A calibration jig and probe station calibration method

Abstract

The present application relates to the technical field of semiconductor manufacturing, and provides a calibration jig and a probe station calibration method, which comprises: a carrier plate for being placed in a probe test device; a reference plate mounted on the carrier plate, and when the carrier plate is placed in the probe test device, the upper plate surface of the reference plate is parallel to the reference surface of the probe test device; a calibration plate arranged on the carrier plate, and the calibration plate is movable relative to the carrier plate; the calibration plate is used for calibration of the probe test device; an adjusting assembly is used for adjusting the movement of the calibration plate; and after the adjusting assembly makes the upper end surface of the calibration plate parallel to the upper end surface of the reference plate, the calibration plate can calibrate the probe test device. Through the adjustment of the adjusting assembly, the end surface of the calibration plate is parallel to the end surface of the reference plate, and since the upper end surface of the reference plate is parallel to the end surface of the probe station, the parallelism between the calibration plate and the end surface of the probe station is ensured, so that when the probe station is calibrated, the calibration plate only needs to be calibrated, and no loss and abrasion of the instrument are caused.

Description

Technical Field

[0001] This invention relates to the field of semiconductor technology, and more specifically to a calibration fixture and a probe station calibration method. Background Technology

[0002] Probe cards are core consumables in the wafer testing process. Their main function is to establish an electrical connection between the chip on the wafer and the probe card testing equipment. During the probe card testing process, the probe card is first placed on the probe station, and the test signals from the probe card testing equipment are transmitted to the chip. The chip's response signals are then transmitted back to the probe card testing equipment, thereby completing the electrical performance and functional testing of the chip.

[0003] In semiconductor manufacturing, when testing probe cards, if the probe stage is tilted after the probe card is placed on it, some probes may be suspended or subjected to excessive pressure, causing the current / voltage measurements to deviate from the actual values, resulting in test distortion or sample damage. To solve the tilt problem, existing methods often involve leveling the probe card after it is placed on the probe stage. However, this leveling method can lead to product damage, and unevenness can also cause wear and tear on the instruments due to the high pressure from the probe card, thus affecting the accuracy of subsequent tests. Summary of the Invention

[0004] In view of the shortcomings of existing technologies, such as product loss and instrument wear, the purpose of this invention is to provide a calibration fixture and probe station calibration method that is free from loss and wear.

[0005] To address the above problems, the present invention provides the following technical solution:

[0006] In a first aspect, embodiments of this application provide a calibration fixture, including: a carrier plate for placement on a probe testing device;

[0007] A reference plate is mounted on the carrier plate. When the carrier plate is placed on the probe testing equipment, the upper surface of the reference plate is parallel to the reference surface of the probe testing equipment.

[0008] A calibration plate is disposed on the carrier plate and is movable relative to the carrier plate; the calibration plate is used for calibration of the probe testing equipment.

[0009] An adjustment component for adjusting the movement of the calibration plate;

[0010] When the adjustment component makes the upper surface of the calibration plate parallel to the upper surface of the reference plate, the calibration plate can calibrate the probe testing equipment.

[0011] In some embodiments, the calibration plate is a calibration plate.

[0012] In some embodiments, the adjustment assembly includes an adjustment plate and an adjustment mechanism;

[0013] The adjustment plate is used for the fixed installation of the calibration plate;

[0014] The adjustment mechanism is used to adjust the adjustment plate so that the calibration plate on the adjustment plate is parallel to the reference plate.

[0015] In some embodiments, there are three or more adjustment mechanisms;

[0016] The adjustment mechanism includes an adjustment component and a positioning groove provided on the adjustment plate;

[0017] The inner end of the adjusting member is placed in the positioning groove, and the adjusting member is positioned in the positioning groove to prevent the adjusting plate from tilting.

[0018] In some embodiments, the adjusting element includes a coarse adjustment screw and a fine adjustment screw;

[0019] The coarse adjustment screw is used for quick adjustment of the calibration plate relative to the reference plate;

[0020] The fine-tuning screw is used to adjust the accuracy of the calibration plate relative to the reference plate.

[0021] In some embodiments, the coarse adjustment screw and the fine adjustment screw are coaxially arranged;

[0022] The coarse adjustment screw is fitted outside the fine adjustment screw, or the fine adjustment screw is fitted outside the coarse adjustment screw.

[0023] In some embodiments, the fine-tuning screw located on the inner side or the coarse-tuning screw located on the inner side has a chamfered end near the adjusting plate;

[0024] The chamfer is placed within the positioning groove to prevent the adjustment plate from tilting.

[0025] In some embodiments, the calibration fixture further includes a base plate;

[0026] The base plate is mounted on the carrier plate, and the coarse adjustment screw rod located on the outer side or the fine adjustment screw rod located on the outer side is rotatably mounted on the base plate, and the adjustment plate is mounted on the base plate.

[0027] In some embodiments, the calibration fixture further includes a frame-shaped cover plate;

[0028] The cover plate is placed over the calibration plate, and the cover plate prevents the calibration plate from detaching from the adjustment plate.

[0029] Secondly, embodiments of this application provide a probe station calibration method, employing a calibration fixture as described in any of the first aspects, characterized by comprising the following steps:

[0030] S1: Position the calibration fixture with the target point facing down, and then place the calibration fixture on the probe stage for installation and positioning. This completes the installation of the calibration fixture and the probe stage. At this time, the reference plate of the calibration fixture is parallel to the probe stage, and the target point on the calibration fixture corresponds to the detection sensor on the probe card test equipment.

[0031] S2: The detection sensor scans the target points on the calibration fixture, scanning three target points at arbitrary positions, and the three target points are not located on the same straight line;

[0032] S3: The processing module on the probe card testing equipment measures and compares the height of the three target points;

[0033] S4: When the height difference of the three target points obtained by the processing module is inconsistent or the measured height deviates from the actual height of the probe station, the processing module will drive the calibration piece on the probe station to make adjustments.

[0034] S5: Continue repeating steps S2-S4 until the height difference obtained by the processing module is consistent and the height is adjusted to the actual height of the probe station. Then, the sensor detection stops and the probe station completes calibration.

[0035] S6: Remove the calibration fixture from the probe station.

[0036] The beneficial effects of this invention are: by adjusting the adjustment components, the end face of the calibration plate is made parallel to the end face of the reference plate, and since the upper end face of the reference plate is parallel to the end face of the probe stage, the end face of the calibration plate is also ensured to be parallel to the end face of the probe stage. Thus, when calibrating the probe stage, only the calibration plate needs to be calibrated, without any wear and tear on the instrument. Attached Figure Description

[0037] Figure 1 This is a perspective view of the present invention;

[0038] Figure 2 The perspective view of the adjusting component is provided for easy observation of the present invention;

[0039] Figure 3 This is a first exploded view of the present invention;

[0040] Figure 4 This is the second exploded view of the present invention;

[0041] Figure 5 This is a cross-sectional schematic diagram of the adjusting component of the present invention;

[0042] Figure 6 This is a three-dimensional schematic diagram of the calibration fixture of the present invention mounted on the probe station;

[0043] Figure 7 This is a three-dimensional view of the detection sensor of the present invention scanning the target point of the calibration fixture.

[0044] Figure label:

[0045] 100. Calibration fixture; 110. Carrier plate; 120. Reference plate; 130. Calibration plate; 140. Adjustment assembly; 150. Base plate; 160. Cover plate;

[0046] 141. Adjusting plate; 142. Adjusting mechanism; 142a. Adjusting component; 2a1. Coarse adjustment screw rod; 2a2. Fine adjustment screw rod; 142b. Positioning groove; 143. Chamfer;

[0047] 200. Probe card testing equipment; 210. Probe station; 220. Detection sensor. Detailed Implementation

[0048] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0049] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this invention, "multiple" means two or more, unless otherwise explicitly specified.

[0050] For ease of description of the first, second, and third directions in the embodiments of this application, the first direction is the left-right direction in the figures, the second direction is the front-back direction in the figures, and the third direction is the up-down direction in the figures. The x-axis arrow direction is referred to as the "right" direction, the y-axis arrow direction as the "up" direction, and the z-axis arrow direction as the "back" direction, but these are not the sole limitations in the actual application of this application.

[0051] like Figures 1-4As shown, this embodiment provides a calibration fixture 100, which includes a carrier plate 110, a reference plate 120, a calibration plate 130, and an adjustment assembly 140. The carrier plate 110 is used to place on a probe testing device; the reference plate 120 is mounted on the carrier plate 110. When the carrier plate 110 is placed on the probe testing device, the upper surface of the reference plate 120 is parallel to the reference surface of the probe testing device. The reference plate 120 is a PCB board; that is, after the substrate and the carrier plate 110 are fixedly installed, when the reference plate 120 is placed on the probe testing device, the upper end surface of the reference plate 120 remains parallel to the end surface of the probe stage 210; the calibration plate 130 is disposed on the carrier plate 110 and can move relative to the carrier plate 110; the calibration plate 130 is used for calibration of the probe testing device; the adjustment assembly 140 is used to adjust the movement of the calibration plate 130; when the adjustment assembly 140 makes the upper end surface of the calibration plate 130 parallel to the upper end surface of the reference plate 120, the calibration plate 130 can calibrate the probe testing device. By adjusting component 140, the end face of calibration plate 130 is made parallel to the end face of reference plate 120. Since the upper end face of reference plate 120 is parallel to the end face of probe stage 210 when the reference plate 120 is placed on the probe testing equipment, the end face of calibration plate 130 is also parallel to the end face of probe stage 210. Therefore, when calibrating probe stage 210, only calibration plate 130 needs to be calibrated, without any damage or wear on the instrument.

[0052] In some embodiments, the calibration plate 130 is a calibration plate; point scanning can be effectively performed through the target points on the calibration plate.

[0053] Preferably, the standard plate 130 is made of glass or metal.

[0054] Preferably, the glass material is laser glass, quartz optical glass, etc., but no specific restrictions are imposed here.

[0055] Preferably, the metal material is steel plate, aluminum plate, etc., but no specific restrictions are made here.

[0056] like Figures 3-4 As shown, in some embodiments, the adjustment assembly 140 includes an adjustment plate 141 and an adjustment mechanism 142; the adjustment plate 141 is used for the fixed installation of the calibration plate 130; the adjustment mechanism 142 is used to adjust the adjustment plate 141 so that the calibration plate 130 on the adjustment plate 141 is parallel to the reference plate 120. By fixing the calibration plate 130 to the adjustment plate 141, the calibration plate 130 can be well supported, and by adjusting the adjustment plate 141 through the adjustment mechanism 142, the parallelism between the calibration plate 130 and the reference plate 120 is effectively ensured.

[0057] In some embodiments, the carrier plate 110 is frame-shaped, and the reference plate 120 is provided with clearance holes. The periphery of the clearance holes coincides with the inner side of the carrier plate 110. The adjusting plate 141 and the calibration plate 130 are placed inside the carrier plate 110, and there is a gap between the adjusting plate 141 and the calibration plate 130 and the inner side of the carrier plate 110. This ensures that the adjusting plate 141 and the calibration plate 130 are not obstructed during adjustment.

[0058] like Figures 3-4 As shown, in some embodiments, there are multiple adjusting mechanisms 142. Each adjusting mechanism 142 includes an adjusting member 142a and a positioning groove 142b disposed on the adjusting plate 141. The inner end of the adjusting member 142a is placed in the positioning groove 142b, and the adjusting member 142a prevents the adjusting plate 141 from tilting through the positioning groove 142b. By providing multiple positioning grooves 142b, the adjusting member 142a does not disengage from the positioning groove 142b when the adjusting plate 141 moves up and down, and the positioning groove 142b prevents the adjusting plate 141 from shifting horizontally.

[0059] Preferably, there are three or four adjustment mechanisms 142.

[0060] like Figures 3-5 As shown, in some embodiments, the adjusting member 142a includes a coarse adjustment screw rod 2a1 and a fine adjustment screw rod 2a2; the coarse adjustment screw rod 2a1 is used for rapid adjustment of the calibration plate 130 relative to the reference plate 120; the fine adjustment screw rod 2a2 is used for precision adjustment of the calibration plate 130 relative to the reference plate 120. Adjusting the coarse adjustment screw rod 2a1 allows for rapid movement of the adjusting plate 141, accelerating the adjustment efficiency; while adjusting the fine adjustment screw rod 2a2 ensures small-distance adjustment of the adjusting plate 141, guaranteeing the parallelism between the calibration plate 130 and the reference plate 120.

[0061] In some embodiments, the coarse adjustment screw 2a1 and the fine adjustment screw 2a2 are coaxially arranged; the coarse adjustment screw 2a1 is sleeved outside the fine adjustment screw 2a2, or the fine adjustment screw 2a2 is sleeved outside the coarse adjustment screw 2a1. By using the coaxial arrangement of the coarse adjustment screw 2a1 and the fine adjustment screw 2a2, unilateral adjustment can be achieved when rotating either the coarse adjustment screw 2a1 or the fine adjustment screw 2a2, reducing operational difficulty.

[0062] Example 1, such as Figures 3-5 As shown, when the coarse adjustment screw rod 2a1 is fitted outside the fine adjustment screw rod 2a2, adjustment requires first rotating the outer coarse adjustment screw rod 2a1, and then rotating the inner fine adjustment screw rod 2a2. At this time, the friction between the fine adjustment screw rod 2a2 and the coarse adjustment screw rod 2a1 is less than the friction between the coarse adjustment screw rod 2a1 and the base plate 150. This ensures that when the fine adjustment screw rod 2a2 is rotated, the coarse adjustment screw rod 2a1 does not rotate, thus guaranteeing adjustment accuracy.

[0063] Example 2: When the fine-tuning screw 2a2 is fitted outside the coarse-tuning screw 2a1, adjustment requires first rotating the inner coarse-tuning screw 2a1, and then rotating the outer fine-tuning screw 2a2. At this time, the friction between the fine-tuning screw 2a2 and the base plate 150 is less than the friction between the coarse-tuning screw 2a1 and the fine-tuning screw 2a2. This allows the fine-tuning screw 2a2 to rotate when the coarse-tuning screw 2a1 rotates, but the coarse-tuning screw 2a1 does not rotate when the fine-tuning screw 2a2 rotates, thus ensuring adjustment accuracy.

[0064] In some embodiments, the fine-tuning screw 2a2 or the coarse-tuning screw 2a1 located on the inner side has a chamfer 143 at one end near the adjusting plate 141; the chamfer 143 is placed in the positioning groove 142b to prevent the adjusting plate 141 from tilting. The chamfer 143 at the upper end of the screw is placed on the inner side so that the chamfer 143 at the end of the screw is not disengaged from the positioning groove 142b, preventing the adjusting plate 141 from shifting horizontally and causing the calibration plate 130 to shift.

[0065] Preferably, chamfer 143 is a rounded corner.

[0066] Preferably, chamfer 143 is a right angle.

[0067] like Figures 3-4 As shown, in some embodiments, the calibration fixture 100 further includes a base plate 150; the base plate 150 is mounted on the carrier plate 110, and the coarse adjustment screw 2a1 or the fine adjustment screw 2a2 located on the outer side is rotatably mounted on the base plate 150, and the adjustment plate 141 is mounted on the base plate 150. The base plate 150 not only prevents the adjustment plate 141 from falling off, but also facilitates the installation and rotation of the screw.

[0068] Preferably, the base plate has mounting holes, and the adjusting plate is fixed by bolts passing through the mounting holes on the base plate, with a gap between the bolts and the mounting holes on the base plate.

[0069] like Figures 3-4 As shown, in some embodiments, the calibration fixture 100 further includes a frame-shaped cover plate 160; the cover plate 160 covers the calibration plate 130, and the cover plate 160 prevents the calibration plate 130 from detaching from the adjustment plate 141. The frame-shaped design of the cover plate 160 can prevent the calibration plate 130 from falling off and can also prevent the identification of the calibration plate 130 during testing.

[0070] Leveling method for calibration plate 130 of calibration fixture 100:

[0071] S1: Make the adjustment plate 141 and the base plate 150 in an active state; place the calibration fixture 100 with the target point facing upwards on the fixed testing instrument;

[0072] S2: The detection sensor on the detector scans the target points on the calibration fixture 100, scanning three target points at arbitrary positions, and the three target points are not located on the same straight line.

[0073] S3: The processing module on the detector measures the height of the three target points;

[0074] S4: The display module on the detector shows the height of the three target points at their corresponding positions;

[0075] S5: Based on the height displayed on the display module, determine the deviation from the preset height. If the deviation is large, first adjust the coarse adjustment screw. The deviation range is between 100-10 micrometers. If the deviation is small, adjust the fine adjustment screw. The deviation range is between 10-0.5 micrometers.

[0076] S6: Continue repeating steps S2-S5 until the height difference obtained by the processing module is consistent, and the height is adjusted to the preset height.

[0077] S7: Finally, fix the adjusting plate 141 to the base plate 150, that is, make the adjusting plate press on the adjusting screw so that it does not move.

[0078] Optional testing equipment includes one of the following: laser level, level indicator calibration instrument, etc. No specific selection is made here.

[0079] like Figures 6-7 As shown, this application also provides a probe station calibration method, which uses a calibration fixture 100 and includes the following steps:

[0080] S1: Position the calibration fixture 100 with the target point facing down, and then place the calibration fixture 100 on the probe station 210 for installation and positioning, so that the calibration fixture 100 and the probe station 210 are installed. At this time, the reference plate 120 of the calibration fixture 100 is parallel to the probe station 210, and the target point on the calibration fixture 100 corresponds to the detection sensor on the probe card testing device 200.

[0081] S2: The detection sensor scans the target points on the calibration fixture 100, scanning three target points at arbitrary positions, and the three target points are not located on the same straight line;

[0082] S3: The processing module on the probe card testing equipment 200 measures and compares the height of the three target points;

[0083] S4: When the height difference of the three target points obtained by the processing module is inconsistent or the measured height deviates from the actual height of the probe station 210, the processing module will drive the calibration piece on the probe station 210 to make adjustments.

[0084] S5: Continue repeating steps S2-S4 until the height difference obtained by the processing module is consistent and the height is adjusted to the actual height of the probe station 210. Then, the sensor detection stops and the probe station 210 completes the calibration.

[0085] S6: Remove the calibration fixture 100 from the probe station 210.

[0086] The calibration method for the detection sensor on the probe card testing equipment 200 is as follows: First, the probe station is calibrated. Then, the calibration fixture 100 is placed on the probe card testing equipment 200. Subsequently, the detection sensor randomly and continuously identifies two adjacent points on the calibration fixture 100. The accuracy of the detection sensor's recognition distance is determined based on the distance between the two adjacent target points, and calibration is completed to ensure that the probe card can perform accurate detection in the subsequent semiconductor manufacturing process.

[0087] In summary, the present invention provides a calibration fixture and a probe stage calibration method. By adjusting the adjustment components, the end face of the calibration plate is made parallel to the end face of the reference plate. Since the upper end face of the reference plate is parallel to the end face of the probe stage, the calibration plate is also parallel to the end face of the probe stage. Therefore, when calibrating the probe stage, only the calibration plate needs to be calibrated, without any wear or tear on the instrument.

[0088] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this application.

Claims

1. A calibration fixture, characterized in that, include: Carrier plate, used to place probe testing equipment; A reference plate is mounted on the carrier plate. When the carrier plate is placed on the probe testing equipment, the upper surface of the reference plate is parallel to the reference surface of the probe testing equipment. A calibration plate is disposed on the carrier plate and is movable relative to the carrier plate; the calibration plate is used for calibration of the probe testing equipment. An adjustment component for adjusting the movement of the calibration plate; When the adjustment component makes the upper surface of the calibration plate parallel to the upper surface of the reference plate, the calibration plate can calibrate the probe testing equipment.

2. The calibration fixture according to claim 1, characterized in that: The calibration plate is a calibration plate.

3. The calibration fixture according to claim 1, characterized in that: The adjustment assembly includes an adjustment plate and an adjustment mechanism; The adjustment plate is used for the fixed installation of the calibration plate; The adjustment mechanism is used to adjust the adjustment plate so that the calibration plate on the adjustment plate is parallel to the reference plate.

4. The calibration fixture according to claim 3, characterized in that: There are three or more adjustment mechanisms; The adjustment mechanism includes an adjustment component and a positioning groove provided on the adjustment plate; The inner end of the adjusting member is placed in the positioning groove, and the adjusting member is positioned in the positioning groove to prevent the adjusting plate from tilting.

5. The calibration fixture according to claim 4, characterized in that: The adjusting mechanism includes a coarse adjustment screw and a fine adjustment screw; The coarse adjustment screw is used for quick adjustment of the calibration plate relative to the reference plate; The fine-tuning screw is used to adjust the accuracy of the calibration plate relative to the reference plate.

6. The calibration fixture according to claim 5, characterized in that: The coarse adjustment screw and the fine adjustment screw are coaxially arranged; The coarse adjustment screw is fitted outside the fine adjustment screw, or the fine adjustment screw is fitted outside the coarse adjustment screw.

7. The calibration fixture according to claim 6, characterized in that: The fine-tuning screw located on the inner side or the coarse-tuning screw located on the inner side has a chamfered end near the adjusting plate; The chamfer is placed within the positioning groove to prevent the adjustment plate from tilting.

8. The calibration fixture according to claim 5, characterized in that: The calibration fixture also includes a base plate; The base plate is mounted on the carrier plate, and the coarse adjustment screw rod located on the outer side or the fine adjustment screw rod located on the outer side is rotatably mounted on the base plate, and the adjustment plate is mounted on the base plate.

9. The calibration fixture according to claim 3, characterized in that: The calibration fixture also includes a frame-shaped cover plate; The cover plate is placed over the calibration plate, and the cover plate prevents the calibration plate from detaching from the adjustment plate.

10. A probe station calibration method, employing a calibration fixture as described in any one of claims 1-9, characterized in that... Includes the following steps: S1: Position the calibration fixture with the target point facing down, and then place the calibration fixture on the probe stage for installation and positioning. This completes the installation of the calibration fixture and the probe stage. At this time, the reference plate of the calibration fixture is parallel to the probe stage, and the target point on the calibration fixture corresponds to the detection sensor on the probe card test equipment. S2: The detection sensor scans the target points on the calibration fixture, scanning three target points at arbitrary positions, and the three target points are not located on the same straight line; S3: The processing module on the probe card testing equipment measures and compares the height of the three target points; S4: When the height difference of the three target points obtained by the processing module is inconsistent or the measured height deviates from the actual height of the probe station, the processing module will drive the calibration piece on the probe station to make adjustments. S5: Continue repeating steps S2-S4 until the height difference obtained by the processing module is consistent and the height is adjusted to the actual height of the probe station. Then, the sensor detection stops and the probe station completes calibration. S6: Remove the calibration fixture from the probe station.

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