Automatic cleaning equipment for crystal growth furnace

Abstract

The crystal growth furnace automatic cleaning equipment comprises an AGV, a supporting base is fixedly arranged at the top of the AGV, a lower flange cleaning mechanism used for cleaning a lower flange is arranged on the supporting base, and a mounting table A is movably arranged at the top of the supporting base in a lifting mode through a plurality of guide columns; a plurality of telescopic connecting rod sets are fixedly arranged on the mounting table A, the top ends of the telescopic connecting rod sets are jointly connected with a horizontal mounting table B, a floating rotating table capable of electrically rotating is arranged on the mounting table B, and a top scraper cleaning mechanism used for cleaning the top face of the inner side of the quartz tube is arranged on the floating rotating table; according to the automatic cleaning equipment integrating the lower flange cleaning mechanism, the top scraper cleaning mechanism, the paper tube cleaning and rotating mechanism, the felt cleaning mechanism, the lifting mechanism and the dust collection mechanism on the AGV, the function of automatically cleaning the crystal growth furnace is achieved, and high efficiency and safety of cleaning are guaranteed.

Description

Technical Field

[0001] The invention belongs to the technical field of automatic cleaning of crystal growth furnaces, and in particular relates to automatic cleaning equipment for crystal growth furnaces. Background Art

[0002] A crystal growth furnace is a device used for artificial crystal synthesis. After growing crystals, volatile carbon deposits are left on the walls of the equipment's quartz tubes. Failure to promptly remove these deposits after the furnace is opened can affect subsequent crystal growth results. Currently, cleaning these deposits is a manual process, requiring operators to insert their upper body into the quartz tube to remove the deposits. This manual cleaning method is inefficient, incomplete, and poses safety risks.

[0003] Therefore, the present invention designs an automatic cleaning device for a crystal growth furnace. Summary of the Invention

[0004] The object of the present invention is to provide an automatic cleaning device for a crystal growth furnace to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned objectives, the present invention provides the following technical solutions: an automatic cleaning device for a crystal growth furnace, comprising an AGV vehicle, a support base fixedly provided on the top of the AGV vehicle, a lower flange cleaning mechanism for cleaning the lower flange provided on the support base, a mounting platform A provided on the top of the support base through a plurality of guide columns for lifting and lowering, a plurality of telescopic connecting rod groups fixedly provided on the mounting platform A, and the top ends of the plurality of telescopic connecting rod groups are commonly connected to a horizontal mounting platform B, a rigid lifting chain machine which can drive the mounting platform B to lift and lower is installed on the top of the support base, the lifting end of the rigid lifting chain machine moves through the center of the cover plate and extends to be fixed to the bottom of the mounting platform B, and an electrically A floating rotating table that rotates dynamically, and a top scraper cleaning mechanism for cleaning the inner top surface of the quartz tube is provided on the floating rotating table, and a felt cleaning mechanism for cleaning the inner wall of the quartz tube is provided on one side of the top scraper cleaning mechanism, and a paper tube cleaning rotating mechanism for secondary cleaning and wiping the inner wall of the quartz tube is provided on the other side of the top scraper cleaning mechanism. A movable sleeve on the multiple groups of telescopic connecting rod groups is provided with a cover plate for closing the bottom end opening of the quartz tube, and a cylinder A for pushing the cover plate to rise and fall is fixedly provided on the mounting table A, and the telescopic end of the cylinder A is fixedly connected to the bottom of the cover plate, and a dust suction pipe is provided in communication with the bottom of the cover plate, and a vacuum cleaner is installed on the supporting base, and the other end of the dust suction pipe is connected to the vacuum cleaner.

[0006] Preferably, the lower flange cleaning mechanism includes a fixed base plate fixed on the support base, an arc rack rotatably arranged on the fixed base plate, a servo motor group fixedly installed on the fixed base plate through a motor base, a driving gear arranged at the output end of the servo motor group, and the driving gear and the arc rack are engaged with each other for transmission, and also includes a plurality of lifting cylinders fixedly arranged on the arc rack, a mounting frame connected to the telescopic end of the lifting cylinder and extending downward, and a lower scraper fixedly arranged at the bottom end of the mounting frame.

[0007] Preferably, the floating rotary table includes a motor fixedly arranged at the top center of the mounting table B, and a rotary connecting table installed on the top of the motor and rotating synchronously, an upper floating table arranged above the rotary connecting table which is lifted and lowered by a plurality of guide pillars A, and a plurality of buffer spring sleeves located between the upper floating table and the rotary connecting table, and the plurality of buffer spring sleeves are arranged one by one on each guide pillar A.

[0008] Preferably, the top scraper cleaning mechanism includes a pair of support frames fixedly and centrally symmetrically arranged on the upper floating platform, an upper scraper seat arranged on the top of the pair of support frames for lifting and lowering movement through a pair of guide columns B, and an upper scraper fixedly mounted on the top of the upper scraper seat. The top scraper cleaning mechanism also includes a pair of lifting cylinders for driving the lifting and lowering movement of the upper scraper seat, and the pair of lifting cylinders are respectively fixedly mounted on a pair of support frames, as well as a pair of contact displacement sensors located below the upper scraper seat, and the bottom ends of the contact displacement sensors are fixedly mounted on the corresponding support frames.

[0009] Preferably, the top scraper cleaning mechanism also includes a group of nozzles fixedly mounted on both sides of the upper scraper seat through a support, and the AGV vehicle is provided with an alcohol mist pump, which is connected to the nozzles through a delivery pipe.

[0010] Preferably, the paper roll cleaning rotating mechanism includes a roller mounting seat rotatably arranged on the upper floating platform, a roller shaft arranged at both ends of the top of the roller mounting seat, a group of traction rollers located between the two roller shafts, and a stepper motor fixedly arranged on the top of the roller mounting seat, and the output end of the stepper motor drives the two roller shafts to rotate synchronously in the same direction through a gear set, a roll of paper rotating synchronously is provided on one of the roller shafts, and one end of the paper roll passes through a group of traction rollers and is wound around the other roller shaft, and the upper floating platform is also provided with a cylinder slide rail assembly for pushing a roll of paper outward, the cylinder slide rail assembly includes a slide rail B arranged along the radial direction of the upper floating platform, and a sliding seat sliding along the slide rail B, a sensor B is provided on one side of the sliding seat, a cylinder B is fixedly arranged on the upper floating platform, and the telescopic end connecting rod of the cylinder B is connected to one end of the sensor B, a raised cylinder for rotating the traction roller mounting seat is fixed on the sliding seat, and an arc groove for the raised cylinder to move through is provided on the roller mounting seat.

[0011] Preferably, the felt cleaning mechanism includes two slide rails C distributed along the radius of the rotating connecting table, a sliding seat B slidingly arranged on each slide rail C, and each sliding seat B is provided with a freely rotatable felt roller. The felt cleaning mechanism also includes a cylinder C for driving the felt roller to slide outward, and a sensor C installed on the sliding seat B. The cylinder C is fixed on the upper floating platform, and the telescopic end of the cylinder C pushes the felt roller to slide through the connecting rod B. One end of the connecting rod B is fixedly connected to the telescopic end of the cylinder C, and the other end is fixedly connected to the end of the sensor C.

[0012] Preferably, the AGV vehicle is fixedly provided with an air pump for operating the lifting cylinder, the jacking cylinder, the cylinder B, the cylinder C, and the cylinder A.

[0013] Preferably, a visual camera for photographing the cleaning condition inside the quartz tube is also fixedly mounted on the upper scraper seat.

[0014] Compared with the prior art, the present invention has the following beneficial effects: The present invention integrates a lower flange cleaning mechanism, a top scraper cleaning mechanism, a paper drum cleaning and rotating mechanism, a felt cleaning mechanism, a lifting mechanism, and a dust collection mechanism on an AGV vehicle to realize the function of automatically cleaning the crystal growth furnace, ensuring high efficiency and safety of cleaning. The present invention uses a felt cleaning mechanism to perform a first step of cleaning on the inner wall of the quartz tube, and then uses a paper drum cleaning rotating mechanism to continuously wipe the inner wall of the quartz tube, thereby improving the cleaning effect; the top scraper cleaning mechanism designed by the present invention can clean the top of the inner side of the quartz tube by spraying alcohol and cooperating with a rotating scraper, thereby achieving all-round cleaning of the inside of the quartz tube and ensuring the cleaning quality; and is also equipped with a visual camera designed to start visual photography after the cleaning inside the quartz tube is completed to check the cleaning status; The present invention is designed with a liftable cover plate and a dust collection mechanism, which can collect and process the impurities cleaned out of the quartz tube in a centralized manner, making it more convenient. The lower flange cleaning mechanism designed in the present invention can automatically complete the cleaning of the flange, which is more convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a schematic diagram of the three-dimensional structure of the present invention; Figure 2 This is a schematic diagram of the structure of the cleaning mechanism installed in the present invention; Figure 3 This is a schematic structural diagram of the lower flange cleaning mechanism of the present invention; Figure 4 It is a schematic structural diagram of the top scraper cleaning mechanism of the present invention; Figure 5This is a structural schematic diagram of the floating rotary table of the present invention; Figure 6 It is a structural schematic diagram of the installation of the paper roll cleaning rotation mechanism and the felt cleaning mechanism of the present invention; Figure 7 It is a partial enlarged structural schematic diagram of the mounting platform A of the present invention; Figure: 1, AGV; 2, support base; 3, rigid lifting chain; 4, lower flange cleaning mechanism; 41, fixed base; 42, servo motor group; 43, arc rack; 44, driving gear; 45, lifting cylinder; 46, mounting frame; 47, lower scraper; 5, mounting table A; 6, floating rotary table; 61, upper floating table; 62, rotary connection table; 63, motor; 64, guide column A; 65, buffer spring sleeve; 7, top scraper cleaning mechanism; 71, support frame; 72, upper scraper seat; 73, guide column B; 74, nozzle; 75, lifting air Cylinder; 76. Contact displacement sensor; 77. Upper scraper; 8. Paper roll cleaning rotation mechanism; 81. Roller mounting seat; 82. Roller shaft; 83. Stepper motor; 84. Paper roll; 85. Cylinder B; 86. Slide rail B; 87. Sensor B; 9. Felt cleaning mechanism; 91. Felt roller; 92. Cylinder C; 93. Sensor C; 94. Slide rail C; 10. Telescopic connecting rod group; 11. Vacuum cleaner; 12. Cylinder A; 13. Alcohol mist pump; 14. Air pump; 15. Mounting table B; 16. Visual camera; 17. Cover plate; 18. Dust suction pipe. DETAILED DESCRIPTION

[0016] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0017] Example 1 See also Figure 1-Figure 7The present invention provides a technical solution: an automatic cleaning device for a crystal growth furnace, comprising an AGV vehicle 1, a support base 2 fixedly provided on the top of the AGV vehicle 1, a lower flange cleaning mechanism 4 for cleaning the lower flange provided on the support base 2, in this embodiment, preferably, the lower flange cleaning mechanism 4 comprises a fixed base plate 41 fixed on the support base 2, an arc rack 43 rotatably provided on the fixed base plate 41, a servo motor group 42 fixedly installed on the fixed base plate 41 through a motor base, an active The gear 44 is meshed with the arc rack 43 for transmission, and further includes a plurality of lifting cylinders 45 fixedly mounted on the arc rack 43, a mounting bracket 46 connected to the telescopic end of the lifting cylinder 45 and extending downward, and a lower scraper 47 fixedly mounted at the bottom end of the mounting bracket 46; the lifting cylinder 45 is extended, and the lower scraper 47 contacts the lower flange, and the driving gear 44 is controlled to rotate by the servo motor group 42, thereby realizing the rotation of the arc rack 43, and the lower scraper 47 and the lower flange are frictionally cleaned to achieve the purpose of cleaning the lower flange; The top of the support base 2 is provided with a mounting platform A5 which is movable by lifting through a plurality of guide columns. A plurality of telescopic connecting rod groups 10 are fixedly provided on the mounting platform A5, and the top ends of the plurality of telescopic connecting rod groups 10 are commonly connected to a horizontal mounting platform B15. A rigid lifting chain machine 3 which can drive the mounting platform B15 to move up and down is installed on the top of the support base 2. The lifting end of the rigid lifting chain machine 3 moves through the center of the cover plate 17 and extends to be fixed at the bottom of the mounting platform B15. The rigid lifting chain machine 3 can be started to drive the mounting platform B15 to move up and down; the floating rotating platform 6 can be raised to the inside of the quartz tube to facilitate subsequent cleaning work; the mounting platform B15 can also be driven to descend by the rigid lifting chain machine 3 to complete the action of exiting from the quartz tube. A floating rotating platform 6 that can rotate electrically is provided on the mounting platform B15. The floating rotating platform 6 is used to play a buffering role to avoid the unevenness of the inside of the quartz tube. The floating rotating platform 6 can deform the product when subjected to force to avoid damage caused by rigid contact. In this embodiment, preferably, the floating rotating platform 6 includes a motor 63 fixedly arranged at the top center of the mounting platform B15, and a rotating connecting platform 62 installed on the top of the motor 63 and rotating synchronously, an upper floating platform 61 arranged above the rotating connecting platform 62 by a plurality of guide pillars A64, and a plurality of buffer spring sleeves 65 located between the upper floating platform 61 and the rotating connecting platform 62, and the plurality of buffer spring sleeves 65 are sleeved on each guide pillar A64 one by one. A top scraper cleaning mechanism 7 for cleaning the inner top surface of the quartz tube is provided on the floating rotating platform 6, which can clean the inner top surface of the clean quartz tube. In this embodiment, preferably, the top scraper cleaning mechanism 7 includes a pair of support frames 71 fixedly arranged on the upper floating platform 61 with a central symmetry, an upper scraper seat 72 arranged on the top of a pair of support frames 71 through a pair of guide columns B73 for lifting and lowering, and an upper scraper 77 fixedly installed on the top of the upper scraper seat 72. The split structure can realize the disassembly and replacement of the upper scraper 77. The top scraper cleaning mechanism 7 also includes a pair of lifting cylinders 75 for driving the lifting movement of the upper scraper seat 72, and the pair of lifting cylinders 75 are separated. The top scraper cleaning mechanism 7 further comprises a pair of nozzles 74 fixedly mounted on a pair of support frames 71 and a pair of contact displacement sensors 76 located below the upper scraper seat 72, and the bottom ends of the contact displacement sensors 76 are fixedly mounted on the corresponding support frames 71; the stroke of the lifting cylinder 75 is controlled by the contact displacement sensor 76, so that the upper scraper 77 can clean the top tightly; in this embodiment, preferably, the top scraper cleaning mechanism 7 also includes a group of nozzles 74 fixedly mounted on both sides of the upper scraper seat 72 through a support, and an alcohol mist pump 13 is provided on the AGV vehicle 1, and the alcohol mist pump 13 is connected to the nozzle 74 through a delivery pipe, which can realize the spraying of alcohol to clean the inside of the quartz tube.

[0018] A felt cleaning mechanism 9 for cleaning the inner wall of the quartz tube is provided on one side of the top scraper cleaning mechanism 7. In this embodiment, preferably, the felt cleaning mechanism 9 includes two slide rails C94 distributed along the radius of the rotating connecting platform 62, and a sliding seat B is slidingly arranged on each slide rail C94. Each sliding seat B is provided with a freely rotatable felt roller 91. The felt cleaning mechanism 9 also includes a cylinder C92 for driving the felt roller 91 to slide outward, and a sensor C93 installed on the sliding seat B. The cylinder C92 is fixed on the upper floating platform 61, and the telescopic end of the cylinder C92 is moved by The connecting rod B pushes the felt roller 91 to slide. One end of the connecting rod B is fixedly connected to the telescopic end of the cylinder C92, and the other end is fixedly connected to the end of the sensor C93. The cylinder C92 pushes the felt roller 91 to slide outward until the felt roller 91 is squeezed and in contact with the inner wall of the quartz tube. The motor 63 rotates to clean the inner wall of the quartz tube. The sensor C93 is designed to monitor the squeezing force between the felt roller 91 and the inner wall of the quartz tube, thereby facilitating the adjustment of the position of the felt roller 91 and ensuring that the squeezing force between the felt roller 91 and the inner wall of the quartz tube is maintained at the set value to ensure the cleaning effect. The other side of the top scraper cleaning mechanism 7 is provided with a paper drum cleaning rotating mechanism 8 for secondary cleaning and wiping the inner wall of the quartz tube. The paper drum cleaning rotating mechanism 8 can wipe and clean the inner wall of the quartz tube that has just been cleaned by the felt cleaning mechanism 9 again to ensure the cleanliness of the cleaning. In this embodiment, preferably, the paper drum cleaning rotating mechanism 8 includes a roller mounting seat 81 rotatably arranged on the upper floating platform 61, a roller shaft 82 rotatably arranged at both ends of the top of the roller mounting seat 81, a group of traction rollers located between the two roller shafts 82, and a stepper motor 83 fixedly arranged on the top of the roller mounting seat 81, and the output end of the stepper motor 83 drives the two roller shafts 82 to rotate synchronously in the same direction through a gear set, a synchronously rotating roll of paper 84 is provided on one of the roller shafts 82, and one end of the roll of paper 84 passes through a group of traction rollers and is wound around the other roller shaft 82, and the wiped roll of paper 84 can be driven by the stepper motor 83 and wound around the other roller shaft 82. In order to ensure that the roll of paper 84 squeezed against the inner wall of the quartz tube can be replaced in time, the upper floating platform 61 is also provided with a cylinder slide assembly for pushing a roll of paper 84 outward. The cylinder slide assembly includes a slide rail B86 arranged along the radial direction of the upper floating platform 61, and a sliding seat sliding along the slide rail B86. A sensor B87 is provided on one side of the sliding seat. A cylinder B85 is fixedly provided on the upper floating platform 61, and the telescopic end connecting rod of the cylinder B85 is connected to one end of the sensor B87. A raised cylinder for rotating and adjusting the position of the traction roller mounting seat 81 is fixedly provided on the sliding seat, and an arc groove for the raised cylinder to move through is provided on the roller mounting seat 81; the cylinder B85 pushes the roll of paper 84 to slide outward until the roll of paper 84 is squeezed and fits against the inner wall of the quartz tube, and the inner wall is wiped and cleaned. The sensor B87 can detect the size of the extrusion force, so that the roll of paper 84 always maintains a set friction force with the inner wall, ensuring that the wiping and cleaning is cleaner.

[0019] A cover plate 17 for closing the bottom opening of the quartz tube is provided on the movable sleeve of the multiple groups of telescopic connecting rod groups 10. A cylinder A12 for pushing the cover plate 17 up and down is fixedly provided on the mounting platform A5. The telescopic end of the cylinder A12 is fixedly connected to the bottom of the cover plate 17. A dust suction pipe 18 is provided at the bottom of the cover plate 17. A vacuum cleaner 11 is installed on the support base 2. The other end of the dust suction pipe 18 is connected to the vacuum cleaner 11. During cleaning, the cover plate 17 can be driven up by the cylinder A12 to seal the bottom of the quartz tube, and the impurities generated by the top cleaning are collected by the dust suction pipe 18 into the vacuum cleaner 11.

[0020] In this embodiment, preferably, an air pump 14 for operating the lifting cylinder 45, the lifting cylinder 75, the cylinder B85, the cylinder C92, and the cylinder A12 is fixedly installed on the AGV 1. In this embodiment, preferably, a visual camera 16 for photographing the cleaning status of the interior of the quartz tube is also fixedly installed on the upper scraper seat 72, so that the cleaning status of the interior of the quartz tube can be clearly understood and whether it is clean can be accurately detected.

[0021] Although the embodiments of the present invention have been shown and described, as detailed above, it will be understood by those skilled in the art that various changes, modifications, substitutions and variations may be made to these embodiments without departing from the principles and spirit of the invention, and the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. An automatic cleaning device for a crystal growth furnace, comprising an AGV vehicle (1), characterized in that: The top of the AGV vehicle (1) is fixedly provided with a support base (2), and a lower flange cleaning mechanism (4) for cleaning the lower flange is provided on the support base (2). A mounting platform A (5) is provided on the top of the support base (2) for lifting and lowering through a plurality of guide columns. A plurality of telescopic connecting rod groups (10) are fixedly provided on the mounting platform A (5), and the top ends of the plurality of telescopic connecting rod groups (10) are commonly connected to a horizontal mounting platform B (15). A rigid lifting chain machine (3) capable of driving the mounting platform B (15) to lift and lower is installed on the top of the support base (2), and the lifting end of the rigid lifting chain machine (3) moves through the center of the cover plate (17) and extends and is fixed to the bottom of the mounting platform B (15). A floating rotating platform (6) capable of rotating electrically is provided on the mounting platform B (15), and a rotating rotating platform (6) is provided on the floating rotating platform (6). A top scraper cleaning mechanism (7) is provided for cleaning the inner top surface of the quartz tube, a felt cleaning mechanism (9) is provided on one side of the top scraper cleaning mechanism (7) for cleaning the inner wall of the quartz tube, a paper tube cleaning rotating mechanism (8) is provided on the other side of the top scraper cleaning mechanism (7) for secondary cleaning and wiping the inner wall of the quartz tube, a cover plate (17) for closing the bottom opening of the quartz tube is movably sleeved on the multiple groups of telescopic connecting rod groups (10), a cylinder A (12) for pushing the cover plate (17) to rise and fall is fixedly provided on the mounting platform A (5), the telescopic end of the cylinder A (12) is fixedly connected to the bottom of the cover plate (17), a dust suction pipe (18) is provided at the bottom of the cover plate (17), a dust collector (11) is installed on the support base (2), and the other end of the dust suction pipe (18) is connected to the dust collector (11).

2. The automatic cleaning device for a crystal growth furnace according to claim 1, characterized in that: The lower flange cleaning mechanism (4) includes a fixed base plate (41) fixed on the support base (2), an arc rack (43) rotatably arranged on the fixed base plate (41), a servo motor group (42) fixedly mounted on the fixed base plate (41) via a motor base, a driving gear (44) arranged at the output end of the servo motor group (42), and the driving gear (44) and the arc rack (43) are meshed with each other for transmission, and also includes a plurality of lifting cylinders (45) fixedly arranged on the arc rack (43), a mounting frame (46) connected to the telescopic ends of the lifting cylinders (45) and extending downward, and a lower scraper (47) fixedly arranged at the bottom end of the mounting frame (46).

3. The automatic cleaning device for a crystal growth furnace according to claim 2, characterized in that: The floating rotating platform (6) includes a motor (63) fixedly arranged at the top center of the mounting platform B (15), a rotating connecting platform (62) installed on the top of the motor (63) and rotating synchronously, an upper floating platform (61) arranged above the rotating connecting platform (62) and movable by a plurality of guide pillars A (64), and a plurality of buffer spring sleeves (65) located between the upper floating platform (61) and the rotating connecting platform (62), and the plurality of buffer spring sleeves (65) are sleeved on each guide pillar A (64) one by one.

4. The automatic cleaning device for a crystal growth furnace according to claim 3, characterized in that: The top scraper cleaning mechanism (7) includes a pair of support frames (71) fixedly arranged on the upper floating platform (61) in a centrally symmetrical manner, an upper scraper seat (72) arranged on the top of the pair of support frames (71) and movable by a pair of guide pillars B (73), and an upper scraper (77) fixedly mounted on the top of the upper scraper seat (72). The top scraper cleaning mechanism (7) also includes a pair of lifting cylinders (75) for driving the upper scraper seat (72) to move up and down, and the pair of lifting cylinders (75) are respectively fixedly mounted on the pair of support frames (71), and a pair of contact displacement sensors (76) located below the upper scraper seat (72), and the bottom ends of the contact displacement sensors (76) are fixedly mounted on the corresponding support frames (71).

5. The automatic cleaning device for a crystal growth furnace according to claim 4, characterized in that: The top scraper cleaning mechanism (7) further comprises a group of nozzles (74) fixedly mounted on both sides of the upper scraper seat (72) via supports, and an alcohol mist pump (13) is provided on the AGV vehicle (1), and the alcohol mist pump (13) is connected to the nozzles (74) via a delivery pipe.

6. The automatic cleaning device for a crystal growth furnace according to claim 5, characterized in that: The paper roll cleaning rotating mechanism (8) includes a roller mounting seat (81) rotatably arranged on the upper floating platform (61), a roller shaft (82) rotatably arranged at both ends of the top of the roller mounting seat (81), a group of traction rollers located between the two roller shafts (82), and a stepping motor (83) fixedly arranged on the top of the roller mounting seat (81), and the output end of the stepping motor (83) drives the two roller shafts (82) to rotate synchronously in the same direction through a gear set, a roll of paper (84) that rotates synchronously is arranged on one of the roller shafts (82), and one end of the roll of paper (84) passes through a group of traction rollers and is wound around the other roller shaft (82), The upper floating platform (61) is also provided with a cylinder slide assembly for pushing a roll of paper (84) to move outward, and the cylinder slide assembly includes a slide rail B (86) arranged along the radial direction of the upper floating platform (61), and a sliding seat sliding along the slide rail B (86), and a sensor B (87) is provided on one side of the sliding seat. The upper floating platform (61) is fixedly provided with a cylinder B (85), and the telescopic end connecting rod of the cylinder B (85) is connected to one end of the sensor B (87). A raised cylinder for rotating and adjusting the position of the traction roller mounting seat (81) is fixedly provided on the sliding seat, and an arc groove for the raised cylinder to move through is provided on the roller mounting seat (81).

7. The automatic cleaning device for a crystal growth furnace according to claim 6, characterized in that: The felt cleaning mechanism (9) includes two slide rails C (94) distributed along the radius of the rotating connecting platform (62), a sliding seat B slidably arranged on each slide rail C (94), and each sliding seat B is provided with a freely rotatable felt roller (91). The felt cleaning mechanism (9) also includes a cylinder C (92) for driving the felt roller (91) to slide outward, and a sensor C (93) installed on the sliding seat B, and the cylinder C (92) is fixed on the upper floating platform (61), and the telescopic end of the cylinder C (92) pushes the felt roller (91) to slide through the connecting rod B, one end of the connecting rod B is fixedly connected to the telescopic end of the cylinder C (92), and the other end is fixedly connected to the end of the sensor C (93).

8. The automatic cleaning device for a crystal growth furnace according to claim 7, characterized in that: The AGV vehicle (1) is fixedly provided with an air pump (14) for operating the lifting cylinder (45), the jacking cylinder (75), the cylinder B (85), the cylinder C (92), and the cylinder A (12).

9. The automatic cleaning device for a crystal growth furnace according to claim 7, characterized in that: A visual camera (16) for photographing the cleaning condition inside the quartz tube is also fixedly mounted on the upper scraper seat (72).

Images