Field ion microscope sample stage

Abstract

The invention provides a field ion microscope sample stage, which has no electromagnetic effect in the use process, has no influence on the use of an ion microscope, is convenient to use, and greatly improves the use efficiency of an electron microscope. The device structurally comprises a base, a sample supporting table used for supporting a sample is arranged on the base, the sample supporting table is connected with a displacement mechanism, the displacement mechanism is driven to move through the displacement mechanism to be located in a pressure-adjustable environment, the displacement mechanism comprises a first mounting pipe, a first spring, a moving plate and a driving air bag, and the driving air bag is located in the first mounting pipe. The moving plate is located between the first spring and the driving air bag and penetrates through the first mounting pipe to be connected with the sample supporting table, and when the pressure of the environment where the displacement mechanism is located is changed to a first set value, the driving air bag can expand and push the moving plate to move; and the movable plate can extrude the spring to drive the sample supporting table to move to a sample analysis position on the base.

Description

Technical Field

[0001] The present invention relates to the technical field of sample support devices for field ion microscopes, and in particular to a sample stage for a field ion microscope. Background Art

[0002] Field ion microscopy can be used to observe the atomic arrangement of materials and is often used in atom probe tomography (APT). When removing and placing material samples, an ultra-vacuum transition chamber is required to ensure that the electron microscope cavity is not contaminated by external air. The placement process is as follows: the sample is sent into the ultra-vacuum transition chamber through a sample storage device, the transition chamber is sealed, and the ultra-vacuum transition chamber is purged with inert gas to displace any air that may have infiltrated. The chamber is then evacuated to the same vacuum level as the electron microscope cavity before the sample is placed into the cavity. This process often takes 24 hours. When conducting material research and development, the elemental composition of the materials is diverse, and materials with different proportions or compositions have completely different material properties. During the research and development process, hundreds of material samples are often prepared. Therefore, when using field ion microscopy for atom probe tomography to analyze different material samples, a lot of time will be spent on the sample transfer process.

[0003] At the same time, given the electron microscope's sensitivity to electromagnetics, the sample stage cannot use electronic control to replace samples. One current sample replacement method, for example, the sample holder and vacuum analyzer disclosed in Patent No. JPWO2015083270A1, is configured with mutually separated exhaust chambers, sample exchange chambers, and atom probe analysis chambers. The sample is placed from the exhaust chamber to the sample exchange rod of the sample exchange chamber through a shell holder that can extend into the exhaust chamber and the sample exchange chamber, and then the sample is sent to the atom probe analysis chamber for analysis through the sample exchange rod. This method has a complex structure and is inconvenient to use. Another method is to use a magnetic rod for sample replacement. However, when using a magnetic rod for sample replacement, the electron microscope cavity needs to be opened, which also poses a risk of contamination. When a transition chamber is used, it takes a lot of time. Summary of the Invention

[0004] In response to the problem that the sample stage for field ion microscope is inconvenient to use, the present invention provides a field ion microscope sample stage, which can produce no electromagnetic effect during use, has no impact on the use of the ion microscope, is easy to use, and greatly improves the efficiency of using the electron microscope.

[0005] The technical solution is as follows: a field ion microscope sample stage, which includes a base, a sample support platform for supporting the sample is provided on the base, the sample support platform is connected to a displacement mechanism and is driven to move by the displacement mechanism, and is characterized in that: the displacement mechanism is located in a pressure-adjustable environment, the displacement mechanism includes a mounting tube 1, a spring 1, a movable plate, and a driving airbag, the spring 1, the movable plate, and the driving airbag are located in the mounting tube 1, the movable plate is located between the spring 1 and the driving airbag, and the movable plate passes through the mounting tube 1 and is connected to the sample support platform, when the pressure of the environment in which the displacement mechanism is located changes to a set value 1, the driving airbag can expand and push the movable plate to move, the movable plate can squeeze the spring 1 and drive the sample support platform to move to the sample analysis position on the base, and the spring 1 is used to push the movable plate and make the sample support platform leave the sample analysis position on the base when the driving airbag contracts.

[0006] Furthermore, the displacement mechanism also includes an exhaust mechanism, and the exhaust valve on the driving airbag can be triggered by the exhaust mechanism to exhaust and shrink the driving airbag.

[0007] Furthermore, the exhaust mechanism includes a second mounting tube, an exhaust airbag, and an exhaust ejector pin. The exhaust airbag and the exhaust ejector pin are installed in the second mounting tube. When the pressure of the environment in which the displacement mechanism is located changes to set value two, set value two is less than set value one, the exhaust airbag can expand and push the exhaust ejector pin to move and trigger the exhaust valve.

[0008] Furthermore, the exhaust mechanism further includes a second spring, and the second spring is arranged between the exhaust airbag and the exhaust ejector pin.

[0009] Furthermore, the movable plate is provided at one end of the driving airbag, and the mounting tube 2 is provided at the other end of the driving airbag, and the mounting tube 2 is fixed in position and can limit the expansion displacement of the other end of the driving airbag; the exhaust pin is provided at one end of the exhaust airbag, and a limiting plate is provided at the other end of the exhaust airbag, and the limiting plate is fixed in position and can limit the expansion displacement of the other end of the exhaust airbag.

[0010] Furthermore, a plurality of sample support platforms are provided on the base, and each of the sample support platforms is connected to the displacement mechanism respectively. The air pressure in the driving airbag and the exhaust airbag of each displacement mechanism is reduced in sequence according to the corresponding sample analysis order, and as the pressure of the environment decreases step by step, the airbags in the sample support platform are driven one by one.

[0011] Beneficial Effects: When performing atomic probe tomography using a field ion microscope, the driving airbag can be inflated and the sample support stage can be moved to deliver the sample simply by controlling the pressure of the sample stage's environment. After sample analysis is completed, the driving airbag is deflated by the exhaust mechanism, and the sample is withdrawn from the analysis position under the action of spring 1. This makes the process convenient and produces no electromagnetic effects, thus having no impact on the operation of the ion microscope. In addition, when used for multi-sample analysis, the airbag pressure of each displacement mechanism can be set differently, and the corresponding sample stage can be manipulated by adjusting the ambient pressure to deliver and withdraw the sample, making sample replacement operations equally convenient. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic diagram of the structure of the present invention; Figure 2 It is a structural diagram of the displacement mechanism; Figure 3 for Figure 2 Schematic diagram of the enlarged structure at point A in the middle.

[0013] In the figure, 1. base; 2. sample support platform; 3. mounting tube 1; 4. spring 1; 5. movable plate; 6. driving airbag; 7. guide groove; 8. exhaust mechanism; 9. mounting tube 2; 10. exhaust airbag; 11. exhaust ejector pin; 12. exhaust valve; 13. spring 2; 14. force adjustment cover; 15. limit spring. DETAILED DESCRIPTION

[0014] like Figure 1 、 Figure 2 、 Figure 3 The sample stage of a field ion microscope shown in the figure includes a base 1, on which a sample support table 2 for supporting a sample is provided. The sample support table 2 is connected to a displacement mechanism and is driven to move by the displacement mechanism. The displacement mechanism is located in a pressure-adjustable environment. The displacement mechanism includes a mounting tube 3, a spring 4, a movable plate 5, and a driving airbag 6. The spring 4, the movable plate 5, and the driving airbag 6 are located in the mounting tube 3, and the movable plate 5 is located between the spring 4 and the driving airbag 6. The movable plate 5 passes through the mounting tube 3 and the guide groove 7 on the base 1 to be connected to the sample support table 2. When the pressure of the environment in which the displacement mechanism is located changes to a set value 1, the driving airbag 6 can expand and push the movable plate 5 to move. The movable plate 5 can squeeze the spring 4 and drive the sample support table 2 to move to the sample analysis position on the base 1 (that is, the middle position of the base 1). The spring 4 is used to push the movable plate 5 and make the sample support table 2 leave the sample analysis position on the base 1 when the driving airbag 6 contracts. In addition, a limit spring 15 is provided to limit the movable plate 5 and limit the expansion size of the driving airbag 6.

[0015] Although for single sample delivery, the expansion and contraction of the driving airbag 6 can be controlled by controlling the size of the ambient pressure, it is preferred that the displacement mechanism also includes an exhaust mechanism 8. When the pressure of the environment in which the displacement mechanism is located further changes to the set value two, the exhaust valve on the driving airbag 6 can be triggered by the exhaust mechanism 8 and the driving airbag 6 can be exhausted and contracted. In this way, exhausting the driving airbag 6 through the exhaust mechanism 8 can prevent the driving airbag 6 from further expanding, thereby making the sample stage suitable for the analysis of multiple samples.

[0016] On the basis of the above, although the exhaust can be achieved by driving the airbag 6 to expand to a sufficient position and contacting the exhaust mechanism 8, this process is difficult to achieve, so as a preferred method, Figure 3 The exhaust mechanism 8 includes a second mounting tube 9, an exhaust airbag 10, and an exhaust ejector pin 11. The exhaust airbag 10 and exhaust ejector pin 11 are mounted within the second mounting tube 9. When the pressure in the displacement mechanism's environment changes to a second set value, the exhaust airbag 10 expands, pushing the exhaust ejector pin 11 to move and trigger the exhaust valve 12. More specifically, the exhaust mechanism 8 also includes a second spring 13, which is positioned between the exhaust airbag 10 and the exhaust ejector pin 11. The spring 13 can reset the exhaust ejector pin 11 and act as a buffer. Only when the exhaust airbag 10 expands sufficiently and applies sufficient force to compress the spring 13 can the exhaust ejector pin 11 trigger the exhaust valve 12.

[0017] In addition, in order to limit the reverse expansion of the airbag, a movable plate 5 is provided at one end of the driving airbag 6, and a mounting tube 2 9 is provided at the other end of the driving airbag 6. The mounting tube 2 9 is fixed in position, and its rear end is against the force adjusting cover 14. The force adjusting cover 14 is fixed to the rear end of the mounting tube 1 3, so as to limit the expansion displacement of the other end of the driving airbag 6; an exhaust pin 11 is provided at one end of the exhaust airbag 10, and a limiting plate is provided at the other end of the exhaust airbag 10 (the limiting plate can be the bottom plate of the mounting tube 2 9). The limiting plate is fixed in position and can limit the expansion displacement of the other end of the exhaust airbag 10.

[0018] When atomic probe tomography is required for multiple samples, multiple sample support platforms 2 are provided on the base 1, and each sample support platform 2 is connected to a displacement mechanism. The air pressure in the driving airbag 6 and the exhaust airbag 10 of each displacement mechanism is reduced in sequence according to the corresponding sample analysis order, and as the pressure of the environment decreases step by step, the airbags in the sample support platform 2 are driven one by one.

[0019] When in use, the entire sample stage is in a vacuum environment, and the expansion of the airbag is controlled by adjusting the ambient pressure of the sample stage. Specifically, the ambient pressure is reduced to a set value of P1. At this time, the driving airbag 6 of the displacement mechanism corresponding to the first sample to be subjected to atomic probe tomography expands and pushes the movable plate 5 and drives the sample support platform 2 to move toward the sample analysis position, so that the sample can be subjected to atomic probe tomography analysis by a field ion microscope. After the sample analysis is completed, the ambient pressure is reduced to a set value of P2. At this time, the exhaust airbag 10 of the displacement mechanism corresponding to the first sample to be subjected to atomic probe tomography expands to a sufficient size to push the exhaust ejector pin 11 and The exhaust valve 12 is triggered to exhaust and shrink the driving airbag 6, and under the action of the spring 1 4, the moving plate 5 retreats and drives the sample support table 2 to leave the sample analysis position; when it is necessary to analyze the second sample to be subjected to atomic probe tomography, the ambient pressure is controlled to be further reduced to the set value 3 P3, and the driving airbag 6 of the displacement mechanism corresponding to the second sample to be subjected to atomic probe tomography is expanded to a sufficient size to move the sample to the sample analysis position. When the analysis is completed, the ambient pressure is further reduced to the set value 4 P4, so that the driving airbag 6 is exhausted through the exhaust airbag 10 and its exhaust pin 11. In this way, multiple samples can be replaced, which is convenient to use.

[0020] The above are merely preferred embodiments of the present invention, but the scope of protection of the present invention is not limited thereto. Any changes or substitutions that can be easily conceived by anyone familiar with the art within the technical scope disclosed by the present invention should be included within the scope of protection of the present invention. Therefore, the scope of protection of the present invention should be based on the scope of protection of the claims.

Claims

1. A field ion microscope sample stage, comprising a base, a sample support platform for supporting a sample provided on the base, the sample support platform being connected to a displacement mechanism and driven to move by the displacement mechanism, characterized in that: The displacement mechanism is located in a pressure-adjustable environment, and the displacement mechanism includes a mounting tube 1, a spring 1, a movable plate, and a driving airbag. The spring 1, the movable plate, and the driving airbag are located in the mounting tube 1, the movable plate is located between the spring 1 and the driving airbag, and the movable plate is connected to the sample support table through the mounting tube 1. When the pressure of the environment in which the displacement mechanism is located changes to a set value 1, the driving airbag can expand and push the movable plate to move, and the movable plate can squeeze the spring 1 and drive the sample support table to move to the sample analysis position on the base. The spring 1 is used to push the movable plate and make the sample support table leave the sample analysis position on the base when the driving airbag contracts.

2. A field ion microscope sample stage according to claim 1, characterized in that: The displacement mechanism further includes an exhaust mechanism, and the exhaust valve on the driving airbag can be triggered by the exhaust mechanism to exhaust and shrink the driving airbag.

3. A field ion microscope sample stage according to claim 2, characterized in that: The exhaust mechanism includes a second mounting tube, an exhaust airbag, and an exhaust ejector pin. The exhaust airbag and the exhaust ejector pin are installed in the second mounting tube. When the pressure of the environment in which the displacement mechanism is located changes to set value two, set value two is less than set value one, the exhaust airbag can expand and push the exhaust ejector pin to move and trigger the exhaust valve.

4. A field ion microscope sample stage according to claim 3, characterized in that: The exhaust mechanism further includes a second spring, which is arranged between the exhaust airbag and the exhaust ejector pin.

5. The field ion microscope sample stage according to claim 3, characterized in that: The movable plate is provided at one end of the driving airbag, and the mounting tube 2 is provided at the other end of the driving airbag. The mounting tube 2 is fixed in position and can limit the expansion displacement of the other end of the driving airbag; the exhaust pin is provided at one end of the exhaust airbag, and a limiting plate is provided at the other end of the exhaust airbag. The limiting plate is fixed in position and can limit the expansion displacement of the other end of the exhaust airbag.

6. The field ion microscope sample stage according to claim 3, characterized in that: A plurality of sample support platforms are provided on the base, and each of the sample support platforms is connected to the displacement mechanism. The air pressure in the driving airbag and the exhaust airbag of each displacement mechanism is reduced in sequence according to the corresponding sample analysis order, and as the pressure of the environment decreases step by step, the airbags in the sample support platform are driven one by one.

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