Automatic grinding device

Abstract

The invention relates to the field of semiconductor part processing, and discloses an automatic grinding device which is characterized in that a grinding surface abuts against a first surface of a to-be-processed part so as to grind the first surface of the to-be-processed part; the moving assembly is connected with the grinding assembly; the pressure detection part is arranged between the grinding assembly and the moving assembly, when the grinding assembly makes contact with the to-be-machined part in the third direction, the grinding assembly bears first pressure from the to-be-machined part, the first pressure is transmitted to the pressure detection part, and the pressure detection part is connected with the first moving part. The first moving part adjusts the movement of the moving assembly in the third direction according to the first pressure value, the first moving part is provided with a first reference in the third direction, the movement amount of the moving assembly in the third direction relative to the first reference is a first movement amount, and the first movement amount is in direct proportion to the first pressure value. The automatic grinding device can adjust the grinding height in real time to adapt to the curved surface structure of the spray header.

Description

Technical Field

[0001] The present application relates to the field of semiconductor parts processing, and in particular to an automatic grinding device. Background Art

[0002] Etching equipment is a key component in semiconductor manufacturing, used to remove material from the wafer surface according to a designed pattern through chemical or physical methods to form circuit structures. The showerhead, a key component in the etching equipment, is used to evenly spray etching gas onto the wafer surface within the reaction chamber. The electric field forms a plasma, bombarding and etching the wafer surface.

[0003] During the showerhead manufacturing process, grinding is required to remove oxide layers and surface defects caused by machining. The surfaces that require grinding in showerheads are typically curved, optimizing gas distribution uniformity, adapting to the reaction chamber structure, and improving etching process stability. However, existing grinding equipment cannot adjust the grinding height in real time during grinding, which can easily wear out the curved surface of the showerhead, resulting in scrapped parts. Summary of the Invention

[0004] This application mainly solves the technical problem that the grinding height of the grinding device in the prior art cannot be adjusted in real time, which easily wears out the curved surface structure of the shower head. It provides an automatic grinding device that can adjust the grinding height in real time to adapt to the curved surface structure of the shower head.

[0005] In order to solve the above technical problems, the present application provides an automatic grinding device, characterized in that the automatic grinding device is used to grind the first surface of the part to be processed, the first surface is an undulating structure, and the automatic grinding device includes: A rotating table, which is used to carry the parts to be processed and drive the parts to be processed to rotate; a grinding assembly, the grinding assembly being disposed on one side of the rotating table along the third direction, the grinding assembly having a grinding surface on a side close to the rotating table, the grinding surface being in contact with the first surface of the part to be processed so as to grind the first surface of the part to be processed; a moving assembly connected to the grinding assembly, the moving assembly comprising a first moving member and a second moving member, the first moving member being used to drive the grinding assembly to move along the third direction, and the second moving member being used to drive the grinding assembly to move along the first direction; A pressure detecting part is arranged between the grinding component and the moving component. When the grinding component contacts the part to be processed in the third direction, the grinding component is subjected to a first pressure from the part to be processed, and the first pressure is transmitted to the pressure detecting part. The pressure detecting part is connected to the first moving part. The first moving part adjusts the movement of the moving component in the third direction according to the size of the first pressure value. The first moving part is provided with a first reference in the third direction. The movement amount of the moving component in the third direction and relative to the first reference is a first movement amount, and the first movement amount is directly proportional to the first pressure value.

[0006] In one embodiment, the rotating platform includes: a rotating seat, wherein a third driving member is disposed in the rotating seat; The third driving member is connected to the rotating disk and is used to drive the rotating disk to rotate in a circumferential direction.

[0007] In one embodiment, the second moving member includes a first connecting rod, the first connecting rod being arranged along a third direction, the first connecting rod being arranged at intervals on both sides of the rotating base along the first direction, and the first connecting rod being connected to the rotating base; a second connecting rod, the second connecting rod being arranged along the first direction and being connected to two of the first connecting rods respectively; A first driving member and a first transmission member, wherein the first driving member and the first transmission member are both arranged on the second connecting rod, the first driving member is in transmission connection with the first transmission member, and the first transmission member is connected to the first moving member to drive the first moving member to move along the first direction.

[0008] In one embodiment, the first moving member includes: a third connecting rod, the third connecting rod being arranged along the third direction and connected to the first transmission member; The second driving member and the second transmission member are both arranged on the third connecting rod, the second driving member is in transmission connection with the second transmission member, and the second transmission member is connected to the grinding assembly to drive the grinding assembly to move along the third direction.

[0009] In one embodiment, the first transmission member and the second transmission member are both ball screw structures, and the first driving member and the second driving member are both rotating motors.

[0010] In one embodiment, the moving component further includes: A first intermediate piece, the grinding assembly is connected to the second transmission piece through the first intermediate piece; wherein the first intermediate piece includes: a first intermediate plate, the first intermediate plate being arranged along the third direction and connected to the second transmission member; The second intermediate plate is arranged along the second direction, and both ends of the second intermediate plate along the second direction are respectively connected to the first intermediate plate and the grinding assembly to form a spacing arrangement between the grinding assembly and the first moving member.

[0011] In one embodiment, the grinding assembly includes: a first connecting member and a second connecting member, wherein the first connecting member and the second connecting member are spaced apart along the third direction, and the first connecting member is connected to the second intermediate plate; an elastic connector, the elastic connector being disposed between the first connector and the second connector, the two ends of the elastic connector along the third direction being connected to the first connector and the second connector respectively, the elastic connector always applying a driving force to the second connector away from the first connector along the third direction; A grinding member is connected to the second connecting member, and the bottom of the grinding member along the third direction has the grinding surface.

[0012] In one embodiment, the second connecting member includes: a first connecting structure and a second connecting structure, wherein the first connecting structure is connected to the elastic connecting member, and the first connecting structure and the second connecting structure are detachably connected; a first connecting plate, wherein one end of the second connecting structure along the third direction and away from the first connecting structure is connected to the first connecting plate; The third connecting structure is arranged at the bottom of the first connecting plate along the third direction, the third connecting structure is connected to the first connecting plate, and the third connecting structure is provided with an abutment surface at the bottom along the third direction, and the grinding member is arranged around the outside of the abutment surface.

[0013] In one embodiment, a first through hole and a second through hole are formed in the first connecting plate along the third direction, and the first through hole and the second through hole are spaced apart on both sides of the third connecting structure along the first direction. The first end of the grinding member is connected to the first connecting plate through a fixing member, and the second end of the grinding member passes downward through the first through hole, moves toward the abutting surface, and is arranged outside the abutting surface, then passes upward through the second through hole, and is connected to the first connecting plate through the fixing member.

[0014] In one embodiment, the third connection structure is provided with two limiting grooves at the bottom along the third direction, the limiting grooves are provided with openings facing outward, and the two limiting grooves are respectively provided on both sides of the abutting surface along the third direction.

[0015] Compared with the prior art, the rotary table in the automatic grinding device of the present application is used to carry the part to be processed, and the rotary table drives the part to be processed to rotate. The middle grinding surface of the grinding assembly is against the first surface of the part to be processed, and the grinding of the first surface of the part to be processed is achieved through the relative movement of the grinding assembly and the part to be processed. The moving assembly is separated from the grinding assembly, and the moving assembly is used to drive the grinding assembly to move to change the relative position between the grinding assembly and the part to be processed, thereby achieving full coverage grinding of the first surface. The moving assembly includes a first moving member for driving the grinding assembly to move along a third direction, and a second moving member for driving the grinding assembly to move along the first direction. The pressure detection member is arranged between the grinding assembly and the moving assembly. After the grinding assembly is driven by the first moving member to move along the third direction and close to the part to be processed, it is against the first surface. The grinding assembly is subjected to a first pressure from the part to be processed. The first pressure is simultaneously transmitted to the pressure detection member, and the pressure detection member forms a pressure detection. The first surface has an undulating structure. When a protrusion on the first surface of the part to be processed contacts the grinding assembly, the pressure applied to the pressure detecting member is greater than the pressure applied to the pressure detecting member when a depression on the part to be processed contacts the grinding assembly. Therefore, the first pressure detected by the pressure detecting member can be used to further determine the degree of undulation of the first surface. The pressure detecting member is connected to a first movable member. The first movable member adjusts the movement of the movable member in a third direction according to the magnitude of the first pressure value. A first reference is provided on the first movable member in the third direction. The movement of the movable member in the third direction relative to the first reference is a first movement. Therefore, the first movable member can adjust the magnitude of the first movement according to the first pressure detected by the pressure detecting member. The specific adjustment relationship is that the first movement is in direct proportion to the first pressure value. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Attachment Figure 1 It is a structural diagram of the part to be processed; Attachment Figure 2 This is a structural diagram of the automatic grinding device of the present application; Attachment Figure 3 This is a structural diagram of the grinding component and the moving component of the present application; Attachment Figure 4 This is a structural diagram of the grinding assembly of the present application; Attachment Figure 5 This is a structural diagram of the third connection structure of this application.

[0017] Description of the numbers in the figure: X, first direction; Y, second direction; Z, third direction; 10. Automatic grinding device; 100, rotating table; 110, rotating seat; 120, rotating disk; 200, grinding assembly; 210, first connecting member; 220, second connecting member; 221, first connecting structure; 222, second connecting structure; 223, first connecting plate; 224, third connecting structure; 224-1, abutting surface; 224-2, limiting groove; 230, elastic connecting member; 231, first elastic member; 232, guide post; 240, grinding member; 241, grinding surface; 250, fixing member; 300, moving assembly; 310, first moving member; 311, third connecting rod; 312, second driving member; 313, second transmission member; 320, second moving member; 321, first connecting rod; 322, second connecting rod; 323, first driving member; 324, first transmission member; 330, first reference; 340, first intermediate member; 341, first intermediate plate; 342, second intermediate plate; 400, pressure testing parts; 20. Part to be processed; 21. First surface; 22. Second surface. DETAILED DESCRIPTION

[0018] In order to make the purpose, features, and advantages of this application more obvious and easy to understand, the technical solutions in the embodiments of this application will be clearly and completely described below in conjunction with the drawings in the embodiments of this application. Obviously, the described embodiments are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts shall fall within the scope of protection of this application.

[0019] The existing technology has a technical problem that the grinding height of the grinding device cannot be adjusted in real time, which easily causes wear of the curved surface structure of the shower head.

[0020] To this end, the present application provides an automatic grinding device, wherein the automatic grinding device is used to grind the first surface of a part to be processed, the first surface being an undulating structure, and the automatic grinding device comprises: A rotating table, which is used to carry the parts to be processed and drive the parts to be processed to rotate; a grinding assembly, the grinding assembly being disposed on one side of the rotating table along the third direction, the grinding assembly having a grinding surface on a side close to the rotating table, the grinding surface being in contact with the first surface of the part to be processed so as to grind the first surface of the part to be processed; a moving assembly connected to the grinding assembly, the moving assembly comprising a first moving member and a second moving member, the first moving member being used to drive the grinding assembly to move along the third direction, and the second moving member being used to drive the grinding assembly to move along the first direction; A pressure detecting part is arranged between the grinding component and the moving component. When the grinding component contacts the part to be processed in the third direction, the grinding component is subjected to a first pressure from the part to be processed, and the first pressure is transmitted to the pressure detecting part. The pressure detecting part is connected to the first moving part. The first moving part adjusts the movement of the moving component in the third direction according to the size of the first pressure value. The first moving part is provided with a first reference in the third direction. The movement amount of the moving component in the third direction and relative to the first reference is a first movement amount, and the first movement amount is directly proportional to the first pressure value.

[0021] Example 1: Etching equipment is a key component in semiconductor manufacturing, used to remove material from the wafer surface according to a designed pattern through chemical or physical methods to form circuit structures. The showerhead, a key component in the etching equipment, is used to evenly spray etching gas onto the wafer surface within the reaction chamber. The electric field creates a plasma that bombards and etches the wafer surface.

[0022] During the showerhead machining process, the oxide layer or surface defects caused by machining need to be removed by grinding. The surface that needs to be ground in the showerhead is usually a curved structure, so as to optimize the uniformity of gas distribution, adapt to the reaction chamber structure, and improve the stability of the etching process. However, the existing grinding device cannot adjust the grinding height in real time during grinding. That is, the grinding device grinds the showerhead on the same horizontal plane, thereby flattening the raised parts of the showerhead curved surface structure, causing the curved surface structure of the showerhead to wear out and even become scrapped.

[0023] Please refer to the attached Figure 1 To the attached Figure 5As shown, the third direction X of the present application refers to the height direction of the automatic grinding device 10, that is, the direction of the automatic grinding device 10 from top to bottom or the direction of the automatic grinding device 10 from bottom to top, in the present application, the second movable member 320 is arranged on top relative to the first movable member 310, and the first movable frame is arranged on the bottom relative to the second movable member 320. The first direction Y of the present application refers to the length direction of the automatic grinding device 10, that is, the direction of the automatic grinding device 10 from left to right or the direction of the automatic grinding device 10 from right to left, in the present application, the first driving member 323 is arranged on the right relative to the first transmission member 324, and the first transmission member 324 of the present application is arranged on the left relative to the first driving member 323. The second direction Z of the present application refers to the width direction of the automatic grinding device 10, that is, the direction of the automatic grinding device 10 from front to back or the direction of the automatic grinding device 10 from back to front, in the present application, the grinding assembly 200 is arranged in front of the moving assembly 300, and the moving assembly 300 is arranged in the back relative to the grinding assembly 200.

[0024] Attachment Figure 1 This is a structural diagram of the part 20 to be processed. Figure 1 The figure shows a cross-sectional view of a part 20 to be processed. In this application, the part 20 to be processed is a shower head in an etching device, and the shower head is supported by silicon material. Figure 1 As shown, the part 20 to be processed of the present application is provided with a first surface 21 and a second surface 22 at both ends along the third direction X. The first surface 21 is an undulating structure. The undulating structure of the first surface 21 is to further optimize the uniformity of gas distribution, adapt to the reaction chamber structure, and improve the stability of the etching process. The undulating structure of the first surface 21 of the part 20 to be processed means that the first surface 21 of the part 20 to be processed has protrusions and depressions. The second surface 22 of the part 20 to be processed is flat to facilitate placement on the rotating table 100. After the previous processing step, the first surface 21 of the part 20 to be processed will form an oxide layer and surface defects. The automatic grinding device of the present application is used to remove the oxide layer and surface defects of the first surface 21 without destroying the corresponding structure of the first surface 21 of the part 20 to be processed. In addition to the shower head, the part 20 to be processed by the automatic grinding device of the present application can also be other parts with undulating surfaces. The automatic grinding device of the present application can also grind parts with flat surfaces.

[0025] In one embodiment, the workpiece 20 to be processed is a cylindrical structure.

[0026] Attachment Figure 2 This is a structural diagram of the automatic grinding device 10 of the present application. Figure 2 As shown, the automatic grinding device 10 of the present application includes a rotating table 100, rotating table 100 is used to carry the workpiece 20 to be processed and drive the workpiece 20 to rotate. 100 is disposed at the bottom of the grinding assembly 200 along the third direction X.

[0027] In one embodiment, the rotating stage 100 includes a rotating base 110, and a receiving groove is provided on the top of the rotating base 110 along the third direction X, and an opening is provided on the side of the receiving groove facing the grinding assembly 200. 100 also includes a rotating disk 120 and a third driving member. The rotating disk 120 is located in the receiving groove. The rotating disk 120 is connected to the third driving member and is used to drive the rotating disk 120 to rotate in a circumferential direction. The part to be processed 20 enters the receiving groove through the opening of the receiving groove and is placed on the rotating disk 120 to drive the part to be processed 20 to rotate synchronously. The rotating disk 120 can be set to a vacuum adsorption structure to ensure that the part to be processed 20 is not easily displaced during rotation. Furthermore, the rotating disk 120 is a cylindrical structure, and at the same time, the placement position of the part to be processed 20 can be judged by observing the gap between the part to be processed 20 and the rotating disk 120. The placement position requirement of the part to be processed 20 is that the edge of the part to be processed 20 is consistent with the edge of the rotating disk 120.

[0028] Please refer to the attached Figure 2 As shown, the automatic grinding device 10 of the present application further includes a grinding assembly 200, which is the main component of the grinding device of the present application. The rotation of the rotating table 100 and the relative movement of the grinding assembly 200 can achieve the grinding of the first surface 21. The grinding assembly 200 is set on the rotating table. 100 is on one side along the third direction X, the grinding assembly 200 is close to the rotating table A grinding surface 241 is provided on one side of the tool 100 . The grinding surface 241 abuts against the first surface 21 of the workpiece 20 to be machined so as to grind the first surface 21 of the workpiece 20 to be machined.

[0029] Please refer to the attached Figure 2 As shown, the automatic grinding device 10 of the present application further includes a moving assembly 300, which is connected to the grinding assembly 200. The moving assembly 300 includes a first moving member 310 and a second moving member 320. The first moving member 310 is used to drive the grinding assembly 200 to move along the third direction X to move closer to or away from the rotating table. 100. The second moving member 320 is used to drive the grinding assembly 200 to move along the first direction Y, which is the radial direction of the part 20 to be processed. When the grinding assembly 200 moves along the first direction Y, full coverage grinding of the upper surface of the part 20 to be processed can be achieved. The moving assembly 300 also includes a first intermediate member 340. The grinding assembly 200 is connected to the second transmission member 313 via the first intermediate member 340 to achieve a spacing between the second transmission member 313 and the grinding assembly 200. In order to further determine the amount of movement of the first moving member 310 along the third direction X, a first datum 330 is provided on the first moving member 310 in the third direction X. The first datum 330 will be further described in subsequent figures.

[0030] Please refer to the attached Figure 2 As shown, the automatic grinding device 10 of the present application also includes a pressure detection member 400, which is disposed between the grinding assembly 200 and the movable assembly 300. Furthermore, the pressure detection member 400 is disposed between the first intermediate member 340 and the grinding assembly 200. Driven by the first movable member 310, the grinding assembly 200 moves along the third direction X and close to the workpiece 20 to be machined, and then abuts against the first surface 21. The grinding assembly 200 is subjected to a first pressure from the workpiece 20 to be machined. This first pressure is simultaneously transmitted to the pressure detection member 400, which then generates a pressure detection. The first surface 21 has an undulating structure. When a protrusion on the first surface 21 of the workpiece 20 contacts the grinding assembly 200, the pressure applied to the pressure detection member 400 is greater than the pressure applied to the pressure detection member 400 when a depression on the workpiece 20 contacts the grinding assembly 200. Therefore, the first pressure detected by the pressure detection member 400 can be used to further determine the degree of undulation of the first surface 21. The pressure detection member 400 is connected to the first movable member 310. The first movable member 310 adjusts the movement of the movable assembly 300 in the third direction X according to the size of the first pressure value. The first movable member 310 is provided with a first reference 330 in the third direction X. The movement amount of the movable assembly 300 in the third direction X and relative to the first reference 330 is the first movement amount. Therefore, the first movable member 310 can adjust the size of the first movement amount according to the first pressure detected by the pressure detection member 400 to achieve the adjustment of the grinding height. The specific adjustment relationship is that the first movement amount is directly proportional to the first pressure value. In the present application, the first movement amount is the first movable member 310 driving the grinding assembly 200 to move away from the part to be processed 20. Therefore, the first movement amount is directly proportional to the first pressure value, which means that the larger the first pressure value, the larger the first movement amount.

[0031] Attachment Figure 3 This is a structural diagram of the grinding assembly 200 and the moving assembly 300 of the present application. Figure 3As shown, the second movable member 320 of the present application includes a first connecting rod 321, which is arranged along the third direction X. Two first connecting rods 321 are provided, and the two first connecting rods 321 are arranged at intervals on both sides of the rotating base 110 along the first direction Y. The first connecting rod 321 is fixedly connected to the rotating base 110 to provide space for the movement of the grinding assembly 200 along the first direction Y. The second movable member 320 also includes a second connecting rod 322, which is arranged along the first direction Y, that is, the second connecting rod 322 is arranged along the radial direction of the part to be processed 20, and the second connecting rod 322 is respectively connected to the two first connecting rods 321.

[0032] Please refer to the attached Figure 3 As shown, the second movable member 320 of the present application also includes a first driving member 323 and a first transmission member 324. The first driving member 323 and the first transmission member 324 are both arranged on the second connecting rod 322. The first driving member 323 is connected to the first transmission member 324. The first driving member 323 is connected to the first movable member 310 to drive the first movable member 310 to move along the first direction Y. The grinding assembly 200 is arranged on the first movable member 310, so that the grinding assembly 200 can be further driven to move along the first direction Y.

[0033] In one embodiment, the first connecting rod 321 and the second connecting rod 322 are made of profiles.

[0034] In one embodiment, the first transmission member 324 is a ball screw structure, and the first driving member 323 is a rotary motor. The first transmission member 324 is used to convert the rotation of the first driving member 323 into the movement of the first moving member 310 along the first direction Y.

[0035] Please refer to the attached Figure 3 As shown, the first moving member 310 of the present application includes a third connecting rod 311, which is arranged along the third direction X. The third connecting rod 311 is connected to the first transmission member 324 to drive the third connecting rod 311 to move along the first direction Y.

[0036] Please refer to the attached Figure 3 As shown, the first moving member 310 of the present application also includes a second driving member 312 and a second transmission member 313. The second driving member 312 and the second transmission member 313 are both arranged on the third connecting rod 311. The second driving member 312 is connected to the second transmission member 313. The second transmission member 313 is connected to the grinding assembly 200 to drive the grinding assembly 200 to move along the third direction X.

[0037] In one embodiment, the third connecting rod 311 is made of profiled material.

[0038] In one embodiment, the second transmission member 313 is a ball screw structure, and the second driving member 312 is a rotary motor. The second transmission member 313 is used to convert the rotation of the second driving member 312 into the movement of the second moving member 320 along the third direction X.

[0039] Please refer to the attached Figure 3 As shown, the movable assembly 300 of the present application further includes a first intermediate member 340, which includes a first intermediate plate 341 and a second intermediate plate 342. The first intermediate plate 341 is arranged along the third direction X and is connected to the second transmission member 313. The second intermediate plate 342 is arranged along the second direction Z, and its two ends along the second direction Z are respectively connected to the first intermediate plate 341 and the grinding assembly 200, so as to form a spacing arrangement between the grinding assembly 200 and the first movable member 310.

[0040] Attachment Figure 4 This is a structural diagram of the grinding assembly 200 of the present application. Figure 4 As shown, the grinding assembly 200 of the present application includes a first connector 210 and a second connector 220. The first connector 210 and the second connector 220 are spaced apart along a third direction X to facilitate the installation of an elastic connector 230 on the first connector 210 and the second connector 220. The first connector 210 is connected to the second intermediate plate 342. Furthermore, the first connector 210 includes two connecting plates spaced apart along the third direction X. The first connector 210 also includes a vertical rod, which is arranged along the third direction X. The ends of the vertical rod along the third direction X are respectively connected to the two connecting plates to facilitate the connection of the first connector 210 with other components. A connecting plate is also provided at the top of the second connector 220 along the third direction X.

[0041] Please refer to the attached Figure 4 As shown, the grinding assembly 200 of the present application further includes an elastic connector 230. The elastic connector 230 is provided to further facilitate the retraction of the grinding assembly 200 along the third direction X when the grinding assembly 200 contacts the workpiece 20 to be processed, thereby forming a soft contact between the grinding assembly 200 and the workpiece 20 to be processed, and further preventing the grinding assembly 200 from excessively wearing the protruding structure on the first surface 21 of the workpiece 20 to be processed. The elastic connector 230 is disposed between the first connector 210 and the second connector 220. The two ends of the elastic connector 230 along the third direction X are respectively connected to the first connector 210 and the second connector 220. The elastic connector 230 always provides a driving force for the second connector 220 to move away from the first connector 210 along the third direction X.

[0042] In one embodiment, the elastic connector 230 includes a first elastic member 231 and a guide post 232. The guide post 232 is disposed between the first connector 210 and the second connector 220. The guide post 232 is floatingly connected to the first connector 210 and the second connector 220, respectively. That is, the guide post 232 is fixedly connected to the first connector 210, and a clearance fit is formed between the guide post 232 and the second connector 220, allowing the second movable member 320 to move relative to the guide post 232. The first elastic member 231 is sleeved outside the guide post 232, and the first elastic member 231 is fixedly connected to the first connector 210 and the second connector 220, respectively.

[0043] Please refer to the attached Figure 4 As shown, the grinding assembly 200 of the present application also includes a grinding piece 240, which is connected to the second connecting piece 220. The grinding piece 240 has a grinding surface 241 at the bottom along the third direction X. The grinding surface 241 of the grinding piece 240 contacts the first surface 21 of the part to be processed 20 to form grinding of the first surface 21 of the part to be processed 20.

[0044] In one embodiment, the grinding member 240 is frosted leather.

[0045] Please refer to the attached Figure 4 As shown, the second connecting member 220 of the present application includes a first connecting structure 221 and a connecting structure. The first connecting structure 221 is connected to the elastic connecting member 230. The first connecting structure 221 and the second connecting structure 222 are detachably connected, thereby facilitating the rapid replacement of the grinding member 240 located on the third connecting structure 224.

[0046] In one embodiment, the first connection structure 221 and the second connection structure 222 are connected by threads.

[0047] Please refer to the attached Figure 4 As shown, the second connecting member 220 of the present application also includes a first connecting plate 223. The second connecting structure 222 is connected to the first connecting plate 223 along the third direction X and at one end away from the first connecting structure 221. The first connecting plate 223 is provided to further facilitate the setting of the grinding member 240.

[0048] Please refer to the attached Figure 4 As shown, the second connecting member 220 of the present application also includes a third connecting structure 224, which is arranged at the bottom of the first connecting plate 223 along the third direction X. The third connecting structure 224 is connected to the first connecting plate 223, and the third connecting structure 224 is provided with a contact surface 224-1 at the bottom along the third direction X, and the grinding member 240 is arranged around the outside of the contact surface 224-1.

[0049] Furthermore, a first through hole and a second through hole are penetrated in the first connecting plate 223 along the third direction X, and the first through hole and the second through hole are arranged at intervals on both sides of the third connecting structure 224 along the first direction Y. The first section of the grinding member 240 is connected to the first connecting plate 223 through the fixing member 250, and the second end of the grinding member 240 passes downward through the first through hole and moves toward the abutting surface 224-1, and is arranged around the outside of the abutting surface 224-1, then passes upward through the second through hole, and is connected to the first connecting plate 223 through the fixing member 250, thereby realizing the installation of the grinding member 240, and the grinding member 240 can be replaced by contacting the connection of the fixing member 250.

[0050] Attachment Figure 5 This is a structural diagram of the third connection structure 224 of this application. Figure 5 As shown, the third connection structure 224 of the present application is provided with two limiting grooves 224-2 at the bottom along the third direction X. The limiting grooves 224-2 are provided with openings facing outward, and the two limiting grooves 224-2 are respectively provided on both sides of the abutting surface 224-1 along the third direction X. During installation, the grinding member 240 enters the limiting grooves 224-2 through the openings of the limiting grooves 224-2 to achieve the position limitation of the grinding member 240 and prevent the grinding member 240 from being separated from the third connection structure 224.

[0051] In the description of this specification, the reference terms "one embodiment," "some embodiments," "example," "specific example," or "some examples" mean that the specific features, structures, materials, or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. Moreover, the specific features, structures, materials, or characteristics described may be combined in any appropriate manner in any one or more embodiments or examples. In addition, those skilled in the art may combine and combine different embodiments or examples described in this specification, as well as features of different embodiments or examples, unless they are mutually inconsistent.

[0052] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. Throughout the description of this application, "plurality" means two or more, unless otherwise specifically defined.

[0053] The above description is merely a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of this application. Therefore, the scope of protection of this application should be based on the scope of protection of the claims.

Claims

1. An automatic grinding device, characterized in that: The automatic grinding device is used to grind the first surface of the part to be processed, the first surface is an undulating structure, and the automatic grinding device includes: A rotating table, which is used to carry the parts to be processed and drive the parts to be processed to rotate; a grinding assembly, the grinding assembly being disposed on one side of the rotating table along the third direction, the grinding assembly having a grinding surface on a side close to the rotating table, the grinding surface being in contact with the first surface of the part to be processed so as to grind the first surface of the part to be processed; a moving assembly connected to the grinding assembly, the moving assembly comprising a first moving member and a second moving member, the first moving member being used to drive the grinding assembly to move along the third direction, and the second moving member being used to drive the grinding assembly to move along the first direction; A pressure detecting part is arranged between the grinding component and the moving component. When the grinding component contacts the part to be processed in the third direction, the grinding component is subjected to a first pressure from the part to be processed, and the first pressure is transmitted to the pressure detecting part. The pressure detecting part is connected to the first moving part. The first moving part adjusts the movement of the moving component in the third direction according to the size of the first pressure value. The first moving part is provided with a first reference in the third direction. The movement amount of the moving component in the third direction and relative to the first reference is a first movement amount, and the first movement amount is directly proportional to the first pressure value.

2. The automatic grinding device according to claim 1, characterized in that: The rotating platform includes: a rotating seat, wherein a third driving member is disposed in the rotating seat; The third driving member is connected to the rotating disk and is used to drive the rotating disk to rotate in a circumferential direction.

3. The automatic grinding device according to claim 2, characterized in that: The second moving member includes a first connecting rod, the first connecting rod being arranged along a third direction, the first connecting rod being arranged at intervals on both sides of the rotating base along the first direction, and the first connecting rod being connected to the rotating base; a second connecting rod, the second connecting rod being arranged along the first direction and being connected to two of the first connecting rods respectively; A first driving member and a first transmission member, wherein the first driving member and the first transmission member are both arranged on the second connecting rod, the first driving member is in transmission connection with the first transmission member, and the first transmission member is connected to the first moving member to drive the first moving member to move along the first direction.

4. The automatic grinding device according to claim 3, characterized in that: The first moving member includes, a third connecting rod, the third connecting rod being arranged along the third direction and connected to the first transmission member; The second driving member and the second transmission member are both arranged on the third connecting rod, the second driving member is in transmission connection with the second transmission member, and the second transmission member is connected to the grinding assembly to drive the grinding assembly to move along the third direction.

5. The automatic grinding device according to claim 4, characterized in that: The first transmission member and the second transmission member are both ball screw structures, and the first driving member and the second driving member are both rotating motors.

6. The automatic grinding device according to claim 4, characterized in that: The mobile assembly further comprises: A first intermediate piece, the grinding assembly is connected to the second transmission piece through the first intermediate piece; wherein the first intermediate piece includes: a first intermediate plate, the first intermediate plate being arranged along the third direction and connected to the second transmission member; The second intermediate plate is arranged along the second direction, and both ends of the second intermediate plate along the second direction are respectively connected to the first intermediate plate and the grinding assembly to form a spacing arrangement between the grinding assembly and the first moving member.

7. The automatic grinding device according to claim 6, characterized in that: The grinding assembly comprises, a first connecting member and a second connecting member, wherein the first connecting member and the second connecting member are spaced apart along the third direction, and the first connecting member is connected to the second intermediate plate; an elastic connector, the elastic connector being disposed between the first connector and the second connector, the two ends of the elastic connector along the third direction being connected to the first connector and the second connector respectively, the elastic connector always applying a driving force to the second connector away from the first connector along the third direction; A grinding member is connected to the second connecting member, and the bottom of the grinding member along the third direction has the grinding surface.

8. The automatic grinding device according to claim 7, characterized in that: The second connecting member includes: a first connecting structure and a second connecting structure, wherein the first connecting structure is connected to the elastic connecting member, and the first connecting structure and the second connecting structure are detachably connected; a first connecting plate, wherein one end of the second connecting structure along the third direction and away from the first connecting structure is connected to the first connecting plate; The third connecting structure is arranged at the bottom of the first connecting plate along the third direction, the third connecting structure is connected to the first connecting plate, and the third connecting structure is provided with an abutment surface at the bottom along the third direction, and the grinding member is arranged around the outside of the abutment surface.

9. The automatic grinding device according to claim 8, characterized in that: A first through hole and a second through hole are formed in the first connecting plate along the third direction. The first through hole and the second through hole are spaced apart on both sides of the third connecting structure along the first direction. The first end of the grinding member is connected to the first connecting plate through a fixing member. After the second end of the grinding member passes downward through the first through hole, it moves toward the abutting surface and is arranged around the outside of the abutting surface. Then, it passes upward through the second through hole and is connected to the first connecting plate through the fixing member.

10. The automatic grinding device according to claim 9, characterized in that: The third connection structure is provided with two limiting grooves at the bottom along the third direction. The limiting grooves are provided with openings facing outwards. The two limiting grooves are respectively provided on both sides of the abutting surface along the third direction.

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