Clamp

Abstract

Provided is a jig capable of easily attaching a sample to a sample holder. A jig (100) for attaching a sample to a sample holder for a sample processing device for processing a portion of the sample protruding from a shield by irradiating the sample with an ion beam via the shield, the jig comprising: a support part (20) for supporting the sample holder to which the shield is attached; and a guide (30) including a rail (34) and a slider (32) capable of moving along the rail (34) to move the sample to the sample holder.

Description

Technical Field

[0001] The present invention relates to a clamp. Background Art

[0002] As a sample processing device that processes a sample using an ion beam, a cross-section polisher (registered trademark) for processing a sample's cross section is known. As disclosed in Patent Document 1, a cross-section polisher is a sample processing device that processes a sample using a wide ion beam and a shield. In a cross-section polisher, the sample is placed so that it protrudes from the shield by approximately 20 to 100 μm, and the sample is irradiated with a wide ion beam to process the portion of the sample that protrudes from the shield.

[0003] Prior art literature

[0004] Patent Literature

[0005] Patent Document 1: Japanese Patent Application Laid-Open No. 2023-107397 Summary of the Invention

[0006] Problems to be solved by the invention

[0007] When attaching a sample to a sample holder for a cross-section polishing machine, the sample is generally handled with tweezers. However, some samples to be processed are easily damaged, making it difficult to handle with tweezers, and the sample may be broken.

[0008] Solutions for solving problems

[0009] One embodiment of the present invention is a fixture for attaching a sample to a sample holder for a sample processing device that irradiates a sample with an ion beam through a shield to process a portion of the sample protruding from the shield, the fixture comprising:

[0010] a supporting portion that supports the sample holder to which the shield is mounted; and

[0011] The guide includes a rail and a first slider, wherein the first slider is movable along the rail to move the sample to the sample holder.

[0012] Effects of the Invention

[0013] In such a fixture, the sample can be placed in the sample holder to which the shield is attached by moving the first slider along the rail. Therefore, in such a fixture, the possibility of sample damage can be reduced, and the sample can be easily attached to the sample holder, compared to, for example, placing the sample in the sample holder by grasping the sample with tweezers. BRIEF DESCRIPTION OF THE DRAWINGS

[0014] Figure 1 It is a perspective view schematically showing a clamp according to one embodiment of the present invention.

[0015] Figure 2 It is a perspective view schematically showing a slider.

[0016] Figure 3 It is a perspective view schematically showing a guide.

[0017] Figure 4 It is a cross-sectional view schematically showing a jig according to one embodiment of the present invention.

[0018] Figure 5 It is a cross-sectional view schematically showing the lifting mechanism.

[0019] Figure 6 This is a flowchart showing an example of a method for attaching a sample to a sample holder.

[0020] Figure 7 This is a diagram for explaining the process of attaching a sample to a sample holder.

[0021] Figure 8 This is a diagram for explaining the process of attaching a sample to a sample holder.

[0022] Figure 9 This is a diagram for explaining the process of attaching a sample to a sample holder.

[0023] Figure 10 This is a diagram for explaining the process of attaching a sample to a sample holder.

[0024] Figure 11 This is a diagram for explaining the process of attaching a sample to a sample holder.

[0025] Figure 12 This is a diagram for explaining the process of attaching a sample to a sample holder.

[0026] Figure 13 This is a diagram for explaining the process of attaching a sample to a sample holder.

[0027] Figure 14 This is a diagram for explaining the process of attaching a sample to a sample holder.

[0028] Figure 15 This is a diagram for explaining the process of attaching a sample to a sample holder.

[0029] Figure 16 This is a diagram for explaining the process of attaching a sample to a sample holder.

[0030] Figure 17 It is a diagram for explaining a method of processing a sample using a sample processing device.

[0031] Figure 18 It is a diagram for explaining a modified example of the clamp according to one embodiment of the present invention.

[0032] Figure 19 It is a diagram for explaining a modified example of the clamp according to one embodiment of the present invention.

[0033] Figure 20 It is a diagram for explaining a modified example of the clamp according to one embodiment of the present invention.

[0034] Figure 21 It is a diagram for explaining a modified example of the sample holder.

[0035] Figure 22 It is a perspective view schematically showing a clamp according to a third modified example.

[0036] Description of Reference Numerals

[0037] 2…1st beam, 3a…guide surface, 3b…sample holding surface, 4…2nd beam, 6…base, 8…column, 10…material table, 11…magnet, 12…cutout, 14…cover, 16…loading surface, 18…edge, 20…support, 22…reference surface, 30…guide, 32…slider, 32A…1st slider, 32B…2nd slider, 32C…3rd slider, 34…rail, 36…stopper, 38…groove, 39…cutout, 40…lifting mechanism, 42a…1st slit, 4 2b…second slit, 44…stopper, 46…spring, 48…shaft member, 49…stopper pressing member, 100…clamp, 102…clamp, 200…sample holder, 210…shielding member, 212…end, 220…leaf spring, 320…rotating body, 321…shaft member, 322…base, 324…sample holding portion, 326…gripping portion, 500…punching device, 502…pressing member, 504…blade, 510…base, 600…sample processing device, 610…ion source DETAILED DESCRIPTION

[0038] Hereinafter, preferred embodiments of the present invention will be described in detail using the accompanying drawings. Furthermore, the embodiments described below are not intended to unduly limit the contents of the present invention as described in the claims. In addition, all the structures described below are not necessarily essential components of the present invention.

[0039] 1. Fixture

[0040] 1.1. Clamp composition

[0041] First, a clamp according to an embodiment of the present invention will be described with reference to the drawings. Figure 1 It is a perspective view schematically showing a clamp 100 according to one embodiment of the present invention.

[0042] The jig 100 is used to attach a sample to a sample holder for a cross-section polisher. The cross-section polisher is a sample processing device that irradiates a sample with an ion beam through a shield to process the portion of the sample protruding from the shield. The shield is a plate-shaped member.

[0043] like Figure 1 As shown, the fixture 100 includes a material stage 10 , a support portion 20 for supporting a specimen holder, a guide 30 , and a lifting mechanism 40 .

[0044] The jig 100 includes a first beam 2 with a material table 10, a second beam 4 with a guide 30, a base 6 with a support 20, and a column 8 with a lifting mechanism 40. The first beam 2 and the second beam 4 extend from the base 6 in opposite directions. The column 8 is connected to the base 6. The lifting mechanism 40 is provided on the column 8, supporting the first beam 2, the second beam 4, and the base 6, enabling them to be raised and lowered.

[0045] The material table 10 holds the material. The sample to be mounted on the sample holder is formed by punching the material using a punching device. The material table 10 is provided with a cutout 12 into which the base of the punching device can be inserted. By inserting the base of the punching device into the cutout 12 and punching the material with the punching device, the sample formed into a predetermined shape can be separated from the broken pieces of the material. The material table 10 may also be provided with a recess that matches the shape of the material to facilitate placement of the material on the cutout 12. An edge 18 that is higher than the mounting surface 16 is provided around the mounting surface 16 of the material table 10 on which the material is placed.

[0046] The material table 10 includes a cap 14. The cap 14 is removable relative to the first beam 2. The cap 14 is removably attached to the first beam 2, for example, using magnets. The material table 10 is also movable. In other words, the height of the material table 10 can be changed in the fixture 100. The material table 10 can be raised or lowered by raising or lowering the first beam 2 using the lifting mechanism 40.

[0047] The sample holder is placed on the support 20. The support 20 includes a recessed portion provided in the base 6, which is shaped to accommodate the sample holder. The support 20 has a reference surface 22 for positioning the shield. The reference surface 22 is located at the end of the rail 34 of the guide 30. The shield can be positioned by pressing it against the reference surface 22.

[0048] The guide 30 guides the sample to the sample holder. It includes a slider 32, two rails 34, and two stoppers 36. The slider 32 is movable along the two rails 34. The two rails 34 extend parallel to each other. A groove 38 is formed between the two rails 34 to guide the sample.

[0049] A notch 39 is formed in the movement path of the slider 32, into which the base of the punching device can be inserted. The notch 39 is formed, for example, between the two rails 34. The notch 39 is provided on the bottom surface of the groove 38. The notch 39 is formed by cutting a notch into the end of the second beam 4. The guide 30 guides the sample from the base inserted in the notch 39 to the sample holder.

[0050] Stoppers 36 are provided at the front ends of the two rails 34, that is, at the ends of the two rails 34 on the support portion 20 side. In the illustrated example, the stoppers 36 are plate-shaped members that block the front ends of the rails 34. When the slider 32 hits the stoppers 36, the slider 32 can be stopped at a predetermined position.

[0051] The first beam portion 2, the second beam portion 4, and the base portion 6 are integrally formed and can be raised and lowered by an elevating mechanism 40 provided on the column portion 8. The elevating mechanism 40 can change the height of the material table 10.

[0052] 1.2. Guide

[0053] Figure 2 It is a perspective view schematically showing the slider 32 . Figure 3 It is a perspective view schematically showing the guide 30 .

[0054] like Figure 2 As shown, the slider 32 includes two rotating bodies 320 , a base 322 , a sample holding portion 324 , and a gripping portion 326 .

[0055] The two rotating bodies 320 are connected to the lower surface of the base 322 via shaft members 321. The rotating bodies 320 rotate around the shaft members 321 as rotation axes.

[0056] The two rails 34 are two parallel grooves. One of the two rotating bodies 320 fits into one of the two rails 34, and the other of the two rotating bodies 320 fits into the other of the two rails 34. This allows the slider 32 to move along the two rails 34. The rear ends of the rails 34 are open, making the slider 32 removable from the two rails 34. The user pushes and presses the slider 32, causing it to move along the rails 34.

[0057] The sample holding portion 324 is provided between the two rotating bodies 320. The sample holding portion 324 protrudes downward from the base portion 322. The sample holding portion 324 is fitted into the groove 38 provided between the two rails 34.

[0058] Although not shown, the slider 32 only needs to be able to move along the rail 34 and does not need to include the rotating body 320. For example, it may include a member that slides along the rail 34. Although not shown, the guide 30 only needs to be able to move the slider 32 along the rail 34 and its configuration is not particularly limited.

[0059] The sample holder 324 is provided with two guide surfaces 3a that guide the sample from the side without causing it to rotate, and a sample holding surface 3b that presses the rear end of the sample. By sandwiching the sample between the two guide surfaces 3a, the sample's orientation is maintained constant. By pressing the sample with the sample holding surface 3b, the sample can be moved. The sample holder 324 is provided with a recessed portion for holding the sample. The two guide surfaces 3a and the sample holding surface 3b form the inner surfaces of the recessed portion.

[0060] The grip portion 326 is for the user to grip, and protrudes upward from the base portion 322. When the user grips the grip portion 326 and slides the slider 32, the slider 32 moves along the two rails 34.

[0061] Figure 4 1 is a cross-sectional view schematically showing the jig 100. Figure 4 , the figure shows a state where the slide 32 hits the stopper 36 and stops.

[0062] like Figure 4 As shown, when the sample S is moved until the slider 32 hits the stopper 36 and stops, the sample S is placed on the sample holder 200 (shield 210) to which the shield 210 is attached. At this time, the sample S protrudes from the shield 210 by a protrusion amount A. In other words, the stopper 36 stops the slider 32 so that the sample S protrudes from the shield 210 by a protrusion amount A.

[0063] Here, the end 212 of the shield 210 is in contact with the reference surface 22. Therefore, the position of the end 212 of the shield 210 corresponds to the position of the reference surface 22. Furthermore, the sample holding surface 3b presses against the rear end of the sample S. The position of the sample holding surface 3b of the slider 32 is set so that when the sample S is moved until the slider 32 hits the stopper 36 and stops, the distance between the reference surface 22 and the sample holding surface 3b becomes the protrusion amount A.

[0064] 1.3. Lifting mechanism

[0065] Figure 5 : is a cross-sectional view schematically showing the lifting mechanism 40. Figure 5 As shown, the lifting mechanism 40 includes a first slit 42 a , a second slit 42 b , a stopper 44 , a spring 46 , a shaft member 48 , and a stopper pressing member 49 .

[0066] The first slit 42a and the second slit 42b are provided in the column portion 8. The first slit 42a is located above the second slit 42b, i.e., closer to the support portion 20. The stopper 44 is formed so as to engage with the first slit 42a or the second slit 42b. By engaging the stopper 44 with the first slit 42a, the stopper 44 is fixed at a position corresponding to the height of the first slit 42a. Similarly, by engaging the stopper 44 with the second slit 42b, the stopper 44 is fixed at a position corresponding to the height of the second slit 42b. The stopper 44 is biased upward by a spring 46.

[0067] The shaft member 48 is connected to the base 6. The shaft member 48 is supported by the stopper 44. Therefore, by engaging the stopper 44 with the first slit 42a, the first beam 2, the second beam 4, and the base 6 are fixed at a position corresponding to the height of the first slit 42a. Similarly, by engaging the stopper 44 with the second slit 42b, the first beam 2, the second beam 4, and the base 6 are fixed at a position corresponding to the height of the second slit 42b. When the stopper 44 is engaged with the first slit 42a, the height of the first beam 2, the second beam 4, and the base 6 is higher than when the stopper 44 is engaged with the second slit 42b.

[0068] The stopper pressing member 49 presses the stopper 44, which is stuck in the second slit 42b. The stopper pressing member 49 presses the stopper 44, causing it to warp and disengage from the second slit 42b. Furthermore, the stopper 44 is pushed upward by the force of the spring 46, and the stopper 44 is engaged in the first slit 42a. Furthermore, to engage the stopper 44, which is stuck in the first slit 42a, in the second slit 42b, the base 6 is pressed downward. This causes the stopper 44 to disengage from the first slit 42a and engage in the second slit 42b.

[0069] 2. Action

[0070] Figure 6 1 is a flowchart showing an example of a method of attaching the sample S to the sample holder 200 . Figures 7 to 16 1 and 2 are diagrams for explaining the process of attaching the sample S to the sample holder 200 .

[0071] First, if Figure 7As shown, the sample holder 200 with the shield 210 attached is placed on the jig 100 (S100). Specifically, the sample holder 200 is placed on the support portion 20 of the jig 100. At this time, the shield 210 is pressed against the reference surface 22 to position the shield 210.

[0072] Next, the material M is placed on the notch 12 of the material table 10 (S102). At this time, the stopper 44 is engaged with the first slit 42a, and the material table 10 is lifted. In addition, the cover 14 is removed in advance.

[0073] Next, if Figure 8 and Figure 9 As shown, the cutter 12 is inserted into the base 510 of the punching device 500, and the material M is placed in the punching device 500 (S104).

[0074] In the process of placing the material M on the punching device 500, first, Figure 8 As shown, the cutout 12 is inserted into the base 510 of the punching device 500. When the material table 10 is raised, the mounting surface 16 on which the material M is mounted is located at the same height as the upper surface of the base 510 or at a position higher than the upper surface of the base 510. Therefore, by inserting the base 510 into the cutout 12, the base 510 can be arranged under the material M. Next, the cover 14 is fixed to the material table 10 with the magnet 11 to close the cutout 12 with the cover 14. Next, as shown in FIG. Figure 9 As shown, the base 6 is pushed downward to engage the stopper 44 with the second slit 42b. This lowers the material table 10, positioning the placement surface 16 below the base 510. As a result, the material M can be placed on the base 510. Through the above steps, the material M can be placed on the base 510 of the punching device 500.

[0075] Next, if Figure 10 As shown, the material M is punched out to form a sample S of a predetermined shape (S106). Figure 10 5 is a diagram for explaining a method of forming a sample S using a punching device 500. Figure 10 As shown, the punching device 500 includes a pressing member 502 and a blade 504. When a material M is placed on a base 510 of the punching device 500, the pressing member 502 and the blade 504 are positioned above the material M. The front end of the pressing member 502 has the same planar shape as the upper surface of the base 510. The blade 504 surrounds the pressing member 502.

[0076] First, with the material M placed on the pedestal 510, the pressing member 502 and the blade 504 are lowered. As a result, the pressing member 502 comes into contact with the material M, and the pressing member 502 presses the material M against the pedestal 510. By further lowering the blade 504, the portion of the material M extending from the pedestal 510 is broken by the shear force of the blade 504 and the pedestal 510. The portion of the material M pressed by the pressing member 502 remains on the pedestal 510, so that the material M can be formed into a specified shape. Thus, a sample S of a specified shape can be formed. For example, the planar shape of the material M before punching is a circle with a diameter of about 10 mm, and the planar shape of the sample S after being formed by the punching device 500 is a square of 5 mm × 5 mm. As shown in FIG. Figure 11 As shown, broken pieces D of the material M are scattered onto the material table 10 .

[0077] Next, if Figure 12 As shown, the broken pieces D are recovered (S108). First, the broken pieces D scattered on the material table 10 are Figure 12 As shown, the crushed pieces D are collected on the cover 14. Since the material table 10 is provided with an edge 18 that is higher than the placement surface 16, the crushed pieces D are prevented from falling from the material table 10. Next, with the crushed pieces D placed on the cover 14, the cover 14 is removed. This allows the crushed pieces D to be recovered.

[0078] Next, if Figure 13 As shown, the sample S is placed on the guide 30 (S110). Specifically, first, while the sample S is placed on the pedestal 510, the pedestal 510 is removed from the cutout 12. Next, the orientation of the jig 100 is changed to insert the pedestal 510 into the cutout 39. By inserting the pedestal 510 into the cutout 39, the sample S placed on the pedestal 510 is positioned in the groove 38 between the two rails 34. In this way, the sample S can be placed on the guide 30.

[0079] In addition, if Figure 14 As shown, in the jig 100, the cutout 39 can be inserted into the base 510 from three directions. Therefore, the surface to be processed can be selected from the three cross sections of the sample S according to the state of the sample S.

[0080] Next, if Figure 15 As shown, the sample S is moved to the sample holder 200 using the guide 30 ( S112 ).

[0081] Specifically, first, the slider 32 is attached to the two rails 34. The slider 32 is attached to the two rails 34 by inserting one of the two rotating bodies 320 into one of the two rails 34, and the other of the two rotating bodies 320 into the other of the two rails 34. Since the rear ends of the rails 34 are open, the rotating bodies 320 can be inserted into the rails 34 from the rear ends.

[0082] Next, the slider 32 is moved along the two rails 34 from the rear end to the front end of the rails 34. Since the stopper 36 is located at the front end of the rails 34, the slider 32 strikes the stopper 36 and stops. By moving the slider 32 from the rear end to the front end of the rails 34, the sample S located in the movement path of the slider 32 can be recovered by the sample holding portion 324 and moved to the sample holder 200. At this time, since the slider 32 holds the sample S in the sample holding portion 324, the sample S does not rotate, and the sample S can be moved to the sample holder 200 while maintaining its orientation.

[0083] When the sliding member 32 hits the stopper 36 and stops, Figure 4 As shown in FIG. 1 , the sample S is arranged at a position protruding from the shielding member 210 by a protrusion amount A. Figure 16 As shown, the sample S can be placed on the sample holder 200 in a state where the sample S protrudes from the shield 210 by the protrusion amount A.

[0084] Next, the sample S is secured to the sample holder 200, and the sample holder 200 is removed from the jig 100 (S114). Although not shown, the sample S is secured to the sample holder 200 using a leaf spring, screws, adhesive, or the like. Furthermore, although not shown, the sample S can be secured to the sample holder 200 by sandwiching the sample S between the shield 210 and the sample support plate. After securing the sample S to the sample holder 200, the sample holder 200 is removed from the jig 100. Through the above steps, the sample S can be attached to the sample holder 200.

[0085] 3. Sample processing

[0086] Figure 17 600 is a diagram for explaining a method for processing a sample S using the sample processing apparatus 600. Figure 17 For the sake of convenience, the sample holder 200 is omitted. Figure 17As shown, the sample processing device 600 is a cross-section polisher. The sample processing device 600 includes an ion source 610 and irradiates the sample S with an ion beam IB emitted from the ion source 610 through the shield 210. This can etch the portion of the sample S protruding from the shield 210.

[0087] As described above, by using the jig 100 , the protrusion amount of the sample S from the shield 210 can be accurately controlled, and therefore, the processing position of the sample S can be accurately determined.

[0088] 4. Effect

[0089] The fixture 100 is a fixture for mounting a sample S on a sample holder 200 for a sample processing device 600 that irradiates the sample S with an ion beam IB through a shielding member 210 and processes a portion of the sample S protruding from the shielding member 210. The fixture comprises: a support portion 20 that supports the sample holder 200 on which the shielding member 210 is mounted; and a guide member 30 that comprises a rail 34 and a slide member 32 that can move along the rail 34 to move the sample S to the sample holder 200.

[0090] Therefore, in the jig 100, the sample S can be placed on the sample holder 200 to which the shield 210 is attached by moving the slider 32 along the rail 34. Therefore, in the jig 100, compared with a case where the sample S is grasped with tweezers and placed on the sample holder 200, the possibility of damaging the sample S can be reduced, and the sample S can be easily attached to the sample holder 200.

[0091] For example, all-solid-state batteries are made of brittle materials and easily break, making them difficult to handle with tweezers. Furthermore, all-solid-state batteries contain lithium, which is highly reactive with air, requiring handling within a glove box. Therefore, attaching an all-solid-state battery sample to the sample holder 200 using tweezers is difficult.

[0092] In contrast, in the jig 100, the sample S can be placed on the sample holder 200 by moving the slider 32 along the rail 34. Therefore, even for a sample such as an all-solid-state battery, which is made of a brittle material and easily fractured, the sample S can be easily attached to the sample holder 200. Furthermore, in the jig 100, since the sample S can be placed on the sample holder 200 by moving the slider 32 along the rail 34, handling within a glove box is also facilitated.

[0093] Furthermore, the sample S used by the jig 100 is not limited to an all-solid-state battery sample, and the jig 100 can be used when attaching various types of samples such as metal samples and ceramic samples to the sample holder 200 .

[0094] In the jig 100 , the guide 30 includes a stopper 36 that stops the slider 32 so that the specimen S protrudes from the shield 210 by the protrusion amount A. Therefore, in the jig 100 , by moving the slider 32 along the rail 34 until it is stopped by the stopper 36 , the specimen S can be positioned so that the specimen S protrudes from the shield 210 by the protrusion amount A. Therefore, in the jig 100 , the specimen S can be easily attached to the specimen holder 200 .

[0095] The fixture 100 includes a reference surface 22 for positioning the shield 210, and a slider 32 includes a sample holding surface 3b for pressing the sample S. When the slider 32 is stopped by the stopper 36, the distance between the reference surface 22 and the sample holding surface 3b becomes the protrusion amount A. Therefore, in the fixture 100, by moving the slider 32 along the rail 34 until it is stopped by the stopper 36, the sample S can be positioned so that the sample S protrudes from the shield 210 by the protrusion amount A.

[0096] In the jig 100, a notch 39 is provided in the movement path of the slider 32. The notch 39 allows insertion of a base 510 of a punching device 500 that punches the material M to form a specimen S. Therefore, in the jig 100, the specimen S formed by punching by the punching device 500 can be placed in the specimen holder 200 without having to grasp the specimen S with tweezers or the like.

[0097] The jig 100 includes a material table 10 on which the material M is placed. The material table 10 is movable and has a notch 12 into which a base 510 of a punching device 500 is inserted, which punches the material M to form a specimen S. Therefore, in the jig 100 , the material M can be easily placed on the base 510 of the punching device 500 .

[0098] 5. Modifications

[0099] 5.1. First Modification

[0100] Figure 18 、 Figure 19 as well as Figure 20 It is a diagram for explaining a modified example of the clamp 100 .

[0101] In the above embodiment, the guide member 30 has one slide member 32. In contrast, Figure 18 、 Figure 19 as well as Figure 20 As shown, the guide 30 may include a first slider 32A, a second slider 32B, and a third slider 32C. When the guide 30 includes a plurality of sliders, one slider is selected from the plurality of sliders and is moved along the rail 34 .

[0102] Figure 18When the first slider 32A is stopped by the stopper 36 , the distance between the reference surface 22 and the sample holding surface 3 b becomes the first protrusion amount A. Therefore, by using the first slider 32A, the sample S can be positioned so that the sample S protrudes from the shield 210 by the protrusion amount A.

[0103] Figure 19 When the second slider 32B is stopped by the stopper 36 , the distance between the reference surface 22 and the sample holding surface 3 b becomes a protrusion amount B that is different from the protrusion amount A. Therefore, by using the second slider 32B, the sample S can be positioned so that the sample S protrudes from the shield 210 by the protrusion amount B.

[0104] Figure 20 When the third slider 32C is stopped by the stopper 36, the distance between the reference surface 22 and the sample holding surface 3b becomes a protrusion amount C that is different from the protrusion amounts A and B. Therefore, by using the third slider 32C, the sample S can be positioned so that the sample S protrudes from the shield 210 by the protrusion amount C.

[0105] The first slider 32A, the second slider 32B, and the third slider 32C have the same shape except that the depth of the recessed portion of the sample holding portion 324, that is, the position of the sample holding surface 3 b is different.

[0106] Since the guide 30 includes the first slider 32A, the second slider 32B, and the third slider 32C, a slider corresponding to a desired protrusion amount can be selected and used. Therefore, the protrusion amount of the sample S from the shield 210 can be set to a desired protrusion amount.

[0107] Furthermore, although the guide 30 is described here as including three sliders, the number of sliders may be two, or four or more.

[0108] 5.2. Second Modification

[0109] Figure 21 2 is a diagram for explaining a modified example of the sample holder 200. In the above embodiment, Figure 4 As shown, in the sample holder 200, the sample S is placed on the shielding member 210. Figure 21 As shown in FIG. 2 , in the sample holder 200 , the sample S can also be arranged on the sample holder 200 and the shield 210 . Figure 21 In the specimen holder 200 shown, the specimen S is fixed to the specimen holder 200 by a leaf spring 220. Figure 6In the step S112 of moving the sample S to the sample holder 200 using the guide 30 , the slider 32 is moved with the leaf spring 220 expanded to place the sample S on the sample holder 200 .

[0110] In this manner, the jig 100 can attach the specimen S to various specimen holders.

[0111] 5.3. Third Modification

[0112] Figure 22 1 is a perspective view schematically showing a jig 102 according to a third modification. Hereinafter, in the jig 102, components having the same functions as those of the jig 100 described above are denoted by the same reference numerals, and detailed description thereof is omitted.

[0113] like Figure 1 As shown, the jig 100 includes a material table 10 for placing the material M on the punching device 500, and a lifting mechanism 40 for raising and lowering the material table 10. Furthermore, the jig 100 is formed with a notch 39 for placing the specimen S formed by the punching device 500 on the guide 30. In other words, the jig 100 is a jig for placing the specimen S formed by the punching device 500 on the specimen holder 200.

[0114] In contrast, Figure 22 As shown, the jig 102 does not include the material table 10 and the lifting mechanism 40. Furthermore, the jig 102 does not have the cutout 39. In the jig 102, a specimen S is placed in the groove 38 of the guide 30 using tweezers or the like. By placing the specimen S in the groove 38 of the guide 30, the specimen S can be positioned so that it protrudes from the shield 210 by a protrusion amount A by moving the slider 32, similar to the jig 100 described above.

[0115] The above-mentioned embodiment and modified examples are merely examples and the present invention is not limited thereto. For example, the embodiment and each modified example can be combined as appropriate.

[0116] The present invention is not limited to the above-mentioned embodiments, and various modifications can be made. For example, the present invention includes a configuration that is substantially the same as the configuration described in the embodiment. The so-called substantially the same configuration refers to, for example, a configuration with the same function, method and result, or a configuration with the same purpose and effect. In addition, the present invention includes a configuration in which non-essential parts of the configuration described in the embodiment are replaced. In addition, the present invention includes a configuration that has the same effect as the configuration described in the embodiment, or a configuration that can achieve the same purpose. In addition, the present invention includes a configuration in which a known technology is added to the configuration described in the embodiment.

Claims

1. A jig for attaching a sample to a sample holder for a sample processing apparatus for processing a portion of the sample protruding from the shield by irradiating the sample with an ion beam through a shield, wherein the sample is characterized by: Include: a supporting portion that supports the sample holder to which the shield is mounted; and The guide includes a rail and a first slider, wherein the first slider is movable along the rail to move the sample to the sample holder.

2. The clamp according to claim 1, wherein The guide includes a stopper configured to stop the first slider so that the sample protrudes from the shield by a first protrusion amount.

3. The clamp according to claim 2, wherein comprising a reference surface for positioning the shielding member, The first sliding member has a first sample holding surface for pushing the sample. When the first slider is stopped by the stopper, the distance between the reference surface and the first sample holding surface becomes the first protrusion amount.

4. The clamp according to claim 3, wherein The guide has a second slider that is movable along the track to move the sample to the sample holder along the track. The stopper stops the second slider so that the sample protrudes from the shield by a second protrusion amount that is different from the first protrusion amount.

5. The clamp according to claim 4, wherein The second sliding member has a second sample holding surface for pushing the sample. When the second slider is stopped by the stopper, the distance between the reference surface and the second sample holding surface becomes the second protrusion amount.

6. The clamp according to claim 1, wherein Contains a material table for placing materials, The material table can be raised and lowered. The material table is provided with a notch into which a base of a punching device for punching the material to form the sample can be inserted.

7. The clamp according to any one of claims 1 to 5, wherein: A notch is provided on the movement path of the first slider, and a base of a punching device for punching a material to form the sample can be inserted into the notch.

Images