Stacked integrated polarization spectral modulator, method of manufacture, imaging system and method

Abstract

The present application relates to polarization spectral imaging technology, and particularly relates to a high-energy-efficiency stacked integrated polarization spectral modulator and a preparation method thereof, a polarization spectral imaging system and a method, and solves the technical problems of low measurement efficiency, high loss, large volume and complex regulation and control of the existing polarization spectral imaging system. The high-energy-efficiency stacked integrated polarization spectral modulator is sequentially stacked by a polarization unit, a dynamic modulation layer and a spectral unit, and the polarization modulation layer and the spectral modulation layer of the dynamic modulation layer are directly controlled by an external modulator to realize fine modulation of polarization information and spectral information, and the volume is small and the regulation and control method is simple; the energy loss of each micro area of the polarization unit and the spectral unit is low; the polarization modulation layer and the spectral modulation layer of the dynamic modulation layer are respectively located on both sides of the conductive base layer, can be independently controlled, and are directly connected with each micro area of the polarization unit and the spectral unit, respectively, and can realize cooperative control of polarization information and spectral information.

Description

TECHNICAL FIELD

[0001] The present application relates to a polarization spectral imaging technology, in particular to a high-energy-efficiency stacked integrated polarization spectral modulator and a preparation method thereof, a polarization spectral imaging system and a method. BACKGROUND

[0002] As a kind of optical information sensing technology that simultaneously detects spectral, polarization and spatial information, the polarization spectral imaging technology has the strong advantage of high-dimensional optical information detection and imaging, and has attracted widespread attention in target identification, agricultural production, ocean remote sensing and intelligent medical treatment, etc.

[0003] The biggest advantage of the polarization spectral imaging technology over the spectral imaging technology or the polarization imaging technology is that it can simultaneously obtain optical information in the spectral dimension and the polarization dimension, and has a larger information capacity, which is suitable for optical information sensing in complex environments. The key to the polarization spectral imaging technology lies in the real-time modulation of polarization spectral information with high energy efficiency. Traditional polarization spectral imaging systems achieve polarization spectral information sensing through spatially cascaded discrete geometric optical elements such as optical filters, polarizers, lenses and prisms, but they are bulky, complex to control and expensive, which makes it difficult to meet the development needs of intelligent information era for small and light polarization spectral imaging microsystems.

[0004] With the continuous development of micro-nano photonics, new polarization spectral imaging systems using diffractive optical elements, metamaterials and super surfaces as on-chip integrated polarization spectral devices have emerged and attracted widespread attention in the field of optical information sensing. However, existing on-chip integrated polarization spectral devices usually modulate polarization spectral information based on the absorption characteristics of optical elements, such as the metal wire grid used in the miniature high-energy-efficiency diffractive polarization spectral imaging device and its polarization spectral reconstruction method disclosed in Chinese Patent No. CN119984510A, and the plasmonic polarization spectral module used in the integrated polarization filter and imaging system disclosed in Chinese Patent No. CN116675908A. Both of them only respond to single polarization spectral information and absorb other unperceived energy, resulting in high energy loss, low optical information utilization rate, and higher requirements for front-end imaging objectives and back-end detectors. At the same time, simple push-broom polarization spectral imaging systems, such as the push-broom polarization spectral imaging microsystem, imaging method and preparation method disclosed in Chinese Patent No. CN109764964A, have simple modulation methods, but the system is bulky and has low measurement efficiency, which makes it difficult to meet the development needs of high-performance integrated polarization spectral information sensing technology in actual complex environments. Therefore, it is urgent to develop an intelligent polarization spectral imaging system and method with high efficiency, low loss, wide waveband and high precision to meet the application needs of actual polarization spectral information sensing technology. SUMMARY

[0005] The present application aims to solve the technical problems of low measurement efficiency, high loss, large volume and complex regulation of the existing polarization spectrum imaging system, and provide a high-energy-efficiency stacked integrated polarization spectrum modulator, a preparation method thereof, a polarization spectrum imaging system and a method.

[0006] To achieve the above-mentioned purpose, the technical scheme adopted by the present application is:

[0007] A high-energy-efficiency stacked integrated polarization spectrum modulator, characterized in that: a polarization unit, a dynamic modulation layer and a spectrum unit are stacked in sequence.

[0008] The polarization unit, the dynamic modulation layer and the spectrum unit are arranged in sequence along the transmission direction of the incident light beam, or are arranged in sequence in the reverse direction of the transmission direction of the incident light beam.

[0009] The polarization unit is an N×N surface array structure, including N×N polarization micro-zones, for realizing direct modulation of polarization information, wherein N is an integer and N≥2.

[0010] The spectrum unit is an N×N surface array structure corresponding to the polarization unit, including N×N spectrum micro-zones for realizing direct modulation of spectrum information.

[0011] The dynamic modulation layer includes a conductive base layer, the conductive base layer is provided with a polarization modulation layer on the side close to the polarization unit, and the conductive base layer is provided with a spectrum modulation layer on the side close to the spectrum unit.

[0012] The polarization modulation layer and the spectrum modulation layer are used to be connected with an external modulator respectively, so as to realize independent fine modulation of polarization information and spectrum information.

[0013] The conductive base layer, the polarization modulation layer and the spectrum modulation layer are all N×N surface array structures corresponding to the polarization unit and the spectrum unit.

[0014] Further, the polarization micro-zones adopt micro-nano scale polarization beam splitting structures, including 0-degree polarization micro-zones, 45-degree polarization micro-zones, 90-degree polarization micro-zones and 135-degree polarization micro-zones.

[0015] The spectrum micro-zones adopt micro-nano scale spectrum beam splitting structures, including red spectrum micro-zones, green spectrum micro-zones and blue spectrum micro-zones.

[0016] Further, the 0-degree polarization micro-zones, the 45-degree polarization micro-zones, the 90-degree polarization micro-zones and the 135-degree polarization micro-zones are Z-shaped clamping grooves with different spatial turning structures.

[0017] The red spectrum micro-zones, the green spectrum micro-zones and the blue spectrum micro-zones are silicon dioxide micro-columns with different size structures.

[0018] Further, the conductive base layer comprises double polished optical glass, and the two sides of the double polished optical glass are provided with indium tin oxide conductive layers and silver paste electrodes.

[0019] The application also provides a preparation method of the high-energy-efficiency stacked integrated polarization spectrum modulator, which is characterized by comprising the following steps:

[0020] Step A1, designing a polarization unit structure, a spectrum unit structure and a dynamic modulation layer structure with an N×N matrix structure, wherein the polarization unit structure comprises N×N polarization micro-zones, the spectrum unit structure comprises N×N spectrum micro-zones, and the dynamic modulation layer structure comprises N×N modulation units;

[0021] Step A2, preparing a polarization unit according to the polarization unit structure by sequentially performing the following steps: slide cleaning, glue coating, photoetching, developing, sputtering, glue removing and etching;

[0022] Step A3, preparing a spectrum unit according to the spectrum unit structure by using the method in step A2;

[0023] Step A4, selecting a glass base layer, sputtering or evaporating a conductive layer on the two sides of the glass base layer, and coating conductive control units on the conductive layer according to the dynamic modulation layer structure, so as to separate the conductive layer into an N×N matrix structure to obtain a conductive base layer; then, point coating a composite adhesive containing spacers around the conductive layer, and covering quartz glass on the two sides of the glass base layer and then curing the same;

[0024] Step A5, injecting liquid crystal into the gap between the glass base layer and the quartz glass on the two sides of the conductive base layer at a temperature above 90 degrees of cool point, and using capillary force to absorb the liquid crystal into the N×N matrix structure of the conductive base layer to form a polarization modulation layer and a spectrum modulation layer, thereby obtaining a dynamic modulation layer;

[0025] Step A6, aligning and interconnecting the N×N polarization micro-zones of the polarization unit, the N×N modulation units of the dynamic modulation layer and the N×N spectrum micro-zones of the spectrum unit one by one under a microscope, and obtaining a high-energy-efficiency stacked integrated polarization spectrum modulator after curing.

[0026] Further, in step A4, the conductive layer is an indium tin oxide conductive layer, the conductive control unit is a silver paste conductive control unit, and the composite adhesive is obtained by mixing spacers with a diameter of 5-10 microns and ultraviolet glue at a ratio of 1:100.

[0027] Further, in step A5, the liquid crystal is 5CB liquid crystal or E7 liquid crystal.

[0028] The application further provides a polarized spectral imaging system, comprising a microlens array module, a dynamic polarized spectral modulator module and a detector module arranged in sequence along the transmission direction of an incident light beam, and the speciality thereof is that the dynamic polarized spectral modulator module is the high-energy-efficiency stacked integrated polarized spectral modulator mentioned above.

[0029] The microlens array module and the detector module both adopt an N*N area array structure corresponding to the high-energy-efficiency stacked integrated polarized spectral modulator.

[0030] The microlens array module comprises N*N microlens units for collecting the incident light beam.

[0031] The detector module comprises N*N detection units for realizing the detection imaging of polarized spectral information.

[0032] Further, when the polarized unit, the dynamic modulation layer and the spectral unit are arranged in sequence along the transmission direction of the incident light beam, the microlens array module is stacked and integrated with the polarized unit, for realizing polarized focusing.

[0033] When the polarized unit, the dynamic modulation layer and the spectral unit are arranged in sequence in the reverse direction of the transmission direction of the incident light beam, the microlens array module is stacked and integrated with the spectral unit, for realizing spectral spatial focusing.

[0034] The application further provides a polarized spectral imaging method based on the polarized spectral imaging system mentioned above, and the speciality thereof is that the method comprises the following steps:

[0035] Step B1, connecting the polarized modulation layer and the spectral modulation layer of the dynamic modulation layer with external modulators respectively, and then adjusting the voltage applied to the polarized modulation layer and the spectral modulation layer of the dynamic modulation layer by the external modulators according to the imaging requirements;

[0036] Step B2, after the incident light beam passes through the microlens array module, a large-area uniform light field is formed and incident to the high-energy-efficiency stacked integrated polarized spectral modulator.

[0037] Step B3, the high-energy-efficiency stacked integrated polarized spectral modulator directly modulates the polarized information and the spectral information of the large-area uniform light field by the polarized unit and the spectral unit respectively, and finely modulates the polarized information and the spectral information of the large-area uniform light field by the polarized modulation layer and the spectral modulation layer of the dynamic modulation layer respectively, and then sends them to the detector module for collection, so as to obtain a large-range super-fine polarized spectral image and complete the polarized spectral imaging.

[0038] Compared with the prior art, the application has the beneficial effects as follows:

[0039] 1. The high energy efficiency stacked integrated polarization spectrum modulator provided by the application is stacked by a polarization unit, a dynamic modulation layer and a spectrum unit in sequence, and a polarization modulation layer and a spectrum modulation layer of the dynamic modulation layer are directly controlled by an external modulator, so that fine modulation of polarization information and spectrum information is realized, the volume is small, and the regulation and control method is simple.

[0040] 2. The high energy efficiency stacked integrated polarization spectrum modulator provided by the application, the polarization modulation layer and the spectrum modulation layer of the dynamic modulation layer are located on the two sides of the conductive base layer, can be independently controlled, and the polarization modulation layer and the spectrum modulation layer are directly connected with each micro area of the polarization unit and the spectrum unit, respectively, so that the cooperative control of polarization information and spectrum information can be realized, the problems of low regulation and control degree of freedom and high process complexity of the traditional integrated dynamic polarization spectrum device are avoided, and large-scale functional expansion is easy to realize.

[0041] 3. The high energy efficiency stacked integrated polarization spectrum modulator provided by the application, the polarization micro area adopts a polarization beam splitting structure, and the spectrum micro area adopts a spectrum beam splitting structure, so that the energy loss is low, and the problem of excessive energy loss of the traditional absorption type polarization spectrum micro area can be overcome.

[0042] 4. The high energy efficiency stacked integrated polarization spectrum modulator provided by the application, through the modulation of the large-range red-green-blue spectrum micro area and the 0-degree, 45-degree, 90-degree and 135-degree polarization micro area, combined with the small-range fine regulation and control of the dynamic modulation layer, the dynamic modulation of the large-range high-precision polarization spectrum information can be realized.

[0043] 5. The polarization spectrum imaging system provided by the application adopts the high energy efficiency stacked integrated polarization spectrum modulator, can collect a large-range super-fine polarization spectrum image with multiple polarization information and spectrum information at one time, and has high measurement efficiency.

[0044] 6. The polarization spectrum imaging system provided by the application adopts a microlens array module, can directly regulate and control the light field distribution in the cross section perpendicular to the transmission direction of the incident light beam, so that the light field is coupled into the high energy efficiency stacked integrated polarization spectrum modulator, the problem of light field distortion of the traditional single objective lens at the edge of the large-size imaging plane is overcome, and uniform regulation and control of large-array polarization spectrum information is realized.

[0045] 7. The polarization spectrum imaging system provided by the application is an array passive high energy efficiency imaging system, does not need an external light source module, has high concealment, small volume, strong anti-interference ability to complex natural environment such as haze, and meets the application requirements of the actual polarization spectrum imaging system.

[0046] 8. The polarization spectrum imaging system provided by the application, the microlens array module and the polarization unit or the spectrum unit of the high energy efficiency stacked integrated polarization spectrum modulator are further stacked and integrated, so that the system size can be greatly reduced. BRIEF DESCRIPTION OF DRAWINGS

[0047] Figure 1 This is a schematic diagram of the high-efficiency stacked integrated polarization spectral modulator in Embodiment 1 of the present invention;

[0048] Figure 2 This is a cross-sectional view of the dynamic modulation layer of the high-efficiency stacked integrated polarization spectral modulator in Embodiment 1 of the present invention;

[0049] Figure 3 This is a schematic diagram of the polarization spectral imaging system in Embodiment 1 of the present invention;

[0050] Figure 4 This is a schematic diagram of the high-efficiency stacked integrated polarization spectral modulator in Embodiment 2 of the present invention;

[0051] Figure 5 This is a schematic diagram of the polarization spectral imaging system in Embodiment 2 of the present invention;

[0052] The annotations in the attached figures are explained as follows:

[0053] 1-Microlens array module, 2-High-efficiency stacked integrated polarization spectral modulator, 3-Detector module;

[0054] 21-Polarization unit, 22-Spectral unit, 23-Dynamic modulation layer, 230-Conductive base layer, 231-Polarization modulation layer, 232-Spectral modulation layer. Detailed Implementation

[0055] The following detailed description, in conjunction with the accompanying drawings and specific embodiments, provides a high-efficiency stacked integrated polarization spectral modulator and its fabrication method, as well as a polarization spectral imaging system and method, based on the present invention. Those skilled in the art should understand that these embodiments are merely illustrative of the technical principles of the present invention and are not intended to limit the scope of protection of the present invention.

[0056] Example 1

[0057] A high-efficiency stacked integrated polarization spectral modulator, such as Figure 1 As shown, it is composed of polarization unit 21, dynamic modulation layer 23 and spectral unit 22 stacked in sequence, and the polarization unit 21, dynamic modulation layer 23 and spectral unit 22 are arranged in sequence along the transmission direction of the incident beam.

[0058] The polarization unit 21 is an N*N planar array structure, including N*N polarization micro-zones, for realizing direct modulation of polarization information, wherein N is an integer, and N is greater than or equal to 2. The spectral unit 22 is an N*N planar array structure corresponding to the polarization unit 21, including N*N spectral micro-zones, for realizing direct modulation of spectral information. The polarization micro-zone adopts a micro-nano scale polarization beam splitting structure, including 0-degree polarization micro-zones, 45-degree polarization micro-zones, 90-degree polarization micro-zones and 135-degree polarization micro-zones formed by Z-shaped clamping grooves with different spatial turning structures. The Z-shaped clamping grooves can realize modulation of polarization states by changing the Z-shaped geometry and spatial arrangement direction. The spectral micro-zone adopts a micro-nano scale spectral beam splitting structure, including red spectral micro-zones, green spectral micro-zones and blue spectral micro-zones formed by different size structure silica micro-columns.

[0059] As shown in Figure 2 The dynamic modulation layer 23 includes a conductive base layer 230, which includes double-polished optical glass, and both sides of the double-polished optical glass are provided with indium tin oxide conductive layers and silver paste electrodes. The conductive base layer 230 is provided with a polarization modulation layer 231 on the side close to the polarization unit 21, and is provided with a spectral modulation layer 232 on the side close to the spectral unit 22. The polarization modulation layer 231 and the spectral modulation layer 232 are used to be connected with external modulators, so as to realize independent fine modulation of polarization information and spectral information. The conductive base layer 230, the polarization modulation layer 231 and the spectral modulation layer 232 are all N*N planar array structures corresponding to the polarization unit 21 and the spectral unit 22.

[0060] The high-energy-efficiency stacked polarization spectral modulator provided in the embodiment adopts an N*N planar array structure, and is composed of N*N polarization spectral elements in space. The polarization spectral element realizes direct modulation of a wide range of polarization spectral information through polarization micro-zones and spectral micro-zones, and realizes high-precision modulation of key polarization spectral regions in the time domain by combining a dynamic modulation layer 23 in the time domain, so as to realize wide-range and high-precision collaborative modulation of polarization spectral information.

[0061] Specifically, the incident light beam is modulated by the polarization micro-zone to obtain 0-degree polarization information, 45-degree polarization information, 90-degree polarization information and 135-degree polarization information, and is modulated by the polarization modulation layer 231 of the dynamic modulation layer 23. Taking the 0-degree polarization information as an example, the modulation can generate 0-degree polarization information, 2-degree polarization information, 4-degree polarization information, etc., to realize high-precision collaborative modulation of wide-range and key polarization regions. Similarly, the spectral micro-zone can realize wide-range modulation of red, green and blue colors, and the spectral modulation layer 232 of the dynamic modulation layer 23 is modulated. Taking the red spectrum as an example, the modulation can generate shallow red, deep red and positive red, etc. intermediate spectral bands, to realize high-precision collaborative modulation of wide-range and key spectral bands.

[0062] The embodiment also provides a preparation method of the high-energy-efficiency stacked integrated polarization spectrum modulator, comprising the following steps:

[0063] Step A1, designing a polarization unit structure, a spectrum unit structure and a dynamic modulation layer structure with an N×N matrix structure, wherein the polarization unit structure comprises N×N polarization micro-zones, the spectrum unit structure comprises N×N spectrum micro-zones, and the dynamic modulation layer structure comprises N×N modulation units.

[0064] Step A2, according to the polarization unit structure, preparing the polarization unit 21 by sequentially performing the following steps: slide cleaning, glue coating, photoetching, developing, sputtering, glue removing and etching.

[0065] Step A3, according to the spectrum unit structure, preparing the spectrum unit 22 by the method in step A2.

[0066] Step A4, selecting double-polished optical glass as a glass base layer, sputtering or evaporating an indium tin oxide conductive layer on two sides of the double-polished optical glass, and coating silver paste conductive control units on the conductive layer according to the dynamic modulation layer structure to separate the conductive layer into an N×N matrix structure, thereby obtaining the conductive base layer 230; then, mixing spacer with a diameter of 5-10 microns and ultraviolet glue at a ratio of 1:100 to obtain a composite adhesive, and then coating the composite adhesive around the indium tin oxide conductive layer, covering quartz glass on the two sides of the glass base layer, and then irradiating the quartz glass with an ultraviolet lamp for 30s-1min for curing;

[0067] Step A5, injecting 5CB liquid crystal or E7 liquid crystal into the gap between the double-polished optical glass of the conductive base layer 230 and the quartz glass on the two sides of the conductive base layer 230 at a temperature above the 90-degree cool point, and using capillary force to suck the 5CB liquid crystal or E7 liquid crystal into the N×N matrix structure of the conductive base layer 230 to form a polarization modulation layer 231 and a spectrum modulation layer 232, thereby obtaining the dynamic modulation layer 23.

[0068] Step A6, through an alignment interconnection process, aligning the N×N polarization micro-zones of the polarization unit 21, the N×N modulation units of the dynamic modulation layer 23 and the N×N spectrum micro-zones of the spectrum unit 22 one by one under a microscope, and then curing the glass base layer with an ultraviolet lamp for 30s-1min to obtain the high-energy-efficiency stacked integrated polarization spectrum modulator 2.

[0069] The embodiment also provides a polarization spectrum imaging system, as shown in Figure 3As shown, it comprises a microlens array module 1, a dynamic polarization spectrum modulator module and a detector module 3 arranged in sequence along the transmission direction of the incident light beam, wherein the dynamic polarization spectrum modulator module is the high-energy-efficiency stacked integrated polarization spectrum modulator 2. The microlens array module 1 and the detector module 3 both adopt an N×N matrix structure corresponding to the high-energy-efficiency stacked integrated polarization spectrum modulator 2. The microlens array module 1 comprises N×N microlens elements for collecting the incident light beam. The microlens array module 1 is stacked and integrated with the polarization unit 21, and the two together with the polarization modulation layer 231 form a stacked polarization microlens array for realizing polarization focusing, and then pass through the spectrum modulation layer 232 and the spectrum unit 22 to realize modulation of the polarization spectrum information. The detector module 3 comprises N×N detection units for realizing detection imaging of the polarization spectrum information.

[0070] The polarization spectrum imaging system provided by the embodiment collects the incident light beam by the microlens array module 1 and converges it onto the high-energy-efficiency stacked integrated polarization spectrum modulator 2, and the polarization information and the spectrum information are directly modulated by the polarization unit 21 and the spectrum unit 22 respectively, and fine modulation is performed in combination with the dynamic modulation layer 23, and finally the polarization spectrum information after modulation is detected and imaged by the detector module 3, thereby completing perception of the polarization spectrum information.

[0071] The embodiment also provides a polarization spectrum imaging method based on the above-mentioned polarization spectrum imaging system, comprising the following steps:

[0072] Step B1, connect the polarization modulation layer 231 and the spectrum modulation layer 232 of the dynamic modulation layer 23 to external modulators respectively, and then adjust the voltage applied to the polarization modulation layer 231 and the spectrum modulation layer 232 by the external modulators according to the imaging requirements.

[0073] Step B2, after the incident light beam passes through the microlens array module 1, a large-matrix uniform light field is formed and incident to the high-energy-efficiency stacked integrated polarization spectrum modulator 2.

[0074] Step B3, the high-energy-efficiency stacked integrated polarization spectrum modulator 2 directly modulates the polarization information and the spectrum information of the large-matrix uniform light field by the polarization unit 21 and the spectrum unit 22 respectively, and fine modulates the polarization information and the spectrum information of the large-matrix uniform light field by the polarization modulation layer 231 and the spectrum modulation layer 232 of the dynamic modulation layer 23 respectively, and then sends them to the detector module 3 for collection, thereby obtaining a large-range super-fine polarization spectrum image and completing polarization spectrum imaging.

[0075] Specifically, the large array uniform light field first realizes the modulation of 0-degree polarization information, 45-degree polarization information, 90-degree polarization information and 135-degree polarization information in the vertical incident light beam transmission direction section by the polarization unit 21, realizes the red, green and blue three-color wide range spectrum modulation in the vertical incident light beam transmission direction section by the spectrum unit 22, then realizes the modulation of fine polarization information by the polarization modulation layer 231 of the dynamic modulation layer 23, and realizes the modulation of fine spectrum band by the spectrum modulation layer 232 of the dynamic modulation layer 23, so as to realize the cooperative modulation of large range ultra-fine polarization spectrum information.

[0076] Embodiment two

[0077] The embodiment is the same as the overall structure of the high-energy efficient stacked integrated polarization spectrum modulator and the preparation method thereof, the polarization spectrum imaging system and the method in embodiment one, and the difference lies in the positions of the polarization unit 21 and the spectrum unit 22 in the high-energy efficient stacked integrated polarization spectrum modulator. As shown in Figure 4 The polarization unit 21, the dynamic modulation layer 23 and the spectrum unit 22 are sequentially arranged in the reverse incident light beam transmission direction. Correspondingly, as shown in Figure 5 In the polarization spectrum imaging system, the microlens array module 1 and the spectrum unit 22 are stacked and integrated, and the two and the spectrum modulation layer 232 constitute a stacked modulated spectrum lens array for realizing spectrum space focusing, then pass through the polarization modulation layer 231 and the polarization unit 21 to realize the modulation of polarization spectrum information.

Claims

1. A high-efficiency stacked integrated polarization spectral modulator, characterized in that: It is composed of polarization unit (21), dynamic modulation layer (23) and spectral unit (22) stacked sequentially; The polarization unit (21), the dynamic modulation layer (23), and the spectral unit (22) are arranged sequentially along the incident beam transmission direction or sequentially in the opposite direction to the incident beam transmission direction. The polarization unit (21) is an N×N area array structure, including N×N polarization micro-regions, used to realize direct modulation of polarization information, where N is an integer and N≥2; The spectral unit (22) is an N×N area array structure corresponding to the polarization unit (21), including N×N spectral micro-regions, which are used to realize direct modulation of spectral information; The dynamic modulation layer (23) includes a conductive base layer (230), a polarization modulation layer (231) is provided on the side of the conductive base layer (230) close to the polarization unit (21), and a spectral modulation layer (232) is provided on the side of the conductive base layer (230) close to the spectral unit (22). The polarization modulation layer (231) and the spectral modulation layer (232) are used to connect to an external modulator respectively, thereby realizing independent fine modulation of polarization information and spectral information; The conductive base layer (230), polarization modulation layer (231) and spectral modulation layer (232) are all N×N area array structures corresponding to the polarization unit (21) and spectral unit (22).

2. The high-efficiency stacked integrated polarization spectral modulator according to claim 1, characterized in that: The polarization micro-regions adopt micro-nano scale polarization beam splitting structures, including 0-degree polarization micro-regions, 45-degree polarization micro-regions, 90-degree polarization micro-regions and 135-degree polarization micro-regions. The spectral micro-regions employ a micro-nano scale spectral beam splitting structure, including red spectral micro-regions, green spectral micro-regions, and blue spectral micro-regions.

3. The high-efficiency stacked integrated polarization spectral modulator according to claim 2, characterized in that: The 0-degree polarization micro-region, 45-degree polarization micro-region, 90-degree polarization micro-region and 135-degree polarization micro-region are Z-shaped slots with different spatial orientation structures. The red spectral microregion, green spectral microregion, and blue spectral microregion are silica micropillars with different sizes and structures.

4. The high-efficiency stacked integrated polarization spectral modulator according to any one of claims 1-3, characterized in that: The conductive substrate (230) includes double-polished glass, and both sides of the double-polished glass are provided with an indium tin oxide conductive layer and a silver paste electrode.

5. A method for fabricating a high-efficiency stacked integrated polarization spectral modulator as described in any one of claims 1-4, characterized in that, Includes the following steps: Step A1: Design a polarization unit structure, a spectral unit structure, and a dynamic modulation layer structure with an N×N area array structure. The polarization unit structure includes N×N polarization micro-regions, the spectral unit structure includes N×N spectral micro-regions, and the dynamic modulation layer structure includes N×N modulation elements. Step A2: Based on the polarization unit structure, the polarization unit (21) is prepared by sequentially cleaning the glass slide, homogenizing, photolithography, developing, sputtering, removing the resist and etching. Step A3: Based on the spectral unit structure, prepare the spectral unit (22) according to the method in step A2; Step A4: Select a glass substrate, sputter or vapor deposit conductive layers on both sides of the glass substrate, and uniformly coat conductive control units on the conductive layers according to the dynamic modulation layer structure. Use the conductive control units to divide the conductive layers into an N×N array structure to obtain the conductive substrate (230); then apply a composite adhesive containing spacers around the conductive layers, and cover both sides of the glass substrate with quartz glass and then cure it. Step A5: At a temperature above 90 degrees Celsius, liquid crystal is injected into the gap between the glass substrate of the conductive base layer (230) and the quartz glass on both sides. The liquid crystal is drawn into the N×N array structure of the conductive base layer (230) by capillary force to form a polarization modulation layer (231) and a spectral modulation layer (232), thereby obtaining a dynamic modulation layer (23). Step A6: By using an alignment interconnection process, the N×N polarization micro-regions of the polarization unit (21), the N×N modulation elements of the dynamic modulation layer (23), and the N×N spectral micro-regions of the spectral unit (22) are aligned one-to-one under a microscope. After curing, a high-efficiency stacked integrated polarization spectral modulator (2) is obtained.

6. The method for fabricating a high-efficiency stacked integrated polarization spectral modulator according to claim 5, characterized in that: In step A4, the conductive layer is an indium tin oxide conductive layer, the conductive control unit is a silver paste conductive control unit, and the composite adhesive is made by mixing spacers with a diameter of 5-10 micrometers and UV adhesive in a ratio of 1:

100.

7. The method for fabricating a high-efficiency stacked integrated polarization spectral modulator according to claim 5, characterized in that: In step A5, the liquid crystal is a 5CB liquid crystal or an E7 liquid crystal.

8. A polarization spectral imaging system, comprising a microlens array module (1), a dynamic polarization spectral modulator module, and a detector module (3) arranged sequentially along the transmission direction of the incident beam, characterized in that: The dynamic polarization spectral modulator module is the high-efficiency stacked integrated polarization spectral modulator (2) according to any one of claims 1-4. Both the microlens array module (1) and the detector module (3) adopt an N×N array structure corresponding to the high-efficiency stacked integrated polarization spectral modulator (2); The microlens array module (1) includes N×N microlens elements for collecting incident light beams; The detector module (3) includes N×N detection units, which are used to realize the detection and imaging of polarization spectral information.

9. The polarization spectral imaging system according to claim 8, characterized in that: When the polarization unit (21), dynamic modulation layer (23) and spectral unit (22) are arranged sequentially along the transmission direction of the incident beam, the microlens array module (1) and the polarization unit (21) are stacked and integrated to achieve polarization focusing; When the polarization unit (21), dynamic modulation layer (23) and spectral unit (22) are arranged in the reverse incident beam transmission direction, the microlens array module (1) and the spectral unit (22) are stacked and integrated to achieve spectral spatial focusing.

10. A polarization spectral imaging method, based on the polarization spectral imaging system of claim 8 or 9, characterized in that, Includes the following steps: Step B1: Connect the polarization modulation layer (231) and the spectral modulation layer (232) of the dynamic modulation layer (23) to the external modulator respectively, and then adjust the voltage applied to the polarization modulation layer (231) and the spectral modulation layer (232) by the external modulator according to the imaging requirements. Step B2: After the incident beam passes through the microlens array module (1), it forms a large-area uniform light field that is incident on the high-efficiency stacked integrated polarization spectrum modulator (2). Step B3: The high-efficiency stacked integrated polarization spectral modulator (2) uses polarization unit (21) and spectral unit (22) to directly modulate the polarization information and spectral information of the large-area uniform light field, respectively. The polarization modulation layer (231) and spectral modulation layer (232) of the dynamic modulation layer (23) are used to finely modulate the polarization information and spectral information of the large-area uniform light field, respectively. Then, it is sent to the detector module (3) for acquisition to obtain a large-area ultra-fine polarization spectral image and complete polarization spectral imaging.

Images