A high purity electronic grade molybdenum hexafluoride reactor

Abstract

The application belongs to the technical field of molybdenum hexafluoride reactors, and particularly relates to a high-purity electronic-grade molybdenum hexafluoride reactor. In view of the problem that the existing molybdenum hexafluoride reactor lacks effective waste heat recovery measures, the following scheme is proposed, which comprises a reactor body, a top cover, a gas delivery pipe, and a circular hole. The bottom of the top cover is fixedly connected to the upper side of the reactor body, the upper side of the top cover is provided with an exhaust pipe, the gas delivery pipe is located on the reactor body, and the circular hole is provided on the outer side of the reactor body and is fixedly connected to the outer side of the gas delivery pipe. The high-purity electronic-grade molybdenum hexafluoride reactor can preheat molybdenum powder as raw material by using waste heat contained in produced molybdenum hexafluoride gas, thereby reducing heat consumption in the reactor body, ensuring that the temperature in the reactor body is always at the optimal reaction temperature, ensuring that molybdenum powder can fully react with fluorine gas, improving the conversion efficiency of raw materials by the device, and improving the energy utilization rate.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of molybdenum hexafluoride reactor, and particularly relates to a high-purity electronic-grade molybdenum hexafluoride reactor. BACKGROUND

[0002] Molybdenum hexafluoride is an inorganic compound, which is the highest valence fluoride of molybdenum, is white block crystal or colorless liquid, and is mainly used for molybdenum isotope separation or can be used as chemical vapor deposition molybdenum silicide or molybdenum in the microelectronic industry to manufacture low-resistance, high-melting-point interconnection lines.

[0003] In the process of producing molybdenum hexafluoride gas by the molybdenum hexafluoride reactor, a large amount of heat is taken away from the reactor by the molybdenum hexafluoride gas, and the existing molybdenum hexafluoride reactor cannot effectively utilize the waste heat, resulting in high energy consumption of the reactor and low energy utilization rate. SUMMARY

[0004] The present application discloses a high-purity electronic-grade molybdenum hexafluoride reactor, which aims to solve the technical problem of the lack of effective waste heat recovery measures in the existing molybdenum hexafluoride reactor in the background art.

[0005] The present application provides a high-purity electronic-grade molybdenum hexafluoride reactor, which comprises:

[0006] a reactor body;

[0007] a top cover, the bottom of the top cover is fixedly connected with the upper side of the reactor body, and the upper side of the top cover is provided with an exhaust pipe;

[0008] a gas conveying pipe, which is located on the reactor body, and a circular hole is formed in the outer portion of the reactor body, and the inner wall of the circular hole is fixedly connected with the outer portion of the gas conveying pipe;

[0009] a feeding pipe, which is located on the top cover, and an orifice is formed in the outer portion of the top cover, and the inner wall of the orifice is fixedly connected with the outer portion of the feeding pipe, a screw rod is arranged in the feeding pipe, an electric motor is fixedly connected with the outer portion of the feeding pipe, the output end of the electric motor is connected with one end of the screw rod through a coupling, and a feeding hopper is arranged on the feeding pipe;

[0010] an electric heating pipe, which is located in the reactor body;

[0011] a waste heat recovery and utilization module, which is located on the reactor body, and is used for recovering and reusing the heat contained in the molybdenum hexafluoride gas generated by the reactor;

[0012] a reaction efficiency increasing module, which is located in the reactor body, and is used for increasing the contact area of fluorine gas and molybdenum powder in the reactor.

[0013] In a preferred scheme, the waste heat recovery module comprises a baffle plate, the outer part of which is fixedly connected with the inner wall of the reactor body, a tapered hole is formed in the baffle plate, a heat collecting cylinder is arranged above the tapered hole, two symmetrical hangers are fixedly connected with the upper side of the heat collecting cylinder, the outer part of the hangers is fixedly connected with the inner wall of the reactor body, a plurality of circumferentially equidistantly distributed cutting grooves are formed in the bottom of the heat collecting cylinder, snowflake-shaped heat conducting plates are fixedly connected with the inner wall of the cutting grooves, a fine hole is formed in the upper side of the heat collecting cylinder, a stirring paddle is movably connected in the fine hole, a motor one is fixedly connected with the upper side of the heat collecting cylinder, the output end of the motor one is connected with the upper side of the stirring paddle through a shaft coupling; two symmetrical hole grooves are formed in the outer part of the heat collecting cylinder, conveying pipes are fixedly connected in the hole grooves, one end of the two conveying pipes away from the heat collecting cylinder is fixedly connected with the same collecting box through the top cover, the collecting box is located outside the reactor body, the collecting box is in communication with the conveying pipes, a plurality of equidistantly distributed rectangular openings are formed in the bottom of the collecting box, heat spreading plates are fixedly connected in the rectangular openings, the outer part of the plurality of heat spreading plates is provided with the same support frame, the upper side of the support frame is fixedly connected with the bottom of the collecting box, and the support frame is fixedly connected with the side opposite to the reactor body; a pump one is fixedly connected with the outer part of the collecting box, the output end of the pump one is connected with one of the conveying pipes through a conduit, the outer part of the plurality of heat spreading plates is slidably connected with the same heat collecting box, the bottom of the heat collecting box is fixedly connected with a bearing platform, a base is arranged below the bearing platform, the base is fixedly connected with the side opposite to the reactor body, the upper side of the base is fixedly connected with two symmetrical hydraulic rods, the output end of the hydraulic rods is fixedly connected with the bottom of the bearing platform, two symmetrical fine openings are formed in the outer part of the heat collecting box, flow guide pipes are fixedly connected with the inner wall of the fine openings, a pump two is fixedly connected with the outer part of the heat collecting box, the output end of the pump two is connected with one of the flow guide pipes through a circular pipe; one end of the two flow guide pipes away from the heat collecting box is fixedly connected with the same hollow sleeve, the flow guide pipes are in communication with the hollow sleeve, the hollow sleeve is located outside the feeding pipe, and the outer part of the hollow sleeve is provided with a heat preservation sleeve.

[0014] In a preferred scheme, the reaction efficiency module comprises a ring-shaped frame located below the conical hole, the outer part of the ring-shaped frame is fixedly connected with the inner wall of the reactor body, the inner wall of the ring-shaped frame is fixedly connected with a plurality of circumferentially equidistantly distributed stabilizing springs, the ends of the plurality of stabilizing springs away from the ring-shaped frame are fixedly connected with the same fine mesh sieve, and the upper side of the fine mesh sieve is fixedly connected with a connecting frame; the upper side of the connecting frame is fixedly connected with an elliptical ring, a driving motor is arranged above the elliptical ring, the outer part of the driving motor is fixedly connected with a heat shield, the outer part of the heat shield is fixedly connected with the inner wall of the reactor body, and the output end of the driving motor is connected with a cam through a shaft coupling, the cam is located in the elliptical ring, and the outer part of the cam is in contact with the inner wall of the elliptical ring; a ring-shaped pipe is arranged in the reactor body, the ring-shaped pipe is communicated with the gas conveying pipe, the outer part of the ring-shaped pipe is provided with a plurality of circumferentially equidistantly distributed short pipes, the upper sides of the short pipes are all fixedly connected with microporous diffusion heads, the microporous diffusion heads are all located below the fine mesh sieve, and a cleaning module is arranged above the ring-shaped frame.

[0015] In a preferred scheme, the cleaning module comprises a fixed ring, the outer part of the fixed ring is fixedly connected with the inner wall of the reactor body, the inner wall of the fixed ring is fixedly connected with an inner tooth ring, the inner wall of the fixed ring is slidingly connected with a mounting frame, the mounting frame is located below the fixed ring, the inner wall of the mounting frame is fixedly connected with a rotating motor, the output end of the rotating motor is connected with a gear through a shaft coupling penetrating through the mounting frame, and the gear is engaged with the fixed ring.

[0016] As can be seen from the above, the high-purity electronic-grade molybdenum hexafluoride reactor provided by the application can preheat the molybdenum powder as raw material by using the waste heat contained in the produced molybdenum hexafluoride gas, thereby reducing the heat consumption in the reactor body, ensuring that the temperature in the reactor body is always at the optimal reaction temperature, ensuring that the molybdenum powder can fully react with fluorine gas, improving the conversion efficiency of the device on raw materials, and improving the energy utilization rate. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 The figure is a schematic diagram of the overall structure of the high-purity electronic-grade molybdenum hexafluoride reactor provided by the application;

[0018] Figure 2 The figure is a schematic diagram of the overall structure of the high-purity electronic-grade molybdenum hexafluoride reactor provided by the application;

[0019] Figure 3 The figure is a schematic diagram of the overall structure of the high-purity electronic-grade molybdenum hexafluoride reactor provided by the application;

[0020] Figure 4A high-purity electronic-grade molybdenum hexafluoride reactor heat collecting cylinder structure schematic diagram is provided for the present application.

[0021] Figure 5 A high-purity electronic-grade molybdenum hexafluoride reactor heat collecting cylinder structure schematic diagram is provided for the present application.

[0022] Figure 6 A high-purity electronic-grade molybdenum hexafluoride reactor heat collecting cylinder structure schematic diagram is provided for the present application.

[0023] Figure 7 A high-purity electronic-grade molybdenum hexafluoride reactor heat collecting cylinder structure schematic diagram is provided for the present application.

[0024] Figure 8 A high-purity electronic-grade molybdenum hexafluoride reactor heat collecting cylinder structure schematic diagram is provided for the present application.

[0025] In the figure: 11, reactor body; 12, top cover; 13, exhaust pipe; 14, gas conveying pipe; 15, feeding pipe; 16, feeding hopper; 17, waste heat recovery module; 1701, flow resistance plate; 1702, conical hole; 1703, heat collecting cylinder; 1704, hanger; 1705, hollow sleeve; 1706, flow guide pipe; 1707, heat preservation sleeve; 1708, snowflake-shaped heat conducting plate; 1709, motor one; 1710, stirring paddle; 1711, conveying pipe; 1712, support frame; 1713, collecting box; 1714, heat spreading plate; 1715, pump one; 1716, heat collecting box; 1717, bearing platform; 1718, base; 1719, hydraulic rod; 1720, pump two; 18, reaction enhancement module; 1801, annular frame; 1802, stabilizing spring; 1803, fine mesh sieve; 1804, connecting frame; 1805, oval ring; 1806, cam; 1807, drive motor; 1808, heat shield; 1809, annular pipe; 1810, microporous diffusion head; 19, cleaning module; 1901, fixed ring; 1902, inner tooth ring; 1903, mounting frame; 1904, rotating motor; 1905, gear; 1906, scraper; 110, electric heating tube; 111, screw rod; 112, motor. DETAILED DESCRIPTION

[0026] The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all.

[0027] The high-purity electronic-grade molybdenum hexafluoride reactor disclosed in the present application is mainly applied to the scene where the existing molybdenum hexafluoride reactor lacks effective waste heat recovery measures.

[0028] Refer toFigures 1-8 The application discloses a high-purity electronic-grade molybdenum hexafluoride reactor.

[0029] The reactor body 11;

[0030] The top cover 12 is bolted to the upper side of the reactor body 11, and the upper side of the top cover 12 is provided with an exhaust pipe 13;

[0031] The gas feeding pipe 14 is arranged on the reactor body 11, and a circular hole is formed in the outer side of the reactor body 11, and the inner wall of the circular hole is bolted to the outer side of the gas feeding pipe 14;

[0032] The feeding pipe 15 is arranged on the top cover 12, and an orifice is formed in the outer side of the top cover 12, and the inner wall of the orifice is bolted to the outer side of the feeding pipe 15; a spiral rod 111 is arranged in the feeding pipe 15, and an electric motor 112 is bolted to the outer side of the feeding pipe 15, the output end of the electric motor 112 is connected to one end of the spiral rod 111 through a coupling, and a feeding hopper 16 is arranged on the feeding pipe 15;

[0033] The electric heating pipe 110 is arranged in the reactor body 11;

[0034] The waste heat recycling module 17 is arranged on the reactor body 11, and is used for recycling the heat contained in the molybdenum hexafluoride gas generated by the reactor;

[0035] The reaction efficiency improving module 18 is arranged in the reactor body 11, and is used for increasing the contact area of fluorine gas and molybdenum powder in the reactor.

[0036] Specifically, the device can preheat the molybdenum powder as raw material by using the waste heat contained in the produced molybdenum hexafluoride gas through the waste heat recycling module 17, so as to reduce the heat consumption in the reactor body 11, ensure that the temperature in the reactor body 11 is always at the optimal reaction temperature, ensure that the molybdenum powder can fully react with fluorine gas, improve the conversion efficiency of the device to raw materials, and improve the energy utilization rate.

[0037] Referring to Figure 3 , Figure 4 and Figure 5In a preferred implementation, the waste heat recovery module 17 comprises a baffle plate 1701, the outer part of which is bolted to the inner wall of the reactor body 11, and a tapered hole 1702 is formed in the baffle plate 1701, a heat collecting cylinder 1703 is arranged above the tapered hole 1702, two symmetrical hangers 1704 are bolted to the upper side of the heat collecting cylinder 1703, the outer part of the hangers 1704 is bolted to the inner wall of the reactor body 11, and a plurality of circumferentially equidistantly distributed cut grooves are formed in the bottom of the heat collecting cylinder 1703, and snowflake-shaped heat conducting plates 1708 are bolted to the inner walls of the cut grooves, a fine hole is formed in the upper side of the heat collecting cylinder 1703, a stirring paddle 1710 is rotatably connected in the fine hole through a bearing, a motor one 1709 is bolted to the upper side of the heat collecting cylinder 1703, and the output end of the motor one 1709 is connected to the upper side of the stirring paddle 1710 through a shaft coupling; two symmetrical hole grooves are formed in the outer part of the heat collecting cylinder 1703, and a conveying pipe 1711 is bolted in each hole groove, and the ends of the two conveying pipes 1711 away from the heat collecting cylinder 1703 are bolted to the same collecting box 1713 through the top cover 12, the collecting box 1713 is located outside the reactor body 11, the collecting box 1713 is in communication with the conveying pipes 1711, a plurality of equidistantly distributed rectangular openings are formed in the bottom of the collecting box 1713, and heat spreading plates 1714 are bolted in the rectangular openings, and a support frame 1712 is arranged outside the plurality of heat spreading plates 1714, the upper side of the support frame 1712 is bolted to the bottom of the collecting box 1713, and the side of the support frame 1712 opposite to the reactor body 11 is bolted; a pump one 1715 is bolted to the outer part of the collecting box 1713, the output end of the pump one 1715 is connected to one of the conveying pipes 1711 through a conduit, and a heat collecting box 1716 is slidably connected to the outer part of the plurality of heat spreading plates 1714, a bearing platform 1717 is bolted to the bottom of the heat collecting box 1716, a base 1718 is arranged below the bearing platform 1717, the side of the base 1718 opposite to the reactor body 11 is bolted, and two symmetrical hydraulic rods 1719 are bolted to the upper side of the base 1718, the output ends of the hydraulic rods 1719 are bolted to the bottom of the bearing platform 1717, two symmetrical fine openings are formed in the outer part of the heat collecting box 1716, and flow guide pipes 1706 are bolted to the inner walls of the fine openings, a pump two 1720 is bolted to the outer part of the heat collecting box 1716, and the output end of the pump two 1720 is connected to one of the flow guide pipes 1706 through a circular pipe; the ends of the two flow guide pipes 1706 away from the heat collecting box 1716 are bolted to the same hollow sleeve 1705, the flow guide pipes 1706 are in communication with the hollow sleeve 1705, the hollow sleeve 1705 is located outside the feed pipe 15, and a heat preservation sleeve 1707 is arranged outside the hollow sleeve 1705.

[0038] Specifically, the electric motor 112 is started, the electric motor 112 drives the screw rod 111 to rotate, the molybdenum powder in the feeding hopper 16 is pushed into the reactor body 11 through the feeding pipe 15, the fluorine gas is delivered into the reactor body 11 through the gas delivery pipe 14, the electric heating pipe 110 is started, when the molybdenum powder and the fluorine gas in the reactor body 11 react to generate the molybdenum hexafluoride gas at high temperature, the gas blocked by the flow resistance plate 1701 flows upward through the conical hole 1702 and flows out from the exhaust pipe 13, the snowflake-shaped heat conduction plate 1708 absorbs the heat in the gas and heats the heat conduction oil in the heat collecting cylinder 1703, the motor one 1709 is started, the motor one 1709 drives the stirring paddle 1710 to rotate and stirs the heat conduction oil, the pump one 1715 is started, the pump one 1715 circulates the heat conduction oil in the collecting box 1713 and the heat collecting cylinder 1703 through the delivery pipe 1711, so that the heat is transferred to the heat conduction oil in the heat collecting box 1716 by the heat evenly plate 1714, the hydraulic rod 1719 is started, the output end of the hydraulic rod 1719 is elongated or shortened to control the depth of the heat evenly plate 1714 inserted into the heat collecting box 1716, the pump two 1720 is started, the pump two 1720 circulates the heat conduction oil in the heat collecting box 1716 and the hollow sleeve 1705 through the flow guide pipe 1706 to preheat the raw material molybdenum powder in the feeding pipe 15.

[0039] In a specific application scenario, the waste heat recovery and utilization module 17 is mainly suitable for the waste heat recovery and utilization link in the waste heat recovery and utilization process, that is, the waste heat recovery and utilization module 17 can make the device fully absorb the waste heat in the molybdenum hexafluoride gas flowing out from the conical hole 1702 by using the snowflake-shaped heat conduction plate 1708 and the stirring paddle 1710, the snowflake-shaped heat conduction plate 1708 with a large contact area improves the heat absorption efficiency of the device, and the two isolated heat conduction systems formed by the heat collecting cylinder 1703, the collecting box 1713, the heat evenly plate 1714 and the heat collecting box 1716 effectively control the preheating temperature of the molybdenum powder, which ensures the reaction effect of the molybdenum powder and the fluorine gas and avoids the waste of raw materials caused by the premature reaction of the molybdenum powder with oxygen in the air due to over-heating in the feeding pipe 15.

[0040] Reference Figure 6 and Figure 7In a preferred embodiment, the reaction enhancement module 18 comprises a ring-shaped frame 1801 located below the conical hole 1702, the outer wall of the ring-shaped frame 1801 is bolted to the inner wall of the reactor body 11, the inner wall of the ring-shaped frame 1801 is bolted to a plurality of circumferentially equidistantly distributed stabilizing springs 1802, the ends of the plurality of stabilizing springs 1802 away from the ring-shaped frame 1801 are bolted to the same fine mesh sieve 1803, and the upper side of the fine mesh sieve 1803 is bolted to a connecting frame 1804; the upper side of the connecting frame 1804 is bolted to an elliptical ring 1805, the upper side of the elliptical ring 1805 is provided with a driving motor 1807, the outer side of the driving motor 1807 is bolted to a heat shield 1808, the outer side of the heat shield 1808 is bolted to the inner wall of the reactor body 11, and the output end of the driving motor 1807 is connected to a cam 1806 through a shaft coupling, the cam 1806 is located in the elliptical ring 1805, and the outer side of the cam 1806 is in contact with the inner wall of the elliptical ring 1805; a ring-shaped pipe 1809 is arranged in the reactor body 11, the ring-shaped pipe 1809 is in communication with the gas conveying pipe 14, the outer side of the ring-shaped pipe 1809 is provided with a plurality of circumferentially equidistantly distributed short pipes, the upper side of each short pipe is bolted to a microporous diffusion head 1810, the microporous diffusion head 1810 is located below the fine mesh sieve 1803, and the upper side of the ring-shaped frame 1801 is provided with a cleaning module 19.

[0041] Specifically, after the molybdenum powder in the feeding pipe 15 falls into the fine mesh sieve 1803, the driving motor 1807 is started, the driving motor 1807 drives the cam 1806 to rotate, so that the cam 1806 is in contact with the short radius inner wall of the elliptical ring 1805 constantly, thereby causing the elliptical ring 1805 to drive the fine mesh sieve 1803 to shake uniformly, so that the molybdenum powder falls from the fine mesh sieve 1803 uniformly and densely, and contacts the fluorine gas diffused from the microporous diffusion head 1810 in the high temperature, and the generated molybdenum hexafluoride gas flows upward from the orifice of the ring-shaped frame 1801.

[0042] In a specific application scenario, the reaction enhancement module 18 is mainly applied to the reaction enhancement link in the reaction enhancement process, that is, the reaction enhancement module 18 can make the fine mesh sieve 1803 uniformly distribute the molybdenum powder by using the cam 1806 and the elliptical ring 1805, increase the floating time of the molybdenum powder in the reactor body 11, make the fluorine gas diffused from the microporous diffusion head 1810 fully mix with the molybdenum powder, significantly increase the contact area of the fluorine gas and the molybdenum powder, improve the reaction effect of the molybdenum powder and the fluorine gas, thereby reducing the generation rate of non-target gas or impurities and improving the reaction effect.

[0043] Reference Figure 8In a preferred embodiment, the cleaning module 19 comprises a fixed ring 1901, the outer wall of which is bolted to the inner wall of the reactor body 11, the inner wall of which is bolted to an inner tooth ring 1902, the inner wall of the fixed ring 1901 is slidingly connected to a mounting frame 1903, which is located below the fixed ring 1901, the inner wall of the mounting frame 1903 is bolted to a rotating motor 1904, the output end of the rotating motor 1904 is connected to a gear 1905 through a shaft coupling, and the gear 1905 is engaged with the fixed ring 1901; the bottom of the mounting frame 1903 is bolted to a scraper 1906, the outer wall of which is in contact with the inner wall of the reactor body 11, and the bottom of the scraper 1906 is slidingly connected to the upper side of the annular frame 1801.

[0044] Specifically, after the reactor body 11 is used for a period of time, a layer of solid impurities mixed with elemental molybdenum and molybdenum tetrafluoride will gradually adhere to the inner wall of the reactor body 11. Start the rotating motor 1904, the rotating motor 1904 drives the gear 1905 engaged with the inner tooth ring 1902 to rotate, so that the mounting frame 1903 moves along the inner wall of the fixed ring 1901, so that the scraper 1906 can scrape off the solid impurities adhering to the inner wall of the reactor body 11.

[0045] In a specific application scenario, the cleaning module 19 is mainly suitable for the cleaning link in the cleaning process, that is, the cleaning module 19 can make the scraper 1906 quickly and conveniently clean the impurities on the inner wall of the reactor body 11 by using the inner tooth ring 1902 and the gear 1905, thereby reducing the influence of impurities on the reaction when the reactor body 11 reacts to generate molybdenum hexafluoride gas, and effectively ensuring the purity of the target gas generated in the reactor body 11.

[0046] Working principle: start the motor 112, the motor 112 drives the screw rod 111 rotation, the molybdenum powder in the feeding hopper 16 is pushed into the reactor body 11 through the feeding pipe 15, the fluorine gas is transported into the reactor body 11 using the gas delivery pipe 14, the electric heating pipe 110 is started, when the molybdenum powder and fluorine gas in the reactor body 11 react to generate molybdenum hexafluoride gas at high temperature, the gas blocked by the baffle 1701 flows upward through the conical hole 1702 and flows out from the exhaust pipe 13, the snowflake-shaped heat-conducting plate 1708 absorbs the heat in the gas and heats the heat-conducting oil in the heat collecting cylinder 1703, the motor 1709 is started, the motor 1709 drives the stirring paddle 1710 to rotate and stirs the heat-conducting oil, the pump 1715 is started, the pump 1715 circulates the heat-conducting oil in the collecting box 1713 and the heat collecting cylinder 1703 through the delivery pipe 1711, so that the heat is transferred to the heat-conducting oil in the heat collecting box 1716 by the heat-conducting plate 1714, the hydraulic rod 1719 is started, the output end of the hydraulic rod 1719 is extended or shortened to control the depth of the heat-conducting plate 1714 inserted into the heat collecting box 1716, the pump 1720 is started, the pump 1720 circulates the heat-conducting oil in the heat collecting box 1716 and the hollow sleeve 1705 through the flow guide pipe 1706 to preheat the raw material molybdenum powder in the feeding pipe 15, after the molybdenum powder in the feeding pipe 15 falls into the fine hole sieve 1803, the drive motor 1807 is started, the drive motor 1807 drives the cam 1806 to rotate, so that the cam 1806 is in contact with the inner wall of the short radius of the elliptical ring 1805, so that the elliptical ring 1805 drives the fine hole sieve 1803 to produce uniform shaking, the molybdenum powder falls from the fine hole sieve 1803 and contacts with the fluorine gas diffused from the microporous diffusion head 1810 at high temperature, the generated molybdenum hexafluoride gas flows upward from the orifice of the annular frame 1801, after the reactor body 11 is used for a period of time, a layer of solid impurities mixed with molybdenum and molybdenum tetrafluoride is gradually attached to the inner wall of the reactor body 11, the rotating motor 1904 is started, the rotating motor 1904 drives the gear 1905 engaged with the inner tooth ring 1902 to rotate, so that the mounting frame 1903 moves along the inner wall of the fixed ring 1901, so that the scraper 1906 can scrape off the solid impurities attached to the inner wall of the reactor body 11.

[0047] The above merely describes the preferred embodiments of the present application, but the protection scope of the present application is not limited to this. Any person skilled in the art can make equivalent replacements or changes according to the technical solution and the inventive concept of the present application within the technical range disclosed by the present application, which should be covered by the protection scope of the present application.

Claims

1. A high-purity electronic-grade molybdenum hexafluoride reactor, characterized in that, include: Reactor body (11); Top cover (12), the bottom of the top cover (12) is fixedly connected to the upper side of the reactor body (11), and an exhaust pipe (13) is provided on the upper side of the top cover (12). Gas delivery pipe (14) is located on reactor body (11). A circular hole is provided on the outside of reactor body (11), and the inner wall of the circular hole is fixedly connected to the outside of gas delivery pipe (14). Feed pipe (15), the feed pipe (15) is located on top cover (12), the top cover (12) has an opening on the outside, the inner wall of the opening is fixedly connected to the outside of the feed pipe (15), a screw rod (111) is provided inside the feed pipe (15), a motor (112) is fixedly connected to the outside of the feed pipe (15), the output end of the motor (112) is connected to one end of the screw rod (111) through a coupling, and a feeding hopper (16) is provided on the feed pipe (15). The heating element (110) is located inside the reactor body (11); Waste heat recovery and utilization module (17) is located on reactor body (11). The waste heat recovery and utilization module (17) is used to recover and reuse the heat contained in the molybdenum hexafluoride gas generated by the high-purity electronic-grade molybdenum hexafluoride reactor. The waste heat recovery and utilization module (17) includes a baffle plate (1701). The outside of the baffle plate (1701) is fixedly connected to the inner wall of reactor body (11). The baffle plate (1701) is provided with a conical hole (1702). A heat collection cylinder (1703) is installed above the conical hole (1702). Two symmetrical hangers (1704) are fixedly connected to the upper side of the heat collection cylinder (1703). The outside of the hangers (1704) is fixedly connected to the inner wall of the reactor body (11). The bottom of the heat collection cylinder (1703) is provided with multiple circumferentially distributed grooves. Snowflake-shaped heat-conducting plates (1708) are fixedly connected to the inner wall of each groove. A fine hole is provided on the upper side of the heat collection cylinder (1703). An agitator (1710) is movably connected in the fine hole. The upper side of the heat collection cylinder (1703) is fixedly connected to a motor (1709), and the output end of the motor (1709) is connected to the upper side of the stirring paddle (1710) through a coupling. Two symmetrical slots are opened on the outside of the heat collection cylinder (1703), and a conveying pipe (1711) is fixedly connected in each slot. The ends of the two conveying pipes (1711) away from the heat collection cylinder (1703) pass through the top cover (12) and are fixedly connected to the same collection box (1713). The collection box (1713) is located at Outside the reactor body (11), the collecting box (1713) is connected to the conveying pipe (1711). The bottom of the collecting box (1713) has multiple rectangular openings that are evenly distributed. Each rectangular opening is fixedly connected to a heat spreader (1714). The outside of the multiple heat spreaders (1714) is provided with the same support frame (1712). The upper side of the support frame (1712) is fixedly connected to the bottom of the collecting box (1713). The support frame (1712) is fixedly connected to the side opposite to the reactor body (11).Pump 1 (1715) is fixedly connected to the outside of the collection box (1713). The output end of pump 1 (1715) is connected to one of the delivery pipes (1711) through a conduit. Multiple heat spreaders (1714) are slidably connected to the same heat collection box (1716). A support platform (1717) is fixedly connected to the bottom of the heat collection box (1716). A base (1718) is provided below the support platform (1717). The base (1718) is fixed on the side opposite to the reactor body (11). The base (1718) is connected to two symmetrical hydraulic rods (1719) fixedly connected to the upper side. The output ends of the hydraulic rods (1719) are fixedly connected to the bottom of the support (1717). The heat collection box (1716) has two symmetrical narrow openings on the outside. The inner walls of the narrow openings are fixedly connected to guide pipes (1706). The heat collection box (1716) is fixedly connected to the outside of the pump (1720). The output end of the pump (1720) is connected to one of the guide pipes (1706) through a round pipe. The reaction enhancement module (18) is located inside the reactor body (11) and is used to increase the contact area between fluorine gas and molybdenum powder in the high-purity electronic grade molybdenum hexafluoride reactor.

2. The high-purity electronic-grade molybdenum hexafluoride reactor according to claim 1, characterized in that, The two guide pipes (1706) are fixedly connected to the same hollow sleeve (1705) at the ends away from the heat collection box (1716). The guide pipes (1706) are all connected to the hollow sleeve (1705). The hollow sleeve (1705) is located outside the feed pipe (15), and the hollow sleeve (1705) is provided with a heat insulation sleeve (1707) on the outside.

3. The high-purity electronic-grade molybdenum hexafluoride reactor according to claim 1, characterized in that, The reaction enhancement module (18) includes an annular frame (1801), which is located below the conical hole (1702). The outer side of the annular frame (1801) is fixedly connected to the inner wall of the reactor body (11). Multiple circumferentially distributed stabilizing springs (1802) are fixedly connected to the inner wall of the annular frame (1801). The ends of the multiple stabilizing springs (1802) away from the annular frame (1801) are fixedly connected to the same fine-mesh sieve (1803), and a connecting frame (1804) is fixedly connected to the upper side of the fine-mesh sieve (1803).

4. A high-purity electronic-grade molybdenum hexafluoride reactor according to claim 3, characterized in that, An elliptical ring (1805) is fixedly connected to the upper side of the connecting frame (1804). A drive motor (1807) is arranged above the elliptical ring (1805). A heat insulation cover (1808) is fixedly connected to the outside of the drive motor (1807). The outside of the heat insulation cover (1808) is fixedly connected to the inner wall of the reactor body (11). The output end of the drive motor (1807) is connected to a cam (1806) through a coupling. The cam (1806) is located inside the elliptical ring (1805), and the outside of the cam (1806) is in contact with the inner wall of the elliptical ring (1805).

5. A high-purity electronic-grade molybdenum hexafluoride reactor according to claim 3, characterized in that, The reactor body (11) is provided with an annular tube (1809), which is connected to the gas supply pipe (14). Multiple short tubes are arranged circumferentially at equal intervals on the outside of the annular tube (1809). Microporous diffusers (1810) are fixedly connected to the upper side of each short tube. The microporous diffusers (1810) are all located below the fine sieve (1803), and a cleaning module (19) is provided above the annular frame (1801).

6. A high-purity electronic-grade molybdenum hexafluoride reactor according to claim 5, characterized in that, The cleaning module (19) includes a fixed ring (1901), the outside of which is fixedly connected to the inner wall of the reactor body (11), an internal toothed ring (1902) is fixedly connected to the inner wall of the fixed ring (1901), and an installation frame (1903) is slidably connected to the inner wall of the fixed ring (1901). The installation frame (1903) is located below the fixed ring (1901), and a rotating motor (1904) is fixedly connected to the inner wall of the installation frame (1903). The output end of the rotating motor (1904) passes through the installation frame (1903) and is connected to a gear (1905) via a coupling, and the gear (1905) meshes with the fixed ring (1901).

7. A high-purity electronic-grade molybdenum hexafluoride reactor according to claim 6, characterized in that, The bottom of the mounting frame (1903) is fixedly connected to a scraper (1906), and the outside of the scraper (1906) is in contact with the inner wall of the reactor body (11). The bottom of the scraper (1906) is slidably connected to the upper side of the annular frame (1801).

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