Target correction method
The target correction method of applying stepped pressure in different areas and detecting components solves the deformation problem of metal targets due to thermal expansion and contraction, achieves efficient restoration of target flatness and uniformity of film quality, and is suitable for automated production lines.
Patent Information
- Application Number
- CN202511025062.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-07-24
- Publication Date
- 2025-09-23
AI Technical Summary
After welding, the metal target material deforms due to thermal expansion and contraction, resulting in an uneven sputtering surface and affecting the quality and performance of the film layer.
A target correction method with stepped pressure in different areas is adopted. Different orders of downward pressure are applied to the two ends and the middle area of the target in the length direction through the correction component. The curvature is measured in real time in combination with the detection component, and the correction is automatically adjusted and repeated until it is qualified.
It effectively restores the flatness of the target material, ensures high precision of the sputtering surface, avoids uneven film thickness, simplifies the operation process, adapts to complex deformation modes, is easy to automate and integrate, and reduces manual dependence.
Smart Images
Figure CN120679868A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of material processing, and in particular to a target material correction method. Background Art
[0002] In the sputtering process for thin-film coating, the target is the material bombarded by an ion beam during the sputtering process. The ion beam sputters atoms from the target, which then deposit on the substrate surface, forming the desired thin film. The target is the source of the film material during the sputtering process, and its quality and performance directly affect the quality of the final film.
[0003] Currently, in practical applications, targets are typically welded to a backing plate to meet the requirements of the sputtering process. However, due to the physical properties of metal targets, thermal expansion and contraction are inevitable. After welding, different areas of the target may deform relative to the backing plate during subsequent processing, transportation, and use due to factors such as ambient temperature fluctuations.
[0004] However, deformation will cause the sputtering surface of the target material to be uneven, and the uneven sputtering surface will cause the sputtered particles to be unevenly distributed on the substrate surface, which will in turn make the film layer formed on the substrate inconsistent in thickness and structure, seriously affecting the performance and quality of the film layer, and unable to meet the film quality requirements of high-precision, high-performance products. Summary of the Invention
[0005] The purpose of the present invention is to provide a target material correction method to solve the technical problem in the prior art that metal target materials may be deformed, resulting in an uneven sputtering surface and affecting product performance.
[0006] As conceived above, the technical solution adopted by the present invention is:
[0007] A target material correction method, comprising:
[0008] Step 1: Place the product on the workbench;
[0009] Step 2: applying a first-order downward pressure to the two end areas of the product in the length direction through a correction component to correct it;
[0010] Step 3: Applying a second-stage downward force to the middle area of the product in the longitudinal direction through the correction component for correction;
[0011] Step 4: measuring the curvature of the product surface by a detection component, and classifying the curvature as qualified or unqualified;
[0012] If the curvature state is qualified, the correction process is completed;
[0013] If the curvature state is unqualified, repeat steps 2 and 3.
[0014] Preferably, in step 4, after measurement by the detection component, if the curvature of the product surface in the length direction is between -1 mm and 3 mm, it indicates that the curvature state of the product is qualified.
[0015] Preferably, the detection component includes a feeler gauge and a plane reference table. In step 4, measuring the curvature state of the product surface by the detection component includes:
[0016] The product is transferred and placed flat on the planar reference table, and the feeler gauge is used to measure the gap value between the surface of the product and the reference plane of the planar reference table. The gap value is the bending amount.
[0017] Preferably, in step 4, the product is transferred and placed flat on the planar reference platform by a forklift, and an elastic buffer layer is provided on the contact surface between the fork tines of the forklift and the product.
[0018] Preferably, in step 2 and step 3, the first-stage pressing force and the second-stage pressing force are independently controlled, and the deformation of the product in a single pressing operation does not exceed 5% of the thickness of the product.
[0019] Preferably, in step 2, the two end regions of the product in the length direction are:
[0020] A symmetrical area is formed by extending a first distance value from both ends of the product in the length direction toward the center of the product, wherein the first distance value is 10% to 15% of the entire length of the product.
[0021] Preferably, in step 3, the middle area in the length direction of the product is:
[0022] A symmetrical area is formed by extending a second distance value from the center of the product in the longitudinal direction to both ends of the product, wherein the second distance value is 5% of the entire length of the product.
[0023] Preferably, in step 4, the corrections of step 2 and step 3 are repeated no more than three times. If the curvature of the product surface is still unqualified after three executions, the correction operation is stopped.
[0024] Preferably, the correction component is a hydraulic device, which includes at least one output end, and the output end can move towards or away from the product, thereby applying downward pressure on the product.
[0025] Preferably, the output end of the hydraulic equipment is provided with a sensor, and the sensor is used to monitor the downward pressure value and downward pressure rate applied by the hydraulic equipment to the product.
[0026] Beneficial effects of the present invention:
[0027] The target correction method proposed in the present invention is to first place the product on a workbench to establish a reference, and then implement the correction in two stages. First, the correction component applies a first-order downward pressure to the two end areas in the length direction of the product to specifically eliminate the warping deformation caused by welding stress or insufficient edge support; then the second-order downward pressure is applied to the middle area to effectively improve the depression or bulge in the central area caused by thermal deformation. This strategy of applying pressure in different areas matches the uneven characteristics of the actual deformation of the target material, avoids the imbalance of stress distribution caused by overall pressure, and improves the pertinence and efficiency of deformation correction. After the pressure is applied, the curvature state of the product surface is measured in real time by the detection component. If the curvature is qualified, it is directly output to ensure that the sputtering surface meets the flatness standard required for high-precision coating; if it is unqualified, the correction steps are automatically repeated. Through multiple iterative correction operations, the residual deformation of the product surface is gradually eliminated to avoid the problem of uneven film thickness caused by insufficient single correction accuracy. This target correction method can not only efficiently restore the flatness of the target material, but its adaptive circulation mechanism is more compatible with complex deformation modes caused by multiple factors such as processing and transportation. At the same time, the operation process is simple and easy to integrate into the automated production line, reducing dependence on manual experience, and has high adaptability and practicality. BRIEF DESCRIPTION OF THE DRAWINGS
[0028] Figure 1 is a flow chart of a target material correction method provided by an embodiment of the present invention;
[0029] Figure 2 It is a structural schematic diagram of a workbench and hydraulic equipment provided by an embodiment of the present invention.
[0030] In the picture:
[0031] 1. Workbench; 2. Hydraulic equipment; 3. Product. DETAILED DESCRIPTION
[0032] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to explain the present invention, but are not to be construed as limiting the present invention.
[0033] In the description of the present invention, unless otherwise expressly specified or limited, the terms "connected," "connected," and "fixed" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediate medium; and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention in specific circumstances.
[0034] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Furthermore, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.
[0035] The technical solution of the present invention will be further described below with reference to the accompanying drawings and through specific implementation methods.
[0036] See also Figure 1 and Figure 2 The target material correction method provided by the embodiment of the present invention includes step 1, placing the product 3 on the workbench 1; step 2, applying a first-order downward pressure to the two end areas of the product 3 in the length direction through the correction component for correction; step 3, applying a second-order downward pressure to the middle area of the length direction of the product 3 through the correction component for correction; step 4, measuring the curvature state of the surface of the product 3 through the detection component, and the curvature state is divided into qualified or unqualified; if the curvature state is qualified, the correction process is completed; if the curvature state is unqualified, repeat steps 2 and 3.
[0037] The target correction method proposed in the present invention first places the product 3 on the workbench 1 to establish a reference, and then implements the correction in two stages. First, the correction component applies a first-order downward pressure to the two end areas of the product 3 in the longitudinal direction to specifically eliminate the warping deformation caused by welding stress or insufficient edge support; then a second-order downward pressure is applied to the middle area to effectively improve the depression or bulge in the central area caused by thermal deformation. This strategy of applying pressure in different areas matches the uneven characteristics of the actual deformation of the target material, avoids the imbalance of stress distribution caused by overall pressure, and improves the pertinence and efficiency of deformation correction. After the pressure is applied, the surface curvature of the product 3 is measured in real time by the detection component. If the curvature is qualified, it is directly output to ensure that the sputtering surface meets the flatness standard required for high-precision coating; if it is unqualified, the correction steps are automatically repeated. Through multiple iterative correction operations, the residual deformation on the surface of the product 3 is gradually eliminated to avoid the problem of uneven film thickness caused by insufficient single correction accuracy. This target correction method can not only efficiently restore the flatness of the target material, but its adaptive circulation mechanism is more compatible with complex deformation modes caused by multiple factors such as processing and transportation. At the same time, the operation process is simple and easy to integrate into the automated production line, reducing dependence on manual experience, and has high adaptability and practicality.
[0038] The specific steps and working principle of the target correction method are described below.
[0039] Step 1: Place product 3 on workbench 1.
[0040] Specifically, during target correction, the first step is to place product 3 (i.e., the target assembly with a welded backing plate) on workbench 1. As the supporting foundation for the entire correction process, workbench 1 must possess sufficient stability and flatness to ensure that subsequent correction operations are not affected by any shaking or unevenness of workbench 1. When placing product 3, ensure its precise positioning, ensuring that product 3 is within the appropriate area of workbench 1, allowing subsequent correction components to precisely apply pressure to the target.
[0041] Step 2: Apply the first-order downward pressure to the two end areas of the product 3 in the length direction through the correction component for correction.
[0042] Specifically, the two end regions of the product 3 in the longitudinal direction are defined as symmetrical regions extending from both ends of the product 3 in the longitudinal direction to the center of the product 3 by a first distance, where the first distance is 10% to 15% of the overall length of the product 3. Since welding residual stress and thermal deformation are typically most pronounced within 15% of the edge of the product 3, this design allows the first-order downward pressure to be concentrated on the areas with the most severe actual deformation, avoiding wasting pressure resources in low-deformation areas and improving the targeted correction of warpage at the ends of the product 3. This prevents a range that is too small, resulting in ineffective correction of deformation caused by thermal expansion and contraction at the ends of the target material; and prevents a range that is too large, resulting in unnecessary downward pressure being applied to areas, causing overcorrection or affecting the performance of other parts of the product 3. This area setting helps improve the targetedness and effectiveness of target correction, allowing the target material, after correction, to better meet the flatness requirements of the sputtering process, thereby improving the quality of the film layer on the substrate during the sputtering process.
[0043] Optionally, the correction component uses a hydraulic device 2, which includes at least one output end, and the output end can move in a direction close to or away from the product 3, thereby applying downward pressure on the product 3.
[0044] In actual operation, the initial position of the output end of hydraulic equipment 2 must be appropriately adjusted based on factors such as the size, material, and estimated degree of deformation of product 3, ensuring that it accurately applies pressure to the area of product 3 that requires correction. Hydraulic equipment 2 is activated, and the output end is controlled to move toward product 3, slowly applying downward pressure while closely monitoring the deformation adjustment of product 3. After correction is complete, the output end is controlled to move away from product 3 to facilitate subsequent inspection or further correction. Throughout this process, effective correction of product 3 is achieved through precise control of the movement of the output end of hydraulic equipment 2.
[0045] Furthermore, the output end of the hydraulic device 2 is provided with a sensor, which is used to monitor the downward pressure value and downward pressure rate applied by the hydraulic device 2 to the product 3 .
[0046] When performing the downward pressure correction operation, the output end first drops to a position close to the surface of product 3, and then a controllable pressure is applied to the output end through the hydraulic system to make it stably contact the designated area of product 3. The contact surface between the output end and product 3 adopts a flexible pressure-bearing design to ensure uniform pressure distribution and avoid local stress concentration that damages product 3. During the pressure application process, the sensor monitors the pressure value and downward pressure rate of the output end in real time, and dynamically adjusts the output force and downward pressure rate according to the preset pressure threshold to achieve precise loading and maintenance of pressure. After the downward pressure is completed, the output end is automatically raised to a safe height to facilitate the detection of the component for bending measurement or entering the next cycle. This hydraulic drive method ensures precise targeted pressure on different deformation areas through the controllable stroke and pressure adaptive adjustment of the output end, while avoiding the risk of cracking of product 3 caused by mechanical rigid impact, thereby improving the controllability and safety of the correction process.
[0047] Step 3: Apply a second-stage downward pressure to the middle area of the length direction of the product 3 through the correction component for correction.
[0048] Specifically, the middle area of the product 3 in the longitudinal direction is: a symmetrical area formed by extending a second distance value from the center of the product 3 in the longitudinal direction to both ends of the product 3, wherein the second distance value is 5% of the overall length of the product 3.
[0049] It is understandable that the downward pressure correction process of the product 3 in step three is the same as that in step two. The only difference is the different action position of the output end of the hydraulic equipment 2, which will not be described here.
[0050] Preferably, in steps 2 and 3, the first-stage downward pressure and the second-stage downward pressure are independently controlled, enhancing the flexibility and precision of the correction process. Because the degree of deformation due to thermal expansion and contraction often differs between the end and middle regions of product 3 along its length, independently controlling the pressure allows for precise application of a corrective force tailored to the actual deformation conditions of each region. For example, if the deformation of the end regions is significant, the first-stage downward pressure can be appropriately increased; if the deformation of the middle region is relatively small, the second-stage downward pressure can be precisely adjusted to an appropriate level, effectively improving the correction effect and ensuring that all regions of product 3 receive the desired flatness correction.
[0051] Furthermore, the deformation of Product 3 during a single press does not exceed 5% of its thickness, thus protecting it. Target materials typically possess specific physical and mechanical properties. Excessive deformation during a single press may damage Product 3's internal structure, affecting its physical properties and service life, and, in turn, the quality of the film during subsequent sputtering processes. Keeping the deformation during a single press within a reasonable range ensures that each correction improves Product 3's flatness while avoiding irreversible damage to Product 3 caused by overcorrection. This balance between efficient correction and protecting Product 3's performance helps improve the reliability and stability of the entire Product 3 correction process.
[0052] It's worth noting that the first-stage and second-stage downforces utilize differentiated pressure strategies tailored to the different deformation zones of Product 3: The first-stage downforce acts on both ends of Product 3's length, primarily addressing edge warping caused by residual welding stress. Its pressure is set primarily to overcome rigid edge deformation. The second-stage downforce acts on the center, focusing on correcting central depression or bulge caused by thermal expansion and contraction. The pressure is appropriately lowered based on the material's inherent deformability. The specific pressure values for the first and second stages should be adjusted and selected based on actual conditions and are not specified here.
[0053] Step 4: Measure the curvature of the surface of product 3 through the detection component. The curvature is classified as qualified or unqualified. If the curvature is qualified, the correction process is completed. If the curvature is unqualified, repeat steps 2 and 3.
[0054] Specifically, after measurement by the detection component, if the curvature of the surface of Product 3 in the longitudinal direction is between -1mm and 3mm, the curvature of Product 3 is considered acceptable. This range is scientifically defined based on the core requirement of target flatness in the sputtering coating process. The lower limit of the curvature is -1mm, which allows for a slight concavity to avoid reverse deformation of the target due to overcorrection. The upper limit of the curvature is 3mm, which allows for a slight convexity to ensure uniform coverage of the sputtered particle flow on the substrate surface. This eliminates the risk of subjective errors caused by traditional manual visual inspection or empirical judgment. When the curvature is within this range, it not only ensures the uniformity of the film thickness to meet the requirements of high-performance Product 3, but also takes into account a reasonable tolerance for material stress release, avoiding target fatigue damage caused by repeated pressure in pursuit of absolute flatness. This design not only ensures coating quality, but also optimizes correction efficiency, reduces ineffective repetitive work, and provides a key quality control basis for industrial applications.
[0055] Among them, the curvature refers to the flatness deviation of the target sputtering surface in the length direction, which is used to quantitatively characterize the degree of deformation of the target surface. Its specific meaning is: when the product 3 is placed flat on the reference plane, the maximum vertical deviation of its sputtering surface relative to the ideal plane. If part of the surface of the product 3 is concave downward, the curvature is expressed as a negative value; if part of the surface of the product 3 is bulging upward, the curvature is expressed as a positive value. For example, a curvature of -1mm means that the maximum center depression depth is 1 mm, and a curvature of 3mm means that the maximum center bulge height is 3 mm. This indicator directly determines the spatial distribution uniformity of the sputtering particle flow. Excessive curvature will lead to inconsistent distances between the target surface and the substrate, resulting in uneven film thickness.
[0056] More specifically, the detection component includes a feeler gauge and a plane reference table. In step four, measuring the curvature state of the surface of product 3 through the detection component includes: transferring product 3 and placing it flat on the plane reference table, using a feeler gauge to measure the gap value between the surface of product 3 and the reference plane of the plane reference table, and the gap value is the curvature amount.
[0057] The specific operation process is to first transfer the product 3 that has completed the pressure correction to the flat reference table to ensure that the bottom surface of the product 3 is completely in contact with the surface of the reference table. The operator then uses a feeler gauge to measure the maximum gap value between the surface of the product 3 and the reference surface of the flat reference table. This gap value directly corresponds to the bending amount of the surface of the product 3. When measuring, multiple key points need to be selected along the length direction of the product 3, and measuring pieces of feeler gauges of different thicknesses are inserted into the gaps in turn. When the measuring piece is in close contact with the gap and there is no looseness, the thickness value at that position is recorded as the local bending amount. Finally, the maximum deviation value of all measuring points is taken as the basis for judgment. If the value is between -1mm and 3mm, the curvature is judged to be qualified; if it exceeds this range, the correction process is repeated.
[0058] Preferably, in step 4, the product 3 is transferred and placed flat on the flat base using a forklift. An elastic buffer layer is provided between the contact surface between the forklift's tines and the product 3. Forklifts have a strong handling capacity and can efficiently and quickly transfer the product 3 to its proper location, improving operational efficiency. Furthermore, the elastic buffer layer provided between the forklift's tines and the product 3 effectively prevents the forklift's tines from damaging the surface of the product 3 during transfer.
[0059] In addition, in step 4, the correction of steps 2 and 3 is repeated no more than three times. If the curvature state of the surface of product 3 is still unqualified after three times, the correction operation is stopped. Setting the correction of steps 2 and 3 to no more than three times can effectively prevent the risk of target damage caused by over-correction. Since metal materials may produce fatigue stress or microcracks under repeated pressure, this number limit is based on the scientific threshold of the mechanical properties of the material. It can not only gradually release the deformation stress through multiple iterations, but also avoid structural damage caused by infinite cycle pressure. The design of three cycles fully takes into account the effectiveness of the correction. If product 3 still does not meet the standard after three staged pressures, it indicates that its deformation may be caused by irreversible factors (such as material defects or welding failures). At this time, stopping the operation can be timely transferred to the scrapping or rework process to avoid invalid operations occupying production line resources. While maintaining the correction accuracy, this limit helps to optimize the overall production process, improve the overall rationality and scientificity of the correction process of product 3, and ensure that the produced product 3 can more efficiently and stably meet the needs of subsequent sputtering processes.
[0060] The above embodiments merely illustrate the basic principles and features of the present invention. The present invention is not limited to the above embodiments. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention. Such changes and modifications are intended to fall within the scope of the present invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.
Claims
1. A target material correction method, characterized in that: include: Step 1: Place the product (3) on the workbench (1); Step 2: applying a first-order downward pressure to the two end regions of the product (3) in the longitudinal direction by a correction component to correct the product (3); Step 3: applying a second-order downward pressure to the middle area of the product (3) in the longitudinal direction through the correction component to correct it; Step 4: measuring the curvature of the surface of the product (3) by a detection component, and the curvature is classified as qualified or unqualified; If the curvature state is qualified, the correction process is completed; If the curvature state is unqualified, repeat steps 2 and 3.
2. The target correction method according to claim 1, characterized in that: In the step 4, after measurement by the detection component, if the curvature of the surface of the product (3) in the longitudinal direction is between -1 mm and 3 mm, it indicates that the curvature state of the product (3) is qualified.
3. The target correction method according to claim 2, characterized in that: The detection component includes a feeler gauge and a plane reference table. In the step 4, measuring the curvature state of the surface of the product (3) by the detection component includes: The product (3) is transferred and placed flat on the plane reference table, and the feeler gauge is used to measure the gap value between the surface of the product (3) and the reference plane of the plane reference table. The gap value is the bending amount.
4. The target correction method according to claim 3, characterized in that: In the fourth step, the product (3) is transferred by a forklift and placed flat on the plane reference platform, and an elastic buffer layer is provided on the contact surface between the fork tines of the forklift and the product (3).
5. The target correction method according to claim 1, characterized in that: In the second step and the third step, the first-stage pressing force and the second-stage pressing force are independently controlled, and the single pressing deformation of the product (3) does not exceed 5% of the thickness of the product (3).
6. The target correction method according to claim 1, characterized in that: In the step 2, the two end areas of the product (3) in the length direction are: A symmetrical area is formed by extending a first distance value from both ends of the length direction of the product (3) toward the center of the product (3), wherein the first distance value is 10% to 15% of the entire length of the product (3).
7. The target correction method according to claim 1, characterized in that: In step 3, the middle area of the length direction of the product (3) is: A symmetrical area is formed by extending a second distance value from the center of the length direction of the product (3) to both ends of the product (3), wherein the second distance value is 5% of the entire length of the product (3).
8. The target correction method according to claim 1, wherein: In the step 4, the correction of the steps 2 and 3 is repeated no more than three times. If the curvature of the surface of the product (3) is still unqualified after three times, the correction operation is stopped.
9. The target correction method according to claim 1, characterized in that: The correction component uses a hydraulic device (2), and the hydraulic device (2) includes at least one output end, and the output end can move in a direction close to or away from the product (3), thereby applying downward pressure to the product (3).
10. The target correction method according to claim 9, characterized in that: The output end of the hydraulic device (2) is provided with a sensor, and the sensor is used to monitor the downward pressure value and downward pressure rate applied by the hydraulic device (2) to the product (3).