Shower disc micropore detection device in semiconductor former process equipment

Abstract

The utility model discloses a sprinkler plate micropore detection device in semiconductor previous process equipment. The sprinkler plate micropore detection device comprises a rack; the left sliding table and the right sliding table are mounted on two sides, parallel to the longitudinal direction, of the rack; the workpiece fixing table is arranged on the rack in a sliding manner and can transversely move between the left sliding table and the right sliding table; the workpiece fixing table transverse moving mechanism is mounted on the rack and used for driving the workpiece fixing table to transversely move between the left sliding table and the right sliding table; the backlight module is arranged on the workpiece fixing table; the backlight module switch is arranged on the rack; the two ends of the linear motion mechanism are slidably mounted on the left and right sliding tables; the electron microscope is installed on the linear motion mechanism and used for observing the roundness of holes of the shower head disc installed on the workpiece fixing table, burrs on the edges of the holes and whether machining leakage exists or not; and the display device is in signal connection with the electron microscope so as to detect whether the roundness of the hole, burrs on the edge of the hole and missed machining are observed manually through a display.

Description

TECHNICAL FIELD

[0001] The utility model belongs to the shower disc testing technical field in semiconductor front process equipment, especially relates to a shower disc micropore detection device in semiconductor front process equipment. BACKGROUND

[0002] In the semiconductor front process equipment, the plasma acts on the silicon oxide film forming raw material gas spouted from the gas spouting hole of the shower disc through the space part of the shower disc.

[0003] About 3000 gas spouting holes are arranged on the shower disc, and the roundness of the holes, burrs of the hole edges and whether there is a missed processing need to be detected.

[0004] The existing detection method is to use a microscope, and the microscope is inconvenient to move, and the gas spouting hole that is not punched through is easy to be missed. UTILITY MODEL CONTENTS

[0005] The utility model needs to solve the technical problem in the prior art and provides a shower disc micropore detection device in semiconductor front process equipment capable of rapid detection.

[0006] The technical problem needed by the utility model can be solved by the following technical scheme:

[0007] A shower disc micropore detection device in semiconductor front process equipment, comprising:

[0008] A rack;

[0009] Left and right sliding tables installed on the rack parallel to the longitudinal direction;

[0010] A workpiece fixing table slidingly arranged on the rack, which moves transversely between the left and right sliding tables;

[0011] A workpiece fixing table transverse movement mechanism installed on the rack, which drives the workpiece fixing table to move transversely between the left and right sliding tables;

[0012] A backlight module arranged on the workpiece fixing table;

[0013] A backlight module switch arranged on the rack, which is externally connected to the mains and internally connected to the backlight module to control the opening and closing of the backlight module;

[0014] A linear motion mechanism slidingly installed at both ends of the left and right sliding tables;

[0015] An electron microscope is installed on the linear motion mechanism, and the electron microscope is used for observing the roundness of the hole of the shower disc, burrs of the hole edge and whether there is a missed machining on the workpiece fixing table.

[0016] A display device is connected with the electron microscope in signal, so as to detect the roundness of the hole, burrs of the hole edge and whether there is a missed machining by artificial observation through the display.

[0017] In one preferred embodiment of the present application, the workpiece fixing table transverse moving mechanism comprises a first hand wheel mechanism, a first screw rod transmission mechanism and a support shaft mechanism; the support shaft mechanism and the first hand wheel mechanism are arranged on both sides of the gantry parallel to the longitudinal direction, the first nut in the first screw rod transmission mechanism is fixed on the workpiece fixing table, the first screw rod in the first screw rod transmission mechanism passes through the first nut and is engaged with the first nut; the two ends of the first screw rod are connected with the first hand wheel mechanism and the support shaft mechanism through a coupling respectively, the support shaft in the support shaft mechanism can rotate, and in operation, the first hand wheel mechanism is operated, the first screw rod in the first screw rod transmission mechanism and the support shaft are driven to rotate through the first hand wheel mechanism, and the workpiece fixing table is driven to move transversely between the left and right sliding tables through the first nut.

[0018] In one preferred embodiment of the present application, a first locking mechanism is installed on the first hand wheel mechanism, so that the hand wheel mechanism can be locked through the first locking mechanism.

[0019] In one preferred embodiment of the present application, a stepped groove is arranged on the workpiece fixing table; the backlight module comprises a backlight light emitting element and a soft light plate, the backlight light emitting element is installed in the lower groove of the stepped groove, and the soft light plate is installed in the upper groove of the stepped groove and is located below the backlight light emitting element; the upper groove of the stepped groove is also used for installing the measured shower disc.

[0020] In one preferred embodiment of the utility model, the linear motion mechanism includes a guide rail, a sliding block slidingly arranged on the guide rail, a second screw rod transmission mechanism and a second hand wheel mechanism, both ends of the guide rail are installed on the left and right sliding tables and can move longitudinally on the left and right sliding tables, the second hand wheel mechanism is installed on one end of the guide rail and is drivingly connected with a second screw rod in the second screw rod transmission mechanism, a second nut in the second screw rod transmission mechanism is fixed on the sliding block, the electron microscope is installed on the sliding block, the second screw rod in the second screw rod transmission mechanism passes through the second nut and is engaged with the second nut, when the second hand wheel mechanism is operated, the second hand wheel mechanism drives the second screw rod to rotate, the rotating second screw rod drives the sliding block to move transversely along the guide rail through the second nut engaged with it, and the transversely moving sliding block drives the electron microscope to move transversely.

[0021] In one preferred embodiment of the utility model, a rack is vertically arranged on the sliding block, a lifting sliding sleeve is arranged on the rack, a third hand wheel mechanism is arranged on the lifting sliding sleeve, the third hand wheel mechanism has a gear engaged with the rack and a hand wheel driving the gear to rotate, and the electron microscope is installed on the lifting sliding sleeve through a microscope support; when operated, the hand wheel in the third hand wheel mechanism is rotated to drive the gear to rotate, the lifting sliding sleeve is driven to move up and down through the engagement of the gear and the rack, and the electron microscope is further driven to move up and down.

[0022] In one preferred embodiment of the utility model, a locking screw is arranged on the lifting sliding sleeve, a locking hand wheel is installed on the locking screw, and the lifting sliding sleeve can be locked on the rack through the movement of the locking screw driven by the locking hand wheel.

[0023] Thanks to the above technical scheme, the electron microscope can move in three dimensions of front and back, left and right and up and down, which is convenient for detecting the roundness of the holes of the shower disc, burrs of the hole edges and whether there is a missed machining condition, convenient to use and fast to detect. In addition, the backlight module is added, and whether there is a missed machining or a hole not punched through can be detected at one time. BRIEF DESCRIPTION OF DRAWINGS

[0024] Figure 1 It is a structure schematic view of the shower disc micro-hole detection device in the semiconductor front-end process equipment of the utility model. DETAILED DESCRIPTION

[0025] The utility model will be further described below in combination with the drawings and specific embodiments.

[0026] Referring to Figure 1The shower plate micro-hole detection device in a semiconductor front-end process equipment shown in the figure comprises a rack 100, left and right slide tables 210 and 220 are arranged on both sides of the rack 100 in parallel to the longitudinal direction.

[0027] In addition, a workpiece fixing table 300 is arranged on the workbench 110 of the rack 100 in a sliding manner, and the workpiece fixing table 300 can move transversely between the left and right slide tables 210 and 220.

[0028] A stepped groove is arranged on the workpiece fixing table 300, and the stepped groove is divided into an upper groove 310 and a lower groove 320.

[0029] The backlight module comprises a backlight light emitting element 410 and a soft light plate 420, the backlight light emitting element 410 is installed in the lower groove 320, the soft light plate 420 is installed in the upper groove 310 and is located below the backlight light emitting element 410, so that the light emitted by the backlight light emitting element 410 is emitted after being softened by the soft light plate 420. The measured shower plate 500 is installed in the upper groove 310 and is located above the soft light plate 420, so that the light emitted by the soft light plate 420 can be emitted through the processed gas spout hole on the measured shower plate 500, and the roundness of the gas spout hole and the burr on the hole edge can be observed through the electron microscope 510 and the display device 520; those that are not processed, the holes that are not punched through will not have light transmitted, and the electron microscope 510 and the display device 520 are observed, and rework is needed.

[0030] In order to control the opening of the backlight module, a backlight module switch 430 is arranged on the right side of the rack 100, the backlight module switch 430 is connected with the mains outside and is electrically connected with the backlight light emitting element 410 in the backlight module, so as to control the opening and closing of the backlight light emitting element 410 in the backlight module.

[0031] In order to facilitate the transverse movement of the workpiece fixing table 300, the workpiece fixing table 300 of the utility model is driven to move transversely between the left and right slide tables 210 and 220 by a workpiece fixing table transverse movement mechanism.

[0032] The workpiece fixing table horizontal moving mechanism comprises a hand wheel mechanism 610 (the aforementioned first hand wheel mechanism), a screw rod transmission mechanism 620 (the aforementioned first screw rod transmission mechanism) and a support shaft mechanism 630; the support shaft mechanism 630 and the hand wheel mechanism 610 are separately arranged on both sides of the rack 100 parallel to the longitudinal direction, a first nut (not shown in the figure) in the screw rod transmission mechanism 620 is fixed on the workpiece fixing table 300, a screw rod 621 (the aforementioned first screw rod) in the screw rod transmission mechanism 620 penetrates through the first nut and is engaged with the first nut; the two ends of the screw rod 621 are connected with the hand wheel mechanism 610 and the support shaft 631 in the support shaft mechanism 630 through a coupling 340, 350 respectively, the support shaft 631 in the support shaft mechanism 630 can rotate, during operation, the hand wheel mechanism 610 is operated, the screw rod 621 in the screw rod transmission mechanism 620 and the support shaft 631 are driven to rotate by the hand wheel mechanism 610, and the workpiece fixing table 300 is driven to move horizontally between the left slide table 210 and the right slide table 220 by the first nut.

[0033] In order to lock the workpiece fixing table 300, a locking mechanism 660 (the aforementioned first locking mechanism) is installed on the hand wheel mechanism 610, the hand wheel mechanism 610 can be locked by the locking mechanism 660, and the rotation of the hand wheel mechanism 610 is limited.

[0034] In order to facilitate the forward and backward movement of the electron microscope 510, a linear motion mechanism is installed on the left slide table 210 and the right slide table 220, which carries the electron microscope 510 to move forward and backward along the left slide table 210 and the right slide table 220.

[0035] In addition, the linear motion mechanism comprises a guide rail 710, a sliding block 720 slidingly arranged on the guide rail 710, a screw rod transmission mechanism 730 (the aforementioned second screw rod transmission mechanism) and a hand wheel mechanism 740 (the aforementioned second hand wheel mechanism); both ends of the guide rail 710 are installed on the left slide table 210 and the right slide table 220 and can move forward and backward (i.e. the aforementioned longitudinal direction) on the left slide table 210 and the right slide table 220, the hand wheel mechanism 740 is installed on the right end of the guide rail 710 and is drivingly connected with a screw rod 731 in the screw rod transmission mechanism 730, a second nut in the screw rod transmission mechanism 730 is fixed on the sliding block 720, the screw rod 731 in the screw rod transmission mechanism 730 penetrates through the second nut and is engaged with the second nut, when the hand wheel mechanism 740 is operated, the hand wheel mechanism 740 drives the screw rod 731 to rotate, the rotating screw rod 731 drives the sliding block 720 to move horizontally along the guide rail 710 through the second nut engaged therewith, and the horizontally moving sliding block 720 drives the electron microscope 810 to move horizontally.

[0036] In order to enable the electron microscope 510 to be raised and lowered, a rack 810 is vertically arranged on the slide 720, a lifting sleeve 820 is arranged on the rack 810, a hand wheel mechanism 830 (the third hand wheel mechanism mentioned above) is arranged on the lifting sleeve 820, the hand wheel mechanism 830 has a gear (not shown in the figure) engaged with the rack 810 and a hand wheel 831 driving the gear to rotate, and the electron microscope 510 is mounted on the lifting sleeve 820 through the microscope support 530; in operation, the hand wheel 831 in the hand wheel mechanism 830 is rotated to drive the gear to rotate, the lifting sleeve 820 is driven to move up and down through the engagement of the gear and the rack 810, and the electron microscope 510 is further driven to move up and down.

[0037] In order to lock the electron microscope 510 at a certain position after being raised and lowered, a locking screw 840 is arranged on the lifting sleeve 820, a locking hand wheel 841 is mounted on the locking screw 840, and the lifting sleeve 820 can be locked on the rack 810 by driving the locking screw 840 to move through the locking hand wheel 841.

Claims

1. A shower tray micropore detection device in semiconductor front-end process equipment, characterized in that: include: Stand; Left and right slides are installed on both sides of the platform parallel to the longitudinal direction; A workpiece fixing table is slidably arranged on the table, and the workpiece fixing table moves laterally between the left and right sliding tables; a workpiece fixing table transverse movement mechanism installed on the table, the workpiece fixing table transverse movement mechanism drives the workpiece fixing table to move transversely between the left and right slide tables; A backlight module is arranged on the workpiece fixing table; A backlight module switch is provided on the stand, the backlight module switch is externally connected to the mains power supply and internally electrically connected to the backlight module, and is used to control the on and off of the backlight module; A linear motion mechanism with both ends slidably mounted on the left and right slides; An electron microscope mounted on the linear motion mechanism, the electron microscope being used to observe the roundness of the hole of the shower tray mounted on the workpiece fixing table, the burrs on the hole edge, and whether there is any missing processing; A display device is connected to the electron microscope signal so as to detect the roundness of the hole, the burrs on the hole edge and whether there is any missing processing through manual observation of the display.

2. The device for detecting micropores in a shower tray of semiconductor front-end process equipment according to claim 1, characterized in that: The lateral movement mechanism of the workpiece fixing table includes a first handwheel mechanism, a first screw transmission mechanism and a support shaft mechanism; the support shaft mechanism and the first handwheel mechanism are respectively arranged on both sides of the table parallel to the longitudinal direction, and the first nut in the first screw transmission mechanism is fixed on the workpiece fixing table, and the first screw in the first screw transmission mechanism passes through the first nut and engages with the first nut; the two ends of the first screw are respectively connected to the first handwheel mechanism and the support shaft mechanism through a coupling, and the support shaft in the support shaft mechanism can rotate. When working, the first handwheel mechanism is operated to drive the first screw in the first screw transmission mechanism and the support shaft to rotate through the first handwheel mechanism, and the workpiece fixing table is driven to move laterally between the left and right slides through the first nut.

3. The device for detecting micropores in a shower tray of semiconductor front-end process equipment according to claim 2, characterized in that: A first locking mechanism is installed on the first hand wheel mechanism, and the hand wheel mechanism can be locked by the first locking mechanism.

4. The shower tray micropore detection device in semiconductor front-end process equipment according to any one of claims 1 to 3, characterized in that: A stepped groove is provided on the workpiece fixing table; the backlight module includes a backlight emitting element and a soft light plate, the backlight emitting element is installed in the lower groove of the stepped groove, and the soft light plate is installed in the upper groove of the stepped groove and is located below the backlight emitting element; the upper groove of the stepped groove is also used to install the shower tray to be tested.

5. The device for detecting micropores in a shower tray of semiconductor front-end process equipment according to claim 4, characterized in that: The linear motion mechanism includes a guide rail, a slider slidably arranged on the guide rail, a second screw transmission mechanism, and a second handwheel mechanism; both ends of the guide rail are mounted on the left and right slides and can move longitudinally on the left and right slides; the second handwheel mechanism is mounted on one end of the guide rail and is drivingly connected to a second screw in the second screw transmission mechanism; a second nut in the second screw transmission mechanism is fixed to the slider; the electron microscope is mounted on the slider; and the second screw in the second screw transmission mechanism passes through the second nut and engages with the second nut; When the second handwheel mechanism is operated, the second handwheel mechanism drives the second screw to rotate, and the rotating second screw drives the slider to move laterally along the guide rail through the second nut engaged therewith, and the laterally moving slider drives the electron microscope to move laterally.

6. The device for detecting micropores in a shower tray of semiconductor front-end process equipment according to claim 5, characterized in that: A rack is vertically arranged on the slider, a lifting sleeve is arranged on the rack, and a third handwheel mechanism is arranged on the lifting sleeve. The third handwheel mechanism has a gear meshing with the rack and a handwheel that drives the gear to rotate. The electron microscope is installed on the lifting sleeve through a microscope bracket. During operation, the handwheel in the third handwheel mechanism is rotated to drive the gear to rotate, and the lifting sleeve is driven to perform a lifting motion through the meshing of the gear and the rack, thereby driving the electron microscope to perform a lifting motion.

7. The device for detecting micropores in a shower tray of semiconductor front-end process equipment according to claim 6, characterized in that: A locking screw is provided on the lifting sleeve, and a locking hand wheel is installed on the locking screw. The lifting sleeve can be locked on the rack by driving the locking screw to move through the locking hand wheel.

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