Nanostructure scatterer
By designing nanostructured scatterers, the problem of weak signals in online image quality detection is solved, the imaging signal-to-noise ratio and detection accuracy are improved, and the industrialization and integration of microscopic imaging systems are promoted.
Patent Information
- Application Number
- CN202511129338.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-13
- Publication Date
- 2025-09-12
AI Technical Summary
In online image quality detection, the detection signal of the microscopic imaging system is weak, resulting in low accuracy and low repeatability of the detection results, making it difficult to achieve high-throughput detection, and limiting the industrialization and integration of bright-field microscopic imaging systems.
A nanostructured scatterer is designed with a circumscribed circle diameter of 100nm-180nm and an operating wavelength in the ultraviolet and deep ultraviolet bands. The nanostructured scatterer has high scattering efficiency and is combined with a transparent glass substrate and a high-reflective film treatment to ensure that scattered light with a high signal-to-noise ratio is provided in the microscopic imaging system.
It improves the imaging signal-to-noise ratio of the microscopy imaging system, enhances the accuracy and repeatability of image quality detection, supports high-throughput detection, and promotes the industrialization and integration of bright-field microscopy imaging systems.
Smart Images
Figure CN120628565A_ABST
Abstract
Description
Technical Field
[0001] The invention belongs to the technical field of microscopic imaging, and in particular relates to a nanostructured scatterer. Background Art
[0002] In the field of image quality detection of microscopic imaging systems, online image quality detection faces the problem of weak detection signals, resulting in low accuracy and low repeatability of image quality detection results. Online integrated high-throughput detection is difficult, which seriously limits the industrialization and integration of high-performance bright-field microscopic imaging systems.
[0003] In the image quality testing scheme of microscopic imaging systems, the measurement and analysis of the system's point spread function can provide intuitive and highly accurate evaluation results. The analysis of the system's point spread function is based on the imaging and measurement of a nearly ideal point radiation source on the system's object surface.
[0004] In traditional brightfield microscopy systems, the signal-to-noise ratio (SNR) of these nanodot structures is low. This is primarily due to the strong light reflected from the nanostructure's substrate, which acts as an interference signal and reduces the SNR of the scattered light imaged from the nanostructure. Therefore, providing nanostructures with a high SNR is crucial for online point spread function (PSF) measurements in brightfield microscopy systems. Summary of the Invention
[0005] In order to overcome the deficiencies of the prior art, an object of the present invention is to provide a nanostructured scatterer that can solve the above-mentioned problems.
[0006] A nanostructured scatterer includes a scattering body, wherein the circumscribed circle diameter of the scattering body ranges from 100 nm to 180 nm, the operating wavelength is in the ultraviolet and / or deep ultraviolet band, and the scattered light has a NA greater than 0.9 in the yz plane and a NA greater than 0.8 in the xz plane under X-polarized pupil illumination.
[0007] Furthermore, the nanostructured scatterer further includes a transparent substrate arranged on the bottom surface of the scattering body.
[0008] Furthermore, the cross section of the scattering body of the nanostructured scatterer is circular, rectangular, star-shaped or regular polygonal.
[0009] Furthermore, the scattering body is chromium.
[0010] Furthermore, the transparent substrate is a glass substrate.
[0011] Compared with the prior art, the beneficial effect of the present invention is that the nanostructured scatterer of the present application satisfies the requirements of a stronger scattering effect and a more ideal uniform spherical wavefront at the working wavelength of the microscopic imaging system, and is easy to promote and apply in the field of image quality detection of microscopic imaging. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] Figure 1 is a schematic diagram of the nanostructured scatterer of the present invention; Figure 2 An example diagram of the layout of a nanostructured scatterer with a circular cross section; Figure 3 An example diagram of the layout of a nanostructured scatterer with a rectangular cross section; Figure 4 is the scattering far-field three-dimensional distribution diagram of the nanostructure scatterer; Figure 5 This is the two-dimensional distribution diagram of the scattering far field of the nanostructured scatterer. DETAILED DESCRIPTION
[0013] To make the objectives, technical solutions, and advantages of the embodiments of the present invention more clear, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts shall fall within the scope of protection of the present invention.
[0014] A nanostructured scatterer, see Figure 1 The nanostructured scatterer (nano-scatter) includes a scattering body 1, and the diameter of the circumscribed circle of the scattering body 1 ranges from 100 nm to 180 nm.
[0015] Nanostructured scatterers are used for image quality detection in microscopic imaging systems. Their operating wavelengths are in the ultraviolet and / or deep ultraviolet bands. Figure 4 and Figure 5 The scattering far-field three-dimensional and two-dimensional distribution of the nanostructured scatterer has a scattered light greater than NA0.9 in the yz plane and a scattered light greater than NA0.8 in the xz plane under X-polarized pupil illumination.
[0016] The circumscribed circle diameter of the scattering body 1 is 100nm, 110nm, 120nm, 130nm, 140nm, 150nm, 160nm, 170nm, 180nm, 190nm, etc. Under the irradiation of the ultraviolet / deep ultraviolet microscopic imaging working band, 150nm and 160nm are more ideal.
[0017] The cross section of the scattering body 1 of the nanostructured scatterer is circular ( Figure 2 ),rectangle( Figure 3 ), star-shaped or regular polygonal, preferably circular, so as to form a disc-shaped structure that is easy to process.
[0018] As for the material, the scattering body 1 is chromium.
[0019] For further information, see Figure 1 The nanostructured scatterer further includes a transparent substrate 2 disposed on the bottom surface of the scattering body 1. The transparent substrate 2 is a glass substrate. During use, the outer surface of the transparent substrate 2 away from the scattering body 1 is coated with a highly reflective coating to improve the reflectivity of the non-imaging area. The top surface of the transparent substrate 2 adjacent to the scattering body 1 is not coated.
[0020] The scattering body 1 can be used individually or in combination, and the overall arrangement is a rectangular array, a circular array or a random arrangement, and the distance between the multiple scattering bodies 1 meets the near-field no-coupling condition.
[0021] This nanostructured scatterer has been used in image quality detection of microscopic imaging systems and can be expected to be used in scenarios such as semiconductor bright field quantity detection and overlay alignment quantity detection.
[0022] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the aforementioned embodiments, or make equivalent replacements for some of the technical features therein. However, these modifications or replacements do not deviate the essence of the corresponding technical solutions from the spirit and scope of the technical solutions of the various embodiments of the present invention.
Claims
1. A nanostructured scatterer, characterized in that: The nanostructured scatterer comprises a scattering body (1), wherein the circumscribed circle diameter of the scattering body (1) ranges from 100 nm to 180 nm, the operating wavelength is in the ultraviolet and / or deep ultraviolet band, and the scattering light has a scattering light greater than NA0.9 in the yz plane and a scattering light greater than NA0.8 in the xz plane under illumination of an X-polarized pupil.
2. The nanostructured scatterer according to claim 1, wherein: The nanostructured scatterer further comprises a transparent substrate (2) arranged on the bottom surface of the scattering body (1).
3. The nanostructured scatterer according to claim 1, wherein: The cross section of the scattering body (1) of the nanostructured scatterer is circular, rectangular, star-shaped or regular polygonal.
4. The nanostructured scatterer according to claim 1, wherein: The scattering body (1) is chromium.
5. The nanostructured scatterer according to claim 2, wherein: The transparent substrate (2) is a glass substrate.