Bearing device and photoetching machine
By setting a limit mechanism and alignment parts on the carrier, the problem of substrate position deviation in display substrate manufacturing is solved, and accurate positioning and efficient production of workpieces are achieved.
Patent Information
- Application Number
- CN202410309318.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-03-18
- Publication Date
- 2025-09-19
AI Technical Summary
During the display substrate manufacturing process, substrate position deviation leads to low production efficiency and requires manual position adjustment.
A carrying device is used, including a carrier, a limiting mechanism and a positioning piece. The limiting mechanism abuts against the edge of the target workpiece, and the positioning piece further positions it during the carrier adsorption process to ensure that the workpiece is accurately positioned in the target area.
The accuracy and repeatability of workpiece position are achieved, manual adjustment is avoided, and production efficiency is improved.
Smart Images
Figure CN120669480A_ABST
Abstract
Description
Technical Field
[0001] The present application relates to the technical field of display substrate manufacturing, and in particular to a carrier device and a photolithography machine. Background Art
[0002] When manufacturing a display substrate, the substrate may be offset, and the position of the substrate needs to be manually adjusted, which seriously affects production efficiency.
[0003] Therefore, a solution is urgently needed to solve the above technical problems. Summary of the Invention
[0004] In view of this, the main technical problem to be solved by this application is to provide a carrying device and a photolithography machine, which can improve the technical problem that the position deviation of the substrate affects the production efficiency of the display panel.
[0005] In order to solve the above technical problems, a technical solution adopted in this application is: to provide a carrying device, including a carrier, a limiting mechanism and a positioning member, the carrying surface of the carrier includes a target area, and the target area is used to place the target workpiece; the limiting mechanism is arranged on the periphery of the target area and is used to abut the edge of the target workpiece; the positioning member is arranged on the periphery of the target area and is relative to the limiting mechanism, and is used to abut the edge of the target workpiece during the process of the carrier adsorbing the target workpiece.
[0006] The limiting mechanism includes a plurality of limiting members, and the plurality of limiting members are arranged at intervals on the periphery of the target area.
[0007] Wherein, the number of the limiting members is at least three.
[0008] Wherein, the limiting member is a column structure;
[0009] Wherein, the material of the limiting member includes wear-resistant material;
[0010] The material of the limiting component includes at least one of polyetheretherketone, polyimide, and polyamideimide.
[0011] Wherein, a limiting groove is provided on the side of the limiting member, and the limiting groove abuts against the edge of the target workpiece.
[0012] The limiting component is detachably connected to the carrier.
[0013] Among them, the carrier is a circular carrier.
[0014] The edge of the target workpiece is arranged at the notch, and the alignment member abuts against the notch of the target workpiece when the carrier absorbs the target workpiece.
[0015] The alignment member includes a cylinder, and when the carrier absorbs the target workpiece, the output shaft of the cylinder abuts against the edge of the target workpiece.
[0016] The present application also includes a second technical solution, which provides a lithography machine including any of the above-mentioned carrying devices.
[0017] The beneficial effects of the present application are as follows: Different from the prior art, the present application provides a carrying device, including a carrier, a limiting mechanism and a positioning member, the carrying surface of the carrier includes a target area, the target area is used to place the target workpiece; the limiting mechanism is arranged on the periphery of the target area and is used to abut against the edge of the target workpiece; the positioning member is arranged on the periphery of the target area and is opposite to the limiting mechanism, and is used to abut against the edge of the target workpiece during the process of the carrier adsorbing the target workpiece. The present application sets a limiting mechanism and a positioning member on the periphery of the target area of the carrier, so that during the process of the carrier adsorbing the target workpiece, the limiting mechanism and the positioning member abut against the target workpiece, thereby confining the target workpiece to the target area, ensuring that the position of the target workpiece is consistent each time, ensuring the accuracy of the placement position of the target workpiece, thereby eliminating the need to manually adjust the position of the target workpiece and improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present application. Those skilled in the art can also derive other drawings based on these drawings without inventive work, among which:
[0019] Figure 1 This is a structural diagram of an embodiment of the carrier device of the present application;
[0020] Figure 2 yes Figure 1 A partial cross-sectional schematic diagram of the carrying device;
[0021] Figure 3 yes Figure 1 Schematic diagram of the cross-sectional structure of the middle limiter. DETAILED DESCRIPTION
[0022] The following will be combined with the accompanying drawings in the embodiments of the present application to clearly and completely describe the technical solutions in the embodiments of the present application. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0023] like Figure 1 and Figure 2An embodiment of the present application provides a carrying device 100, which includes a carrier 110, a limiting mechanism 120 and a positioning member 130. The carrying surface 111 of the carrier 110 includes a target area 1111, which is used to place a target workpiece 200; the limiting mechanism 120 is arranged on the periphery of the target area 1111 and is used to abut against the edge of the target workpiece 200; the positioning member 130 is arranged on the periphery of the target area 1111 and is opposite to the limiting mechanism 120, and is used to abut against the edge of the target workpiece 200 during the process of the carrier 110 adsorbing the target workpiece 200.
[0024] Specifically, the target workpiece 200 can be a display substrate, a wafer, or other workpieces, which are not limited here. The carrier 110 is used to support the target workpiece 200 so that the target workpiece 200 can be processed in subsequent process steps. The material of the carrier 110 can be glass or metal, which is not limited here. In this embodiment, the carrier 110 fixes the target workpiece 200 by adsorption, that is, the carrier 110 performs a vacuum suction treatment on the target workpiece 200, thereby fixing the target workpiece 200 on the carrier 110. In one application scenario, a vacuum hole is provided on the carrying surface 111 of the carrier 110. When the target workpiece 200 needs to be fixed, a vacuum device connected to the vacuum hole performs a vacuum treatment, thereby adsorbing the target workpiece 200 on the carrier 110. In another embodiment, a vacuum nozzle is provided on the carrying surface 111 of the carrier 110 to fix the target workpiece 200 through the vacuum nozzle.
[0025] The limiting mechanism 120 abuts against the edge of the target workpiece 200 to limit the position of the target workpiece 200, and the positioning member 130 is arranged opposite to the limiting mechanism 120. During the process of the carrier 110 adsorbing the target workpiece 200, the positioning member 130 and the limiting mechanism 120 both abut against the target workpiece 200, thereby limiting the target workpiece 200 within the target area 1111, ensuring that the target workpiece 200 is in the correct position.
[0026] As can be seen from the above content, the present application sets a limiting mechanism 120 and an alignment member 130 on the periphery of the target area 1111 of the carrier 110, so that in the process of the carrier 110 adsorbing the target workpiece 200, the limiting mechanism 120 and the alignment member 130 are in contact with the target workpiece 200, thereby confining the target workpiece 200 to the target area 1111, ensuring that the position of the target workpiece 200 is consistent each time, ensuring the accuracy of the placement position of the target workpiece 200, and thus eliminating the need to manually adjust the position of the target workpiece 200, thereby improving production efficiency.
[0027] In one embodiment of the present application, continue to refer to Figure 1The limiting mechanism 120 includes a plurality of limiting members 121, which are spaced apart and arranged around the periphery of the target area 1111. Specifically, the plurality of limiting members 121 can ensure the accuracy of limiting the target workpiece 200. Of course, in other embodiments, the number of limiting members 121 can also be one.
[0028] In one application scenario, in order to ensure that the target workpiece 200 is subjected to uniform force, the plurality of limit members 121 are arranged at equal intervals. Of course, the interval between two adjacent limit members 121 can also be adjusted according to actual needs.
[0029] In one embodiment, there are three position limiters 121. Based on the principle that any three non-collinear points can define a unique plane, only three position limiters 121 are needed to determine the position of the target workpiece 200, so that the target workpiece 200 does not shift within the target area 1111. Therefore, setting the number of position limiters 121 to at least three can better define the position of the target workpiece 200 and prevent the target workpiece 200 from shifting on the carrier 110.
[0030] The number of the limiting members 121 may be three, four, five or six, and this application does not impose any specific limitation on the number of the limiting members 121 .
[0031] In one embodiment, the stopper 121 is a cylindrical structure. The cylindrical structure can be a cylinder, a prism, or an irregular cylinder, and the prism can also be a triangular prism or a quadrangular prism. The present application does not impose any restrictions on the structure of the stopper 121, as long as it can abut the edge of the target workpiece 200.
[0032] In one embodiment, the material of the limiter 121 includes a wear-resistant material. When the target workpiece 200 abuts against the limiter 121, it will apply a certain pressure to the limiter 121, so that the limiter 121 will be subject to a certain amount of wear. Therefore, using a wear-resistant material to prepare the limiter 121 can extend the life of the limiter 121. In one application scenario, the material of the limiter 121 includes at least one of polyetheretherketone, polyimide, and polyamideimide, that is, the material of the limiter 121 includes one or more of polyetheretherketone, polyimide, and polyamideimide. It should be noted that this application does not limit the material of the limiter 121, and the material of the limiter 121 can be selected according to actual needs. For example, in other embodiments, the material of the limiter 121 includes at least one of metal and glass.
[0033] In one embodiment, the material of the limiting member 121 is a flexible material to prevent the limiting member 121 from damaging the target workpiece 200 when abutting against the target workpiece 200. In one application scenario, the material of the limiting member 121 includes at least one of silicone and rubber.
[0034] In one embodiment of the present application, Figure 3 The side of the limiting member 121 is provided with a limiting groove 1211, which abuts against the edge of the target workpiece 200. The limiting groove 1211 can clamp the edge of the target workpiece 200, so that the target workpiece 200 does not move up and down when abutting against the limiting member 121, thereby enhancing the limiting function of the limiting member 121 and improving the accuracy of the position of the target workpiece 200.
[0035] In other embodiments, the surface of the limiting member 121 may also be a smooth surface, that is, the limiting groove 1211 is not provided.
[0036] In one embodiment, the stopper 121 is detachably connected to the carrier 110, so that different types of stoppers 121 can be replaced for different types of target workpieces 200 to meet various usage requirements. The stopper 121 can be glued to the carrier 110 to achieve detachable connection between the stopper 121 and the carrier 110, or the stopper 121 can be snap-fitted to the carrier 110 to achieve detachable connection between the two. Among them, when there are multiple limit members 121, the connection methods between different limit members 121 and the carrier 110 can be the same or different. For example, some limit members 121 and the carrier 110 are detachably connected, while some limit members 121 and the carrier 110 are not detachably connected. Alternatively, all limit members 121 and the carrier 110 are detachably connected, but some limit members 121 and the carrier 110 are detachably connected by gluing, while some limit members 121 and the carrier 110 are detachably connected by snapping.
[0037] Of course, in other embodiments, the limiting member 121 and the carrier 110 may be non-detachably connected, and the non-detachably connected connection between the limiting member 121 and the carrier 110 may be a welding connection.
[0038] In other embodiments, some of the limiting members 121 are detachably connected to the carrier 110 , while some of the limiting members 121 are non-detachably connected to the carrier 110 .
[0039] In one embodiment, the limiting member 121 is retractable in a direction perpendicular to the carrier 110 , so that the height of the limiting member 121 can be adjusted to accommodate target workpieces 200 of different thicknesses, thereby expanding the application scenarios of the carrying device 100 .
[0040] In one embodiment, the carrier 110 is a circular carrier 110, and the target workpiece 200 is also circular in shape. Of course, in other embodiments, the carrier 110 can also be a square carrier 110, and the target workpiece 200 is also a square target workpiece 200. In short, to meet production needs, the shape of the carrier 110 needs to match the shape of the target workpiece 200.
[0041] In one embodiment, the edge of the target workpiece 200 is provided with a notch 210. When the carrier 110 adsorbs the target workpiece 200, the alignment member 130 abuts against the notch 210 of the target workpiece 200. Specifically, the notch 210 allows the alignment member 130 to suppress contact with the target workpiece 200 when abutting the target workpiece 200, thereby preventing relative sliding between the alignment member 130 and the target workpiece 200. The notch 210 can be semicircular, arc-shaped, U-shaped, or V-shaped, and this application does not impose any restrictions on the shape of the notch 210.
[0042] In other embodiments, the edge of the target workpiece 200 may not be provided with the notch 210 .
[0043] In one embodiment, the positioning member 130 comprises a pneumatic cylinder. When the carrier 110 adsorbs the target workpiece 200, the cylinder's output shaft abuts against the edge of the target workpiece 200. Specifically, the cylinder can mechanically reciprocate linearly. When the carrier 110 adsorbs the target workpiece 200, the cylinder extends, and the cylinder's output shaft abuts against the notch 210 of the target workpiece 200. When the target workpiece 200 is removed from the carrier 110, the cylinder's output shaft retracts, facilitating the positioning of the target workpiece 200.
[0044] Of course, in other embodiments, the alignment member 130 may also be other structures, as long as it can abut against the edge of the target workpiece 200 during the process of the carrier 110 adsorbing the target workpiece 200 .
[0045] The present application also protects a lithography machine, including the above-mentioned carrier device 100. The specific structure of the carrier device 100 can be found in the above-mentioned related content and will not be repeated here.
[0046] The above is only an implementation method of the present application and does not limit the patent scope of the present application. Any equivalent structure or equivalent process transformation made using the contents of the description and drawings of this application, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present application.
Claims
1. A carrying device, characterized in that: include: A carrier, wherein the carrier surface includes a target area, and the target area is used to place a target workpiece; a limiting mechanism, disposed at the periphery of the target area and configured to abut against an edge of the target workpiece; The alignment member is arranged at the periphery of the target area and opposite to the limiting mechanism, and is used for abutting against the edge of the target workpiece when the carrier absorbs the target workpiece.
2. The carrying device according to claim 1, characterized in that: The limiting mechanism includes a plurality of limiting members, and the plurality of limiting members are arranged at intervals on the periphery of the target area.
3. The carrying device according to claim 2, characterized in that: The number of the limiting members is at least three.
4. The carrying device according to claim 2, characterized in that: The limiting member is a columnar structure; Preferably, the material of the limiting member includes wear-resistant material; Preferably, the material of the limiting member includes at least one of polyetheretherketone, polyimide, and polyamideimide.
5. The carrying device according to claim 2, characterized in that: A limiting groove is provided on the side of the limiting member, and the limiting groove abuts against the edge of the target workpiece.
6. The carrying device according to claim 2, characterized in that: The limiting member is detachably connected to the carrier.
7. The carrying device according to claim 1, characterized in that: The carrier is a circular carrier.
8. The carrying device according to claim 1, characterized in that: The edge of the target workpiece is arranged at a notch, and the alignment member abuts against the notch of the target workpiece when the carrier absorbs the target workpiece.
9. The carrying device according to claim 1, characterized in that: The alignment member includes a cylinder, and when the carrier absorbs the target workpiece, the output shaft of the cylinder abuts against the edge of the target workpiece.
10. A photolithography machine, characterized in that: Comprising the carrying device according to any one of claims 1 to 9.