Linear motor and machine tool

Abstract

A linear motor (100), which is used in a machine tool, is provided with: a magnet plate (10) in which a plurality of magnets (12) are arranged in a first direction; a slider (50) in which a plurality of coils (52) are arranged in the first direction, the slider (50) being configured so as to be capable of sliding in the first direction with respect to the magnet plate (10); and a cooling pipe (54) disposed so as to cool the ends of the plurality of coils (52) in a second direction parallel to the surface of the magnet plate (10) and orthogonal to the first direction and the ends of the plurality of magnets (12) in the second direction.

Description

Technical Field

[0001] The present disclosure relates to a linear motor and a machine tool. Background Art

[0002] Japanese Patent Application Publication No. 2014-042423 (Patent Document 1) discloses an invention related to a linear motor. This linear motor includes an excitation unit that functions as a stator and an armature that functions as a mover. The armature has a coil inside. When current flows through the coil, the armature generates a driving force due to electromagnetic induction, and the armature moves on the excitation unit.

[0003] The armature has two cooling tubes, arranged one above the other. These two cooling tubes are positioned so as to cool the coil from the side of the armature opposite the side facing the excitation unit. The refrigerant in the upper cooling tube flows in the opposite direction to the refrigerant in the lower cooling tube. This ensures a uniform temperature distribution in the armature in the linear motor disclosed in Patent Document 1.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: Japanese Patent Application Laid-Open No. 2014-042423 Summary of the Invention

[0007] Problems to be solved by the invention

[0008] Heat generated by the coils is sometimes transferred to the fixed magnets. When the temperature of the magnets rises, the performance of the linear motor degrades. Patent Document 1 does not disclose any cooling of the fixed magnets. Therefore, a technology that can cool both the coils and the magnets is desired.

[0009] Solutions for solving problems

[0010] In one example of the present disclosure, a linear motor for a machine tool is provided. The linear motor includes: a magnet plate having a plurality of magnets arranged in a first direction; a slider having a plurality of coils arranged in the first direction, the slider being configured to slide relative to the magnet plate in the first direction; and a cooling pipe arranged to cool the ends of the plurality of coils and the ends of the plurality of magnets in the second direction in a second direction parallel to the surface of the magnet plate and orthogonal to the first direction.

[0011] In one example of the present disclosure, the cooling pipe is provided in the slider.

[0012] In one example of the present disclosure, the cooling pipe is arranged so as to overlap with ends of the plurality of coils in the second direction when viewed from a third direction perpendicular to both the first direction and the second direction.

[0013] In one example of the present disclosure, the cooling pipe is arranged so as to overlap with ends of the plurality of magnets in the second direction when viewed from the second direction.

[0014] In one example of the present disclosure, the slider includes a plurality of teeth arranged in the first direction. The plurality of teeth are provided on the slider so as to face the plurality of magnets. The plurality of teeth include: a first tooth, which is an outermost tooth and is not wound around the plurality of coils; and a second tooth, which is a tooth located adjacent to the first tooth and is wound around one of the plurality of coils. The cooling pipe is arranged so as to pass between the first tooth and the second tooth.

[0015] In one example of the present disclosure, the slider includes a first housing portion extending in the first direction and a second housing portion extending in the first direction. The first housing portion and the second housing portion are opposed to each other in the second direction. The magnet plate is disposed between the first housing portion and the second housing portion. The cooling pipe is arranged to pass through the interiors of the first housing portion and the second housing portion.

[0016] In another example of the present disclosure, a machine tool is provided. The machine tool includes: the linear motor; and a spindle for rotatably holding a workpiece or a tool. The linear motor is used to move the spindle.

[0017] In another example of the present disclosure, a machine tool is provided. The machine tool includes: the linear motor; and a table for placing a workpiece. The linear motor is used to drive the table.

[0018] In another example of the present disclosure, a machine tool is provided. The machine tool includes: a linear motor; and a loader for conveying components. The linear motor is used to drive the loader.

[0019] The above objects, features, aspects and advantages and other objects, features, aspects and advantages of the present invention will become more apparent from the following detailed description of the present invention when taken in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a perspective view showing the linear motor according to the embodiment from an oblique direction.

[0021] Figure 2This is a diagram showing the positional relationship among the magnet, coil, and cooling pipe in the Z-axis direction.

[0022] Figure 3 This is a diagram showing the positional relationship among the magnet, coil, and cooling pipe in the Y-axis direction.

[0023] Figure 4 This is a diagram showing the slider from the Z-axis direction.

[0024] Figure 5 It is along Figure 4 A cross-sectional view of the slider along line VV is shown.

[0025] Figure 6 It is along Figure 4 A cross-sectional view of the sliding member taken along line VI-VI is shown.

[0026] Figure 7 This is a diagram showing an example of the device configuration of a machine tool.

[0027] Figure 8 This is a diagram showing another example of the device configuration of a machine tool.

[0028] Figure 9 This is a diagram showing another example of the device configuration of a machine tool. DETAILED DESCRIPTION

[0029] Hereinafter, various embodiments of the present invention will be described with reference to the accompanying drawings. In the following description, identical components and elements are denoted by the same reference numerals. Their names and functions are also identical. Therefore, detailed descriptions thereof will not be repeated. In addition, the various embodiments and modifications described below may be optionally combined as appropriate.

[0030] <A. Linear Motor 100>

[0031] First, refer to Figure 1 , an overview of the linear motor 100 will be described. Figure 1 This is a perspective view showing the linear motor 100 according to the embodiment from an oblique direction.

[0032] like Figure 1 As shown, the linear motor 100 includes a magnet plate 10 and a slider 50 .

[0033] The magnet plate 10 functions as a stator. A plurality of magnets 12 are arranged on the magnet plate 10. For ease of explanation, the direction in which the magnets 12 are arranged is also referred to as the X-axis direction (first direction) below. The direction parallel to the surface of the magnet plate 10 and perpendicular to the X-axis direction is also referred to as the Y-axis direction (second direction). The direction perpendicular to both the X-axis direction and the Y-axis direction is also referred to as the Z-axis direction (third direction).

[0034] Each magnet 12 among the plurality of magnets 12 is arranged on the magnet plate 10 at predetermined intervals in the X-axis direction. Each magnet 12 among the magnets 12 is a permanent magnet. Each magnet 12 among the magnets 12 is arranged on the magnet plate 10 in such a manner that the polarity thereof is opposite to that of the adjacent magnets 12. As an example, it is assumed that the surface of one magnet 12 is an N pole and the back surface of the same magnet 12 is an S pole. In this case, the surface of the magnet 12 arranged next to the one magnet 12 is an S pole and the back surface is an N pole.

[0035] The slider 50 functions as a mover. The slider 50 includes a plurality of coils 52. The plurality of coils 52 are arranged in the X-axis direction on the slider 50. Each coil 52 is wound in an oblong shape around a tooth 53 (see FIG. 1 ) formed on the slider 50. Figure 3 ).

[0036] The plurality of coils 52 are provided on the slider 50 so as to face the plurality of magnets 12. In other words, the plurality of coils 52 are provided on the slider 50 so as to overlap with the plurality of magnets 12 when viewed from the Z-axis direction.

[0037] The slider 50 receives thrust by applying a magnetic field to the multiple magnets 12, thereby sliding on the magnet plate 10 in the X-axis direction. The magnetic field is generated by applying an alternating current to the multiple coils 52. The alternating current is supplied by, for example, a power supply (not shown) electrically connected to the coils 52.

[0038] <B. Cooling piping 54>

[0039] Next, refer to Figure 2 and Figure 3 , the cooling pipe 54 provided in the linear motor 100 will be described. Figure 2 This is a diagram showing the positional relationship among the magnet 12 , the coil 52 , and the cooling pipe 54 in the Z-axis direction. Figure 3 This is a diagram showing the positional relationship among the magnet 12 , the coil 52 , and the cooling pipe 54 in the Y-axis direction.

[0040] The linear motor 100 includes a cooling pipe 54. The cooling pipe 54 is configured to cool the ends of the multiple magnets 12 in the Y-axis direction and the ends of the multiple coils 52 in the Y-axis direction. This allows the cooling pipe 54 to cool not only the ends of the coils 52 but also the ends of the magnets 12, achieving efficient cooling. As a result, the performance degradation of the linear motor 100 associated with heat generation can be suppressed. Furthermore, thermal displacement of machinery (e.g., a machine tool) equipped with the linear motor 100 can be suppressed.

[0041] Furthermore, “ends of the plurality of magnets 12 in the Y-axis direction” refer to portions including at least the outermost ends of the magnets 12 in the Y-axis direction. For example, the end refers to a range having a length “d1” from the outermost ends of the magnets 12.

[0042] Furthermore, "ends of the plurality of coils 52 in the Y-axis direction" refer to portions including at least the outermost ends of the coils 52 in the Y-axis direction. As an example, the end of the coil 52 refers to a range having a length "d2" from the outermost end of the coil 52.

[0043] The cooling pipe 54 can be arranged arbitrarily if the cooling effect of the cooling pipe 54 reaches both the end of the magnet 12 and the end of the coil 52. As an example, the cooling pipe 54 can be arranged on the fixed side of the magnet plate 10 or on the movable side of the slider 50. Figure 2 and Figure 3 In the example, the cooling pipe 54 is arranged on the slider 50. By arranging the cooling pipe 54 on the slider 50, it is possible to prevent the heat generated by the coil 52 in the slider 50 from being transferred to the magnet plate 10. In addition, when the cooling pipe 54 is arranged on the slider 50, the length of the cooling pipe 54 is shortened compared to when the cooling pipe 54 is arranged on the magnet plate 10.

[0044] The cooling pipes 54 are arranged, for example, along the ends of the coils 52. As an example, the cooling pipes 54 are arranged so as to overlap the ends of the coils 52 in the Y-axis direction when viewed from the Z-axis direction. This allows the cooling pipes 54 to more effectively cool the ends of the coils 52.

[0045] Furthermore, cooling pipe 54 is arranged parallel to the ends of magnet 12. As an example, cooling pipe 54 is arranged so as to overlap the ends of multiple magnets 12 in the Y-axis direction. This allows cooling pipe 54 to cool the ends of magnet 12 more effectively.

[0046] The cooling pipe 54 has an inlet and an outlet for the refrigerant. The inlet and the outlet are connected to a cooler (not shown). The refrigerant flows from the inlet of the cooling pipe 54 to the outlet of the cooling pipe 54 to cool the magnet 12 and the coil 52. The refrigerant reaching the outlet is sent to the cooler for cooling. Thereafter, the cooled refrigerant is sent to the inlet of the cooling pipe 54 again. In this way, the refrigerant collects heat from the magnet 12 and the coil 52 by circulating in the sliding member 50. The refrigerant is, for example, a liquid including water.

[0047] The cooling pipe 54 is made of, for example, a metal pipe having good thermal conductivity. As an example, the cooling pipe 54 may be made of a copper pipe, an aluminum pipe, or a stainless steel pipe.

[0048] The cross-sectional shape of the cooling pipe 54 is arbitrary. The cross-sectional shape of the cooling pipe 54 may be, for example, circular, rectangular, or other shapes.

[0049] <C. Slider 50>

[0050] Next, refer to Figures 4 to 6 , the above-mentioned sliding member 50 is further described in detail. Figure 4 This is a diagram showing the slider 50 from the Z-axis direction. Figure 5 It is along Figure 4 A cross-sectional view of the slider 50 is shown along line VV. Figure 6 It is along Figure 4 A cross-sectional view of the slider 50 is shown along line VI-VI.

[0051] The slider 50 has a housing 60 that forms its exterior. The housing 60 is made of, for example, resin. The housing 60 houses the slider core 51, a plurality of coils 52, cooling pipes 54 and 56, and a fixing member 58.

[0052] The slider core 51 is formed, for example, from an electromagnetic steel sheet. Furthermore, a plurality of teeth 53 are formed on the slider core 51. Each tooth 53 protrudes from the lower surface of the slider core 51 in the Z-axis direction and faces the plurality of magnets 12. In other words, the plurality of teeth 53 are formed on the slider core 51 so as to overlap with the plurality of magnets 12 when viewed from the Z-axis direction. Furthermore, each tooth 53 extends in the Y-axis direction.

[0053] The teeth 53 include auxiliary teeth 53A (first teeth), which are the outermost teeth in the X-axis direction and are not wound around the coils 52; and coil teeth 53B (second teeth), which are teeth located next to the auxiliary teeth 53A and are wound around the coil teeth 53B. The cooling pipe 54 is arranged so as to pass between the auxiliary teeth 53A and the coil teeth 53B.

[0054] The dead space can be effectively utilized by utilizing the space between the auxiliary teeth 53A and the coil teeth 53B as a piping path for the cooling pipe 54. In addition, the slider 50 can be prevented from increasing in size in the X-axis direction.

[0055] The slider 50 also has accommodating portions 62A and 62B extending along the X-axis. These accommodating portions 62A and 62B form a portion of the housing 60, defining a space capable of accommodating an object. The accommodating portions 62A and 62B face each other along the Y-axis. The aforementioned magnetic plate 10 is positioned between the accommodating portions 62A and 62B. Thus, the accommodating portions 62A and 62B suppress movement of the slider 50 in the Y-axis direction while guiding the slider 50 along the X-axis.

[0056] Cooling pipe 54 is arranged to pass through both the interior of housing portion 62A and the interior of housing portion 62B. By utilizing the spaces within housing portion 62A and housing portion 62B as piping paths for cooling pipe 54, dead space can be effectively utilized. Furthermore, it is possible to prevent slider 50 from increasing in size in the Y-axis direction.

[0057] Preferably, the slider 50 is further provided with a cooling pipe 56 separate from the cooling pipe 54. While the cooling pipe 54 is provided on the lower surface of the slider core 51 (i.e., the surface closer to the magnet plate 10), the cooling pipe 56 is provided on the upper surface of the slider core 51 (i.e., the surface farther from the magnet plate 10). The provision of both cooling pipes 54 and 56 further improves the cooling efficiency of the slider 50.

[0058] More specifically, a plurality of grooves are formed on the upper surface of the slider core 51. The grooves are formed at equal intervals and extend in the Y-axis direction. The cooling pipe 56 is arranged so as to meander along the grooves formed on the upper surface of the slider core 51.

[0059] The cooling pipe 56 has an inlet and an outlet for the refrigerant. The inlet and the outlet are connected to a cooler (not shown). The refrigerant flows from the inlet of the cooling pipe 56 to the outlet of the cooling pipe 56 to cool the slider 50. The refrigerant reaching the outlet is sent to the cooler for cooling. Thereafter, the cooled refrigerant is sent to the inlet of the cooling pipe 56 again. In this way, the refrigerant circulates on the upper surface of the slider core 51 to dissipate heat from the slider 50. The refrigerant is, for example, a liquid including water.

[0060] The cooling pipe 56 is made of, for example, a metal pipe having good thermal conductivity. As an example, the cooling pipe 56 may be made of a copper pipe, an aluminum pipe, or a stainless steel pipe.

[0061] The cross-sectional shape of the cooling pipe 56 is arbitrary. The cross-sectional shape of the cooling pipe 56 may be, for example, circular, rectangular, or other shapes.

[0062] Furthermore, a through-hole extending in the Y-axis direction is formed in the slider core 51. A fixing member 58 is inserted into this through-hole. A threaded hole is formed in the fixing member 58 in the Z-axis direction, and a through-hole communicating with the threaded hole of the fixing member 58 in the Z-axis direction is formed in the slider core 51.

[0063] The shape of the fixing member 58 is arbitrary. As an example, the fixing member 58 may be in the shape of a rectangular parallelepiped, a cylindrical shape, or other shapes.

[0064] The fixing member 58 is made of a different type of member from the slider core 51. For example, the slider core 51 is made of laminated steel plates, while the fixing member 58 is made of a metal other than laminated steel plates. For example, the fixing member 58 may be made of iron or another type of metal.

[0065] <D. Application Examples of Linear Motor 100>

[0066] Next, refer to Figures 7 to 9 Next, an application example of the linear motor 100 will be described. The linear motor 100 can be used, for example, to drive various components in a machine tool.

[0067] The term "machine tool" as used herein encompasses a variety of devices capable of machining workpieces. Machine tool 200 may be a horizontal machining center or a vertical machining center. Alternatively, machine tool 200 may be a lathe, an auxiliary processing machine, or other cutting or grinding machinery.

[0068] When the linear motor 100 is used in a machine tool, the magnet plate 10, functioning as a stator, is mounted on a stationary component within the machine tool. Meanwhile, the slider 50, functioning as a mover, is mounted on a driven component within the machine tool. In this case, a bolt passes through the driven component and engages with a threaded hole formed in the fixing member 58 within the slider 50. This secures the driven component to the slider 50.

[0069] (D1. Spindle)

[0070] First, refer to Figure 7 , an example in which the linear motor 100 is applied to drive a main spindle will be described. Figure 7 This is a diagram showing an example of the device configuration of the machine tool 200 .

[0071] The linear motor 100 is used, for example, to move the position of a spindle 250 that rotatably holds a workpiece or a tool. The spindle 250 may be a workpiece spindle for rotating the workpiece or a tool spindle for rotating the tool.

[0072] For convenience of explanation, the coordinate system based on the main axis 250 is represented by the X' axis, the Y' axis, and the Z' axis. The X' axis, the Y' axis, and the Z' axis are orthogonal to each other.

[0073] like Figure 7 As shown, the machine tool 200 includes a control unit 200A, a drive unit 240A, and a spindle 250 .

[0074] The control unit 200A is, for example, a CNC (Computer Numerical Control) device. A CNC device is comprised of at least one integrated circuit. An integrated circuit may be comprised of, for example, at least one CPU (Central Processing Unit), at least one MPU (Micro Processing Unit), at least one ASIC (Application Specific Integrated Circuit), at least one FPGA (Field Programmable Gate Array), or a combination thereof. The control unit 200A controls the operation of the drive unit 240A by executing various programs, such as machining programs.

[0075] The drive unit 240A is a mechanism for driving the main shaft 250. The device structure of the drive unit 240A is arbitrary. The drive unit 240A can be composed of a single drive unit or a plurality of drive units. Figure 7 In the example of FIG. 1 , the drive unit 240A is composed of motor drivers 241A to 241C, linear motors 242A to 242C, and encoders 243A to 243C. The linear motors 242A to 242C each correspond to the linear motor 100 described above.

[0076] The motor driver 241A controls the driving of the spindle 250 in the X′-axis direction. The motor driver 241A receives an input of a control signal from the control unit 200A and outputs a current corresponding to the control signal to the linear motor 242A.

[0077] More specifically, control unit 200A sequentially outputs control signals containing target positions to motor driver 241A. Motor driver 241A calculates the actual position of spindle 250 based on feedback signals from encoder 243A and supplies current to linear motor 242A to reduce the difference between the actual position and the target position. Consequently, motor driver 241A moves spindle 250 to any desired position in the X'-axis direction.

[0078] The motor driver 241B controls the driving of the spindle 250 in the Y′-axis direction. The motor driver 241B receives an input of a control signal from the control unit 200A and outputs a current corresponding to the control signal to the linear motor 242B.

[0079] More specifically, control unit 200A sequentially outputs control signals containing target positions to motor driver 241B. Motor driver 241B calculates the actual position of spindle 250 based on feedback signals from encoder 243B and supplies current to linear motor 242B to reduce the difference between the actual position and the target position. Consequently, motor driver 241B moves spindle 250 to any desired position in the Y'-axis direction.

[0080] The motor driver 241C controls the driving of the spindle 250 in the Z′-axis direction. The motor driver 241C receives an input of a control signal from the control unit 200A and outputs a current corresponding to the control signal to the linear motor 242C.

[0081] More specifically, control unit 200A sequentially outputs control signals containing target positions to motor driver 241C. Motor driver 241C calculates the actual position of spindle 250 based on feedback signals from encoder 243C and supplies current to linear motor 242C to reduce the difference between the actual position and the target position. Consequently, motor driver 241C moves spindle 250 to any desired position in the Z'-axis direction.

[0082] (D2. Workbench)

[0083] Next, refer to Figure 8 , an example in which the linear motor 100 is applied to drive a worktable will be described. Figure 8 This is a diagram showing another example of the device configuration of the machine tool 200 .

[0084] The linear motor 100 is used, for example, to drive a table 260 provided in a machine tool. The table 260 is a table for placing a workpiece to be processed.

[0085] like Figure 8 As shown, the machine tool 200 includes a control unit 200A, a drive unit 240B, and a table 260 .

[0086] The driving unit 240B is a mechanism for driving the workbench 260. The device structure of the driving unit 240B is arbitrary. The driving unit 240B can be composed of a single driving unit or a plurality of driving units. Figure 8 In the example of FIG. 2 , the drive unit 240B is composed of motor drivers 241D and 241E, linear motors 242D and 242E, and encoders 243D and 243E. The linear motors 242D and 242E each correspond to the linear motor 100 described above.

[0087] The motor driver 241D controls the driving of the table 260 in the X′-axis direction. The motor driver 241D receives an input of a control signal from the control unit 200A and outputs a current corresponding to the control signal to the linear motor 242D.

[0088] More specifically, the control unit 200A sequentially outputs control signals containing target positions to the motor driver 241D. The motor driver 241D calculates the actual position of the worktable 260 based on feedback signals from the encoder 243D and supplies current to the linear motor 242D to reduce the difference between the actual position and the target position. Consequently, the motor driver 241D moves the worktable 260 to any position in the X'-axis direction.

[0089] The motor driver 241E controls the driving of the table 260 in the Y′-axis direction. The motor driver 241E receives an input of a control signal from the control unit 200A and outputs a current corresponding to the control signal to the linear motor 242E.

[0090] More specifically, the control unit 200A sequentially outputs control signals containing target positions to the motor driver 241E. The motor driver 241E calculates the actual position of the worktable 260 based on feedback signals from the encoder 243E and supplies current to the linear motor 242E to reduce the difference between the actual position and the target position. Consequently, the motor driver 241E moves the worktable 260 to any position along the Y' axis.

[0091] (D3. Loader)

[0092] Next, refer to Figure 9 , an example in which the linear motor 100 is applied to driving a loader will be described. Figure 9 This is a diagram showing another example of the device configuration of the machine tool 200 .

[0093] The linear motor 100 is used, for example, to drive a loader 270 for conveying a component, which may be a workpiece before or after processing, or a tool.

[0094] like Figure 9 As shown, the machine tool 200 includes a control unit 200A, a drive unit 240C, and a loader 270 .

[0095] The drive unit 240C is a mechanism for driving the loader 270. The device structure of the drive unit 240C is arbitrary. The drive unit 240C can be composed of a single drive unit or a plurality of drive units. Figure 9In the example of FIG. 2 , the drive unit 240C includes motor drivers 241F, 241G, and 241H, linear motors 242F, 242G, and 242H, and encoders 243F, 243G, and 243H. The linear motors 242F, 242G, and 242H each correspond to the aforementioned linear motor 100 .

[0096] The motor driver 241F controls the driving of the loader 270 in the X′-axis direction. The motor driver 241F receives an input of a control signal from the control unit 200A and outputs a current corresponding to the control signal to the linear motor 242F.

[0097] More specifically, control unit 200A sequentially outputs control signals containing target positions to motor driver 241F. Motor driver 241F calculates the actual position of loader 270 based on feedback signals from encoder 243F and supplies current to linear motor 242F to reduce the difference between the actual position and the target position. Consequently, motor driver 241F moves loader 270 to any desired position in the X'-axis direction.

[0098] The motor driver 241G controls the driving of the loader 270 in the Y′-axis direction. The motor driver 241G receives an input of a control signal from the control unit 200A and outputs a current corresponding to the control signal to the linear motor 242G.

[0099] More specifically, control unit 200A sequentially outputs control signals containing target positions to motor driver 241G. Motor driver 241G calculates the actual position of loader 270 based on feedback signals from encoder 243G and supplies current to linear motor 242G to reduce the difference between the actual position and the target position. Consequently, motor driver 241G moves loader 270 to any desired position in the Y'-axis direction.

[0100] The motor driver 241H controls the driving of the loader 270 in the Z′-axis direction. The motor driver 241H receives an input of a control signal from the control unit 200A and outputs a current corresponding to the control signal to the linear motor 242H.

[0101] More specifically, the control unit 200A sequentially outputs control signals containing target positions to the motor driver 241H. The motor driver 241H calculates the actual position of the loader 270 based on feedback signals from the encoder 243H and supplies current to the linear motor 242H to reduce the difference between the actual position and the target position. Consequently, the motor driver 241H moves the loader 270 to any desired position in the Z'-axis direction.

[0102] The embodiments disclosed herein are to be considered in all respects as illustrative rather than restrictive. The scope of the present invention is indicated by the claims rather than the above description, and is intended to include all modifications within the meaning and scope equivalent to the claims.

[0103] Description of Reference Numerals

[0104] 10. Magnetic plate; 12. Magnet; 50. Slider; 51. Slider core; 52. Coil; 53. Tooth; 53A. Auxiliary tooth; 53B. Coil tooth; 54. Cooling pipe; 56. Cooling pipe; 58. Fixing member; 60. Housing; 62A. Accommodation; 62B. Accommodation; 100. Linear motor; 200. Machine tool; 200A. Control unit; 240A. Drive unit; 240B. Drive unit; 240C. Drive unit; 241A. Motor driver; 241B. Motor driver; 241C. Motor driver; 241D. Motor driver; 241E. Motor driver , 241F, motor driver; 241G, motor driver; 241H, motor driver; 242A, linear motor; 242B, linear motor; 242C, linear motor; 242D, linear motor; 242E, linear motor; 242F, linear motor; 242G, linear motor; 242H, linear motor; 243A, encoder; 243B, encoder; 243C, encoder; 243D, encoder; 243E, encoder; 243F, encoder; 243G, encoder; 243H, encoder; 250, spindle; 260, workbench; 270, loader.

Claims

1. A linear motor for a machine tool, wherein: The linear motor has: a magnet plate having a plurality of magnets arranged in a first direction; a slider having a plurality of coils arranged in the first direction, the slider being configured to be slidable in the first direction relative to the magnetic plate; as well as The cooling pipe is arranged so as to cool the ends of the plurality of coils and the ends of the plurality of magnets in the second direction, the second direction being parallel to the surface of the magnet plate and orthogonal to the first direction.

2. The linear motor according to claim 1, wherein: The cooling pipe is provided on the slider.

3. The linear motor according to claim 1 or 2, wherein: The cooling pipe is arranged so as to overlap with ends of the plurality of coils in the second direction when viewed from a third direction that is orthogonal to both the first direction and the second direction.

4. The linear motor according to any one of claims 1 to 3, wherein: The cooling pipe is arranged so as to overlap with ends of the plurality of magnets in the second direction when viewed from the second direction.

5. The linear motor according to any one of claims 1 to 4, wherein: The slider includes a plurality of teeth arranged in the first direction, and the plurality of teeth are provided on the slider so as to face the plurality of magnets. The plurality of teeth include: a first tooth, which is an outermost tooth and on which the plurality of coils are not wound; and a second tooth located next to the first tooth, one of the plurality of coils being wound around the second tooth; The cooling pipe is arranged so as to pass between the first teeth and the second teeth.

6. The linear motor according to any one of claims 1 to 5, wherein: The sliding member comprises: a first accommodating portion extending along the first direction; and a second accommodating portion extending along the first direction, The first accommodating portion and the second accommodating portion are opposed to each other in the second direction, The magnetic plate is disposed between the first accommodation portion and the second accommodation portion. The cooling pipe is arranged so as to pass through the interior of the first accommodating portion and the interior of the second accommodating portion.

7. A machine tool, wherein: The machine tool has: The linear motor according to any one of claims 1 to 6; and The spindle is used to hold the workpiece or tool in a rotatable manner, The linear motor is used to move the position of the main shaft.

8. A machine tool, wherein: The machine tool has: The linear motor according to any one of claims 1 to 6; and A workbench for placing workpieces. The linear motor is used to drive the workbench.

9. A machine tool, wherein: The machine tool has: The linear motor according to any one of claims 1 to 6; and Loaders for transporting components, The linear motor is used to drive the loader.

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