A high precision adjustable slit for a vacuum environment

Abstract

The application provides a high-precision adjustable slit for a vacuum environment, which is used to solve the technical problems that most of the existing optical slits cannot be applied to the vacuum environment due to structural limitations, or the existing optical slits that can be applied to the vacuum environment cannot realize high-vacuum sealing, reliable vacuum degree requirements and low adjustment precision. The high-precision adjustable slit for the vacuum environment is formed by a left slit piece and a right slit piece, and the opening and closing of the slit are realized by the design of a steel ball, a transmission tab, a transmission shaft, a transmission block, a spring, an adjusting mechanism and a transmission rod. Meanwhile, the bottom adjusting end of the adjusting part is abutted or fixed to the top end of the transmission rod, the bottom of the transmission rod passes through the main body and is abutted to the steel ball, and a highly airtight chamber structure is formed by the design of the telescopic bellows, which provides a basis for realizing high vacuum and ultrahigh vacuum, so that the slit can be easily connected to the vacuum system and external high-precision adjustment can be realized.

Description

Technical Field

[0001] This invention relates to optical slits, and more particularly to a high-precision adjustable slit for use in vacuum environments. Background Technology

[0002] Optical slits are commonly used components in optical experiments and instruments. Their core function is to restrict and control the spatial distribution of light. By filtering incident light through the narrow opening of the optical slit (typically on the order of micrometers to millimeters), only light from specific areas is allowed to pass through, thereby controlling the spatial size of the beam, reducing stray light interference, and improving the stability of the optical path. When a point light source or an extended light source illuminates the optical slit, the outgoing light can be approximated as a "line light source," with its length direction unrestricted and its width extremely narrow, providing a suitable incident light source shape for subsequent optical systems such as gratings and prisms for beam splitting.

[0003] In optical systems such as synchrotron radiation facilities, space optical simulation experiments, and attosecond large-scale scientific facilities for spectral measurements, the high airtightness design requires ensuring no gas exchange between the inside and outside of the vacuum cavity during adjustment to avoid a decrease in vacuum level. This is especially important for ultra-high vacuum systems, where the vacuum level needs to be maintained at 10. -7 Below Pa, even a tiny leak or venting can lead to experimental failure. Optical slits are used in ultraviolet and X-ray spectroscopy measurements. By adjusting the width of the optical slit, the spectral resolution can be optimized. For example, in a vacuum ultraviolet spectrometer, the slit width is adjusted from 10 μm to 100 μm to balance resolution and light intensity. In optical testing that simulates the vacuum environment of space, they are used to simulate the beam shape control of celestial light sources. Placed at the object point of the grating, the spectral resolution can be adjusted by changing the width of the optical slit. However, in all of the above applications, the optical slit must be kept under vacuum to avoid air absorption.

[0004] Currently, most existing optical slits cannot be used in vacuum environments due to structural limitations. Chinese patent CN111276386A discloses an adjustable slit device for debugging a time-of-flight mass analyzer. This optical slit can be used in a vacuum environment, but it has the following two problems: First, the seal is achieved by a cup-shaped sealing ring, which is a vacuum dynamic seal and cannot achieve a reliable high-vacuum seal; second, the fine-tuning mechanism cannot be adjusted under vacuum conditions, resulting in low adjustment accuracy. Summary of the Invention

[0005] The purpose of this invention is to solve the technical problems that most existing optical slits cannot be applied to vacuum environments due to structural limitations, or that existing optical slits that can be applied to vacuum environments cannot achieve reliable high vacuum sealing and have low adjustment accuracy under vacuum conditions, and to provide a high-precision adjustable slit for vacuum environments.

[0006] To achieve the above objectives, the technical solution provided by the present invention is as follows:

[0007] A high-precision adjustable slit for use in vacuum environments is characterized by comprising a slit body, an adjustment mechanism, and a transmission rod; the slit body includes a main body, a fixed plate, a right slit structure, a steel ball, a transmission paddle, a transmission shaft, a transmission block, a left slit plate, a spring, a cover, and an adjustment cylinder connected directly above the main body;

[0008] The main body is a hollow cylindrical structure. A fixing plate is connected to the inner wall of one end of the main body, and a cover is fitted onto the other end of the main body and detachably connected to the fixing plate. The fixing plate and the cover are respectively provided with light-transmitting holes at their center positions. The inner side of the fixing plate is provided with a first limiting block located to the left of the light-transmitting hole, and a second limiting block and a third limiting block that are respectively vertically connected to the upper and lower ends of the first limiting block to the right. The inner walls of the first limiting block, the second limiting block and the third limiting block are all flat, and the outer walls are all connected to the inner wall of the main body. The right end face of the second limiting block is flat and is used to form a limiting surface.

[0009] The right slit structure includes a guide block and a right slit plate connected to the lower end of the guide block; the upper part of the left side surface of the guide block is a sloped surface that tilts to the upper right, and a V-shaped groove is formed on the sloped surface; the lower part of the left side surface is used to abut against the limiting surface; the steel ball is located between the limiting surface and the V-shaped groove; at least one first guide post is provided on the side of the guide block facing the fixed plate, and a transversely extending strip-shaped limiting groove is formed on the fixed plate corresponding to the position of the first guide post, and the first guide post is slidably disposed in the strip-shaped limiting groove; a second guide post extending away from the fixed plate is provided on the right side of the guide block;

[0010] At least two limiting posts are provided on the inner side of the fixed plate below the light-transmitting hole; the transmission block is located between the upper end face of the third limiting block and the lower end face of the at least two limiting posts, and is clearance-fitted with both of them; the transmission paddle is a strip structure with strip holes extending along its length at both ends; a third guide post is provided at one end of the transmission block, and the second and third guide posts are slidably disposed in the two strip holes respectively; the transmission shaft passes through the transmission paddle and is fixed on the fixed plate.

[0011] The left slit plate is fixed to the other end of the transmission block, and the right end face of the left slit plate and the left end face of the right slit plate are used to form a slit; one end of the spring is embedded in the countersunk hole on the left end face of the transmission block, and the other end abuts against the inner side wall of the first limiting block.

[0012] The adjusting cylinder is a hollow structure with a closed top. The adjusting mechanism includes an adjusting component and a telescopic bellows. The main body of the adjusting component is fixed on the adjusting cylinder, and its bottom adjusting end abuts or is fixed to the top of the transmission rod. The bottom of the transmission rod passes through the main body and abuts against the steel ball. The telescopic bellows is sleeved on the upper part of the transmission rod, and one end is vacuum welded to the top outer circle of the transmission rod, and the other end is vacuum welded to the bottom inner circle of the adjusting cylinder.

[0013] Furthermore, the second guide post and the third guide post are equidistant from the drive shaft when the slit is closed.

[0014] Furthermore, the angle between the inclined plane and the horizontal direction is 45°.

[0015] Furthermore, the two end faces of the main body are respectively configured as CF knife-edge flange structure, ISO-K structure, ISO-F structure or KF structure.

[0016] Furthermore, the two end faces of the main body are respectively set as CF knife-edge flange structures; when the CF knife-edge flange structure is connected to the external vacuum system, copper gaskets are used for sealing.

[0017] Furthermore, the adjustment mechanism also includes a clamping cover installed at the top of the adjustment cylinder;

[0018] The adjusting element is a micrometer;

[0019] The main body of the micrometer is fixed on the clamping cover, and the bottom of the micrometer's moving rod abuts or is fixed to the top of the transmission rod.

[0020] Furthermore, the number of the first guide posts is two;

[0021] The number of the strip-shaped limiting grooves is two;

[0022] The number of limiting posts is two.

[0023] Furthermore, the fixing plate, adjusting cylinder, and main body are integrated into one structure.

[0024] Furthermore, a drive shaft through hole is provided in the middle of the drive paddle, and a drive shaft fixing hole is provided on the fixing plate at the position corresponding to the drive shaft through hole;

[0025] The drive shaft passes through the drive shaft through hole of the drive lever and is fixedly connected to the drive shaft fixing hole.

[0026] Furthermore, it also includes three first screws and one second screw;

[0027] The cover has four countersunk screw holes, one of which corresponds to the drive shaft; the fixing plate has threaded blind holes at the positions corresponding to the other three countersunk screw holes; the end of the drive shaft facing the cover has an internal thread.

[0028] One end of each of the three first screws passes through a countersunk hole and is threaded into a corresponding blind hole; one end of the second screw passes through a corresponding countersunk hole and is threaded into the internal thread at the end of the drive shaft.

[0029] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0030] 1. This invention provides a high-precision adjustable slit for vacuum environments. The slit is formed by a left and right slit plate, and the opening and closing of the slit is achieved through the design of a steel ball, a transmission paddle, a transmission shaft, a transmission block, a spring, an adjustment mechanism, and a transmission rod. Simultaneously, the main body of the adjustment component is fixed to an adjustment cylinder, with its bottom adjustment end abutting or fixed to the top of the transmission rod. The bottom of the transmission rod passes through the main body and abuts against the steel ball. Combined with the design of a telescopic bellows, a highly airtight chamber structure is formed, providing a foundation for achieving high vacuum and ultra-high vacuum. This allows the slit to be easily connected to a vacuum system and enables high-precision external adjustment. The structure and process are simple and reliable, with high adjustment accuracy.

[0031] 2. The present invention provides a high-precision adjustable slit for use in a vacuum environment. The distances from the second guide post and the third guide post to the drive shaft are equal, which can ensure that the left slit plate and the right slit plate move in opposite directions at the same speed, thus ensuring the opening and closing accuracy of the slit.

[0032] 3. The present invention provides a high-precision adjustable slit for use in a vacuum environment, wherein the V-groove has an angle of 45° with the horizontal direction, which facilitates the conversion of the driving force of the steel ball moving downward into the driving force of the guide block moving horizontally to the right.

[0033] 4. This invention provides a high-precision adjustable slit for use in a vacuum environment. The front and rear ends of the main body are respectively configured with CF knife-edge flange structures for connection to a vacuum system to ensure 10 -8 Pa ultra-high vacuum operation. Attached Figure Description

[0034] Figure 1 This is a schematic diagram of a high-precision adjustable slit embodiment for use in a vacuum environment according to the present invention (the cover is not shown).

[0035] Figure 2 This is a structural schematic diagram of one side of the fixing plate in an embodiment of the present invention;

[0036] Figure 3 This is a schematic diagram of the structure of one side of the cap in an embodiment of the present invention;

[0037] Figure 4 This is a schematic diagram of the structure of the main body and the fixing plate in an embodiment of the present invention;

[0038] Figure 5 This is a schematic diagram of the right slit structure from one perspective in an embodiment of the present invention;

[0039] Figure 6 This is a schematic diagram of the right slit structure from another perspective in an embodiment of the present invention;

[0040] Figure 7 This is a longitudinal sectional view of an embodiment of the present invention.

[0041] The specific attached figures are labeled as follows:

[0042] 0-Transmission rod; 1-Main body; 2-Fixing plate; 21-Light-transmitting hole; 22-Limiting post; 23-First limiting block; 24-Second limiting block; 25-Third limiting block; 26-Limiting surface; 27-Strip-shaped limiting groove; 28-Transmission shaft fixing hole; 3-Right slit structure; 31-Guide block; 311-First guide post; 312-Second guide post; 32-Right slit plate; 4-Steel ball; 5-Transmission paddle; 51-Strip-shaped hole; 52-Transmission shaft through hole; 6-Transmission shaft; 7-Transmission block; 71-Third guide post; 8-Left slit plate; 9-Spring; 10-Adjusting cylinder; 11-Adjusting component; 12-Telescopic bellows; 13-Clamping cover; 14-Sealing cover; 141-Screw countersunk hole. Detailed Implementation

[0043] To make the advantages and features of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0044] like Figure 1 As shown, a high-precision adjustable slit for use in a vacuum environment includes a slit body and an adjustment mechanism. The slit body is set in a vacuum environment and includes a hollow cylindrical body 1, a fixing plate 2 disposed within the body 1, a right slit structure 3, a steel ball 4, a transmission paddle 5, a transmission shaft 6, a transmission block 7, a left slit plate 8, a spring 9, a cover 14, and an adjustment cylinder 10 integrally connected to the upper side wall of the body 1.

[0045] like Figures 2-4As shown, the fixing plate 2 is integrally circumferentially connected to the inner wall of one end of the main body 1, and a light-transmitting hole 21 is provided at its center. The cover 14 is used to cover the other end of the main body 1 and is detachably connected to the fixing plate 2. The cover 14 also has a light-transmitting hole 21 at its center. A limiting plate is provided on the inner side of the fixing plate 2. The limiting plate includes a first limiting block 23 located to the left of the light-transmitting hole 21, a second limiting block 24 vertically connected to the upper end of the first limiting block 23 to the right, and a third limiting block 25 vertically connected to the lower end of the first limiting block 23 to the right. The semi-enclosed structure formed by the outer walls of the first limiting block 23, the second limiting block 24, and the third limiting block 25 is adapted to the inner wall of the corresponding position of the main body 1 and is connected to the inner wall of the corresponding position of the main body 1. The inner walls of the first limiting block 23, the second limiting block 24, and the third limiting block 25 are all flat. The right end face of the second limiting block 24 is flat and is used to form a limiting surface 26.

[0046] like Figure 5 , Figure 6 As shown, the right slit structure 3 includes a guide block 31 and a right slit piece 32 connected to the lower end of the guide block 31. The upper part of the left side surface of the guide block 31 is an inclined surface tilted to the upper right, and a V-shaped groove is formed on the inclined surface. The lower part of the left side surface is used to abut against the limiting surface 26. Preferably, in this embodiment, the angle between the inclined surface and the horizontal direction is 45°. The steel ball 4 is disposed between the limiting surface 26 and the V-shaped groove of the inclined surface, and its two-point contact with the V-shaped groove is used to move the steel ball 4 up and down along the limiting surface 26. The limiting surface 26 cooperates with the V-shaped groove of the inclined surface to limit the displacement of the steel ball 4 in the left and right directions. At the same time, the V-shaped groove of the inclined surface is also used to limit the displacement of the steel ball 4 in the front and back directions. The right slit structure 3 converts the driving force of the steel ball 4 moving downward into the driving force of the guide block 31 moving horizontally to the right, and at the same time provides a rotational driving force for the transmission paddle 5.

[0047] Two first guide posts 311, arranged vertically side-by-side, are provided on the side of the guide block 31 facing the fixed plate 2. The fixed plate 2 has horizontally extending strip-shaped limiting grooves 27 corresponding to the positions of the two first guide posts 311. The two first guide posts 311 are slidably disposed within their respective strip-shaped limiting grooves 27, serving to guide and limit the guide block 31 as it moves to the right under the pressure of the steel ball 4, thus achieving horizontal rightward movement. For ease of manufacturing, the first guide posts 311 in this embodiment are cylindrical. In other embodiments of the invention, if the first guide posts 311 are designed as strip-shaped guide posts, then one guide post is sufficient to achieve the guiding and limiting function of the guide block 31.

[0048] Two limiting posts 22 are provided on the inner side of the fixed plate 2, below the light-transmitting hole 21; the transmission block 7 is located between the upper end face of the third limiting block 25 and the lower end face of the two limiting posts 22, and is clearance-fitted with both, so that the transmission block 7 can achieve horizontal displacement in the left and right directions between the third limiting block 25 and the limiting posts 22.

[0049] The transmission paddle 5 has a strip-shaped structure with strip-shaped holes 51 extending along its length at both ends, and a transmission shaft through hole 52 in its middle. A transmission shaft fixing hole 28 is provided on the fixing plate 2 corresponding to the position of the transmission shaft through hole 52. The transmission shaft fixing hole 28 is a threaded hole, with an external thread at one end of the transmission shaft 6. The threaded end of the transmission shaft 6 passes through the transmission shaft through hole 52 of the transmission paddle 5 and is threadedly connected to the transmission shaft fixing hole 28, fixing the center of the transmission paddle 5 to the fixing plate 2 via the transmission shaft 6, allowing the transmission paddle 5 to rotate around the transmission shaft 6. A second guide post 312 extending away from the fixing plate 2 is provided on the right side of the guide block 31, and a third guide post 71 is provided at one end of the transmission block 7. The second guide post 312 and the third guide post 71 are slidably disposed within the two strip-shaped holes 51, and the distances from the second guide post 312 and the third guide post 71 to the transmission shaft 6 are equal when the slits are closed, so that the left slit plate 8 and the right slit plate 32 move in opposite directions at the same speed.

[0050] The left slit plate 8 is fixed to the other end of the transmission block 7, and its right end face is used to form a slit with the left end face of the right slit plate 32. One end of the spring 9 is embedded in the countersunk hole on the left end face of the transmission block 7, and the other end abuts against the inner side wall of the first limiting block 23. Its rightward elastic force not only provides the driving force for closing the slit, but also plays a role in gap and compensation during the processing, thereby meeting the requirements of reliable high-precision optical adjustment.

[0051] In order to connect and fix the cover 14 to the fixing plate 2, this embodiment also provides three first screws and one second screw; the cover 14 has four screw countersunk holes 141, one of which is corresponding to the drive shaft 6; the fixing plate 2 has threaded blind holes at the positions corresponding to the other three screw countersunk holes 141; the end of the drive shaft 6 facing the cover 14 has an internal thread; one end of each of the three first screws passes through the three screw countersunk holes 141 and is threaded into the corresponding threaded blind hole, and one end of the second screw passes through the corresponding screw countersunk hole 141 and is threaded into the internal thread at the end of the drive shaft 6.

[0052] like Figure 7As shown, the adjustment mechanism is located outside the vacuum environment and includes an adjustment component 11, a telescopic bellows 12, and a clamping cover 13. The adjustment mechanism can be a manual adjustment mechanism or an electric adjustment mechanism. In this embodiment, it is a manual adjustment mechanism. The adjustment component 11 is preferably a micrometer. The adjustment accuracy of the micrometer screw is such that its adjustment accuracy is 1μm. When the micrometer rotates one division, the slit opening (closing) amount is 10μm. In other embodiments of the present invention, the adjustment component 11 can also be other existing types of adjustment components.

[0053] The adjusting cylinder 10 has a hollow annular structure. The clamping cover 13 is fixedly installed on the top of the adjusting cylinder 10 with screws, making the adjusting cylinder 10 a hollow annular structure with a closed top. The main body of the micrometer is fixed on the clamping cover 13. The transmission rod 0 has a T-shaped structure. The bottom of the micrometer's moving rod is fixedly connected to the top of the transmission rod 0. The bottom of the transmission rod 0 passes through the main body 1 and abuts against the steel ball 4. Rotating the micrometer's screw will cause the moving rod at the bottom of the screw to extend and retract axially, thereby causing the transmission rod 0 to move down or up. The downward or upward movement of the transmission rod 0 will then cause the steel ball 4 to move down or up, thereby causing the guide block 31 to move horizontally to the right or left. In other embodiments of the present invention, the bottom of the micrometer's moving rod may also abut against the top of the transmission rod 0, which is not limited here.

[0054] The telescopic bellows 12 is fitted on the upper part of the transmission rod 0. One end of the bellows is vacuum welded to the top outer circle of the transmission rod 0, and the other end is vacuum welded to the bottom inner circle of the regulating cylinder 10, forming a highly airtight chamber structure, which provides a basis for achieving high vacuum and ultra-high vacuum.

[0055] The two end faces of the main body 1 are respectively set as CF knife-edge flange structures for connection in the vacuum system to ensure 10 - 8 The ultra-high vacuum operation allows for convenient, quick, and high-precision control of the opening and closing of the internal right slit 32 and left slit 8 via an external adjustment mechanism using a micrometer. When the CF knife-edge flange structure at both ends of the main body 1 is connected to the external vacuum system, copper gaskets are used for further sealing; no other mounting-type sealing components are used. In other embodiments of the invention, the end faces of the main body 1 can also be configured as ISO-K, ISO-F, or KF structures; this invention does not impose any limitations on these configurations.

[0056] The working principle of this invention for a high-precision adjustable slit in a vacuum environment is as follows:

[0057] (1) Horizontal rightward movement of the right slit plate 32: Rotate the screw of the micrometer clockwise, and the moving rod at the bottom of the screw extends downward, so that the transmission rod 0 moves downward at the same speed. Since the bottom of the transmission rod 0 is in point contact with the steel ball 4, it will give the steel ball 4 a downward driving force. The steel ball 4 is constrained by the limiting surface 26 and the V-shaped groove of the inclined surface, and can only move downward in the vertical direction. When the steel ball 4 moves downward, it gives the guide block 31 a downward driving force. The guide block 31 is constrained by the first guide post 311 in the strip limiting groove 27, so that the guide block 31 drives the lower end of the right slit plate 32 to move horizontally to the right, and the speed and displacement are the same as those of the steel ball 4, thus realizing the horizontal rightward movement of the right slit plate 32.

[0058] (2) The left slit plate 8 moves horizontally to the left at the same speed: When the right slit plate 32 moves to the right, the transmission pawl 5 rotates clockwise. Since the transmission block 7 is limited between the upper end face of the third limit block 25 and the lower end face of the two limit posts 22, the transmission block 7 can only be driven to move horizontally to the left, thereby driving the left slit plate 8 to move to the left at the same speed.

[0059] The above two steps together open the slit. When the slit closes, rotate the micrometer screw counterclockwise so that the moving rod at the bottom of the screw moves away from the top of the transmission rod 0. At this time, the spring 9 will push the left slit plate 8 to the right, thereby providing a rightward thrust to the transmission block 7, so that the transmission paddle 5, the right slit plate 32, the steel ball 4 and the transmission rod 0 return to their original positions, thus closing the slit.

[0060] The above description is only used to illustrate the technical solutions of the present invention, and is not intended to limit them. For those skilled in the art, modifications can be made to the specific technical solutions described in the above embodiments, or equivalent substitutions can be made to some of the technical features. However, these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions protected by the present invention.

Claims

1. A high-precision adjustable slit for use in a vacuum environment, characterized in that: It includes a slit body, an adjustment mechanism and a transmission rod (0); the slit body includes a main body (1), a fixing plate (2), a right slit structure (3), a steel ball (4), a transmission paddle (5), a transmission shaft (6), a transmission block (7), a left slit plate (8), a spring (9), a cover (14) and an adjustment cylinder (10) connected to the top of the main body (1); The main body (1) is a hollow cylindrical structure. The fixing plate (2) is circumferentially connected to the inner wall of one end of the main body (1). The cover (14) is closed on the other end of the main body (1) and is detachably connected to the fixing plate (2). The fixing plate (2) and the cover (14) are respectively provided with light-transmitting holes (21) at their center positions. The inner side of the fixing plate (2) is provided with a first limiting block (23) located to the left of the light-transmitting hole (21) and a second limiting block (24) and a third limiting block (25) respectively connected vertically to the upper and lower ends of the first limiting block (23) to the right. The inner walls of the first limiting block (23), the second limiting block (24) and the third limiting block (25) are all flat, and the outer walls are all connected to the inner wall of the main body (1). The right end face of the second limiting block (24) forms a limiting surface (26). The right slit structure (3) includes a guide block (31) and a right slit piece (32) connected to the lower end of the guide block (31); the upper part of the left side surface of the guide block (31) is a slope inclined to the upper right, and a V-shaped groove is provided on the slope surface; the lower part of the left side surface is used to abut against the limiting surface (26); the steel ball (4) is located between the limiting surface (26) and the V-shaped groove; the guide block (31) is provided with at least one first guide post (311) on the side facing the fixing plate (2), and a horizontally extending strip-shaped limiting groove (27) is provided on the fixing plate (2) corresponding to the position of the first guide post (311), and the first guide post (311) is slidably disposed in the strip-shaped limiting groove (27); the right side of the guide block (31) is provided with a second guide post (312) extending away from the fixing plate (2); At least two limiting posts (22) are provided on the inner side of the fixed plate (2) below the light-transmitting hole (21); the transmission block (7) is located between the third limiting block (25) and the at least two limiting posts (22), and is clearance-fitted with both of them; the transmission paddle (5) is a strip structure, and its two ends are respectively provided with strip holes (51) extending along its length direction; one end of the transmission block (7) is provided with a third guide post (71), the second guide post (312) and the third guide post (71) are respectively slidably arranged in the two strip holes (51), and the transmission shaft (6) passes through the transmission paddle (5) and is fixed on the fixed plate (2); The left slit plate (8) is fixed to the other end of the transmission block (7), and its right end face is used to form a slit with the left end face of the right slit plate (32); one end of the spring (9) is embedded in the countersunk hole on the left end face of the transmission block (7), and the other end abuts against the inner wall of the first limiting block (23). The regulating cylinder (10) is a hollow structure with a closed top. The regulating mechanism includes an regulating component (11) and a telescopic bellows (12). The main body of the regulating component (11) is fixed on the regulating cylinder (10), and its bottom regulating end is abutted or fixed to the top of the transmission rod (0). The bottom of the transmission rod (0) passes through the main body (1) and abuts against the steel ball (4). The telescopic bellows (12) is sleeved on the upper part of the transmission rod (0), and one end is vacuum welded to the top outer circle of the transmission rod (0), and the other end is vacuum welded to the bottom inner circle of the regulating cylinder (10).

2. The high-precision adjustable slit for vacuum environments according to claim 1, characterized in that: The second guide post (312) and the third guide post (71) are equidistant from the drive shaft (6) when the slit is closed.

3. The high-precision adjustable slit for vacuum environments according to claim 2, characterized in that: The angle between the inclined plane and the horizontal direction is 45°.

4. A high-precision adjustable slit for a vacuum environment according to any one of claims 1-3, characterized in that: The two end faces of the main body (1) are respectively set as CF knife-edge flange structure, ISO-K structure, ISO-F structure or KF structure.

5. The high-precision adjustable slit for vacuum environments according to claim 4, characterized in that: The two end faces of the main body (1) are respectively set as CF knife-edge flange structures; when the CF knife-edge flange structure is connected to the external vacuum system, copper gaskets are used for sealing.

6. The high-precision adjustable slit for vacuum environments according to claim 1, characterized in that: The adjustment mechanism also includes a clamping cover (13) installed at the top of the adjustment cylinder (10); The adjusting element (11) is a micrometer; The main body of the micrometer is fixed on the clamping cover (13), and the bottom of the micrometer's moving rod is abutted or fixed to the top of the transmission rod (0).

7. The high-precision adjustable slit for vacuum environments according to claim 1, characterized in that: The number of the first guide posts (311) is two; The number of the strip-shaped limiting grooves (27) is two; The number of the limiting posts (22) is two.

8. The high-precision adjustable slit for vacuum environments according to claim 7, characterized in that: The fixing plate (2), the adjusting cylinder (10) and the main body (1) are an integrated structure.

9. A high-precision adjustable slit for a vacuum environment according to claim 8, characterized in that: The transmission paddle (5) has a transmission shaft through hole (52) in the middle, and the fixed plate (2) has a transmission shaft fixing hole (28) at the position corresponding to the transmission shaft through hole (52). The drive shaft (6) passes through the drive shaft through hole (52) of the drive lever (5) and is fixedly connected to the drive shaft fixing hole (28).

10. A high-precision adjustable slit for a vacuum environment according to claim 1, characterized in that: It also includes three first screws and one second screw; The cover (14) has four countersunk screw holes (141), one of which is set in relation to the drive shaft (6); the fixing plate (2) has threaded blind holes at the positions corresponding to the other three countersunk screw holes (141); the end of the drive shaft (6) facing the cover (14) has an internal thread. One end of each of the three first screws passes through the three countersunk holes (141) and is threaded into the corresponding blind holes; one end of the second screw passes through the corresponding countersunk hole (141) and is threaded into the internal thread at the end of the drive shaft (6).

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