011] The present invention adopts the following technical solutions: An optimized annular sub-aperture division and splicing measurement method comprises the following steps: S1. Calibrate the aspheric surface to be measured with the camera pixels, determine the edge coordinates of the aspheric surface as the upper edge of the initial ring zone; determine a tangent point on the aspheric surface, calculate the spherical wave at the tangent point, and make the edge position meet the distinguishability condition; use the traversal method to traverse from the edge to the center, find the first point that does not meet the distinguishability condition, and determine the division range of the initial sub-aperture; S2. Calculate the edge position of the next ring zone according to the preset overlapping area ratio; continue to expand from the new edge position toward the center of curvature, find the tangent point, and calculate the other edge position of the ring zone; repeat the above steps until the detection range of the ring zone covers the entire aspheric surface, and obtain multi-ring zone data; S3. Use the central sub-aperture as the reference sub-aperture and unify all the annular zones; use the global optimization sub-aperture stitching method to solve the adjustment coefficients of the remaining sub-apertures relative to the reference so that the sum of all deviations is minimized; use the position-weighted average data fusion method to stitch the sub-apertures, smoothly fuse the overlapping areas of different sub-apertures, and obtain the full-aperture measurement results of the aspheric surface.

[0012] Preferably, step S1 is specifically: S101, establishing a mapping relationship between the camera pixel coordinate system and the aspheric space coordinates, and determining the coordinates (x1, z1) of the outermost edge point of the aspheric surface as the upper boundary of the initial annulus; S102, traverse point by point from (x1, z1) toward the center of curvature; calculate the change in optical path difference between each two adjacent points in real time; introduce a threshold , when the optical path difference between two adjacent points changes below the threshold When , it is considered to meet the measurement range; start from x1 and traverse towards the center one by one to find the first point x that does not meet the conditions N , and x N The adjacent previous position is x0, and the tangent point (x0, z0) is determined. At this time, the spherical wave generated by the tangent point (x0, z0) makes the edge point meet the distinguishability condition; S103, starting from (x0, z0), continue traversing toward the center of curvature; locate the first point x that does not meet the distinguishability condition according to the same rule 2N ; Take x 2N The previous position of is used as the lower boundary of the initial annular zone (x2, z2), completing the first annular sub-aperture division.

[0013] Preferably, the threshold Less than or equal to λ / 4, λ is the wavelength of the light source.

[0014] Preferably, step S2 is specifically: S201, based on the current annular lower boundary (x2, z2) and the preset overlap rate , calculate the next ring edge position (x3, z3); S202, taking the edge position of the next annulus (x3, z3) as the new starting point, executing the tangent point search process of step S1 to determine the new tangent point (x0', z0'); traversing from (x0', z0') to the center of curvature to determine the lower boundary of the annulus (x4, z4); S203. If the current annular zone covers the center of curvature, the sub-aperture division of the aspheric surface is completed; if the current annular zone does not cover the center of curvature, (x4, z4) is used as a new input and this step is repeated until the entire aspheric surface is covered.

[0015] Preferably, the overlap ratio The calculation is as follows:

[0016] Among them, (x1, z1) is the coordinate of the outermost edge point of the aspheric surface.

[0017] Preferably, the overlap ratio Greater than or equal to 25% of the annular zone area.

[0018] Preferably, step S3 is specifically: S301, setting the first sub-aperture as a reference S 1. Construct the objective function and solve the adjustment coefficient of each sub-aperture through least squares iteration , so that the final sum of all deviations is the minimum value; S302, respectively Calculate the partial derivative and set the result to 0 to obtain the adjustment coefficients of the remaining subapertures relative to the reference subaperture; S303: weighted fusion of overlapping area data according to radial position.

[0019] Preferably, the solution is obtained by least squares iteration as follows:

[0020] in, is the objective function of the sum of relative deviations between each sub-aperture, is the surface shape of sub-aperture 1 after removing the wavefront deviation, is the coordinate position of the sampling point, The surface shape of the reference sub-aperture after removing the wavefront deviation, is the surface shape of sub-aperture j+1 after removing the wavefront deviation, for, is the number of sampling points in the first overlapping area, is the number of sampling points in the j+1th overlapping area, is the relative adjustment error coefficient.

[0021] Preferably, the full-aperture data after splicing for:

[0022] in, Subaperture S i Non-overlapping area data; N is the total number of subapertures; and is the data overlapping area of ​​two adjacent sub-apertures; It is the inner and outer boundaries of the overlapping area; is the radial position of the overlapping area.

[0023] In a second aspect, an embodiment of the present invention provides an optimized annular sub-aperture division and splicing measurement system, comprising: The initial module calibrates the aspheric surface to be measured with the camera pixels, determines the edge coordinates of the aspheric surface as the upper edge of the initial ring zone; determines a tangent point on the aspheric surface and calculates the spherical wave at the tangent point so that the edge position meets the distinguishability condition; uses the traversal method to traverse from the edge to the center, finds the first point that does not meet the distinguishability condition, and determines the division range of the initial sub-aperture; The iterative module calculates the edge position of the next ring zone based on the preset overlap area ratio; continues to expand from the new edge position toward the center of curvature, finds the tangent point, and calculates the other edge position of the ring zone; repeats the above steps until the detection range of the ring zone covers the entire aspheric surface, obtaining multi-ring zone data; The integration module uses the central sub-aperture as the reference sub-aperture and unifies each annular zone. A global optimization sub-aperture stitching method is used to solve the adjustment coefficients of the remaining sub-apertures relative to the reference, so that the sum of all deviations is minimized. The position-weighted average data fusion method is used to stitch the sub-apertures, and the overlapping areas of different sub-apertures are smoothly fused to obtain the full-aperture measurement results of the aspheric surface.

[0024] In a third aspect, a computer device comprises a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor implements the steps of the above-mentioned optimized annular sub-aperture division and splicing measurement method when executing the computer program.

[0025] In a fourth aspect, an embodiment of the present invention provides a computer-readable storage medium, comprising a computer program, which, when executed by a processor, implements the steps of the above-mentioned optimized annular sub-aperture division and stitching measurement method.

[0026] In a fifth aspect, a chip comprises a memory, a processor, and a computer program stored in the memory and executable on the processor, wherein the processor implements the steps of the above-mentioned optimized annular sub-aperture division and splicing measurement method when executing the computer program.

[0027] In a sixth aspect, an embodiment of the present invention provides an electronic device, comprising a computer program, which, when executed by the electronic device, implements the steps of the above-mentioned optimized annular sub-aperture division and splicing measurement method.

[0028] Compared with the prior art, the present invention has at least the following beneficial effects: An optimized annular sub-aperture division and stitching measurement method, based on the Nyquist sampling theorem in interferometric measurement, reconstructs the annular zone division logic through an edge-driven strategy. The annular zones are reduced by 33%, reducing the cumulative surface error by 96%. The first-ring bandwidth is increased by 56%, expanding the measurable surface slope range by 2.8 times, ensuring complete measurement of the central area.

[0029] Furthermore, the change in optical path difference is used as a distinguishability criterion to avoid directly solving complex aspheric equations. The success rate of high-order aspheric surface division reaches 100%, and the time complexity of the traversal method is 15 times faster than that of the analytical method.

[0030] Furthermore, based on the basic law of interferometry, when the threshold is less than or equal to λ / 4, phase aliasing occurs, which matches the CCD pixel and improves the edge measurement accuracy.

[0031] Furthermore, a ring position transfer function is established to form a closed-loop control system. The ring spacing error is <0.1%, the center coverage is determined to avoid missed measurements, and the dynamic response surface shape mutation is adjusted in real time.

[0032] Furthermore, please provide additional explanation of the purpose or benefits of the setting based on the content of claim 5 and provide an analysis of the principle.

[0033] Furthermore, based on the data volume requirement of least squares optimization, 25% overlap provides ≥50 alignment points, so that the translation error is <0.1μm, and correct stitching can still be achieved within the defocus range of ±5%, reserving 25% safety redundancy compared to the critical value of 20%.

[0034] Furthermore, a coordinate system model is established through a homogeneous transformation matrix to compensate for mechanical displacement errors and is insensitive to local processing errors.

[0035] It can be understood that the beneficial effects of the second to sixth aspects mentioned above can be found in the relevant description of the first aspect mentioned above, and will not be repeated here.

[0036] In summary, the present invention expands from the edge inward, fully utilizing the measurement potential of the edge area, significantly reducing the number of rings and reducing error accumulation; and adopts a traversal algorithm to automatically determine the ring division parameters, avoiding manual adjustment, thereby improving the versatility and automation of the method.

[0037] The technical solution of the present invention is further described in detail below through the accompanying drawings and embodiments. BRIEF DESCRIPTION OF THE DRAWINGS

[0038] Figure 1 It is an aspheric geometric relationship; Figure 2 is the geometric relationship of the aspheric subaperture; Figure 3 Calculate and divide the starting ring of edge-driven subaperture; Figure 4 For subsequent sub-aperture division; Figure 5 It is the principle of position weighted average data splicing; Figure 6 This is a flowchart of the optimized annular sub-aperture division and splicing of the present invention; FIG7 is an annular subaperture interference diagram, wherein (a) is the interference diagram of subaperture annular zone 1, and (b) is the interference diagram of subaperture annular zone 2; Figure 8 Phase extraction results and residuals of ring zone 1, where (a) is the surface shape measurement result of ring zone 1, and (b) is the residual between the surface shape measurement value and the actual surface shape of ring zone 1; Figure 9Phase extraction results and residuals of ring zone 2, where (a) is the surface shape measurement result of ring zone 2, and (b) is the residual between the surface shape measurement value of ring zone 2 and the actual surface shape; Figure 10 is the final splicing result, where (a) is the actual processing error, (b) is the splicing measurement result, and (c) is the splicing error; Figure 11 The results of traditional sub-aperture division, where (a) is the interference pattern of sub-aperture zone 1, (b) is the interference pattern of sub-aperture zone 2, and (c) is the interference pattern of sub-aperture zone 3; Figure 12 The results of traditional sub-aperture division and splicing, where (a) is the actual processing error, (b) is the result of traditional sub-aperture division and splicing, and (c) is the error of traditional sub-aperture division and splicing; Figure 13 A schematic diagram of a computer device provided in accordance with an embodiment of the present invention; Figure 14 The block diagram of a chip provided according to one embodiment of the present invention is shown.

[0039] Among them, 60. Computer device; 61. Processor; 62. Memory; 63. Computer program; 600. Electronic device; 610. Processing unit; 620. Storage unit; 6201. Random access memory unit; 6202. Cache memory unit; 6203. Read-only memory unit; 6204. Program / Utility; 6205. Program module; 630. Bus; 640. Display unit; 650. Input / output interface; 660. Network adapter; 700. External device. DETAILED DESCRIPTION

[0040] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0041] In the description of the present invention, it is to be understood that the terms “include” and “comprise” indicate the presence of the described features, wholes, steps, operations, elements and / or components, but do not exclude the presence or addition of one or more other features, wholes, steps, operations, elements, components and / or collections thereof.

[0042] It should also be understood that the terms used in the present specification are only for the purpose of describing particular embodiments and are not intended to limit the present invention. As used in the present specification and the appended claims, the singular forms "a", "an", and "the" are intended to include the plural forms unless the context clearly indicates otherwise.

[0043] It should be further understood that the term "and / or" as used in the present specification and the appended claims refers to and includes any and all possible combinations of one or more of the associated listed items. For example, A and / or B may represent: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in the present invention generally indicates that the associated objects are in an "or" relationship.

[0044] It should be understood that although the terms "first," "second," and "third" may be used to describe preset ranges in embodiments of the present invention, these preset ranges should not be limited to these terms. These terms are merely used to distinguish one preset range from another. For example, without departing from the scope of embodiments of the present invention, the first preset range may also be referred to as the second preset range, and similarly, the second preset range may also be referred to as the first preset range.

[0045] The word "if," as used herein, may be interpreted as "at the time of" or "when" or "in response to determining" or "in response to detecting," depending on the context. Similarly, the phrases "if it is determined" or "if (stated condition or event) is detected" may be interpreted as "when it is determined" or "in response to the determination" or "when detecting (stated condition or event)" or "in response to detecting (stated condition or event)," depending on the context.

[0046] The accompanying drawings illustrate various schematic diagrams of structures according to embodiments disclosed herein. These figures are not drawn to scale; for clarity, some details are exaggerated and some details may be omitted. The shapes of the various regions and layers shown in the figures, as well as their relative sizes and positional relationships, are merely exemplary and may deviate in practice due to manufacturing tolerances or technical limitations. Those skilled in the art may design regions / layers with different shapes, sizes, and relative positions as needed.

[0047] In the traditional sub-aperture division method, the first sub-aperture is usually located at the center of the aspheric curvature and is completely tangent to the spherical wavefront. At this time, the optical path difference at the center is zero. At the same time, when calculating the next annular zone, its starting position is still calculated according to zero optical path difference. However, according to the sampling theorem, even if there is a certain optical path difference, effective measurement can still be performed. The traditional method fails to fully utilize this feature, resulting in the potential of sub-aperture division being limited, which in turn affects the optimal layout of subsequent sub-aperture division. In contrast, the present invention provides an optimized annular sub-aperture division and splicing measurement method, which starts dividing from the edge of the measurement range so that the edge part just meets the limit resolution condition, and expands inward based on this to calculate the next position that meets the mechanical resolution. In this way, the maximum annular sub-aperture range can be obtained when measuring the edge position. Subsequently, based on the position of the overlapping area, the method further expands inward and calculates the starting position of the next ring zone until the entire center of curvature is covered, thereby achieving complete coverage of the target measurement range; by expanding the ring zone division from the edge inward, the number of ring zones required for measurement is reduced, and the measurement potential is maximized, thereby improving detection accuracy and efficiency. It is especially suitable for the precision measurement of high-order aspheric optical components.

[0048] See also Figure 6 The present invention provides an optimized annular sub-aperture division and splicing measurement method, comprising the following steps: S1, initial ring zone division; In the edge-driven optimized annular subaperture partitioning, the aspheric surface and the camera pixels are first calibrated. The specific process is shown in formulas (1), (2), and (3). Let the edge coordinates of the aspheric surface be (x1, z1), which is used as the upper edge of the initial annular zone. A tangent point (x0, z0) is determined on the aspheric surface. The spherical wave energy calculated at this point can make the edge position (x1, z1) just in a resolvable state, as shown in Figure 2. Figure 3 shown.

[0049] To simplify the calculation process, the determination of the tangent point (x0, z0) will be extended from x1 to the center of curvature.

[0050] Regarding whether it is in a distinguishable state, the specific calculation process is shown in formulas (9) and (10). Considering the complexity of the actual detection environment, the present invention introduces a threshold , when the optical path difference between two adjacent points changes below When , it can be considered to meet the measurement range. According to formula (6), The value cannot be greater than λ / 4.

[0051] (11) Substitute \(x = x1\) into the formula (11), and the value range of \(x0\) can be calculated. Since the present invention is directed to a high-order aspheric surface with a complex surface shape, directly solving the equation easily leads to division confusion. Therefore, it is recommended to use the traversal method for calculation, that is, starting from \(x1\) and traversing successively towards the center to find the first point \(x\) that does not satisfy the formula (11). N , that is: (12) Then the previous position adjacent to \(x\) N is \(x0\) (\(x\) N \(< x0 < x1\)). After determining the tangent point \((x0, z0)\), according to the principle of sub-aperture division, start traversing and calculating again from \(x0\) towards the center until finding the first point \(x\) that does not satisfy the formula (11). 2N , that is: (13) Then the previous coordinate position \(x2\) adjacent to \(x\) 2N is the lower edge of the annulus (\(x\) 2N \(< x2 < x0\)). Thus, the initial sub-aperture division is completed, and the measurement of the aspheric surface edge position can be satisfied under this annulus.

[0052] S2. Subsequent annulus division In the splicing of annular sub-apertures, there needs to be a certain overlap area between each annulus. Usually, the overlap area is not less than 25% of the annulus area. According to this characteristic, after calculating the upper and lower edge positions of the initial annulus, the edge position of the next annulus can be calculated through the overlap ratio. The formula is as follows: (14) where \(rat\) is the overlap rate, and it is required to be not less than 25%.

[0053] By solving (14), calculate the position \((x3, z3)\) and use this point as the edge position of annulus 2. Expand from \((x3, z3)\) to the center of curvature until finding a tangent point \((x0', z0')\). The detection range of the spherical wave 2 corresponding to this point makes the requirement of formula (11) exactly met at the upper edge of annulus 2, and calculate the other edge \((x4, z4)\) of annulus 2 based on this. The specific calculation process is as shown in (11), (12), (13) and Figure 4 .

[0054] If the detection range of annulus 2 has covered the center of curvature, the sub-aperture division of the aspheric surface is completed; if not, continue according to the above steps until the entire aspheric surface is covered.

[0055] S3. Sub-aperture splicing and data fusion After completing the sub-aperture division, the central sub-aperture is usually used as the reference sub-aperture, and each ring zone is unified under this reference. The present invention will use the global optimization sub-aperture splicing method, which is a method that considers the splicing error from a global perspective. Usually the first sub-aperture is used as the reference ( S 1), solve the adjustment coefficients of the remaining sub-apertures relative to the reference , so that the final sum of all deviations is the minimum value.

[0056] The solution process requires iterative optimization based on the least squares method: (15) (16) in, For the The number of phase data points in the overlapping area.

[0057] respectively Find the partial derivative, set the result to 0, and get the final adjustment coefficient.

[0058] (17) After the calculation results, the adjustment coefficients of the remaining sub-apertures relative to the reference sub-aperture can be obtained and adjusted to the same reference.

[0059] For data processing between overlapping areas, the present invention uses a data fusion algorithm to splice the aligned sub-apertures to obtain the full-aperture measurement results of the aspheric surface. Usually in most sub-aperture measurement applications, data splicing is processed by mean fusion, that is, the data overlapping areas are fused into one by taking the average. The uniformity and smoothness of this splicing result are poor, and it is easy to cause jump problems at the edges of the data overlapping area. The present invention uses a position-weighted average data fusion method to splice sub-apertures. This processing method is shown in formula (18): (18) in, It is the full-aperture data after splicing; Subaperture S i Non-overlapping area data; N is the total number of subapertures; and is the data overlapping area of ​​two adjacent sub-apertures; It is the inner and outer boundaries of the overlapping area; is the radial position of the overlapping area.

[0060] Adjacent sub-apertures are stitched together using the position-weighted average method. The principle is as follows: Figure 5 shown.

[0061] The method of the present invention uses the radial position of the subapertures as a weight to smoothly fuse the overlapping regions of different subapertures. Within the overlapping region, data points closer to a subaperture position have a greater amplitude contribution ratio. This method is more rational than the average fusion method.

[0062] In another embodiment of the present invention, an optimized annular sub-aperture division and stitching measurement system is provided, which can be used to implement the above-mentioned optimized annular sub-aperture division and stitching measurement method. Specifically, the optimized annular sub-aperture division and stitching measurement system includes an initial module, an iterative module and an integration module.

[0063] The initial module calibrates the aspheric surface to be measured with the camera pixels, determines the edge coordinates of the aspheric surface as the upper edge of the initial ring zone, determines a tangent point on the aspheric surface, and calculates the spherical wave at the tangent point so that the edge position meets the distinguishability condition. A traversal method is used to traverse from the edge to the center to find the first point that does not meet the distinguishability condition and determine the division range of the initial sub-aperture. The iterative module calculates the edge position of the next ring zone based on the preset overlap area ratio; continues to expand from the new edge position toward the center of curvature, finds the tangent point, and calculates the other edge position of the ring zone; repeats the above steps until the detection range of the ring zone covers the entire aspheric surface, obtaining multi-ring zone data; The integration module uses the central sub-aperture as the reference sub-aperture and unifies each annular zone. A global optimization sub-aperture stitching method is used to solve the adjustment coefficients of the remaining sub-apertures relative to the reference, so that the sum of all deviations is minimized. The position-weighted average data fusion method is used to stitch the sub-apertures, and the overlapping areas of different sub-apertures are smoothly fused to obtain the full-aperture measurement results of the aspheric surface.

[0064] The present invention provides a terminal device, which includes a processor and a memory, wherein the memory is used to store a computer program, the computer program includes program instructions, and the processor is used to execute the program instructions stored in the computer storage medium. The processor may be a central processing unit (CPU), or may be other general-purpose processors, graphics processing units (GPUs), tensor processing units (TPUs), digital signal processors (DSPs), application-specific integrated circuits (ASICs), field-programmable gate arrays (FPGAs), or other programmable logic devices, discrete gates or transistor logic devices, discrete hardware components, etc. It is the computing core and control core of the terminal, which is suitable for implementing one or more instructions, specifically suitable for loading and executing one or more instructions to implement corresponding method processes or corresponding functions; the processor described in the embodiment of the present invention can be used for the operation of the optimized annular sub-aperture division and splicing measurement method, including: The aspheric surface to be measured is calibrated with the camera pixels, and the edge coordinates of the aspheric surface are determined as the upper edge of the initial ring zone. A tangent point is determined on the aspheric surface, and the spherical wave at the tangent point is calculated so that the edge position meets the distinguishability condition. A traversal method is used to traverse from the edge to the center, find the first point that does not meet the distinguishability condition, and determine the division range of the initial sub-aperture. The edge position of the next ring zone is calculated according to the preset overlapping area ratio. From the new edge position, the tangent point is continued to be expanded toward the center of curvature, and the other edge position of the ring zone is calculated. The above steps are repeated until the detection range of the ring zone covers the entire aspheric surface, and multi-ring zone data is obtained. The central sub-aperture is used as the reference sub-aperture, and each ring zone is unified. A global optimization sub-aperture stitching method is used to solve the adjustment coefficients of the remaining sub-apertures relative to the reference to minimize the sum of all deviations. The sub-apertures are stitched using a position-weighted average data fusion method, and the overlapping areas of different sub-apertures are smoothly fused to obtain the full-aperture measurement results of the aspheric surface.

[0065] See also Figure 13The terminal device is a computer device. The computer device 60 of this embodiment includes: a processor 61, a memory 62, and a computer program 63 stored in the memory 62 and executable by the processor 61. When executed by the processor 61, the computer program 63 implements the method for estimating the concentration of radioactive iodine species in the post-accident containment vessel of the embodiment. To avoid repetition, a detailed description is omitted here. Alternatively, when executed by the processor 61, the computer program 63 implements the functions of each model / unit in the optimized annular sub-aperture division and splicing measurement system of the embodiment. To avoid repetition, a detailed description is omitted here.

[0066] The computer device 60 may be a desktop computer, a notebook computer, a PDA, a cloud server, or other computing devices. The computer device 60 may include, but is not limited to, a processor 61 and a memory 62. It will be understood by those skilled in the art that Figure 13 This is merely an example of the computer device 60 and does not constitute a limitation of the computer device 60 . The computer device 60 may include more or fewer components than shown in the figure, or a combination of certain components, or different components. For example, the computer device may also include input and output devices, network access devices, buses, etc.

[0067] The processor 61 may be a central processing unit (CPU), or other general-purpose processors, a graphics processing unit (GPU), a tensor processing unit (TPU), a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. The general-purpose processor may be a microprocessor or any conventional processor, etc.

[0068] The memory 62 may be an internal storage unit of the computer device 60, such as a hard disk or memory of the computer device 60. The memory 62 may also be an external storage device of the computer device 60, such as a plug-in hard disk, a smart media card (SMC), a secure digital (SD) card, a flash card, etc. equipped on the computer device 60.

[0069] Furthermore, the memory 62 may include both an internal storage unit of the computer device 60 and an external storage device. The memory 62 is used to store computer programs and other programs and data required by the computer device. The memory 62 may also be used to temporarily store data that has been output or is about to be output.

[0070] See also Figure 14 The terminal device is an electronic device 600, which is implemented as a general-purpose computing device. The components of the electronic device may include, but are not limited to, at least one processing unit 610, at least one storage unit 620, a bus 630 connecting different platform components (including the storage unit 620 and the processing unit 610), and a display unit 640.

[0071] The storage unit stores program codes, which can be executed by the processing unit 610, so that the processing unit 610 performs the steps according to various exemplary embodiments of the present invention described in the above method section of this specification. For example, the processing unit 610 can perform the following steps: Figure 6 Follow the steps shown in .

[0072] The storage unit 620 may include a readable medium in the form of a volatile storage unit, such as a random access memory unit (RAM) 6201 and / or a cache memory unit 6202 , and may further include a read-only memory unit (ROM) 6203 .

[0073] The storage unit 620 may also include a program / utility 6204 having a set (at least one) of program modules 6205, such program modules 6205 including but not limited to: an operating system, one or more application programs, other program modules, and program data, each of which or some combination may include an implementation of a network environment.

[0074] Bus 630 may represent one or more of several types of bus structures, including a memory bus or memory controller, a peripheral bus, an accelerated graphics port, a processing unit, or a local bus using any of a variety of bus architectures.

[0075] The electronic device 600 may also communicate with one or more external devices 700 (e.g., a keyboard, a pointing device, a Bluetooth device, etc.), one or more devices that enable a user to interact with the electronic device 600, and / or any device that enables the electronic device 600 to communicate with one or more other computing devices (e.g., a router, a modem). Such communication may occur via an input / output interface 650. Furthermore, the electronic device 600 may also communicate with one or more networks (e.g., a local area network, a wide area network, and / or a public network, such as the Internet) via a network adapter 660. The network adapter 660 may communicate with other modules of the electronic device 600 via a bus 630. It should be understood that, although not shown in the figures, other hardware and / or software modules may be used in conjunction with the electronic device 600, including but not limited to microcode, device drivers, redundant processing units, external disk drive arrays, RAID systems, tape drives, and data backup storage platforms.

[0076] Example 4 The present invention also provides a storage medium, specifically a computer-readable storage medium. The computer-readable storage medium is a memory device in a terminal device, used to store programs and data. It is understood that the computer-readable storage medium herein may include both the built-in storage medium in the terminal device and, of course, the extended storage medium supported by the terminal device. It may be any tangible medium containing or storing a program that can be used by or in conjunction with an instruction execution system, apparatus, or device. The computer-readable storage medium provides storage space that stores the terminal's operating system. Furthermore, the storage space also stores one or more instructions suitable for being loaded and executed by a processor. These instructions may be one or more computer programs (including program code). It should be noted that more specific examples of the computer-readable storage medium herein include: an electrical connection having one or more wires, a portable disk, a hard disk, a random access memory, a read-only memory, an erasable programmable read-only memory, an optical fiber, a portable compact disk read-only memory, an optical storage device, a magnetic storage device, or any suitable combination thereof.

[0077] Computer-readable storage media also include data signals propagated in baseband or as part of a carrier wave, which carry readable program code. Such propagated data signals can take a variety of forms, including but not limited to electromagnetic signals, optical signals, or any suitable combination of the above. The readable storage medium can also be any readable medium other than a readable storage medium, which can send, propagate, or transmit programs for use by or in conjunction with an instruction execution system, device, or device. The program code contained on the readable storage medium can be transmitted using any appropriate medium, including but not limited to wireless, wired, optical cable, radio frequency, etc., or any suitable combination of the above.

[0078] The program code for performing the operations of the present invention may be written in any combination of one or more programming languages, including object-oriented programming languages ​​such as Java, C++, and the like, as well as conventional procedural programming languages ​​such as "C" or similar programming languages. The program code may be executed entirely on the user computing device, partially on the user device, as a stand-alone software package, partially on the user computing device and partially on a remote computing device, or entirely on a remote computing device or server. In the case of a remote computing device, the remote computing device may be connected to the user computing device via any type of network, including a local area network or a wide area network, or may be connected to an external computing device (e.g., via the Internet using an Internet service provider).

[0079] The processor may load and execute one or more instructions stored in a computer-readable storage medium to implement the corresponding steps of the optimized annular sub-aperture division and splicing measurement method in the above embodiment. The processor may load and execute the following steps: The aspheric surface to be measured is calibrated with the camera pixels, and the edge coordinates of the aspheric surface are determined as the upper edge of the initial ring zone. A tangent point is determined on the aspheric surface, and the spherical wave at the tangent point is calculated so that the edge position meets the distinguishability condition. A traversal method is used to traverse from the edge to the center, find the first point that does not meet the distinguishability condition, and determine the division range of the initial sub-aperture. The edge position of the next ring zone is calculated according to the preset overlapping area ratio. From the new edge position, the tangent point is continued to be expanded toward the center of curvature, and the other edge position of the ring zone is calculated. The above steps are repeated until the detection range of the ring zone covers the entire aspheric surface, and multi-ring zone data is obtained. The central sub-aperture is used as the reference sub-aperture, and each ring zone is unified. A global optimization sub-aperture stitching method is used to solve the adjustment coefficients of the remaining sub-apertures relative to the reference to minimize the sum of all deviations. The sub-apertures are stitched using a position-weighted average data fusion method, and the overlapping areas of different sub-apertures are smoothly fused to obtain the full-aperture measurement results of the aspheric surface.

[0080] The databases involved in the various embodiments provided herein may include at least one of a relational database and a non-relational database. Non-relational databases may include, but are not limited to, distributed databases based on blockchains. The processors involved in the various embodiments provided herein may include, but are not limited to, general-purpose processors, central processing units, graphics processing units, digital signal processors, programmable logic units, data processing logic units based on quantum computing, and the like.

[0081] In order to make the purpose, technical solutions and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Generally, the components of the embodiments of the present invention described and shown in the drawings herein can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present invention provided in the drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention.

[0082] In order to verify the effectiveness and practicality of the present invention, a high-order aspheric surface is used as a simulation object to compare different division results. The parameters of the high-order aspheric surface are shown in Table 1.

[0083] Table 1 Design parameters of high-order aspheric surfaces

[0084] Optimized annular sub-aperture division and splicing results The radius of curvature of the simulated high-order aspheric surface is 96mm, and the aperture is 40mm. The CCD pixel is set to 600×600, λ=633nm, and based on the edge-driven optimized annular sub-aperture partitioning method introduced above, ths is set to λ / 6. The final partitioning results are shown in Figure 7. Figure 8 、 Figure 9 and as shown in Table 2.

[0085] Table 2 Subaperture division results Subaperture number Lower boundary (mm) Upper boundary (mm) Overlap area ratio Reference spherical wave radius (mm) 1 0 16.45 94.12 2 15.05 20 25.42% 92.78 To simulate real measurement, the present invention adds machining error and deviation error to each annular sub-aperture and uses Zernike polynomials for simulation. The relevant parameters are shown in Table 3.

[0086] Table 3 Machining error coefficient

[0087] Taking the central sub-aperture as the benchmark, the deviation adjustment error is added on the basis of the ring zone 2. The adjustment error system is shown in Table 4.

[0088] Table 4 Error coefficients of each sub-aperture adjustment

[0089] The wavefront deviation between the two rings is eliminated, and the global sub-aperture stitching and overlapping area data fusion method introduced above are used. The final result is as follows Figure 10 shown.

[0090] The final residual PV = 0.8433nm, RMS = 0.1474nm. The splicing results prove the rationality of the division.

[0091] Traditional sub-aperture division and stitching results If the traditional sub-aperture division method is used, the overlapping area between the ring zone 2 and the ring zone 3 will be too narrow, which will easily lead to splicing failure. The final measured radius is 19mm, and the results are shown in Table 5 and Figure 11 shown.

[0092] Table 5 Results of traditional sub-aperture division Subaperture number Lower boundary (mm) Upper boundary (mm) Overlap area ratio Reference spherical wave radius (mm) 1 0 10.5 96 2 8 14.5 31.6% 94.73 3 13.8 19 13.2% 93.08 In order to facilitate the comparison of the impact of division on the stitching results, the set processing error and the adjustment error between each sub-aperture are the same as those in the previous article, as shown in Table 3 and Table 4, and the subsequent global sub-aperture stitching and position weighted average data fusion are used. The final result is as follows Figure 12 shown.

[0093] The final residual PV=15.669nm, RMS=3.8581nm, which is much larger than the stitching residual of the edge-driven optimized sub-aperture division (PV=0.8433nm, RMS=0.1474nm), and the measurement range is low, which proves that this method is not suitable for measuring large-deviation high-order aspheric surfaces.

[0094] After simulation verification, the method of the present invention significantly reduces the number of rings and improves the detection efficiency. It is suitable for the measurement of large-deviation high-order aspheric surfaces and has broad application prospects.

[0095] In summary, the present invention provides an optimized annular subaperture division and splicing measurement method and system, designed to address the problems of excessive number of ring zones, high measurement complexity, and severe error accumulation in the measurement of large-deviation high-order aspheric surfaces using the traditional annular subaperture splicing method. Simultaneously, the introduction of a traversal algorithm and a position-weighted average data fusion algorithm enables automated annular subaperture division and optimized data splicing. This invention is particularly suitable for the precision measurement of large-deviation high-order aspheric surfaces and has broad application prospects in optical manufacturing, industrial measurement, scientific research, and other fields.

[0096] Those skilled in the art can clearly understand that, for the convenience and brevity of description, only the division of the above-mentioned functional units and modules is used as an example for illustration. In actual applications, the above-mentioned functions can be distributed and completed by different functional units and modules as needed, that is, the internal structure of the device can be divided into different functional units or modules to complete all or part of the functions described above. The functional units and modules in the embodiment can be integrated into one processing unit, or each unit can exist physically alone, or two or more units can be integrated into one unit. The above-mentioned integrated unit can be implemented in the form of hardware or in the form of software functional units. In addition, the specific names of the functional units and modules are only for the convenience of distinguishing each other, and are not used to limit the scope of protection of this application. The specific working process of the units and modules in the above-mentioned system can refer to the corresponding process in the aforementioned method embodiment, and will not be repeated here.

[0097] In the above embodiments, the description of each embodiment has its own focus. For parts that are not described or recorded in detail in a certain embodiment, reference can be made to the relevant description of other embodiments.

[0098] Those skilled in the art will appreciate that the units and algorithm steps of each example described in conjunction with the embodiments disclosed in the present invention can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are performed in hardware or software depends on the specific application and design constraints of the technical solution. Professionals and technicians can use different methods to implement the described functions for each specific application, but such implementation should not be considered beyond the scope of the present invention.

[0099] In the embodiments provided by the present invention, it should be understood that the disclosed devices / terminals and methods can be implemented in other ways. For example, the device / terminal embodiments described above are merely illustrative. For example, the division of the modules or units is merely a logical functional division. In actual implementation, there may be other division methods, such as multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. In addition, the mutual coupling or direct coupling or communication connection shown or discussed can be through some interface, indirect coupling or communication connection of devices or units, and can be electrical, mechanical, or other forms.

[0100] The units described as separate components may or may not be physically separate, and the components shown as units may or may not be physical units, that is, they may be located in one place or distributed across multiple network units. Some or all of these units may be selected to achieve the purpose of this embodiment according to actual needs.

[0101] In addition, the functional units in the various embodiments of the present invention may be integrated into a single processing unit, each unit may exist physically separately, or two or more units may be integrated into a single unit. The aforementioned integrated units may be implemented in the form of hardware or software functional units.

[0102] If the integrated module / unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on this understanding, the present invention implements all or part of the process in the above-mentioned embodiment method, and can also be completed by instructing the relevant hardware through a computer program. The computer program can be stored in a computer-readable storage medium. When the computer program is executed by a processor, it can implement the steps of the above-mentioned various method embodiments. Among them, the computer program includes computer program code, and the computer program code can be in source code form, object code form, executable file or some intermediate form. The computer-readable medium may include: any entity or device capable of carrying the computer program code, recording medium, USB flash drive, mobile hard disk, magnetic disk, optical disk, computer memory, read-only memory (ROM), random access memory (RAM), electric carrier signal, telecommunication signal and software distribution medium, etc. It should be noted that the content contained in the computer-readable medium can be appropriately increased or decreased according to the requirements of legislation and patent practice in the jurisdiction. For example, in some jurisdictions, according to legislation and patent practice, computer-readable media do not include electric carrier signals and telecommunication signals.

[0103] The present application is described with reference to the flowcharts and / or block diagrams of the methods, devices, and computer program products according to the embodiments of the present application. It should be understood that each process and / or block in the flowchart and / or block diagram, as well as the combination of processes and / or blocks in the flowchart and / or block diagram, can be implemented by computer program instructions. These computer program instructions can be provided to a processor of a general-purpose computer, a special-purpose computer, an embedded processor, or other programmable data processing device to produce a machine, so that the instructions executed by the processor of the computer or other programmable data processing device generate instructions for implementing the processes in the flowchart and / or block diagram. Figure 1 a process or multiple processes and / or boxes Figure 1 A device that provides the functions specified in a block or multiple blocks.

[0104] These computer program instructions may also be stored in a computer readable memory that can direct a computer or other programmable data processing device to work in a specific manner, so that the instructions stored in the computer readable memory produce an article of manufacture comprising an instruction device, which implements the process Figure 1 a process or multiple processes and / or boxes Figure 1 The function specified in one or more boxes.

[0105] These computer program instructions can also be loaded onto a computer or other programmable data processing device so that a series of operational steps are executed on the computer or other programmable device to produce a computer-implemented process, thereby providing the instructions executed on the computer or other programmable device for implementing the process. Figure 1 a process or multiple processes and / or boxes Figure 1 A step that specifies a function in one or more boxes.

[0106] The above content is only for explaining the technical idea of ​​the present invention and cannot be used to limit the protection scope of the present invention. Any changes made on the basis of the technical solution in accordance with the technical idea proposed by the present invention shall fall within the protection scope of the claims of the present invention.

Claims

1. An optimized annular sub-aperture division and splicing measurement method, characterized in that: The following steps are involved: S1. Calibrate the aspheric surface to be measured with the camera pixels, determine the edge coordinates of the aspheric surface as the upper edge of the initial ring zone; determine a tangent point on the aspheric surface, calculate the spherical wave at the tangent point, and make the edge position meet the distinguishability condition; use the traversal method to traverse from the edge to the center, find the first point that does not meet the distinguishability condition, and determine the division range of the initial sub-aperture; S2. Calculate the edge position of the next ring zone according to the preset overlapping area ratio; continue to expand from the new edge position toward the center of curvature, find the tangent point, and calculate the other edge position of the ring zone; repeat the above steps until the detection range of the ring zone covers the entire aspheric surface, and obtain multi-ring zone data; S3. Use the central sub-aperture as the reference sub-aperture and unify all the annular zones; use the global optimization sub-aperture stitching method to solve the adjustment coefficients of the remaining sub-apertures relative to the reference so that the sum of all deviations is minimized; use the position-weighted average data fusion method to stitch the sub-apertures, smoothly fuse the overlapping areas of different sub-apertures, and obtain the full-aperture measurement results of the aspheric surface.

2. The optimized annular sub-aperture division and splicing measurement method according to claim 1, characterized in that: Step S1 is specifically as follows: S101, establishing a mapping relationship between the camera pixel coordinate system and the aspheric space coordinates, and determining the coordinates (x1, z1) of the outermost edge point of the aspheric surface as the upper boundary of the initial annulus; S102, traverse point by point from (x1, z1) toward the center of curvature; calculate the change in optical path difference between each two adjacent points in real time; introduce a threshold , when the optical path difference between two adjacent points changes below the threshold When , it is considered to meet the measurement range; start from x1 and traverse towards the center one by one to find the first point x that does not meet the conditions N , and x N The adjacent previous position is x0, and the tangent point (x0, z0) is determined. At this time, the spherical wave generated by the tangent point (x0, z0) makes the edge point meet the distinguishability condition; S103, starting from (x0, z0), continue traversing toward the center of curvature; locate the first point x that does not meet the distinguishability condition according to the same rule 2N ; Take x 2N The previous position of is used as the lower boundary of the initial annular zone (x2, z2), completing the first annular sub-aperture division.

3. The optimized annular sub-aperture division and splicing measurement method according to claim 2, characterized in that: Threshold Less than or equal to λ / 4, λ is the wavelength of the light source.

4. The optimized annular subaperture division and splicing measurement method according to claim 1, characterized in that: Step S2 is specifically as follows: S201, based on the current annular lower boundary (x2, z2) and the preset overlap rate , calculate the next ring edge position (x3, z3); S202, taking the next ring edge position (x3, z3) as the new starting point, executing the tangent point search process of step S1 to determine a new tangent point (x0', z0'); Traverse from (x0', z0') to the center of curvature to determine the lower boundary of the annulus (x4, z4); S203. If the current annular zone covers the center of curvature, the sub-aperture division of the aspheric surface is completed; if the current annular zone does not cover the center of curvature, (x4, z4) is used as a new input and this step is repeated until the entire aspheric surface is covered.

5. The optimized annular sub-aperture division and splicing measurement method according to claim 4, characterized in that: Overlap rate The calculation is as follows: Among them, (x1, z1) is the coordinate of the outermost edge point of the aspheric surface.

6. The optimized annular sub-aperture division and splicing measurement method according to claim 4, characterized in that: Overlap rate Greater than or equal to 25% of the annular zone area.

7. The optimized annular sub-aperture division and splicing measurement method according to claim 1, characterized in that: Step S3 is specifically as follows: S301, setting the first sub-aperture as a reference S 1. Construct the objective function and solve the adjustment coefficient of each sub-aperture through least squares iteration , so that the final sum of all deviations is the minimum value; S302, respectively Calculate the partial derivative and set the result to 0 to obtain the adjustment coefficients of the remaining subapertures relative to the reference subaperture; S303: weighted fusion of overlapping area data according to radial position.

8. The optimized annular sub-aperture division and splicing measurement method according to claim 7, characterized in that: The solution is obtained through least squares iteration as follows: in, is the objective function of the sum of relative deviations between each sub-aperture, is the surface shape of sub-aperture 1 after removing the wavefront deviation, is the coordinate position of the sampling point, The surface shape of the reference sub-aperture after removing the wavefront deviation, is the surface shape of sub-aperture j+1 after removing the wavefront deviation, for, is the number of sampling points in the first overlapping area, is the number of sampling points in the j+1th overlapping area, is the relative adjustment error coefficient.

9. The optimized annular sub-aperture division and splicing measurement method according to claim 7, characterized in that: Full-aperture data after splicing for: in, Subaperture S i Non-overlapping area data; N is the total number of subapertures; and is the data overlapping area of ​​two adjacent sub-apertures; It is the inner and outer boundaries of the overlapping area; is the radial position of the overlapping area.

10. An optimized annular sub-aperture division and splicing measurement system, characterized in that: include: The initial module calibrates the aspheric surface to be measured with the camera pixels and determines the edge coordinates of the aspheric surface as the upper edge of the initial ring; Determine a tangent point on the aspheric surface and calculate the spherical wave at the tangent point so that the edge position meets the distinguishable conditions; The traversal method is used to traverse from the edge to the center, and the first point that does not meet the distinguishability condition is found to determine the division range of the initial sub-aperture. The iterative module calculates the edge position of the next ring zone based on the preset overlap area ratio; continues to expand from the new edge position toward the center of curvature, finds the tangent point, and calculates the other edge position of the ring zone; repeats the above steps until the detection range of the ring zone covers the entire aspheric surface, obtaining multi-ring zone data; Integration module, taking the central subaperture as the reference subaperture and unifying each annulus; A global optimization sub-aperture stitching method is used to solve the adjustment coefficients of the remaining sub-apertures relative to the benchmark, so that the sum of all deviations is minimized; the sub-apertures are stitched using a position-weighted average data fusion method, and the overlapping areas of different sub-apertures are smoothly fused to obtain the full-aperture measurement results of the aspheric surface.

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