Radio frequency power detection method, device and system and computer readable storage medium
By controlling the open and short circuit conditions of the load in the RF power supply equipment, determining the error value and making corrections, the problem of low power detection accuracy caused by poor consistency of electronic components is solved, achieving more accurate power value detection and improving production efficiency.
Patent Information
- Application Number
- CN202510829119.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-06-20
- Publication Date
- 2025-09-19
AI Technical Summary
In existing RF power supply equipment, the poor consistency of electronic components leads to low power detection accuracy, making it difficult to accurately obtain forward power and reverse power values.
At least two error values are determined by controlling the load to be open-circuited and short-circuited respectively, and the forward power value and the reverse power value are corrected according to the error values to obtain the corrected power value.
The detection accuracy of the forward power value and the reverse power value is significantly improved, the consistency requirements of electronic components are reduced, and the production efficiency of the radio frequency power detection device is improved.
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Figure CN120668992A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the field of radio frequency technology, and in particular to a radio frequency power detection method, device, system, and computer-readable storage medium. Background Art
[0002] With the advancement of RF power technology, RF power equipment is now widely used in various fields. During use, RF power equipment requires measuring forward and reverse power to determine its operating status. However, due to the poor consistency of electronic components, power measurement accuracy is low. Therefore, obtaining more accurate forward and reverse power values has become a challenge. Summary of the Invention
[0003] The present application provides a radio frequency power detection method, device, system, and computer-readable storage medium, which can obtain more accurate forward power values and reverse power values.
[0004] In a first aspect, a radio frequency power detection method is provided for sampling and correcting radio frequency power transmitted to a load. The method includes: controlling the load to open and short circuit, respectively, to determine at least two error values. When the load is properly connected and radio frequency power is transmitted to the load, a forward power value and a reverse power value of the radio frequency power are obtained. The forward power value and the reverse power value are corrected based on at least the two error values to obtain corrected forward power values and reverse power values.
[0005] In one possible implementation, controlling the load to be open-circuited and short-circuited separately to determine at least two error values includes: controlling the load to be open-circuited and determining a first error value when the load is open-circuited; controlling the load to be short-circuited and determining a third error value when the load is short-circuited; and determining a second error value based on the first error value and the third error value.
[0006] In one possible implementation, controlling the load to be open-circuited and determining the first error value while the load is open-circuited includes: controlling the load to be open-circuited and obtaining a first test value and a second test value of the RF power while the load is open-circuited. Determining the first error value based on the difference between the first and second test values. Controlling the load to be short-circuited and determining the third error value while the load is short-circuited includes: controlling the load to be short-circuited and obtaining a third test value and a fourth test value of the RF power while the load is short-circuited. Determining the third error value based on the difference between the third and fourth test values.
[0007] In one possible implementation, the correcting the forward power value and the reverse power value based on at least two error values to obtain corrected forward power value and reverse power value includes: correcting the forward power value based on a third error value to obtain a corrected forward power value; and correcting the reverse power value based on the second error value to obtain a corrected reverse power value.
[0008] In one possible embodiment, before correcting the forward power value and the reverse power value based on at least two error values to obtain the corrected forward power value and reverse power value, the RF power detection method further includes: determining a difference between the forward power value and the reverse power value of the RF power. When the difference between the forward power value and the reverse power value of the RF power is less than or equal to a first error value, determining that the load is in an open circuit abnormal state. When at least the difference between the forward power value and the reverse power value of the RF power is greater than the first error value, determining that the load is in a short circuit abnormal state.
[0009] In one possible embodiment, the forward power value and the reverse power value are corrected at least according to at least two error values to obtain corrected forward power value and reverse power value, including: when it is determined that the load is in an open circuit abnormal state, the forward power value and the reverse power value are corrected according to the first error value respectively to obtain corrected forward power value and reverse power value.
[0010] In one possible embodiment, the forward power value and the reverse power value are corrected at least according to at least two error values to obtain corrected forward power value and reverse power value, including: when it is determined that the load is in a short-circuit abnormal state, the forward power value and the reverse power value are corrected according to the second error value to obtain corrected forward power value and reverse power value.
[0011] In a second aspect, a radio frequency power detection device is also provided, which adopts the above-mentioned radio frequency power detection method to sample and correct the radio frequency power transmitted to the load. The radio frequency power detection device includes a control unit and an acquisition unit. The control unit is used to control the open circuit and short circuit of the load respectively. The acquisition unit is used to obtain the forward power value and reverse power value of the radio frequency power at least when the load is normally connected and the radio frequency power is transmitted to the load. The control unit is also used to determine at least two error values when the load is open circuit and short circuit, and correct the forward power value and the reverse power value at least according to the at least two error values to obtain the corrected forward power value and reverse power value.
[0012] In a third aspect, a radio frequency power supply device is also provided, comprising a radio frequency source and a radio frequency power detection device. The radio frequency power detection device comprises a control unit and an acquisition unit. The control unit is used to control the open circuit and short circuit of the load, respectively. The acquisition unit is used at least to obtain the forward power value and the reverse power value of the radio frequency power when the load is normally connected and the radio frequency power is transmitted to the load. The control unit is also used to determine at least two error values when the load is open circuit and short circuit, and to correct the forward power value and the reverse power value based on at least the at least two error values to obtain the corrected forward power value and reverse power value.
[0013] In a fourth aspect, a computer-readable storage medium is also provided, wherein a computer program is stored in the computer-readable storage medium. When the computer program is run on a computer or a processor, the above-mentioned radio frequency power detection method is implemented.
[0014] The RF power detection method, RF power detection device, RF power supply equipment and computer-readable storage medium of the present application can determine at least two error values by controlling the open circuit and short circuit of the load respectively, thereby obtaining the forward power value and reverse power value of the RF power when the load is normally connected and the RF power is transmitted to the load, and correcting the forward power value and the reverse power value based on at least the at least two error values, thereby obtaining more accurate, corrected forward power value and reverse power value, significantly improving the detection accuracy of the forward power value and the reverse power value, reducing the consistency requirements of electronic components, and thus improving the production efficiency of the RF power detection device. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the background technology, the drawings required for use in the embodiments of the present application or the background technology will be described below.
[0016] Figure 1 This is a flow chart of a radio frequency power detection method in some embodiments of the present application.
[0017] Figure 2 for Figure 1 A sub-flowchart of step S100 in FIG.
[0018] Figure 3 for Figure 2 A sub-flowchart of steps S110 and S120 in FIG.
[0019] Figure 4 for Figure 1 A sub-flowchart of step S300 in FIG.
[0020] Figure 5This is another flow chart of the radio frequency power detection method in some embodiments of the present application.
[0021] Figure 6 This is another flow chart of the radio frequency power detection method in some embodiments of the present application.
[0022] Figure 7 This is another flow chart of the radio frequency power detection method in some embodiments of the present application.
[0023] Figure 8 FIG. 1 is a schematic diagram of a radio frequency power detection device in an embodiment of the present application.
[0024] Figure 9 Schematic diagram of a radio frequency power supply device in one embodiment of the present application.
[0025] Description of the accompanying drawings: 1000, RF power supply equipment, 10, RF power detection device, 100, acquisition unit, 200, control unit, RS, RF source, RFP, RF power, RL, load. DETAILED DESCRIPTION
[0026] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application.
[0027] In the description of the embodiments of this application, it should be noted that, unless otherwise specified or limited, the terms "connected" and "connection" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; and direct connections or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.
[0028] In the following, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance or implicitly indicating the number of the technical features indicated. Therefore, a feature defined as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the embodiments of this application, unless otherwise specified, "plurality" means two or more.
[0029] In describing the embodiments of the present application, it should be noted that the terms "first," "second," and the like in the specification and claims of the present application and the accompanying drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or precedence. It should be understood that the terms used in this manner are interchangeable where appropriate, such that the embodiments of the present application described herein can be implemented in an order other than that illustrated or described herein.
[0030] In addition, the terms "include" and "have" and any variations thereof are intended to cover a non-exclusive inclusion. For example, a process, method, system, product, or device that includes a series of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, product, or device.
[0031] See also Figure 1 , Figure 1 Flowchart of the radio frequency power detection method in some embodiments of the present application. Figure 1 As shown, the present application provides a radio frequency power detection method, which is used to sample and calibrate the radio frequency power transmitted to the load. The radio frequency power detection method includes:
[0032] Step S100: Controlling the load to be open-circuited and short-circuited respectively to determine at least two error values.
[0033] Step S200: when the load is normally connected and the radio frequency power is transmitted to the load, obtaining the forward power value and the reverse power value of the radio frequency power.
[0034] Step S300: Correcting the forward power value and the reverse power value according to at least two error values to obtain corrected forward power value and reverse power value.
[0035] Therefore, the above-mentioned RF power detection method in the present application can determine at least two error values by controlling the open circuit and short circuit of the load respectively, so that when the load is normally connected and the RF power is transmitted to the load, the forward power value and reverse power value of the RF power are obtained, and the forward power value and the reverse power value are corrected according to at least two error values, so that more accurate and corrected forward power value and reverse power value can be obtained, which significantly improves the detection accuracy of the forward power value and the reverse power value, reduces the consistency requirements of electronic components, and thus can improve the production efficiency of the RF power detection device.
[0036] Specifically, in the application of RF power supply equipment, a voltage sensor and a current sensor or an integrated sensor such as a power sensor can be used to obtain the forward power value and the reverse power value. Alternatively, a resistor divider circuit, a current transformer, a resistor, a capacitor, a diode and other circuits or electronic components can be used to obtain the forward power value and the reverse power value. However, the consistency of electronic components such as resistors, capacitors and diodes is poor. By determining at least two error values caused by electronic components such as resistors, capacitors and diodes, the forward power value and the reverse power value can be corrected, thereby improving the detection accuracy of the forward power value and the reverse power value.
[0037] In some embodiments, step S100 may specifically include: controlling the load to be open-circuited and short-circuited, respectively, to determine at least two power error values. Step S300 may specifically include: correcting the forward power value and the reverse power value based on at least the at least two power error values to obtain corrected forward power value and reverse power value. Thus, when the power error value is obtained, the forward power value and the reverse power value can be directly corrected, simplifying the operation.
[0038] In other embodiments, step S100 may specifically include: controlling the load to be open-circuited and short-circuited, respectively, to determine at least two current error values. Before step S300, the RF power detection method may further include: determining at least two corresponding power error values based on the at least two current error values. Step S300 may specifically include: correcting the forward power value and the reverse power value based on at least the at least two power error values to obtain corrected forward power value and reverse power value. Thus, when only the current error value is obtained, the corresponding power error value can also be determined by the corresponding resistance value, thereby accurately correcting the forward power value and the reverse power value.
[0039] Please also refer to Figure 2 , Figure 2 for Figure 1 A sub-flowchart of step S100 in FIG. Figure 1 、 Figure 2 As shown, step S100: controlling the load to be open-circuited and short-circuited respectively to determine at least two error values may specifically include:
[0040] Step S110 : controlling the load to be open-circuited, and determining a first error value when the load is in the open-circuit state.
[0041] Step S120: controlling the load to be short-circuited, and determining a third error value when the load is short-circuited.
[0042] And, step S130: determining a second error value according to the first error value and the third error value.
[0043] Therefore, the above-mentioned RF power detection method in the present application can determine the first error value of electronic components such as diodes and capacitors when the load is open-circuited, and can determine the third error value of electronic components such as diodes, capacitors and resistors when the load is short-circuited, and can determine the second error value of electronic components such as resistors based on the first error value and the third error value.
[0044] In some embodiments, step S130 may specifically include: determining a second error value based on a difference between the first error value and the third error value, wherein the second error value is the difference between the third error value and the first error value.
[0045] In some embodiments, the RF power detection method may be applied to a RF power detection device. The RF power detection device may include an acquisition unit. The acquisition unit may include electronic components such as diodes, capacitors, and resistors.
[0046] Specifically, when the load is open, the first error value of electronic components such as diodes and capacitors can be determined, that is, the first error value of the acquisition unit can be determined. When the load is short-circuited, the third error value of electronic components such as diodes, capacitors and resistors can be determined, that is, the third error value of the acquisition unit can be determined. Based on the first error value and the third error value, the second error value of electronic components such as resistors can be determined, that is, the second error value of the acquisition unit can be determined.
[0047] Furthermore, the acquisition unit may include a voltage divider circuit, a current sampling circuit, a forward power acquisition circuit and a reverse power acquisition circuit. The forward power acquisition circuit may include electronic components such as diodes, capacitors and resistors. The reverse power acquisition circuit may include electronic components such as diodes, capacitors and resistors. The first error value is also the error value of the forward power acquisition circuit, the third error value is also the error value of the reverse power acquisition circuit, and the second error value is also the common error value of the forward power acquisition circuit and the reverse power acquisition circuit.
[0048] Furthermore, the voltage divider circuit includes two first resistors, the current sampling circuit includes a current transformer and two second resistors, the forward power acquisition circuit includes a first diode, a first ammeter, a third resistor and a first capacitor, and the reverse power acquisition circuit includes a second diode, a second ammeter, a fourth resistor and a second capacitor.
[0049] In which, the two first resistors can be connected in series to the transmission path of radio frequency power, and the midpoints of the two first resistors can be connected to the midpoints of the two second resistors. The coupling portion of the current transformer can be coupled to the transmission path of radio frequency power, and the two second resistors are connected in series to the two ends of the winding of the current sensor wound around the coupling portion. One end of the winding of the current sensor is connected to the positive electrode of the first diode, the negative electrode of the first diode is connected to the first capacitor, and the first ammeter and the third resistor are connected in series to the two ends of the first capacitor. The other end of the winding of the current sensor is connected to the positive electrode of the second diode, the negative electrode of the second diode is connected to the second capacitor, and the second ammeter and the fourth resistor are connected in series to the two ends of the second capacitor.
[0050] Thus, when the load is open-circuited, the first error value between the first diode, the first capacitor and the second diode, the second capacitor can be determined, that is, the first error value of the forward power acquisition circuit. When the load is short-circuited, the third error value between the first diode, the first capacitor, and a corresponding second resistor and the second diode, the second capacitor, and another corresponding second resistor can be determined, that is, the third error value of the reverse power acquisition circuit. Based on the first error value and the third error value, the second error value of the two second resistors can be determined, that is, the second error value of the current sampling circuit.
[0051] Please also refer to Figure 3 , Figure 3 for Figure 2 A sub-flowchart of step S110 and step S120 in FIG. Figure 2 、 Figure 3 As shown, step S110: controlling the load to be open-circuited, and determining a first error value when the load is open-circuited, may specifically include:
[0052] Step S111: controlling the load to be open-circuited, and obtaining a first test value and a second test value of radio frequency power when the load is open-circuited.
[0053] Step S112: determining a first error value according to a difference between the first test value and the second test value.
[0054] like Figure 2 、 Figure 3 As shown, step S120: controlling the load to be short-circuited, and determining the third error value when the load is short-circuited, may specifically include:
[0055] Step S121: controlling the load to be short-circuited, and obtaining a third test value and a fourth test value of the radio frequency power when the load is short-circuited.
[0056] Step S122: determining a third error value according to the difference between the third test value and the fourth test value.
[0057] Therefore, the above-mentioned RF power detection method in the present application can determine the first error value based on the difference between the first test value and the second test value, and can determine the third error value through the difference between the third test value and the fourth test value. By using the special state of the load being open circuit and short circuit, the first error value and the third error value can be quickly obtained.
[0058] Specifically, when obtaining the forward power value and reverse power value of radio frequency electric energy, the same circuit is often used to sample the forward power value and the reverse power value, such as the above-mentioned power acquisition circuit including electronic components such as resistors, diodes, and capacitors. This puts higher requirements on the consistency of electronic components such as resistors, diodes, and capacitors in the two power acquisition circuits. By configuring the load in special states of open circuit and short circuit, the error value between the two power acquisition circuits when obtaining the forward power value and reverse power value of radio frequency electric energy can be obtained.
[0059] Among them, the first test value can be the forward power value of the RF power when the load is in an open circuit, the second test value can be the reverse power value of the RF power when the load is in an open circuit, the third test value can be the forward power value of the RF power when the load is in a short circuit, and the second test value can be the reverse power value of the RF power when the load is in a short circuit.
[0060] Please also refer to Figure 4 , Figure 4 for Figure 1 A sub-flowchart of step S300 in FIG. Figure 1 、 Figure 4 As shown, step S300: correcting the forward power value and the reverse power value according to at least two error values to obtain corrected forward power value and reverse power value, which may specifically include:
[0061] Step S310: Correct the forward power value according to the third error value to obtain a corrected forward power value.
[0062] Step S320: Correcting the reverse power value according to the second error value to obtain a corrected reverse power value.
[0063] Therefore, the above-mentioned RF power detection method in the present application, based on the errors occurring when obtaining the forward power value and the reverse power value, corrects the forward power value according to the third error value, and corrects the reverse power value according to the second error value, so as to obtain the corrected forward power value and reverse power value.
[0064] Please also refer to Figure 5 , Figure 5 FIG. 1 is another flow chart of the radio frequency power detection method in some embodiments of the present application. Figure 5As shown, the radio frequency power detection method may further include:
[0065] Step S330: Determine the difference between the forward power value and the reverse power value of the radio frequency power.
[0066] Step S340: When the difference between the forward power value and the reverse power value of the radio frequency power is less than or equal to the first error value, it is determined that the load is in an open circuit abnormal state.
[0067] Step S350: determining that the load is in a short-circuit abnormal state when at least the difference between the forward power value and the reverse power value of the radio frequency power is greater than a first error value.
[0068] Among them, such as Figure 5 Steps S330, S340, and S350 shown in FIG. Figure 1 The radio frequency power detection method includes steps before step S300 shown.
[0069] Therefore, the above-mentioned RF power detection method in the present application can also determine whether the load is in an open circuit or short circuit abnormal state based on the relationship between the difference between the forward power value and the reverse power value of the RF electric energy and the first error value, and can effectively protect the load and improve the output effect.
[0070] In some embodiments, step S350 may further include: determining that the load is in a short-circuit abnormal state when the difference between the forward power value and the reverse power value of the RF power is greater than a first error value and less than N times a third error value; and determining that the load is in a normal connection state when the difference between the forward power value and the reverse power value of the RF power is greater than the first error value and greater than or equal to N times the third error value. Wherein, N is a positive integer and can be set according to specific needs, for example, N can be 2, 3, 4, etc.
[0071] Furthermore, step S310 and step S320 may be performed after step S350, and specifically performed after determining that the load is in a normal access state when the difference between the forward power value and the reverse power value of the RF power in step S350 is greater than the first error value and greater than or equal to N times the third error value.
[0072] Please also refer to Figure 6 , Figure 6 FIG. 1 is another flow chart of a radio frequency power detection method in some embodiments of the present application. Figure 5 、 Figure 6 As shown, the radio frequency power detection method may also include:
[0073] Step S100: Controlling the load to be open-circuited and short-circuited respectively to determine at least two error values.
[0074] Step S200: when the load is normally connected and the radio frequency power is transmitted to the load, obtaining the forward power value and the reverse power value of the radio frequency power.
[0075] Step S360: When it is determined that the load is in an open circuit abnormal state, the forward power value and the reverse power value are respectively corrected according to the first error value to obtain corrected forward power value and reverse power value.
[0076] Therefore, the above-mentioned RF power detection method in the present application corrects the forward power value and the reverse power value according to the first error value based on the errors that occur when obtaining the forward power value and the reverse power value, and can obtain the corrected forward power value and reverse power value.
[0077] Please also refer to Figure 7 , Figure 7 FIG. 1 is another flow chart of the radio frequency power detection method in some embodiments of the present application. Figure 5 、 Figure 7 As shown, the radio frequency power detection method may also include:
[0078] Step S100: Controlling the load to be open-circuited and short-circuited respectively to determine at least two error values.
[0079] Step S200: when the load is normally connected and the radio frequency power is transmitted to the load, obtaining the forward power value and the reverse power value of the radio frequency power.
[0080] Step S370: When it is determined that the load is in a short-circuit abnormal state, the forward power value and the reverse power value are respectively corrected according to the second error value to obtain corrected forward power value and reverse power value.
[0081] Therefore, the above-mentioned RF power detection method in the present application corrects the forward power value and the reverse power value according to the second error value based on the errors that occur when obtaining the forward power value and the reverse power value, and can obtain the corrected forward power value and reverse power value.
[0082] Among them, such as Figure 6 Step S360 shown and Figure 7 The step S370 shown in FIG. 1 may be specifically as follows: Figure 1 The step S300 shown includes sub-steps.
[0083] Among them, such as Figure 6 、 Figure 7 For details of step S100 and step S200, please refer to the above description, which will not be repeated here.
[0084] The RF power detection method of the present application, through the above steps, can identify the state of the load based on the first error value, the second error value and the third error value, protect the load, and correct the forward power value and the reverse power value to obtain more accurate, corrected forward power value and reverse power value, significantly improving the detection accuracy of the forward power value and the reverse power value, reducing the consistency requirements of electronic components, and thereby improving the production efficiency of the RF power detection device.
[0085] See also Figure 8 , Figure 8 FIG. 1 is a schematic diagram of a radio frequency power detection device in an embodiment of the present application. Figure 8 As shown, the present application also provides a radio frequency power detection device 10, which uses the radio frequency power detection method in any of the aforementioned embodiments to sample and correct the radio frequency power RFP transmitted to the load RL. The radio frequency power detection device 10 includes a control unit 200 and an acquisition unit 100. The control unit 200 is used to control the load RL to open and short-circuit respectively. The acquisition unit 100 is at least used to obtain the forward power value and reverse power value of the radio frequency power RFP when the load RL is normally connected and the radio frequency power RFP is transmitted to the load RL. The control unit 200 is also used to determine at least two error values when the load RL is open and short-circuited, and to correct the forward power value and the reverse power value based on at least the at least two error values to obtain the corrected forward power value and reverse power value.
[0086] The operations performed by the RF power detection device 10 or the control unit 200 correspond to the steps in the RF power detection method in any of the aforementioned embodiments. For further operations that can be performed by the RF power detection device 10 or the control unit 200, please refer to the relevant content of the RF power detection method in any of the aforementioned embodiments, and will not be repeated here.
[0087] like Figure 8 As shown, the acquisition unit 100 can be used to be connected to the output path of the RF source RS to obtain the forward power value and reverse power value of the RF power RFP output by the RF source RS to the load RL. The load RL can be used to be normally connected to the RF source RS, open circuit, or short circuit. The control unit 200 can be connected to the acquisition unit 100, and determine at least two error values when the load RL is open circuit and short circuit, and correct the forward power value and the reverse power value based on at least the at least two error values to obtain the corrected forward power value and reverse power value. The control unit 200 can be connected to the output path of the RF source RS or the load RL to control the load RL to be normally connected, open circuit, or short circuit respectively.
[0088] Among them, the acquisition unit 100 is mainly used to execute the steps of obtaining the forward power value and reverse power value of the radio frequency power RFP of the above-mentioned radio frequency power detection method. The acquisition unit 100 may include a voltage divider circuit, a current sampling circuit, a forward power acquisition circuit and a reverse power acquisition circuit. The specific contents of the voltage divider circuit, the current sampling circuit, the forward power acquisition circuit and the reverse power acquisition circuit can be found in the above, and will not be repeated here. The present application is not limited to this, as long as the forward power value and reverse power value of the radio frequency power RFP can be obtained.
[0089] Among them, the control unit 200 is mainly used to execute other specific steps of the above-mentioned RF power detection method. The control unit 200 may include a general-purpose processor such as a central processing unit (CPU), or a digital signal processor (DSP), an application-specific integrated circuit (ASIC), a field-programmable gate array (FPGA) or other programmable logic devices, discrete gate logic devices, transistor logic devices and other logic control devices, or a microprocessor such as a micro control unit (MCU).
[0090] The RF power detection method and RF power detection device 10 of the present application, through the above steps and structures, can identify the state of the load RL based on the first error value, the second error value and the third error value, protect the load RL, and correct the forward power value and the reverse power value to obtain more accurate, corrected forward power value and reverse power value, significantly improve the detection accuracy of the forward power value and the reverse power value, reduce the consistency requirements of electronic components, and thus improve the production efficiency of the RF power detection device 10.
[0091] See also Figure 9 , Figure 9 FIG. 1 is a schematic diagram of a radio frequency power supply device in an embodiment of the present application. Figure 9 As shown, the present application further provides a radio frequency power supply device 1000 , which includes a radio frequency source RS and the radio frequency power detection device 10 in any of the aforementioned embodiments.
[0092] Please refer again Figure 8 .like Figure 8As shown, the RF power detection device 10 includes a control unit 200 and an acquisition unit 100. The control unit 200 is configured to control the load RL to open and short circuit, respectively. The acquisition unit 100 is configured to obtain forward and reverse power values of the RF power RFP when the load RL is properly connected and the RF power RFP is transmitted to the load RL. The control unit 200 is further configured to determine at least two error values when the load RL is open and short circuited, and to correct the forward and reverse power values based on at least the two error values to obtain corrected forward and reverse power values.
[0093] The more specific structure of the radio frequency power detection device 10 can be found in the relevant content of the radio frequency power detection device 10 in any of the aforementioned embodiments, which will not be repeated here.
[0094] In some embodiments, the RF source RS can be connected to the load RL to output RF power RFP to the load RL. The RF power detection device 10 can be connected to the transmission path of the RF power RFP and to the load RL.
[0095] The RF power detection method, RF power detection device 10 and RF power supply equipment 1000 of the present application can identify the state of the load RL based on the first error value, the second error value and the third error value, protect the load RL, and correct the forward power value and the reverse power value to obtain more accurate, corrected forward power value and reverse power value, significantly improving the detection accuracy of the forward power value and the reverse power value, reducing the consistency requirements of electronic components, and thus improving the production efficiency of the RF power detection device 10, thereby improving the production efficiency of the RF power supply equipment 1000.
[0096] The present application also provides a computer-readable storage medium, in which a computer program is stored. When the computer program runs on a computer or a processor, the radio frequency power detection method of any of the aforementioned embodiments is implemented.
[0097] In the multiple embodiments provided in this application, it should be understood that the disclosed methods, devices, and equipment can be implemented in other ways. For example, the device embodiments described above are merely schematic; for example, the division of units is merely a logical function division, and there may be other division methods in actual implementation; for example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the mutual coupling or direct coupling or communication connection shown or discussed can be through some interfaces, indirect coupling or communication connection of devices or units, which can be electrical, mechanical or other forms.
[0098] Units described as separate components may or may not be physically separate, and components shown as units may or may not be physical units, that is, they may be located in one place or distributed across multiple network units. Some or all of these units may be selected to achieve the purpose of this embodiment according to actual needs.
[0099] In addition, the functional units in various embodiments of the present invention may be integrated into a single processing unit, each unit may be physically included separately, or two or more units may be integrated into a single unit. The aforementioned integrated units may be implemented in the form of hardware or hardware plus software functional units.
[0100] The above-mentioned integrated unit implemented in the form of a software functional unit can be stored in a computer-readable storage medium. The above-mentioned software functional unit is stored in a storage medium and includes a number of instructions for causing a computer device (which can be a personal computer, server, or network device, etc.) to perform some steps of the method of each embodiment of the present invention. The aforementioned storage medium includes: a USB flash drive, a mobile hard disk, a read-only memory (ROM), a random access memory (RAM), a magnetic disk, or an optical disk, etc., various media that can store program code.
[0101] The above description is only a specific embodiment of the present application, but the scope of protection of the present application is not limited thereto. Any changes or substitutions that can be easily conceived by any person skilled in the art within the technical scope disclosed in this application should be included in the scope of protection of this application; the embodiments of this application and the features of the embodiments can be combined with each other unless there is a conflict. Therefore, the scope of protection of this application should be based on the scope of protection of the claims.
Claims
1. A radio frequency power detection method, characterized in that: Used to sample and correct the radio frequency power transmitted to the load; The radio frequency power detection method includes: Controlling the load to be open-circuited and short-circuited respectively to determine at least two error values; When the load is normally connected and the radio frequency power is transmitted to the load, obtaining a forward power value and a reverse power value of the radio frequency power; The forward power value and the reverse power value are corrected at least according to the at least two error values to obtain corrected forward power value and reverse power value.
2. The radio frequency power detection method according to claim 1, wherein: The step of controlling the load to open and short circuit respectively to determine at least two error values includes: controlling the load to be open-circuited, and determining a first error value when the load is in the open-circuit state; controlling the load to be short-circuited, and determining a third error value when the load is in the short-circuit state; and A second error value is determined according to the first error value and the third error value.
3. The radio frequency power detection method according to claim 2, wherein: The controlling the load to be open-circuited and determining the first error value when the load is open-circuited includes: controlling the load to be open-circuited, and obtaining a first test value and a second test value of the radio frequency power when the load is open-circuited; determining a first error value according to a difference between the first test value and the second test value; The controlling the load to be short-circuited and determining the third error value when the load is short-circuited includes: controlling the load to be short-circuited, and obtaining a third test value and a fourth test value of the radio frequency electric energy when the load is short-circuited; A third error value is determined according to a difference between the third test value and the fourth test value.
4. The radio frequency power detection method according to claim 2, wherein: The step of correcting the forward power value and the reverse power value based on at least two error values to obtain corrected forward power value and reverse power value includes: Correcting the forward power value according to the third error value to obtain a corrected forward power value; The reverse power value is corrected according to the second error value to obtain a corrected reverse power value.
5. The radio frequency power detection method according to claim 2, wherein: Before correcting the forward power value and the reverse power value based on at least two error values to obtain corrected forward power value and reverse power value, the radio frequency power detection method further includes: Determine the difference between the forward power value and the reverse power value of the radio frequency electric energy; When the difference between the forward power value and the reverse power value of the radio frequency electric energy is less than or equal to the first error value, determining that the load is in an open circuit abnormal state; At least when the difference between the forward power value and the reverse power value of the radio frequency electric energy is greater than the first error value, it is determined that the load is in a short-circuit abnormal state.
6. The radio frequency power detection method according to claim 5, characterized in that: The step of correcting the forward power value and the reverse power value based on at least two error values to obtain corrected forward power value and reverse power value includes: When it is determined that the load is in an open circuit abnormal state, the forward power value and the reverse power value are corrected according to the first error value to obtain corrected forward power value and reverse power value.
7. The radio frequency power detection method according to claim 5, characterized in that: The step of correcting the forward power value and the reverse power value based on at least two error values to obtain corrected forward power value and reverse power value includes: When it is determined that the load is in a short-circuit abnormal state, the forward power value and the reverse power value are corrected according to the second error value to obtain corrected forward power value and reverse power value.
8. A radio frequency power detection device, characterized in that: The radio frequency power detection device adopts the radio frequency power detection method according to any one of claims 1 to 7 to sample and calibrate the radio frequency power transmitted to the load; Wherein, the radio frequency power detection device includes: A control unit, used to control the open circuit and short circuit of the load respectively; an acquiring unit, configured to acquire a forward power value and a reverse power value of the radio frequency power when the load is normally connected and the radio frequency power is transmitted to the load; The control unit is further configured to determine at least two error values when the load is open-circuited and short-circuited, and to correct the forward power value and the reverse power value based on at least the at least two error values to obtain corrected forward power value and reverse power value.
9. A radio frequency power supply device, characterized in that: It comprises a radio frequency source and the radio frequency power detection device as claimed in claim 8.
10. A computer-readable storage medium, characterized in that The computer-readable storage medium stores a computer program, and when the computer program is run on a computer or a processor, the radio frequency power detection method according to any one of claims 1 to 7 is implemented.