Spectrometer system and preparation method thereof

Abstract

The invention provides a spectrometer system comprising a spectrometer chip comprising a camera and a metasurface located on a detection surface of the camera; the metasurface comprises a plurality of nano-pore or nano-column arrays, and selective absorption of light with different wavelengths is realized through surface plasmons generated by different nano-pores or nano-columns; the camera detects the intensity change of light to be detected after the light passes through different nano-pores or nano-column arrays of the metasurface, and then spectral information is obtained through calculation. According to the spectrograph system, selective absorption of light with different wavelengths is achieved through the metasurface, and then spectral information is obtained through calculation, so that the structure of the spectrograph system is compact, and the overall size is very small; and the plasmon generated by the nanopore or nanopillar array has high tolerance to the structure size, so that the processing precision is lower, and large-area and large-batch preparation can be realized.

Description

Technical Field

[0001] This patent belongs to the field of spectral detection technology, specifically involving a spectrometer system and its preparation method for achieving high-precision spectral detection. Background Art

[0002] A spectrometer is a device used to detect and analyze the spectrum of a substance. Its specific functions include detecting absorption, reflection, scattering, and stimulated excitation spectra. By analyzing a substance's various spectral characteristics, a spectrometer can determine its composition, state, and distribution, playing a vital role in fields such as environmental monitoring, biopharmaceuticals, chemical engineering, and military applications. With the continuous advancement of technology, portable and handheld spectrometers are increasingly in demand in fields such as healthcare, environmental monitoring, and materials analysis due to their flexibility and practicality. Therefore, the development of lightweight and compact spectrometers has become a key research and development focus.

[0003] A spectrometer typically consists of an entrance slit, a collimator, a spectrometer or filter, a focusing array, and a detector array. The entrance slit and collimator collect the light to be measured and convert it into parallel light. The spectrometer or filter separates or filters light of different wavelengths. The focusing array and detector array are responsible for focusing the different beams after passing through the spectrometer or filter and measuring the light intensity. Of these five components, the spectrometer or filter is the most critical in determining the measurement accuracy of the spectrometer. The greater the spectrometer's ability to distinguish or selectively filter different wavelengths of light, the higher the spectrometer's resolution. However, traditional spectrometers, such as grating and prism spectrometers, require a large space to achieve high resolution, and reducing their size results in reduced resolution. This limitation has hindered the development of small, high-resolution spectrometers based on spectrometers. The resolution of a filter is determined by the wavelength selectivity of its material and structure and is not limited by space. This holds promise for the development of small, high-resolution spectrometers.

[0004] Currently, there are dielectric metasurfaces based on BICs (bound states in the continuum) that can be used to implement optical filtering spectrometers. However, these existing BIC dielectric metasurfaces require high machining precision and are expensive, making them difficult to manufacture on a large scale and in large quantities. However, no research has yet successfully used plasmonic metasurfaces to achieve simultaneous detection in the visible to near-infrared range. Summary of the Invention

[0005] The object of the present invention is to provide a spectrometer chip and a preparation method thereof, so as to achieve high-precision spectrum detection.

[0006] To achieve the above objectives, the present invention provides a spectrometer system, comprising a spectrometer chip, wherein the spectrometer chip includes a camera and a metasurface located on the detection surface of the camera; the metasurface is composed of a plurality of nanohole or nanopillar arrays, and surface plasmons generated by different types of nanohole or nanopillar arrays respectively achieve selective absorption of incident light of different wavelengths; the camera detects the intensity change of the light to be measured after passing through different nanohole or nanopillar arrays on the metasurface, and then obtains spectral information through calculation by a data processing unit.

[0007] Each nanohole or nanopillar array has a specific diameter, material, period, and height.

[0008] Each nanohole or nanopillar array is aligned with a plurality of pixel units of the camera; the pixel unit size of the camera is between ten microns and one hundred microns, and the size of the nanohole or nanopillar array is between one hundred microns and one millimeter.

[0009] The nanopore or nanopillar arrays are arranged from left to right and from top to bottom into a large rectangular array; the absorption peak positions of the transmission spectra of adjacent nanopore or nanopillar arrays are equidistant, and equidistant means that the wavelength difference of the absorption peaks of the transmission spectra of adjacent nanopore or nanopillar arrays is the same.

[0010] The parameters of the height, material, diameter and period of the different nanoholes or nanopillar arrays on the metasurface are obtained by simulating the absorption peak wavelength and half-peak width of the target transmission spectrum of the nanoholes or nanopillar arrays.

[0011] The metasurface includes a substrate and a nanohole array or a nanopillar array arranged on the upper surface of the substrate; the material of the metasurface includes two parts, one part is the material of the nanoholes or nanopillars that generate plasmons, and the other part is the material of the substrate that plays a supporting and refractive index matching role. The parameters of the metasurface include the height, radius and period of different nanohole or nanopillar arrays.

[0012] The size of the nanopore or nanopillar array is tens of nanometers to several micrometers, and the period length of the nanopore or nanopillar array is hundreds of nanometers to several micrometers; the material of the nanopore or nanopillar array is gold, silver, aluminum or other materials that can produce plasmon effects.

[0013] The spectrometer system further includes an incident slit, a collimating element, and a polarizer, wherein the incident slit, collimating element, polarizer, and spectrometer chip are arranged in sequence along the optical propagation direction of the light source to be measured; and / or the spectrometer system further includes a data processing unit connected to the camera; the camera is used to detect the light to be measured, and the detection results of different pixel units of the camera are input into the data processing unit of the spectrometer system; the data processing unit is used to calculate and obtain spectral information.

[0014] In another aspect, the present invention provides a method for manufacturing a spectrometer system, comprising:

[0015] S1: Determine, through software simulation, parameters such as the height, material, diameter, and period of the nanohole or nanopillar arrays, as well as the material of the substrate, based on the absorption peak wavelength and half-width of the target transmission spectra of different nanohole or nanopillar arrays of the metasurface; wherein the metasurface includes a substrate and multiple nanohole or nanopillar arrays disposed on the upper surface of the substrate, and surface plasmons generated by different types of nanohole or nanopillar arrays selectively absorb incident light of different wavelengths;

[0016] S2: preparing a plurality of nanopore or nanopillar arrays meeting the parameters of step S1 on a substrate to obtain a metasurface;

[0017] S3: A spectrometer chip is obtained by integrating a camera on the back side of the substrate; the camera is used to detect the transmitted light intensity of different nanoholes or nanopillar arrays on the metasurface.

[0018] The manufacturing method of the spectrometer system further includes:

[0019] S4: Arrange and package the incident slit, collimating element, polarizer, and spectrometer chip in sequence to obtain a spectrometer system;

[0020] S5: Connecting a data processing unit to a camera of a spectrometer system; the data processing unit is used to calculate the light intensity distribution of different wavelengths of the light to be measured, and finally obtain the spectrum information of the light to be measured.

[0021] The spectrometer system of the present invention utilizes a metasurface to selectively absorb light within a specific wavelength range and subsequently calculate spectral information. This results in a compact structure and a small overall size. Furthermore, because the metasurface is fabricated using nanopore or nanopillar arrays, machining precision is lower, enabling large-scale, large-scale production. Plasmon generation requires lower dimensional tolerances. For example, for a nanopore or nanopillar array of a certain radius, a 10% tolerance within the radius of the metal nanopillars will produce a good plasmon effect. This allows the nanopore or nanopillar array of the present invention to be mass-produced using nanoimprinting technology. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a schematic diagram of the principle of localized surface plasmons.

[0023] Figure 2 4 is a schematic structural diagram of a spectrometer chip used in a spectrometer system according to an embodiment of the present invention.

[0024] Figure 3Schematic diagram showing how the position of the absorption peak in the transmission spectrum of the metasurface changes with the height, diameter, and period of the nanohole or nanopillar array.

[0025] Figure 4 It is a schematic diagram of the three-dimensional structure of a spectrometer chip manufactured by the manufacturing method of the spectrometer system of the present invention.

[0026] Figure 5 Figure 1 is a possible process flow diagram for the preparation of nanopore or nanopillar arrays.

[0027] Figure 6 FIG. 4 is an overall structural diagram of a spectrometer system according to an embodiment of the present invention. DETAILED DESCRIPTION

[0028] The present invention will be further described below with reference to specific examples. It should be understood that the following examples are only used to illustrate the present invention and are not intended to limit the scope of the present invention.

[0029] The principles of the spectrometer system and the preparation method thereof of the present invention are as follows:

[0030] This invention exploits the light-responsive properties of nanopore or nanopillar arrays to develop a metasurface with high sensitivity to specific wavelengths and a filtering function. The invention selectively absorbs light within a specific wavelength range through localized surface plasmons generated by the nanopore or nanopillar arrays. The nanopore or nanopillar arrays can be made of metal nanoparticles.

[0031] In order to clarify the relationship between the various terms in the present invention and avoid ambiguity, it is supplemented here that in the present invention, the metasurface array is a large array composed of multiple nanohole or nanopillar arrays; the metasurface is the metasurface array plus the substrate; the metasurface array is a large array, and the nanohole or nanopillar array is the small array that constitutes the large array.

[0032] Plasmons are collective oscillations of electrons at the metal-dielectric interface under the excitation of light of a specific wavelength. They can be divided into localized surface plasmons and propagating surface plasmons according to their behavior patterns. Figure 1 This is a schematic diagram of the principle of localized surface plasmons, in which metal nanoparticles couple with incident light, generating collective oscillations of free electrons on the surface. The resonant frequency of localized surface plasmons is closely related to the size of the metal nanoparticles. By adjusting the particle size, selective excitation of light of different wavelengths can be achieved, which manifests in the transmission spectrum as selective absorption of light within a specific wavelength range (i.e., narrow bands of non-monochromatic light). Furthermore, when metal particles are arranged in a two-dimensional array with a certain period, the localized surface plasmons between different particles further couple and enhance, resulting in a narrower absorption peak in the transmission spectrum.

[0033] Based on these properties, metal nanoparticle arrays can be used in spectrometers' spectroscopic components, achieving high-precision spectral resolution within a compact footprint. In other words, the nanopore or nanopillar arrays in the present invention's spectrometers don't need to provide monochromatic light like existing spectrometers' spectroscopic components. Instead, they simply provide composite light after excluding light within a specific wavelength range. Algorithmic analysis then generates the absorption spectra of each monochromatic component of the composite light.

[0034] Unlike traditional spectrometers that require splitting and focusing, the metasurface of the spectrometer chip of the present application achieves the distinction between light of different wavelengths through filtering. Therefore, the spectrometer chip of the present invention includes a camera and a metasurface, and should be regarded as a camera with an additional layer of filtering elements. Therefore, unlike traditional spectrometers, there is no need to separate light of different wavelengths and then focus and measure them.

[0035] First embodiment: a spectrometer system

[0036] A spectrometer system according to one embodiment of the present invention includes a spectrometer chip, such as Figure 2 As shown, the spectrometer chip includes a camera 3 and a metasurface located on the detection surface of the camera 3.

[0037] The metasurface includes a plurality of nanoholes or nanocolumn arrays, and surface plasmons generated by different types of nanoholes or nanocolumn arrays respectively realize selective absorption of incident light of different wavelengths.

[0038] In this embodiment, the metasurface includes a substrate 2 and a metasurface array 1 disposed on the surface of the substrate 2, wherein the metasurface array 1 includes a plurality of nanohole or nanopillar arrays, specifically an array of metal nanoparticles 11. Therefore, the material of the metasurface includes two parts: one part is the nanohole material or nanopillar material that generates plasmons, and the other part is the material of the substrate 2 that provides support and refractive index matching. The parameters of the metasurface include the height, radius, and period of the different nanohole or nanopillar arrays.

[0039] Because the surface plasmons generated by different types of nanopores or nanopillar arrays selectively absorb light in different wavelength ranges, the camera 3 detects the intensity changes after the light passes through the different types of nanopores or nanopillar arrays on the metasurface, and then uses the data processing unit to calculate the spectral information, thereby realizing an efficient and accurate spectral information detection method. In this embodiment, the transmission spectrum of the metasurface for each type of nanopore or nanopillar array is the composite light spectrum obtained by removing light of a specific wavelength range.

[0040] In this embodiment, the nanopore or nanopillar array in the metasurface is rectangular in shape and multiple in number, thereby forming multiple nanopore or nanopillar arrays (i.e., a matrix array) on the metasurface, and each nanopore or nanopillar array has the same nanoconfiguration combination (i.e., having a specific diameter, material, period, and height). The total number of nanopore or nanopillar arrays is selected based on the measurement range and measurement accuracy to ensure that the spectrum within the entire measurement range is covered. The size of the nanopore or nanopillar array is at least 100 times the period length of the nanopore or nanopillar array.

[0041] Each nanohole or nanopillar array is aligned with a plurality of pixel units of the camera 3. The size of the pixel unit of the camera 3 is between ten microns and one hundred microns, and the size of the nanohole or nanopillar array is between one hundred microns and one millimeter.

[0042] There are no specific requirements for the transmission spectra and arrangement positions between adjacent nanopore or nanopillar arrays. In this embodiment, the nanopore or nanopillar arrays are arranged from left to right and from top to bottom into a large rectangular array; the absorption peaks of the transmission spectra of adjacent nanopore or nanopillar arrays are equidistant, meaning that the wavelength difference between the absorption peaks of the transmission spectra of adjacent nanopore or nanopillar arrays is the same.

[0043] In this embodiment, the material selection of the metal nanoparticles 11 will directly affect the light absorption characteristics of the localized surface plasmons generated by the metal nanoparticles 11. The size of the metal nanoparticles 11 (i.e., the height and diameter of the nanohole or nanopillar array) and the period of the nanohole or nanopillar array can enhance the interaction between light of a specific wavelength and the metal nanoparticles 11 through the localized surface plasmons, thereby improving the resolution of the spectrometer and achieving transmission absorption of light of different wavelengths. Figure 3 As shown, by varying the period of the nanohole or nanopillar array and the size of the metal nanoparticles 11, the position of the metasurface's transmission spectrum absorption peak can be altered. Therefore, arithmetic variations in the transmission spectrum of different regions can be achieved by varying the height, diameter, and period of the different nanohole or nanopillar arrays on the metasurface.

[0044] In this embodiment, the parameters of the height, material, diameter and period of the different nanohole or nanopillar arrays of the metasurface are obtained by simulating the absorption peak wavelength and half-peak width of the target transmission spectrum of the nanohole or nanopillar array. The metasurface includes a substrate 2 and a nanohole array or nanopillar array provided on the upper surface of the substrate 2; the material of the metasurface includes two parts, one part is the material of the nanoholes or nanopillars that generate plasmons, and the other part is the material of the substrate that plays a supporting and refractive index matching role. The parameters of the metasurface include the height, radius and period of the different nanohole or nanopillar arrays. According to optical simulation, the obtained nanohole or nanopillar array can produce transmission absorption peaks for light in the visible to near-infrared band. The transmission peak and absorption peak can be further optimized by adjusting the size and shape of the nanoholes or nanopillars.

[0045] The nanopore or nanopillar array has a size ranging from tens of nanometers to several micrometers, and a period length ranging from hundreds of nanometers to several micrometers. The nanopore or nanopillar array is made of gold, silver, aluminum, or other materials capable of producing plasmon effects. The substrate 2 should be made of a material that is transparent within the measured wavelength range, and may be made of quartz or other materials.

[0046] like Figure 6 As shown, in addition to the aforementioned spectrometer chip, the spectrometer system may also include an input slit 7, a collimating element 10, and a polarizer 9 (optional). The input slit 7, collimating element 10, polarizer 9, and spectrometer chip 8 are sequentially arranged along the optical path of the light source to be measured. Furthermore, the spectrometer system may include a data processing unit (e.g., an algorithm chip) connected to the camera 3. The camera 3 is used to detect the light to be measured, and the detection results of the different pixel units of the camera 3 are input to the data processing unit of the spectrometer system. The data processing unit is used to calculate the distribution of light intensity as a function of wavelength, which serves as spectral information.

[0047] The wavelength range of the light source to be measured is selected based on the measurement range of the spectrometer system, and the polarization state is either non-circular polarization or elliptical polarization. The intensity of the light source to be measured should not exceed the detection intensity of the selected camera 3. The specific type of light source to be measured depends on the application scenario of the micro-spectrometer system. The light to be measured should be incident on the spectrometer chip perpendicular to the surface of the spectrometer chip.

[0048] Second embodiment: Method for manufacturing a spectrometer system

[0049] According to a second embodiment of the present invention, a method for manufacturing a spectrometer system specifically includes:

[0050] Step S1: Determine the height, material, diameter, and period of the nanohole or nanopillar array and the material of the substrate through software simulation based on the absorption peak wavelength and half-maximum width of the target transmission spectrum of different nanohole or nanopillar arrays of the metasurface;

[0051] The metasurface includes a plurality of nanoholes or nanocolumn arrays, and the surface plasmons generated by different types of nanoholes or nanocolumn arrays respectively realize the selective absorption of incident light of different wavelengths.

[0052] In this embodiment, the nanopore or nanopillar array is arranged from left to right and from top to bottom into a large rectangular array; the absorption peak positions of the transmission spectra of adjacent nanopore or nanopillar arrays are equidistant, and equidistant means that the wavelength difference of the absorption peaks of the transmission spectra of adjacent nanopore or nanopillar arrays is the same.

[0053] The material of the metasurface consists of two parts: one is the material of the nanoholes or nanopillars that generate plasmons, and the other is the material of the substrate that plays a supporting and refractive index matching role. The parameters of the metasurface include the height, radius and period of different nanohole or nanopillar arrays.

[0054] Among them, through simulation software such as FDTD and COMSOL, the height, diameter and period of the nanohole or nanopillar array under different combinations of nanohole or nanopillar arrays and the material of the substrate 2 can be simulated based on the absorption peak wavelength and half-peak width of the target transmission spectrum of different nanohole or nanopillar arrays on the metasurface. During the simulation, the constraints include: the period length of the nanohole or nanopillar array matches the refractive index of the wavelength of light selectively absorbed by the metasurface at the interface. For example, period × refractive index = wavelength of absorbed light. The nanohole or nanopillar uses metal nanoparticles 11, and the diameter of the metal nanoparticles 11 should be smaller than the period and greater than zero.

[0055] The material of the metal nanoparticles 11 will directly affect the absorption characteristics of the localized surface plasmons generated by them. The localized surface plasmons generated corresponding to the height, diameter and period of the nanohole or nanopillar array are used to enhance the interaction between light of a specific wavelength and the metal nanoparticles 11, thereby improving the resolution of the spectrometer and achieving transmission and absorption of light of different wavelengths. Figure 3 As shown, by changing the height, diameter and period of the nanohole or nanopillar array, the position of the absorption peak of the transmission spectrum of the metasurface can be changed.

[0056] Step S2: Using micro-nanofabrication technologies such as nanoimprinting, a variety of nanopore or nanopillar arrays that meet the parameters of step S1 are prepared on the substrate 2 to obtain a metasurface.

[0057] The material of the substrate 2 should be a material that is translucent within the measured wavelength range, and quartz or other materials may be selected.

[0058] Step S3: A camera 3 is integrated on the back side of the substrate 2 to obtain a spectrometer chip. The camera 3 is used to detect the transmitted light intensity of different nanoholes or nanopillar arrays on the metasurface.

[0059] In this embodiment, substrate 2 and camera 3 are packaged together by directly bonding them together after spin coating with a refractive index matching solution. The attachment of substrate 2 and camera 3 can also be combined with the processing of camera 3. That is, after camera 3 is processed, substrate 2 is grown on the surface of camera 3 by CVD, and then nanopore or nanopillar arrays are formed.

[0060] Camera 3 is an array of photoelectric sensor units that converts optical signals into electrical signals for digital processing. Camera 3 converts optical signals after passing through the nanopore or nanopillar array into electrical signals. These signals contain spectral information about the light being measured. Depending on the measurement band and the required measurement accuracy, in this embodiment, Camera 3 can be a CMOS, CCD, InGaAs, or other camera.

[0061] Step S4 (optional): Arrange and package the incident slit 7, the collimating element 10, the polarizer 9 (optional), and the spectrometer chip 8 in sequence to obtain a spectrometer system.

[0062] Step S5 (optional): connecting a data processing unit to the camera of the spectrometer system; the data processing unit is used to calculate the light intensity distribution of different wavelengths of the light to be measured, and finally obtain the spectral information of the light to be measured.

[0063] In practical applications, the spectrometer chip must be assembled with an input slit and collimating elements to isolate the influence of ambient light and ensure that the light to be measured is incident perpendicularly on the metasurface. The output signal from the camera is read by a device such as a microcontroller and processed through an algorithm to obtain the spectral information of the light to be measured.

[0064] In this embodiment, the data processing unit uses advanced image processing and spectral analysis algorithms to extract optical information of different wavelengths of the light to be measured from the detection results of different pixel units of camera 3. For details on the image processing and spectral analysis algorithms, please refer to the algorithm section in the literature [https: / / www.science.org / doi / 10.1126 / sciadv.adr7155]. These algorithms can identify and analyze changes in optical signals, thereby providing accurate spectral data.

[0065] Furthermore, if one wants to obtain spectral detection results with higher precision, on the one hand, one can improve the algorithm to analyze and predict the output results, thereby improving the measurement accuracy of the spectrometer at the data level; on the other hand, one can add a polarizer 9 parallel to the array between the collimating element 10 and the spectrometer chip 8 to reduce the influence of the polarization direction of the light on the measurement results. However, this solution makes it impossible to directly apply the spectrometer to the measurement of light with polarization correlation.

[0066] Figure 4 This is a schematic diagram of the three-dimensional structure of a spectrometer chip manufactured by the method for manufacturing a spectrometer system. Nanopore or nanocolumn arrays with different period lengths are sequentially arranged on a substrate 2 to ultimately achieve spectral detection.

[0067] Third embodiment: Method for manufacturing a spectrometer system based on metal nanoparticles 11

[0068] The present invention's spectral detection is based on the wavelength-selective absorption of light by a metasurface. Furthermore, considering the miniaturization and high-precision detection requirements of the spectrometer, a wavelength-selective absorption / transmission metasurface array is the core of the present invention. In this embodiment, the nanopores or nanopillars of the nanopore or nanopillar array are metal nanoparticles 11.

[0069] The manufacturing method of the spectrometer system specifically includes the following steps:

[0070] Step S1′: determining the height, material, diameter, and period of the nanohole or nanopillar arrays and the material of the substrate through software simulation based on the absorption peak wavelength and half-maximum width of the target transmission spectra of different nanohole or nanopillar arrays on the metasurface;

[0071] The metasurface includes a substrate and a plurality of nanohole or nanopillar arrays provided on the upper surface of the substrate, and surface plasmons generated by different types of nanohole or nanopillar arrays respectively realize selective absorption of incident light of different wavelengths;

[0072] In this embodiment, software simulations and observations were used to determine the near-field distribution and transmittance of the array using nano- or micro-particles of varying shapes, sizes, and materials. This allowed the determination of parameters such as the height, material, diameter, and period of the nanopore or nanopillar array, as well as the substrate material. The near-field distribution and transmittance of the array were observed by setting up a monitor in the simulation. The near-field distribution of the array was required to generate a strong electric field region on the metasurface and exhibit the characteristics of localized surface plasmons.

[0073] The wavelength of the resonance absorption peak of the nanopore or nanopillar array changes with the period. As the radius of the metal nanoparticle 11 increases or decreases, the peak intensity and half-width of the resonance peak also change. Therefore, by continuously adjusting the height, diameter, and period of the nanopore or nanopillar array, the relationship between peak intensity and half-width can be balanced to achieve a transmission spectrum with high peak intensity and narrow half-width.

[0074] In this embodiment, the size of the nanopore or nanopillar array ranges from tens of nanometers to several micrometers, and the period length of the nanopore or nanopillar array ranges from hundreds of nanometers to several micrometers. The nanopore or nanopillar array is made of aluminum, silver, gold, copper, or other materials capable of generating plasmon effects, thereby achieving nanometer-scale transmission or absorption peaks. The transmission and absorption peaks can be further optimized by adjusting the size and shape of the nanopore or nanopillar array.

[0075] Step S2': preparing a variety of nanopore or nanocolumn arrays that meet the parameters of step S1' on the substrate 2 to obtain a metasurface.

[0076] The step S2' specifically includes:

[0077] Step S21': array template preparation; that is, using micro-nano processing technology, silicon pillar arrays of different periods that meet the parameters of step S1 are processed on the surface of the silicon wafer to serve as templates for batch preparation of nanopore or nanopillar arrays;

[0078] Step S22 ′: transferring the template pattern to the target material through imprinting, curing, etching, and desizing of the micro-nano structure to obtain a nanopore or nanopillar array.

[0079] Figure 5 This is a possible process flow chart for fabricating nanopore or nanopillar arrays. Here, 4 represents the material layer of the nanopore or nanopillar array, such as a metal layer evaporated by electron beam; 5 represents the micro-nanofabrication adhesive; and 6 represents the imprint template.

[0080] like Figure 5 As shown, the step S22' specifically includes:

[0081] Step S221 ′: depositing the material of the nanopore or nanocolumn array on the substrate according to the parameters of step S1 ;

[0082] Different deposition processes are selected according to the performance requirements of the material. For example, metal materials can be deposited using electron beam evaporation or magnetron sputtering technology.

[0083] Step S222': uniformly coating the surface of the deposited material with a micro-nano fabrication adhesive, and transferring the template pattern to the micro-nano fabrication adhesive using a nano-replication technique that matches the adhesive;

[0084] The nano-replication technology may be, for example, imprinting, photolithography, etc. In this embodiment, the nano-replication technology is imprinting, and the template obtained in step S1 is an imprint template. In other embodiments, the nano-replication technology is photolithography, and the template obtained in step S1 is a mask.

[0085] Step S222 ′: obtaining the desired nanopore or nanopillar array through micro-nano processing (eg curing the photoresist, etching away the exposed material layer of the nanopore or nanopillar array, removing the photoresist, etc.).

[0086] Step S3 ′: a camera 3 is integrated on the back side of the substrate 2 to obtain a spectrometer chip; the camera 3 is used to detect the transmitted light intensity of different nanoholes or nanopillar arrays on the metasurface.

[0087] In this embodiment, substrate 2 and camera 3 are packaged together by directly bonding them together after spin coating with a refractive index matching solution. The attachment of substrate 2 and camera 3 can also be combined with the processing of camera 3. That is, after camera 3 is processed, substrate 2 is grown on the surface of camera 3 by CVD, and then nanopore or nanopillar arrays are formed.

[0088] Camera 3 is an array of photoelectric sensor units that converts light signals into electrical signals for digital processing. Through Camera 3, we can convert light signals that have passed through the nanopore or nanopillar array into electrical signals. These signals contain spectral information of the light to be measured, depending on the measurement band and the required measurement accuracy.

[0089] Camera 3 can be a CMOS, CCD, InGaAs, or other camera. In this embodiment, the spectrometer's wavelength is between 400 and 1,600 nanometers. For the visible light band between 400 and 900 nanometers, a CCD or CMOS camera can be used. For the wavelengths between 900 and 1,600 nanometers or 400 and 1,600 nanometers, an InGaAs camera is recommended.

[0090] Step S4 ′ (optional): Arrange and package the incident slit 7 , the collimating element 10 , the polarizer 9 (optional), and the spectrometer chip 8 in sequence to obtain a spectrometer system.

[0091] The above description is merely a preferred embodiment of the present invention and is not intended to limit the scope of the present invention. Various modifications are possible. Any simple, equivalent changes and modifications made in accordance with the claims and description of the present invention are within the scope of protection of the patent claims. Anything not fully described in this invention is conventional technology.

Claims

1. A spectrometer system, characterized in that: The spectrometer chip includes a camera and a metasurface located on the detection surface of the camera; the metasurface includes multiple nanohole or nanopillar arrays, and surface plasmons generated by different types of nanohole or nanopillar arrays respectively achieve selective absorption of incident light of different wavelengths; the camera detects the intensity change of the light to be measured after passing through different nanohole or nanopillar arrays on the metasurface, and then obtains spectral information through calculation by a data processing unit.

2. The spectrometer system according to claim 1, characterized in that Each nanohole or nanopillar array has a specific diameter, material, period, and height.

3. The spectrometer system according to claim 2, characterized in that Each nanohole or nanopillar array is aligned with a plurality of pixel units of the camera; the pixel unit size of the camera is between ten microns and one hundred microns, and the size of the nanohole or nanopillar array is between one hundred microns and one millimeter.

4. The spectrometer system according to claim 2, characterized in that The nanopore or nanopillar arrays are arranged from left to right and from top to bottom into a large rectangular array; the absorption peak positions of the transmission spectra of adjacent nanopore or nanopillar arrays are equidistant, and equidistant means that the wavelength difference of the absorption peaks of the transmission spectra of adjacent nanopore or nanopillar arrays is the same.

5. The spectrometer system according to claim 1, characterized in that The parameters of the height, material, diameter and period of the different nanoholes or nanopillar arrays on the metasurface are obtained by simulating the absorption peak wavelength and half-peak width of the target transmission spectrum of the nanoholes or nanopillar arrays.

6. The spectrometer system according to claim 5, characterized in that The metasurface includes a substrate and a nanohole array or a nanopillar array arranged on the upper surface of the substrate; the material of the metasurface includes two parts, one part is the material of the nanoholes or nanopillars that generate plasmons, and the other part is the material of the substrate that plays a supporting and refractive index matching role. The parameters of the metasurface include the height, radius and period of different nanohole or nanopillar arrays.

7. The spectrometer system according to claim 1, characterized in that The size of the nanopore or nanopillar array is from tens of nanometers to several micrometers, and the period length of the nanopore or nanopillar array is from hundreds of nanometers to several micrometers; the material of the nanopore or nanopillar array is one of gold, silver, or aluminum.

8. The spectrometer system according to claim 1, wherein: The spectrometer system further comprises an incident slit, a collimating element and a polarizer, wherein the incident slit, the collimating element, the polarizer and the spectrometer chip are sequentially arranged along the optical path propagation direction of the light source to be measured; and / or The spectrometer system also includes a data processing unit connected to the camera; the camera is used to detect the light to be measured, and the detection results of different pixel units of the camera are input into the data processing unit of the spectrometer system; the data processing unit is used to calculate and obtain spectral information.

9. A method for manufacturing a spectrometer system, characterized in that: include: Step S1: Determine the height, material, diameter, and period of the nanohole or nanopillar array and the material of the substrate through software simulation based on the absorption peak wavelength and half-maximum width of the target transmission spectrum of different nanohole or nanopillar arrays of the metasurface; The metasurface comprises a substrate and a plurality of nanohole or nanopillar arrays disposed on the upper surface of the substrate. Surface plasmons generated by different types of nanohole or nanopillar arrays selectively absorb incident light of different wavelengths. The metasurface material comprises two parts: one part is the material of the nanoholes or nanopillars that generate localized surface plasmons, and the other part is the material of the substrate that serves as a support and refractive index matching function. The parameters of the metasurface include the height, radius, and period of the different nanohole or nanopillar arrays. Step S2: preparing a plurality of nanopore or nanopillar arrays that meet the parameters of step S1 on a substrate to obtain a metasurface; Step S3: A camera is integrated on the back side of the substrate to obtain a spectrometer chip; the camera is used to detect the transmitted light intensity of different nanoholes or nanopillar arrays on the metasurface.

10. The method for manufacturing a spectrometer system according to claim 9, wherein: Also includes: Step S4: Arranging the incident slit, the collimating element, the polarizer, and the spectrometer chip in sequence and packaging them to obtain a spectrometer system; Step S5: connecting a data processing unit to the camera of the spectrometer system; the data processing unit is used to calculate the light intensity distribution of different wavelengths of the light to be measured, and finally obtain the spectral information of the light to be measured.

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