Surface spot detection mechanism for silicon carbide focusing ring

Abstract

The invention provides a silicon carbide focusing ring surface spot detection mechanism which comprises a supporting table and a silicon carbide focusing ring, four supporting plates are fixedly connected to the side wall of the top of the supporting table, the silicon carbide focusing ring surface spot detection mechanism further comprises a clamping and fixing structure, and the clamping and fixing structure is arranged on the supporting plates. When the movable frame is far away from the supporting plate, the piston is driven by the sliding rod to move in the sliding sleeve, and through resistance between the piston and the sliding sleeve, it is conveniently and well avoided that when a compressed spring is unfolded fiercely and drives a clamping plate to conduct clamping, the clamping plate violently collides with the side wall of the silicon carbide focusing ring, and the clamping effect is improved. And the clamping plates are pushed to be opened through the pushing frame, so that the clamping plates cannot shield the detection of the laser scanning head, and the laser scanning head can carry out comprehensive scanning detection on surface spots of the silicon carbide focusing ring.

Description

Technical Field

[0001] The present invention relates to the field of silicon carbide focusing rings, and particularly relates to a surface spot detection mechanism for silicon carbide focusing rings. Background Art

[0002] The silicon carbide focus ring is a key component in plasma etching equipment, primarily used to improve etching uniformity around the wafer edge or perimeter, ensuring consistent and accurate etching. The focus ring is placed outside the wafer, directly contacting it. Voltage is applied to focus the plasma, allowing it to precisely act on the wafer surface. During the production process, spots sometimes form on the surface of the silicon carbide focus ring. These spots can affect its performance and effectiveness, so inspection is often required.

[0003] When performing surface spot detection on a SiC focus ring, in order to ensure the detection effect, it is usually necessary to conduct a comprehensive scanning inspection of the sidewalls of the SiC focus ring surface. However, when the SiC focus ring is fixed during the detection process, whether it is fixed by vacuum adsorption or clamping, it is bound to form a certain degree of obstruction on the sidewalls of the SiC focus ring, making it impossible to perform a good inspection on the obscured sidewalls, thereby affecting the overall inspection effect of the SiC focus ring. Therefore, how to better conduct a comprehensive scanning inspection of the surface spots of the SiC focus ring is an important issue that needs to be solved in the design of the SiC focus ring surface spot detection mechanism. Summary of the Invention

[0004] In order to solve the problem that when a silicon carbide focus ring is fixed, part of the side wall is blocked, thereby affecting the overall detection effect, the present invention provides a surface spot detection mechanism for a silicon carbide focus ring.

[0005] The present invention solves the above technical problems through the following technical solutions: The present invention provides a surface spot detection mechanism for a silicon carbide focus ring, comprising a support platform and a silicon carbide focus ring, wherein four support plates are fixedly connected to the top side wall of the support platform, and further comprising: A clamping and fixing structure, wherein the clamping and fixing structure is arranged on the support plate; A buffer structure, the buffer structure being arranged between the support plate and the clamping and fixing structure; A rotating structure, wherein the rotating structure is arranged on a supporting platform; A laser scanning detection structure is provided on a rotating structure, and the rotating structure rotates to synchronously push the clamping and fixing structure to open and close.

[0006] Preferably, the side walls of the support platform are arranged to be hollow structures, and heat dissipation grooves are provided at equal distances on the side walls on both sides of the support platform, and dustproof nets are fixedly connected to the heat dissipation grooves.

[0007] In this technical solution, the heat dissipation slots dissipate heat from the interior of the support platform, and the dustproof net can intercept dust to prevent dust from entering the support platform through the heat dissipation slots.

[0008] Preferably, the four support plates are evenly distributed in four directions on the top of the support platform, sliding grooves are provided on the side walls of the four support plates, sliding limiting grooves are provided on the side walls on both sides of the sliding grooves, and support rods are fixedly connected to the side walls of the four support plates.

[0009] In this technical solution, a pair of support rods supports the rotating rod.

[0010] Preferably, the clamping and fixing structure includes a splint, a fixing frame 1, a fixing frame 2, a fixing pad, a moving rod, a rotating tooth groove and a limiting block 1, the fixing frame 1 and the fixing frame 2 are cross-arranged, the side walls of one end of the fixing frame 1 and the fixing frame 2 are fixedly connected to the limiting block 1, the fixing frame 1 and the fixing frame 2 are slidably connected in the sliding groove, the limiting block 1 is slidably connected in the sliding limiting groove 1, the other ends of the fixing frame 1 and the fixing frame 2 are fixedly connected to the two splints, the positions of the two splints correspond to each other up and down, and the side walls on the opposite sides of the two splints are fixedly connected with fixing pads, the side walls on the opposite sides of the two moving rods are fixedly connected to the side walls on the opposite sides of the two moving rods, and rotating tooth grooves are provided on the side walls on the opposite sides of the two moving rods.

[0011] In this technical solution, limiting block 1 can prevent fixing frame 1 and fixing frame 2 from escaping from the sliding groove. Fixing frame 1 moves downward and fixing frame 2 moves upward, driving the two clamps to open. Similarly, fixing frame 1 moves upward and fixing frame 2 moves downward, driving the two clamps to close for clamping.

[0012] Preferably, the clamping and fixing structure includes a rotating rod and a rotating gear, the rotating rod is rotatably connected between the support rod 1 and the inner side wall of the sliding groove, the side wall of the rotating rod is fixedly connected with a rotating gear, the rotating gear is located between the two moving rods, and the rotating gear is engaged with the rotating tooth groove.

[0013] In this technical solution, the second fixed frame rises and drives the moving rod to rise, the moving rod rises and drives the rotating tooth groove, the rotating tooth groove moves along the rotating gear, drives the rotating gear to rotate, the rotating gear drives the moving rod on the other side to move downward, and the moving rod drives the first fixed frame to move downward.

[0014] Preferably, the clamping and fixing structure includes a movable frame, a telescopic rod, a spring 1, a pushing plate, a connecting block, a fixed protrusion and a rotating roller, one end of the telescopic rod and the spring 1 is fixedly connected to the side wall of the support plate, the other end of the telescopic rod and the spring 1 is fixedly connected to the movable frame, the top of the movable frame is rotatably connected to the pushing plate, the other end of the pushing plate is rotatably connected to the connecting block, the connecting block is fixedly connected to the bottom side wall of the fixed frame 2, an arc-shaped fixed protrusion is fixedly connected to the side wall of the other side of the movable frame, and a rotating roller is rotatably connected to the side wall of the fixed protrusion.

[0015] In this technical solution, when the pushing frame passes through the rotating roller, the pushing frame will push the rotating roller to move. While the rotating roller moves toward the side close to the support, it will roll along the side wall of the pushing frame. The rolling rotating roller can reduce the resistance when the pushing frame passes. The movement of the rotating roller drives the fixed protrusion to move, and the fixed protrusion drives the moving frame to move. The moving frame moves toward the support plate, the telescopic rod and spring 1 are compressed, the moving frame drives the pushing plate to move, and the pushing plate pushes the fixed frame 2 to rise.

[0016] Preferably, the buffer structure includes a sliding rod, a sliding sleeve, a piston, a vent and a second sliding limiting groove. The sliding rod is fixedly connected to the side wall of the movable frame, the other end of the sliding rod is fixedly connected to the piston, the sliding sleeve is fixedly connected to the inner wall of the sliding groove, the piston and the sliding rod are slidingly connected inside the sliding sleeve, the side wall of the sliding sleeve near the end is circular and expands outward, the expanded side wall of the sliding sleeve is provided with a second sliding limiting groove, and a vent is provided on the side wall where the sliding sleeve and the sliding groove are connected.

[0017] In this technical solution, when the movable frame moves away from the support plate, it drives the sliding rod to move, and the sliding rod drives the piston to move in the sliding sleeve. Through the resistance between the piston and the sliding sleeve, the expansion of the compression spring 1 is buffered, slowing down the expansion speed of the compressed spring 1.

[0018] Preferably, the buffer structure includes a clamping frame, a second spring, a second limiting block and a rubber pad. The second spring is fixedly connected to the inner side wall of the expanded part of the sliding sleeve at equal distances. The other end of the second spring is fixedly connected to two clamping frames. The side wall of the clamping frame is fixedly connected with a second limiting block. The second limiting block is slidably connected in the second sliding limiting groove. The side walls on opposite sides of the clamping frame are fixedly connected with rubber pads.

[0019] In this technical solution, when the piston passes through the clamping frame, it pushes the clamping frame to move inward, and spring 2 is compressed. The elastic force generated by the compression of spring 2 acts in the opposite direction on the clamping frame, so that the rubber pad on the clamping frame fits tightly against the side wall of the piston, thereby further increasing the resistance when the piston slides, thereby further buffering the expansion of the compressed spring 1, further slowing down the expansion speed of the compressed spring 1, and better avoiding the sudden expansion of the compressed spring 1, causing the splint to violently impact the side wall of the silicon carbide focusing ring.

[0020] Preferably, the rotating structure includes a rotating motor 2, a rotating column, a connecting frame and a pushing frame. The rotating motor 2 is fixedly connected to the inner side wall of the support platform. The rotating end of the rotating motor 2 is fixedly connected to the rotating column. The rotating column is rotatably connected to the top side wall of the support platform. The side wall of the rotating column is fixedly connected to the connecting frame. The side wall of the connecting frame is fixedly connected to the pushing frame. The two ends of the pushing frame are arranged into an arc structure. The position height of the connecting frame and the pushing frame corresponds to the position height of the rotating roller.

[0021] In this technical solution, the rotation of the second rotating motor drives the rotating column to rotate, the rotating column drives the connecting frame and the second supporting rod to rotate synchronously, and the rotation of the connecting frame drives the pushing frame to rotate.

[0022] Preferably, the laser scanning detection structure includes a support frame 1, a support frame 2, a laser scanning head, a support rod 2, a rotating motor 1, a threaded rod and a movable plate, the support rod 2 is fixedly connected to the side wall of the rotating column, the support rod 2 is located directly above the connecting frame, a square through groove is opened on the side wall of the support rod 2, the support frame 2 is fixedly connected to the side wall of the support rod 2, the rotating motor 1 is fixedly connected in the square through groove on the support rod 2, the rotating end of the rotating motor 1 is fixedly connected to the threaded rod, and the other end of the threaded rod is rotatably connected in the square through groove on the support rod 2, the threaded rod is threadedly connected to the movable plate, the support frame 1 is fixedly connected to the top side wall of the movable plate, four laser scanning heads are fixedly connected to the inner side walls of the support frame 1 and the support frame 2, and the four laser scanning heads are facing the four side walls of the silicon carbide focusing ring.

[0023] In this technical solution, the rotating motor drives the threaded rod to rotate, the threaded rod drives the movable plate to move, and the movable plate drives the support frame 1 to move, so that the support frame 1 and the support frame 2 are docked together, and the four laser scanning heads face the four side walls of the silicon carbide focusing ring.

[0024] On the basis of conforming to the common sense in this field, the above-mentioned preferred conditions can be arbitrarily combined to obtain the preferred embodiments of the present invention.

[0025] The positive progress effect of the present invention is: 1. When the movable frame of the present application moves away from the support plate, the piston is driven to move in the sliding sleeve by the sliding rod. The expansion of the compression spring 1 is buffered by the resistance between the piston and the sliding sleeve, and the speed of expansion of the compressed spring 1 is slowed down. When the piston passes the clamping frame, it pushes the clamping frame to move inward, and the spring 2 is compressed. The elastic force generated by the compression of the spring 2 acts in the opposite direction on the clamping frame, so that the rubber pad on the clamping frame fits tightly against the side wall of the piston, thereby further increasing the resistance when the piston slides, thereby further buffering the expansion of the compression spring 1, and further slowing down the speed of expansion of the compressed spring 1, so as to better avoid the sudden expansion of the compressed spring 1. When the splint is driven for clamping, the splint violently collides with the side wall of the silicon carbide focusing ring, causing damage to the silicon carbide focusing ring.

[0026] 2. By rotating motor 1 in the opposite direction to drive support frame 1 to move, support frame 1 and support frame 2 are docked together, so that the four laser scanning heads face the four side walls of the silicon carbide focusing ring, which facilitates the synchronous scanning and detection of the four side walls of the silicon carbide focusing ring and improves the detection efficiency of spots on the surface of the silicon carbide focusing ring.

[0027] 3. By rotating the second motor, the push frame and the laser scanning head are driven to rotate synchronously. When the push frame passes a rotating roller at a certain location, the push frame will push the rotating roller to move. The movement of the rotating roller drives the fixed protrusion to move. The fixed protrusion drives the moving frame to move. The movement of the moving frame synchronously drives the clamping plate at that location to open, so that the clamping plate, fixed frame 1 and fixed frame 2 no longer block the passage of support frame 1 and support frame 2, so that the four laser scanning heads can better pass through the side wall of the silicon carbide focusing ring between the clamping plates at that location for scanning and detection, so that the clamping plate will not block the detection of the laser scanning head, so that the laser scanning head can better perform a comprehensive scanning and detection of the surface spots of the silicon carbide focusing ring.

[0028] 4. When the push frame of the present application passes through a certain rotating roller, it drives the clamping plate above the place to open, so that the four laser scanning heads can better pass through the side wall of the silicon carbide focusing ring between the clamping plates at this place for scanning and detection, while the clamping plates at the remaining three places still firmly clamp the side wall of the silicon carbide focusing ring, so that the silicon carbide focusing ring can always maintain a stable clamping during the comprehensive scanning and detection of the side wall of the silicon carbide focusing ring. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 It is a schematic diagram of the overall three-dimensional structure of the present invention.

[0030] Figure 2 It is a schematic diagram of the overall internal structure of the present invention.

[0031] Figure 3 It is a schematic diagram of the internal structure of the present invention from the side.

[0032] Figure 4 It is a schematic diagram of the internal structure of the present invention from a top view.

[0033] Figure 5 This is a schematic diagram of the internal structure of the bottom of the silicon carbide focusing ring of the present invention from a top view.

[0034] Figure 6 It is a schematic diagram of the three-dimensional structure of the clamping and fixing structure of the present invention.

[0035] Figure 7 It is a schematic diagram of the three-dimensional structure of the laser scanning detection structure of the present invention.

[0036] Figure 8 It is a schematic diagram of the three-dimensional structure of the connecting frame and the pushing frame of the present invention.

[0037] Figure 9 For the present invention Figure 3 Schematic diagram of the local enlarged structure at point A.

[0038] Figure 10 For the present invention Figure 5 Schematic diagram of the local enlarged structure at point B.

[0039] Description of Reference Numerals 1. Support platform; 2. Support plate; 3. Sliding groove; 4. Silicon carbide focusing ring; 5. Support rod 1; 6. Clamping and fixing structure; 601. Clamping plate; 602. Fixing frame 1; 603. Fixing frame 2; 604. Fixing pad; 605. Moving rod; 606. Rotating tooth groove; 607. Limiting block 1; 611. Moving frame; 612. Telescopic rod; 613. Spring 1; 614. Pushing plate; 615. Connecting block; 616. Fixing protrusion; 617. Rotating roller; 621. Rotating rod; 622. Rotating gear; 7. Laser scanning detection structure; 701. Support frame 1; 702. Support frame 2; 703. Laser scanning head; 704. Support rod 2; 705. Rotating motor 1; 706. Threaded rod; 707. Moving plate; 8. Heat sink; 8. Dustproof net; 9. Rotating structure; 1001. Rotating motor 2; 1002. Rotating column; 1003. Connecting frame; 1004. Pushing frame; 10. Sliding limiting groove 1; 12. Buffer structure; 1201. Sliding rod; 1202. Sliding sleeve; 1203. Piston; 1204. Vent hole; 1205. Second sliding limiting groove; 1211. Clamping frame; 1212. Second spring; 1213. Second limiting block; 1214. Rubber pad. DETAILED DESCRIPTION

[0040] The present invention is further described below by way of examples, but the present invention is not limited to the scope of the examples.

[0041] like Figure 1-10 As shown, the silicon carbide focus ring surface spot detection mechanism includes a support platform 1 and a silicon carbide focus ring 4. Four support plates 2 are fixedly connected to the top side wall of the support platform 1, and further includes: A clamping and fixing structure 6, wherein the clamping and fixing structure 6 is provided on the support plate 2; a buffer structure 12, the buffer structure 12 being disposed between the support plate 2 and the clamping and fixing structure 6; A rotating structure 10, wherein the rotating structure 10 is provided on the supporting platform 1; The laser scanning detection structure 7 is provided on the rotating structure 10 , and the rotating structure 10 rotates to synchronously push the clamping and fixing structure 6 to open and close.

[0042] By rotating the motor 2 1001, the pushing frame 1004 is driven to rotate. When the pushing frame 1004 passes the rotating roller 617, the pushing frame 1004 will push the movable frame 611 to move. The movement of the movable frame 611 drives the clamping plate 601 at that location to open. When the pushing frame 1004 leaves the rotating roller 617, the movable frame 611 is no longer pushed, and the clamping plate 601 closes to re-clamp and fix the side wall of the silicon carbide focusing ring 4 at that location.

[0043] The side walls of the support platform 1 are arranged to be hollow. Heat dissipation slots 8 are provided on the side walls on both sides of the support platform 1 at equal distances. Dustproof nets 9 are fixedly connected to the heat dissipation slots 8 .

[0044] The heat dissipation slots 8 dissipate heat from the interior of the support platform 1 , and the dustproof net 9 can intercept dust and prevent dust from entering the support platform 1 through the heat dissipation slots 8 .

[0045] The four support plates 2 are evenly distributed in four directions on the top of the support platform 1. Sliding grooves 3 are opened on the side walls of the four support plates 2. Sliding limiting grooves 11 are opened on the side walls on both sides of the sliding grooves 3. Support rods 5 are fixedly connected to the side walls of the four support plates 2.

[0046] The support rod 15 supports the rotating rod 621.

[0047] The clamping and fixing structure 6 includes a clamping plate 601, a fixing frame 1 602, a fixing frame 2 603, a fixing pad 604, a moving rod 605, a rotating tooth groove 606 and a limiting block 1 607. The fixing frame 1 602 and the fixing frame 2 603 are arranged crosswise. The limiting block 1 607 is fixedly connected to the side wall of one end of the fixing frame 1 602 and the fixing frame 2 603. The fixing frame 1 602 and the fixing frame 2 603 are slidably connected in the sliding groove 3. The limiting block 1 607 is slidably connected In the sliding limiting groove 11, the other ends of the fixing frame 1 602 and the fixing frame 2 603 are fixedly connected to two splints 601, and the positions of the two splints 601 correspond to each other up and down. Fixed pads 604 are fixedly connected to the side walls on the opposite sides of the two splints 601, and two moving rods 605 are fixedly connected to the side walls on the opposite sides of the fixing frame 1 602 and the fixing frame 2 603. Rotating tooth grooves 606 are provided on the side walls on the opposite sides of the two moving rods 605.

[0048] Limiting block 1 607 can prevent fixing frame 1 602 and fixing frame 2 603 from disengaging from sliding slot 3. Fixing frame 1 602 moves downward and fixing frame 2 603 moves upward, driving the two clamping plates 601 to open. Similarly, fixing frame 1 602 moves upward and fixing frame 2 603 moves downward, driving the two clamping plates 601 to close for clamping.

[0049] The clamping and fixing structure 6 includes a rotating rod 621 and a rotating gear 622. The rotating rod 621 is rotatably connected between the support rod 1 5 and the inner side wall of the sliding groove 3. A rotating gear 622 is fixedly connected to the side wall of the rotating rod 621. The rotating gear 622 is located between the two moving rods 605, and the rotating gear 622 is engaged with the rotating tooth groove 606.

[0050] The rising of the fixed frame 2 603 drives the moving rod 605 to rise, and the rising of the moving rod 605 drives the rotating tooth groove 606, and the rotating tooth groove 606 moves along the rotating gear 622, driving the rotating gear 622 to rotate. The rotating gear 622 drives the moving rod 605 on the other side to move downward, and the moving rod 605 drives the fixed frame 1 602 to move downward.

[0051] The clamping and fixing structure 6 includes a movable frame 611, a telescopic rod 612, a spring 1 613, a pushing plate 614, a connecting block 615, a fixed protrusion 616 and a rotating roller 617. One end of the telescopic rod 612 and the spring 1 613 are fixedly connected to the side wall of the support plate 2, and the other end of the telescopic rod 612 and the spring 1 613 is fixedly connected to the movable frame 611. The top of the movable frame 611 is rotatably connected to the pushing plate 614, and the other end of the pushing plate 614 is rotatably connected to the connecting block 615. The connecting block 615 is fixedly connected to the bottom side wall of the fixed frame 2 603. An arc-shaped fixed protrusion 616 is fixedly connected to the side wall of the other side of the movable frame 611, and a rotating roller 617 is rotatably connected to the side wall of the fixed protrusion 616.

[0052] When the pushing frame 1004 passes through the rotating roller 617, the pushing frame 1004 will push the rotating roller 617 to move. While the rotating roller 617 moves toward the side close to the support, it will roll along the side wall of the pushing frame 1004. The rolling rotating roller 617 can reduce the resistance when the pushing frame 1004 passes. The movement of the rotating roller 617 drives the fixed protrusion 616 to move, and the fixed protrusion 616 drives the moving frame 611 to move. The moving frame 611 moves toward the support plate 2, the telescopic rod 612 and the spring 1 613 are compressed, the moving frame 611 drives the pushing plate 614 to move, and the pushing plate 614 drives the fixed frame 2 603 to rise.

[0053] The buffer structure 12 includes a sliding rod 1201, a sliding sleeve 1202, a piston 1203, a vent 1204 and a sliding limiting groove 2 1205. The sliding rod 1201 is fixedly connected to the side wall of the movable frame 611, and the other end of the sliding rod 1201 is fixedly connected to the piston 1203. The sliding sleeve 1202 is fixedly connected to the inner wall of the sliding groove 3. The piston 1203 and the sliding rod 1201 are slidingly connected in the sliding sleeve 1202. The side wall of the sliding sleeve 1202 near the end is circular and expands outward. The expanded side wall of the sliding sleeve 1202 is provided with a sliding limiting groove 2 1205. The side wall where the sliding sleeve 1202 and the sliding groove 3 are connected is provided with a vent 1204.

[0054] When the movable frame 611 moves away from the support plate 2, it drives the sliding rod 1201 to move, and the sliding rod 1201 drives the piston 1203 to move in the sliding sleeve 1202. Through the resistance between the piston 1203 and the sliding sleeve 1202, the expansion of the compressed spring 1 613 is buffered, slowing down the expansion speed of the compressed spring 1 613.

[0055] The buffer structure 12 includes a clamping frame 1211, a second spring 1212, a second limiting block 1213 and a rubber pad 1214. The second spring 1212 is fixedly connected to the inner wall of the expanded part of the sliding sleeve 1202 at equal distances. The other end of the second spring 1212 is fixedly connected to two clamping frames 1211. The second limiting block 1213 is fixedly connected to the side wall of the clamping frame 1211. The second limiting block 1213 is slidably connected in the second sliding limiting groove 1205. The rubber pads 1214 are fixedly connected to the side walls on both sides of the opposite sides of the clamping frame 1211.

[0056] When the piston 1203 passes through the clamping frame 1211, it pushes the clamping frame 1211 to move inward, and the spring 2 1212 is compressed. The elastic force generated by the compression of the spring 2 1212 acts in the opposite direction on the clamping frame 1211, so that the rubber pad 1214 on the clamping frame 1211 fits tightly against the side wall of the piston 1203, thereby further increasing the resistance of the piston 1203 when sliding, thereby further buffering the expansion of the compressed spring 1 613, further slowing down the expansion speed of the compressed spring 1 613, and better avoiding the sudden expansion of the compressed spring 1 613, causing the splint 601 to violently collide with the side wall of the silicon carbide focusing ring 4.

[0057] The rotating structure 10 includes a rotating motor 1001, a rotating column 1002, a connecting frame 1003 and a pushing frame 1004. The rotating motor 1001 is fixedly connected to the inner wall of the support platform 1. The rotating end of the rotating motor 1001 is fixedly connected to the rotating column 1002. The rotating column 1002 is rotatably connected to the top side wall of the support platform 1. The connecting frame 1003 is fixedly connected to the side wall of the rotating column 1002. The pushing frame 1004 is fixedly connected to the side wall of the connecting frame 1003. The two ends of the pushing frame 1004 are arranged to be arc-shaped structures. The position heights of the connecting frame 1003 and the pushing frame 1004 correspond to the position heights of the rotating roller 617.

[0058] The second rotating motor 1001 rotates to drive the rotating column 1002 to rotate, the rotating column 1002 drives the connecting frame 1003 and the second supporting rod 704 to rotate synchronously, and the connecting frame 1003 rotates to drive the pushing frame 1004 to rotate.

[0059] The laser scanning detection structure 7 includes a support frame 1 701, a support frame 2 702, a laser scanning head 703, a support rod 2 704, a rotating motor 1 705, a threaded rod 706 and a movable plate 707. The support rod 2 704 is fixedly connected to the side wall of the rotating column 1002. The support rod 2 704 is located directly above the connecting frame 1003. A square through groove is provided on the side wall of the support rod 2 704. The support frame 2 702 is fixedly connected to the side wall of the support rod 2 704. The rotating motor 1 705 is fixedly connected to the support rod The rotating end of the rotating motor 1 705 is fixedly connected to the threaded rod 706 in the square through groove on the support rod 2 704, and the other end of the threaded rod 706 is rotatably connected to the square through groove on the support rod 2 704. The threaded rod 706 is threadedly connected to a movable plate 707, and the top side wall of the movable plate 707 is fixedly connected to the support frame 1 701, and the inner side walls of the support frame 1 701 and the support frame 2 702 are fixedly connected to four laser scanning heads 703, and the four laser scanning heads 703 are facing the four side walls of the silicon carbide focusing ring 4.

[0060] The rotating motor 705 rotates to drive the threaded rod 706 to rotate, the threaded rod 706 rotates to drive the movable plate 707 to move, and the movable plate 707 drives the support frame 1 701 to move, so that the support frame 1 701 and the support frame 2 702 are docked together, and the four laser scanning heads 703 face the four side walls of the silicon carbide focusing ring 4.

[0061] When the present invention is in use, the electrical components mentioned in the present application are all connected to an external power source and a control switch. The rotating motor 1 705 rotates to drive the threaded rod 706 to rotate. The threaded rod 706 rotates to drive the movable plate 707 to move. The movable plate 707 drives the support frame 1 701 to move, so that the support frame 1 701 and the support frame 2 702 are separated, and the silicon carbide focusing ring 4 is placed between the support frame 1 701 and the support frame 2 702. Push the movable frame 611, and the movable frame 611 moves toward the support plate 2. The telescopic rod 612 and the spring 1 613 are compressed. The movable frame 611 drives the push plate 614 to move. The push plate 614 drives the fixed frame 2 603 to rise. The fixed frame 2 603 drives the movable rod 605 to rise. The rising movable rod 605 drives the rotating tooth groove 606. The rotating tooth groove 606 moves along the rotating gear 622, driving the rotating gear 622 to rotate. The rotating gear 622 drives the movable rod 605 on the other side to move downward. The movable rod 605 drives the fixed frame 1 602 to move downward. The fixed frame 1 602 moves downward. The fixed frame 2 603 moves upward, driving the two clamping plates 601 to open. The silicon carbide focusing ring 4 is placed between the two clamping plates 601. Release the movable frame 611, and the compressed spring 1 613 expands to push the movable frame 611 away from the support plate 2. The movable frame 611 drives the fixed frame 2 603 downward via the push plate 614. The fixed frame 2 603 drives the fixed frame 1 602 downward via the rotating gear 622, so that the two clamping plates 601 are closed, and the fixed pad 604 presses against the side wall of the silicon carbide focus ring 4, clamping and fixing the silicon carbide focus ring 4. When the movable frame 611 moves away from the support plate 2, it drives the sliding rod 1201 to move. The sliding rod 1201 drives the piston 1203 to move in the sliding sleeve 1202. The resistance between the piston 1203 and the sliding sleeve 1202 cushions the expansion of the compressed spring 1 613, slowing down the expansion speed of the compressed spring 1 613. When the piston 1203 passes the abutment frame 1211, it pushes the abutment frame 1211 to move inward, and the spring 2 1212 is compressed. The elastic force generated by the compression of the spring 2 1212 acts in the opposite direction on the abutment frame 1211, so that the rubber pad 1214 on the abutment frame 1211 is tightly attached to the side wall of the piston 1203, thereby further increasing the resistance of the piston 1203 when sliding, thereby further buffering the expansion of the compressed spring 1 613, further slowing down the expansion speed of the compressed spring 1 613, and effectively preventing the compressed spring 1 613 from suddenly expanding, causing the clamping plate 601 to violently collide with the side wall of the silicon carbide focusing ring 4, causing damage to the silicon carbide focusing ring 4; After the silicon carbide focusing ring 4 is clamped and fixed, the rotating motor 1 705 rotates in the opposite direction to drive the support frame 1 701 to move and dock with the support frame 2 702. The four laser scanning heads 703 face the four side walls of the silicon carbide focusing ring 4. The rotating motor 2 1001 rotates to drive the rotating column 1002 to rotate. The rotating column 1002 drives the connecting frame 1003 and the supporting rod 2 704 to rotate synchronously. The connecting frame 1003 rotates to drive the pushing frame 1004 to rotate. The supporting rod 2 704 rotates to drive the supporting frame 1 701 and the supporting frame 2 702 to rotate. The supporting frame 2 702 drives the four laser scanning heads 703 to rotate, that is, the pushing frame 1004 and the laser scanning heads 703 rotate synchronously. When the pushing frame 1004 passes by a rotating roller 617 at a certain location, the pushing frame 1004 will push the rotating roller 617 to move. While the rotating roller 617 moves toward the side close to the support, it will roll along the side wall of the pushing frame 1004. The rolling rotating roller 617 can reduce the resistance of the pushing frame 1004 when passing by. The movement of the rotating roller 617 drives the fixed protrusion 616 to move, and the fixed protrusion 616 drives the moving frame 611 to move. The movement of the moving frame 611 synchronously drives the clamping plate 601 at that location to open, so that the clamping plate 601, the fixed frame 1 602 and the fixed frame 2 603 no longer block the passage of the support frame 1 701 and the support frame 2 702, so that the four laser scanning heads 703 can better pass through the side wall of the silicon carbide focus ring 4 between the clamping plates 601 at that location for scanning and detection, while the clamping plates 601 at the other three locations still firmly clamp the side wall of the silicon carbide focus ring 4, thereby better maintaining the stability of the silicon carbide focus ring 4; After the four laser scanning heads 703 leave the clamps, the pushing frame 1004 also leaves the rotating roller 617 synchronously, the movable frame 611 is no longer pushed, and the clamp 601 closes to re-clamp and fix the side wall of the silicon carbide focusing ring 4 at that location, so that the clamp 601 will not block the detection of the laser scanning head 703, so that the laser scanning head 703 can better perform a comprehensive scanning and detection of the surface spots of the silicon carbide focusing ring 4.

[0062] The present invention is not limited to the above-described embodiments. Any changes in shape or structure fall within the scope of protection of the present invention. The scope of protection of the present invention is defined by the appended claims. Those skilled in the art may make various changes or modifications to these embodiments without departing from the principles and essence of the present invention. Such changes and modifications shall fall within the scope of protection of the present invention.

Claims

1. A silicon carbide focusing ring surface spot detection mechanism, comprising a support platform (1) and a silicon carbide focusing ring (4), wherein four support plates (2) are fixedly connected to the top side wall of the support platform (1), characterized in that: Also includes: A clamping and fixing structure (6), wherein the clamping and fixing structure (6) is arranged on the support plate (2); a buffer structure (12), the buffer structure (12) being arranged between the support plate (2) and the clamping and fixing structure (6); A rotating structure (10), wherein the rotating structure (10) is arranged on the support platform (1); A laser scanning detection structure (7) is provided on a rotating structure (10), and the rotating structure (10) rotates to synchronously push the clamping and fixing structure (6) to open and close.

2. The silicon carbide focus ring surface spot detection mechanism according to claim 1, wherein: The side walls of the support platform (1) are arranged to have a hollow structure. Heat dissipation grooves (8) are provided at equal distances on the side walls on both sides of the support platform (1). Dustproof nets (9) are fixedly connected to the heat dissipation grooves (8).

3. The silicon carbide focus ring surface spot detection mechanism according to claim 1, wherein: The four support plates (2) are evenly distributed in four directions on the top of the support platform (1); sliding grooves (3) are provided on the side walls of the four support plates (2); sliding limiting grooves (11) are provided on the side walls on both sides of the sliding grooves (3); and support rods (5) are fixedly connected to the side walls of the four support plates (2).

4. The silicon carbide focus ring surface spot detection mechanism according to claim 1, wherein: The clamping and fixing structure (6) includes a clamping plate (601), a fixing frame 1 (602), a fixing frame 2 (603), a fixing pad (604), a moving rod (605), a rotating tooth groove (606) and a limiting block 1 (607). The fixing frame 1 (602) and the fixing frame 2 (603) are arranged crosswise. The limiting block 1 (607) is fixedly connected to the side wall of one end of the fixing frame 1 (602) and the fixing frame 2 (603). The fixing frame 1 (602) and the fixing frame 2 (603) are slidably connected in the sliding groove (3). The limiting block 1 (607) ) are slidably connected in the sliding limiting groove 1 (11), the other ends of the fixing frame 1 (602) and the fixing frame 2 (603) are fixedly connected to two clamps (601), the positions of the two clamps (601) correspond to each other up and down, and the side walls on the two opposite sides of the two clamps (601) are fixedly connected with fixed pads (604), the side walls on the two opposite sides of the fixing frame 1 (602) and the fixing frame 2 (603) are fixedly connected with two moving rods (605), and the side walls on the two opposite sides of the two moving rods (605) are provided with rotating tooth grooves (606).

5. The silicon carbide focus ring surface spot detection mechanism according to claim 4, wherein: The clamping and fixing structure (6) includes a rotating rod (621) and a rotating gear (622). The rotating rod (621) is rotatably connected between the support rod (5) and the inner side wall of the sliding groove (3). The rotating gear (622) is fixedly connected to the side wall of the rotating rod (621). The rotating gear (622) is located between the two moving rods (605). The rotating gear (622) and the rotating tooth groove (606) are meshed with each other.

6. The silicon carbide focus ring surface spot detection mechanism according to claim 1, wherein: The clamping and fixing structure (6) comprises a movable frame (611), a telescopic rod (612), a spring (613), a pushing plate (614), a connecting block (615), a fixed protrusion (616) and a rotating roller (617), wherein one end of the telescopic rod (612) and the spring (613) are fixedly connected to the side wall of the support plate (2), and the other end of the telescopic rod (612) and the spring (613) are fixedly connected to the movable frame (611), the top of the movable frame (611) is rotatably connected to the pushing plate (614), the other end of the pushing plate (614) is rotatably connected to the connecting block (615), the connecting block (615) is fixedly connected to the bottom side wall of the fixed frame (603), the side wall on the other side of the movable frame (611) is fixedly connected with an arc-shaped fixed protrusion (616), and the side wall of the fixed protrusion (616) is rotatably connected with a rotating roller (617).

7. The silicon carbide focus ring surface spot detection mechanism according to claim 1, wherein: The buffer structure (12) comprises a sliding rod (1201), a sliding sleeve (1202), a piston (1203), a vent (1204) and a second sliding limiting groove (1205); the sliding rod (1201) is fixedly connected to the side wall of the movable frame (611); the other end of the sliding rod (1201) is fixedly connected to the piston (1203); the sliding sleeve (1202) is fixedly connected to the inner wall of the sliding groove (3); the piston (1203) and the sliding rod (1201) are slidably connected in the sliding sleeve (1202); the side wall of the sliding sleeve (1202) near the end is circular and expands outward; the second sliding limiting groove (1205) is provided in the expanded side wall of the sliding sleeve (1202); and the vent (1204) is provided on the side wall where the sliding sleeve (1202) and the sliding groove (3) are connected.

8. The silicon carbide focus ring surface spot detection mechanism according to claim 7, wherein: The buffer structure (12) comprises a clamping frame (1211), a second spring (1212), a second limiting block (1213) and a rubber pad (1214), wherein the second spring (1212) is fixedly connected to the inner side wall of the expanded portion of the sliding sleeve (1202) at equal distances, and the other end of the second spring (1212) is fixedly connected to two clamping frames (1211), and the second limiting block (1213) is fixedly connected to the side wall of the clamping frame (1211), and the second limiting block (1213) is slidably connected in the second sliding limiting groove (1205), and the rubber pads (1214) are fixedly connected to the side walls on opposite sides of the clamping frame (1211).

9. The silicon carbide focus ring surface spot detection mechanism according to claim 1, wherein: The rotating structure (10) comprises a second rotating motor (1001), a rotating column (1002), a connecting frame (1003) and a pushing frame (1004), wherein the second rotating motor (1001) is fixedly connected to the inner side wall of the support platform (1), the rotating end of the second rotating motor (1001) is fixedly connected to the rotating column (1002), the rotating column (1002) is rotatably connected to the top side wall of the support platform (1), the connecting frame (1003) is fixedly connected to the side wall of the rotating column (1002), the pushing frame (1004) is fixedly connected to the side wall of the connecting frame (1003), the two ends of the pushing frame (1004) are arranged to form an arc-shaped structure, and the position height of the connecting frame (1003) and the pushing frame (1004) corresponds to the position height of the rotating roller (617).

10. The silicon carbide focus ring surface spot detection mechanism according to claim 1, wherein: The laser scanning detection structure (7) includes a support frame 1 (701), a support frame 2 (702), a laser scanning head (703), a support rod 2 (704), a rotating motor 1 (705), a threaded rod (706) and a movable plate (707), wherein the support rod 2 (704) is fixedly connected to the side wall of the rotating column (1002), the support rod 2 (704) is located directly above the connecting frame (1003), a square through slot is provided on the side wall of the support rod 2 (704), the support frame 2 (702) is fixedly connected to the side wall of the support rod 2 (704), the rotating motor 1 (705) is fixedly connected to the support rod 2 (705), and the rotating motor 1 (705) is fixedly connected to the support rod 2 (704). The rotating end of the rotating motor 1 (705) is fixedly connected to the threaded rod (706) in the square through groove on the support rod 2 (704), and the other end of the threaded rod (706) is rotatably connected to the square through groove on the support rod 2 (704). The threaded rod (706) is threadedly connected to a movable plate (707), and the top side wall of the movable plate (707) is fixedly connected to the support frame 1 (701), and the inner side walls of the support frame 1 (701) and the support frame 2 (702) are fixedly connected to four laser scanning heads (703), and the four laser scanning heads (703) are facing the four side walls of the silicon carbide focusing ring (4).

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