Ultrahigh vacuum gas exhausting and filling device and method

Abstract

The invention discloses an ultrahigh vacuum gas exhausting and filling device and method, relates to the technical field of refined detection, and mainly aims to solve the problems of poor precision and purity of mixed filling of metal and rare gas in the prior art. Comprising an exhaust subsystem, a detection subsystem and an inflation subsystem, and a vortex dry pump, a magnetic suspension molecular pump and an ion pump are connected to the detection subsystem and a containing device through an exhaust valve set pipeline and used for vacuumizing the containing device; the detection subsystem comprises helium mass spectrum leak detection equipment, a first vacuum degree detection device, a second vacuum degree detection device and a detection valve group; the helium mass spectrum leak detection equipment, the first vacuum degree detection device and the second vacuum degree detection device are connected to the exhaust subsystem and the inflation subsystem through pipelines of the detection valve group; the inflation subsystem comprises purification equipment, a rare gas containing device and an inflation valve group, and the purification equipment and the rare gas containing device are connected to the containing device and the detection subsystem through inflation valve group pipelines.

Description

Technical Field

[0001] The present application relates to the technical field of mixed filling of metal and constant-pressure purified gas, and in particular to an ultra-high vacuum exhaust and filling device and method. Background Art

[0002] As the demand for precision in industrial production continues to increase, industrial gas separation technology has become a key R&D project. The mixed application of metals and constant-pressure purified gases can improve industrial gas separation efficiency, making the mixed filling of metals and constant-pressure purified gases particularly important.

[0003] Currently, the conventional method for mixing metals and purified gases at constant pressure typically involves evacuating the chamber with a vacuum pump before filling with the metal and rare gas. However, due to the large volume of the vacuum chamber, this process takes a long time to evacuate, making it difficult to implement matching control. Furthermore, during rare gas filling, the long gas path through the vacuum chamber results in waste, making it impossible to guarantee metal purity and resulting in reduced precision and purity of the mixed metal and rare gas filling process. Summary of the Invention

[0004] In view of this, the present application provides an ultra-high vacuum exhaust and inflation device and method, the main purpose of which is to solve the problem of poor accuracy and purity in the existing metal and rare gas mixed filling.

[0005] According to one aspect of the present application, an ultra-high vacuum exhaust and inflation device is provided, comprising: an exhaust subsystem, a detection subsystem, and an inflation subsystem;

[0006] The exhaust subsystem includes a vortex dry pump, a magnetic levitation molecular pump, an ion pump, and an exhaust valve group. The vortex dry pump, the magnetic levitation molecular pump, and the ion pump are connected to the detection subsystem and the container through the exhaust valve group pipeline to evacuate the container;

[0007] The detection subsystem includes a helium mass spectrometer leak detection device, a first vacuum detection device, a second vacuum detection device, and a detection valve group. The helium mass spectrometer leak detection device, the first vacuum detection device, and the second vacuum detection device are connected to the exhaust subsystem and the inflation subsystem through the detection valve group pipeline;

[0008] The inflation subsystem includes a purification device, a rare gas container, and an inflation valve group. The purification device and the rare gas container are connected to the container and the detection subsystem through pipelines of the inflation valve group.

[0009] Furthermore, the exhaust valve group includes an electromagnetic isolation valve, a gate valve, a first stop valve, and a second stop valve.

[0010] The vortex dry pump is connected to the magnetic levitation molecular pump pipeline through the electromagnetic isolation valve;

[0011] The magnetic levitation molecular pump is connected to the ion pump and a plurality of first stop valve pipelines respectively through the gate valve, and the first stop valve is provided on the pipeline connected to the containing device;

[0012] The plurality of second stop valves are respectively arranged on the pipelines connected to the detection subsystem.

[0013] Furthermore, the detection valve group includes a leak detection valve and a third stop valve.

[0014] The helium mass spectrometer leak detection device is arranged on the pipeline between the magnetic levitation molecular pump and the electromagnetic isolation valve in the exhaust subsystem through the leak detection valve;

[0015] The first vacuum detection device and the second vacuum detection device are respectively arranged on the pipeline between the exhaust valve group of the exhaust subsystem and the inflation valve group of the inflation subsystem through the third stop valve.

[0016] Furthermore, the inflation valve group includes at least one fine-tuning valve, at least one pressure reducing valve and a fourth shut-off valve.

[0017] The rare gas containing device is connected to the fine-tuning valve through a pipeline via the pressure reducing valve;

[0018] The purification equipment is arranged on the pipeline between the fine-tuning valve and the fourth stop valve;

[0019] The fourth stop valve is arranged on the pipeline between the exhaust valve group of the exhaust subsystem and the inflation valve group of the inflation subsystem.

[0020] Furthermore, the system also includes a metal powder containing device, and the containing device and the metal powder containing device are made of glass.

[0021] According to another aspect of the present application, an ultra-high vacuum exhaust and inflation method is provided, comprising:

[0022] The first pipeline is connected by switching the exhaust valve group in the exhaust subsystem, and the vortex dry pump, magnetic levitation molecular pump, and ion pump in the exhaust subsystem are started to vacuum the contained device;

[0023] The second pipeline is connected by switching control of the detection valve group in the detection subsystem, and after the helium mass spectrometer leak detection equipment in the detection subsystem performs air tightness detection on all pipelines, the first vacuum detection device and the second vacuum detection device are started to perform vacuum detection on the first pipeline;

[0024] When the vacuum detection result matches the preset vacuum condition, the third pipeline is connected through the switch control of the inflation valve group in the inflation subsystem, and the purification equipment and rare gas container in the inflation subsystem are started to inflate the container.

[0025] Furthermore, the exhaust valve group includes an electromagnetic isolation valve, a gate valve, a first stop valve, and a second stop valve. The first pipeline is connected through the switch control of the exhaust valve group in the exhaust subsystem, and the vortex dry pump, the magnetic levitation molecular pump, and the ion pump in the exhaust subsystem are started to vacuum the contained device, including:

[0026] Connecting the first sub-pipeline between the vortex dry pump, the magnetic levitation molecular pump, and the ion pump by opening the electromagnetic isolation valve and the gate valve, and opening the first stop valve, which is provided on the pipeline connected to the containing device;

[0027] When the second stop valve is opened, the second sub-pipeline is connected, and the vortex dry pump, the magnetic levitation molecular pump, and the ion pump are started to vacuum the container. The second stop valves are respectively set on the pipelines connected to the detection subsystem.

[0028] Furthermore, the detection valve group includes a leak detection valve and a third stop valve, and the second pipeline is connected through the switch control of the detection valve group in the detection subsystem, and after the helium mass spectrometer leak detection equipment in the detection subsystem performs air tightness detection on all pipelines, the first vacuum detection device and the second vacuum detection device are started to perform vacuum detection on the first pipeline, including:

[0029] Opening the leak detection valve to connect the third sub-pipeline between the helium mass spectrometer leak detection device and the vortex dry pump and the magnetic levitation molecular pump, and performing leak detection on all pipelines using the helium mass spectrometer leak detection device;

[0030] When all pipelines pass the leakage detection, close the leak detection valve, and connect the first vacuum detection device, the second vacuum detection device and the fourth sub-pipeline between the container by opening the third stop valve, and perform vacuum detection on the container through the first vacuum detection device and the second vacuum detection device, so that when it is detected that the vacuum state of the container matches the preset vacuum condition, start the inflation subsystem for inflation.

[0031] Furthermore, the inflation valve group includes at least one fine-tuning valve, at least one pressure-reducing valve, and a fourth shut-off valve. The third pipeline is connected through the on-off control of the inflation valve group in the inflation subsystem, and the purification equipment and the rare gas container in the inflation subsystem are started to inflate the container, including:

[0032] Opening the fine-tuning valve and the pressure-reducing valve to connect the fifth sub-pipeline between the purification device and the rare gas container, and opening the fourth stop valve to connect the sixth sub-pipeline between the purification device and the container;

[0033] The rare gas container is inflated through the purification device, and when the pressure detected by the second vacuum detection device in the detection subsystem reaches a preset pressure, the third stop valve and the fourth stop valve are closed to stop the inflation operation.

[0034] Furthermore, the method further comprises:

[0035] When it is detected that the vacuum state of the containing device matches the preset vacuum condition, heating the metal powder containing device by a heating device so that the metal powder enters the containing device;

[0036] Wherein, the containing device and the metal powder containing device are made of glass.

[0037] By means of the above technical solution, the technical solution provided by the embodiment of the present application has at least the following advantages:

[0038] The present application provides an ultra-high vacuum exhaust and inflation device and method. Compared with the prior art, the embodiments of the present application include an exhaust subsystem, a detection subsystem, and an inflation subsystem. The exhaust subsystem includes a vortex dry pump, a magnetic levitation molecular pump, an ion pump, and an exhaust valve group. The vortex dry pump, the magnetic levitation molecular pump, and the ion pump are connected to the detection subsystem and the container through the exhaust valve group pipeline for evacuating the container; the detection subsystem includes a helium mass spectrometer leak detection device, a first vacuum degree detection device, a second vacuum degree detection device, and a detection valve group. The helium mass spectrometer leak detection device, the first vacuum degree detection device, the The second vacuum degree detection device is connected to the exhaust subsystem and the inflation subsystem through the detection valve group pipeline; the inflation subsystem includes purification equipment, a rare gas container, and an inflation valve group. The purification equipment and the rare gas container are connected to the container and the detection subsystem through the inflation valve group pipeline. The pipeline structure is improved to increase multi-channel inflation, reduce the rare gas inflation distance, improve the vacuum pumping efficiency, and improve the vacuum pumping capacity through the ion pump, which will reduce the residual gas content. The purity of the inflation gas is improved through the purification equipment. The precise control of inflation is achieved through the detection subsystem and the inflation and exhaust subsystems.

[0039] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Various other advantages and benefits will become apparent to those skilled in the art upon reading the detailed description of the preferred embodiment below. The accompanying drawings are for illustration purposes only and are not to be considered as limiting the present application. The same reference symbols are used throughout the drawings to represent the same components. In the drawings:

[0041] Figure 1 A schematic structural diagram of an ultra-high vacuum exhaust and inflation device provided in an embodiment of the present application is shown;

[0042] Figure 2 A schematic diagram of the hardware structure of an inflation and exhaust device provided in an embodiment of the present application is shown;

[0043] Figure 3 A schematic flow chart of an ultra-high vacuum exhaust and inflation method provided in an embodiment of the present application is shown. DETAILED DESCRIPTION

[0044] Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments set forth herein. Rather, these embodiments are provided to enable a more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0045] The present application embodiment provides an ultra-high vacuum exhaust and inflation device, such as Figure 1 As shown, the system includes: an exhaust subsystem 11, a detection subsystem 12, and an inflation subsystem 13.

[0046] In the embodiment of the present application, the container is a glass-made and sealed device that can achieve precise sealing of a mixture of gas and metal, and there is no specific limitation on the specific form and type. In the filling and exhaust device, inflation and exhaust are performed through pipelines. In this case, the container is at least two glass-made devices. Before the container is vacuumed, it is necessary to ensure the connectivity of the exhaust pipeline, that is, the exhaust system includes a vortex dry pump, a magnetic levitation molecular pump, an ion pump and an exhaust valve group. The vortex dry pump, the magnetic levitation molecular pump and the ion pump are all used to extract gas. At this time, the vacuum degree after vacuuming is increased by the ion pump, so that the container is in an ultra-vacuum state. Among them, the vortex dry pump, the magnetic levitation molecular pump and the ion pump are connected to the detection subsystem and the container through the exhaust valve group pipeline, which is used to vacuum the container so that the container is in an ultra-vacuum state and then inflated. In addition, the exhaust valve group includes multiple different types of valves so that the pipeline can be connected during the vacuum operation by opening or closing the valve.

[0047] In an embodiment of the present application, the detection subsystem includes a helium mass spectrometer leak detection device, a first vacuum detection device, a second vacuum detection device, and a detection valve group. The helium mass spectrometer leak detection device is used to detect pipeline leaks, the first vacuum detection device is used to detect the vacuum state, and the second vacuum detection device is used to detect pressure. The helium mass spectrometer leak detection device, the first vacuum detection device, and the second vacuum detection device are connected to the exhaust subsystem and the inflation subsystem through the detection valve group pipeline. That is, when the exhaust subsystem is evacuated, the detection subsystem performs a leak detection before evacuation, and performs a vacuum state detection after evacuation. Specifically, the first vacuum detection device and the second vacuum detection device perform a vacuum detection during inflation. This embodiment of the present application does not make specific limitations. In addition, the detection valve group includes multiple valves of different types so that the pipeline connection during detection can be achieved by opening or closing the valves.

[0048] In an embodiment of the present application, the inflation subsystem includes a purification device, a rare gas container, and an inflation valve group. The purification device is used to purify the rare gas and increase the purity of the rare gas. Among them, the purification device and the rare gas container are connected to the container and the detection subsystem through the inflation valve group pipeline, so that the detection subsystem can be used for detection during the inflation process to ensure the accuracy of the inflation. In addition, the inflation valve group includes a plurality of different types of valves, which are convenient for realizing pipeline connectivity during inflation through open or closed valves, and adjusting the fine-tuning valve to precisely control the inflation flow. In some embodiments, the rare gas container is a metal bottle for containing rare gases, and the rare gases include but are not limited to helium (He), neon (Ne), etc.

[0049] It should be noted that in the embodiment of the present application, the vortex dry pump is an operating air pump based on a double-vortex disc structure, which is usually composed of two vortex discs, one of which is fixed by the vortex disc and the other moves relative to the vortex disc. A series of gradually decreasing closed volumes are formed between the two vortex discs, and these volumes change with the relative movement of the vortex discs, thereby realizing the compression and discharge of the gas. The magnetic levitation molecular pump is based on the momentum transfer between the high-speed rotating rotor and the gas molecules. The core components include rotating blades and fixed blades. The high-speed rotation causes the gas molecules to collide with the blade surface, and the momentum is transferred to the gas molecules, causing some gas molecules to produce a directional flow and be discharged out of the pump, thereby achieving the purpose of pumping. An ion pump is a vacuum pump that uses the force of ions to extract gas or vapor.

[0050] The helium mass spectrometer leak detection equipment is a mass spectrometer that uses helium or hydrogen as a leak detector gas and detects helium with a gas analyzer for leak detection. At this time, a helium gun can be used to slightly purge the vacuum device connection from the outside. If the connection is not sealed well, helium will penetrate into the device and be detected by the helium mass spectrometer leak detector to detect pipeline leaks. The first vacuum detection device and the second vacuum detection device are both instruments for detecting vacuum. The first vacuum detection device can be a cold cathode Pirani vacuum gauge, and the second vacuum detection device can be a thin film gauge to play different vacuum detection roles. The embodiments of this application do not make specific limitations. The purification equipment is an important equipment in the gas liquefaction process. According to the type of impurities, chemical methods, freezing methods, or physical adsorption methods can be used to remove impurities to achieve the purpose of gas purification.

[0051] In the embodiments of the present application, there are no specific restrictions on the specific models and manufacturers of the vortex dry pump, magnetic levitation molecular pump, ion pump, helium mass spectrometer leak detection equipment, first vacuum detection device, second vacuum detection device, and purification equipment. At the same time, there are no specific restrictions on the specific models and manufacturers of the various valves in the embodiments of the present application. They can be controlled manually or remotely based on a controller, which is not specifically limited in the embodiments of the present application. In addition, the control script can be compiled through a remote controller or a control terminal, and each pump and detection device and equipment can be started or stopped manually, which is not specifically limited in the embodiments of the present application.

[0052] In another embodiment of the present application, in order to further illustrate and define, as Figure 2 The system piping structure shown in the figure is

[0053] The vortex dry pump 1 is connected to the magnetic levitation molecular pump 4 through the electromagnetic isolation valve 2;

[0054] The magnetic levitation molecular pump 4 is connected to the ion pump 6 and the first stop valve pipeline respectively through the gate valve 5.

[0055] In order to achieve the purpose of extracting gas from the ultra-vacuum state of the container and reduce the cost of pipelines, the exhaust valve group includes an electromagnetic isolation valve 2, a gate valve 5 and a first stop valve including a stop valve 9, a stop valve 14, a stop valve 18, a stop valve 23, and a second stop valve. The first stop valve is used to connect each vacuum pump, and the second stop valve is used to connect each detection equipment. In the exhaust subsystem, the second stop valve includes a stop valve 10, a stop valve 12, a stop valve 19, and a stop valve 21. When the vacuum operation is performed, the second stop valve is in an open state. At this time, the first stop valve is set on the pipeline connected to the container 15 and / or 16, and the second stop valve is respectively set on the pipeline connected to the detection subsystem, and all are in an open state, thereby ensuring that the vacuum state of the container can be detected by using the open second stop valve when vacuuming. In addition, in order to ensure that the inflation subsystem is closed when the exhaust subsystem is working, the fourth stop valve, including the stop valve 31 and the stop valve 36, is closed at this time.

[0056] In another embodiment of the present application, in order to further illustrate and define, as Figure 2 As shown,

[0057] The helium mass spectrometer leak detection device 38 is arranged on the pipeline between the magnetic levitation molecular pump 4 and the electromagnetic isolation valve 2 in the inflation subsystem through the leak detection valve 3;

[0058] The first vacuum detection device 11 and / or 20, the second vacuum detection device 13 and / or 22 are respectively arranged on the pipeline between the exhaust valve group of the exhaust subsystem and the inflation valve group of the inflation subsystem through the third stop valve.

[0059] To achieve vacuum and leak detection during the evacuation and inflation processes, the detection valve assembly includes a leak detection valve 3 and a third shut-off valve. In the detection subsystem, the third shut-off valve includes shut-off valves 10, 12, 19, and 21. After the third shut-off valves are opened and before the exhaust subsystem operates, a helium mass spectrometer leak detection device 38 is used to detect leaks in all pipelines of the ultra-high vacuum exhaust and inflation device of this embodiment. During the operation of the exhaust subsystem, the first vacuum detection device 11 and / or 20 is used to detect the vacuum level in the container 15 and / or 24.

[0060] In some embodiments, when the exhaust subsystem is evacuating a vacuum and the inflation subsystem is filling with rare gas, the stop valves 10 and 19 corresponding to the first vacuum detection device 11 and / or 20, and the stop valves 12 and 21 corresponding to the second vacuum detection device 13 and / or 22, are all in an open state, so that the first vacuum detection device can detect the vacuum state during exhaust and the second vacuum detection device can detect the vacuum state during inflation. In addition, the stop valves 9 and 18 are set to open when the exhaust subsystem is evacuating a vacuum and to close when the inflation subsystem is inflating. At the same time, the stop valves 9 and 18 are set between the inflation pipeline, the detection pipeline, and the exhaust system, so that during the inflation process, the exhaust device can be isolated from the detection pipeline and the inflation system.

[0061] In some embodiments, before the exhaust subsystem and the inflation subsystem are operated, all valves in the detection subsystem are opened to connect all pipelines. At the same time, the leak detection valve 3 is opened, and the helium mass spectrometer leak detection device 38 is driven to detect all pipelines until it is determined that there are no leaks in all pipelines. Then, the leak detection valve 3 is closed, and the exhaust subsystem is started to perform a vacuum operation.

[0062] In another embodiment of the present application, in order to further illustrate and define, as Figure 2 As shown, to achieve effective filling of the noble gas and ensure the purity of the filling gas, purification equipment 30 and / or 35 is installed in the pipeline between the fine-tuning valve 29 and / or 34 and the fourth shut-off valve. The fourth shut-off valve is installed in the pipeline between the exhaust valve group of the exhaust subsystem and the inflation valve group of the inflation subsystem. The inflation valve group includes at least one fine-tuning valve 29 and / or 34, at least one pressure reducing valve 28 and / or 33, and the fourth shut-off valve. When the inflation subsystem is inflated, the noble gas container 27 and / or 32, which serves as a bottle containing the noble gas, is connected to the fine-tuning valve 29 and / or 34 through the pressure reducing valve 28 and / or 33 to fill the noble gas into the container 15 and / or 24. In some embodiments, the fourth shut-off valve includes a shut-off valve 31 and a shut-off valve 36. During inflation, the shut-off valves 31 and 36 are opened, and the shut-off valves 18 and 9 are closed. At the same time, during inflation, in order to perform vacuum detection, the stop valve 12 and the stop valve 21 can be kept open, the stop valves 10 and 19 can be closed, and the stop valve 14 and the stop valve 23 can be opened, so that the rare gas containing device 27 and / or 32 can fill the rare gas into the containing device 24 and / or 15.

[0063] In another embodiment of the present application, for further explanation and limitation, the system further includes a metal powder holding device 17 and / or 26. At this time, a flame gun can be used to heat the metal powder in the metal powder holding device so that the metal powder is driven into the holding device 24 and / or 15 to achieve mixing of the metal powder and the rare gas.

[0064] In some embodiments, the metals in the metal powder container are different for different fields of use. For example, in the field of atomic precision testing, the metals are alkali metals, including but not limited to potassium, rubidium, and cesium, and the rare gases include but are not limited to helium (He), neon (Ne), argon (Ar), krypton (Kr), and xenon (Xe). For another example, in the field of storage and filling and exhaust, the metals include but are not limited to inert metal mercury and active metal gallium, and the rare gases are inert rare gases, so as to play a protective role after filling and prevent metal oxidation or leakage. This embodiment of the present application does not make specific limitations.

[0065] In some embodiments, the container and the metal powder container are made of glass to ensure that the metal powder and the rare gas do not chemically react with the container, thereby achieving the purpose of detection stability. In addition, the metal powder in the embodiments of the present application is an alkali metal powder, and the alkali metal is not specifically limited.

[0066] In some embodiments, as Figure 2 As shown, the exhaust subsystem further includes a frame 37,

[0067] In some embodiments, the detection subsystem further includes a volume chamber 8 to calculate the volume of the vacuum chamber. When the exhaust subsystem is working, the stop valve 7 is opened, and when the inflation subsystem is working, the stop valve 7 is closed.

[0068] It should be noted that the first stop valve, the second stop valve, the third stop valve, and the fourth stop valve in the embodiment of the present application are only used to distinguish the stop valves in different subsystems. The second stop valve and the third stop valve can be shared, or a plurality of different stop valves can be provided. This is not specifically limited in the implementation of the present application. In a specific implementation scenario, in order to reduce the setting of the pipeline, the second stop valve and the third stop valve can be the same stop valve 10, stop valve 12, stop valve 19, and stop valve 21, which are opened and closed accordingly only when the exhaust subsystem and the detection subsystem are vacuumed and tested respectively, thereby achieving the purpose of multifunctional inflation and exhaust with the least number of stop valves. In the embodiment of the present application, the models of the electromagnetic isolation valve, the gate valve, the pressure reducing valve, the leak detection valve, the fine-tuning valve, and the various stop valves are not specifically limited.

[0069] In some embodiments, as Figure 2As shown, the pipeline in the embodiment of the present application can be made of metal. Since the containing devices 24, 15, and the metal powder containing devices 17, 26 are made of glass, the stop valve 23 and the stop valve 14, and the connecting pipelines 16, 25 between the containing devices 24, 15, and the metal powder containing devices 17, 26 are made of glass respectively.

[0070] In a specific implementation scenario, such as Figure 2 As shown, the filling and exhaust device in the embodiment of the present application can realize the purpose of simultaneously filling and exhausting multiple groups of devices containing devices 24 and devices 15, that is, constructing the pipeline in a symmetrical form. For example, the vortex dry pump 1, the electromagnetic isolating valve 2, the magnetic levitation molecular pump 4, the gate valve 5, the ion pump 6, the volume chamber 8, the stop valve 7, the helium mass spectrometer leak detection device 38, and the leak detection valve 3 are part of a common exhaust subsystem, and the stop valve 9 and the stop valve 18 are respectively connected through the gate valve 5 and the ion pump 6 to form a symmetrical pipeline, that is, the stop valve 9, the stop valve 10, the first vacuum detection device 11, the stop valve 12, the second vacuum detection device 13, the stop valve 14, the container 15, the glass material pipeline 16 and the metal powder container 17 are one of the symmetrical pipelines in the exhaust subsystem, and the stop valve 18, the stop valve 19, the first vacuum detection device 20, the stop valve 21, the second vacuum detection device 22, the stop valve 23, the container 24, the glass material pipeline 25 and the metal powder container 26 are another symmetrical pipeline in the exhaust subsystem. The embodiments of the present application do not make specific limitations. Correspondingly, since the stop valve 31 and the stop valve 36 are closed when the exhaust subsystem is evacuated, and the stop valve 9 and the stop valve 18 are closed when the inflation subsystem is working, symmetrical inflation pipelines can be formed respectively, that is, an inflation pipeline including a second vacuum detection device 13, a stop valve 12, a stop valve 14, a container 15, a glass pipeline 16, a metal powder container 17, a stop valve 31, a purification equipment 30, a fine-tuning valve 29, a pressure reducing valve 28, and a rare gas container 27, and another inflation pipe including a second vacuum detection device 22, a stop valve 21, a stop valve 23, a container 24, a glass pipeline 25, a metal powder container 26, a stop valve 36, a purification equipment 35, a fine-tuning valve 34, a pressure reducing valve 33, and a rare gas container 32.

[0071] An embodiment of the present application provides an ultra-high vacuum exhaust and inflation device, including an exhaust subsystem, a detection subsystem, and an inflation subsystem, wherein the exhaust subsystem includes a vortex dry pump, a magnetic levitation molecular pump, an ion pump, and an exhaust valve group, wherein the vortex dry pump, the magnetic levitation molecular pump, and the ion pump are connected to the detection subsystem and the container through the exhaust valve group pipeline, so as to evacuate the container; the detection subsystem includes a helium mass spectrometer leak detection device, a first vacuum degree detection device, a second vacuum degree detection device, and a detection valve group, wherein the helium mass spectrometer leak detection device, the first vacuum degree detection device, the second vacuum degree detection device, and the detection valve group The device is connected to the exhaust subsystem and the inflation subsystem through the detection valve group pipeline; the inflation subsystem includes purification equipment, a rare gas container, and an inflation valve group. The purification equipment and the rare gas container are connected to the container and the detection subsystem through the inflation valve group pipeline. The pipeline structure is improved to increase multi-channel inflation, reduce the rare gas inflation distance, improve the vacuum pumping efficiency, and improve the vacuum pumping capacity through the ion pump, which will reduce the residual gas content. The purity of the inflation gas is improved through the purification equipment. The precise control of inflation is achieved through the detection subsystem and the inflation and exhaust subsystems.

[0072] Furthermore, as a response to the above Figure 1 The embodiment of the present application provides an ultra-high vacuum exhaust and inflation method, such as Figure 3 As shown, the method includes:

[0073] Step 301: Connect the first pipeline by switching the exhaust valve group in the exhaust subsystem, and start the vortex dry pump, magnetic levitation molecular pump, and ion pump in the exhaust subsystem to evacuate the contained device;

[0074] Step 302: Connect the second pipeline by controlling the on / off control of the detection valve group in the detection subsystem, and after the helium mass spectrometer leak detection equipment in the detection subsystem performs an airtightness test on all pipelines, start the first vacuum detection device and the second vacuum detection device to perform a vacuum test on the first pipeline;

[0075] Step 303: When the vacuum detection result matches the preset vacuum condition, the third pipeline is connected through the switch control of the inflation valve group in the inflation subsystem, and the purification equipment and rare gas container in the inflation subsystem are started to inflate the container.

[0076] In another embodiment of the present application, for further explanation and limitation, the exhaust valve group includes an electromagnetic isolation valve, a gate valve, and a first stop valve and a second stop valve. The first pipeline is connected by switching control of the exhaust valve group in the exhaust subsystem, and the vortex dry pump, the magnetic levitation molecular pump, and the ion pump in the exhaust subsystem are started to vacuum the container, including:

[0077] Connecting the first sub-pipeline between the vortex dry pump, the magnetic levitation molecular pump, and the ion pump by opening the electromagnetic isolation valve and the gate valve, and opening the first stop valve, which is provided on the pipeline connected to the containing device;

[0078] When the second stop valve is opened, the second sub-pipeline is connected, and the vortex dry pump, the magnetic levitation molecular pump, and the ion pump are started to vacuum the container. The second stop valves are respectively set on the pipelines connected to the detection subsystem.

[0079] In another embodiment of the present application, for further explanation and limitation, the detection valve group includes a leak detection valve and a third stop valve, and the second pipeline is connected through the switch control of the detection valve group in the detection subsystem, and after the helium mass spectrometer leak detection equipment in the detection subsystem performs an airtightness test on all pipelines, the first vacuum detection device and the second vacuum detection device are started to perform vacuum detection on the first pipeline, including:

[0080] Opening the leak detection valve to connect the third sub-pipeline between the helium mass spectrometer leak detection device and the vortex dry pump and the magnetic levitation molecular pump, and performing leak detection on all pipelines using the helium mass spectrometer leak detection device;

[0081] The fourth sub-pipeline between the first vacuum detection device, the second vacuum detection device and the container is connected by opening the third stop valve, and the vacuum detection of the container is performed through the first vacuum detection device and the second vacuum detection device, so that when it is detected that the vacuum state of the container matches the preset vacuum condition, the inflation subsystem is started for inflation.

[0082] Among them, the cold cathode Pirani vacuum gauge as the first vacuum detection device and the film gauge as the second vacuum detection device are both vacuum measuring instruments. At this time, the vacuum measurement range of the cold cathode Pirani vacuum gauge is 1E-9 to 1000hPa, and it has full-scale measurement capability. On the one hand, it can detect whether the device has reached an ultra-high vacuum state, such as between 1E-7 and 1E-12hPa. On the other hand, when re-inflated, it can play the role of calibrating the film gauge to prevent the film gauge from being abnormal or reading incorrectly, resulting in errors in the pressure of the filled process gas. The vacuum measurement range of the film gauge is 1E-1 to 1100hPa. The reading of the film gauge is observed in the inflation state, and the test accuracy is higher. The preset vacuum condition can be configured based on the above-mentioned vacuum measurement range, for example, between 1E-7 and 1E-12hPa, and the embodiments of this application are not specifically limited.

[0083] In another embodiment of the present application, for further explanation and limitation, the inflation valve group includes at least one fine-tuning valve, at least one pressure-reducing valve, and a fourth shut-off valve. The third pipeline is connected through the on-off control of the inflation valve group in the inflation subsystem, and the purification equipment and the rare gas container in the inflation subsystem are activated to inflate the container, including:

[0084] Opening the fine-tuning valve and the pressure-reducing valve to connect the fifth sub-pipeline between the purification device and the rare gas container, and opening the fourth stop valve to connect the sixth sub-pipeline between the purification device and the container;

[0085] The rare gas container is inflated through the purification device, and when the pressure detected by the second vacuum detection device in the detection subsystem reaches a preset pressure, the third stop valve and the fourth stop valve are closed to stop the inflation operation.

[0086] In some embodiments, the rare gas container is inflated through the purification equipment. When the pressure collected by the second vacuum detection device reaches a preset pressure, the third stop valve and the fourth stop valve are closed to stop the inflation operation, such as stop valve 31 and / or 36, and stop valve 12 and / or 21. The stop valve 23 and / or 14 can also be closed at the same time so that the glassware can be removed with cold pliers to achieve the packaging of rare gas and metal.

[0087] In another embodiment of the present application, for further explanation and limitation, the method further includes:

[0088] When it is detected that the vacuum state of the container matches the preset vacuum condition, the metal powder container is heated by a heating device to allow the metal powder to enter the container. Wherein, the container and the metal powder container are made of glass.

[0089] The embodiment of the present application provides an ultra-high vacuum exhaust and inflation method. Compared with the prior art, the embodiment of the present application connects the first pipeline through the switch control of the exhaust valve group in the exhaust subsystem, and starts the vortex dry pump, magnetic levitation molecular pump, and ion pump in the exhaust subsystem to perform vacuum operation on the container; connects the second pipeline through the switch control of the detection valve group in the detection subsystem, and starts the first vacuum detection device and the second vacuum detection device to perform vacuum detection on the first pipeline after the helium mass spectrometer leak detection equipment in the detection subsystem performs airtightness detection on all pipelines, so as to achieve vacuum detection in the first pipeline by setting different vacuum gauges. The purpose of separately detecting the vacuum degree during exhaust and inflation is to improve the accuracy of detection; when the vacuum detection result matches the preset vacuum condition, the third pipeline is connected through the switch control of the inflation valve group in the inflation subsystem, and the purification equipment and rare gas container in the inflation subsystem are started to inflate the container. By improving the pipeline structure, multi-channel inflation is added, the rare gas inflation distance is reduced, the vacuum pumping efficiency is improved, and the vacuum pumping capacity is improved by the ion pump, which will reduce the residual gas content, and the purity of the inflation gas is improved by the purification equipment. Through the detection subsystem and the inflation and exhaust subsystems, precise regulation of inflation is achieved.

[0090] Obviously, those skilled in the art should understand that the modules or steps of the present application described above can be implemented using a general-purpose computing device, they can be concentrated on a single computing device, or distributed on a network composed of multiple computing devices. Alternatively, they can be implemented using program code executable by the computing device, so that they can be stored in a storage device and executed by the computing device. In some cases, the steps shown or described can be performed in a different order than herein, or they can be made into separate integrated circuit modules, or multiple modules or steps can be made into a single integrated circuit module for implementation. Thus, the present application is not limited to any specific combination of hardware and software.

[0091] The above description is merely a preferred embodiment of the present application and is not intended to limit the present application. Persons skilled in the art will readily appreciate that various modifications and variations are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present application shall be included within the scope of protection of the present application.

Claims

1. An ultra-high vacuum exhaust and inflation device, characterized in that: include: Exhaust subsystem, detection subsystem, inflation subsystem, The exhaust subsystem includes a vortex dry pump, a magnetic levitation molecular pump, an ion pump, and an exhaust valve group. The vortex dry pump, the magnetic levitation molecular pump, and the ion pump are connected to the detection subsystem and the container through the exhaust valve group pipeline to evacuate the container; The detection subsystem includes a helium mass spectrometer leak detection device, a first vacuum detection device, a second vacuum detection device, and a detection valve group. The helium mass spectrometer leak detection device, the first vacuum detection device, and the second vacuum detection device are connected to the exhaust subsystem and the inflation subsystem through the detection valve group pipeline; The inflation subsystem includes a purification device, a rare gas container, and an inflation valve group. The purification device and the rare gas container are connected to the container and the detection subsystem through pipelines of the inflation valve group.

2. The device according to claim 1, characterized in that The exhaust valve group includes an electromagnetic isolation valve, a gate valve, a first stop valve and a second stop valve. The vortex dry pump is connected to the magnetic levitation molecular pump pipeline through the electromagnetic isolation valve; The magnetic levitation molecular pump is connected to the ion pump and a plurality of first stop valve pipelines respectively through the gate valve, and the first stop valve is provided on the pipeline connected to the containing device; The plurality of second stop valves are respectively arranged on the pipelines connected to the detection subsystem.

3. The device according to claim 1, characterized in that The detection valve group includes a leak detection valve and a third stop valve. The helium mass spectrometer leak detection device is arranged on the pipeline between the magnetic levitation molecular pump and the electromagnetic isolation valve in the exhaust subsystem through the leak detection valve; The first vacuum detection device and the second vacuum detection device are respectively arranged on the pipeline between the exhaust valve group of the exhaust subsystem and the inflation valve group of the inflation subsystem through the third stop valve.

4. The device according to claim 1, characterized in that The inflation valve group includes at least one fine-tuning valve, at least one pressure reducing valve and a fourth shut-off valve. The rare gas containing device is connected to the fine-tuning valve through a pipeline via the pressure reducing valve; The purification equipment is arranged on the pipeline between the fine-tuning valve and the fourth stop valve; The fourth stop valve is arranged on the pipeline between the exhaust valve group of the exhaust subsystem and the inflation valve group of the inflation subsystem.

5. The device according to any one of claims 1 to 4, characterized in that: The system further comprises a metal powder containing device, and the containing device and the metal powder containing device are made of glass.

6. An ultra-high vacuum exhaust and inflation method, characterized in that: include: The first pipeline is connected by switching the exhaust valve group in the exhaust subsystem, and the vortex dry pump, magnetic levitation molecular pump, and ion pump in the exhaust subsystem are started to vacuum the contained device; The second pipeline is connected by switching control of the detection valve group in the detection subsystem, and after the helium mass spectrometer leak detection equipment in the detection subsystem performs air tightness detection on all pipelines, the first vacuum detection device and the second vacuum detection device are started to perform vacuum detection on the first pipeline; When the vacuum detection result matches the preset vacuum condition, the third pipeline is connected through the switch control of the inflation valve group in the inflation subsystem, and the purification equipment and rare gas container in the inflation subsystem are started to inflate the container.

7. The method according to claim 6, characterized in that The exhaust valve group includes an electromagnetic isolation valve, a gate valve, a first stop valve, and a second stop valve. The first pipeline is connected through the switch control of the exhaust valve group in the exhaust subsystem, and the vortex dry pump, the magnetic levitation molecular pump, and the ion pump in the exhaust subsystem are started to vacuum the contained device, including: Connecting the first sub-pipeline between the vortex dry pump, the magnetic levitation molecular pump, and the ion pump by opening the electromagnetic isolation valve and the gate valve, and opening the first stop valve, which is provided on the pipeline connected to the containing device; When the second stop valve is opened, the second sub-pipeline is connected, and the vortex dry pump, the magnetic levitation molecular pump, and the ion pump are started to vacuum the container. The second stop valves are respectively set on the pipelines connected to the detection subsystem.

8. The method according to claim 6, characterized in that The detection valve group includes a leak detection valve and a third stop valve. The second pipeline is connected by switching control of the detection valve group in the detection subsystem, and after the helium mass spectrometer leak detection equipment in the detection subsystem performs air tightness detection on all pipelines, the first vacuum detection device and the second vacuum detection device are started to perform vacuum detection on the first pipeline, including: Opening the leak detection valve to connect the third sub-pipeline between the helium mass spectrometer leak detection device and the vortex dry pump and the magnetic levitation molecular pump, and performing leak detection on all pipelines using the helium mass spectrometer leak detection device; When all pipelines pass the leakage detection, close the leak detection valve, and connect the first vacuum detection device, the second vacuum detection device and the fourth sub-pipeline between the container by opening the third stop valve, and perform vacuum detection on the container through the first vacuum detection device and the second vacuum detection device, so that when it is detected that the vacuum state of the container matches the preset vacuum condition, start the inflation subsystem for inflation.

9. The method according to claim 6, characterized in that The inflation valve group includes at least one fine-tuning valve, at least one pressure-reducing valve, and a fourth shut-off valve. The third pipeline is connected through the on-off control of the inflation valve group in the inflation subsystem, and the purification equipment and the rare gas container in the inflation subsystem are started to inflate the container, including: Opening the fine-tuning valve and the pressure-reducing valve to connect the fifth sub-pipeline between the purification device and the rare gas container, and opening the fourth stop valve to connect the sixth sub-pipeline between the purification device and the container; The rare gas container is inflated through the purification device, and when the pressure detected by the second vacuum detection device in the detection subsystem reaches a preset pressure, the third stop valve and the fourth stop valve are closed to stop the inflation operation.

10. The method according to any one of claims 6 to 9, characterized in that: The method further comprises: When it is detected that the vacuum state of the containing device matches the preset vacuum condition, heating the metal powder containing device by a heating device so that the metal powder enters the containing device; Wherein, the containing device and the metal powder containing device are made of glass.

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