Solid precursor conveying device and conveying method

Abstract

According to the solid precursor conveying device and method, the corresponding tray partition plates and the annular insertion plates are arranged in the reaction cavities of the trays, so that the flowing of carrier gas can be blocked, the flowing path of the carrier gas is changed, the flowing time of the carrier gas in the conveying device from an inlet to an outlet is prolonged, and the conveying efficiency is improved. The contact area of the carrier gas and the solid precursor is increased, so that the sublimation efficiency is improved, and the problems that when the solid precursor is conveyed through the carrier gas, the flowing path is limited, saturated steam pressure is difficult to achieve, and the conveying flow is unstable are solved.

Description

Technical Field

[0001] The present invention belongs to the field of integrated circuit manufacturing and relates to a solid precursor delivery device and a delivery method. Background Art

[0002] In the field of integrated circuit manufacturing, atomic layer deposition (ALD) technology, as a chemical vapor deposition technology, has been widely used in advanced integrated circuit processes to prepare coatings and thin films because of its advantages such as excellent three-dimensional conformality, large-area deposition uniformity, and high-precision film thickness control capabilities in structures with high aspect ratios.

[0003] Generally speaking, ALD technology uses a carrier gas to alternately deliver pulses of a gaseous precursor to the reaction chamber, where a chemical adsorption reaction forms a single atomic layer of film covering the substrate surface. If a solid precursor is used, it is usually placed in a sublimator and heated to the sublimation temperature, thereby converting the solid precursor into a gaseous compound that can be transported by the carrier gas and then delivered to the reaction chamber. However, solid precursors are sensitive to pressure and temperature and are difficult to evaporate at a controllable rate. Therefore, saturating the precursor concentration in the carrier gas and delivering it to the downstream deposition system at a stable rate is a challenge.

[0004] To solve this problem, most existing solid precursor delivery devices use stacked trays and place the ground solid precursor at the bottom of each layer of trays so that the solid precursor is in contact with the gas phase. However, since the effective utilization area is only the bottom area of ​​the tray, the effective contact area between the carrier gas and the solid precursor in the delivery device is relatively small, which still cannot meet the needs.

[0005] Therefore, it is necessary to provide a solid precursor delivery device and delivery method. Summary of the Invention

[0006] In view of the above-mentioned shortcomings of the prior art, an object of the present invention is to provide a solid precursor delivery device and a delivery method, so as to solve the problem that the solid precursor delivery device in the prior art is difficult to meet application requirements.

[0007] To achieve the above-mentioned and other related objectives, the present invention provides a solid precursor delivery device, comprising:

[0008] A housing, wherein the housing is provided with an air source hole and an air exhaust hole;

[0009] a first tray, the first tray being disposed inside the housing and comprising a first tray side wall and a first tray bottom, wherein the first tray bottom and the first tray side wall form a first reaction cavity;

[0010] a first tray partition, the first tray partition being disposed inside the first reaction cavity and comprising a first plate-shaped partition arranged crosswise, with its end contacting the side wall of the first tray and its bottom contacting the bottom of the first tray, and a first annular partition sleeved on the first plate-shaped partition, with its bottom contacting the bottom of the first tray and surrounding the crosswise position;

[0011] a second tray, the second tray being disposed inside the housing and stacked in sequence with the first tray, comprising a second tray side wall and a second tray bottom, wherein the second tray bottom and the second tray side wall form a second reaction cavity;

[0012] a second tray partition, the second tray partition being arranged inside the second reaction cavity, comprising a second plate-shaped partition arranged crosswise, with its end contacting the side wall of the second tray and its bottom contacting the bottom of the second tray, and a second annular partition sleeved on the second plate-shaped partition, with its bottom contacting the bottom of the second tray and surrounding the crosswise position;

[0013] annular plug plates, the annular plug plates comprising a first annular plug plate disposed within the first reaction cavity, sleeved on the first plate-shaped partition plate, with a gap between its bottom and the bottom of the first tray, and located on the inner ring of the first annular partition plate; and a second annular plug plate disposed within the second reaction cavity, sleeved on the second plate-shaped partition plate, with a gap between its bottom and the bottom of the second tray, and located on the inner ring of the second annular partition plate; and a fourth annular plug plate disposed on the outer ring of the second annular partition plate;

[0014] a first air inlet and a second air inlet, wherein the first air inlet passes through the bottom of the first tray and is disposed at an intersection of the first plate-shaped partition inside the first reaction cavity, and the second air inlet passes through the bottom of the second tray and is disposed at an intersection of the second plate-shaped partition inside the second reaction cavity, and the first air inlet, the second air inlet, and the gas source hole are connected to form an air inlet channel;

[0015] A first gas outlet and a second gas outlet, wherein the first gas outlet passes through the bottom of the first tray and is arranged between the side wall of the first tray and the second annular insert plate inside the first reaction cavity; the second gas outlet passes through the bottom of the second tray and is arranged on the inner circle of the third annular insert plate inside the second reaction cavity; and the first gas outlet, the second gas outlet, the first reaction cavity, the second reaction cavity and the exhaust hole are all connected to form a gas outlet channel.

[0016] Optionally, the annular insert plate, the tray partition plate and the gas outlet arranged inside the same reaction cavity all have a height difference.

[0017] Optionally, the number of plate-shaped partitions arranged inside the same reaction cavity includes M, and M>2; the number of annular partitions arranged inside the same reaction cavity includes N, and N>1; the number of annular inserts arranged inside the same reaction cavity is T, and T>2.

[0018] Optionally, the first annular plug plate and the second annular plug plate have the same gap or different gaps with the bottom of the first pallet; the third annular plug plate and the fourth annular plug plate have the same gap or different gaps with the bottom of the second pallet.

[0019] Optionally, the first pallet, the first pallet partition and the corresponding annular plug plate include an integrally formed structure or an assembled structure; the second pallet, the second pallet partition and the corresponding annular plug plate include an integrally formed structure or an assembled structure.

[0020] Optionally, the assembly method of the first pallet partition and the corresponding annular insert plate includes a card slot assembly; the assembly method of the second pallet partition and the corresponding annular insert plate includes a card slot assembly.

[0021] Optionally, after assembly, the first pallet, the first pallet partition, the first annular plug plate, the second annular plug plate, the first air inlet and the first air outlet form a centrally symmetrical figure; after assembly, the second pallet, the second pallet partition, the third annular plug plate, the fourth annular plug plate, the second air inlet and the second air outlet form a centrally symmetrical figure.

[0022] Optionally, a seal is provided between the first tray and the second tray that are stacked in sequence.

[0023] The present invention also provides a method for delivering a solid precursor, comprising the following steps:

[0024] Providing any of the above-mentioned solid precursor delivery devices;

[0025] placing a solid precursor on the first tray bottom and the second tray bottom;

[0026] Assembling the annular insert plate on the corresponding tray partition to place it in the corresponding reaction cavity;

[0027] The first tray and the second tray are stacked and assembled in sequence in the housing, and the solid precursor delivery device is closed after the assembly is completed.

[0028] Optionally, the method further includes placing the solid precursor on a corresponding tray partition and / or a corresponding annular insert.

[0029] As described above, the solid precursor conveying device and conveying method of the present invention can block the flow of carrier gas by arranging corresponding tray partitions and annular inserts in the reaction cavity of the tray, thereby changing the carrier gas flow path, extending the flow time of the carrier gas from the inlet to the outlet in the conveying device, and increasing the contact area between the carrier gas and the solid precursor, thereby improving its sublimation efficiency, and solving problems such as limited flow path, difficulty in reaching saturated vapor pressure, and unstable conveying flow when conveying solid precursors through carrier gas. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Figure 1 Shown is a schematic structural diagram of the assembled solid precursor delivery device in an embodiment of the present invention.

[0031] Figure 2 It is a schematic structural diagram of a first tray with a first tray partition in an embodiment of the present invention.

[0032] Figure 3 It is a schematic structural diagram of a second tray with a second tray partition in an embodiment of the present invention.

[0033] Figure 4 It is a schematic structural diagram showing the assembly of the annular insert plate and the first tray partition in an embodiment of the present invention.

[0034] Figure 5 Display as Figure 4 Schematic diagram of the cross-sectional structure after the middle annular insert and the first tray partition are assembled.

[0035] Figure 6 It is a schematic structural diagram showing the assembly of the annular insert plate and the second tray partition in an embodiment of the present invention.

[0036] Figure 7 Display as Figure 6 Schematic diagram of the cross-sectional structure after the middle annular insert and the second tray partition are assembled.

[0037] Figure 8 Shown is a schematic cross-sectional structure diagram of the assembled solid precursor delivery device in an embodiment of the present invention.

[0038] Figure 9 Shown is a simulation diagram of carrier gas flow in a solid precursor delivery device according to an embodiment of the present invention.

[0039] Figure 10 Shown is a comparison chart of mass fraction-gas flow time in the solid precursor delivery device in the embodiment of the present invention and the existing solid precursor delivery device.

[0040] Description of Reference Numerals

[0041] 100 Shell

[0042] 101 air source hole

[0043] 102 exhaust vent

[0044] 210 First Pallet

[0045] 211 First Reaction Cavity

[0046] 220 Second Pallet

[0047] 221 Second reaction cavity

[0048] 310 First Pallet Partition

[0049] 311 first plate-shaped partition

[0050] 312 First annular diaphragm

[0051] 320 Second Pallet Partition

[0052] 321 Second plate-shaped partition

[0053] 322 Second annular diaphragm

[0054] 411 First Ring Plate

[0055] 412 Second Ring Plate

[0056] 413 Third Ring Plate

[0057] 414 Fourth Ring Plate

[0058] 510 First air intake

[0059] 520 Second air intake

[0060] 610 First air outlet

[0061] 620 Second air outlet

[0062] 700 seals DETAILED DESCRIPTION

[0063] The following describes the embodiments of the present invention through specific examples. Those skilled in the art will readily understand the other advantages and benefits of the present invention from the disclosure herein. The present invention may also be implemented or applied through various other specific embodiments, and the details in this specification may be modified or altered based on different viewpoints and applications without departing from the spirit of the present invention.

[0064] It should be noted that the illustrations provided in this embodiment are only used to schematically illustrate the basic concept of the present invention. Therefore, the illustrations only show components related to the present invention and are not drawn according to the number, shape and size of components in actual implementation. In actual implementation, the type, quantity and proportion of each component can be changed at will, and the component layout type may also be more complicated.

[0065] like Figures 1 to 8 This embodiment provides a solid precursor conveying device, which includes: a shell 100, a first tray 210, a first tray partition 310, a second tray 220, a second tray partition 320, an annular insert plate, a first air inlet 510, a second air inlet 520, a first air outlet 610 and a second air outlet 620.

[0066] The shell 100 is provided with an air source hole 101 and an exhaust hole 102; the first tray 210 is arranged inside the shell 100, including a first tray side wall and a first tray bottom, and the first tray bottom and the first tray side wall constitute a first reaction cavity 211; the first tray partition 310 is arranged inside the first reaction cavity 211, including a first plate-shaped partition 311 arranged crosswise, with the end contacting the first tray side wall and the bottom contacting the first tray bottom, and a first annular partition 312 sleeved on the first plate-shaped partition 311, with the bottom contacting the first tray bottom and surrounding the cross position; the second tray 220 is arranged inside the shell 100 and is in contact with the first tray bottom. The first trays 210 are stacked in sequence, including second tray side walls and a second tray bottom, wherein the second tray bottom and the second tray side walls constitute a second reaction cavity 221; the second tray partition 320 is arranged inside the second reaction cavity 221, including a second plate-shaped partition 321 arranged crosswise, with its end in contact with the second tray side walls and its bottom in contact with the second tray bottom, and a second annular partition 322 sleeved on the second plate-shaped partition 321, with its bottom in contact with the second tray bottom and surrounding the cross position; the annular insert includes a second plate-shaped partition 322 arranged inside the first reaction cavity 211, sleeved on the first plate-shaped partition 311, with a gap between its bottom and the first tray bottom, and located at the second reaction cavity 211. A first annular plug plate 411 on the inner ring of an annular partition 312 and a second annular plug plate 412 on the outer ring of the first annular partition 312, as well as a third annular plug plate 413 disposed inside the second reaction cavity 221, sleeved on the second plate-shaped partition 321, with a gap between the bottom and the bottom of the second tray, and located on the inner ring of the second annular partition 322; and a fourth annular plug plate 414 on the outer ring of the second annular partition 322; the first air inlet 510 passes through the bottom of the first tray and is disposed at the intersection of the first plate-shaped partition 311 inside the first reaction cavity 211, and the second air inlet 520 passes through the bottom of the second tray and is disposed inside the second reaction cavity 221. The first tray bottom 510 is located at the intersection of the second plate-shaped partition 321, and the first air inlet 510, the second air inlet 520 and the air source hole 101 are connected to form an air inlet channel; the first air outlet 610 passes through the bottom of the first tray and is arranged between the side wall of the first tray and the second annular plug-in plate 412 inside the first reaction cavity 211, the second air outlet 620 passes through the bottom of the second tray and is arranged on the inner circle of the third annular plug-in plate 413 inside the second reaction cavity 221, and the first air outlet 610, the second air outlet 620, the first reaction cavity 211, the second reaction cavity 221 and the exhaust hole 102 are all connected to form an air outlet channel.

[0067] In this embodiment, by arranging corresponding tray partitions and annular inserts in the reaction cavity of the tray, a blocking effect can be exerted on the flow of the carrier gas, thereby changing the flow path of the carrier gas, extending the flow time of the carrier gas from the inlet to the outlet in the conveying device, increasing the contact area between the carrier gas and the solid precursor, thereby improving its sublimation efficiency, and solving problems such as limited flow path, difficulty in reaching saturated vapor pressure, and unstable conveying flow when conveying solid precursors through carrier gas.

[0068] As an example, the number of the first trays 210 disposed inside the housing 100 is ≥1, and the number of the second trays 220 disposed inside the housing 100 is ≥1.

[0069] Specifically, such as Figure 1 and Figure 8 In this embodiment, the housing 100 and the tray are both cylindrical, but the shapes of the tray and the housing 100 are not limited thereto and can be selected as needed. Two first trays 210 and three second trays 220 are alternately stacked vertically within the housing 100 to form a tray set having five layers of trays. However, the number of layers of trays stacked within the housing 100 is not limited thereto and can be selected as needed, such as two, three, four, or six layers. Furthermore, the order of the first trays 210 and the second trays 220 can be set as needed.

[0070] Wherein, it is preferred that the carrier gas flows in a "bottom-up" mode, such as Figure 8 The middle dotted line illustrates the trajectory of the carrier gas in this embodiment, that is, after the carrier gas is introduced from the top "from top to bottom" into the lower area along the gas source hole 101, the second gas inlet 520, and the first gas inlet 510, it is introduced "from bottom to top" into the reaction cavity corresponding to each layer of tray through the second gas outlet 620 and the first gas outlet 610, etc. arranged at the bottom of the shell 100, and due to the tray partitions and annular inserts arranged corresponding to each reaction cavity, the flow of the carrier gas is blocked to change the flow path of the carrier gas, extend the flow time of the carrier gas from the inlet to the outlet in the conveying device, increase the contact area between the carrier gas and the solid precursor, so that the carrier gas and the solid precursor are in full contact, thereby improving its sublimation efficiency.

[0071] As an example, the number of plate-shaped partitions arranged inside the same reaction cavity may include M, and M>2; the number of annular partitions arranged inside the same reaction cavity may include N, and N>1; the number of annular inserts arranged inside the same reaction cavity may be T, and T>2.

[0072] For details, see Figure 2 、 Figure 4 and Figure 5In this embodiment, in the first reaction cavity 211 of the first tray 210, the first tray partition 310 is composed of two crossed first plate partitions 311 and one first annular partition 312 mounted on the first plate partition 311, and two annular plugs, namely a first annular plug 411 and a second annular plug 412, are provided on the first tray partition 310. That is, in this embodiment, in the first tray 210, M is 2, N is 1, and T is 2, but the values ​​of M, N, and T are not limited to this. They can be set according to needs, such as M can also be 3, 4, 5, etc., N can also be 2, 3, 4, etc., and T can also be 3, 4, 5, etc., and can be selected according to needs.

[0073] The end of the first plate-shaped partition 311 contacts the side wall of the first tray and the bottom contacts the bottom of the first tray. The first annular partition 312 is sleeved on the first plate-shaped partition 311 and the bottom contacts the bottom of the first tray. The first annular insert 411 is sleeved on the first plate-shaped partition 311 and is located on the inner circle of the first annular partition 312, with a gap between the bottom and the bottom of the first tray. The second annular insert 412 is sleeved on the first plate-shaped partition 311 and is located on the outer circle of the first annular partition 312, with a gap between the bottom and the bottom of the first tray. Figure 5 and Figure 8 After assembly, due to the arrangement of the first plate-shaped partition 311, the first annular partition 312, the first annular plug plate 411 and the second annular plug plate 412, the upper ends of the first plate-shaped partition 311 and the first annular partition 312 and the lower ends of the first annular plug plate 411 and the second annular plug plate 412 can be combined with the first reaction cavity 211 to form a carrier gas channel, thereby extending the flow time of the carrier gas from the inlet to the outlet in the conveying device and increasing the contact area between the carrier gas and the solid precursor.

[0074] Similarly, see Figure 3 、 Figure 6 and Figure 7 In this embodiment, in the second reaction cavity 221 of the second tray 220, the second tray partition 320 is composed of two crossed second plate-shaped partitions 321 and one second annular partition 322 mounted on the second plate-shaped partition 321, and two annular plugs, namely the third annular plug 413 and the fourth annular plug 414, are provided on the second tray partition 320. That is, in this embodiment, in the second tray 220, M is 2, N is 1, and T is 2, but the values ​​of M, N, and T are not limited to this. They can be set according to needs, such as M can also be 3, 4, 5, etc., N can also be 2, 3, 4, etc., and T can also be 3, 4, 5, etc., and can be selected according to needs.

[0075] The end of the second plate-shaped partition 321 contacts the side wall of the second tray and the bottom contacts the bottom of the second tray. The second annular partition 322 is sleeved on the second plate-shaped partition 321 and the bottom contacts the bottom of the second tray. The second annular insert 412 is sleeved on the second plate-shaped partition 321 and is located on the inner circle of the second annular partition 322, with a gap between the bottom and the bottom of the second tray. The third annular insert 413 is sleeved on the second plate-shaped partition 321 and is located on the outer circle of the second annular partition 322, with a gap between the bottom and the bottom of the second tray. Figure 7 and Figure 8 After assembly, due to the arrangement of the second plate-shaped partition 321, the second annular partition 322, the third annular plug plate 413 and the fourth annular plug plate 414, the second reaction cavity 221 can be combined at the upper ends of the second plate-shaped partition 321 and the second annular partition 322 and the lower ends of the third annular plug plate 413 and the fourth annular plug plate 414 to form a carrier gas channel, thereby extending the flow time of the carrier gas from the inlet to the outlet in the conveying device and increasing the contact area between the carrier gas and the solid precursor.

[0076] As an example, it is preferred that the annular insert plate, the tray partition plate and the gas outlet arranged inside the same reaction cavity all have a height difference.

[0077] For details, see Figure 5 In this embodiment, the height between the lower ends of the first annular plug plate 411 and the second annular plug plate 412 located in the first reaction cavity 211 and sleeved on the first plate-shaped partition plate 311 and the bottom of the first tray is recorded as H11, the height between the top end of the first annular partition plate 312 and the bottom of the first tray is recorded as H12, and the height between the top end of the first gas outlet 610 and the bottom of the first tray is also selected as H12. Therefore, in the first reaction cavity 211, there is a height difference ΔH1 between the annular plug plate and the tray partition plate, that is, the difference between H12 and H11, and there is also a height difference ΔH1 between the annular plug plate and the gas outlet, so that a serpentine carrier gas channel can be formed in the corresponding reaction cavity, as shown in FIG. Figure 8 As shown by the dotted line, the flow time of the carrier gas from the inlet to the outlet in the conveying device can be further prolonged, thereby increasing the contact area between the carrier gas and the solid precursor.

[0078] Similarly, see Figure 7In this embodiment, the height between the lower ends of the third annular plug plate 413 and the fourth annular plug plate 414 located in the second reaction cavity 221 and sleeved on the second plate-shaped partition 321 and the bottom of the second tray is recorded as H21, the height between the top end of the second annular partition 322 and the bottom of the second tray is recorded as H22, and the height between the top end of the second gas outlet 620 and the bottom of the second tray is also selected as H22. Therefore, in the second reaction cavity 221, there is a height difference ΔH2 between the annular plug plate and the tray partition, that is, the difference between H22 and H21, and there is also a height difference ΔH2 between the annular plug plate and the gas outlet, so that a serpentine carrier gas channel can be formed in the corresponding reaction cavity, as shown in FIG. Figure 8 As shown by the dotted line, the flow time of the carrier gas from the inlet to the outlet in the conveying device can be further prolonged, thereby increasing the contact area between the carrier gas and the solid precursor.

[0079] There is no restriction on the selection of the numerical values ​​of the height values ​​H11, H12, H21, and H22, and they can be set as needed.

[0080] As an example, the first annular plug plate 411 and the second annular plug plate 412 have the same gap or different gaps with the first pallet bottom; the third annular plug plate 413 and the fourth annular plug plate 414 have the same gap or different gaps with the second pallet bottom.

[0081] Specifically, in this embodiment, the inner diameter range of the first annular plug plate 411 and the third annular plug plate 413 can be 55 to 65 mm, the inner diameter range of the second annular plug plate 412 and the fourth annular plug plate 414 can be 145 to 155 mm, the thickness range of the annular plug plate can be 1 to 3 mm, and the height range can be 8 to 24 mm. In order to assemble with the corresponding pallet partition, the annular plug plate can have 2 to 4 notches symmetrically distributed, and the notch depth can be 3 to 16 mm. The specific shape and data of the annular plug plate can be selected according to needs.

[0082] like Figure 2 As shown, the height range of the first tray 210 can be 30 to 50 mm; the number of the first air outlets 610 located on the bottom can be 8 to 16, and the height range of each first air outlet 610 can be 18 to 32 mm, and the inner diameter range can be 5 to 8 mm; the thickness range of the partition in the first tray partition 310 can be 1 to 4 mm, and the height range can be 18 to 32 mm.

[0083] like Figure 3As shown, the height range of the second tray 220 can be 30 to 50 mm; the number of the second air outlets 620 located on the bottom can be 4 to 16, and the height range of each second air outlet 620 can be 18 to 32 mm, and the inner diameter range can be 5 to 8 mm; the thickness range of the partition in the second tray partition 320 can be 1 to 4 mm, and the height range can be 18 to 32 mm.

[0084] The gaps between the first annular insert plate 411 and the second annular insert plate 412 and the bottom of the first tray, and the gaps between the third annular insert plate 413 and the fourth annular insert plate 414 and the bottom of the second tray can be set according to specific needs and are not subject to excessive restrictions.

[0085] As an example, the first pallet 210, the first pallet partition 310 and the corresponding annular insert may include an integrally formed structure or an assembled structure; the second pallet 220, the second pallet partition 320 and the corresponding annular insert may include an integrally formed structure or an assembled structure.

[0086] Specifically, in order to facilitate installation and ensure airtightness, in this embodiment, the first pallet 210 and its corresponding first pallet partition 310 adopt an integrally formed structure, and the first pallet partition 310 and the corresponding annular plug plate, that is, the first annular plug plate 411 and the second annular plug plate 412 are preferably assembled structures for easy installation and disassembly. Similarly, the second pallet 220, the second pallet partition 320 and the corresponding annular plug plates, that is, the third annular plug plate 413 and the fourth annular plug plate 414 adopt the same assembly method, but are not limited to this. In another embodiment, the corresponding pallets, pallet partitions and annular plug plates may also all adopt an assembled type or an integrally formed structure, and no excessive restrictions are made here.

[0087] As an example, the assembly method of the first tray partition 310 and the corresponding annular insert plate includes a slot-type assembly; the assembly method of the second tray partition 320 and the corresponding annular insert plate includes a slot-type assembly.

[0088] For details, see Figure 4 and Figure 6 In this embodiment, the first pallet partition 310 and the corresponding first annular plug plate 411 and the second annular plug plate 412 are assembled by a card slot type assembly. Similarly, the second pallet partition 320 and the corresponding third annular plug plate 413 and the fourth annular plug plate 414 are assembled by a card slot type assembly to facilitate the assembly of the pallet partition and the annular plug plate, but the assembly method of the pallet partition and the annular plug plate is not limited to this.

[0089] As an example, the assembled first pallet 210, the first pallet partition 310, the first annular plug plate 411, the second annular plug plate 412, the first air inlet 510 and the first air outlet 610 form a centrally symmetrical figure; the assembled second pallet 220, the second pallet partition 320, the third annular plug plate 413, the fourth annular plug plate 414, the second air inlet 520 and the second air outlet 620 form a centrally symmetrical figure.

[0090] For details, see Figure 8 In this embodiment, preferably after assembly, the first tray 210, the first tray partition 310, the first annular plug plate 411, the second annular plug plate 412, the first air inlet 510 and the first air outlet 610 form a centrally symmetrical figure. Similarly, preferably after assembly, the second tray 220, the second tray partition 320, the third annular plug plate 413, the fourth annular plug plate 414, the second air inlet 520 and the second air outlet 620 form a centrally symmetrical figure, thereby facilitating the machining of assembled components, facilitating assembly between components and stabilizing the flow of carrier gas, but the specific morphology after assembly is not limited thereto.

[0091] As an example, a seal may be provided between the first tray 210 and the second tray 220 that are stacked in sequence.

[0092] Specifically, such as Figure 8 In order to improve air tightness, a seal 700, such as an O-ring, is preferably provided between the first tray 210 and the second tray 220 stacked in sequence to achieve good assembly between the trays and prevent the carrier gas from running outside the transmission channel.

[0093] This embodiment also provides a method for delivering a solid precursor, comprising the following steps:

[0094] S1: providing the above-mentioned solid precursor delivery device;

[0095] S2: placing a solid precursor on the bottom of the first tray and the bottom of the second tray;

[0096] S3: Assembling the annular insert plate on the corresponding tray partition to place it in the corresponding reaction cavity;

[0097] S4: stacking the first tray and the second tray in sequence and assembling them in the shell. After the assembly is completed, the solid precursor delivery device is closed.

[0098] Specifically, the solid precursor is placed at the bottom of the tray, and the loading height of the solid precursor on the bottom of the tray must be lower than the annular insert to reserve a carrier gas channel. Furthermore, as needed, the solid precursor can also be placed on the corresponding tray partition and / or the corresponding annular insert to achieve sufficient contact between the solid precursor and the gas for material exchange, thereby increasing the contact area and contact time between the carrier gas and the solid precursor. Among them, if the solid precursor needs to be attached to the corresponding tray partition and / or annular insert, it is preferably attached using a sublimation-recrystallization method, a physical coating method, or a chemical reaction method to further improve the sublimation efficiency.

[0099] See Figure 9 and Figure 10 This embodiment also provides a simulation example of the solid precursor to further illustrate the application effect of the solid precursor delivery device.

[0100] Among them, in order to simplify the structural complexity of the solid precursor delivery device, in this simulation example, only one first tray and one second tray are set in the shell, and four symmetrically distributed first air outlets are set in the first tray, and eight symmetrically distributed second air outlets are set in the second tray. Nitrogen is selected as the carrier gas, the inlet flow rate is 100 sccm, and the initial position is the upper end of the inlet pipe.

[0101] Figure 9 The simulation results of the carrier gas flow are shown. As can be seen from the figure, the carrier gas flows from the gas source hole into the solid precursor delivery device and finally flows out of the exhaust hole. During this process, the tray partition and annular insert in the reaction cavity have a blocking effect on the carrier gas flow, which can change the flow path of the carrier gas.

[0102] Figure 10 The mass fraction-gas flow time comparison diagram of the solid precursor delivery device with a tray partition and an annular insert - curve A and the solid precursor delivery device without a tray partition and an annular insert - curve A' is compared. When nitrogen flows into the gas source hole and the mass fraction of nitrogen flowing out of the exhaust hole reaches 10 -20 The time required for gas to flow in the solid precursor delivery device with a tray partition and an annular plug-in plate is 33.98s, which is significantly longer than the time required for the solid precursor delivery device without a tray partition and annular plug-in plate, which is 19.44s. This shows that the solid precursor delivery device with a tray partition and annular plug-in plate can significantly prolong the flow time of the carrier gas from the gas source hole to the exhaust hole in the delivery device.

[0103] In summary, the solid precursor conveying device and conveying method of the present invention, by arranging corresponding tray partitions and annular inserts in the reaction cavity of the tray, can block the flow of carrier gas, thereby changing the carrier gas flow path, extending the flow time of the carrier gas from the inlet to the outlet in the conveying device, and increasing the contact area between the carrier gas and the solid precursor, thereby improving its sublimation efficiency, and solving problems such as limited flow path, difficulty in reaching saturated vapor pressure, and unstable conveying flow when conveying solid precursors through carrier gas.

[0104] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the present invention. Anyone skilled in the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by one of ordinary skill in the art without departing from the spirit and technical principles disclosed herein are intended to be covered by the claims of the present invention.

Claims

1. A solid precursor delivery device, characterized in that: The solid precursor delivery device comprises: A housing, wherein the housing is provided with an air source hole and an air exhaust hole; a first tray, the first tray being disposed inside the housing and comprising a first tray side wall and a first tray bottom, wherein the first tray bottom and the first tray side wall form a first reaction cavity; a first tray partition, the first tray partition being disposed inside the first reaction cavity and comprising a first plate-shaped partition arranged crosswise, with its end contacting the side wall of the first tray and its bottom contacting the bottom of the first tray, and a first annular partition sleeved on the first plate-shaped partition, with its bottom contacting the bottom of the first tray and surrounding the crosswise position; a second tray, the second tray being disposed inside the housing and stacked in sequence with the first tray, comprising a second tray side wall and a second tray bottom, wherein the second tray bottom and the second tray side wall form a second reaction cavity; a second tray partition, the second tray partition being arranged inside the second reaction cavity, comprising a second plate-shaped partition arranged crosswise, with its end contacting the side wall of the second tray and its bottom contacting the bottom of the second tray, and a second annular partition sleeved on the second plate-shaped partition, with its bottom contacting the bottom of the second tray and surrounding the crosswise position; annular plug plates, the annular plug plates comprising a first annular plug plate disposed within the first reaction cavity, sleeved on the first plate-shaped partition plate, with a gap between its bottom and the bottom of the first tray, and located on the inner ring of the first annular partition plate; and a second annular plug plate disposed within the second reaction cavity, sleeved on the second plate-shaped partition plate, with a gap between its bottom and the bottom of the second tray, and located on the inner ring of the second annular partition plate; and a fourth annular plug plate disposed on the outer ring of the second annular partition plate; a first air inlet and a second air inlet, wherein the first air inlet passes through the bottom of the first tray and is disposed at an intersection of the first plate-shaped partition inside the first reaction cavity, and the second air inlet passes through the bottom of the second tray and is disposed at an intersection of the second plate-shaped partition inside the second reaction cavity, and the first air inlet, the second air inlet, and the gas source hole are connected to form an air inlet channel; A first gas outlet and a second gas outlet, wherein the first gas outlet passes through the bottom of the first tray and is arranged between the side wall of the first tray and the second annular insert plate inside the first reaction cavity; the second gas outlet passes through the bottom of the second tray and is arranged on the inner circle of the third annular insert plate inside the second reaction cavity; and the first gas outlet, the second gas outlet, the first reaction cavity, the second reaction cavity and the exhaust hole are all connected to form a gas outlet channel.

2. The solid precursor delivery device according to claim 1, characterized in that: The annular inserting plate, the tray partition plate and the gas outlet arranged inside the same reaction cavity all have height differences.

3. The solid precursor delivery device according to claim 1, wherein: The number of plate-shaped partitions arranged inside the same reaction cavity is M, and M>2; the number of annular partitions arranged inside the same reaction cavity is N, and N>1; the number of annular inserts arranged inside the same reaction cavity is T, and T>2.

4. The solid precursor delivery device according to claim 1, wherein: The first annular plug plate and the second annular plug plate have the same gap or different gaps with the first pallet bottom; the third annular plug plate and the fourth annular plug plate have the same gap or different gaps with the second pallet bottom.

5. The solid precursor delivery device according to claim 1, wherein: The first tray, the first tray partition and the corresponding annular insert plate include an integrally formed structure or an assembled structure; the second tray, the second tray partition and the corresponding annular insert plate include an integrally formed structure or an assembled structure.

6. The solid precursor delivery device according to claim 1, wherein: The assembly method of the first tray partition and the corresponding annular insert plate includes a slot-type assembly; the assembly method of the second tray partition and the corresponding annular insert plate includes a slot-type assembly.

7. The solid precursor delivery device according to claim 1, wherein: After assembly, the first pallet, the first pallet partition, the first annular plug plate, the second annular plug plate, the first air inlet and the first air outlet form a centrally symmetrical figure; after assembly, the second pallet, the second pallet partition, the third annular plug plate, the fourth annular plug plate, the second air inlet and the second air outlet form a centrally symmetrical figure.

8. The solid precursor delivery device according to claim 1, wherein: A sealing member is provided between the first tray and the second tray which are stacked in sequence.

9. A method for delivering a solid precursor, characterized in that: The following steps are involved: Providing a solid precursor delivery device as described in any one of claims 1 to 8; placing a solid precursor on the first tray bottom and the second tray bottom; Assembling the annular insert plate on the corresponding tray partition to place it in the corresponding reaction cavity; The first tray and the second tray are stacked and assembled in sequence in the housing, and the solid precursor delivery device is closed after the assembly is completed.

10. The method for delivering a solid precursor according to claim 9, wherein: The method further includes placing the solid precursor on a corresponding tray partition and / or a corresponding annular insert.

Images