Substrate transfer apparatus and substrate processing apparatus

Abstract

The invention provides a substrate transferring device and a substrate processing device. The substrate transferring device comprises a supporting column, a first supporting column and a second supporting column, the mechanical arm is used for bearing the substrate; the lifting mechanism comprises a lifting driving device and a lifting supporting piece, and the lifting driving device is used for driving the lifting supporting piece to ascend and descend; the rotating mechanism comprises a supporting seat, the rotating mechanism is rotationally connected with the supporting column through the supporting seat, and the rotating mechanism is used for driving the mechanical arm and the first supporting piece to rotate around the supporting column; and the multiple guide shafts are distributed around the axis of the supporting column, one end of each guide shaft is connected with the supporting base, and the other end of each guide shaft is connected with the first supporting piece so that the supporting base can drive the first supporting piece and the mechanical arm to rotate when rotating. According to the substrate transferring device and the substrate processing device, the requirements for the fit tolerance of perpendicularity and concentricity between the multiple guide shafts and the supporting base can be lowered, and the machining cost of the supporting base is lowered. In addition, the inclination phenomenon of the mechanical arm can be improved.

Description

Technical Field

[0001] The present application mainly relates to the semiconductor field, and in particular to a substrate transfer device and a substrate processing device. Background Art

[0002] During substrate processing, such as annealing, a robotic arm is used to rotate and place substrates. This requires both a simple robotic arm structure and smooth movement. Complex robotic arm designs increase costs and complicate assembly. If the robotic arm vibrates during lifting and rotating motion, it can affect substrate placement, causing uneven placement at best and damage to the substrate due to arm vibration. Therefore, it is necessary to design a robotic arm with a simple structure and smooth movement. Summary of the Invention

[0003] The technical problem to be solved by this application is to provide a substrate transfer device and substrate processing device that can reduce the requirements for the perpendicularity and concentricity tolerances between multiple guide shafts and the support base, and reduce the manufacturing cost of the support base. In addition, the substrate transfer device and substrate processing device of this application can also improve the problem of robot arm tilt.

[0004] To solve the above technical problems, the present application provides a substrate transfer device, comprising: a support column; a robotic arm for carrying a substrate; a lifting mechanism, comprising a lifting drive device and a lifting support member, the lifting drive device is used to drive the lifting support member to lift and lower, the lifting support member comprises a first support member, the first support member is fixedly connected to the robotic arm to drive the robotic arm to lift and lower; a rotating mechanism, comprising a support seat, the rotating mechanism is rotatably connected to the support column through the support seat, the rotating mechanism is used to drive the robotic arm and the first support member to rotate around the support column; and a plurality of guide shafts distributed around the axis of the support column, wherein one end of each guide shaft is connected to the support seat, and the other end is connected to the first support member, so that when the support seat rotates, the first support member and the robotic arm are driven to rotate.

[0005] In one embodiment of the present application, the rotating mechanism further includes a rotating drive device and a connecting block, one end of the connecting block is connected to the rotating drive device, and the other end is connected to the supporting seat.

[0006] In one embodiment of the present application, the connecting block is Y-shaped, one end of the first branch in the connecting block is connected to the rotation drive device, the other end of the first branch is connected to one end of the second branch and one end of the third branch in the connecting block, and the other end of the second branch and the other end of the third branch are both connected to the support seat.

[0007] In one embodiment of the present application, a first deep groove ball bearing is further included. The first deep groove ball bearing is located between the support seat and the support column. The support seat and the support column are rotatably connected via the first deep groove ball bearing.

[0008] In one embodiment of the present application, one end of each guide shaft is slidably connected to the first support member through a linear bearing, and the other end is fixedly connected to the support seat; or one end of each guide shaft is fixedly connected to the first support member, and the other end is slidably connected to the support seat through the linear bearing; or one end of each guide shaft is fixedly connected to the first support member, and the other end is fixedly connected to the support seat, wherein each guide shaft is a telescopic structure along the vertical direction.

[0009] In one embodiment of the present application, the lifting support member also includes a second bearing and a second support member, the second bearing is located between the first support member and the second support member, wherein the first support member is rotatably connected to the second support member through the second bearing, and the lifting drive device is used to drive the second support member to drive the first support member and the robotic arm to lift and lower.

[0010] In one embodiment of the present application, the second bearing is a cross roller bearing.

[0011] In one embodiment of the present application, a sealing cover and a sealing member are also included, one end of the support column is connected to the base, the base has a accommodating cavity, the sealing cover is arranged above the support column, the first support member and the second support member, and seals the accommodating cavity, the accommodating cavity has a first side wall, the sealing cover has a second side wall opposite to the first side wall, and the sealing member is located between the first side wall and the second side wall, wherein the first support member is fixedly connected to the sealing cover, and the robotic arm is arranged on the top surface of the sealing cover.

[0012] In one embodiment of the present application, the sealing member includes any one or a combination of a multi-layer sealing ring, a Variseal sealing ring and a magnetic fluid seal, and the multi-layer sealing ring, the Variseal sealing ring and the magnetic fluid seal are located between the second side wall of the sealing cover and the first side wall of the base.

[0013] On the other hand, the present application further provides a substrate processing device, comprising the substrate transfer device as described above.

[0014] The multiple guide shafts in this application share the same mounting datum surface, which reduces the requirements for perpendicularity and concentricity between the guide shafts and the support base, and reduces the manufacturing cost of the support base. Furthermore, the cross-roller bearings in this application can eliminate or reduce bearing clearance, thereby improving the tilt or shake of the robot arm and enhancing the smoothness of its operation. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] The accompanying drawings are included to provide a further understanding of the present application. They are incorporated into and constitute a part of this application. The accompanying drawings illustrate embodiments of the present application and, together with this specification, serve to explain the principles of the present application. In the accompanying drawings:

[0016] Figure 1 and Figure 2 is a top view schematic diagram of a robotic arm located at different workstations in one embodiment of the present application;

[0017] Figures 3 to 5 is a three-dimensional schematic diagram of a substrate transfer device in one embodiment of the present application;

[0018] Figure 6 is a schematic front view of a substrate transfer device in one embodiment of the present application;

[0019] Figure 7 and Figure 8 2 is a schematic cross-sectional view of a substrate transfer device in one embodiment of the present application.

[0020] Reference numerals

[0021] Process chamber 10 lifting drive device 134 base 180

[0022] First station 11 Power output shaft 134a Accommodating chamber 181

[0023] Second station 12 First lifting block 135 First side wall 181a

[0024] Door curtain 30 Second lifting block 136 Sealing cover 190

[0025] Base plate 40 Linear guide rail 137 Second side wall 191

[0026] Substrate transfer device 100 Rotating mechanism 140 Top wall 192

[0027] Support column 110 Support seat 141 Groove 193

[0028] Robotic arm 120 Rotation drive device 142 Sealing ring 210

[0029] Lifting mechanism 130 connecting block 143 shaft pin 220

[0030] First support member 131 Guide shaft 150 Mounting plate 230

[0031] Second bearing 132 Linear bearing 160 Fixing member 240

[0032] Second support member 133 First bearing 170 Locking member 250 DETAILED DESCRIPTION

[0033] To more clearly illustrate the technical solutions of the embodiments of this application, the following is a brief introduction to the drawings required for describing the embodiments. Obviously, the drawings described below are merely examples or embodiments of this application. Those skilled in the art can apply this application to other similar scenarios based on these drawings without inventive effort. Unless otherwise apparent from the context or otherwise noted, the same reference numerals in the figures represent the same structure or operation.

[0034] As used in this application and the claims, unless the context clearly indicates otherwise, the words "a," "an," "an," and / or "the" are not intended to refer to the singular but may include the plural. Generally speaking, the terms "comprises" and "include" only indicate the inclusion of the steps and elements specifically identified, and these steps and elements do not constitute an exclusive list. A method or apparatus may also include other steps or elements.

[0035] Unless otherwise specifically stated, the relative arrangement of the parts and steps, numerical expressions and numerical values ​​set forth in these embodiments do not limit the scope of the present application. At the same time, it should be understood that, for ease of description, the sizes of the various parts shown in the drawings are not drawn according to actual proportional relationships. The techniques, methods and equipment known to those of ordinary skill in the relevant art may not be discussed in detail, but where appropriate, the techniques, methods and equipment should be considered as part of the authorization specification. In all examples shown and discussed here, any specific values ​​should be interpreted as being merely exemplary and not as limitations. Therefore, other examples of the exemplary embodiments may have different values. It should be noted that similar numbers and letters represent similar items in the following figures, and therefore, once an item is defined in one figure, it does not need to be further discussed in subsequent figures.

[0036] In the description of this application, it should be understood that the directions or positional relationships indicated by directional words such as "front, back, up, down, left, right", "horizontal, vertical, vertical, horizontal" and "top, bottom" are usually based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description. Unless otherwise specified, these directional words do not indicate or imply that the device or element referred to must have a specific direction or be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the scope of protection of this application; the directional words "inside and outside" refer to the inside and outside relative to the outline of each component itself.

[0037] For ease of description, spatially relative terms such as "above", "above", "on the upper surface of", "above", etc. may be used herein to describe the spatial positional relationship of a device or feature to other devices or features as shown in the figures. It should be understood that spatially relative terms are intended to include different orientations of the device in use or operation in addition to the orientation described in the figures. For example, if the device in the drawings is inverted, the device described as "above other devices or structures" or "above other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Thus, the exemplary term "above" can include both "above" and "below". The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatially relative descriptions used here are interpreted accordingly.

[0038] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is solely for the purpose of distinguishing the corresponding components. Unless otherwise stated, these terms have no special meaning and therefore should not be construed as limiting the scope of protection of this application. Furthermore, while the terms used in this application are selected from commonly known and commonly used terms, some terms mentioned in this specification may have been selected by the applicant at his or her discretion, and their detailed meanings are explained in the relevant sections of this description. Furthermore, this application should be understood not only by the actual terms used, but also by the meaning implied by each term.

[0039] Next, the substrate transfer device and substrate processing device of the present application are described through embodiments.

[0040] Figure 1 and Figure 2 FIG. 1 is a top view of the robot arm 120 at different workstations in one embodiment. Figure 3 FIG. 1 is a perspective schematic diagram of a substrate transfer device 100 according to an embodiment, wherein: Figure 3 For ease of understanding, the substrate 40 is shown schematically. It is understood that the substrate transfer device 100 does not include a substrate. Figures 1 to 3 As shown, the substrate transfer device 100 can be arranged in the process chamber 10, and the substrate transfer device 100 can drive the robot arm 120 to rise and fall and rotate, so that the substrate 40 can be transferred between the first station 11 and the second station 12. The process chamber 10 can be an annealing chamber, the first station 11 can be a cold plate in the annealing chamber, and the second station 12 can be a hot plate in the annealing chamber. The process chamber 10 can also be other chambers, such as a chamber for chemical vapor deposition (CVD), a chamber for physical vapor deposition (PVD), or a chamber for cleaning substrates. The process chamber 10 has a door curtain 30, and the substrate 40 can enter the process chamber 10 through the substrate entrance and exit at the door curtain 30. A blowing device can be provided at the door curtain 30 to prevent external contaminants from entering the process chamber 10.

[0041] Figure 4 and Figure 5 This is a three-dimensional schematic diagram of a substrate transfer device in one embodiment at different viewing angles. Figure 6 is a schematic front view of a substrate transfer device in one embodiment, Figure 7 and Figure 8 FIG. 1 is a schematic cross-sectional view of a substrate transfer device according to an embodiment, wherein: Figure 4 and Figure 5 The robotic arm is not shown. Figure 7 The figure shows the state of the robot arm 120 after it rises. Figure 8 The figure shows the state of the robotic arm 120 after it descends. Figure 7 and Figure 8 For ease of understanding, the base 180 is shown schematically. However, it should be understood that the substrate transfer device of the present application does not include the base 180. Figures 4 to 8 As shown, the substrate transfer device 100 includes a support column 110, a robot arm 120, a lifting mechanism 130, a rotating mechanism 140 and a plurality of guide shafts 150. The rotating mechanism 140 can drive the robot arm 120 to rotate, and the lifting mechanism 130 can drive the robot arm 120 to move up and down.

[0042] Specifically, the lower end of the support column 110 is fixedly connected to the base 180. The rotating mechanism 140 includes a support seat 141, and the support seat 141 is rotationally connected to the support column 110, that is, the support seat 141 can rotate around the support column 110. In one embodiment, the support seat 141 and the support column 110 are rotationally connected in the following manner: the substrate transfer device 100 has a first bearing 170 located between the support seat 141 and the support column 110, the inner circumference of the first bearing 170 is connected to the outer circumference of the support column 110, and the outer circumference of the first bearing 170 is connected to the inner circumference of the support seat 141. In this way, under the action of external force, the support seat 141 can rotate around the support column 110. The first bearing 170 can be a deep groove ball bearing, or it can be other types of bearings. For example, the first bearing 170 can also be a cross roller bearing. Preferably, a plurality of deep groove ball bearings are provided between the support seat 141 and the support column 110, and the plurality of deep groove ball bearings are spaced apart in the vertical direction to ensure that the support seat 141 and the support column 110 have a high concentricity, so as to improve the stability of the support seat 141 driving the rotation of the robotic arm 120.

[0043] refer to Figure 5 and Figure 7 As shown, in some embodiments, the lower end of the support column 110 can be fixedly connected to the base 180 by a locking member 250. Of course, the support column 110 and the base 180 can also be fixedly connected by other means.

[0044] refer to Figure 5 and Figure 6 As shown, the rotating mechanism 140 further includes a rotating drive device 142 and a connecting block 143. The rotating drive device 142 includes but is not limited to a cylinder. Figure 5 and Figure 6 In the embodiment, the connecting block 143 is Y-shaped, and the Y-shaped connecting block 143 includes a first branch 143a, a second branch 143b and a third branch, which is limited by Figure 5 and Figure 6 The perspective in Figure 5 and Figure 6 One end of the first branch 143a is connected to the rotation drive device 142, and the other end is connected to one end of the second branch 143b and one end of the third branch. The other end of the second branch 143b and the other end of the third branch are connected to the support base 141. Figure 7 As shown, the shaft pin 220 can be used to connect the rotation drive device 142 and the first branch 143a. Figures 5 to 7 As shown, the rotary drive device 142 can push or pull the shaft pin 220 to move, and the shaft pin 220 drives the connecting block 143 connected thereto to move, and then the connecting block 143 drives the supporting seat 141 connected thereto to rotate around the supporting column 110.

[0045] It should be noted that the connecting block 143 is not limited to the Y-shape of the aforementioned embodiment, but may also have other forms. For example, the connecting block 143 may be linear, with one end of the linear connecting block 143 connected to the rotation drive device 142 and the other end connected to the support base 141. In short, any connection structure that can connect the rotation drive device 142 and the support base 141 and enable the rotation drive device 142 to drive the support base 141 to rotate can be used as the connecting block 143.

[0046] refer to Figures 5 to 7 As shown, the lifting mechanism 130 includes a lifting drive device 134 and a lifting support member, and the lifting support member includes a first support member 131, a second bearing 132 and a second support member 133. The lifting drive device 134 can drive the robot arm 120 to move up and down along the guide shaft 150 through the first support member 131, the second bearing 132 and the second support member 133. Figure 7 As shown, multiple guide shafts 150 are distributed around the axis of the support column 110. The lower end of each guide shaft 150 is fixedly connected to the support seat 141, and the upper end of each guide shaft 150 is slidably connected to the first support member 131 in the vertical direction through a linear bearing 160. The linear bearing 160 is sleeved on the outer circumference of the guide shaft 150, and the linear bearing 160 can move up and down along the guide shaft 150. The first support member 131 is fixedly connected to the linear bearing 160 and sleeved on the outer circumference of the linear bearing 160. The first support member 131 can move up and down along the guide shaft 150 together with the linear bearing 160. The top end of the first support member 131 is fixedly connected to the sealing cover 190, and the robotic arm 120 is installed on the top surface of the sealing cover 190 (as shown in FIG. Figure 3 As shown), in this way, when the first support member 131 moves up and down, it can drive the robotic arm 120 to rise and fall. In addition, because the first support member 131 is fixedly connected to the linear bearing 160, and the two ends of the guide shaft 150 are respectively connected to the linear bearing 160 and the support seat 141, when the support seat 141 drives the multiple guide shafts 150 to rotate around the support column 110, the first support member 131 will also rotate around the support column 110 along with the guide shaft 150. It should be noted that the connection method between the lifting mechanism 130 and the robotic arm 120 is not limited to the aforementioned embodiment. Any connection structure that can connect the lifting mechanism 130 and the robotic arm 120 and can be driven by the lifting mechanism 130 to drive the robotic arm 120 to rise and fall is within the protection scope of this application. Other descriptions about the guide shaft 150 will be described in detail later and will not be expanded here.

[0047] The second bearing 132 is located between the first support member 131 and the second support member 133, and the first support member 131 is rotatably connected to the second support member 133 through the second bearing 132. In other words, when the first support member 131 rotates around the support column 110 along with the guide shaft 150, since the first support member 131 is rotatably connected to the second support member 133 through the second bearing 132, the first support member 131 will not drive the second support member 133 to rotate around the support column 110. Preferably, the second bearing 132 is a cross roller bearing. Compared with other types of bearings (such as deep groove ball bearings), the bearing clearance (the clearance between the roller and the inner and outer rings) of the cross roller bearing is smaller, which helps to improve the phenomenon of tilting or shaking of the robotic arm 120 and improve the stability of the operation of the robotic arm 120. Figure 7 In the embodiment, the two second bearings 132 are arranged adjacent to each other. Preferably, Figure 7 The two second bearings 132 in the embodiment are both cross roller bearings, which can further reduce the bearing clearance. Of course, the number of the second bearings 132 is not limited to Figure 7 For example, there can be only 1 or 3 of them.

[0048] Furthermore, the first support member 131, the second bearing 132, and the second support member 133 cannot move relative to each other in the vertical direction. In other words, when one of the three moves up or down in the vertical direction, the remaining two will move up or down with it. This coordinated movement can be achieved by clamping the second bearing 132 between the first support member 131 and the second support member 133. For example, the lifting drive 134 can drive the second support member 133 to move the first support member 131 and the robotic arm 120 up or down.

[0049] As previously described, the rotary drive device 142 can push or pull the axle pin 220 to move, which in turn drives the connected connecting block 143 to move, and the connecting block 143 in turn drives the connected support base 141 to rotate about the support column 110. Because multiple guide shafts 150 are connected to the support base 141, the rotation of the support base 141 drives the multiple guide shafts 150 to rotate about the support column 110. This application does not limit the number of guide shafts 150, and the number of guide shafts 150 can be 3, 4, 5, or 6, etc.

[0050] refer to Figure 7As shown, the guide shaft 150 is connected to the support base 141 in the following manner: the support base 141 is formed with a plurality of through holes. When viewed from the perspective of the accompanying drawings, the plurality of through holes are distributed around the axis of the support column 110. The lower ends of the plurality of guide shafts 150 are respectively inserted into the corresponding through holes. In this way, the connection between the guide shaft 150 and the support base 141 is achieved. The bottom surfaces of the plurality of guide shafts 150 can be flush with the bottom surface of the support base 141. In other words, the plurality of guide shafts 150 have the same horizontal installation reference surface, namely, the bottom surface of the support base 141.

[0051] When the multiple guide shafts 150 are installed and matched with the support base 141, there is a verticality constraint relationship and a concentricity constraint relationship between the multiple guide shafts 150 and the support base 141. The verticality constraint relationship requires that the multiple guide shafts 150 are perpendicular to a horizontal plane in the support base 141. The horizontal plane is the installation reference plane of the multiple guide shafts 150. For example, the bottom surface of the support base 141 mentioned above can be used as the installation reference plane. Of course, the installation reference plane can be other horizontal planes in the support base 141, not limited to the bottom surface of the support base 141. Making the installation reference planes of the multiple guide shafts 150 the same can reduce the requirements for the verticality matching tolerance between the multiple guide shafts 150 and the support base 141, and reduce the processing cost of the support base 141. The concentricity constraint relationship requires that the projection distances between the axes of multiple guide shafts 150 and the support seat 141 on the horizontal plane be the same. Making the installation reference surfaces of multiple guide shafts 150 the same can reduce the requirements for the concentricity fitting tolerances between the multiple guide shafts 150 and the support seat 141, and reduce the processing cost of the support seat 141.

[0052] Alternatively, the plurality of guide shafts 150 may be connected to the first support member 131 and the support seat 141 in the following manner. Figure 7 The alternative solution is described. Specifically, the upper end of each guide shaft 150 is fixedly connected to the first support member 131, and the lower end of each guide shaft 150 is slidably connected to the support seat 141 through a corresponding linear bearing 160. The linear bearing 160 is fixedly connected to the support seat 141, and the linear bearing 160 is sleeved on the outer circumference of the guide shaft 150. The guide shaft 150 and the linear bearing 160 are slidably connected in the vertical direction. Similar to the above, when multiple linear bearings 160 are matched with the support seat 141, there is a verticality constraint relationship and a concentricity constraint relationship between the multiple linear bearings 160 and the multiple guide shafts 150 and the support seat 141. Making the reference surfaces of the multiple linear bearings 160 the same can reduce the requirements for the verticality and concentricity matching tolerances between the multiple linear bearings 160 and the multiple guide shafts 150 and the support seat 141, and reduce the processing cost of the support seat 141.

[0053] Alternatively, the multiple guide shafts 150 can be connected to the first support member 131 and the support base 141 in the following manner. Specifically, the upper end of each guide shaft 150 is fixedly connected to the first support member 131, and the lower end of each guide shaft 150 is fixedly connected to the support base 141. Each guide shaft 150 has a telescopic function in the vertical direction. When the lifting drive device 134 drives the first support member 131 to rise and fall, the first support member 131 drives the guide shafts 150 to extend and retract.

[0054] Here we will explain how the rotating mechanism 140 drives the robotic arm 120 to rotate around the support column 110. First, the rotating drive device 142 drives the support base 141 to rotate around the support column 110; then, the support base 141 drives the multiple guide shafts 150 connected to it to rotate around the support column 110; then, the guide shafts 150 drive the first support member 131 connected to it to rotate around the support column 110; finally, the first support member 131 drives the sealing cover 190 to rotate, and the sealing cover 190 drives the robotic arm 120 installed on its top surface to rotate around the support column 110. Figure 1 and Figure 2 As shown, through the above actions, the rotating mechanism 140 can drive the robot arm 120 to rotate between the first workstation 11 and the second workstation 12.

[0055] Return to the description of the lifting mechanism. Figures 4 to 8 As shown, the lifting mechanism 130 includes a lifting drive device 134, a first lifting block 135, a second lifting block 136 and a linear guide rail 137. The lifting drive device 134 is mounted on a mounting plate 230, and the mounting plate 230 is connected to the base 180 via a fixing member 240, thereby achieving a fixed connection between the lifting drive device 134 and the base 180. The lifting drive device 134 includes but is not limited to a cylinder. The linear guide rail 137 is fixedly connected to the base 180 via a fixing member 240. The first lifting block 135 is slidably connected to the linear guide rail 137, and the first lifting block 135 can move up and down along the linear guide rail 137. The first lifting block 135 is connected to the second lifting block 136, so that when the first lifting block 135 moves up and down along the linear guide rail 137, the first lifting block 135 can drive the second lifting block 136 to move up and down together. The second lifting block 136 is fixedly connected to the second support member 133 above it. When the second lifting block 136 moves up and down, it drives the second support member 133 to move up and down with it. The power output shaft 134a of the lifting drive 134 is connected to the first lifting block 135, so that the lifting drive 134 can drive the first lifting block 135 to move up and down.

[0056] Based on the above description of the lifting mechanism, how the lifting drive device 134 drives the robot arm 120 to move up and down is described here. Figure 7The figure shows the state of the robot arm 120 after it rises. Figure 8 The figure shows the state of the robot arm 120 after it is lowered. Figure 7 After the rise, the status is adjusted to Figure 8 The process of the state after the decline may include: first, referring to Figure 4 and Figure 7 As shown, the lifting drive device 134 drives the first lifting block 135 connected thereto to move downward, and the first lifting block 135 slides downward along the linear guide rail 137; then, referring to Figure 7 and Figure 8 As shown, the first lifting block 135 drives the second lifting block 136 connected thereto to move downward together during the downward movement; then, since the second lifting block 136 is fixedly connected to the second support member 133, the second lifting block 136 drives the second support member 133 to move downward together during the downward movement; finally, as mentioned above, the first support member 131, the second bearing 132 and the second support member 133 cannot move relative to each other in the vertical direction. Therefore, the second support member 133 drives the second bearing 132 and the first support member 131 to move downward together during the downward movement, and then the first support member 131 drives the robotic arm 120 to descend under the guidance of the guide shaft 150.

[0057] The above description of the actions describes the process of the lifting drive device 134 driving the robotic arm 120 to descend. The process of the lifting drive device 134 driving the robotic arm 120 to ascend is similar. A brief description is as follows: First, the lifting drive device 134 drives the first lifting block 135 connected thereto to move upward, and the first lifting block 135 slides upward along the linear guide rail 137; then, the first lifting block 135 drives the second lifting block 136 connected thereto to move upward during the upward movement; then, the second lifting block 136 drives the second support member 133 to move upward during the upward movement; finally, the second support member 133 drives the second bearing 132 and the first support member 131 to move upward during the upward movement, and then the first support member 131 drives the robotic arm 120 to ascend under the guidance of the guide shaft 150.

[0058] In order to more clearly understand the substrate transfer device in this application, the process of transferring the substrate between the first station 11 and the second station 12 is described here. Figure 1 and Figure 2 As shown, first, the robot arm 120 returns to Figure 1 In the initial state shown, the rotating mechanism drives the robot arm 120 to rotate to the first station 11, and the lifting mechanism drives the robot arm 120 to descend to Figure 8then, the external manipulator feeds the substrate 40 from the entrance curtain 30, and places the substrate 40 in the first station 11, as Figure 1 Finally, the lifting mechanism drives the robotic arm 120 to rise to lift the substrate 40 from below the substrate 40, the rotating mechanism drives the robotic arm 120 to transfer the substrate 40 from the first station 11 to above the second station 12, and the lifting mechanism drives the robotic arm 120 to descend to place the substrate 40 on the second station 12. In this way, the substrate 40 is transferred from the first station 11 to the second station 12.

[0059] After processing the substrate 40, the lifting mechanism first drives the robotic arm 120 upward, lifting the substrate 40 from the second workstation 12 from below. The rotation mechanism then drives the robotic arm 120 to transfer the substrate 40 from the second workstation 12 to above the first workstation 11. Next, the lifting mechanism drives the robotic arm 120 downward, placing the substrate 40 at the first workstation 11, where it awaits retrieval by an external robotic arm. During the process of lifting, placing, and transferring the substrate 40, the robotic arm 120 remains below the substrate 40.

[0060] refer to Figure 7 and Figure 8 As shown, in one embodiment, a sealing cover 190 is provided above the support column 110, the first support member 131 and the second support member 133, and the sealing cover 190 seals the accommodating cavity 181 described later. Specifically, the sealing cover 190 includes a second side wall 191 and a top wall 192, one end of the second side wall 191 is connected to the top wall 192, and the other end extends downward. In this way, the top wall 192 is located above the support column 110, the first support member 131 and the second support member 133, and the second side wall 191 surrounds the support column 110, the first support member 131 and the second support member 133. Among them, the first support member 131 is fixedly connected to the sealing cover 190 (i.e., the bottom surface of the top wall 192), and the robotic arm 120 is provided on the top surface of the sealing cover 190 (i.e., the top surface of the top wall 192).

[0061] In one embodiment, the substrate transfer device 100 further includes a sealing member. Specifically, the base 180 has a receiving cavity 181 for mounting the substrate transfer device, and the receiving cavity 181 has a first side wall 181a; the second side wall 191 of the sealing cover 190 is disposed opposite to the first side wall 181a of the receiving cavity 181; and the sealing member is located between the first side wall 181a and the second side wall 191. In one embodiment, the sealing member is a multi-layer sealing ring 210, which is located between the second side wall 191 of the sealing cover 190 and the first side wall 181a of the base 180. Figure 5 and Figure 8As shown, the sealing cover 190 has two annular grooves 193 . The grooves 193 are located on the second side wall 191 , and the openings of the grooves 193 face the first side wall 181 a of the base 180 . Figure 8 A multi-layer sealing ring 210 is shown in FIG. 1 , wherein a portion of the multi-layer sealing ring 210 is located in the groove 193, and a portion of the multi-layer sealing ring 210 located outside the groove 193 contacts the first side wall 181a of the base 180. Figure 7 and Figure 8 As shown in FIG, a process chamber 10 may be formed within the base 180. A gap S may exist between the second sidewall 191 and the first sidewall 181a, connecting the process chamber 10 to the outside world (e.g., the atmosphere). The multi-layer sealing ring 210 can seal the gap S between the sealing cover 190 and the base 180, thereby preventing the process chamber 10 from communicating with the outside world through the gap S. This prevents gas (e.g., hydrogen) in the process chamber 10 from leaking out through the gap S, and prevents external contaminants from entering the process chamber 10 through the gap S and contaminating the substrate.

[0062] The present application does not limit the number of grooves 193 or the number of multi-layer sealing rings 210. For example, the number of grooves 193 can be one or three, and the number of multi-layer sealing rings 210 can be two or three. Furthermore, the number of grooves 193 can be equal to or different from the number of multi-layer sealing rings 210. The multi-layer sealing rings 210 increase the sealing contact area, thereby improving the sealing effect.

[0063] As an alternative, instead of using the multi-layer seal 210 to seal the base 180 and the sealing cover 190, a magnetic fluid seal may be used to seal the base 180 and the sealing cover 190, or a Variseal seal may be used to seal the base 180 and the sealing cover 190. In some embodiments, multiple of the multi-layer seal 210, the Variseal seal, and the magnetic fluid seal may be used simultaneously to seal the base 180 and the sealing cover 190.

[0064] In another aspect, the present application further provides a substrate processing device, which includes the substrate transfer device as described above. The substrate processing device can be a substrate annealing device, a substrate cleaning device, or a device for depositing a material layer on a substrate.

[0065] The basic concepts have been described above. It will be apparent to those skilled in the art that the above disclosures are merely examples and do not limit the present application. Although not explicitly stated herein, those skilled in the art may make various modifications, improvements, and revisions to the present application. Such modifications, improvements, and revisions are suggested in the present application and remain within the spirit and scope of the exemplary embodiments of the present application.

[0066] At the same time, this application uses specific terms to describe the embodiments of this application. For example, "one embodiment," "an embodiment," and / or "some embodiments" refer to a certain feature, structure, or characteristic related to at least one embodiment of this application. Therefore, it should be emphasized and noted that "one embodiment," "an embodiment," or "an alternative embodiment" mentioned twice or multiple times in different locations in this specification does not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of this application may be appropriately combined.

[0067] Similarly, it should be noted that, in order to simplify the description of this application and thus facilitate understanding of one or more embodiments of the application, the foregoing description of the embodiments of this application sometimes combines multiple features into a single embodiment, figure, or description thereof. However, this disclosure method does not mean that the subject matter of this application requires more features than those recited in the claims. In fact, the features of an embodiment may be fewer than all the features of the individual embodiments disclosed above.

[0068] In some embodiments, numbers are used to describe the quantity of components and attributes. It should be understood that such numbers used in the description of the embodiments are modified by the modifiers "about", "approximately" or "substantially" in some examples. Unless otherwise stated, "about", "approximately" or "substantially" indicate that the numbers are allowed to vary by ±20%. Accordingly, in some embodiments, the numerical parameters used in the description and claims are approximate values, which may change according to the required features of individual embodiments. In some embodiments, the numerical parameters should take into account the specified significant digits and adopt the general method of retaining digits. Although the numerical domains and parameters used to confirm the breadth of their range in some embodiments of the present application are approximate values, in specific embodiments, the settings of such numerical values ​​are as accurate as possible within the feasible range.

[0069] Although the present application has been described with reference to the current specific embodiments, ordinary technicians in this technical field should recognize that the above embodiments are only used to illustrate the present application, and various equivalent changes or substitutions can be made without departing from the spirit of the present application. Therefore, as long as the changes and modifications to the above embodiments are within the scope of the essential spirit of the present application, they will fall within the scope of the claims of the present application.

Claims

1. A substrate transfer device, characterized in that: include: Support column (110); A robotic arm (120) for carrying a substrate (40); A lifting mechanism (130) includes a lifting drive device (134) and a lifting support member, wherein the lifting drive device (134) is used to drive the lifting support member to move up and down, and the lifting support member includes a first support member (131), and the first support member (131) is fixedly connected to the mechanical arm (120) to drive the mechanical arm (120) to move up and down; a rotating mechanism (140), comprising a support seat (141), wherein the rotating mechanism (140) is rotatably connected to the support column (110) via the support seat (141), and the rotating mechanism (140) is used to drive the mechanical arm (120) and the first support member (131) to rotate around the support column (110); as well as A plurality of guide shafts (150) are distributed around the axis of the support column (110), wherein one end of each guide shaft (150) is connected to the support seat (141), and the other end is connected to the first support member (131), so that when the support seat (141) rotates, the first support member (131) and the robotic arm (120) are driven to rotate.

2. The substrate transfer device according to claim 1, wherein: The rotating mechanism (140) further comprises a rotating drive device (142) and a connecting block (143), wherein one end of the connecting block (143) is connected to the rotating drive device (142), and the other end is connected to the supporting seat (141).

3. The substrate transfer device according to claim 2, wherein: The connecting block (143) is Y-shaped, one end of the first branch in the connecting block (143) is connected to the rotation drive device (142), the other end of the first branch is connected to one end of the second branch and one end of the third branch in the connecting block (143), and the other end of the second branch and the other end of the third branch are both connected to the support seat (141).

4. The substrate transfer device according to claim 1, wherein: The invention also includes a first bearing (170), wherein the first bearing (170) is located between the support seat (141) and the support column (110), and the support seat (141) and the support column (110) are rotatably connected via the first bearing (170).

5. The substrate transfer device according to claim 1, wherein: One end of each guide shaft (150) is slidably connected to the first support member (131) via a linear bearing (160), and the other end is fixedly connected to the support seat (141); Or one end of each guide shaft (150) is fixedly connected to the first support member (131), and the other end is slidably connected to the support seat (141) via a linear bearing; Or one end of each guide shaft (150) is fixedly connected to the first support member (131), and the other end is fixedly connected to the support seat (141), wherein each guide shaft (150) is a telescopic structure along the vertical direction.

6. The substrate transfer device according to claim 1, wherein: The lifting support member further includes a second bearing (132) and a second support member (133), wherein the second bearing (132) is located between the first support member (131) and the second support member (133), wherein the first support member (131) is rotatably connected to the second support member (133) via the second bearing (132), and the lifting drive device (134) is used to drive the second support member (133) to drive the first support member (131) and the robotic arm (120) to lift and lower.

7. The substrate transfer device according to claim 6, wherein: The second bearing (132) is a cross roller bearing.

8. The substrate transfer device according to claim 6, wherein: The invention also includes a sealing cover (190) and a sealing member, wherein one end of the support column (110) is connected to the base (180), the base (180) has a receiving cavity (181), the sealing cover (190) is arranged above the support column (110), the first support member (131) and the second support member (133), and seals the receiving cavity (181), the receiving cavity (181) has a first side wall (181a), the sealing cover (190) has a second side wall (191) opposite to the first side wall (181a), and the sealing member is located between the first side wall (181a) and the second side wall (191), wherein the first support member (131) is fixedly connected to the sealing cover (190), and the robotic arm (120) is arranged on the top surface of the sealing cover (190).

9. The substrate transfer device according to claim 8, wherein: The sealing element comprises any one or more of a multi-layer sealing ring (210), a Variseal sealing ring and a magnetic fluid sealing element.

10. A substrate processing device, characterized in that: The substrate transfer device comprises the substrate transfer device according to any one of claims 1 to 9.

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