Heating loop selection control system and control method thereof

Abstract

The invention discloses a heating loop selection control system and a control method thereof, and relates to the technical field of semiconductor manufacturing, a relay set in the application at least comprises a relay I, a relay II and a relay III, when existence of an interlocking confirmation signal is confirmed and a confirmation button is pressed down, a coil I is electrified, so that an auxiliary contact I is closed; an auxiliary contact II of the relay II is connected with the auxiliary contact I in parallel and is used for receiving the interlocking confirmation signal and forming self-locking, so that the relay I is uninterruptible after the confirmation button is loosened; a third coil of the third relay is connected with the second auxiliary contact in parallel and used for receiving level signals, when external software transmits signals to the third relay through the PLC module, the third coil is powered on, the third auxiliary contact is closed, a self-locking mechanism is formed through the relay set, independent control of multi-cavity heating signals is achieved through the arrangement of the selection circuit, and the self-locking function is achieved. Therefore, the technical effects that the cavity heating signals are not easy to interfere with each other, and independent control and management of different cavity heating signals can be realized are achieved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor manufacturing technology, and in particular to a heating circuit selection control system and a control method thereof. Background Art

[0002] In industrial production, controlling heating circuits is crucial for stable equipment operation and product quality. Existing heating circuit control systems mostly rely on simple on / off controls to activate the heating circuit, lacking comprehensive consideration of the equipment's overall operating status.

[0003] In terms of signal transmission and control, the coordination of components such as relays in traditional systems is not intelligent enough to form an effective self-locking mechanism. This can lead to unexpected power outages in the heating circuit when the operator releases the control button. Furthermore, when equipment has multiple cavities, existing technologies typically rely on manual inspections of the heating circuit's operating status and troubleshooting, making it difficult to quickly locate faults. This lack of effective management leads to interference between the heating signals of each cavity, making it impossible to effectively control and manage the heating signals of different cavities independently.

[0004] In view of this, we need a heating circuit selection control system and a control method thereof to solve the above problems. Summary of the Invention

[0005] The purpose of this application is to solve the problem that interference is easily generated between cavity heating signals and independent control and management of different cavity heating signals cannot be effectively achieved. In order to solve the above technical problems, a heating circuit selection control system and a control method are provided, which are not prone to interference between cavity heating signals and can achieve independent control and management of different cavity heating signals.

[0006] To achieve the above-mentioned purpose, the embodiment of the present application adopts the following technical solutions: a heating circuit selection control system, which includes a manual confirmation module, a signal detection module, a relay group and a heating contactor; the manual confirmation module is used to select the heating circuit of the cavity by manually pressing the confirmation button; the signal detection module is connected to the manual confirmation module, and the signal detection module is used to detect whether the query level signal is connected to the circuit, and when the query level signal meets several preset conditions or a bypass signal, an interlock confirmation signal is output; the relay group includes at least relay 1, relay 2 and relay 3, and the coil 1 of relay 1 is connected to the manual confirmation module and the signal detection module When the interlock confirmation signal exists and the confirmation button is pressed, coil one is energized to close auxiliary contact one; auxiliary contact two of relay two is connected in parallel with auxiliary contact one to receive the interlock confirmation signal and form a self-locking state, so that relay one is not de-energized after the confirmation button is released; coil three of relay three is connected in parallel with auxiliary contact two to receive the level signal. When the external software transmits a signal to relay three through the PLC module, coil three is energized to close auxiliary contact three; coil four of the heating contactor is connected to auxiliary contact three. When auxiliary contact three is closed, coil four is energized to close auxiliary contact four and feedback the normal operation signal to the PLC module.

[0007] Furthermore, according to an embodiment of the present application, the system further includes an Interlock board, which is connected to the manual confirmation module, and the Interlock board is used to determine whether the heating circuit is allowed to start based on other status signals of the device.

[0008] Furthermore, according to an embodiment of the present application, other status signals include whether the device is in normal operating mode and whether there are other fault alarms.

[0009] Furthermore, according to an embodiment of the present application, the signal detection module and the interlock board are interconnected.

[0010] Further, according to an embodiment of the present application, the PLC module is used to receive a normal operation signal. When the normal operation signal is received, it is determined that the heating circuit is operating normally; otherwise, it is determined that there is a fault in the heating circuit.

[0011] Furthermore, according to an embodiment of the present application, the system further includes a selection circuit, which is used to select and process the heating signal when there are multiple cavities to ensure that the heating signal of each cavity is independent and controllable.

[0012] Further, according to an embodiment of the present application, the multiple preset conditions include that the device is in normal operating mode, there are no other fault alarms, and the query level signal is within a preset range.

[0013] Furthermore, according to an embodiment of the present application, the PLC module is also used to receive a feedback signal when the confirmation button is pressed again after maintenance. When the feedback signal is received, it is determined that the heating circuit of the corresponding cavity has resumed normal operation; when no feedback signal is received after the reset button is pressed again, it is determined that the heating circuit of the corresponding cavity needs to continue to be checked and repaired.

[0014] To achieve the above-mentioned purpose, the embodiment of the present application also adopts the following technical solutions: a control method for a heating circuit selection control system, which includes the following steps: selecting a heating circuit by manually pressing a confirmation button; generating an interlock confirmation signal when the query level signal meets several preset conditions or a bypass signal; if it is confirmed that the interlock confirmation signal exists and the confirmation button is pressed, the coil one of relay one is energized and the auxiliary contact one is closed; the auxiliary contact two of relay two is connected in parallel with the auxiliary contact one of relay one to form a self-locking; when the auxiliary contact two is closed, the coil three of relay three receives a level signal, and when the external software transmits a signal to relay three through the PLC module, the coil three is energized and the auxiliary contact pin three is closed; the level signal is transmitted to the coil four of the heating contactor, and after the coil four is energized, the auxiliary contact four is closed and the normal operation signal is fed back to the PLC module.

[0015] Furthermore, according to an embodiment of the present application, the following steps are also included: if the PLC module receives a normal operation signal, it is determined that the heating circuit of the corresponding cavity is operating normally; if no normal operation signal is received, it is determined that there is a fault in the heating circuit.

[0016] Beneficial effects:

[0017] The present application sets up a manual confirmation module, a signal detection module, a relay group and a heating contactor. The relay group includes at least relay 1, relay 2 and relay 3. When the interlock confirmation signal is confirmed and the confirmation button is pressed, coil 1 is energized to close auxiliary contact 1; auxiliary contact 2 of relay 2 is connected in parallel with auxiliary contact 1 to receive the interlock confirmation signal and form a self-locking state, so that relay 1 is not de-energized after the confirmation button is released; coil 3 of relay 3 is connected in parallel with auxiliary contact 2 to receive a level signal. When the external software transmits a signal to relay 3 through the PLC module, coil 3 is energized to close auxiliary contact 3. The relay group forms a self-locking mechanism to ensure the stability of the heating process; and with the help of the PLC module, automated fault feedback and troubleshooting are realized, thereby improving fault handling efficiency; at the same time, the setting of the selection circuit realizes the independent controllability of multi-cavity heating signals, thereby achieving the technical effect that the cavity heating signals are not easily interfered with each other and the independent control and management of different cavity heating signals can be realized, solving the technical problem that the cavity heating signals are easily interfered with each other and the independent control and management of different cavity heating signals cannot be effectively realized. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] The present application is further described below with reference to the accompanying drawings and examples.

[0019] Figure 1 This is a flow chart of a single cavity in a heating circuit selection control system of the present application.

[0020] Figure 2 This is a flow chart of a control method for a heating circuit selection control system of the present application. DETAILED DESCRIPTION

[0021] In order to clearly and completely describe the objectives and technical solutions of the present invention and make the advantages more clearly understood, the embodiments of the present invention are further described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are part of the embodiments of the present invention, not all of them, and are only used to explain the embodiments of the present invention, not to limit the embodiments of the present invention. All other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0022] In the description of the present invention, it should be noted that the terms "center," "middle," "upper," "lower," "left," "right," "inner," "outer," "top," "bottom," "side," "vertical," "horizontal," and the like, indicating positions or location relationships, are based on the positions or location relationships shown in the accompanying drawings and are intended only to facilitate the description of the present invention and simplify the description. They are not intended to indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limiting the present invention. Furthermore, the terms "one," "first," "second," "third," "fourth," "fifth," and "sixth" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0023] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0024] For the purpose of simplicity and illustration, the principles of the embodiments are described primarily with reference to examples. In the following description, many specific details are provided to provide a thorough understanding of the embodiments. However, it will be apparent to those skilled in the art that these embodiments may not be limited to these specific details in practice. In some instances, well-known methods and structures are not described in detail to avoid unnecessarily obscuring the understanding of these embodiments. In addition, all embodiments may be used in combination with each other.

[0025] Example 1:

[0026] like Figure 1 As shown, this embodiment provides a heating circuit selection control system, which includes a manual confirmation module, a signal detection module, a relay group and a heating contactor; the manual confirmation module is used to select the heating circuit of the cavity by manually pressing the confirmation button; the signal detection module is connected to the manual confirmation module, and the signal detection module is used to detect whether the query level signal is connected to the circuit, and when the query level signal meets several preset conditions or the bypass signal, the interlock confirmation signal is output; the relay group includes at least relay 1, relay 2 and relay 3, the coil 1 of relay 1 is connected to the manual confirmation module and the signal detection module, when the interlock confirmation signal exists and the confirmation button is pressed, the coil 1 is energized to close the auxiliary contact 1; the auxiliary contact 2 of relay 2 is connected in parallel with the auxiliary contact 1, for receiving the interlock confirmation signal and forming a self-locking, so that the relay 1 is not disconnected after the confirmation button is released; the coil 3 of relay 3 is connected in parallel with the auxiliary contact 2, for receiving the level signal, when the external software is connected through the PLC (Programmable Logic When the programmable logic controller (PLC) module transmits a signal to relay three, coil three is energized, closing auxiliary contact three; coil four of the heating contactor is connected to auxiliary contact three. When auxiliary contact three is closed, coil four is energized, closing auxiliary contact four and feeding back a normal operation signal to the PLC module.

[0027] The multiple preset conditions include that the device is in normal operation mode, there is no other fault alarm, and the query level signal is within a preset range.

[0028] Furthermore, the PLC module is used to receive a normal operation signal. When the normal operation signal is received, it is determined that the heating circuit is operating normally; otherwise, it is determined that there is a fault in the heating circuit.

[0029] The PLC module is also used to receive a feedback signal when the confirmation button is pressed again after maintenance. When the feedback signal is received, it is determined that the heating circuit of the corresponding cavity has resumed normal operation; when no feedback signal is received after the reset button is pressed again, it is determined that the heating circuit of the corresponding cavity needs to be further checked and repaired.

[0030] For example, cavity one is set in the equipment, and the query level signal in cavity one is first connected to the loop. When the above N preset conditions or bypass signals are met, an interlock confirmation signal can be generated. At this time, the confirmation button is manually pressed, coil one of relay one is energized, auxiliary contact one is closed, and the interlock confirmation signal is transmitted to relay two. Auxiliary contact two of relay two is connected in parallel to auxiliary contact one of relay one to form self-locking. When the confirmation button is released, the relay group is not de-energized, and coil three of relay three connected in parallel therewith obtains a level signal. When the external software transmits a signal to relay three through the PLC module, coil three of relay three is energized, auxiliary contact three pins are closed, and the level signal is transmitted to coil four of the heating contactor. After coil four is energized, auxiliary contact four closes and feeds back the signal to the PLC module. When the PLC module receives the signal, it indicates that the heating circuit of cavity one is operating normally.

[0031] If one or more of the above conditions are not met, no signal will be fed back to the PLC module after manually pressing the confirmation button, indicating that the circuit signal is faulty and requires investigation and repair. After repair, if the confirmation button is pressed again and the input module of the PLC module receives signal feedback, it means that the heating circuit of the cavity is operating normally. If the reset button is pressed again after repair and the input module of the PLC module still does not provide signal feedback, continue to investigate and repair until the PLC module provides signal feedback.

[0032] The system further includes an interlock board, which is connected to the manual confirmation module and is used to determine whether to allow the heating circuit to start based on other status signals from the device. These other status signals include whether the device is in normal operation mode and whether there are other fault alarms. The signal detection module is interconnected with the interlock board.

[0033] To meet safety requirements, a heating selection circuit was added to the interlock board, tightly integrating this system's control with the equipment's overall safety interlock control. After manually selecting the heating circuit by pressing the confirmation button, the interlock board determines whether to allow the heating circuit to start based on other equipment status signals, such as whether the equipment is in normal operation mode and whether there are any other fault alarms. This synergistic effect ensures that heating operations are performed while the equipment as a whole is in a safe and stable state, further improving equipment safety and reliability.

[0034] Furthermore, the system also includes a selection circuit, which is used to select and process the heating signal when there are multiple cavities, so as to ensure that the heating signal of each cavity is independent and controllable.

[0035] When the device has multiple cavities, the heating process of different cavities can be effectively controlled and managed by selecting the circuit to process the heating signal, ensuring that the heating signal of each cavity is independent and controllable.

[0036] The present application sets up a manual confirmation module, a signal detection module, a relay group and a heating contactor. The relay group includes at least relay 1, relay 2 and relay 3. When the interlock confirmation signal is confirmed and the confirmation button is pressed, coil 1 is energized to close auxiliary contact 1; auxiliary contact 2 of relay 2 is connected in parallel with auxiliary contact 1 to receive the interlock confirmation signal and form a self-locking state, so that relay 1 is not de-energized after the confirmation button is released; coil 3 of relay 3 is connected in parallel with auxiliary contact 2 to receive a level signal. When the external software transmits a signal to relay 3 through the PLC module, coil 3 is energized to close auxiliary contact 3. The relay group forms a self-locking mechanism to ensure the stability of the heating process; and with the help of the PLC module, automated fault feedback and troubleshooting are realized, thereby improving fault handling efficiency; at the same time, the setting of the selection circuit realizes the independent controllability of multi-cavity heating signals, thereby achieving the technical effect that the cavity heating signals are not easily interfered with each other and the independent control and management of different cavity heating signals can be realized, solving the technical problem that the cavity heating signals are easily interfered with each other and the independent control and management of different cavity heating signals cannot be effectively realized.

[0037] Example 2:

[0038] like Figure 2 As shown, this embodiment provides a control method based on the heating circuit selection control system in embodiment 1, which includes the following steps:

[0039] S1. Select the heating circuit by manually pressing the confirmation button;

[0040] S2. When the query level signal meets several preset conditions or a bypass signal, an interlock confirmation signal is generated;

[0041] S3. If the interlock confirmation signal is confirmed to be present and the confirmation button is pressed, the coil 1 of relay 1 is energized and the auxiliary contact 1 is closed. The auxiliary contact 2 of relay 2 is connected in parallel with the auxiliary contact 1 of relay 1 to form a self-locking state. When the auxiliary contact 2 is closed, the coil 3 of relay 3 receives a level signal. When the external software transmits a signal to relay 3 through the PLC module, the coil 3 is energized and the auxiliary contact pin 3 is closed.

[0042] S4 transmits the level signal to coil 4 of the heating contactor. After coil 4 is energized, auxiliary contact 4 closes and feeds back a normal operation signal to the PLC module.

[0043] Furthermore, the method further includes the following steps: if the PLC module receives a normal operation signal, it determines that the heating circuit of the corresponding cavity is operating normally; if the PLC module does not receive a normal operation signal, it determines that there is a fault in the heating circuit.

[0044] After maintenance, press the manual confirmation button again. If the input module of the PLC module receives signal feedback, it is determined that the heating circuit of the corresponding cavity can operate normally. If the input module of the PLC module still has no signal feedback after pressing the reset button again, continue to check and repair the heating circuit of the corresponding cavity.

[0045] Secondly, after manually pressing the confirmation button to select the heating circuit, the following steps are also included: the interlock board determines whether to allow the heating circuit to start based on other status signals of the equipment; the other status signals include whether the equipment is in normal operating mode and whether there are other fault alarms.

[0046] Furthermore, the method further includes the following steps: when the device has multiple cavities, the heating signal is selected and processed by the selection circuit.

[0047] Although the above describes the illustrative specific implementation methods of the present application so that those skilled in the art can understand the present application, the present application is not limited to the scope of the specific implementation methods. For those of ordinary skill in the art, as long as various changes are within the spirit and scope of the present application defined and determined by the attached claims, all application creations based on the concept of the present application are protected.

Claims

1. A heating circuit selection control system, characterized in that: It includes manual confirmation module, signal detection module, relay group and heating contactor; The manual confirmation module is used to select the heating circuit of the cavity by manually pressing a confirmation button; The signal detection module is connected to the manual confirmation module, and is used to detect whether the query level signal is connected to the loop, and output an interlock confirmation signal when the query level signal meets several preset conditions or a bypass signal; The relay group includes at least relay 1, relay 2, and relay 3. Coil 1 of relay 1 is connected to the manual confirmation module and the signal detection module. When the confirmation interlock confirmation signal is present and the confirmation button is pressed, coil 1 is energized to close auxiliary contact 1. Auxiliary contact 2 of relay 2 is connected in parallel with auxiliary contact 1 to receive the interlock confirmation signal and form a self-locking state, so that relay 1 is not de-energized after the confirmation button is released. The coil 3 of the relay 3 is connected in parallel with the auxiliary contact 2 and is used to receive a level signal. When the external software transmits a signal to the relay 3 through the PLC module, the coil 3 is energized, causing the auxiliary contact 3 to close. The coil four of the heating contactor is connected to the auxiliary contact three. When the auxiliary contact three is closed, the coil four is energized, causing the auxiliary contact four to close and feed back a normal operation signal to the PLC module.

2. A heating circuit selection control system according to claim 1, characterized in that: The system further comprises an interlock board connected to the manual confirmation module, and the interlock board is used to determine whether to allow the heating circuit to start according to other status signals of the device.

3. A heating circuit selection control system according to claim 2, characterized in that: The other status signals include whether the device is in normal operating mode and whether there are other fault alarms.

4. A heating circuit selection control system according to claim 2, characterized in that: The signal detection module and the interlock board are connected to each other.

5. A heating circuit selection control system according to claim 1, characterized in that: The PLC module is used to receive the normal operation signal. When the normal operation signal is received, it is determined that the heating circuit is operating normally; otherwise, it is determined that there is a fault in the heating circuit.

6. A heating circuit selection control system according to claim 1, characterized in that: The system further includes a selection circuit, which is used for selecting and processing a heating signal when there are multiple cavities, so as to ensure that the heating signal of each cavity is independent and controllable.

7. A heating circuit selection control system according to claim 1, characterized in that: The multiple preset conditions include that the device is in normal operating mode, there is no other fault alarm, and the query level signal is within a preset range.

8. A heating circuit selection control system according to claim 5, characterized in that: The PLC module is also used to receive a feedback signal when the confirmation button is pressed again after maintenance. When the feedback signal is received, it is determined that the heating circuit of the corresponding cavity has resumed normal operation; when the feedback signal is still not received after the reset button is pressed again, it is determined that the heating circuit of the corresponding cavity needs to continue to be checked and repaired.

9. A control method based on the heating circuit selection control system according to any one of claims 1 to 8, characterized in that: The following steps are involved: Select the heating circuit by manually pressing the confirmation button; When the query level signal meets several preset conditions or bypass signals, an interlock confirmation signal is generated; If the interlock confirmation signal is confirmed to exist and the confirmation button is pressed, the relay coil is energized and the auxiliary contact is closed; the auxiliary contact 2 of relay 2 is connected in parallel with the auxiliary contact 1 of relay 1 to form a self-locking state; when the auxiliary contact 2 is closed, the coil 3 of relay 3 receives a level signal, and when the external software transmits a signal to the relay 3 through the PLC module, the coil 3 is energized and the auxiliary contact pin 3 is closed; The level signal is transmitted to the coil four of the heating contactor. After the coil four is energized, the auxiliary contact four is closed and a normal operation signal is fed back to the PLC module.

10. The control method of a heating circuit selection control system according to claim 9, characterized in that: The following steps are also included: If the PLC module receives the normal operation signal, it determines that the heating circuit corresponding to the cavity is operating normally; If the normal operation signal is not received, it is determined that a fault exists in the heating circuit.

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