Chemical equipment parts automatic maintenance platform

Abstract

The application provides a kind of chemical equipment parts automatic maintenance platform, including main frame, main frame is equipped with: cleaning module, set in the middle of main frame, cleaning module includes cleaning medium supply assembly, part bearing platform with flow guide hole and soaking container;Part bearing platform is used to place the measured part, cleaning medium supply assembly provides adjustable pressure jet to clean the outside of part, soaking container is set on the side of part bearing platform, for containing part and carrying out internal cleaning after external cleaning is completed;Control module is fixed on the main frame by partition and located above the cleaning module, control module is electrically connected with cleaning module and realizes control.Can realize accurate fault diagnosis, efficient repair and performance verification of core components of long-term complex working condition wet chemical supply system in high clean environment, to meet the stringent requirements of high-end manufacturing field on the reliability of core components.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor manufacturing, in particular to an automatic maintenance platform for chemical equipment parts. BACKGROUND

[0002] In the core process of high-end manufacturing fields such as semiconductor manufacturing, panel display and integrated circuit, the precise supply of wet chemicals (such as etching solution, cleaning solution, developing solution, etc.) is a key link to ensure product yield. Pumps, filters, valves and sensors are the core functional components of the wet chemical supply system, and their operating performance directly determines the precision, stability and cleanliness of chemical delivery. As the semiconductor chip process continues to develop to smaller nanometer levels, the industry's control of key parameters such as purity, flow and pressure of wet chemicals continues to climb, and the reliability of core components is facing unprecedented challenges.

[0003] However, the core components of the wet chemical supply equipment have been serving in complex working conditions of high corrosion (such as cleaning solution containing hydrofluoric acid, strong alkaline etching solution), high frequency pressure fluctuation and high flow impact for a long time. Taking the etching process as an example, the fluorine-based etching solution used will cause continuous corrosion to the pump body diaphragm, valve sealing elements (O-rings) and filter housings, etc. At the same time, to meet the dynamic adjustment needs of nanometer-level processes, the equipment needs to withstand high-frequency start-stop cycles and micron-level flow control loads, which can easily lead to diaphragm fatigue, sealing failure and pipeline leakage, etc. Such core components usually integrate multiple modules such as diaphragm pumps, magnetic drive mechanisms, precision valve bodies and digital flow meters, etc. Not only do they need to meet the Class 10 clean environment requirements during maintenance, but also the fault location relies on high-precision detection equipment, making the maintenance extremely difficult. Therefore, the industry urgently needs a special maintenance test platform to realize accurate fault diagnosis, efficient repair and performance verification. SUMMARY

[0004] To solve all or part of the problems of the prior art, the present application provides an automatic maintenance platform for chemical equipment parts, which can realize accurate fault diagnosis, efficient repair and performance verification of the core components of the wet chemical supply system under long-term complex working conditions in a high-clean environment, to meet the stringent requirements of high-end manufacturing fields for the reliability of core components.

[0005] To achieve the above purpose, the present application provides the following technical solutions:

[0006] An automatic maintenance platform for chemical equipment parts, comprising a main frame, the main frame being configured with:

[0007] A cleaning module is arranged in the middle of the main frame, and the cleaning module comprises a cleaning medium supply assembly, a component bearing platform with flow guide holes, and a soaking container; the component bearing platform is used for placing components to be tested, the cleaning medium supply assembly provides a spray flow with adjustable pressure to clean the components externally, and the soaking container is arranged on one side of the component bearing platform and is used for containing the components to be tested and cleaning the components internally after external cleaning is completed;

[0008] A control module is fixed to the main frame by a partition plate and located above the cleaning module, and the control module is electrically connected with the cleaning module and controls the cleaning module.

[0009] The cleaning medium supply assembly comprises a medium source and a cleaning pistol, the cleaning pistol is in communication with the medium source and outputs cleaning medium under the control of the control module.

[0010] Further comprising a detection module, the detection module is installed on the main frame by a fixing member and located above the cleaning module; the detection module comprises a liquid supply pipeline, a three-way connector, a flow guide pipeline and a detection assembly, one end of the liquid supply pipeline is connected with the medium source, and the other end is connected with a first interface of the three-way connector; a second interface of the three-way connector is connected with the flow guide pipeline, and a third interface is connected with the detection assembly; the other end of the flow guide pipeline extends into the soaking container, and a manual valve is arranged on the flow guide pipeline

[0011] The detection assembly comprises a pressure detection element and a flow detection element, and the pressure and flow data in the pipeline are obtained in real time and fed back to the control module.

[0012] An openable protective cover is arranged at the opening of the soaking container, and a liquid level monitoring element for monitoring the liquid level is arranged inside, and the liquid level monitoring element is electrically connected with the control module.

[0013] Further comprising a waste liquid treatment module, the waste liquid treatment module is located below the cleaning module, a water tank for receiving waste liquid is arranged below the component bearing platform, and the outlet of the soaking container and the outlet of the water tank are respectively connected to the waste liquid treatment module through pipelines.

[0014] The waste liquid treatment module comprises a collector, a first pipeline, a second pipeline and a liquid discharge pipeline, the liquid discharge pipeline is connected with the collector, one end of the first pipeline is connected with the outlet of the water tank, and the other end is connected to the liquid discharge pipeline; one end of the second pipeline is connected with the outlet of the soaking container, and the other end is connected to the liquid discharge pipeline; control valves are arranged on the first pipeline and the second pipeline, and the control valves are electrically connected with the control module.

[0015] The dry storage module is located below the cleaning module, and comprises a dry treatment assembly and a storage structure.

[0016] The control module comprises a plurality of control switches for controlling the operation states of the detection assembly, the cleaning gun, the liquid level monitoring element and the control valves respectively.

[0017] The main frame is made of polypropylene plates spliced together, and universal wheels with locking function and height-adjustable screw foot supports are installed at the four corner positions of the frame bottom. BRIEF DESCRIPTION OF DRAWINGS

[0018] In order to more clearly illustrate the technical solutions in the specific embodiments of the present application, the drawings needed in the embodiment description will be briefly introduced as follows. Obviously, the drawings described below are only some embodiments of the present application, and other drawings can be obtained by those skilled in the art without creative effort on the basis of these drawings.

[0019] Figure 1 It is a first perspective view of the structure of the automatic maintenance platform for chemical equipment parts according to an embodiment of the present application.

[0020] Figure 2 It is a second perspective view of the structure of the automatic maintenance platform for chemical equipment parts according to an embodiment of the present application.

[0021] Figure 3 It is a front view of the automatic maintenance platform for chemical equipment parts according to an embodiment of the present application.

[0022] Figure 4 It is a partial structure view of the automatic maintenance platform for chemical equipment parts according to an embodiment of the present application. Figure 3

[0023] Figure 5 It is a partial structure view of the automatic maintenance platform for chemical equipment parts according to an embodiment of the present application. Figure 3

[0024] Figure 6 It is a partial structure view of the automatic maintenance platform for chemical equipment parts according to an embodiment of the present application. Figure 5

[0025] Figure 7 It is a structure view of the detection module of the automatic maintenance platform for chemical equipment parts according to an embodiment of the present application.

[0026] Figure 8 ​​​It is a front view of a detection module in a chemical equipment parts automatic maintenance platform according to an embodiment of the present application.

[0027] The figure mark: 1, main body frame; 101, screw foot support; 2, cleaning module; 201, cleaning medium supply assembly; 2011, cleaning water gun; 202, parts bearing platform; 2021, water tank; 203, soaking container; 2031, protective cover; 2032, liquid level monitoring element; 3, detection module; 301, liquid supply pipeline; 302, three-way connector; 303, flow guide pipeline; 3031, manual valve; 304, detection assembly; 4, waste liquid treatment module; 401, first pipeline; 402, second pipeline; 5, drying storage module; 6, control module; 601, button; 602, pressure regulating valve; 603, pressure gauge; 604, selection switch; 605, buzzer. DETAILED DESCRIPTION

[0028] The technical solutions in the specific embodiments of the present application will be described clearly and completely below. Obviously, the described embodiments are only a part of the embodiments of the present application, not all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of protection of the present application.

[0029] The present application provides a kind of chemical equipment parts automatic maintenance platform, as shown in Figures 1 to 8 It includes main body frame 1, which is built by polypropylene (PP) board splicing. The main body frame 1 built by PP board has multiple advantages: it can effectively resist the corrosion of chemicals; the material cost is relatively low; and the PP material has good plasticity, which is convenient for building and splicing.

[0030] The main body frame 1 is provided with cleaning module 2, waste liquid treatment module 4, control module 6, detection module 3 and drying storage module 5, and the specific structure and connection relationship of each module are as follows:

[0031] The cleaning module 2 is arranged in the middle of the main body frame 1, and includes a cleaning medium supply assembly 201, a part carrying platform 202 with flow guide holes, and an immersion container 203. The part carrying platform 202 is used to place the parts to be repaired, and mainly functions to clean the residual liquid on the surface of the parts; the cleaning medium supply assembly 201 can provide a spray flow with adjustable pressure to externally clean the parts; the immersion container 203 is arranged on one side of the part carrying platform 202, and is used to accommodate the parts after external cleaning is completed, so as to clean the inside of the parts and parts that are difficult to be cleaned by the spray of the cleaning gun. The cleaning medium supply assembly 201 includes a medium source and a cleaning gun, the cleaning gun is in communication with the medium source and is controlled by the control module 6 to output the cleaning medium, and the medium source is ultrapure water in this embodiment. In use, the parts to be repaired are placed on the part carrying platform 202, and the residual liquid and dirt on the surface of the parts are washed by the cleaning gun; then the parts with the surface washed clean are placed in the immersion container 203, and the inside of the parts is cleaned, and the ultrapure water generated in the cleaning process flows into the waste liquid treatment module 4 from the flow guide holes of the part carrying platform 202.

[0032] The waste liquid treatment module 4 is arranged below the cleaning module 2, and a water tank 2021 for receiving waste liquid is arranged below the part carrying platform 202. The outlet of the immersion container 203 and the outlet of the water tank 2021 are respectively connected to the waste liquid treatment module 4 through pipelines. Specifically, the waste liquid treatment module 4 includes a collector, a first pipeline 401, a second pipeline 402, and a liquid discharge pipeline. The liquid discharge pipeline is connected to the collector. One end of the first pipeline 401 is connected to the outlet of the water tank 2021, and the other end is connected to the liquid discharge pipeline. One end of the second pipeline 402 is connected to the outlet of the immersion container 203, and the other end is connected to the liquid discharge pipeline. Control valves are arranged on the first pipeline 401 and the second pipeline 402, and the control valves are electrically connected to the control module 6. The opening and closing of the control valves can be controlled by the selection switch 604 of the control module 6, so as to switch the cleaning medium between the immersion container 203 and the part carrying platform 202, and to save the material and installation workload to a certain extent.

[0033] The control module 6 is fixed to the main frame 1 through a partition plate and is located above the cleaning module 2, and is electrically connected with the cleaning module 2 to realize control. The control module 6 comprises a plurality of control switches for controlling the operation state of the detection assembly 304, the cleaning gun, the liquid level monitoring element 2032 and each control valve, specifically comprising a plurality of buttons 601, a pressure regulating valve 602, a pressure gauge 603, a selection switch 604 and a buzzer 605 and the like. Among them, the button 601 can be used to open the pressure test of the maintenance parts (in this embodiment, the maintenance part is the pump), and the pressure value displayed by the pressure gauge 603 is compared with the factory pressure, and the pressure floating difference is combined to provide maintenance basis for the pressure state judgment of the pump; the pressure and flow rate in the cleaning process are controlled by the pressure regulating valve 602, and the water pressure can be steplessly adjusted according to the different erosion degrees of the parts; the selection switch 604 is used to realize the switching of the cleaning medium between the soaking container 203 and the part bearing platform 202.

[0034] The detection module 3 is installed on the main frame 1 through a fixing piece and is located above the cleaning module 2, and comprises a liquid supply pipeline 301, a three-way connecting piece 302, a flow guide pipeline 303 and a detection assembly 304. One end of the liquid supply pipeline 301 is connected with the medium source, and the other end is connected with the first interface of the three-way connecting piece 302; the second interface of the three-way connecting piece 302 is connected with the flow guide pipeline 303, and the third interface is connected with the detection assembly 304; the other end of the flow guide pipeline 303 extends into the soaking container 203, and a manual valve 3031 is arranged thereon. The detection assembly 304 comprises a pressure detection element and a flow detection element, which can obtain the medium pressure and flow data in the passage in real time and feed back to the control module 6. During detection, one end of the pump is connected with the outlet of the liquid supply pipeline 301, and the other end is connected with the first interface of the three-way connecting piece 302, and the pressure detection element and the flow detection element accurately measure the pressure and flow data in the pump, respectively, and compare the measured pressure with the factory parameters, when the difference is greater than the error value, it can be judged that the internal of the pump may be damaged, which provides a strong basis for maintenance or replacement decision, greatly reduces the test judgment time, improves the accuracy and efficiency of maintenance, and reduces the engineering cost.

[0035] The opening of the soaking container 203 is provided with an openable protective cover 2031, and a liquid level monitoring element 2032 is arranged in the inside, and the liquid level monitoring element 2032 is electrically connected with the control module 6. When the liquid level monitoring element 2032 detects that the liquid in the soaking container 203 is about to overflow, a signal is sent to the control module 6 to prompt a warning, at this time, the buzzer 605 can be silenced through the button 601, or the liquid is discharged to the waste liquid treatment module 4 to reduce the liquid level, so as to close the alarm of the buzzer 605.

[0036] The dry storage module 5 is located below the cleaning module 2, comprising a drying treatment assembly and a storage structure, the drying treatment assembly is provided with a nitrogen blowing interface, the interface end is provided with a flow control valve and a quick connector; the storage structure adopts a hollow grid plate, and after the cleaning of parts and components, the parts and components can be placed on the storage structure for air drying storage.

[0037] In addition, universal wheels with locking function and height-adjustable screw foot supports 101 are installed at the four corners of the bottom of the main frame 1, the working height can be adjusted according to the height of the operator, and the universal wheels facilitate the adjustment of the position of the equipment in the later period.

[0038] The working process of the chemical equipment part automatic maintenance platform provided by the application is as follows: when the equipment is installed, the height of the screw foot support 101 is adjusted to the ergonomic operating height; when the parts are cleaned, the parts to be repaired are placed on the part bearing platform 202, the surface residual liquid and dirt are washed with a cleaning pistol, and then the parts with clean surfaces are placed in the soaking container 203 for cleaning the inside; after the cleaning of the parts, the parts are placed in the storage structure of the dry storage module 5 for air drying storage; when the pump is maintained and diagnosed, the inlet end of the pump is connected to the liquid supply pipeline 301, the outlet end is connected to the first interface of the three-way connecting piece 302, the medium source is opened to input liquid, the pump is started by the button 601, the pressure and flow data of the pump are measured by the detection assembly 304, and compared with the factory parameters, if the difference is greater than the error value, it is judged that the pump inside may be damaged, and then maintenance or replacement measures are taken according to the judgment result.

[0039] The chemical equipment part automatic maintenance platform provided by the application has at least the following beneficial effects:

[0040] 1、The platform integrates cleaning, detection, waste liquid treatment and dry storage function modules, providing an integrated and standardized operation environment for the maintenance of chemical equipment parts (especially pump parts). Maintenance personnel can rely on professional tools and detection equipment on the platform to carry out maintenance work according to the fixed process, avoiding the problems of large randomness and non-standard process in traditional maintenance, effectively improving the standardization and consistency of maintenance work.

[0041] 2、The pressure detection element and the flow detection element provided by the detection module 3 can obtain the pressure and flow data in the pump in real time and accurately, and by comparing with the factory parameters, the existence of damage inside the pump can be quickly judged. This function provides a scientific and reliable basis for maintenance decision, greatly shortens the fault judgment time, improves the accuracy of maintenance, and reduces the unnecessary maintenance or replacement cost caused by misjudgment.

[0042] 3、The cleaning module 2 adopts a double cleaning mode of "external flushing + internal soaking", the part bearing platform 202 can remove the surface residual liquid, the soaking container 203 can clean the internal part and the difficult-to-flush part without dead angle, and the cleaning is ensured to be thorough. At the same time, the pressure regulating valve 602 of the control module 6 can steplessly adjust the cleaning pressure and flow rate according to the erosion degree of the part, meet the cleaning demand of different stain degrees, and improve the controllability of the cleaning effect.

[0043] 4、The switching of the cleaning medium between the soaking container 203 and the part bearing platform 202 can be realized by selecting the switch 604, an independent medium supply system does not need to be configured for the two parts, the material cost is saved to a certain extent, the pipeline installation work is simplified, and the complexity of the equipment building is reduced.

[0044] It should be noted that, for those skilled in the art, some improvements and modifications can be made to the present application without departing from the principles of the present application, and these improvements and modifications also fall within the scope of protection of the claims of the present application.

Claims

1. An automatic maintenance platform for chemical plant components, characterized in that, Including the main body frame (1), the main body frame (1) is configured with: The cleaning module (2) is arranged in the middle of the main body frame (1), and the cleaning module (2) comprises a cleaning medium supply assembly (201), a part bearing platform (202) with a flow guide hole and a soaking container (203); the part bearing platform (202) is used for placing the parts to be tested, the cleaning medium supply assembly (201) provides an adjustable pressure spray flow to clean the parts externally, and the soaking container (203) is arranged on one side of the part bearing platform (202) and is used for containing the parts and performing internal cleaning after external cleaning is completed; The control module (6) is fixed on the main body frame (1) by a partition and located above the cleaning module (2), and the control module (6) is electrically connected with the cleaning module (2) and realizes control. The cleaning medium supply assembly (201) comprises a medium source and a cleaning pistol, the cleaning pistol is communicated with the medium source and controlled by the control module (6) to output cleaning medium; Further comprising a detection module (3), the detection module (3) is installed on the main body frame (1) by a fixing member and located above the cleaning module (2); the detection module (3) comprises a liquid supply pipeline (301), a three-way connector (302), a flow guide pipeline (303) and a detection assembly (304), one end of the liquid supply pipeline (301) is connected with the medium source, and the other end is connected with the first interface of the three-way connector (302); the second interface of the three-way connector (302) is connected with the flow guide pipeline (303), and the third interface is connected with the detection assembly (304); the other end of the flow guide pipeline (303) extends into the soaking container (203), and a manual valve (3031) is arranged thereon; The detection assembly (304) comprises a pressure detection element and a flow detection element, which can obtain the pressure and flow data of the medium in the passage in real time and feed back to the control module (6); Further comprising a waste liquid treatment module (4), the waste liquid treatment module (4) is located below the cleaning module (2), a water tank (2021) for receiving waste liquid is arranged below the part bearing platform (202), and the outlet of the soaking container (203) and the outlet of the water tank (2021) are respectively connected to the waste liquid treatment module (4) through pipelines; Further comprising a drying storage module (5), the drying storage module (5) is located below the cleaning module (2) and comprises a drying treatment assembly and a storage structure, the drying treatment assembly is provided with a nitrogen blowing interface, the interface is provided with a flow control valve and a quick connector; the storage structure adopts a hollow grid plate.

2. The platform of claim 1, wherein, An openable protective cover (2031) is arranged at the opening of the soaking container (203), and a liquid level monitoring element (2032) for monitoring the liquid level is arranged inside, and the liquid level monitoring element (2032) is electrically connected with the control module (6).

3. The platform of claim 2, wherein, The waste liquid treatment module (4) comprises a collector, a first pipeline (401), a second pipeline (402) and a liquid discharge pipeline, one end of the first pipeline (401) is connected to the outlet of the sink (2021), and the other end is connected to the liquid discharge pipeline; One end of the second pipeline (402) is connected to the outlet of the soaking container (203), and the other end is connected to the liquid discharge pipeline; control valves are arranged on the first pipeline (401) and the second pipeline (402), and the control valves are electrically connected with the control module (6).

4. The platform of claim 3, wherein, The control module (6) comprises a plurality of control switches for controlling the operation states of the detection assembly (304), the cleaning gun, the liquid level monitoring element (2032) and the control valves respectively.

5. The platform of claim 1, wherein, The main frame (1) is spliced by polypropylene plates, and universal wheels with locking function and height-adjustable screw foot supports (101) are installed at the four corner positions of the bottom of the frame.

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