High-purity tin compound, storage method and production method therefor, and tin hydrolysate, tin hydrolysate solution, and tin hydrolysate film using same

By adding a specific amount of tetraaminotin compound to the tin compound, the decomposition of the triaminotin compound is inhibited, which solves the problem of the difficulty of maintaining high purity of hydrocarbon tin compounds for a long time. The preservation and production of high-purity tin compounds are realized, which is suitable for resist materials in EUV lithography technology.

CN120659796APending Publication Date: 2025-09-16MITSUBISHI CHEM CORP +1
View PDF 3 Cites 0 Cited by

Patent Information

Application Number
CN202480011044.6
Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
Priority Date
2023-10-12
Filing Date
2024-03-01
Publication Date
2025-09-16

AI Technical Summary

Technical Problem

Hydrocarbyltin compounds have low bond energy between carbon, nitrogen, oxygen and tin, high reactivity and decomposition, and are difficult to maintain high purity for a long time. In particular, the decomposition of triaminotin compounds is promoted.

Method used

By intentionally containing a specific trace amount of tetraaminotin compound, the decomposition of the triaminotin compound is suppressed and high purity is maintained. The specific composition includes more than 95 mol% of the triaminotin compound, 0.001 to 0.5 mol% of the tetraaminotin compound, and less than 0.5 mol% of the diaminotin compound, and is stored under a nitrogen atmosphere.

Benefits of technology

It effectively inhibits the decomposition of triaminotin compounds and maintains high purity. It is suitable for the storage and manufacture of high-purity tin compounds, and is particularly suitable for resist materials in EUV lithography technology.

✦ Generated by Eureka AI based on patent content.

Smart Images

  • Figure BDA0005533538090000081
    Figure BDA0005533538090000081
  • Figure BDA0005533538090000082
    Figure BDA0005533538090000082
  • Figure BDA0005533538090000091
    Figure BDA0005533538090000091
Patent Text Reader

Abstract

Provided is a substance as a high-purity tin compound which can maintain high purity over a long period of time, particularly can suppress decomposition of a triaminotin compound, and can maintain the high purity of the triaminotin compound. A tin compound containing 95 mol% or more of a triaminotin compound represented by general formula (1) in terms of tin atoms and 0.001-0.5 mol% of a tetraaminotin compound represented by general formula (2) in terms of tin atoms. RSn (NR '2) 3 (1) Sn (NR' 2) 4 (2) (In general formula (1) and general formula (2), R is a hydrocarbon group having 1-30 carbon atoms which may be substituted by halogen, oxygen atoms, and nitrogen atoms, and R'may be the same or different and are a hydrocarbon group having 1-10 carbon atoms, where two R 'on the same nitrogen atom may bond to each other to form a 3-7 membered ring including nitrogen).
Need to check novelty before this filing date? Find Prior Art

Claims

1. A tin compound comprising 95 mol% or more of a triaminotin compound represented by the following general formula (1) in terms of tin atoms, and 0.001 mol% to 0.5 mol% of a tetraaminotin compound represented by the following general formula (2) in terms of tin atoms, ·RSn(NR'2)3···(1) ·Sn(NR'2)4···(2) In the general formula (1) and the general formula (2), R is a hydrocarbon group having 1 to 30 carbon atoms, which may be substituted or unsubstituted by a halogen, an oxygen atom, or a nitrogen atom, and R's may be the same or different and are hydrocarbon groups having 1 to 10 carbon atoms; here, two R's on the same nitrogen atom are bonded to each other to form a 3- to 7-membered ring containing nitrogen, or are not bonded to each other.

2. The tin compound according to claim 1, comprising 97 mol% or more of the triaminotin compound represented by the general formula (1) in terms of tin atoms.

3. The tin compound according to claim 1 or 2, which contains 0.5 mol% or less of a diaminotin compound represented by the following general formula (3) in terms of tin atoms, ·R2Sn(NR'2)2···(3) In the general formula (3), R is a hydrocarbon group having 1 to 30 carbon atoms, which may be substituted or unsubstituted by a halogen, an oxygen atom, or a nitrogen atom, and R's may be the same or different and are hydrocarbon groups having 1 to 10 carbon atoms; here, two R's on the same nitrogen atom are bonded to each other to form a 3- to 7-membered ring containing nitrogen, or are not bonded to each other. 4 . The tin compound according to claim 1 , comprising 0.01 mol % to 0.5 mol % of the tetraaminotin compound represented by the general formula (2) in terms of tin atoms.

5. A tin compound comprising 95 mol% or more of a triaminotin compound represented by the following general formula (1) in terms of tin atoms, wherein: After being kept at 140° C. in a nitrogen atmosphere for 5 hours, the decomposition rate of the triaminotin compound represented by the general formula (1) is 0.85 mol % or less. ·RSn(NR'2)3···(1) In the general formula (1), R is a hydrocarbon group having 1 to 30 carbon atoms, which may be substituted or unsubstituted by a halogen, an oxygen atom, or a nitrogen atom, and R's may be the same or different and are hydrocarbon groups having 1 to 10 carbon atoms; here, two R's on the same nitrogen atom are bonded to each other to form a 3- to 7-membered ring containing nitrogen, or are not bonded to each other.

6. The tin compound according to claim 5, comprising 97 mol% to 99.9 mol% of the triaminotin compound represented by the general formula (1) in terms of tin atoms.

7. The tin compound according to any one of claims 1 to 6, further comprising 0.001 mol% to 1.0 mol% of a compound represented by the following general formula (7) in terms of tin atoms, ·RSn(NR')2(N(R')CHNR'2)···(7) In the general formula (7), R is a hydrocarbon group having 1 to 30 carbon atoms, which may be substituted or unsubstituted by a halogen, an oxygen atom, or a nitrogen atom, and R's may be the same or different and are hydrocarbon groups having 1 to 10 carbon atoms; here, two R's on the same nitrogen atom are bonded to each other to form a 3- to 7-membered ring containing nitrogen, or are not bonded to each other.

8. The tin compound according to claim 7, comprising 0.001 mol % or more of each of the compounds represented by the general formula (2) and the general formula (7), and the total content of the compounds represented by the general formula (2) and the general formula (7) is 0.001 mol % to 1.0 mol % in terms of tin atoms.

9. The tin compound according to any one of claims 1 to 8, further comprising 0.001 mol% to 1.0 mol% of a compound represented by the following general formula (9) in terms of tin atoms, ·RSn(NR')2(OR)···(9) In the general formula (9), R is a hydrocarbon group having 1 to 30 carbon atoms, which may be substituted or unsubstituted by a halogen, an oxygen atom, or a nitrogen atom, and R' may be the same or different and is a hydrocarbon group having 1 to 10 carbon atoms. Here, two R' on the same nitrogen atom are bonded to each other to form a 3- to 7-membered ring containing nitrogen, or are not bonded to each other.

10. A tin compound comprising 95 mol% or more, in terms of tin atoms, of a triaminotin compound represented by the following general formula (1), 0.001 to 0.5 mol%, in terms of tin atoms, of a tetraaminotin compound represented by the following general formula (2), 0.5 mol% or less, in terms of tin atoms, of a diaminotin compound represented by the following general formula (3), 0.001 to 1.0 mol%, in terms of tin atoms, of a compound represented by the following general formula (7), and 0.001 to 1.0 mol%, in terms of tin atoms, of a compound represented by the following general formula (9). ·RSn(NR'2)3···(1) ·Sn(NR'2)4···(2) ·R2Sn(NR'2)2···(3) ·RSn(NR')2(N(R')CHNR'2)···(7) ·RSn(NR')2(OR)···(9) In the general formula (1) and the general formula (2), R is a hydrocarbon group having 1 to 30 carbon atoms, which may be substituted or unsubstituted by a halogen, an oxygen atom, or a nitrogen atom, and R' may be the same or different and is a hydrocarbon group having 1 to 10 carbon atoms; here, two R' on the same nitrogen atom may be bonded to each other to form a 3- to 7-membered ring containing nitrogen, or may not be bonded to each other; In the general formula (3), R is a hydrocarbon group having 1 to 30 carbon atoms, which may be substituted or unsubstituted by a halogen, an oxygen atom, or a nitrogen atom, and R' may be the same or different and is a hydrocarbon group having 1 to 10 carbon atoms; here, two R's on the same nitrogen atom may be bonded to each other to form a 3- to 7-membered ring containing nitrogen, or may not be bonded to each other; In the general formula (7), R is a hydrocarbon group having 1 to 30 carbon atoms, which may be substituted or unsubstituted by a halogen, an oxygen atom, or a nitrogen atom, and R' may be the same or different and is a hydrocarbon group having 1 to 10 carbon atoms; here, two R' on the same nitrogen atom may be bonded to each other to form a 3- to 7-membered ring containing nitrogen, or may not be bonded to each other; In the general formula (9), R is a hydrocarbon group having 1 to 30 carbon atoms, which may be substituted or unsubstituted by a halogen, an oxygen atom, or a nitrogen atom, and R's may be the same or different and are hydrocarbon groups having 1 to 10 carbon atoms; here, two R's on the same nitrogen atom are bonded to each other to form a 3- to 7-membered ring containing nitrogen, or are not bonded to each other. 11 . The tin compound according to claim 1 , further comprising a solvent.

12. A method for preserving a tin compound, wherein: The tin compound according to any one of claims 1 to 11 is stored in a sealed container under a nitrogen atmosphere.

13. The method for storing a tin compound according to claim 12, wherein: The storage period is 3 days to 1 year.

14. The method for storing a tin compound according to claim 12 or 13, wherein: The storage temperature should be between -10°C and 40°C.

15. A method for producing a tin compound, which is a method for obtaining the tin compound according to any one of claims 1 to 10, wherein: This method includes the step of obtaining a target tin compound as a fraction by distilling a crude tin compound.

16. A method for producing a tin compound, which is a method for obtaining the tin compound according to any one of claims 1 to 10, wherein: This method includes the step of obtaining a target tin compound by adding the tetraaminotin compound represented by the general formula (2) to a tin compound containing the triaminotin compound represented by the general formula (1) and not containing the tetraaminotin compound represented by the general formula (2).

17. The method for producing a tin compound according to claim 15 or 16, wherein: When crude tin compounds are distilled, the distillate contains a primary fraction.

18. A tin hydrolyzate obtained by hydrolyzing the tin compound according to any one of claims 1 to 11, wherein The tin hydrolyzate is represented by the following composition formula (10): ·RSnO (3 / 2-x / 2) (OH) x ···(10) Where x is 0 <x≤3。 19. A tin hydrolyzate solution comprising the tin hydrolyzate according to claim 18 and an organic solvent.

20. A tin hydrolyzate film comprising the tin hydrolyzate according to claim 18.

Citation Information

Patent Citations

  • Monoalkyl tin trialkoxides and / or monoalkyl tin triamides with low metal contamination and / or particulate contamination, and corresponding methods

    JP2020122959A

  • Organometallic solution based high resolution patterning compositions and corresponding methods

    JP2021021953A

  • Process for preparing organotin compounds

    WO2022165381A1