Silicon carbide crystal growth apparatus and method of growing the same

Abstract

The application discloses a silicon carbide crystal growth equipment and a growth method thereof, and belongs to the field of silicon carbide crystal growth. The equipment comprises a cabinet, a conveying component, a lower furnace body and a gas supply box arranged in the cabinet. The conveying component comprises a rack and a first driving module connected to the rack. The silicon carbide crystal growth equipment and the growth method thereof can trigger the driving component to rotate to act on the heating component to make the heating ring part separate from the heating of the upper furnace body to reduce the temperature in the upper furnace body when the gas pressure in the upper furnace body rises. According to the thermal expansion and contraction principle, the expansion speed of the gas in the upper furnace body can be slowed down after the temperature in the upper furnace body is reduced. When the driving component rotates, the gas inlet amount in the pressure stabilizing pipe can be quickly adjusted through the gas pressure balancing component to reduce the gas inlet amount in the pressure stabilizing pipe.

Description

TECHNICAL FIELD

[0001] The present application belongs to the field of silicon carbide crystal growth, and particularly relates to a silicon carbide crystal growth device and a growth method thereof. BACKGROUND

[0002] Most semiconductor integrated circuit crystals are grown by a physical vapor transport method (PVT method), and the basic crystal growth principle is that raw materials are placed at the bottom of a graphite crucible, the crucible is heated by an induction coil using the skin effect, the raw materials are decomposed into gas after reaching a certain temperature, and the gas volatilizes to the seed crystal area at the top of the crucible, SiC is generated through a series of chemical reactions, and the SiC is crystallized on the surface of the seed crystal through a certain axial and radial temperature gradient, so that a single crystal silicon carbide with a certain structure is obtained.

[0003] When the silicon carbide crystal is grown in the growth furnace, a certain gas pressure needs to be introduced into the growth furnace and a certain temperature needs to be applied externally to promote the growth of the silicon carbide crystal. However, when the gas pressure is introduced into the growth furnace and heated, the gas pressure will rise at a certain time point of the growth of the silicon carbide crystal, which will affect the normal growth of the silicon carbide crystal. How to balance the gas pressure in the growth furnace has become a technical problem to be solved.

[0004] The present application attempts to alleviate or at least mitigate such problems or deficiencies by providing new or otherwise improved silicon carbide crystal growth. SUMMARY

[0005] In view of one or more of the above deficiencies or improvement needs of the prior art, the present application provides a silicon carbide crystal growth device and a growth method thereof, which has the advantage of being able to maintain the balance of the gas pressure in the growth furnace.

[0006] To achieve the above-mentioned purpose, the present application provides a silicon carbide crystal growth device, which comprises a cabinet, a conveying member, a lower furnace body and a gas supply box are arranged in the cabinet, the conveying member is composed of a rack, a first pushing module connected to the rack, and a second pushing module connected to the first pushing module, the second pushing module has an upper furnace body thereon, the gas supply box has a pressure stabilizing pipe thereon, one end of the pressure stabilizing pipe has a hose capable of penetrating into the upper furnace body, and the device further comprises:

[0007] A heating member is arranged on the upper furnace body;

[0008] A driving member is arranged on the cabinet, the driving member comprises a base arranged on the cabinet, a rotating drum arranged on the base, a gear disc and a driving ring arranged on the rotating drum, and the driving ring has a first protruding section and a second protruding section thereon;

[0009] A communication member is arranged on the lower furnace body;

[0010] A gas pressure balancing member is arranged on the driving member, which comprises:

[0011] A machine frame is arranged on the driving member, a push plate is slidably arranged in the machine frame, a rack section is arranged at one end of the push plate, a roller and an embedded rod are arranged on the push plate, a second spring is arranged on the embedded rod;

[0012] A follower rod is arranged in the machine frame, a balancing member is arranged on the follower rod;

[0013] A gas releasing member is arranged on the machine frame, which can be driven when the push plate moves.

[0014] As a further improvement of the present application, the communication member comprises:

[0015] A communication pipe is arranged on the lower furnace body, and the communication pipe and the lower furnace body are in communication with each other;

[0016] An embedded block is slidably arranged in the communication pipe, a push rod capable of penetrating out of the communication pipe is arranged on the embedded block;

[0017] A first spring is sleeved on the push rod, and the first spring is located between the embedded block and the communication pipe;

[0018] A toothed plate is arranged at a tail end of the push rod, and the toothed plate and the toothed disc are in engagement with each other at the initial position.

[0019] As a further improvement of the present application, the heating member comprises:

[0020] A support rod is arranged on the machine case, a sliding rod is slidably sleeved on the support rod, a heating ring is arranged on the sliding rod, and the heating ring can be sleeved on the upper furnace body;

[0021] A screw rod cylinder is arranged on the heating ring

[0022] A screw rod is arranged on the rotating cylinder, and the screw rod can be rotatably inserted into the screw rod cylinder.

[0023] As a further improvement of the present application, an annular sealing gasket is arranged at the bottom of the upper furnace body, the annular sealing gasket can penetrate into the lower furnace body when the upper furnace body and the lower furnace body are combined, a pressure relief valve can be detachably installed on the upper furnace body, a baffle is arranged on the body of the pressure relief valve, a tension spring is arranged on the baffle, and the tension spring and the handle end of the pressure relief valve are connected with each other.

[0024] As a further improvement of the present application, at the initial position, the smooth section of the driving ring is in abutment with the roller, and the caliber size of the second protruding section is larger than the caliber size of the first protruding section.

[0025] As a further improvement of the present application, the balancing member comprises:

[0026] A sleeve is arranged on the machine frame, and a balancing rod is slidably arranged in the sleeve;

[0027] A third spring is sleeved on the balancing rod;

[0028] An incomplete column wheel is slidably arranged in the sleeve, and the incomplete column wheel is connected with the balancing rod;

[0029] A gear is arranged on the follow-up rod, and the gear can be engaged with a rack segment of the push plate, and a driving rod is arranged on the gear;

[0030] A pressure control plate is arranged on the balancing rod.

[0031] As a further improvement of the present application, the incomplete column wheel has a first flat groove, a transition groove and a second flat groove, and the first flat groove is located above the second flat groove, and the driving rod is in contact with the first flat groove in the initial position, and the driving rod can be driven to sequentially pass through the first flat groove, the transition groove and the second flat groove after the gear rotates.

[0032] As a further improvement of the present application, the pressure control plate can pass through the pressure stabilizing pipe, and the pressure control plate has a first through hole and a second through hole, the diameter of the first through hole is larger than the diameter of the second through hole, and the airflow passing through the pressure stabilizing pipe can be reduced when the first through hole is switched to the second through hole.

[0033] As a further improvement of the present application, the air release member comprises:

[0034] A base disc is arranged on the machine frame;

[0035] A swing rod is rotatably arranged on the base disc, a fourth spring is arranged on the swing rod, and the fourth spring is connected with the base disc;

[0036] A boss is arranged on the swing rod, and a stepped surface is formed between the boss and the swing rod;

[0037] A rotating wheel is rotatably arranged on the base disc, a tail support and a lower support are connected with the rotating wheel, the tail support is in contact with the stepped surface in the initial position, and the lower support is located on one side of the push plate;

[0038] A linkage rod is rotatably arranged on the base disc, a pressing rod is rotatably arranged on the linkage rod, and the pressing rod is located above the pressure release valve handle end in the initial position.

[0039] Another technical problem to be solved by the present application is a growth method of a silicon carbide crystal growth device,

[0040] S1, feeding silicon carbide crystal: placing the silicon carbide crystal in the lower furnace body, opening the conveying member to make the upper furnace body and the lower furnace body close;

[0041] S2, heating and pressurizing the lower furnace body and the upper furnace body: opening the heating member to complete the heating operation of the upper furnace body, and opening the gas tank to complete the gas pressurizing operation of the upper furnace body;

[0042] S3, triggering the driving member: after the lower furnace body is heated and pressurized, the gas pressure increases sharply, which can drive the communication member to move left to drive the gear disc and the driving ring to rotate;

[0043] S4, triggering the gas pressure balancing member: after the driving ring rotates, it can drive the first protruding section to rotate, and when the first protruding section touches the gas pressure balancing member, the gas pressure balancing member acts on the pressure stabilizing pipe to complete the gas pressure balancing control operation of the pressure stabilizing pipe;

[0044] S5, triggering the gas release member: when the gas pressure balancing member is pushed back, the gas release member is triggered to act on the pressure relief valve to balance the gas pressure in the upper furnace body;

[0045] S6, pushing the heating member: after the rotating drum rotates, the heating member is pushed upward to separate from the upper furnace body to reduce the heating operation of the upper furnace body.

[0046] Overall, the above technical solutions conceived by the present application have the following beneficial effects compared with the prior art:

[0047] The silicon carbide crystal growth equipment and its growth method can trigger the driving member to rotate to act on the heating member to separate the heating ring from the heating of the upper furnace body to reduce the temperature in the upper furnace body when the gas pressure in the upper furnace body rises. According to the principle of thermal expansion and contraction, when the temperature in the upper furnace body decreases, the expansion speed of the gas in the upper furnace body can be slowed down. When the driving member rotates, the gas inlet amount in the pressure stabilizing pipe can be quickly adjusted by the gas pressure balancing member to realize the reduction of the gas inlet amount in the pressure stabilizing pipe to balance the gas pressure in the upper furnace body. If the first gas pressure balancing fails, the second gas pressure balancing operation can be automatically started to quickly open the pressure relief valve to complete the pressure reduction balancing based on the first gas pressure balancing to keep the pressure of the upper furnace body and the lower furnace body at a constant value, which is beneficial to the growth of silicon carbide crystal. BRIEF DESCRIPTION OF DRAWINGS

[0048] Figure 1The structure schematic diagram of the whole silicon carbide crystal growth equipment of the present application;

[0049] Figure 2 The structure schematic diagram of the silicon carbide crystal growth equipment of the present application from another angle;

[0050] Figure 3 The structure schematic diagram of the lower furnace body and the heating member of the present application in combination;

[0051] Figure 4 The structure schematic diagram of the communication member of the present application;

[0052] Figure 5 The structure schematic diagram of the driving member and the air pressure balance member of the present application in abutment;

[0053] Figure 6 The structure schematic diagram of the whole driving member of the present application;

[0054] Figure 7 The structure schematic diagram of the air pressure balance member and the air release member of the present application in combination;

[0055] Figure 8 The structure schematic diagram of the air pressure balance member and the air release member of the present application in combination from another angle;

[0056] Figure 9 The structure schematic diagram of the air pressure balance member and the air release member of the present application in separation;

[0057] Figure 10 The structure schematic diagram of the whole balance member of the present application.

[0058] In all the drawings, the same reference signs represent the same technical features, specifically:

[0059] 1, the case;

[0060] 2, the conveying member; 21, the rack; 22, the first pushing module; 23, the second pushing module;

[0061] 3, the lower furnace body; 31, the upper furnace body; 32, the pressure release valve;

[0062] 4, the heating member; 41, the support rod; 42, the sliding rod; 43, the heating ring; 44, the screw rod cylinder; 45, the screw rod;

[0063] 5, the gas feeding tank; 51, the pressure stabilizing pipe; 52, the hose;

[0064] 6, the driving member; 61, the base; 62, the rotating cylinder; 63, the toothed disc; 64, the driving ring; 65, the first protruding section; 66, the second protruding section;

[0065] 7, communication member; 71, communication pipe; 72, inlay block; 73, push rod; 74, first spring; 75, toothed plate;

[0066] 8, air pressure balancing member; 81, machine frame; 82, push plate; 83, roller; 84, inlay rod; 85, second spring; 86, follow-up rod; 87, balancing member; 871, sleeve; 872, balancing rod; 873, third spring; 874, incomplete column wheel; 875, gear wheel; 876, drive rod; 877, pressure control plate;

[0067] 9, air release member; 91, base disc; 92, swing rod; 93, fourth spring; 94, boss; 95, rotating wheel; 96, tail support; 97, lower support; 98, linkage rod; 99, pressure rod. DETAILED DESCRIPTION

[0068] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments of the present application. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without any creative work fall within the protection scope of the present application.

[0069] The terms used herein are only used for describing the specific embodiments, and are not intended to limit the present application. The terms "comprise", "contain", and the like used herein indicate the existence of the described features, steps, operations and / or components, but do not exclude the existence or addition of one or more other features, steps, operations or components.

[0070] All the terms used herein (including technical and scientific terms) have the meanings generally understood by those skilled in the art, unless otherwise defined. It should be noted that the terms used herein should be interpreted to have meanings consistent with the context of the present specification, and should not be interpreted in an idealized or overly formal manner.

[0071] In the embodiments, by Figures 1-10The utility model provides a silicon carbide crystal growth equipment, including a cabinet 1, being equipped with a conveying component 2, a lower furnace body 3 and a gas supply tank 5 in the cabinet 1, the conveying component 2 is formed by a rack 21, the first push module 22 connected on the rack 21, the second push module 23 connected on the first push module 22, having a upper furnace body 31 on the second push module 23, having a pressure stabilizing tube 51 on the gas supply tank 5, having a hose 52 that can penetrate into the upper furnace body 31 on the one end of pressure stabilizing tube 51, further including: heating component 4, which is provided on the upper furnace body 31, drive component 6, which is provided on the cabinet 1, drive component 6 includes the base 61 provided on the cabinet 1, having a rotating drum 62 on the base 61, having a gear disc 63 and a drive ring 64 on the rotating drum 62, having a first convex section 65 and a second convex section 66 on the drive ring 64, communication component 7, which is provided on the lower furnace body 3, gas pressure balance component 8, which is provided on the drive component 6, gas pressure balance component 8 includes: machine frame 81, which is provided on the drive component 6, having a push plate 82 slidingly arranged in the machine frame 81, having a rack section on the one end of push plate 82, having a roller 83 and an embedded rod 84 on push plate 82, having a second spring 85 on the embedded rod 84, follow-up rod 86, which is provided in the machine frame 81, having a balance piece 87 on the follow-up rod 86, gas release component 9, which is provided on the machine frame 81, which can be driven when push plate 82 moves.

[0072] One of the overall ideas based on the present application is that, through the arrangement of the communication member 7, since the communication pipe 71 is in communication with the lower furnace body 3 at the beginning, after the gas pressure in the lower furnace body 3 increases, it can push the embedded block 72 to move left, after the embedded block 72 moves left, it can drive the push rod 73 to move left, it can make the tooth plate 75 move left, after the tooth plate 75 moves left, it can drive the rotating drum 62 and the tooth disc 63 to rotate, and then drive the lead screw 45 to rotate, after the lead screw 45 rotates, it can drive the lead screw cylinder 44 to rotate and move up in the lead screw 45, and then drive the heating ring 43 to move up, so that the heating ring 43 partially separates from the heating of the upper furnace body 31, so as to reduce the temperature in the upper furnace body 31, according to the principle of thermal expansion and contraction, after the temperature in the upper furnace body 31 decreases, it can slow down the expansion speed of the gas in the upper furnace body 31, so that the gas pressure in the upper furnace body 31 is in a balanced state, through the arrangement of the gas pressure balancing member 8, after the driving ring 64 rotates, it can drive the first protruding section 65 to rotate, after the first protruding section 65 contacts the roller 83 to make the roller 83 quickly move backward, after the roller 83 moves backward, it can push the rack section of the push plate 82 to drive the gear 875 to rotate, and at the initial position, the first through hole of the pressure control plate 877 is ventilated, after the driving rod 876 rotates, it can pass along the first flat groove and the transition groove, after the driving rod 876 passes along the second flat groove, it can push the pressure control plate 877 to move up, and can block part of the first through hole, so as to reduce the gas injected into the upper furnace body 31 by the pressure stabilizing pipe 51, so as to maintain the balance of the gas in the upper furnace body 31, if the gas pressure balance in the upper furnace body 31 cannot be maintained, at this time the driving ring 64 will continue to rotate, so that the second protruding section 66 continues to contact the roller 83 to speed up the movement of the gear 875, so that the driving rod 876 moves to the second flat groove, so that the incomplete cylindrical wheel 874 continues to move up, and the first through hole is completely converted to the second through hole, so as to reduce the gas injected into the upper furnace body 31 again, in addition, when the push plate 82 is withdrawn as a whole, it can also push the gas discharge member 9 to move as a whole, through the arrangement of the gas discharge member 9, when the push plate 82 is withdrawn as a whole to drive the gas discharge member 9 to move, it can quickly push the lower support 97 to move right, after the lower support 97 moves right, it can make the rotating wheel 95 turn over, after the rotating wheel 95 turns over, it can push the tail support 96 to press the stepped surface, so that the swing rod 92 turns over, after the swing rod 92 turns over, it can push and pull the linkage rod 98 to turn over to the right, so that the pressure rod 99 presses the handle end of the pressure relief valve 32 and makes the pressure relief valve 32 release gas to reduce the gas pressure in the upper furnace body 31, so as to realize the balance of the gas pressure in the upper furnace body 31, after the gas pressure is balanced, the communication member 7, the gas pressure balancing member 8 and the gas discharge member 9 can return to the initial position as a whole.

[0073] Next, the communication member 7 as a whole is endowed with a more specific structure and configuration to further explain and illustrate, the communication member 7 includes: a communication pipe 71, which is arranged on the lower furnace body 3, and the communication pipe 71 and the lower furnace body 3 are communicated with each other; an embedded block 72, which is slidably arranged in the communication pipe 71, and a push rod 73 capable of passing out of the communication pipe 71 is arranged on the embedded block 72; a first spring 74, which is sleeved on the push rod 73, and the first spring 74 is located between the embedded block 72 and the communication pipe 71; a tooth plate 75, which is arranged at one end of the push rod 73, and the tooth plate 75 is engaged with the tooth disc 63 in the initial position;

[0074] Next, the principle and effect of the use of the communication member 7 as a whole are further explained and illustrated. Since the communication pipe 71 is communicated with the lower furnace body 3 at the beginning, when the gas pressure in the lower furnace body 3 increases, the embedded block 72 is pushed to move left, the push rod 73 is moved left after the embedded block 72 moves left, the tooth plate 75 is moved left, the rotating drum 62 and the tooth disc 63 are rotated after the tooth plate 75 moves left, and the screw rod 45 is rotated, the screw rod cylinder 44 is rotated and moved up in the screw rod 45 after the screw rod 45 rotates, and the heating ring 43 is moved up, so that the heating ring 43 is partially separated from the heating of the upper furnace body 31, so as to reduce the temperature in the upper furnace body 31. According to the principle of thermal expansion and contraction, when the temperature in the upper furnace body 31 decreases, the expansion speed of the gas in the upper furnace body 31 is slowed down, so that the gas pressure in the upper furnace body 31 is in a balanced state.

[0075] Next, the heating member 4 as a whole is endowed with a more specific structure and configuration to further explain and illustrate. The heating member 4 includes: a support rod 41, which is arranged on the case 1, a sliding rod 42 is slidably sleeved on the support rod 41, a heating ring 43 is arranged on the sliding rod 42, and the heating ring 43 can be sleeved on the upper furnace body 31; a screw rod cylinder 44 is arranged on the heating ring 43, and a screw rod 45 is arranged on the rotating drum 62, and the screw rod 45 can be rotatably inserted into the screw rod cylinder 44;

[0076] Next, the principle and effect of the use of the heating member 4 as a whole are further explained and illustrated. When the rotating drum 62 rotates, the screw rod 45 rotates, so that the screw rod cylinder 44 and the heating ring 43 move up as a whole, the heating ring 43 is partially separated from the upper furnace body 31, so that the temperature in the upper furnace body 31 can decrease in unit time, the expansion efficiency of the gas in the upper furnace body 31 is reduced, and the gas pressure in the upper furnace body 31 is in a balanced state.

[0077] In some embodiments, in order to further improve the sealing effect between the upper furnace body 31 and the lower furnace body 3, the upper furnace body 31 is provided with a ring-shaped sealing gasket at the bottom, which can penetrate into the lower furnace body 3 when the upper furnace body 31 is combined with the lower furnace body 3. A pressure relief valve 32 is detachably installed on the upper furnace body 31. The pressure relief valve 32 is provided with a baffle on the body, and a tension spring is connected between the baffle and the handle end of the pressure relief valve 32.

[0078] In some embodiments, more specifically, in order to enable the first protruding section 65 to displace the roller 83 when it collides with the roller 83, the smooth section of the drive ring 64 is in contact with the roller 83 in the initial position, and the caliber of the second protruding section 66 is larger than that of the first protruding section 65.

[0079] Next, a more specific structure and configuration of the air pressure balancing member 8 is further explained. The balancing member 87 includes a sleeve 871 arranged on the frame 81, a balancing rod 872 slidably arranged in the sleeve 871, a third spring 873 sleeved on the balancing rod 872, an incomplete column wheel 874 slidably arranged in the sleeve 871 and connected with the balancing rod 872, a gear 875 arranged on the follower rod 86 and capable of meshing with the rack section of the push plate 82, a drive rod 876 arranged on the gear 875, and a pressure control plate 877 arranged on the balancing rod 872.

[0080] It should be noted that after the drive ring 64 rotates, the first protruding section 65 rotates, and when the first protruding section 65 collides with the roller 83, the roller 83 quickly moves backward. When the roller 83 moves backward, it pushes the rack section of the push plate 82 to pull the gear 875 to rotate. In the initial position, the first through hole of the pressure control plate 877 is ventilated. After the drive rod 876 rotates, it moves along the first flat groove and the transition groove. When the drive rod 876 moves along the second flat groove, it pushes the pressure control plate 877 to move upward, and the first through hole is partially blocked, so that the gas injected into the upper furnace body 31 through the pressure stabilizing pipe 51 is reduced, so as to maintain the balance of the gas in the upper furnace body 31. If the air pressure balance in the upper furnace body 31 cannot be maintained, the drive ring 64 will continue to rotate, so that the second protruding section 66 continues to collide with the roller 83 to accelerate the movement of the gear 875, so that the drive rod 876 moves to the second flat groove, so that the incomplete column wheel 874 continues to move upward, and the first through hole is completely converted to the second through hole, so as to reduce the gas injected into the upper furnace body 31 again. In addition, when the push plate 82 moves backward as a whole, the air release member 9 also moves as a whole.

[0081] In some embodiments, in order to further facilitate the movement of the driving rod 876 along the incomplete column wheel 874, the incomplete column wheel 874 is provided with a first flat groove, a transition groove and a second flat groove, and the first flat groove is located above the second flat groove. In the initial position, the driving rod 876 is in contact with the first flat groove, and after the gear 875 rotates, the driving rod 876 can pass through the first flat groove, the transition groove and the second flat groove in sequence.

[0082] In some embodiments, more specifically, in order to control the amount of gas injected into the pressure stabilizing tube 51, the pressure control plate 877 can pass through the pressure stabilizing tube 51, and the pressure control plate 877 is provided with a first through hole and a second through hole. The diameter of the first through hole is larger than that of the second through hole, and when the first through hole is switched to the second through hole, the gas flow passing through the pressure stabilizing tube 51 can be reduced.

[0083] Next, the overall structure and configuration of the air release member 9 will be further explained. The air release member 9 includes a base disc 91 arranged on the machine frame 81, a swing rod 92 rotatably arranged on the base disc 91, a fourth spring 93 arranged on the swing rod 92 and connected between the swing rod 92 and the base disc 91, a boss 94 arranged on the swing rod 92 and forming a stepped surface between the boss 94 and the swing rod 92, a rotating wheel 95 rotatably arranged on the base disc 91, a tail support 96 and a lower support 97 connected to the rotating wheel 95, the tail support 96 abutting against the stepped surface in the initial position, and the lower support 97 located on one side of the push plate 82, and a linkage rod 98 rotatably arranged on the base disc 91, a pressing rod 99 rotatably arranged on the linkage rod 98, and the pressing rod 99 located above the handle end of the pressure relief valve 32 in the initial position.

[0084] Next, the overall use principle and effect of the air release member 9 will be further explained. When the push plate 82 as a whole retreats and drives the air release member 9 to move, the lower support 97 can be quickly pushed to move to the right, the rotating wheel 95 can be turned over after the lower support 97 moves to the right, the tail support 96 can be pushed to press the stepped surface after the rotating wheel 95 turns over, the swing rod 92 can be turned over after the tail support 96 presses the stepped surface, the linkage rod 98 can be turned over to the right after the swing rod 92 turns over, and the pressing rod 99 can press the handle end of the pressure relief valve 32 and make the pressure relief valve 32 release gas to reduce the air pressure in the upper furnace body 31 to achieve air pressure balance in the upper furnace body 31. After the air pressure is balanced, the communication member 7, the air pressure balancing member 8 and the air release member 9 as a whole can return to the initial position. After the upper furnace body 31 and the lower furnace body 3 complete the constant temperature and constant pressure environment, the silicon carbide crystals in the upper furnace body 31 and the lower furnace body 3 can be efficiently grown.

[0085] Another technical problem to be solved by the present application is a growth method of a silicon carbide crystal growth device,

[0086] S1, feeding silicon carbide crystal: placing the silicon carbide crystal in the lower furnace body 3, opening the conveying member 2 to make the upper furnace body 31 and the lower furnace body 3 close;

[0087] S2, heating and pressurizing the lower furnace body 3 and the upper furnace body 31: opening the heating member 4 to complete the heating operation of the upper furnace body 31, opening the gas tank 5 to complete the gas pressurizing operation of the upper furnace body 31;

[0088] S3, triggering the driving member 6: after the lower furnace body 3 is heated and pressurized, the gas pressure increases sharply, which can drive the communication member 7 to move left, driving the gear disc 63 and the driving ring 64 to rotate;

[0089] S4, triggering the gas pressure balancing member 8: after the driving ring 64 rotates, it can drive the first protruding section 65 to rotate, and when the first protruding section 65 contacts the gas pressure balancing member 8, the gas pressure balancing member 8 can act on the pressure stabilizing pipe 51 to complete the gas pressure balancing control operation of the pressure stabilizing pipe 51;

[0090] S5, triggering the gas release member 9: when the gas pressure balancing member 8 is pushed back, the gas release member 9 can be triggered to act on the pressure relief valve 32 to balance the gas pressure in the upper furnace body 31;

[0091] S6, pushing the whole heating member 4: after the rotating drum 62 rotates, the heating member 4 can be pushed up to separate from the upper furnace body 31, thereby reducing the heating operation of the upper furnace body 31.

[0092] Although the embodiments of the present application have been shown and described, it can be understood by those skilled in the art that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and spirits of the present application, and the scope of the present application is defined by the appended claims and their equivalents.

Claims

1. A silicon carbide crystal growth apparatus, comprising a chassis, wherein a conveying component, a lower furnace body, and a gas supply box are disposed within the chassis; the conveying component comprises a frame, a first pushing module connected to the frame, and a second pushing module connected to the first pushing module; an upper furnace body is disposed on the second pushing module; a pressure stabilizing pipe is disposed on the gas supply box; and a flexible tube is disposed at one end of the pressure stabilizing pipe, capable of penetrating into the upper furnace body; characterized in that... Also comprising: a heating member arranged on the upper furnace body; a driving member arranged on the machine box, the driving member comprising a base arranged on the machine box, a rotating drum arranged on the base, a gear disc and a driving ring arranged on the rotating drum, the driving ring having a first protruding section and a second protruding section; a communication member arranged on the lower furnace body; an air pressure balance member arranged on the driving member, the air pressure balance member comprising: a machine frame arranged on the driving member, a push plate slidingly arranged in the machine frame, a rack section arranged on one end of the push plate, a roller and an embedded rod arranged on the push plate, a second spring arranged on the embedded rod; a follower rod arranged in the machine frame, the follower rod having a balance member arranged thereon; an air release member arranged on the machine frame, the air release member being capable of being driven when the push plate moves; the balance member comprising: a sleeve arranged on the machine frame, a balance rod slidingly arranged in the sleeve; a third spring sleeved on the balance rod; an incomplete column wheel slidingly arranged in the sleeve and connected between the balance rod and the sleeve; a gear arranged on the follower rod, the gear being capable of being engaged with the rack section of the push plate, the gear having a driving rod; a pressure control plate arranged on the balance rod; the air release member comprising: a base disc arranged on the machine frame; a swing rod rotatably arranged on the base disc, the swing rod having a fourth spring arranged thereon and connected between the swing rod and the base disc; a boss arranged on the swing rod, the boss and the swing rod forming a stepped surface therebetween; a rotating wheel rotatably arranged on the base disc, the rotating wheel having a tail support and a lower support connected thereto, the tail support abutting against the stepped surface in an initial position, and the lower support being located on one side of the push plate; a linkage rod rotatably arranged on the base disc, the linkage rod having a pressing rod rotatably arranged thereon, the pressing rod being located above the handle end of the pressure release valve in an initial position.

2. The silicon carbide crystal growth apparatus of claim 1, wherein, the communication member comprising: a communication pipe arranged on the lower furnace body and in communication with the lower furnace body; an embedded block slidingly arranged in the communication pipe, the embedded block having a push rod capable of being pushed out of the communication pipe; a first spring sleeved on the push rod and located between the embedded block and the communication pipe; a toothed plate arranged on one end of the push rod, the toothed plate being engaged with the gear disc in an initial position.

3. The silicon carbide crystal growth apparatus of claim 2, wherein, the heating member comprising: a support rod arranged on the machine box, a sliding rod slidingly sleeved on the support rod, a heating ring arranged on the sliding rod, and the heating ring being capable of being sleeved on the upper furnace body; a lead screw cylinder arranged on the heating ring; a lead screw arranged on the rotating drum and capable of being rotatably inserted into the lead screw cylinder.

4. The silicon carbide crystal growth apparatus of claim 3, wherein, the upper furnace body has a ring-shaped sealing gasket at the bottom, the ring-shaped sealing gasket being capable of being pushed into the lower furnace body when the upper furnace body is combined with the lower furnace body, and a pressure release valve being detachably installed on the upper furnace body, the pressure release valve having a baffle on the body, the baffle having a tension spring connected with the handle end of the pressure release valve.

5. The silicon carbide crystal growth apparatus of claim 4, wherein, wherein, In the initial position, the smooth section of the driving ring is in contact with the roller, and the caliber of the second protruding section is larger than that of the first protruding section.

6. The silicon carbide crystal growth apparatus of claim 5, wherein, The incomplete column wheel has a first flat groove, a transition groove and a second flat groove, and the first flat groove is above the second flat groove. In the initial position, the driving rod is in contact with the first flat groove. After the gear rotates, the driving rod can pass through the first flat groove, the transition groove and the second flat groove in turn.

7. The silicon carbide crystal growth apparatus of claim 6, wherein, The control plate can pass through the pressure stabilizing pipe. The control plate has a first through hole and a second through hole. The caliber of the first through hole is larger than that of the second through hole. When the first through hole is converted to the second through hole, the air flow passing through the pressure stabilizing pipe can be reduced.

8. A growth method of the silicon carbide crystal growth device according to any one of claims 1-7, characterized in that, S1, feeding of the silicon carbide crystal: placing the silicon carbide crystal in the lower furnace body, and opening the conveying member to make the upper furnace body and the lower furnace body close; S2, heating and pressurizing of the lower furnace body and the upper furnace body: opening the heating member to complete the heating operation of the upper furnace body, and opening the gas filling box to complete the gas filling and pressurizing operation of the upper furnace body; S3, triggering of the driving member: after the lower furnace body is heated and pressurized, the gas pressure increases sharply, which can drive the communication member to move left, drive the gear disc and the driving ring to rotate; S4, triggering of the gas pressure balancing member: after the driving ring rotates, the first protruding section is driven to rotate. When the first protruding section contacts the gas pressure balancing member, the gas pressure balancing member acts on the pressure stabilizing pipe to complete the gas pressure balancing control operation of the pressure stabilizing pipe; S5, triggering of the gas releasing member: after the gas pressure balancing member is pushed back, the gas releasing member is triggered to act on the pressure relief valve to release the pressure in the upper furnace body to balance the gas pressure; S6, pushing operation of the heating member: after the rotating drum rotates, the heating member is pushed upward to separate from the upper furnace body, thereby reducing the heating operation of the upper furnace body.

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