Self-adjusting closed furnace door structure and furnace tube equipment thereof

Abstract

The invention discloses a self-sealing-adjusting furnace door structure and furnace tube equipment thereof, and relates to the technical field of furnace tube equipment for atomic layer deposition, the self-sealing-adjusting furnace door structure comprises a furnace door fixing seat, a power shaft, a sealing disc, a follower fixing seat, an air cylinder body, a linear rotating lining and a furnace arm; a groove is formed in the power shaft in the axial direction, a follower is arranged in the groove in a sliding fit mode, and the follower is fixed to a follower fixing base; a cylinder body is fixed to the furnace door fixing seat, the output end of the cylinder body is connected with the upper end fixing seat, the upper end fixing seat is fixedly connected with the bearing seat assembly, and the bearing seat assembly is fixed to the top of the power shaft. The linear rotating bushing is fixed at the bottom of the furnace door fixing seat and is in sliding fit with the bottom of the power shaft; the furnace arm is fixedly connected with the side face of the power shaft and hinged to the sealing disc through a connecting shaft which allows the sealing disc to rotate around the axis of the connecting shaft. The self-adjusting sealing device has the advantage of self-adjusting sealing effect.

Description

Technical Field

[0001] The present invention relates to the technical field of furnace tube equipment for atomic layer deposition, and in particular to a self-adjusting and closed furnace door structure and furnace tube equipment thereof. Background Art

[0002] Atomic layer deposition (ALD) is a high-precision thin film deposition technology that achieves atomic-level film growth by sequentially introducing two or more gaseous precursors and leveraging their self-limiting chemical reactions on the substrate surface. This step-by-step reaction mechanism ensures highly controllable film thickness, excellent conformality, and superior density and uniformity.

[0003] Furnace tube equipment is crucial for achieving efficient adsorption and precise reaction of precursor molecules on the substrate surface during the ALD process. Furnace tubes provide a highly stable and uniform high-temperature environment, a necessary condition for the ALD chemical reaction to occur. The film's growth rate, crystallization quality, and ultimate performance are all closely related to the reaction temperature. Precise temperature control ensures the effective self-limiting reaction in each cycle and prevents undesirable gas-phase reactions. Therefore, furnace tubes are a key core component for ensuring ALD film quality and process stability, especially for large-area or batch deposition requiring uniformity.

[0004] To ensure a good seal on the furnace tube during the atomic layer deposition process, the current furnace door is a cantilever structure. This can easily lead to deflection, resulting in poor sealing performance. To address this deflection issue, some solutions use linear bearings and springs. This approach can improve the poor sealing caused by deflection to a certain extent, but it significantly increases the structural complexity and cost of the entire furnace door. Furthermore, current furnace doors often use two cylinders or a cylinder and motor drive to achieve vertical and rotational movement. Summary of the Invention

[0005] The present application provides a self-adjusting and closed furnace door structure and furnace tube equipment thereof, which have the advantage of a self-adjusting sealing effect.

[0006] The present application provides a self-adjusting and closed furnace door structure and furnace tube equipment thereof, which adopts the following technical solutions: A self-adjusting and closed furnace door structure and furnace tube equipment thereof, wherein a self-adjusting and closed furnace door structure comprises a furnace door fixing seat, a power shaft, a sealing disk, a follower fixing seat, a cylinder body, a linear rotating bushing and a furnace arm; the power shaft is provided with a groove along the axial direction, a follower is slidably fitted in the groove, and the follower is fixed on the follower fixing seat; the cylinder body is fixed to the furnace door fixing seat, and its output end is connected to the upper end fixing seat, the upper end fixing seat is fixedly connected to the bearing seat assembly, and the bearing seat assembly is fixed to the top of the power shaft; the linear rotating bushing is fixed to the bottom of the furnace door fixing seat and slidably fits with the bottom of the power shaft; the furnace arm is fixedly connected to the side of the power shaft, and the furnace arm and the sealing disk are hinged by a connecting shaft, and the connecting shaft allows the sealing disk to rotate around its axis.

[0007] Preferably, the groove of the power shaft is in the shape of a spiral curve, and the lead length of the spiral curve groove matches the linear stroke of the power shaft.

[0008] Preferably, the cross-sectional width of the spiral curved groove is greater than the width of the follower, and the radial gap between the follower and the groove is less than 0.5 mm.

[0009] Preferably, the outer side wall of the linear rotating bushing is fixedly connected to the furnace door fixing seat, and the inner ring of the linear rotating bushing is in rolling contact with the outer wall of the power shaft.

[0010] Preferably, the furnace arm includes a first axial hole and a second connecting hole, the sealing disk is provided with a second axial hole at a position corresponding to the first axial hole, and the connecting shaft passes through the first axial hole and the second axial hole to form a rotation fulcrum.

[0011] Preferably, the furnace arm is provided with a circular hole and a waist-shaped hole, an adjustable fixing seat is slidably fitted in the waist-shaped hole, an elastic support member is provided in the circular hole, one end of the elastic support member abuts the adjustable fixing seat, and the other end acts on the sealing disk.

[0012] Preferably, the axis of the connecting shaft and the axis of the power shaft are arranged perpendicularly and staggered, and the rotation plane of the sealing disk forms an angle with the axial movement direction of the power shaft.

[0013] Preferably, an annular cooling water trough is provided on the back side of the sealing disk, and the cooling water trough has a water inlet and a water outlet, and the water inlet and the water outlet are respectively located on opposite sides of the cooling water trough.

[0014] Preferably, a placement groove is provided on the front side of the sealing disk, and an elastic sealing strip is embedded in the placement groove.

[0015] Preferably, a furnace tube device comprises a quartz tube, a flange base and the above-mentioned self-adjusting closed furnace door structure, wherein the flange base is arranged at the open end of the quartz tube, and the sealing disk of the self-adjusting closed furnace door structure cooperates with the sealing surface of the flange base.

[0016] In summary, this application has the following beneficial effects: 1. This furnace door structure uses a cylinder to provide power. Through the groove and follower mechanism, the linear motion of the power shaft is converted into a precise compound motion, that is, linear motion to rotational motion and then to linear motion. As a result, the sealing disk can automatically adjust and achieve a tight seal during the closing process. It can achieve a good sealing effect through self-adjustment. At the same time, the up and down and rotational motion of the furnace door can be realized through the form of a cylinder, which simplifies the furnace door structure and has certain cost advantages.

[0017] 2. The spring in the round hole and the adjustment fixing seat in the waist-shaped hole provide adjustable elastic support points. When the furnace arm deflection is too large, the horizontal state of the sealing disk can be adjusted by adjusting the spring fixing seat at the waist hole end; effectively solving the problem of poor sealing caused by processing or excessive deflection of the furnace arm, thereby achieving a good sealing effect.

[0018] 3. This furnace tube equipment, based on the above-mentioned self-adjusting and closed furnace door structure, not only achieves sealing, but also serves as the end seal of the furnace tube, forming a complete closed cavity together with the quartz tube and flange base; this is crucial for applications that require maintaining a vacuum, specific atmosphere or high-pressure environment within the furnace tube. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 Schematic diagram of the internal structure of the furnace door structure in this embodiment; Figure 2 Schematic diagram of the overall structure of the furnace door structure in this embodiment; Figure 3 Schematic diagram of the overall structure of the furnace tube in this embodiment; Figure 4 Schematic diagram of the explosion structure between the furnace tube and the furnace door structure in this embodiment; Figure 5 This is a schematic structural diagram of the sealing plate falling along with the furnace arm in this embodiment; Figure 6 Schematic diagram of the internal cross-sectional structure of the furnace arm in this embodiment; Figure 7 This is a schematic diagram of the state of the furnace door during sealing in this embodiment; Figure 8 This is a schematic diagram of the second state of the furnace door during sealing in this embodiment; Explanation of the accompanying drawings: 11. Furnace door fixing seat; 12. Power shaft; 13. Sealing disk; 14. Follower fixing seat; 15. Linear rotary bushing; 16. Cylinder body; 17. Upper end fixing seat; 18. Furnace arm; 19. Connecting shaft; 110. Sealing strip; 111. Cooling water trough; 112. Water inlet; 113. Water outlet; 114. Adjusting fixing seat; 115. Spring; 116. Fixing bolt; 117. Metal washer; 118. Bearing seat assembly; 21. Quartz tube; 22. Flange base. DETAILED DESCRIPTION

[0020] The present application is described in further detail below in conjunction with the accompanying drawings. It is necessary to point out that the following specific implementation methods are only used to further illustrate the present application and cannot be understood as limiting the scope of protection of the present application. Technicians in this field can make some non-essential improvements and adjustments to the present application based on the above application content. Example

[0021] The present invention discloses a self-adjusting and closed furnace door structure and furnace tube equipment thereof, such as Figure 1 As shown, the self-adjusting closed furnace door structure includes a furnace door fixing seat 11, a power shaft 12 and a sealing disk 13. A groove is provided on the power shaft 12. A follower is provided in the groove on the power shaft 12. The follower is fixed on the follower fixing seat 14.

[0022] like Figure 1 and Figure 6 As shown, the threaded hole at the top of the power shaft 12 is fixedly connected to a metal washer 117 via a fixing bolt 116 , and a bearing seat assembly 118 is provided on the metal washer 117 .

[0023] like Figure 1 As shown, a linear rotating bushing 15 and a cylinder body 16 are fixedly mounted on the furnace door fixing seat 11, wherein the linear rotating bushing 15 is located and fixed at the bottom of the power shaft 12, and the output end of the cylinder body 16 is connected to the upper end fixing seat 17, the upper end fixing seat 17 is fixedly connected to the bearing seat assembly, the outer wall of the linear rotating bushing 15 is fixedly connected to the furnace door fixing seat 11, and the inner ring of the linear rotating bushing 15 is in rolling contact with the outer wall of the power shaft 12.

[0024] like Figure 1 As shown, the cylinder body 16 serves as the primary power source, with its output connected to the upper mounting 17. As the cylinder expands and contracts, it drives a series of components, generating the primary axial push and pull forces on the power shaft 12. A linear rotary bushing 15 is fixed to the furnace door mounting 11 and located at the bottom of the power shaft 12. The design of this linear rotary bushing 15 is crucial, allowing the power shaft 12 to simultaneously move linearly and rotate.

[0025] like Figure 1and Figure 2 As shown, the groove on the power shaft 12 cooperates with the follower fixed to the follower mounting base 14. When the power shaft 12 moves linearly under the propulsion of the cylinder, the follower slides along the shape of the groove. The groove is a helical curve, with a cross-sectional width greater than the width of the follower. The radial clearance between the follower and the groove is 0.2 mm. This sliding motion converts the linear motion of the power shaft 12 into synchronous rotational motion, enabling precise positioning and adjustment at specific locations.

[0026] like Figure 1 and Figure 2 As shown, through the above-mentioned compound movement, the sealing disk 13 is not only simply translated into place when closing the furnace door, but can also be slightly rotated or adjusted when finally contacting the furnace opening to better fit the furnace opening and compensate for possible slight gaps or unevenness.

[0027] like Figure 1 and Figure 2 As shown, this precise and synchronous linear and rotational linkage achieved by the follower and the groove enables the sealing disk 13 to self-adjust to the optimal sealing position, ensuring a close fit and uniform pressure with the furnace mouth surface.

[0028] like Figure 1 and Figure 2 As shown, through the combined motion of linear pushing and rotation, the sealing disc 13 can better fit the furnace opening, minimizing heat loss and gas leakage within the furnace, thereby improving furnace operating efficiency and safety. The cylinder provides stable and reliable power, and combined with the precisely designed grooves and followers, it can achieve automated and high-precision control of the furnace door opening and closing, reducing manual intervention.

[0029] like Figure 1 and Figure 2 As shown, self-adjustment means the structure can adapt to slight manufacturing tolerances, wear, or deformation caused by thermal expansion and contraction between the furnace door and opening. The sealing disc 13 can find the optimal sealing position during the closing process, extending the service life of the equipment. This tight seal reduces heat loss and lowers the energy consumption required for furnace operation, resulting in significant economic and environmental benefits.

[0030] like Figure 1 、 Figure 2 and Figure 5 As shown, a furnace arm 18 is fixedly mounted on one side of the power shaft 12 by bolts. The furnace arm 18 is connected to the sealing disk 13. When the furnace tube 21 needs maintenance, the furnace arm 18 can fall with the sealing disk 13.

[0031] like Figure 1 and Figure 2As shown, specifically, a first axial hole is provided on the furnace arm 18, and a second axial hole is provided on the sealing disk 13. The first axial hole of the furnace arm 18 and the second axial hole of the sealing disk 13 are connected by a connecting shaft 19, so that the sealing disk 13 can swing to a certain extent. The axis of the connecting shaft 19 is arranged perpendicularly and staggered with the axis of the power shaft 12. The rotation plane of the sealing disk 13 forms an angle with the axial movement direction of the power shaft 12.

[0032] like Figure 1 and Figure 2 As shown, connecting shaft 19 forms a rotational axis within the first and second axial holes. This means that sealing disk 13 is no longer rigidly fixed to furnace arm 18 but can rotate or swing around the axis of connecting shaft 19. Although sealing disk 13 can swing, its movement is constrained to an arc centered on connecting shaft 19. This design provides flexibility while maintaining structural stability and controllability.

[0033] like Figure 1 and Figure 2 As shown, during actual installation or long-term operation, there may be slight misalignment or manufacturing tolerances between the furnace arm 18, the furnace body, and the sealing disc 13. This swinging ability allows the sealing disc 13 to slightly adjust its angle when in contact with the furnace body or its mating surface, thereby achieving a better fit and ensuring a more effective seal.

[0034] like Figure 1 and Figure 2 Furthermore, in a high-temperature furnace environment, furnace arm 18 and sealing disk 13 will expand and contract due to temperature fluctuations. If sealing disk 13 were rigidly connected, these deformations could lead to seal failure or excessive component stress. Allowing for oscillation absorbs and accommodates these positional or angular changes caused by thermal expansion, maintaining seal integrity.

[0035] like Figure 1 、 Figure 2 and Figure 6 As shown, the furnace arm 18 is provided with two holes, a round hole and a waist-shaped hole. An adjustment fixing seat 114 is provided in the waist-shaped hole of the furnace arm 18, and a spring 115 is provided in the round hole of the furnace arm 18. When the furnace arm 18 deflects too much, the level of the sealing disk 13 can be adjusted by adjusting the adjustment fixing seat 114 in the waist-shaped hole. This can effectively solve the problem of poor sealing caused by processing or excessive deflection of the furnace arm 18.

[0036] like Figure 1 and Figure 2As shown, the waist-shaped hole provides a movable adjustment range for the adjustment bracket 114. If the furnace arm 18 deflects or there are initial machining errors, the sealing disk 13 may tilt. By moving the adjustment bracket 114 within the waist-shaped hole, the height and angle of the force arm or support point acting on the sealing disk 13 can be changed.

[0037] like Figure 1 and Figure 2 As shown, a spring 115 within the circular hole provides elastic support or thrust. This spring 115 is typically connected to the sealing disc 13 and provides a continuous, adjustable elastic force. Adjusting the adjustable retainer 114 within the waist-shaped hole changes the preload, compression, or point of action of this spring 115, thereby generating a corrective torque or lifting force on the sealing disc 13, restoring it to a horizontal state or optimal sealing position.

[0038] like Figure 1 and Figure 2 As shown, a seating groove is provided on the front of the sealing disc 13. A sealing strip 110 is installed within the seating groove of the sealing disc 13. The seating groove ensures that the sealing strip 110 is accurately positioned on the sealing disc 13 to prevent it from shifting or falling off during installation, operation, or stress. The sealing strip 110 is made of a material with a certain degree of elasticity. When the sealing disc 13 contacts the furnace body or its mating surface and pressure is applied, the sealing strip 110 is compressed within the seating groove. This compression causes the sealing strip 110 to elastically deform, effectively filling any minor gaps, unevenness, or machining errors that may exist between the sealing disc 13 and the mating surface.

[0039] like Figure 2 As shown, a cooling water trough 111 is provided on the back of the sealing disc 13. A cooling water inlet 112 and a cooling water outlet 113 are formed at both ends of the cooling water trough 111. Heat generated by the furnace body or high-temperature area is transferred to the sealing disc 13 through the furnace wall, the mating surface, and the front of the sealing disc 13. To prevent this heat accumulation from causing the sealing disc 13 or the seal to overheat, a cooling water trough 111 is provided on the back of the sealing disc 13.

[0040] like Figure 2 As shown, cooling water enters cooling water tank 111 through cooling water inlet 112 and flows within cooling water tank 111. Water has a high specific heat capacity and can efficiently absorb heat transferred from sealing disk 13. The flow of water creates forced convection, removing heat from sealing disk 13 and discharging it through cooling water outlet 113.

[0041] like Figure 2 As shown, the cooling water reduces the temperature difference between the inside and outside of the sealing disk 13, thereby reducing the thermal stress caused by thermal expansion and contraction. Excessive thermal stress may cause the sealing disk 13 to crack or fatigue damage.

[0042] like Figure 2 As shown, the core principle of the self-adjusting sealing mechanism is to use floating compensation to adapt to the deformation or tolerance of the furnace structure, thereby achieving uniform sealing.

[0043] like Figure 2 As shown, specifically, when the furnace tube needs to be sealed, the cylinder drives the power shaft 12 to rise, and accurately positions the sealing disk 13 directly below the furnace tube flange base 22. Due to the deflection of structures such as the furnace arm 18, the sealing disk 13 will not make complete flat contact when contacting the flange base 22, but will first contact the flange base 22 from its right side. The key is that the sealing disk 13 can rotate around the axis. When its right side contacts the flange base 22 first, a torque is generated at the contact point, causing the sealing disk 13 to rotate slightly clockwise around the axis. As the power shaft 12 continues to move upward, the sealing disk 13 continues this micro-rotation adjustment until its entire plane is completely in contact with the sealing surface of the flange base 22, achieving a uniform and gap-free seal.

[0044] like Figure 2 As shown, this design enables the sealing disk 13 to adaptively adjust its posture, compensate for the imperfections of the furnace structure, and ensure full contact of the sealing surface.

[0045] like Figure 2 As shown, it can automatically compensate for uneven sealing surfaces caused by manufacturing tolerances, thermal expansion and contraction, or deformation of the furnace structure, ensuring a tighter and more reliable seal and effectively preventing gas leakage.

[0046] like Figure 3 and Figure 4 As shown, a furnace tube based on the above-mentioned self-adjusting closed furnace door structure includes a quartz tube 21 and a flange base 22 for supporting the quartz tube 21 , and the furnace door structure is installed on the quartz tube 21 .

[0047] like Figure 3 and Figure 4 As shown, the principle of this self-adjusting and closed furnace door structure is to provide a stable, controllable carrier that can accurately perform sealing actions. It is not just a simple "door", but also a complex component that integrates a motion mechanism and a sealing mechanism. The furnace door structure integrates the cylinder, power shaft 12 and follower moving parts. These parts work together to convert the vertical movement of the power shaft 12 into the vertical, rotational rising and vertical complex motion trajectory required by the sealing disk 13. The furnace door structure is a platform that supports the sealing disk 13. It ensures that the sealing disk 13 contacts the flange base 22 at the right time and in the right way, and provides subsequent lifting force to drive the completion of the self-adjusting sealing process.

[0048] like Figure 3 and Figure 4 As shown, in short, the furnace door structure is the physical framework and motion execution unit that enables the entire self-adjusting sealing system to be realized.

[0049] like Figure 7 and Figure 8 As shown, when closing, the furnace door structure first aligns the sealing disc 13 below the furnace tube flange base 22. The upward thrust it provides then initiates and completes contact between the sealing disc 13 and the flange base 22, providing sufficient pressure for a tight seal. Deflection of the furnace arm 18 is compensated for by the self-adjusting function of the sealing disc 13, while providing continuous upward pressure is the responsibility of the furnace door structure.

[0050] like Figure 3 and Figure 4 As shown, the furnace door structure not only achieves sealing, but also serves as the end seal of the furnace tube, forming a complete closed cavity together with the quartz tube 21 and flange base 22. This is crucial for applications that require maintaining a vacuum, a specific atmosphere, or a high-pressure environment within the furnace tube.

[0051] Working principle: When the furnace tube needs to be sealed, the cylinder drives the power shaft 12 to move upward. Since the follower and the power shaft 12 cooperate through the groove, under the action of the follower, the power shaft 12 will perform vertical, rotational rise, and vertical movement in sequence. When not rotating, the sealing disk 13 will be directly below the furnace tube flange base 22. As the power shaft 12 continues to move vertically, the sealing disk 13 will contact the bottom of the flange base 22. In this state, due to the deflection of the furnace arm 18, the right side of the sealing disk 13 is tilted and will first contact the flange base 22. Since the sealing disk 13 can rotate around the axis, after contacting the flange base 22, the sealing disk 13 rotates clockwise in the figure. As the power shaft 12 continues to rise, the sealing disk 13 continues to rotate slightly until the flange base 22 is completely and evenly sealed. In this way, a self-adjusting seal is achieved.

[0052] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A self-adjusting and closed furnace door structure, characterized in that: The invention comprises a furnace door fixing seat (11), a power shaft (12), a sealing disk (13), a follower fixing seat (14), a cylinder body (16), a linear rotary bushing (15) and a furnace arm (18); the power shaft (12) is provided with a groove along the axial direction, a follower is slidably fitted in the groove, and the follower is fixed on the follower fixing seat (14); the cylinder body (16) is fixed to the furnace door fixing seat (11), and its output end is connected to the upper end fixing seat (17), and the upper end fixing seat The seat (17) is fixedly connected to the bearing seat assembly, and the bearing seat assembly is fixed to the top of the power shaft (12); the linear rotary bushing (15) is fixed to the bottom of the furnace door fixing seat (11) and is slidably matched with the bottom of the power shaft (12); the furnace arm (18) is fixedly connected to the side of the power shaft (12), and the furnace arm (18) and the sealing disk (13) are hinged through a connecting shaft (19), and the connecting shaft (19) allows the sealing disk (13) to rotate around its axis.

2. The self-adjusting closed furnace door structure according to claim 1, characterized in that: The groove of the power shaft (12) is in the shape of a spiral curve, and the lead length of the spiral curve groove matches the linear travel of the power shaft (12).

3. The self-adjusting and closed furnace door structure according to claim 2, characterized in that: The cross-sectional width of the spiral curved groove is greater than the width of the follower, and the radial gap between the follower and the groove is less than 0.5 mm.

4. The self-adjusting and closed furnace door structure according to claim 2, characterized in that: The outer side wall of the linear rotary bushing (15) is fixedly connected to the furnace door fixing seat (11), and the inner ring of the linear rotary bushing (15) is in rolling contact with the outer wall of the power shaft (12).

5. The self-adjusting and closed furnace door structure according to claim 1, characterized in that: The furnace arm (18) comprises a first axial hole and a second connecting hole, the sealing disk (13) is provided with a second axial hole at a position corresponding to the first axial hole, and the connecting shaft (19) passes through the first axial hole and the second axial hole to form a rotation fulcrum.

6. The self-adjusting and closed furnace door structure according to claim 5, characterized in that: The furnace arm (18) is provided with a circular hole and a waist-shaped hole, an adjustable fixing seat (114) is slidably fitted in the waist-shaped hole, an elastic support member is provided in the circular hole, one end of the elastic support member abuts against the adjustable fixing seat (114), and the other end acts on the sealing disk (13).

7. The self-adjusting and closed furnace door structure according to claim 5, characterized in that: The axis of the connecting shaft (19) and the axis of the power shaft (12) are arranged in a vertical staggered manner, and the rotation plane of the sealing disk (13) forms an angle with the axial movement direction of the power shaft (12).

8. The self-adjusting and closed furnace door structure according to claim 5, characterized in that: An annular cooling water trough (111) is provided on the back of the sealing disk (13). The cooling water trough (111) has a water inlet (112) and a water outlet (113). The water inlet (112) and the water outlet (113) are respectively located on opposite sides of the cooling water trough (111).

9. The self-adjusting and closed furnace door structure according to claim 1, characterized in that: The front surface of the sealing disc (13) is provided with a placement groove, and an elastic sealing strip (110) is embedded in the placement groove.

10. A furnace tube device, characterized in that: The invention comprises a quartz tube (21), a flange base (22), and a self-adjusting closed furnace door structure according to any one of claims 1 to 9, wherein the flange base (22) is arranged at the open end of the quartz tube (21), and the sealing disk (13) of the self-adjusting closed furnace door structure cooperates with the sealing surface of the flange base (22).

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