Laser diode group, laser diode stacking structure and laser

Abstract

The invention provides a laser diode group, a laser diode stacking structure and a laser, the laser diode group comprises a heat sink, a first light beam adjusting module and M laser diode chips, the first light beam adjusting module and the M laser diode chips are arranged on the heat sink, and M is a natural number greater than or equal to 2; the laser diode chips are sequentially arranged on the upper surface of the heat sink along a first direction; and the first light beam adjusting module is arranged on the light emitting side of each laser diode chip and is used for adjusting the light emitting position and direction, so that laser emitted by each laser diode chip is emitted in parallel in the same plane and / or combined into one light beam. The laser diode group, the laser diode stacking structure and the laser have the advantages of being high in efficiency, small in size, high in heat dissipation efficiency, long in service life and the like.

Description

Technical Field

[0001] The present invention relates to the field of laser technology, and in particular to a laser diode group, a laser diode stacking structure and a laser. Background Art

[0002] Laser diodes include single heterojunction (SH), double heterojunction (DH), and quantum well (QW) laser diodes. Quantum well laser diodes, with their low threshold current and high output power, are the mainstream product in market applications. Laser diodes offer advantages such as high efficiency, compact size, and long life, but the output power of a single laser diode is low, necessitating the combination of multiple laser diodes to achieve the power required for various applications.

[0003] Laser diodes have an efficiency of approximately 55%, and heat must be effectively dissipated to ensure proper operation. This is currently achieved through the use of microchannel coolers; however, microchannel coolers have a limited service life due to erosion and corrosion. In contrast, configurations using many individual emitters offer significant advantages in heat management; however, the size of a diode laser system constructed with many individual emitters is significantly larger than a diode laser system using microchannel coolers.

[0004] Therefore, how to achieve power expansion while taking into account size, heat dissipation efficiency and service life has become one of the urgent problems to be solved by those skilled in the art.

[0005] It should be noted that the above technical background is merely provided to provide a clear and complete description of the technical solutions of the present invention and to facilitate understanding by those skilled in the art. Simply because these solutions are described in the technical background section of the present invention, it should not be assumed that the above technical solutions are well known to those skilled in the art. Summary of the Invention

[0006] In view of the above-mentioned shortcomings of the prior art, the purpose of the present invention is to provide a laser diode group, a laser diode stack structure and a laser, which are used to solve the problems in the prior art of laser power expansion applications that cannot take into account the size, heat dissipation efficiency and service life.

[0007] To achieve the above objectives and other related objectives, the present invention provides a laser diode assembly, comprising:

[0008] A heat sink, a first beam adjustment module disposed on the heat sink, and M laser diode chips, where M is a natural number greater than or equal to 2;

[0009] The laser diode chips are arranged in sequence on the upper surface of the heat sink along a first direction; the first beam adjustment module is arranged on the light-emitting side of each laser diode chip, and is used to adjust the light-emitting position and direction so that the lasers emitted by each laser diode chip are emitted in parallel in the same plane and / or combined into a beam of light.

[0010] Optionally, the first beam adjustment module includes M first collimating lenses, M second collimating lenses and m first-type beam translation adjustment elements, where m is equal to M or M-1;

[0011] The first collimating lens and the second collimating lens correspond to each laser diode chip one by one, and the first collimating lens and the second collimating lens corresponding to each laser diode chip are arranged in sequence along the light beam propagation direction; the first collimating lens collimates the light beam emitted by the laser diode chip in the fast axis direction, and the second collimating lens collimates the light beam in the slow axis direction;

[0012] Each first type of beam translation adjustment element corresponds to a corresponding laser diode chip one by one and is arranged on the optical path behind the corresponding first collimating lens to translate the laser light emitted by the laser diode chip in the first direction.

[0013] More optionally, each first-type beam translation adjustment element is any one or a combination of a rhombus prism, a pair of reflectors, a parallel plane window, a pair of prisms and an eccentric telescope structure.

[0014] Optionally, the first beam adjustment module includes M first collimating lenses, M second collimating lenses and M beam adjustment elements corresponding one-to-one to each laser diode chip;

[0015] The first collimating lens and the second collimating lens corresponding to each laser diode chip are sequentially arranged along the light beam propagation direction; the first collimating lens collimates the light beam emitted by the laser diode chip in the fast axis direction, and the second collimating lens collimates the light beam in the slow axis direction;

[0016] Each beam adjustment element is arranged on the optical path corresponding to the first collimating lens, and is used to change the light emission direction of the laser light emitted by each laser diode chip and adjust the spacing of the laser light emitted by each laser diode chip.

[0017] More optionally, the beam adjustment element includes M reflectors; the reflectors are staggered in sequence in the light emitting direction of the laser.

[0018] More optionally, the first beam adjustment module further includes M cylindrical lenses arranged on the optical path after the corresponding first collimating lens; each cylindrical lens adjusts the laser light emitted by the corresponding laser diode chip to propagate in parallel within the same plane.

[0019] More optionally, the M first collimating lenses are integrated on one long lens.

[0020] More optionally, the M second collimating lenses are integrated into an integral lens group.

[0021] More optionally, the first beam adjustment module further includes a wavelength selective element arranged on the optical path after the corresponding first collimating lens.

[0022] More optionally, the laser diode group also includes a first optical device, which is arranged on the output light path of the first beam adjustment module, divides the light beam in the slow axis direction into K segments, and arranges the K segments of light beam side by side in the fast axis direction; wherein K is a natural number greater than or equal to 2.

[0023] More optionally, the upper surface of the heat sink is set to two parallel planes in a stepped shape, and the first beam adjustment module also includes a second type of beam translation adjustment element arranged on the optical path after the corresponding first collimating lens; the second type of beam translation adjustment element is arranged at the steps of the two planes, and is used to translate and adjust the laser emitted by each laser diode chip in the second direction to the same plane.

[0024] More preferably, the first beam adjustment module further includes M optical functional elements, each optical functional element being arranged on the optical path after the first collimating lens and before the first beam adjustment module, and being used to rotate the light beam emitted by each laser diode chip 90° around the optical axis.

[0025] More preferably, each optical functional element is one or a combination of a Dover prism, a pair of reflectors, and a pair of cylindrical lenses.

[0026] More preferably, the laser diode group also includes a first optical device, which is arranged on the output light path of the first beam adjustment module, divides the light beam in the slow axis direction into K segments, and arranges the K segments of light beam side by side in the fast axis direction; wherein K is a natural number greater than or equal to 2.

[0027] To achieve the above-mentioned and other related objectives, the present invention further provides a laser diode stack structure, comprising:

[0028] A second beam adjustment module and N laser diode groups, where N is a natural number greater than or equal to 2;

[0029] The laser diode groups are arranged sequentially in a second direction, and the light beams output by the laser diode groups have the same emission direction and are arranged sequentially in a set direction; the second direction is perpendicular to the plane where the laser diode chips are located;

[0030] The beam adjustment module is arranged on the light-emitting side of each laser diode group and is used to translate the light beam so that the light beams output by each laser diode group propagate in parallel within the same plane.

[0031] Optionally, the set direction is the first direction.

[0032] Optionally, the second beam adjustment module includes N-1 groups or N groups of third-type beam translation adjustment elements; each group of third-type beam translation adjustment elements translates the beam output by the corresponding laser diode group in the second direction.

[0033] More optionally, each third type of beam translation adjustment element is any one or a combination of a rhombus prism, a pair of reflectors, a parallel plane window, a pair of prisms and an eccentric telescope structure.

[0034] To achieve the above-mentioned object and other related objects, the present invention further provides a laser, which at least includes: the above-mentioned laser diode stacking structure.

[0035] Optionally, the laser further comprises a second optical device, which is arranged on the optical path after the laser diode stack structure and is used to couple the light beam into the optical waveguide.

[0036] As described above, the laser diode assembly, laser diode stack structure, and laser of the present invention have the following beneficial effects:

[0037] The laser diode assembly of the present invention comprises at least two laser diode chips arranged side by side. A first beam adjustment module adjusts the laser light emitted by each laser diode chip to be parallel and aligned within the same plane. The spacing between the laser beams emitted by each laser diode chip is also adjusted, and when necessary, the laser light emitted by each laser diode chip is combined into a single beam. The laser diode assembly of the present invention also utilizes a cylindrical lens and the first beam adjustment module to adjust for process errors, significantly improving accuracy and reducing operational complexity.

[0038] The laser diode stacking structure of the present invention uses at least two laser diode groups, each of which is arranged in sequence in a direction perpendicular to the plane where the laser diode chip is located. The light beams emitted by each laser diode group are then translated into the same plane, thereby further combining the light beams emitted by each laser diode group; the efficiency is greatly improved by combining the light beams.

[0039] In the laser diode stack structure of the present invention, each laser diode chip is arranged on a heat sink, which greatly reduces the size of the device while ensuring the heat dissipation efficiency and the service life of the heat sink. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1FIG. 1 is a schematic diagram of the first laser diode stack structure according to the present invention in the XZ plane.

[0041] Figure 2 FIG. 1 is a schematic diagram of the first laser diode stack structure according to the present invention in the YZ plane.

[0042] Figure 3 It is a schematic diagram showing the output light beam of the first laser diode stack structure of the present invention in the XY plane.

[0043] Figure 4 It is a schematic diagram of the laser COS chip of the present invention in the YZ plane.

[0044] Figure 5 It shows a schematic diagram of the laser COS chip of the present invention in the XZ plane.

[0045] Figure 6 FIG. 4 is a schematic diagram of the first laser diode group according to the present invention in the XZ plane.

[0046] Figure 7 FIG. 4 is a schematic diagram of a second laser diode group according to the present invention in the XZ plane.

[0047] Figure 8 FIG. 4 is a schematic diagram of a third laser diode group according to the present invention in the XZ plane.

[0048] Figure 9 The optical path diagram shows that the emitted light of the laser diode chip of the present invention is collimated in the fast axis direction.

[0049] Figure 10 The optical path diagram shows that the output light of the laser diode chip of the present invention is collimated in the fast axis and slow axis directions.

[0050] Figure 11 FIG. 4 is a schematic diagram of a fourth laser diode group according to the present invention in the XZ plane.

[0051] Figure 12 FIG. 4 is a schematic diagram of a fifth laser diode group according to the present invention in the XZ plane.

[0052] Figure 13 FIG. 4 is a schematic diagram of a sixth laser diode group according to the present invention in the XZ plane.

[0053] Figure 14 Shown is a schematic diagram of a first beam translation adjustment element of the present invention.

[0054] Figure 15 Shown is a schematic diagram of a second beam translation adjustment element of the present invention.

[0055] Figure 16Shown is a schematic diagram of a third beam translation adjustment element of the present invention.

[0056] Figure 17 FIG. 1 is a schematic diagram showing a fourth type of beam translation adjustment element according to the present invention.

[0057] Figure 18 Shown is a schematic diagram of a fifth beam translation adjustment element of the present invention.

[0058] Figure 19 Shown is a schematic diagram of a sixth beam translation adjustment element of the present invention.

[0059] Figure 20 Shown is a schematic diagram of a seventh beam translation adjustment element of the present invention.

[0060] Figure 21 Shown is a schematic diagram of an eighth beam translation adjustment element of the present invention.

[0061] Figure 22 Shown is a schematic diagram of a ninth beam translation adjustment element of the present invention.

[0062] Figure 23 FIG. 4 is a schematic diagram of the seventh laser diode group according to the present invention in the XZ plane.

[0063] Figure 24 FIG. 4 is a schematic diagram of a second laser diode stack structure according to the present invention in the XZ plane.

[0064] Figure 25 FIG. 1 is a schematic diagram of a second laser diode stack structure according to the present invention in the YZ plane.

[0065] Figure 26 FIG. 4 is a schematic diagram of an eighth laser diode group according to the present invention in the XZ plane.

[0066] Figure 27 FIG. 4 is a schematic diagram of an eighth laser diode group according to the present invention in the YZ plane.

[0067] Figure 28 FIG. 1 is a schematic diagram of a third laser diode stack structure according to the present invention in the YZ plane.

[0068] Figure 29 FIG. 4 is a schematic diagram of a ninth laser diode group according to the present invention in the XZ plane.

[0069] Figure 30 FIG. 1 is a schematic diagram of a third laser diode stack structure according to the present invention in the XZ plane.

[0070] Figure 31It is a schematic diagram showing the output light beam of the third laser diode stack structure of the present invention in the XY plane.

[0071] Figure 32 Shown is a schematic diagram of a first optical functional element of the present invention.

[0072] Figure 33 Shown is a schematic diagram of a second optical functional element of the present invention.

[0073] Figure 34 FIG. 1 is a schematic diagram showing a third optical functional element of the present invention.

[0074] Figure 35 FIG. 4 is a schematic diagram of a fourth laser diode stack structure according to the present invention in the XZ plane.

[0075] Figure 36 Shown is a schematic diagram of the light spot of the first optical device of the present invention before and after shaping.

[0076] Figure 37 Shown is a schematic diagram of the laser of the present invention in the XZ plane.

[0077] Component number description

[0078] 10 Laser diode stack structure

[0079] 1 Laser diode group

[0080] 11 Heat sink

[0081] 12 laser diode chips

[0082] 12a base plate

[0083] 12b Solder layer

[0084] 12c electrode layer

[0085] 12d transmitter

[0086] 12e Metal Patch Cable

[0087] 13. First beam adjustment module

[0088] 131 First collimating lens

[0089] 132 Second collimating lens

[0090] 133 First type beam translation adjustment element

[0091] 134 wavelength selective elements

[0092] 135 Beam Adjustment Components

[0093] 136 Cylindrical lens

[0094] 137 Second type of beam translation adjustment element

[0095] 138 Optical functional elements

[0096] 2 Second beam adjustment module

[0097] 31 Rhombus Prism

[0098] 32a First reflector

[0099] 32b Second reflector

[0100] 32c Any lens or transmissive element

[0101] 33 Parallel plane window

[0102] 34a First prism

[0103] 34b Second prism

[0104] 35a eyepiece

[0105] 35b objective lens

[0106] 36a Third reflector

[0107] 36b Fourth reflector

[0108] 41 Dover Prism

[0109] 42a Fifth reflector

[0110] 42b Sixth reflector

[0111] 43a First cylindrical lens

[0112] 43b Second cylindrical lens

[0113] 5. First optical device

[0114] 20 Second optical device

[0115] 30 Optical waveguide DETAILED DESCRIPTION

[0116] The following describes the embodiments of the present invention through specific examples. Those skilled in the art will readily understand the other advantages and benefits of the present invention from the disclosure herein. The present invention may also be implemented or applied through various other specific embodiments, and the details in this specification may be modified or altered based on different viewpoints and applications without departing from the spirit of the present invention.

[0117] See also Figures 1 to 37It should be noted that the diagrams provided in this embodiment are merely schematic illustrations of the basic concept of the present invention. Therefore, the diagrams only show components related to the present invention and are not drawn according to the number, shape, and size of components in actual implementation. In actual implementation, the type, quantity, and proportion of each component may be changed arbitrarily, and the component layout may also be more complex.

[0118] The present invention provides a laser diode group and a laser diode stack structure consisting of N laser diode groups and a second beam adjustment module. Each laser diode group provides a light beam that propagates in parallel within its own set plane. The N laser diode groups are arranged in sequence in a direction perpendicular to the plane where the laser diode chip is located. The light beams emitted by each laser diode group are then translated to be emitted in parallel within the same plane, so that the N groups of lasers emitted by the N laser diode groups are combined within the same plane. In this way, multiple single laser diode chips are used in a compact structure to efficiently expand power while taking into account issues such as size, heat dissipation efficiency, and service life. The laser diode group and laser diode stack structure of the present invention can maintain the brightness of a single laser diode chip, so that the light beams after the multiple laser diode chips are combined can be coupled into an optical waveguide with a minimum diameter, or a pump source with maximum brightness can be achieved. The following is a detailed description of the implementation method of the present invention.

[0119] like Figure 1 and Figure 2 As shown, the present invention proposes a laser diode stack structure 10 comprising a second beam adjustment module 2 and N laser diode groups 1, where N is a natural number greater than or equal to 2. Each laser diode group 1 comprises a heat sink 11, M laser diode chips 12 disposed on the heat sink 11, and a first beam adjustment module 13, where M is a natural number greater than or equal to 2. The laser diode chips 12 are sequentially arranged on the upper surface of the heat sink 11 along a first direction. The first beam adjustment module 13 is disposed on the light-emitting side of each laser diode chip 12 and is used to adjust the light-emitting position and direction so that the laser light emitted by each laser diode chip 12 is emitted parallel to the same plane and / or combined into a single beam. The laser diode groups 1 are sequentially arranged in a second direction (perpendicular to the plane where the laser diode chips 12 are located). The beams output by each laser diode group 1 have the same emission direction and are sequentially arranged in a predetermined direction. The second beam adjustment module 2 is disposed on the light-emitting side of each laser diode group 1 and is used to translate and adjust the beams so that the beams output by each laser diode group 1 propagate within the same plane.

[0120] Specifically, if Figure 2As shown, the heat sink 11 is located at the bottom of the laser diode group 1. The heat sink 11 is used to dissipate heat. In this example, the heat sink 11 is made of a material with high thermal conductivity, including but not limited to metal or an alloy with high thermal conductivity. In actual use, the material of the heat sink 11 can be set as needed, and any material and shape that can meet the heat dissipation requirements are applicable.

[0121] Specifically, if Figure 2 and Figures 4 and 5 As shown, in this embodiment, a single laser diode chip 12 of the present invention is packaged in a COS (Chip on Submount) package to form a laser COS chip. As an example, the laser COS chip includes a substrate 12a and a laser diode chip 12 mounted on the substrate 12a. The substrate 12a is composed of a thin, thermally conductive ceramic plate and a conductive layer on the surface. The bottom electrode of the laser diode chip 12 is attached to the top surface of the substrate 12a via a solder layer 12b and is electrically connected to the conductive layer on the top surface of the substrate 12a. The top electrode of the laser diode chip 12 is connected to the top electrode layer 12c. The laser diode chip 12 emits a light beam from an emitting end 12d, with an emission width d. For ease of explanation, the present invention introduces a coordinate system in which the XZ plane is parallel to the plane of the laser diode chip 12, the X-axis is the laser slow axis direction (parallel to the pn junction direction, the first direction defined in the present invention), the Y-axis is the laser fast axis direction (parallel to the stacking direction of the components of the laser COS chip 12, that is, the direction perpendicular to the pn junction on the XY plane, the second direction defined in the present invention), and the Z-axis is parallel to the light emission direction of the laser diode chip 12. Due to the unique geometric shape of the laser diode chip 12, the light beam from the laser diode chip 12 has a larger divergence angle θfa in the fast axis direction and a smaller divergence angle θsa in the slow axis direction.

[0122] It should be noted that in actual use, the laser diode chip can be a bare die or other packaging structure, and any laser diode chip that can be arranged side by side on the same heat sink is applicable to the present invention, not limited to this embodiment. Figure 1 As shown, an advantageous method is to use a metal jumper 12e to connect the laser diode chips 12 on the same laser diode group 1 in series, and then apply voltage to the positive contact + and negative contact - at both ends of the series structure, which can reduce the current used and thus reduce losses.

[0123] like Figure 1 As shown, in this embodiment, the number of laser diode chips 12 arranged side by side on each laser diode group 1 is set to 6. In actual use, it can be set as needed, including but not limited to 3, 5, 7, 8, 10, 15, and 20, and is not limited to this embodiment.

[0124] As an implementation method of the present invention, the first beam adjustment module 13 includes M first collimating lenses 131, M second collimating lenses 132 and M first-type beam translation adjustment elements 133. In this example, M is 6; usually the first collimating lens 131 and the second collimating lens 132 are respectively implemented by cylindrical lenses; the first collimating lens 131, the second collimating lens 132 and the first-type beam translation adjustment element 133 correspond one-to-one to each laser diode chip 12. The first collimating lens 131 and the second collimating lens 132 corresponding to each laser diode chip 12 are arranged in sequence along the light beam propagation direction (Z axis); the first collimating lens 131 collimates the light beam emitted by the laser diode chip 12 in the fast axis direction, and the second collimating lens 132 collimates the light beam in the slow axis direction; the first type of beam translation adjustment element 133 is arranged on the optical path corresponding to the first collimating lens 131, and is used to translate and adjust the laser emitted by the laser diode chip 12 in the first direction (X axis). After the translation, the spacing between the lasers emitted by each laser diode chip 12 is adjusted, which can achieve the effect of beam combining (the brightness after beam combining is consistent with the brightness of the light emitted by a single laser diode chip 12), and can also be emitted in the form of 6 sequentially arranged light spots, which can be set according to actual needs. Specifically, each laser diode chip 12 in the same laser diode group 1 emits a beam of light, and the first beam adjustment module 13 collimates, adjusts the width, or combines the lasers emitted by each laser diode chip 12 so that the beams output by each laser diode chip 12 in the laser diode group 1 propagate in parallel in the same plane. The first beam adjustment module 13 can adjust the position of the output beams relative to the respective laser diode groups 1 as needed, such as Figures 6 to 8 As shown in FIG, the output beams of the laser diode group 1 are located on the left, middle and right sides of the laser diode group 1. Figure 9 As shown, a first collimating lens 131 is provided at the output end of a single laser diode chip 12 to collimate the light beam in the fast axis direction, and the light beam height is adjusted to Wy; Figure 10As shown, to maintain brightness, a second collimating lens 132 is further used to collimate the light beam in the slow axis direction, and the beam width is adjusted to Wx. After collimation in two directions, the beam divergence angle is reduced, thereby making the light beam of a single laser diode chip 12 have a nearly rectangular cross-section with a cross-sectional area of ​​Wx*Wy. In this example, the first type of beam translation adjustment element 133 is located after the second collimating lens 132; in actual use, it can also be set after the first collimating lens 131 and before the second collimating lens 132. In fact, the first type of beam translation adjustment element 133 can be set at any position after the first collimating lens 131 on the optical path as needed. That is, the position of the elements located after the first collimating lens 131 on the optical path is interchangeable, and this is not limited to this embodiment. As another example, the number of the first type of beam translation adjustment elements 133 can be reduced by one, that is, one of the laser diode chips 12 is used as a reference, and the position of the laser emitted by it does not need to be translated, and the lasers emitted by the other five laser diode chips 12 are moved closer to the reference by translation; similarly, the first beam adjustment module 13 can adjust the position of the laser diode chip 12 used as the reference as needed, such as Figures 11 to 13 As shown, I will not go into details here.

[0125] Specifically, the first type of beam translation adjustment element 133 is used to translate the beam in the first direction. Any component that can achieve beam translation and adjustment is applicable to the present invention. Several examples are provided below, but are not limited to these examples. In the first example, Figure 14 As shown, the first type of beam translation adjustment element 133 is implemented by a rhombus prism 31, and the beam translation distance D can be set as needed. Figure 15 As shown, the first type of beam translation adjustment element 133 is implemented by a pair of reflectors, including a first reflector 32a and a second reflector 32b; the first reflector 32a reflects the incident light beam, and the second reflector 32b reflects the light beam reflected by the first reflector 32a again; the reflection angle can be set as needed, and the incident light beam and the outgoing light beam can be parallel in different planes. Preferably, the first reflector 32a reflects the light beam by -90° (rotated 90° clockwise), and the second reflector 32b reflects the light beam by 90° (rotated 90° counterclockwise). Usually, the first reflector 32a and the second reflector 32b are respectively implemented by plane reflectors; any lens or transmission element 32c (other elements in the optical path except the first collimating lens 131, including but not limited to the second collimating lens) can also be set between the first reflector 32a and the second reflector 32b. In the third example, as shown in FIG. Figure 16 As shown, the first type of beam translation adjustment element 133 is implemented by a parallel plane window 33. The parallel plane window 33 is optically transparent glass and has two mirror surfaces parallel to each other. The translation of the beam is achieved by the refraction of light in the parallel plane window 33. Figures 17 to 20As shown, the first type of beam translation adjustment element 133 is implemented by a pair of prisms, including a first prism 34a and a second prism 34b. The first prism 34a reduces or expands the diameter of the incident light, and the second prism 34b expands or reduces the diameter of the light emitted by the first prism 34a. The beam diameter can be further adjusted by beam expansion and / or beam contraction. The incident light diameter is w1, and the exiting light diameter is w2, which can be set as needed. Any lens or transmission element (other elements on the optical path except the first collimating lens 131) can also be set between the first prism 34a and the second prism 34b, which will not be described in detail here. In the fifth example, as shown in FIG. Figure 21 As shown, the first type of beam translation adjustment element 133 is implemented using an eccentric telescope structure, including an eyepiece 35a and an objective lens 35b. After the incident light passes through the eyepiece 35a, the optical axis angle is offset. After passing through the objective lens 35b, the outgoing light becomes parallel to the optical axis of the incident light again, with a translation distance of D. At the same time, the eccentric telescope structure can also further adjust the beam diameter. Usually, the eyepiece 35a is implemented using a cylindrical negative lens, and the objective lens 35b is implemented using a cylindrical positive lens. In the sixth example, as shown in FIG. Figure 22 As shown, the first type of beam translation adjustment element 133 uses a pair of reflectors to realize an eccentric telescope structure, thereby realizing the translation of the light beam, including a third reflector 36a and a fourth reflector 36b. The third reflector 36a and the fourth reflector 36b are curved reflectors, which expand the incident light. The working principles are not described here one by one; usually, the third reflector 36a is realized by a cylindrical negative reflector, and the fourth reflector 36b is realized by a cylindrical positive reflector.

[0126] It should be noted that the structures of the first type beam translation adjustment elements 133 can be the same, or can be configured as a combination of at least two different structures as needed. Figure 1 、 Figures 6 to 8 As shown, each first type beam translation adjustment element 133 is implemented by a parallel plane window and a pair of reflectors. As another example, Figures 11 and 12 As shown, each first-type beam translation adjustment element 133 is implemented by a corresponding pair of reflecting mirrors.

[0127] As another implementation of the present invention, the first beam adjustment module 13 includes M first collimating lenses 131, M second collimating lenses 132 and M beam adjustment elements 135. In this example, M is 6; the first collimating lens 131, the second collimating lens 132 and the beam adjustment element 135 correspond to each laser diode chip 12 one by one. The first collimating lens 131 and the second collimating lens 132 corresponding to each laser diode chip 12 are arranged in sequence along the beam propagation direction; the first collimating lens 131 collimates the light beam emitted by the laser diode chip 12 in the fast axis direction, and the second collimating lens 132 collimates the light beam in the slow axis direction; each beam adjustment element 135 is arranged on the optical path behind the corresponding first collimating lens 131, and is used to change the light emission direction of the laser emitted by each laser diode chip 12 and adjust the spacing of the laser emitted by each laser diode chip 12, so as to achieve a beam combining effect, or emit in the form of 6 sequentially arranged light spots. Specifically, as Figure 23 As shown, the beam adjustment element 135 is arranged on the optical path after the second collimating lens 132. In actual use, it can also be arranged after the first collimating lens 131 and before the second collimating lens 132. In fact, the beam adjustment element 135 can be set at any position after the first collimating lens 131 on the optical path as needed; in this example, the beam adjustment element 135 includes M reflectors; each reflector is staggered in sequence in the emitting direction of the laser, reflecting each laser beam by -90°, so that the outgoing light beam of the beam adjustment element 135 propagates in the first direction (X-axis); in actual use, the reflection angle can also be adjusted as needed.

[0128] Furthermore, the first beam adjustment module 13 further includes a wavelength selective element 134 arranged on the optical path, such as Figure 1 、 Figures 6 to 8 、 Figures 11 to 13 、 Figure 23 As shown, the wavelength selective element 134 is disposed on the optical path after the first collimating lens 131. The wavelength selective element 134 is used to set the wavelength of the laser light emitted by each individual laser diode chip 12. This can be achieved using a continuous long element or multiple elements corresponding to each laser diode chip 12. In this example, the wavelength selective element 134 is disposed on the optical path between the first collimating lens 131 and the second collimating lens 132. In actual use, the wavelength selective element 134 can also be disposed on the optical path after the second collimating lens 132, as long as it can achieve the wavelength selection function. As an example, the wavelength selective element 134 includes, but is not limited to, a transmissive volume Bragg grating, a reflective volume Bragg grating, a transmissive holographic grating, and a reflective holographic grating. It should be noted that the wavelength selective element 134 is an optional element. In situations where there is no wavelength requirement or the wavelength already meets the requirement, there is no need to set a wavelength selective element.

[0129] It should be noted that due to the process errors of each laser diode chip 12, it is difficult to ensure that the lasers emitted by each laser diode chip 12 propagate in parallel in the same plane; the adjustment accuracy requirements of the first collimating lens 131 are relatively high, and it is not suitable for adjusting the light beam emission position and direction. Therefore, the present invention realizes the correction of the light beam emission position and / or propagation direction (angle) by arranging an optical element after the first collimating lens 131, thereby avoiding process and installation errors, improving accuracy, reducing adjustment difficulty, and being easier to implement in production operations.

[0130] One way to correct process errors is Figure 24 and Figure 25 As shown, the first beam adjustment module 13 also includes M cylindrical lenses 136 arranged on the optical path after the corresponding first collimating lens 131. Each cylindrical lens 136 adjusts the laser emitted by the corresponding laser diode chip 12 to propagate in parallel within the same plane; as an example, the cylindrical lens 136 adopts a long-focus cylindrical lens. At this time, due to the adjustment of the light beam by the cylindrical lens 136, the adjustment accuracy requirement for the first collimating lens 131 can be greatly reduced. Therefore, the M first collimating lenses 131 can be integrated into a long lens, and the lasers emitted by the M laser diode chips 12 can be collimated in the fast axis direction through a single lens, as shown in FIG. Figure 24 As shown, a wavelength selective element 134 may also be provided correspondingly, which will not be described in detail here. Similarly, when the first type of beam translation adjustment element 133 is located after the second collimating lens 132 and the first type of beam translation adjustment element 133 uses a combination of at least two optical lenses (including but not limited to a pair of reflectors, a pair of prisms, and an eccentric telescope structure) to adjust the beam position and angle, the beam can be further corrected. At this time, M second collimating lenses 132 can be integrated into an integrated lens group, which includes M second collimating lenses (also called lens arrays) arranged in sequence on a piece of glass. Each second collimating lens corresponds to each laser diode chip 12 one by one, and collimates the laser emitted by each laser diode chip 12 in the slow axis direction. Of course, when the first type of beam translation adjustment element 133 or the beam adjustment element 135 does not have a correction function, the second collimating lens can also be provided as an integrated lens group, which will not be described in detail here.

[0131] Another way to correct process errors is Figures 26 to 28As shown, the upper surface of the heat sink 11 is set as two parallel planes in a step shape; the first beam adjustment module 13 also includes a second type of beam translation adjustment element 137 arranged on the optical path corresponding to the first collimating lens 131. The second type of beam translation adjustment element 137 is arranged at the step of the two planes, and is used to translate the laser emitted by each laser diode chip 12 in the second direction (Y axis). Specifically, in this example, the upper surface of the heat sink 11 is divided into two different planes, and the laser diode chip 12 and the first collimating lens 131 are arranged on the higher first plane; the first type of beam translation adjustment element 133 is arranged on the lower second plane; the second type of beam translation adjustment element 137 is arranged at the intersection of the two planes, and is used to translate the light beam downward. Any element that can realize beam translation and adjustment is applicable to the present invention, and the second type of beam translation adjustment element 137 can be used, including but not limited to Figure 15 、 Figures 17 to 22 The structure shown (the second type of beam translation adjustment element 136 is set to a combination of at least two optical lenses (including but not limited to a pair of reflectors, a pair of prisms, and an eccentric telescope structure)) is realized; similarly, the structures of each second type of beam translation adjustment element 137 can be the same, or can be set to a combination of at least two different structures as needed. In this example, the second collimating lens 132 is set between a pair of reflectors that constitute the second type of beam translation adjustment element 137. Other optical elements can also be set on the optical path, and the relative height settings of the two planes can be interchangeable. In addition, the first type of beam translation adjustment element 133 can also be replaced by a beam adjustment element 135. The first collimating lens can be implemented by a long-size lens, and the second collimating lens can be implemented by an integrated lens group. They are not described one by one here.

[0132] A typical single laser diode chip 12 emits a beam with a width of 300 microns, corresponding to a beam quality M 2 is about 60. Then the beam quality M of the laser diode stack structure composed of four laterally offset laser diode groups 1 in the slow axis direction is 2 x is 1100; in contrast, the beam quality M in the fast axis direction 2 The typical value of y is approximately 1.1. The aforementioned laser diode stacking structures can produce beams with rectangular cross-sections (the combined beam is wider along the slow axis than taller along the fast axis) and exhibit extremely asymmetric beam cross-sections and beam quality. Such beams cannot be directly used in applications such as fiber coupling that require approximately symmetric beam cross-sections and beam quality. Therefore, the present invention further symmetrizes the beam cross-sections and beam quality.

[0133] like Figure 29As shown, the first beam adjustment module 13 further includes M optical functional elements 138 arranged on the optical path after the first collimating lens 131. Each optical functional element 138 rotates the light beam output by the corresponding diode chip 12 by 90° around the optical axis. In this example, the optical functional element 138 is arranged before the first type of beam translation adjustment element 133 (or beam adjustment element 135). Figure 30 and Figure 31 As shown, when two laser diode groups 1 are stacked, the fast axis direction of the emitted light beam after adjustment by the optical functional element 138 is consistent with the X axis, and the slow axis direction is consistent with the Y axis direction. The light beams emitted by each laser diode chip 12 are superimposed side by side in the fast axis direction at Wy, thereby making the beam cross section and beam quality have a high degree of symmetry; the symmetry is determined by the number of laser diode chips 12 arranged side by side, which can be set according to actual needs and will not be described in detail here. In the first example, as Figure 32 As shown, the optical functional element 138 is implemented by a Dove prism 41. Figure 33 As shown, the optical functional element 138 is implemented by a pair of reflectors, including a fifth reflector 42a and a sixth reflector 42b. Usually, the fifth reflector 42a and the sixth reflector 42b are respectively implemented by plane reflectors. Figure 34 As shown, the optical functional element 138 is implemented by a pair of cylindrical lenses, including a first cylindrical lens 43a and a second cylindrical lens 43b; an advantageous solution is to arrange the axes of the first cylindrical lens 43a and the second cylindrical lens 43b at an angle of 90°. In actual use, any optical element that can rotate the light beam 90° around the optical axis is applicable. Among them, the structure of each optical functional element 138 can be the same, or it can be set as a combination of at least two different implementation methods. In this example, each optical functional element 138 is merged into a large-sized element (equivalent to M small-sized optical functional elements 138 side by side) to reduce the number of elements. At this time, the large-sized element can adopt any structure that can rotate the light beam 90° around the optical axis, which will not be described one by one here.

[0134] like Figure 35 As shown, the laser diode group 1 of the present invention can further improve the symmetry of the beam cross section and beam quality by setting a first optical device 5. The first optical device 5 is set on the output light path of the first beam adjustment module 13, that is, each laser diode group 1 corresponds to a first optical device 5; the first optical device 5 can also be set on the output light path of N groups of laser diode groups 1, not limited to this embodiment. Figure 35 As shown, the first optical device 5 divides the light beam in the slow axis direction into K segments, and arranges the K segments side by side in the fast axis direction (i.e., superimposes them); the beam quality of each segment of the light beam in the slow axis direction is M 2 s=M2 x / K, the beam quality in the fast axis direction is M 2 f=M 2 y*K. When K is selected to make M 2 s is roughly equal to M 2 When f, a symmetric beam with approximately the same beam quality will be generated. K is a natural number greater than or equal to 2, including but not limited to 3, 4, 6, and 10, which are not listed here one by one.

[0135] Specifically, if Figure 1 、 Figure 2 、 Figure 24 、 Figure 25 、 Figure 28 、 Figure 30 and Figure 35 As shown, the beam adjustment module 2 includes N-1 groups or N groups of third-type beam translation adjustment elements; each group of third-type beam translation adjustment elements translates the beam output by the corresponding laser diode group 1 in the second direction, so that the beams output by each laser diode group 1 are emitted in parallel in the same plane. Figure 1 、 Figure 24 、 Figure 30 and Figure 35 As shown, taking two laser diode groups 1 as an example, the two laser diode groups 1 are stacked in the second direction (upper and lower); the projections of the light beams emitted by the two laser diode groups 1 on the plane where the laser diode 12 is located do not overlap; Figure 3 and Figure 31 As shown, two laser diode groups 1 emit a first beam 1a and a second beam 1b respectively. After the first beam 1a and the second beam 1b are combined, a higher power output can be achieved. The third type of beam translation adjustment element can be used Figures 14 to 22 The illustrated structural implementation is applicable to any structure capable of achieving beam translation in actual use, and is not limited to this embodiment. The structures of the third-type beam translation adjustment elements can be identical, or a combination of at least two different implementations can be provided. It should be noted that when the third-type beam translation adjustment element is a combination of at least two optical lenses (including but not limited to a pair of reflectors, a pair of prisms, or an eccentric telescope structure), the third-type beam translation adjustment element can correct the propagation angle and / or position of the input beam to overcome process errors and ensure that the output beams propagate parallelly within the same plane.

[0136] It should be noted that when the output beams of the laser diode chips 12 are adjusted to be parallel and emitted in the same plane based on the first type of beam translation adjustment element 133, as shown in FIG. Figure 1 、 Figure 24 and Figure 30As shown, the output beams of each laser diode group 1 are arranged in sequence in the first direction. When the output beams of each laser diode chip 12 are adjusted to be parallel in the same plane based on the beam adjustment element 135, as shown in FIG. Figure 23 As shown, the outgoing light beams of each laser diode group 1 are arranged in sequence in the Z-axis direction.

[0137] It should be noted that the laser diode group 1 can be used alone, and it is not necessary to combine two or more laser diode groups 1 together to form a laser diode stack structure 10 , which will not be described in detail here.

[0138] like Figure 37 As shown, the present invention also provides a laser comprising at least the laser diode stack structure 10 of the present invention. Furthermore, to modify or symmetrize the beam cross-section and beam quality of the total light beam, the laser further comprises a second optical device 20. The second optical device 20 is disposed in the optical path following the laser diode stack structure 10 and is configured to couple the light beam into an optical waveguide 30. The optical waveguide 30 includes, but is not limited to, an optical fiber, and a detailed description thereof is omitted herein.

[0139] The laser diode group, laser diode stacking structure and laser of the present invention greatly improve efficiency by stacking laser diodes; the arrangement of laser diode chips 12 arranged side by side on the heat sink can greatly reduce the device size while ensuring heat dissipation efficiency and heat sink service life.

[0140] In summary, the present invention provides a laser diode group, a laser diode stack structure, and a laser, comprising a heat sink, a first beam adjustment module disposed on the heat sink, and M laser diode chips, where M is a natural number greater than or equal to 2; the laser diode chips are arranged sequentially on the upper surface of the heat sink along a first direction; the first beam adjustment module is disposed on the light-emitting side of each laser diode chip and is used to adjust the light-emitting position and direction so that the lasers emitted by each laser diode chip are emitted in parallel within the same plane and / or combined into a single beam of light. The laser diode group, laser diode stack structure, and laser of the present invention have the advantages of high efficiency, small size, high heat dissipation efficiency, and long service life. Therefore, the present invention effectively overcomes the various shortcomings of the prior art and has high industrial application value.

[0141] The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the present invention. Anyone skilled in the art may modify or alter the above embodiments without departing from the spirit and scope of the present invention. Therefore, all equivalent modifications or alterations made by one of ordinary skill in the art without departing from the spirit and technical principles disclosed herein are intended to be covered by the claims of the present invention.

Claims

1. A laser diode assembly, characterized in that: The laser diode group includes: A heat sink, a first beam adjustment module disposed on the heat sink, and M laser diode chips, where M is a natural number greater than or equal to 2; The laser diode chips are arranged in sequence on the upper surface of the heat sink along a first direction; the first beam adjustment module is arranged on the light-emitting side of each laser diode chip, and is used to adjust the light-emitting position and direction so that the lasers emitted by each laser diode chip are emitted in parallel in the same plane and / or combined into a beam of light.

2. The laser diode assembly according to claim 1, wherein: The first beam adjustment module includes M first collimating lenses, M second collimating lenses and m first-type beam translation adjustment elements, where m is equal to M or M-1; The first collimating lens and the second collimating lens correspond to each laser diode chip one by one, and the first collimating lens and the second collimating lens corresponding to each laser diode chip are arranged in sequence along the light beam propagation direction; the first collimating lens collimates the light beam emitted by the laser diode chip in the fast axis direction, and the second collimating lens collimates the light beam in the slow axis direction; Each first type of beam translation adjustment element corresponds to a corresponding laser diode chip one by one and is arranged on the optical path behind the corresponding first collimating lens to translate the laser light emitted by the laser diode chip in the first direction.

3. The laser diode assembly according to claim 2, wherein: Each first-type beam translation adjustment element is any one or a combination of a rhombus prism, a pair of reflectors, a parallel plane window, a pair of prisms and an eccentric telescope structure.

4. The laser diode assembly according to claim 1, wherein: The first beam adjustment module includes M first collimating lenses, M second collimating lenses and M beam adjustment elements corresponding to each laser diode chip one by one; The first collimating lens and the second collimating lens corresponding to each laser diode chip are sequentially arranged along the light beam propagation direction; the first collimating lens collimates the light beam emitted by the laser diode chip in the fast axis direction, and the second collimating lens collimates the light beam in the slow axis direction; Each beam adjustment element is arranged on the optical path corresponding to the first collimating lens, and is used to change the light emission direction of the laser light emitted by each laser diode chip and adjust the spacing of the laser light emitted by each laser diode chip.

5. The laser diode assembly according to claim 4, wherein: The beam adjustment element includes M reflectors; the reflectors are staggered in sequence in the light emitting direction of the laser.

6. The laser diode assembly according to any one of claims 2 to 5, characterized in that: The first beam adjustment module further includes M cylindrical lenses arranged on the optical path after the corresponding first collimating lens; each cylindrical lens adjusts the laser light emitted by the corresponding laser diode chip to propagate in parallel within the same plane.

7. The laser diode assembly according to claim 6, wherein: M first collimating lenses are integrated on a long lens.

8. The laser diode assembly according to any one of claims 2 to 5, characterized in that: The M second collimating lenses are integrated into an integrated lens group.

9. The laser diode assembly according to any one of claims 2 to 5, characterized in that: The first beam adjustment module further includes a wavelength selective element arranged on the optical path after the corresponding first collimating lens.

10. The laser diode assembly according to any one of claims 2 to 5, characterized in that: The laser diode group also includes a first optical device, which is arranged on the output light path of the first beam adjustment module, divides the light beam in the slow axis direction into K segments, and arranges the K segments side by side in the fast axis direction; wherein K is a natural number greater than or equal to 2.

11. The laser diode assembly according to any one of claims 2 to 5, characterized in that: The upper surface of the heat sink is configured as two parallel planes in a stepped shape. The first beam adjustment module further includes a second type of beam translation adjustment element arranged on the optical path corresponding to the first collimating lens; the second type of beam translation adjustment element is arranged at the steps of the two planes, and is used to translate and adjust the laser light emitted by each laser diode chip in the second direction to the same plane.

12. The laser diode assembly according to any one of claims 2 to 5, characterized in that: The first beam adjustment module further includes M optical functional elements, each of which is arranged on the optical path after the first collimating lens and before the first beam adjustment module, and is used to rotate the light beam emitted by each laser diode chip 90° around the optical axis.

13. The laser diode assembly according to claim 12, wherein: Each optical functional element is one or a combination of a Dover prism, a pair of reflecting mirrors and a pair of cylindrical lenses.

14. The laser diode assembly according to claim 12, wherein: The laser diode group also includes a first optical device, which is arranged on the output light path of the first beam adjustment module, divides the light beam in the slow axis direction into K segments, and arranges the K segments side by side in the fast axis direction; wherein K is a natural number greater than or equal to 2.

15. A laser diode stack structure, characterized in that: The laser diode stack structure comprises: A second beam adjustment module and N laser diode groups according to any one of claims 1 to 14, wherein N is a natural number greater than or equal to 2; The laser diode groups are arranged sequentially in a second direction, and the light beams output by the laser diode groups have the same emission direction and are arranged sequentially in a set direction; the second direction is perpendicular to the plane where the laser diode chips are located; The second beam adjustment module is arranged on the light output side of each laser diode group, and is used to translate and adjust the light beam so that the light beams output by each laser diode group propagate in parallel within the same plane.

16. The laser diode stack structure according to claim 15, wherein: The set direction is the first direction.

17. The laser diode stack structure according to claim 15, wherein: The second beam adjustment module includes N-1 groups or N groups of third-type beam translation adjustment elements; each group of third-type beam translation adjustment elements translates the beam output by the corresponding laser diode group in the second direction.

18. The laser diode stack structure according to claim 17, wherein: Each third type of beam translation adjustment element is any one or a combination of a rhombus prism, a pair of reflecting mirrors, a parallel plane window, a pair of prisms and an eccentric telescope structure.

19. A laser, characterized in that: The laser comprises at least: a laser diode stack structure according to any one of claims 15 to 18.

20. The laser according to claim 19, characterized in that: The laser further includes a second optical device, which is disposed on an optical path after the laser diode stack structure and is used to couple the light beam into the optical waveguide.

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