Vacuum device

Abstract

The invention provides a vacuum device, and relates to the technical field of vacuum obtaining. The vacuum device comprises a multi-stage vacuum pump and a pressure relief structure; a plurality of pressure relief openings are formed in a pump body of the multi-stage vacuum pump, the pressure relief structure is fixed to the pump body, and the pressure relief structure is connected with the pressure relief openings based on a plurality of arranged pressure relief valves. The pressure relief valve is used for controlling opening and closing of the pressure relief opening; the pressure relief structure is used for discharging gas in the multi-stage vacuum pump under the condition that the pressure relief opening is opened. A multi-stage vacuum pump is arranged in the vacuum device to meet the requirement for high vacuum pumping speed in some application scenes, and a plurality of pressure relief openings are formed in a pump body of the multi-stage vacuum pump according to the atmospheric impact working condition or the large-load working condition faced by the multi-stage vacuum pump. Opening and closing of the pressure relief opening are controlled based on a pressure relief valve connected with the pressure relief opening in a pressure relief structure fixed to the pump body, so that under the condition that the pressure relief valve controls opening of the pressure relief opening, gas in the multi-stage vacuum pump is exhausted through the pressure relief structure, and stable operation of the multi-stage vacuum pump is protected.

Description

Technical Field

[0001] The present application relates to the field of vacuum acquisition technology, and in particular to a vacuum device. Background Art

[0002] Currently, vacuum equipment is widely used in industries such as photovoltaics and semiconductors. In different industrial applications, there are a large number of working conditions that require atmospheric shock or high-load conditions. When a large amount of gas enters the vacuum pump instantly, it will cause atmospheric shock to the structure inside the pump. To deal with this working condition, a bypass valve is usually installed to relieve pressure and protect the vacuum pump. However, the bypass valve is only effective for a single vacuum pump. In actual use scenarios, in order to meet the vacuum pumping speed requirements of the application scenario, a multi-stage vacuum pump consisting of multiple vacuum pumps connected in series is usually installed. The current bypass valve cannot effectively protect the multi-stage vacuum pump, resulting in the multi-stage vacuum pump being susceptible to atmospheric shock and causing damage and other adverse conditions. Summary of the Invention

[0003] In view of this, an object of an embodiment of the present application is to provide a vacuum device to improve the problem in the prior art that a multi-stage vacuum pump is susceptible to atmospheric shock.

[0004] In order to solve the above problems, an embodiment of the present application provides a vacuum device, which includes: a multi-stage vacuum pump and a pressure relief structure; The multi-stage vacuum pump is provided with a plurality of pressure relief ports on its pump body, the pressure relief structure is fixed on the pump body, and the pressure relief structure is connected to the plurality of pressure relief ports based on a plurality of pressure relief valves provided; The pressure relief valve is used to control the opening and closing of the pressure relief port; The pressure relief structure is used to discharge the gas in the multi-stage vacuum pump when the pressure relief port is opened.

[0005] In the above implementation process, a multi-stage vacuum pump is provided in the vacuum device to meet the high vacuum pumping speed requirements in some application scenarios through the multi-stage vacuum pump. In response to atmospheric shock conditions or heavy load conditions faced by the multi-stage vacuum pump, multiple pressure relief ports are provided on the pump body of the multi-stage vacuum pump, and a pressure relief structure is provided fixed to the pump body. The opening and closing of the pressure relief ports are controlled by a pressure relief valve connected to the pressure relief port in the pressure relief structure. When the pressure relief valve controls the pressure relief port to open, the gas in the multi-stage vacuum pump is discharged by the pressure relief structure. This can protect the stable operation of the multi-stage vacuum pump, reduce the adverse effects of atmospheric shock on the multi-stage vacuum pump, and extend the service life of the multi-stage vacuum pump.

[0006] Optionally, the pressure relief structure includes: a main pipeline and a plurality of branch pipelines; The main pipeline is fixed on the pump body, and the branch pipelines are distributed on the main pipeline; The number of the branch pipes is consistent with the number of the pressure relief ports; The branch pipeline is connected to the pressure relief port based on the pressure relief valve; The main pipeline and the branch pipeline are used to transmit the gas discharged from the pressure relief port.

[0007] In the above implementation process, taking into account the distribution of pressure relief ports on the multi-stage vacuum pump, a main pipe and multiple branch pipes can be provided in the pressure relief structure. The main pipe is fixed on the pump body, and the branch pipes are distributed on the main pipe. The number of branch pipes and pressure relief ports is the same, so that each branch pipe can be connected to the pressure relief port based on the corresponding pressure relief valve, that is, the branch pipe is connected to the pressure relief port through the pressure relief port to transmit the gas discharged when the pressure relief port is opened, and then the gas transmitted in the multiple branch pipes is discharged through the main pipe. The volume of the gas during discharge is increased through the design structure of the pipe, which effectively improves the independence of the multiple pressure relief ports during pressure relief, reduces the mutual interference of each pressure relief port during pressure relief, and improves the overall efficiency of gas discharge.

[0008] Optionally, the pressure relief structure further comprises: an air outlet pipe; The first end of the air outlet pipe is connected to the main pipe; The second end of the air outlet pipe is connected to the air outlet of the multi-stage vacuum pump; Alternatively, the second end of the air outlet pipe is connected to the air inlet of the multi-stage vacuum pump.

[0009] In the above implementation process, the pressure relief structure is also provided with an outlet pipe whose first end is connected to the main pipeline, and in different application scenarios, the second end of the outlet pipe can be connected to different positions to achieve different functions. In the case of atmospheric shock or large air pressure load, the second end of the outlet pipe can be connected to the outlet of the multi-stage vacuum pump so that the high-pressure gas entering the main pipeline can be directly discharged from the pressure relief structure; in the case of low power consumption and high power, the second end of the outlet pipe can be connected to the air inlet of the multi-stage vacuum pump so that the high-pressure gas entering the main pipeline can return to the air inlet of the multi-stage vacuum pump, effectively improving the working rhythm of the multi-stage vacuum pump and reducing the power consumption of the multi-stage vacuum pump. The connection structure of the outlet pipe can be designed according to actual working conditions or design requirements, and the ability of the multi-stage vacuum pump to meet the rhythm can be improved while ensuring stable and reliable operation of the multi-stage vacuum pump.

[0010] Optionally, the multi-stage vacuum pump includes n vacuum pumps connected in series, where n is a positive integer greater than or equal to 2; The number of the pressure relief ports is greater than or equal to n-1.

[0011] In the above implementation, a multi-stage vacuum pump may include multiple vacuum pumps connected in series, so that the multiple vacuum pumps compress the gas to perform work to meet the corresponding vacuum requirements. Considering the pressure relief requirements of each vacuum pump in the multi-stage vacuum pump, the number of pressure relief ports is related to the number of vacuum pumps, so that the pressure relief effect of the multi-stage vacuum pump is optimized through the rational distribution of pressure relief ports.

[0012] Optionally, the number of the pressure relief valves corresponding to each pressure relief port is determined based on the air pressure conditions at the pressure relief port.

[0013] In the above implementation process, considering that the multi-stage vacuum pump is formed by multiple vacuum pumps connected in series, there are differences in the air pressure inside the multiple vacuum pumps. Therefore, the actual air pressure conditions at each pressure relief port set on the pump body are different. A pressure relief port can include multiple air ports. Accordingly, a pressure relief port can be connected to multiple pressure relief valves to control the discharge of gas. Therefore, the number of pressure relief valves connected to the pressure relief port can be set according to the actual pressure conditions of the pressure relief port so that the gas in the pressure relief port can be effectively discharged based on the control of the pressure relief valve.

[0014] Optionally, the number of the pressure relief valves at the pressure relief port close to the air inlet of the multi-stage vacuum pump is a1, the number of the pressure relief valves at the pressure relief port close to the air outlet of the multi-stage vacuum pump is a2, and a1>a2.

[0015] In the above implementation process, since the actual air pressure conditions of the pressure relief ports at different positions on the pump body are different, considering the load working conditions, there is a sudden increase in air pressure at the pressure relief port entering the multi-stage vacuum pump, that is, near the air inlet of the multi-stage vacuum pump, while at the pressure relief port near the air outlet of the multi-stage vacuum pump, the air pressure cannot reach the size of the aforementioned sudden increase in air pressure. Therefore, the number of pressure relief valves at the pressure relief port near the air inlet can be made greater than the number of pressure relief valves at the pressure relief port near the air outlet, so as to effectively reduce the overall load of the multi-stage vacuum pump by early pressure relief, further optimize the protection effect of the pressure relief structure on the multi-stage vacuum pump, and extend the service life of the multi-stage vacuum pump.

[0016] Optionally, the vacuum device further comprises: a first detachable component; the first detachable component comprises one or more vacuum pumps; The first detachable component is detachably connected in series to the air inlet of the multi-stage vacuum pump.

[0017] In the above implementation process, when the multi-stage vacuum pump cannot meet the vacuum pumping speed requirement of the current usage scenario, a first detachable component including one or more vacuum pumps can be provided, and the detachable component can be detachably connected in series to the air inlet of the multi-stage vacuum pump, so as to improve the load performance of the multi-stage vacuum pump by adding vacuum pumps and meet the vacuum requirements in a variety of different scenarios.

[0018] Optionally, the pressure relief structure further comprises: a relief valve; The first end of the overflow valve is connected to the air inlet of the multi-stage vacuum pump; The second end of the overflow valve is communicated with the main pipeline of the pressure relief structure.

[0019] In the above implementation process, a relief valve can be provided between the air inlet and the main pipeline of the pressure relief structure. When a first detachable component is connected in series at the air inlet of the multi-stage vacuum pump, the relief valve can be opened to relieve pressure at the air inlet and reduce the adverse situation of the depressurized gas flowing back into the air inlet. When the first detachable component is removed, the relief valve can be closed to enable the air inlet to operate normally. The operation of the relief valve can be controlled according to different working conditions, effectively increasing the volume of gas discharged, thereby reducing the workload of the multi-stage vacuum pump and reducing operating power consumption.

[0020] Optionally, the pressure relief structure further comprises: a second detachable component; the second detachable component comprises one or more pressure relief valves; The first end of the second detachable component is connected to the pressure relief port provided on the first detachable component; The second end of the second detachable component is detachably disposed on the main pipe of the pressure relief structure.

[0021] In the above implementation process, when a first detachable component is connected in series at the air inlet of the multi-stage vacuum pump, in order to relieve the pressure of the first detachable component, the pressure relief structure can also be provided with a second detachable component including one or more pressure relief valves. The pressure relief port provided on the first detachable component and the main pipeline of the pressure relief structure are connected through the second detachable component, which can effectively protect the first detachable component when it is working, thereby improving the operating stability and reliability of the entire multi-stage vacuum pump.

[0022] Optionally, the pressure relief valve comprises: a valve port, a valve core and an elastic member; The valve port is connected to the pressure relief port; The valve core is connected to the elastic member; The valve core is used to move toward the valve port based on the pressure applied by the elastic member toward the valve port; The valve core is further configured to move away from the valve port based on pressure exerted by gas discharged from the pressure relief port.

[0023] In the above implementation process, the pressure relief valve may include a valve port for switching, a valve core for controlling the switching of the valve port, and an elastic member for controlling the movement of the valve core. The valve port is connected to the pressure relief port to realize gas transmission. The valve core can move away from or close to the valve port according to the pressure away from the valve port provided by the gas in the pressure relief port and the pressure directed to the valve port applied by the elastic member, thereby closing the valve port or opening the valve port. This pressure relief valve structure controlled by an elastic member can be set at multiple positions of the pump body to meet the application requirements of various different spatial scenarios. The pressure relief valve is an independent device that is detachably connected to the pump body and will not cause adverse effects on the pump body and the devices inside the pump body. It is easy and quick to install and does not require replacement of the pump body, effectively reducing the cost of the device.

[0024] To sum up, the embodiment of the present application provides a vacuum device, in which a multi-stage vacuum pump is provided to meet the high vacuum pumping speed requirements in some application scenarios. In response to the atmospheric impact conditions or large load conditions faced by the multi-stage vacuum pump, multiple pressure relief ports are provided on the pump body of the multi-stage vacuum pump, and the opening and closing of the pressure relief ports are controlled based on a pressure relief valve connected to the pressure relief port in a pressure relief structure fixed on the pump body. When the pressure relief valve controls the pressure relief port to open, the gas in the multi-stage vacuum pump is discharged by the pressure relief structure to protect the stable operation of the multi-stage vacuum pump. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments of the present application. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0026] Figure 1 A schematic structural diagram of a vacuum device provided in an embodiment of the present application; Figure 2 A detailed structural diagram of a vacuum device provided in an embodiment of the present application; Figure 3 A detailed structural diagram of another vacuum device provided in an embodiment of the present application; Figure 4 A schematic structural diagram of a pressure relief valve provided in an embodiment of the present application.

[0027] Icons: 100-multi-stage vacuum pump; 200-pressure relief structure; 110-pressure relief port; 210-pressure relief valve; 221-main pipeline; 222-branch pipeline; 121-air inlet; 122-air outlet; 223-air outlet pipe; 310-first detachable component; 320-overflow valve; 330-second detachable component; 211-valve port; 212-valve core; 213-elastic part; 214-valve body; F1-axial direction; F2-radial direction. DETAILED DESCRIPTION

[0028] The following will be combined with the drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the embodiments described are only part of the embodiments of the present application, not all of them. Based on the embodiments of the present application, all other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the embodiments of the present application.

[0029] In existing technology, to cope with atmospheric shock, a bypass valve is typically installed in conjunction with the vacuum pump to relieve pressure and protect it. However, a bypass valve is only effective for a single vacuum pump. In actual use, to meet the vacuum pumping speed requirements of the application, a multi-stage vacuum pump consisting of multiple vacuum pumps connected in series is typically installed. Current bypass valves are unable to effectively protect multi-stage vacuum pumps, making them susceptible to atmospheric shock, resulting in damage and other unfavorable situations.

[0030] In order to solve this problem, an embodiment of the present application provides a vacuum device, in which a multi-stage vacuum pump is provided in the vacuum device to meet the high vacuum pumping speed requirements in some application scenarios. In response to the atmospheric impact conditions or large load conditions faced by the multi-stage vacuum pump, multiple pressure relief ports are provided on the pump body of the multi-stage vacuum pump, and the opening and closing of the pressure relief ports are controlled based on a pressure relief valve connected to the pressure relief port in a pressure relief structure fixed on the pump body. When the pressure relief valve controls the pressure relief port to open, the gas in the multi-stage vacuum pump is discharged by the pressure relief structure to protect the stable operation of the multi-stage vacuum pump.

[0031] See also Figure 1 , Figure 1 This is a structural schematic diagram of a vacuum device provided in an embodiment of the present application, which includes: a multi-stage vacuum pump 100 and a pressure relief structure 200.

[0032] It should be noted that a multi-stage vacuum pump 100 is provided in the vacuum device to meet the high vacuum pumping speed requirements in some application scenarios through the multi-stage vacuum pump 100.

[0033] Alternatively, the multi-stage vacuum pump 100 may be a combination structure consisting of multiple vacuum pumps connected in series, or may be an integrated structure formed by integrating multiple vacuum pumps in series. The multiple vacuum pumps in the multi-stage vacuum pump 100 may include various types of vacuum pumps, such as Roots pumps, claw pumps, screw pumps, and rotary vane pumps. Taking Roots pumps as an example, Roots pumps are positive displacement vacuum pumps that consist of a pair of intermeshing, non-contacting rotors (typically two-lobed or three-lobed) that rotate synchronously in opposite directions within a pump chamber, achieving gas intake, compression, and exhaust by periodically changing the working chamber volume. When multiple Roots pumps rotate, their rotation centers extend in the axial direction, while the rotor blades extend in the radial direction. Multiple Roots pumps can be connected in series along the axial direction to form a corresponding multi-stage vacuum pump 100.

[0034] Among them, a plurality of pressure relief ports 110 are provided on the pump body of the multi-stage vacuum pump 100, and the pressure relief structure 200 is fixed on the pump body. The pressure relief structure 200 is connected to the plurality of pressure relief ports 110 based on the set plurality of pressure relief valves 210. The pressure relief valves 210 are used to control the opening and closing of the pressure relief ports 110. The pressure relief structure 200 is used to discharge the gas in the multi-stage vacuum pump 100 when the pressure relief ports 110 are opened. In response to the atmospheric shock conditions or heavy load conditions faced by the multi-stage vacuum pump 100, a plurality of pressure relief ports 110 are provided on the pump body of the multi-stage vacuum pump 100, and a pressure relief structure 200 fixed on the pump body is provided. The opening and closing of the pressure relief port 110 are controlled by a pressure relief valve 210 connected to the pressure relief port 110 in the pressure relief structure 200, so that when the pressure relief valve 210 controls the pressure relief port 110 to be open, the gas in the multi-stage vacuum pump 100 is discharged by the pressure relief structure 200, which can protect the stable operation of the multi-stage vacuum pump 100, reduce the adverse effects of atmospheric shock on the multi-stage vacuum pump 100, and extend the service life of the multi-stage vacuum pump 100.

[0035] For example, the pressure relief valve 210 may include a valve structure such as a gravity valve or a spring valve that can perform one-way sealing and ventilation on the pressure relief port 110 .

[0036] Optionally, when the multi-stage vacuum pump 100 is a combined structure consisting of multiple vacuum pumps connected in series, the pressure relief port 110 can be respectively set on the pump body of each vacuum pump; when the multi-stage vacuum pump 100 is an integral structure formed by integrating multiple vacuum pumps in series, the pressure relief port 110 can be set on the integrated pump body of the multi-stage vacuum pump 100.

[0037] Optionally, see Figure 2 , Figure 2 A detailed structural diagram of a vacuum device provided in an embodiment of the present application.

[0038] Optionally, Figure 2The number of stages of the multi-stage vacuum pump 100 shown, that is, the number of vacuum pumps connected in series, can be designed according to actual needs. The multi-stage vacuum pump 100 may include n vacuum pumps connected in series, where n is a positive integer greater than or equal to 2, so that the gas can be compressed and worked by multiple vacuum pumps to meet the corresponding vacuum requirements. For example, Figure 2 A specific structure with n=7 is shown in FIG, and structures with other numbers are not described in detail.

[0039] It should be noted that, considering the pressure relief requirements of each vacuum pump in the multi-stage vacuum pump 100, the number of pressure relief ports 110 is related to the number of vacuum pumps, so as to improve the pressure relief effect of the multi-stage vacuum pump 100 through reasonably distributed pressure relief ports 110. The number of pressure relief ports 110 can be greater than or equal to n-1, so that the multi-stage vacuum pump 100 has a sufficient number of pressure relief ports 110 for effective pressure relief.

[0040] The fan blades and other structures in each vacuum pump of the multi-stage vacuum pump 100 can be designed as Roots-type two-lobes, three-lobes, four-lobes or multi-lobes, or claw pumps (each stage is a claw pump), or Roots and claw compound pumps (for example, the first stage is a two-lobes or multi-lobes Roots, the second to seventh stages are claw rotors, or a compound pump with multiple Roots rotors and the remaining stages are claw rotors of varying numbers) according to design requirements. Figure 2 In the embodiment shown, only a three-lobe seven-stage Roots pump is used as an example for explanation. Figure 2 In the figure, the black solid arrow is the normal flow direction of the vacuum pump gas, and the hollow arrow is the normal flow direction of the gas in the pressure relief structure 200. After the gas is inhaled from the first stage, it is compressed in the second, third, fourth, fifth, sixth and seventh stages in sequence and then discharged from the gas outlet 122 of the multi-stage vacuum pump 100. When a large load gas or high-pressure gas enters the pump port at the air inlet 121, the gas pressure entering the second-stage vacuum pump increases after being compressed by the first-stage vacuum pump. The high-pressure gas opens the pressure relief valve 210 of the pressure relief port 110 near the air inlet 121 to relieve the pressure and overflow.

[0041] Optionally, the pressure relief structure 200 may include: a main pipe 221 and multiple branch pipes 222, the main pipe 221 is fixed on the pump body, and the main pipe 221 can be fixed to the pump body by connectors such as screws, nuts, and snaps, and the branch pipes 222 are distributed on the main pipe 221. The number of branch pipes 222 is consistent with the number of pressure relief ports 110, and the branch pipes 222 are connected to the pressure relief port 110 based on the pressure relief valve 210. The main pipe 221 and the branch pipes 222 are used to transmit the gas discharged from the pressure relief port 110. Taking into account the distribution of the pressure relief port 110 on the multi-stage vacuum pump 100, a main pipe 221 and multiple branch pipes 222 can be provided in the pressure relief structure 200. The main pipe 221 is fixed on the pump body, and the branch pipes 222 are distributed on the main pipe 221. The number of branch pipes 222 and the pressure relief port 110 is consistent, so that each branch pipe 222 can be connected to the pressure relief port 110 based on the corresponding pressure relief valve 210, that is, the branch pipe 222 is connected to the pressure relief port 110 to transmit the gas discharged when the pressure relief port 110 is opened, and then the gas transmitted in the multiple branch pipes 222 is discharged through the main pipe 221. The volume of the gas during discharge is increased by the design structure of the pipe, which effectively improves the independence of the multiple pressure relief ports 110 during pressure relief, reduces the mutual interference of each pressure relief port 110 during pressure relief, and improves the overall efficiency of gas discharge.

[0042] It should be noted that the main conduit 221 of the pressure relief structure 200 can be arranged on the pump body of the multi-stage vacuum pump 100 based on the axial direction F1, and multiple pressure relief valves 210 can be arranged along the radial direction of the rotor to increase the gas discharge volume. In the multi-stage vacuum pump 100, the length in the axial direction F1 is generally limited by the pumping speed or compression ratio of the pump, and its length generally shows a decreasing trend from the air inlet 121 to the air outlet 122 to increase the compression ratio. When the length in the axial direction F1 is sufficient, the pressure relief valves 210 can also be distributed along the axial direction at the position of each stage of the air inlet 121 to form multiple pressure relief channels, increase the gas discharge volume, and minimize the large load bearing capacity of the multi-stage vacuum pump 100.

[0043] Optionally, see Figure 2, the pressure relief structure 200 may also include: an air outlet pipe 223, the first end of which is connected to the main pipe 221. The second end of the air outlet pipe 223 is connected to the air outlet 122 of the multi-stage vacuum pump 100; or, the second end of the air outlet pipe 223 is connected to the air inlet 121 of the multi-stage vacuum pump 100. The pressure relief structure 200 is also provided with an air outlet pipe 223 whose first end is connected to the main pipe 221, and in different application scenarios, the second end of the air outlet pipe 223 can be connected to different positions to achieve different functions. The connection structure of the air outlet pipe 223 can be designed according to actual working conditions or design requirements, and the ability of the multi-stage vacuum pump 100 to meet the beat can be improved while ensuring stable and reliable operation of the multi-stage vacuum pump 100.

[0044] For example, in the case of atmospheric shock or large pressure load, the second end of the outlet pipe 223 can be connected to the outlet port 122 of the multi-stage vacuum pump 100 (as described later). Figure 3 As shown), the high-pressure gas entering the main pipeline 221 can be directly discharged from the pressure relief structure 200.

[0045] For example, in the case where low power consumption and high power are required, the second end of the gas outlet pipe 223 can be connected to the gas inlet 121 of the multi-stage vacuum pump 100 (eg, Figure 2 As shown), the high-pressure gas entering the main pipeline 221 can return to the air inlet 121 of the multi-stage vacuum pump 100, effectively improving the working rhythm of the multi-stage vacuum pump 100 and reducing the power consumption of the multi-stage vacuum pump 100, so as to increase the anti-overload capability of the multi-stage vacuum pump 100.

[0046] Optionally, the second end of the air outlet pipe 223 may also be connected to the air inlet 121 of the previous stage or stages of the multi-stage vacuum pump 100 .

[0047] It should be noted that the number of pressure relief valves 210 corresponding to each pressure relief port 110 is determined based on the air pressure at the pressure relief port 110. Considering that the multi-stage vacuum pump 100 is formed by a plurality of vacuum pumps in series, the air pressures in the plurality of vacuum pumps are different. Therefore, the actual air pressure at each pressure relief port 110 provided on the pump body is different. A pressure relief port 110 may include a plurality of air ports (such as Figure 2 As shown, some pressure relief ports 110 may be provided with 3, 2 or 1 gas ports. Accordingly, one pressure relief port 110 may be connected to multiple pressure relief valves 210 to control the discharge of gas. Therefore, the number of pressure relief valves 210 connected to the pressure relief port 110 may be set according to the actual pressure condition of the pressure relief port 110, so that the gas in the pressure relief port 110 can be effectively discharged based on the control of the pressure relief valve 210.

[0048] For example, when the gas pressure at the pressure relief port 110 is high, the pressure relief port 110 has more gas outlets, and more pressure relief valves 210 can be set accordingly. When the gas pressure at the pressure relief port 110 is low, the pressure relief port 110 has smaller gas outlets, and fewer pressure relief valves 210 can be set accordingly.

[0049] It should be noted that the number of pressure relief valves 210 at the pressure relief port 110 near the air inlet 121 of the multi-stage vacuum pump 100 is a1, and the number of pressure relief valves 210 at the pressure relief port 110 near the air outlet 122 of the multi-stage vacuum pump 100 is a2, and a1>a2. Since the actual air pressure conditions of the pressure relief ports 110 at different positions on the pump body are different, considering the load working conditions, there is a sudden increase in air pressure at the pressure relief port 110 entering the multi-stage vacuum pump 100, that is, near the air inlet 121 of the multi-stage vacuum pump 100, while at the pressure relief port 110 near the air outlet 122 of the multi-stage vacuum pump 100, the air pressure cannot reach the aforementioned sudden increase in air pressure. Therefore, the number of pressure relief valves 210 at the pressure relief port 110 near the air inlet 121 can be made greater than the number of pressure relief valves 210 at the pressure relief port 110 near the air outlet 122, so as to effectively reduce the overall load of the multi-stage vacuum pump 100 by early pressure relief, further optimize the protection effect of the pressure relief structure 200 on the multi-stage vacuum pump 100, and extend the service life of the multi-stage vacuum pump 100.

[0050] For example, Figure 2 For example, the two pressure relief ports 110 near the air inlet 121 of the multi-stage vacuum pump 100 each include three air ports connected to three pressure relief valves 210. The three pressure relief ports 110 near the air outlet 122 of the multi-stage vacuum pump 100 each include only one air port connected to one pressure relief valve 210. The pressure relief port 110 at the middle position includes two air ports connected to two pressure relief valves 210 to achieve early pressure relief. A corresponding number of air ports can be set in the pressure relief port 110 and connected to a corresponding number of pressure relief valves 210 as needed, which has design flexibility and can also take into account economic efficiency.

[0051] Optionally, see Figure 3 , Figure 3 This is a detailed structural diagram of another vacuum device provided in an embodiment of the present application. In the case where the multi-stage vacuum pump 100 cannot meet the vacuum pumping speed requirements of the current usage scenario, the vacuum device may further include: a first detachable component 310, the first detachable component 310 including one or more vacuum pumps ( Figure 3Only two are shown in the figure). The first detachable assembly 310 is detachably connected in series to the air inlet 121 of the multi-stage vacuum pump 100. A first detachable assembly 310 including one or more vacuum pumps can be provided and detachably connected in series to the air inlet 121 of the multi-stage vacuum pump 100. This can increase the load performance of the multi-stage vacuum pump 100 by adding vacuum pumps, thereby meeting vacuum requirements in various scenarios.

[0052] For example, the multiple vacuum pumps in the first detachable component 310 can be configured as various types of vacuum pumps such as Roots pumps, claw pumps, screw pumps, and rotary vane pumps according to actual vacuum requirements.

[0053] Optionally, the pressure relief structure 200 may further include a relief valve 320, wherein a first end of the relief valve 320 is connected to the air inlet 121 of the multi-stage vacuum pump 100, and a second end of the relief valve 320 is in communication with the main conduit 221 of the pressure relief structure 200. The relief valve 320 may be disposed between the air inlet 121 and the main conduit 221 of the pressure relief structure 200. When the first detachable component 310 is connected in series to the air inlet 121 of the multi-stage vacuum pump 100, the relief valve 320 may be opened to relieve pressure at the air inlet 121 and reduce the adverse effect of depressurized gas flowing back into the air inlet 121. When the first detachable component 310 is removed, the relief valve 320 may be closed to enable the air inlet 121 to operate normally. The operation of the relief valve 320 can be controlled according to different operating conditions, effectively increasing the volume of gas discharged, thereby reducing the workload of the multi-stage vacuum pump 100 and reducing operating power consumption.

[0054] Optionally, a corresponding overflow valve 320 may also be provided on the gas outlet 122 of the multi-stage vacuum pump 100 . The valve structure of the overflow valve 320 is similar to that of the pressure relief valve 210 , and can reduce the adverse situation of gas backflow at the gas outlet 122 .

[0055] Please continue reading Figure 3 When the first detachable component 310 is connected in series at the air inlet 121 of the multi-stage vacuum pump 100, in order to relieve pressure on the first detachable component 310, the pressure relief structure 200 may further include a second detachable component 330, which includes one or more pressure relief valves 210. The first end of the second detachable component 330 is connected to the pressure relief port 110 provided on the first detachable component 310, and the second end of the second detachable component 330 is detachably provided on the main conduit 221 of the pressure relief structure 200. By connecting the pressure relief port 110 provided on the first detachable component 310 and the main conduit 221 of the pressure relief structure 200 through the second detachable component 330, the first detachable component 310 can be effectively protected during operation, thereby improving the operational stability and reliability of the entire multi-stage vacuum pump 100.

[0056] For example, the pressure relief valve 210 in the second detachable component 330 can be connected to the pressure relief port 110 provided on the first detachable component 310 and the main pipeline 221 of the pressure relief structure 200 through pipes, detachable connectors such as screws and nuts, and sealing rings.

[0057] Optionally, considering the overall characteristics of the multi-stage vacuum pump 100, the first detachable component 310 can be connected in series to the multi-stage vacuum pump 100 along the radial direction F2 or the axial direction F1 according to the actual space conditions, and accordingly, the second detachable component 330 can also be distributed along the radial direction F2 or the axial direction F1.

[0058] Optionally, see Figure 4 , Figure 4 This is a structural schematic diagram of a pressure relief valve 210 provided in an embodiment of the present application. The pressure relief valve 210 may include: a valve port 211, a valve core 212 and an elastic member 213.

[0059] Among them, the valve port 211 can be set on the valve body 214, the valve port 211 is connected to the pressure relief port 110, the valve core 212 is connected to the elastic member 213, the valve core 212 is used to move close to the valve port 211 based on the pressure directed to the valve port 211 applied by the elastic member 213, and the valve core 212 is also used to move away from the valve port 211 based on the pressure applied away from the valve port 211 by the gas discharged from the pressure relief port 110. The pressure relief valve 210 may include a valve port 211 for switching, a valve core 212 for controlling the switching of the valve port 211, and an elastic member 213 for controlling the movement of the valve core 212. The valve port 211 is connected to the pressure relief port 110 to realize gas transmission. The valve core 212 can move away from or toward the valve port 211 according to the pressure away from the valve port 211 provided by the gas in the pressure relief port 110 and the pressure directed to the valve port 211 applied by the elastic member 213, thereby closing the valve port 211 or opening the valve port 211. This pressure relief valve 210 structure controlled by the elastic member 213 can be set at multiple positions of the pump body to meet the application requirements of various different spatial scenarios. The pressure relief valve 210 is a separate device that is detachably connected to the pump body and will not cause adverse effects on the pump body and the devices inside the pump body. It is easy and quick to install and does not require replacement of the pump body, effectively reducing the cost of the device.

[0060] Optionally, the location of the pressure relief valve 210 can be determined based on the actual situation of the pressure relief port 110 on the pump body. When the pressure relief port 110 is located at the top of the pump body, the elastic member 213 may not be provided in the pressure relief valve 210, and pressure directed toward the valve port 211 is directly applied to the valve core 212 based on the gravity of the valve core 212. When the pressure relief port 110 is located at the side or bottom of the pump body, the pressure relief valve 210 including the elastic member 213 is used to control the opening and closing of the pressure relief port 110. The pressure relief valve 210 can be detachably fixed to the pump body by means of connectors, sealing rings, and other devices, so that it can be replaced or repaired when the pressure relief valve 210 fails. When replacing or repairing, only the pressure relief valve 210 needs to be processed, and there is no need to disassemble the pump body, the rotor in the pump body, and other core components, thereby reducing maintenance costs while improving maintenance efficiency.

[0061] For example, the design of the pressure relief valve 210 can use a valve core 212 with its own weight to achieve one-way sealing and ventilation by its own gravity. The material of the valve core 212 can be a rubber ball, a plastic ball, a metal ball, etc., and can also be designed as a hollow ball, or a combination of various forms such as a rubber-coated steel ball. The valve core 212 can also be set to other shapes such as a cylindrical ball, a cylindrical ball, a T-shaped ball, etc. The weight of the valve core 212 can be designed according to the actual air pressure of the pressure relief port 110 at the air port connected to the pressure relief valve 210. The seal between the valve core 212 and the valve port 211 can be achieved by using a wire seal, a face seal, a sealing ring, etc., and can be based on the weight of the valve core 212 itself or by using elastic members to apply pressure for sealing.

[0062] For example, the elastic member may include a spring or other device. When the pressure relief valve 210 is sealed using the elastic member, the tightening depth of the spring gland can be adjusted to provide different pressures to the valve core 212, thereby enabling the pressure relief valve 210 to seal under different air pressure conditions, ensuring safe and reliable pressure relief. Furthermore, springs made of different materials or with different elastic coefficients can be used as needed to implement pressure relief valves 210 for different pressure conditions.

[0063] It should be noted that the valve structures of the overflow valve 320 and the second detachable component 330 are similar to those of the pressure relief valve 210 and will not be described in detail.

[0064] In addition, the various parts in the various embodiments of the present application can be integrated together to form an independent part, or each part can exist separately, or two or more parts can be integrated to form an independent part.

[0065] The foregoing is merely an embodiment of the present application and is not intended to limit the scope of protection of the present application. Various modifications and variations are possible for those skilled in the art. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present application shall be included within the scope of protection of the present application. It should be noted that similar reference numerals and letters represent similar items in the following figures. Therefore, once an item is defined in one figure, it does not need to be further defined or explained in subsequent figures.

[0066] The above is only a specific implementation method of the present application, but the scope of protection of the present application is not limited thereto. Any technician familiar with this technical field can easily think of changes or replacements within the technical scope disclosed in this application, which should be covered by the scope of protection of the present application.

[0067] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "include", "comprises", or any other variants thereof are intended to cover non-exclusive inclusion, so that a process, article, or device comprising a series of elements includes not only those elements, but also other elements not explicitly listed, or elements inherent to such process, article, or device. In the absence of further limitations, the elements defined by the statement "includes..." do not exclude the presence of other identical elements in the process, article, or device comprising the elements.

Claims

1. A vacuum device, characterized in that: The vacuum device includes: a multi-stage vacuum pump and a pressure relief structure; The multi-stage vacuum pump is provided with a plurality of pressure relief ports on its pump body, the pressure relief structure is fixed on the pump body, and the pressure relief structure is connected to the plurality of pressure relief ports based on a plurality of pressure relief valves provided; The pressure relief valve is used to control the opening and closing of the pressure relief port; The pressure relief structure is used to discharge the gas in the multi-stage vacuum pump when the pressure relief port is opened.

2. The vacuum device according to claim 1, wherein: in, The pressure relief structure includes: a main pipeline and multiple branch pipelines; The main pipeline is fixed on the pump body, and the branch pipelines are distributed on the main pipeline; The number of the branch pipes is consistent with the number of the pressure relief ports; The branch pipeline is connected to the pressure relief port based on the pressure relief valve; The main pipeline and the branch pipeline are used to transmit the gas discharged from the pressure relief port.

3. The vacuum device according to claim 2, characterized in that in, The pressure relief structure further includes: an air outlet pipe; The first end of the air outlet pipe is connected to the main pipe; The second end of the air outlet pipe is connected to the air outlet of the multi-stage vacuum pump; Alternatively, the second end of the air outlet pipe is connected to the air inlet of the multi-stage vacuum pump.

4. The vacuum device according to claim 1, wherein: in, The multi-stage vacuum pump includes n vacuum pumps connected in series, where n is a positive integer greater than or equal to 2; The number of the pressure relief ports is greater than or equal to n-1.

5. The vacuum device according to claim 1, wherein: in, The number of the pressure relief valves corresponding to each pressure relief port is determined based on the air pressure conditions at the pressure relief port.

6. The vacuum device according to claim 1, wherein: in, The number of the pressure relief valves at the pressure relief port close to the air inlet of the multi-stage vacuum pump is a1, and the number of the pressure relief valves at the pressure relief port close to the air outlet of the multi-stage vacuum pump is a2, and a1>a2.

7. The vacuum device according to claim 1, wherein: The vacuum device further comprises: a first detachable component; the first detachable component comprises one or more vacuum pumps; The first detachable component is detachably connected in series to the air inlet of the multi-stage vacuum pump.

8. The vacuum device according to claim 7, characterized in that in, The pressure relief structure further includes: a relief valve; The first end of the overflow valve is connected to the air inlet of the multi-stage vacuum pump; The second end of the overflow valve is communicated with the main pipeline of the pressure relief structure.

9. The vacuum device according to claim 7, characterized in that in, The pressure relief structure further includes: a second detachable component; the second detachable component includes one or more pressure relief valves; The first end of the second detachable component is connected to the pressure relief port provided on the first detachable component; The second end of the second detachable component is detachably disposed on the main pipe of the pressure relief structure.

10. The vacuum device according to any one of claims 1 to 9, characterized in that: in, The pressure relief valve comprises: a valve port, a valve core and an elastic member; The valve port is connected to the pressure relief port; The valve core is connected to the elastic member; The valve core is used to move toward the valve port based on the pressure applied by the elastic member toward the valve port; The valve core is further configured to move away from the valve port based on pressure exerted by gas discharged from the pressure relief port.

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