Drying device

Abstract

The invention discloses a drying device which comprises an upper cavity, a lower cavity, a supporting assembly, a detection part and a lifting mechanism, the supporting assembly is arranged at a preset height position and comprises a supporting part and a driving mechanism, the driving mechanism is used for driving the supporting part to move in the horizontal direction, the detection part is arranged on the supporting assembly, and the lifting mechanism is arranged below the lower cavity. When the supporting part horizontally moves inwards to the wafer receiving position and is connected to the substrate, the detection part detects the technological parameters of the substrate, the lifting mechanism drives the lower cavity to move upwards in the vertical direction to the wafer receiving position, the substrate is transferred to the substrate tray from the supporting part and is borne by the substrate tray, then the supporting part horizontally moves outwards to the avoiding position, and the substrate is conveyed to the wafer receiving position. And then the lifting mechanism continues to drive the lower cavity to move upwards to the process position, so that the lower cavity and the upper cavity are closed to form a closed cavity. According to the invention, the detection value of the detection part is more accurate, and the whole process time of the drying treatment process is shortened.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductor manufacturing, and in particular to a drying device. Background Art

[0002] In the integrated circuit manufacturing process, the substrate needs to be dried after wet etching or cleaning process. It is known that a supercritical fluid with zero surface tension can be used to dry the substrate. For example, a substrate covered with IPA (Isopropyl alcohol) is transferred from a cleaning chamber to a drying device, and the upper and lower cavities of the drying device are closed to form a closed chamber. Then, a supercritical fluid is supplied to the closed chamber so that the IPA on the substrate surface dissolves into the supercritical fluid, forming a mixture of IPA and supercritical fluid. As the closed chamber is continuously supplied with supercritical fluid and the mixture of IPA and supercritical fluid is continuously discharged, the supercritical fluid is replaced with the IPA covering the substrate surface, achieving the purpose of removing IPA from the substrate. The supercritical fluid is then vaporized and discharged, and the closed chamber is opened after the pressure in the closed chamber returns to atmospheric pressure, and the dried substrate is finally taken out.

[0003] Before the drying process is carried out, the substrate covered with IPA is weighed and tested to detect the amount of liquid in the IPA liquid film. Currently, during the drying process, the support portion of the drying device rises and moves horizontally inward toward the axis of the lower cavity to the sheet-joining position. The robot places the substrate covered with IPA on the support portion. The weighing sensor connected to the support portion weighs the substrate. The support portion then descends to the sheet placement position, causing the substrate to fall onto the substrate tray of the lower cavity. The support portion then moves horizontally outward away from the axis of the lower cavity to a avoidance position. The lower cavity with the substrate placed thereon then rises and closes with the upper cavity to form a closed chamber. The movement of the support portion descending to place the sheet makes the entire drying process longer. Moreover, when the robot places the substrate, the support portion is subjected to force, causing it to shake, which in turn causes the weighing sensor to fluctuate. The weighing sensor may not have time to fully stabilize before it descends along with the support portion due to process requirements, ultimately causing the weighing sensor to detect fluctuations, bringing adverse effects. Summary of the Invention

[0004] The purpose of the present invention is to solve the problem in the prior art that the movement logic of the support assembly not only makes the entire process time longer, but also easily causes the detection value of the weighing sensor moving together with it to fluctuate.

[0005] To solve the above problems, an embodiment of the present invention provides a drying device, comprising:

[0006] upper cavity;

[0007] The lower cavity is arranged below the upper cavity and is provided with a substrate tray for placing the substrate;

[0008] A support assembly is provided at a predetermined height, the support assembly comprising a support portion and a driving mechanism, the driving mechanism being used to drive the support portion to move in a horizontal direction, and the support portion being used to receive the substrate;

[0009] a detection portion, disposed on the support assembly, for detecting process parameters of the substrate when the support portion is connected to the substrate;

[0010] A lifting mechanism is provided below the lower cavity and is used to drive the lower cavity to move in a vertical direction;

[0011] The drying device is configured as follows: when the support part moves horizontally inward toward the axial direction of the lower cavity to the splicing position and is connected to the substrate, the detection part detects the process parameters of the substrate, and the lifting mechanism drives the lower cavity to move upward in the vertical direction to the splicing position, so that the substrate is transferred from the support part to the substrate tray and carried by the substrate tray, and then the support part moves horizontally outward away from the axial direction of the support part to the avoidance position, and then the lifting mechanism continues to drive the lower cavity to move upward to the process position, so that the lower cavity and the upper cavity are closed to form a closed chamber.

[0012] An embodiment of the present invention provides a drying device, comprising:

[0013] upper cavity;

[0014] The lower cavity is arranged below the upper cavity and is provided with a substrate tray for placing the substrate;

[0015] A support assembly is provided at a predetermined height, the support assembly comprising a support portion and a driving mechanism, the driving mechanism being used to drive the support portion to move in a horizontal direction, and the support portion being used to receive the substrate;

[0016] A lifting mechanism is provided below the lower cavity and is used to drive the lower cavity to move in a vertical direction;

[0017] The drying device is configured as follows: when the support part moves horizontally inward toward the axial direction of the lower cavity to the splicing position and is connected to the substrate, the lifting mechanism drives the lower cavity to move upward in the vertical direction from the initial position to the splicing position, so that the substrate is transferred from the support part to the substrate tray and carried by the substrate tray, and then the support part moves horizontally outward away from the axial direction of the support part to the avoidance position, and then the lifting mechanism continues to drive the lower cavity to move upward to the process position, so that the lower cavity and the upper cavity are closed to form a closed chamber.

[0018] The driving mechanism of the support assembly of the drying device of the present invention drives the support part to move in the horizontal direction. When the support part is connected to the substrate, the detection part on the support assembly detects the process parameters of the substrate. At this time, the support assembly no longer moves downward, but waits for the lower cavity to rise and connect the pieces, thereby shortening the entire process time of the drying process. At the same time, during the time when the lower cavity rises and connects the pieces, the detection value of the detection part, such as the weighing sensor, has more than enough time to stabilize, that is, the stabilization time of the detection part during detection is increased.

[0019] Other features and corresponding beneficial effects of the present invention are described in the latter part of the specification, and it should be understood that at least some of the beneficial effects become obvious from the description in the specification of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a schematic front view of a drying device according to an embodiment of the present application;

[0021] Figures 2a to 2e This is a partial structural diagram of a drying device according to an embodiment of the present application;

[0022] Figure 3 This is a schematic top view of the lower cavity according to one embodiment of the present application;

[0023] Figure 4 A schematic diagram of a support assembly according to an embodiment of the present application;

[0024] Figure 5 This is a schematic front view of a lifting mechanism according to an embodiment of the present application;

[0025] Figure 6 A bottom view schematic diagram of a lifting mechanism according to an embodiment of the present application; and

[0026] Figure 7 This is a side view schematic diagram of a lifting mechanism and a guide mechanism according to an embodiment of the present application. DETAILED DESCRIPTION

[0027] The following is an explanation of the implementation of the present invention by specific specific embodiments. Those skilled in the art can easily understand other advantages and effects of the present invention from the contents disclosed in this specification. Although the description of the present invention will be introduced in conjunction with the preferred embodiment, this does not mean that the features of this invention are limited to this embodiment. On the contrary, the purpose of introducing the invention in conjunction with the embodiment is to cover other options or modifications that may be extended based on the claims of the present invention. In order to provide a deep understanding of the present invention, the following description will contain many specific details. The present invention can also be implemented without using these details. In addition, in order to avoid confusion or blurring the focus of the present invention, some specific details will be omitted in the description. It should be noted that the embodiments of the present invention and the features in the embodiments can be combined with each other without conflict.

[0028] It should be noted that in this specification, similar reference numerals and letters denote similar items in the following drawings, and therefore, once an item is defined in one drawing, it does not need to be further defined or explained in subsequent drawings.

[0029] The technical solution of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described are only some embodiments of the present invention, not all embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0030] In the description of the present invention, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely to facilitate and simplify the description of the present invention. They are not intended to indicate or imply that the devices or components referred to must have, be constructed, or operate in a specific orientation, and therefore should not be construed as limitations on the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0031] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed, detachable, or integral connections; mechanical or electrical connections; direct or indirect connections through an intermediate medium; and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0032] To make the objectives, technical solutions and advantages of the present invention more clear, the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.

[0033] Figure 1 A schematic front view of a drying device according to an embodiment of the present application is shown; Figures 2a to 2e A partial structural schematic diagram of a drying device according to an embodiment of the present application is shown.

[0034] See also Figure 1 The drying device provided in the present application includes an upper cavity 110, a lower cavity 120, a support assembly 200, a detection unit 300 and a lifting mechanism 400. The lower cavity 120 is arranged below the upper cavity 110 and is provided with a substrate tray 121, which is used to place the substrate (not shown). The support assembly 200 is arranged at a predetermined height position. The support assembly 200 includes a support portion 210 and a driving mechanism 223. The driving mechanism 223 is used to drive the support portion 210 to move in the horizontal direction. The support portion 210 is used to receive the substrate from the manipulator (not shown) and to hand over the substrate to the substrate tray 121 of the lower cavity 120. The detection unit 300 is arranged on the support assembly 200 and is used to detect the process parameters of the substrate when the support portion 210 is received by the substrate. The lifting mechanism 400 is arranged below the lower cavity 120 and is used to drive the lower cavity 120 to move in the vertical direction so that the lower cavity 120 and the upper cavity 110 are closed or opened. In an embodiment of the present application, the detection unit 300 includes a weighing sensor, and the process parameter of the substrate can be the weight of the substrate. For example, before the substrate is dried, the weighing sensor weighs the substrate covered with IPA on the support assembly 200 before drying. After the substrate is dried, the lower cavity 120 and the upper cavity 110 are opened, and the lifting mechanism 400 drives the lower cavity 120 to descend, and the substrate with the IPA removed is placed on the support assembly 200. At this time, the weighing sensor weighs the substrate on the support assembly 200 after drying. According to the difference between the two weighings, the removal of IPA on the substrate can be known, and then the drying state of the substrate can be known.

[0035] First combine Figure 1 and Figure 2a When the driving mechanism 223 drives the support part 210 to move horizontally inwardly toward the axis direction of the lower chamber 120 to the sheet-joining position and the support part 210 is connected to the substrate 500 from the robot, the detection part 300 detects the process parameters of the substrate 500 before drying. Figure 2b, the lifting mechanism 400 drives the lower chamber 120 to move upward from the initial position in the vertical direction (for example, move upward at a constant speed). When the lower chamber 120 moves to the joint position where the support part 210 is located, the substrate 500 is transferred from the support part 210 to the substrate tray 121 of the lower chamber 120 and is carried by the substrate tray 121. At this time, the lower chamber 120 stops rising. Then, as shown in FIG. Figure 2c As shown, the driving mechanism 223 drives the support portion 210 to move horizontally outward in the direction opposite to the axis of the lower cavity 120 to a evasive position, so that the support portion 210 exits the lower cavity 120. After the support portion 210 exits the lower cavity 120, as shown in FIG. Figure 2d As shown, the lifting mechanism 400 continues to move the lower chamber 120 upward to the process position, closing the lower chamber 120 and the upper chamber 110 to form a sealed chamber 123. Within this sealed chamber 123, the IPA (isopropyl alcohol)-coated substrate 500 is dried. In existing drying devices, the support portion must move downward to transfer the substrate 500 to the substrate tray 121 of the lower chamber 120. In the drying device proposed in this application, the support portion 210 does not need to descend, but instead waits for the lower chamber 120 to rise to connect the substrate. Compared to existing drying devices, this application eliminates the need for the support portion 210 to descend, thus shortening the overall drying process time. Furthermore, the time the support portion 210 waits for the lower chamber 120 to rise to connect the substrate allows the detection value of the detection unit 300 to stabilize sufficiently. Therefore, the time the lower chamber 120 rises to connect the substrate before drying overlaps with the detection time of the detection unit 300, which not only increases the stabilization time of the detection unit 300 during detection but also saves the overall drying process time.

[0036] When the drying process of the substrate 500 is completed and the sealed chamber 123 is opened, the lifting mechanism 400 drives the lower chamber 120 to move downward from the process position in the vertical direction to the splicing position mentioned above (the splicing position is the position where the substrate 500 is transferred between the lower chamber 120 and the support part 210, and is also the position where the robot takes and places the substrate 500 on the support part 210). Then, the driving mechanism 223 drives the support part 210 to move horizontally inward toward the axis direction of the lower chamber 120 to the splicing position, and then the lifting mechanism 400 drives the lower chamber 120 to move downward from the process position to the splicing position mentioned above. The mechanism 400 continues to drive the lower cavity 120 to move downward to the initial position, wherein during the descent of the lower cavity 120, the substrate 500 is transferred from the substrate tray 121 to the support portion 210 and is carried by the support portion 210, the detection portion 300 detects the process parameters of the dried substrate 500, and after the lower cavity 120 moves downward to the initial position, the robot removes the substrate 500 on the support portion 210, and finally the support portion 210 moves outward in the direction away from the axis of the lower cavity 120 to the avoidance position described above. In the existing drying device, when the closed chamber 123 is opened, the lifting mechanism 400 drives the lower cavity 120 to move vertically to the initial position, and then the support portion moves inward horizontally to the position of the substrate tray 121 and is located below the substrate 500, and then the support portion lifts the substrate 500 and rises to the position where the robot takes the sheet, and finally the robot takes the substrate 500. In the drying device proposed in this application, the support portion 210 does not need to rise. Compared to existing drying devices, this application also eliminates the need for the support portion 210 to rise, which can also shorten the entire drying process time. At the same time, the time it takes for the lower cavity 120 to descend to its initial position in this application also allows the detection value of the detection portion 300 to have sufficient time to stabilize. Therefore, the time it takes for the lower cavity 120 to descend to its initial position after drying overlaps with the detection time of the detection portion 300, which not only increases the stabilization time of the detection portion 300 during detection but also saves the entire drying process time.

[0037] Combine Figures 2a to 2e as well as Figure 3 , Figure 3 FIG2 shows a schematic top view of the lower cavity of an embodiment of the present application. In some embodiments, the drying device further includes a seal 124, a first sensor 125 and a limiter 126. The seal 124 is arranged on the periphery of the substrate tray 121 for sealing the closed chamber 123. The seal 124 can be a pan seal. The first sensor 125 is distributed on the side of the lower cavity 120 and is used to monitor the closing distance between the lower cavity 120 and the upper cavity 110 so that the lower cavity 120 can move to the same process position each time to close with the upper cavity 110 (refer to FIG2 ). Figure 2dThe position of the lower cavity 120 is so that the seal 124 is not crushed when the lower cavity 120 is lifted into place. The first sensor 125 can be a displacement sensor. The limiter 126 is set between the upper cavity 110 and the lower cavity 120. The material of the limiter 126 needs to have a certain hardness to play the role of protecting the seal 124. The material of the limiter 126 can be PTFE (Polytetrafluoroethylene). The limiter 126 can be set in the lower cavity 120 or the upper cavity 110. Figure 2d When the lower chamber 120 moves to the process position and closes with the upper chamber 110, a gap d is formed between the upper chamber 110 and the limiting member 126. Figure 2e When an abnormal situation occurs in which the lower cavity 120 continues to move upward after moving to the process position, the gap between the upper cavity 110 and the limiter 126 becomes zero. The limiter 126 can prevent the distance between the lower cavity 120 and the upper cavity 110 from being too small, thereby preventing the seal 124 from being crushed due to excessive compression.

[0038] In some embodiments, the first sensor 125 has at least three Figure 3 In the example shown, there are three first sensors 125 to monitor the levelness of the lower cavity 120. For example, two first sensors 125 are provided at intervals on the first side of the lower cavity 120, and one first sensor 125 is provided at intervals on the second side of the lower cavity 120, and the first side of the lower cavity 120 is opposite to the second side. Under the premise of ensuring that the upper cavity 110 is level, when the readings of the three first sensors 125 are consistent, it means that the levelness of the lower cavity 120 meets the process requirements, thereby monitoring whether the lower cavity 120 is level. When the lower cavity 120 is tilted, the readings output by the three first sensors 125 can be used to quickly feedback, so as to avoid the situation where the seal 124 is not pressed tightly when the tilted lower cavity 120 is closed with the upper cavity 110, resulting in a loose seal.

[0039] Figure 4 A schematic diagram of a support assembly according to an embodiment of the present application is shown.

[0040] In some embodiments, see Figure 4, the driving mechanism 223 of the support assembly 200 includes a sliding part 220 and a driving part 230, and the support assembly 200 also includes a first horizontal adjustment part 240 and a mounting part 250. The support part 210 of the support assembly 200 includes a carrier 211 and a connecting member 212, and the carrier 211 is connected to the first end of the connecting member 212 for supporting the substrate. The second end of the connecting member 212 is fixed above the detection part 300. The vertical distance between the end face of the first end of the connecting member 212 and the end face of the second end of the connecting member 212 is less than 10 cm, preferably, less than 5 cm. This structure of the connecting member 212 is conducive to reducing the stabilization time of the substrate when the robot just places the substrate on the carrier 211, thereby leaving more stabilization time for the detection part 300 during detection. Specifically, the support part 210 includes two bearing members 211 and a connecting member 212. The two bearing members 211 are parallel to each other and are arranged horizontally at intervals on the connecting member 212. The connecting member 212 is processed in one piece. The detection part 300 is arranged on the sliding part 220, and the support part 210 is connected to the sliding part 220 through the detection part 300. The sliding part 220 is connected to the driving part 230. The driving part 230 is used to drive the sliding part 220 to slide in the horizontal direction, so as to adjust the horizontal distance between the support part 210 and the substrate 500. The driving part 230 adopts a cylinder, an electric cylinder or a linear motor, etc., preferably an electric cylinder or a linear motor, which has higher control accuracy. The first horizontal adjustment part 240 is arranged between the driving part 230 and the mounting part 250. The mounting part 250 is fixed at a predetermined height position. For example, the mounting part 250 can be fixed at a predetermined height position on the machine frame (not shown in the figure), and the upper cavity 110 mentioned above is also fixed on the machine frame. Figure 1 In the illustrated example, there are two support assemblies 200 , and the mounting portions 250 of the two support assemblies 200 are respectively located on both sides of the lower cavity 120 .

[0041] See again Figure 4Since the horizontality of the support portion 210 will affect the horizontality of the substrate, the uniformity of the IPA distribution thereon, and the accuracy of the readings of the detection portion 300, it is inevitable to adjust the horizontality of the support portion 210 during the process. In the embodiment of the present application, a first horizontal adjustment portion 240 is used to adjust the horizontality of the support portion 210. The first horizontal adjustment portion 240 is arranged between the driving portion 230 and the mounting portion 250, and is located below the detection portion 300. The first horizontal adjustment portion 240 includes a first base 241, a first fixing member 242 and a first top screw 243. The first fixing member 242 is used to fix the first base 241 on the mounting portion 250, and the first top screw 243 is used to adjust the horizontality of the first base 241. Specifically, when adjusting the levelness of the support portion 210 using the first leveling portion 240, turning the first screw 243 changes the gap between the first base 241 and the mounting portion 250, thereby adjusting the levelness of the first base 241. The levelness of the driving portion 230 and the sliding portion 220, which are sequentially arranged above the first base 241, and the support portion 210 also changes along with the first base 241, thereby achieving the purpose of adjusting the levelness of the support portion 210. After determining the levelness of the support portion 210, the first fixing member 242 is used to fix the first base 241 to the mounting portion 250.

[0042] In the embodiment of the present application, the first level adjustment part 240 is arranged below the detection part 300. During the level adjustment operation, the operator's force will basically not cause irreversible damage to the upper detection part 300, such as the weighing sensor.

[0043] Figure 5 A schematic front view of a lifting mechanism according to an embodiment of the present application is shown; Figure 6 FIG. 1 shows a bottom view of a lifting mechanism according to an embodiment of the present application. Figure 5 The relevant structure of the needle guide column is not shown.

[0044] In some embodiments, combined Figure 1 、 Figure 5 and Figure 6 The lifting movement of the lower cavity 120 is realized by the lifting mechanism 400, and the opening and closing distance between the lower cavity 120 and the upper cavity 110 can be in the range of 45mm to 150mm. The lifting mechanism 400 includes a driving device 410, a lifting platform 430, a guide rail 440, a second sensor 450 and a grating ruler 460. The driving device 410 is used to drive the lifting platform 430 to move in the vertical direction, and the lifting platform 430 is used to lift the lower cavity 120 so that the lower cavity 120 moves in the vertical direction. The second sensor 450 is used to monitor the lifting position of the lifting platform 430. Figure 5In the example shown, four second sensors 450 are arranged in descending order. The two second sensors 4501 and 4504 at the highest and lowest positions are used to limit the maximum and minimum distances of the lifting platform 430, respectively. When the lifting platform 430 reaches the highest or lowest position, it cannot continue to rise or fall. A second sensor 4503 at the lower middle position is used to monitor whether the lifting platform 430 has lifted the lower chamber 120 to the splicing position. After the substrate is weighed, when the lifting platform 430 lifts the lower chamber 120 to this splicing position, the lower chamber 120 performs the splicing action. A second sensor 4502 at the upper middle position is used to monitor whether the lifting platform 430 has lifted the lower chamber 120 to the process position where it is closed with the upper chamber 110. The second sensors 450 can be photoelectric sensors.

[0045] The grating ruler 460 is used to measure the moving distance of the lifting platform 430. Figure 5 and Figure 6 The driving device 410 includes a driving member 420, a driving wheel 421, a driven wheel 422, a synchronous belt 423, a screw 424 and a movable end 425. The output end of the driving member 420 is connected to the driving wheel 421 to drive the driving wheel 421 to rotate. The synchronous belt 423 connects the driving wheel 421 and the driven wheel 422, so that the driving wheel 421 drives the driven wheel 422 to rotate through the synchronous belt 423. The driven wheel 422 is connected to the screw 424 to drive the screw 424 to rotate. The movable end 425 is connected to the lifting platform 430 and the guide rail 440 and is arranged on the screw 424. The movable end 425 is used to convert the rotational motion into linear motion on the screw 424, thereby driving the lifting platform 430 to move linearly along the guide rail 440. The grating ruler 460 is disposed on the moving end 425 , and the grating ruler 460 measures the moving distance of the moving end 425 to obtain the moving distance of the lifting platform 430 .

[0046] In some embodiments, as Figure 6 As shown, the lifting mechanism 400 further includes a tensioning wheel mechanism 428 to facilitate adjustment of the tightness of the synchronous belt 423 .

[0047] Figure 7 FIG1 shows a side view of a lifting mechanism and a guide mechanism of an embodiment of the present application. Figure 1 In the embodiment, the guide mechanism and the lifting mechanism overlap in position front to back.

[0048] In some embodiments, combined Figure 1 and Figure 7The drying device further includes a guide mechanism, which includes a mounting seat 471, a needle guide post 472, and a second horizontal adjustment portion 474. The needle guide post 472 is disposed on the mounting seat 471 and is connected to the lower cavity 120. In some embodiments, the needle guide post 472 can be directly connected to the lower cavity 120 or indirectly connected. When the needle guide post 472 is indirectly connected to the lower cavity 120, the upper end of the needle guide post 472 can be provided with Figure 7 The adapter 473 shown is connected to the lower cavity 120. This embodiment is provided with two needle guide pins 472, which are respectively arranged on both sides of the lifting platform 430. The needle guide pins 472 can achieve high-precision linear motion, so that the lower cavity 120 can be lifted and lowered stably. The second horizontal adjustment part 474 is provided at the bottom of the mounting seat 471 and is configured to adjust the horizontality of the mounting seat 471. The second horizontal adjustment part 474 includes a second base 4741, a second fixing part (not shown) and a second top screw 4742. The mounting seat 471 is fixed to the second base 4741. The second fixing part is used to fix the second base 4741 to the position to be installed, for example, on the machine frame. By turning the second jackscrew 4742, the gap between the second base 4741 and the machine frame can be adjusted, thereby adjusting the levelness of the second base 4741, and thus adjusting the levelness of the needle guide 472 and the adapter 473, and thus further adjusting the levelness of the lower chamber 120. After the levelness of the second base 4741 is determined, the second fixing member fixes the second base 4741.

[0049] In some embodiments, the detection part, such as the weighing sensor, and the support assembly 200 are independently provided. The detection part can be provided separately or integrated into the manipulator mentioned above. The specific setting can be combined with the actual process environment. In the case where the detection part and the support assembly 200 are independently provided, this embodiment proposes a drying device. The structure of the drying device except the detection part can refer to Figures 1 to 2e . The drying device of this embodiment includes an upper cavity 110, a lower cavity 120, a support assembly 200 and a lifting mechanism 400. The lower cavity 120 is arranged below the upper cavity 110 and is provided with a substrate tray 121, which is used to place the substrate 500. The support assembly 200 is arranged at a predetermined height position, and the support assembly 200 includes a support portion 210 and a driving mechanism 223. The driving mechanism 223 is used to drive the support portion 210 to move in the horizontal direction, and the support portion 210 is used to receive the substrate 500 from the robot arm and to transfer the substrate 500 to the substrate tray 121 of the lower cavity 120. The lifting mechanism 400 is arranged below the lower cavity 120 and is used to drive the lower cavity 120 to move in the vertical direction so that the lower cavity 120 and the upper cavity 110 are closed or opened.

[0050] After the driving mechanism 223 drives the support portion 210 to move horizontally inward toward the axis of the lower chamber 120 to the splicing position, the robot places the substrate 500 covered with IPA (isopropyl alcohol) on the support portion 210, and then the lifting mechanism 400 drives the lower chamber 120 to move upward from the initial position in the vertical direction (for example, at a uniform upward speed). When the lower chamber 120 moves to the splicing position where the support portion 210 is located, the substrate 500 is transferred from the support portion 210 to the substrate tray 121 and carried by the substrate tray 121. At this time, the lower chamber 120 stops rising. The driving mechanism 223 then drives the support portion 210 to move horizontally outward away from the axis of the lower chamber 120 to the avoidance position, so that the support portion 210 exits the lower chamber 120. After the support member exits the lower chamber 120, the lifting mechanism 400 continues to move the lower chamber 120 upward to the processing position, closing the lower chamber 120 with the upper chamber 110 to form a sealed chamber 123. The IPA (isopropyl alcohol)-coated substrate 500 is dried within this sealed chamber 123. The drying apparatus proposed in this embodiment eliminates the need for the support member 210 to descend, thus shortening the overall drying process time. Furthermore, the lack of a descending motion ensures a uniform and stable IPA film on the surface of the substrate 500 on the support member 210.

[0051] When the drying process of the substrate 500 is completed and the closed chamber 123 is opened, the lifting mechanism 400 drives the lower chamber 120 to move downward in the vertical direction from the process position to the splicing position (the splicing position is the position for transferring the substrate 500 between the lower chamber 120 and the support part 210, and is also the position for the robot to take and place the substrate 500 on the support part 210). Then the driving mechanism 223 drives the support part 210 to move horizontally inward toward the axial direction of the lower chamber 120 to the splicing position. Then the lifting mechanism 400 continues to drive the lower chamber 120 to move downward, so that the substrate 500 is transferred from the substrate tray 121 to the support part 210 and is carried by the support part 210. After the lower chamber 120 moves downward to the initial position, the substrate 500 on the support part 210 is taken away by the robot. Finally, the support part 210 moves outward toward the axial direction of the lower chamber 120 to the avoidance position. The drying device proposed in this embodiment eliminates the need for the support portion 210 to rise, and can also shorten the entire drying process time.

[0052] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, rather than to limit it. Although the present invention has been described in detail with reference to the above embodiments, those skilled in the art should understand that they can still modify the technical solutions described in the above embodiments, or replace some or all of the technical features therein with equivalents. However, these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of the present invention.

Claims

1. A drying device, characterized in that: include: upper cavity; The lower cavity is arranged below the upper cavity and is provided with a substrate tray, wherein the substrate tray is used to place the substrate; A support assembly is provided at a predetermined height, the support assembly comprising a support portion and a driving mechanism, the driving mechanism being used to drive the support portion to move in a horizontal direction, and the support portion being used to receive the substrate; a detection portion, disposed on the support assembly, for detecting process parameters of the substrate when the support portion is connected to the substrate; A lifting mechanism is provided below the lower cavity and is used to drive the lower cavity to move in a vertical direction; The drying device is configured as follows: when the support portion moves horizontally inwardly toward the axial direction of the lower cavity to the splicing position and is connected to the substrate, the detection portion detects the process parameters of the substrate, and the lifting mechanism drives the lower cavity to move upward from the initial position along the vertical direction to the splicing position, so that the substrate is transferred from the support portion to the substrate tray and carried by the substrate tray, and then the support portion moves horizontally outwardly away from the axial direction of the support portion to a avoidance position, and then the lifting mechanism continues to drive the lower cavity to move upward to the process position, so that the lower cavity and the upper cavity are closed to form a closed chamber.

2. The drying device according to claim 1, characterized in that The drying device is further configured as follows: when the closed chamber is opened, the lifting mechanism drives the lower cavity to move downward from the process position to the splicing position along the vertical direction, and then the support portion moves horizontally inward toward the axial direction of the lower cavity to the splicing position, and then the lifting mechanism continues to drive the lower cavity to move downward, so that the substrate is transferred from the substrate tray to the support portion and carried by the support portion, the detection portion detects the process parameters of the substrate, and when the lower cavity moves downward to the initial position, the substrate on the support portion is removed, and finally the support portion moves outward away from the axial direction of the lower cavity to the avoidance position.

3. The drying device according to claim 1, characterized in that The process parameter of the substrate includes the weight of the substrate, and the detection unit includes a weighing sensor for detecting the weight of the substrate.

4. The drying device according to claim 1, characterized in that The driving mechanism includes a sliding part and a driving part, and the supporting assembly also includes a first horizontal adjustment part and a mounting part. The first horizontal adjustment part is arranged between the driving part and the mounting part, and is configured to: adjust the horizontality of the supporting part, the supporting part is connected to the sliding part, the sliding part is connected to the driving part, the driving part is used to drive the sliding part to slide in the horizontal direction, the driving part is installed on the mounting part, and the mounting part is fixed at the predetermined height position.

5. The drying device according to claim 4, characterized in that The detection portion is disposed on the sliding portion and is located above the first level adjustment portion.

6. The drying device according to claim 1, characterized in that The supporting portion includes a bearing member and a connecting member, wherein the bearing member is connected to a first end of the connecting member and is used to bear the substrate, and a second end of the connecting member is fixed above the detecting portion; wherein, A vertical distance between an end surface of the first end of the connecting member and an end surface of the second end of the connecting member is less than 10 cm.

7. The drying device according to claim 1, characterized in that Also includes: a sealing member, disposed on the periphery of the substrate tray, for sealing the sealed chamber; The first sensor is used to monitor the combined cavity distance between the lower cavity and the upper cavity.

8. The drying device according to claim 7, characterized in that There are at least three first sensors, and the at least three first sensors are used to monitor the levelness of the lower cavity.

9. The drying device according to claim 7, characterized in that Also includes: A limiting member is arranged between the upper cavity and the lower cavity.

10. The drying device according to claim 1, characterized in that The lifting mechanism includes a driving device, a lifting platform, a second sensor and a grating ruler. The driving device is used to drive the lifting platform to move in a vertical direction. The lifting platform is used to lift the lower cavity. The second sensor is used to monitor the lifting position of the lifting platform. The grating ruler is used to measure the moving distance of the lifting platform.

11. The drying device according to claim 10, characterized in that The driving device includes a screw and a moving end. The moving end is connected to the lifting platform and is arranged on the screw. The moving end is used to make linear motion on the screw. The grating ruler is arranged on the moving end. The grating ruler measures the moving distance of the lifting platform by measuring the moving distance of the moving end.

12. The drying device according to claim 1, characterized in that Also included is a guide mechanism, the guide mechanism comprising: Mounting seat; The needle roller guide post is arranged on the mounting seat and connected to the lower cavity.

13. The drying device according to claim 12, characterized in that: The guide mechanism further comprises: The second level adjustment portion is provided at the bottom of the mounting seat and is configured to adjust the levelness of the mounting seat.

14. A drying device, characterized in that: include: upper cavity; The lower cavity is arranged below the upper cavity and is provided with a substrate tray, wherein the substrate tray is used to place the substrate; A support assembly is provided at a predetermined height, the support assembly comprising a support portion and a driving mechanism, the driving mechanism being used to drive the support portion to move in a horizontal direction, and the support portion being used to receive the substrate; A lifting mechanism is provided below the lower cavity and is used to drive the lower cavity to move in a vertical direction; The drying device is configured as follows: when the support portion moves horizontally inwardly toward the axial direction of the lower cavity to the splicing position and is connected to the substrate, the lifting mechanism drives the lower cavity to move upward along the vertical direction from the initial position to the splicing position, so that the substrate is transferred from the support portion to the substrate tray and carried by the substrate tray, and then the support portion moves horizontally outwardly away from the axial direction of the support portion to a avoidance position, and then the lifting mechanism continues to drive the lower cavity to move upward to the process position, so that the lower cavity and the upper cavity are closed to form a closed chamber.

15. The drying device according to claim 14, characterized in that The drying device is further configured as follows: when the closed chamber is opened, the lifting mechanism drives the lower cavity to move downward from the process position to the splicing position along the vertical direction, and then the support portion moves horizontally inward toward the axial direction of the lower cavity to the splicing position, and then the lifting mechanism continues to drive the lower cavity to move downward, so that the substrate is transferred from the substrate tray to the support portion and carried by the support portion, when the lower cavity moves downward to the initial position, the substrate on the support portion is removed, and finally the support portion moves outward away from the axial direction of the lower cavity to the avoidance position.

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