Mounting device for butt joint of cavity and machine table and semiconductor equipment

Abstract

The invention discloses an installation device for butt joint of a cavity and a machine table and semiconductor equipment, relates to the technical field of semiconductor equipment, and aims to solve the problem that butt joint of an integrated machine table cavity and a wafer conveying machine table is difficult. The cavity is movably arranged on a bearing structure, a positioning pin is arranged on one side of the cavity and is arranged in a pin hole of the machine table in a pluggable mode, and the positioning pin is arranged in the bearing structure; the mounting device comprises a guide assembly, the guide assembly comprises a guide rail and a guide structure slidably arranged along the guide rail, the guide rail and the machine table are arranged on the same plane, the guide rail corresponds to the side, provided with the pin hole, of the machine table, the guide structure is arranged at the bottom of the bearing structure, and the guide structure is configured to be capable of sliding into the guide rail to limit the positions of the bearing structure and the machine table; the leveling assembly is arranged on the bearing structure and used for adjusting the levelness of the cavity, the cavity is provided with a positioning hole, the leveling assembly is provided with a positioning assembly, and the positioning assembly is arranged in the positioning hole in a pluggable mode, so that efficient butt joint of the cavity and the machine table is achieved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor equipment, and more specifically, to an installation device for docking a chamber with a machine and a semiconductor device. Background Art

[0002] The installation and deployment of epitaxial equipment is a critical step in the semiconductor manufacturing process. Traditional epitaxial equipment is typically shipped in a non-integrated manner, with the chamber, power supply cabinet, and control cabinet components assembled and installed at the customer's site. This installation method involves leveling the chamber, then aligning and docking the entire machine using locating pins on the rear of the chamber and pin holes on the wafer transfer platform. While flexible, this installation method requires significant time and labor during on-site assembly and requires high precision.

[0003] To meet the demands of rapid deployment and shorten customer-side installation time, modern epitaxial equipment tends to adopt an integrated assembly design. Most of the assembly work for the integrated machine is pre-completed in the factory to reduce the complexity of on-site installation. However, this design also brings new challenges. The weight of the integrated machine increases significantly, making it difficult to control the start, stop, and direction during the pushing and docking process. This not only increases the difficulty of docking the machine chamber with the wafer conveyor, but can also lead to laborious operation, time-consuming installation, and low success rates. In addition, due to the increased weight and inertia, there is also a risk of damaging the installation surface, which in turn has a negative impact on the installation progress and product quality.

[0004] Therefore, how to solve the problem of difficulty in docking the integrated machine chamber and the wafer transfer machine is an urgent problem to be solved by those skilled in the art. Summary of the Invention

[0005] The present application discloses an installation device for docking a chamber and a machine, which is used to solve the problem of difficulty in docking the integrated machine chamber and the film transfer machine. By setting up the installation device, the positioning and guidance of the machine chamber during installation can be made more convenient and safe, so as to achieve efficient docking of the machine chamber and the film transfer machine.

[0006] In the first aspect, the present application provides an installation device for docking a chamber and a machine, wherein the chamber is movably arranged on a supporting structure, and a positioning pin is provided on one side of the chamber, and the positioning pin is pluggable and arranged in a pin hole of the machine, and the installation device includes: a guide assembly, the guide assembly includes a guide rail and a guide structure sliding along the guide rail, the guide rail is used to be arranged in the same plane as the machine, and corresponds to the side of the machine with a pin hole, the guide structure is arranged at the bottom of the supporting structure, and the guide structure is configured to be able to slide into the guide rail to limit the position of the supporting structure and the machine; a leveling assembly is provided on the supporting structure, the leveling assembly is used to adjust the level of the chamber, the chamber is provided with a positioning hole, a positioning assembly is provided on the leveling assembly, and the positioning assembly is pluggable and arranged in the positioning hole. By moving the supporting structure, the chamber is driven to move synchronously. During the movement, the guide structure of the supporting structure slides along the guide rail to limit the moving trajectory of the supporting structure, guiding the movement of the supporting structure, so as to control the moving direction of the supporting structure and reduce the difficulty of docking the integrated chamber and the machine. After the guide structure slides to the bottom along the guide rail, the position of the supporting structure relative to the machine is fixed. On this basis, the horizontality of the chamber is adjusted by the leveling assembly so that the locating pin of the chamber is aligned with the pin hole of the machine, the positioning assembly is pulled out from the locating hole of the chamber, and the chamber is pushed so that the locating pin of the chamber is inserted into the pin hole of the machine, thereby completing the effective docking of the chamber and the machine.

[0007] In one possible embodiment, the guide structure includes a fixed portion, a guide portion, and a connecting portion for connecting the fixed portion and the guide portion. The fixed portion is connected to the bottom of the support structure, and the guide portion is slidably arranged along a guide rail. The fixed portion is provided to achieve connection with the support structure. The guide portion cooperates with the guide rail to enable the support structure to move along a specified trajectory, thereby guiding the movement of the support structure and facilitating control of the direction of movement of the support structure. The connecting portion connects the fixed portion and the guide portion, and at the same time, stress is dispersed between the fixed portion and the guide portion, thereby avoiding structural damage that may be caused by stress concentration.

[0008] In one possible embodiment, the connecting portion is perpendicular to the middle of the fixing portion and the guide portion, the connecting portion is provided with a stop hole, and the guide rail is provided with a stop pin, which is removably mounted in the stop hole. When the guide portion slides along the guide rail to a specific position, the stop pin can be inserted into the stop hole to achieve precise positioning, thereby improving positioning reliability.

[0009] In one possible embodiment, the guide portion is a plate-like structure with an opening provided therein. One end of the opening communicates with a side edge of the plate-like structure, and the other end of the opening is tapered. The shape of the outer edge of the guide rail matches the shape of the opening, allowing the opening to slide along the outer edge of the guide rail. The tapered opening better adapts to changes in the shape of the guide rail, allowing the opening to closely fit and slide along the outer edge of the guide rail. This ensures that the guide portion maintains a precise fit with the guide rail during movement, avoids shaking or jamming caused by shape mismatch, improves the accuracy and reliability of the guide, and ensures smooth operation of the entire guide structure.

[0010] In one possible embodiment, the central axis of the opening is collinear with the central axis of the plate-like structure. This symmetrical design allows the guide portion to receive force more evenly as it slides along the guide rail, better maintaining linear motion and ensuring that the guide portion does not deflect or wobble during movement, thereby improving guidance accuracy and stability.

[0011] In one possible embodiment, a reinforcement plate is provided between the fixed portion and the guide portion, connecting the bottom of the fixed portion and the top of the guide portion. This reinforcement plate effectively distributes and supports the forces exerted on the guide portion as it slides along the guide rail, enhancing the rigidity of the entire guide structure, enabling it to withstand greater external forces without deformation or damage, thereby improving the stability and reliability of the entire structure.

[0012] In one possible embodiment, at least two reinforcement plates are provided, symmetrically positioned on either side of the guide portion. The symmetrical reinforcement plates can evenly distribute the forces acting on the guide portion and the fixing portion throughout the entire structure, allowing the entire structure to share the load, rather than relying solely on the guide portion or the fixing portion. This improves the structure's load-bearing capacity and reduces the risk of structural damage due to excessive local forces.

[0013] In one possible embodiment, flanges extending outward are provided on both sides of the guide rail, with the bottom ends of the flanges and the bottom ends of the guide rails located on the same horizontal plane. Four casters are provided at the bottom of the supporting structure, with the distance between the two casters closest to the machine being consistent with the distance between the outer edges of the flanges on both sides of the guide rails, so that the casters slide along the outer edges of the flanges. The flanges on both sides of the guide rails cooperate with the casters at the bottom of the supporting structure, allowing the casters to slide along the outer edges of the flanges, providing a clear guide path for the movement of the supporting structure and ensuring that the supporting structure remains stable during movement without tilting or deviating from the predetermined track. The operator only needs to push the supporting structure into the direction of the guide rail, and the casters will automatically align and slide along the outer edges of the flanges, reducing the time and effort of manual position adjustment, allowing the supporting structure to be quickly positioned at the designated position, and improving operational efficiency.

[0014] In one possible embodiment, the leveling assembly includes a mounting frame that is horizontally fixed to the supporting structure. The mounting frame is provided with at least two positioning assemblies, each comprising a support block and a knob screw mounted on the support block. The knob screw is retractable on the support block in a direction perpendicular to the horizontal direction. The knob plunger is initially extended, with the top of the knob plunger above the top of the support block. The knob plunger is then pulled down and rotated 90 degrees to lock the knob plunger in a retracted position, with the top of the knob plunger below the top of the support block. By providing the positioning assemblies, effective positioning of the chamber can be achieved. In the initial state, the knob plunger extends and inserts into the chamber's positioning hole to restrict the chamber's position on the support structure and prevent the chamber from sliding during the movement of the support structure. After the support structure is moved into place, the chamber can be leveled using the leveling assembly. After the chamber's positioning pins are aligned with the pin holes of the machine platform, the knob plunger is pulled down and rotated to lock it in the retracted state, so that the top of the knob plunger is lower than the top of the support block, thereby preventing the knob plunger from interfering with the docking of the chamber and the machine platform. The operation is simple, convenient and fast, allowing for rapid unlocking and positioning of the chamber, thereby improving docking efficiency.

[0015] In one possible embodiment, at least two sets of positioning assemblies are provided on two opposing sides of the mounting frame. By positioning the two opposing sides separately, it is possible to effectively prevent deviation or shaking caused by uneven force at a single point, ensuring that the chamber remains in a precise, predetermined position during use.

[0016] In one possible embodiment, the mounting frame is equipped with at least two sets of liftable universal ball transfer assemblies. The universal ball transfers in these assemblies are movably connected to the mounting frame via bolts, and the universal ball transfers are in rolling contact with the chamber. This liftable universal ball transfer assembly allows operators to adjust the height of the universal ball transfers as needed, enabling precise leveling of the chamber. This ensures horizontal stability under varying floor conditions, improving the performance and safety of the equipment. Furthermore, the rolling contact between the universal ball transfers and the chamber provides a low-friction method of movement, allowing operators to easily push and pull the chamber to the desired location without the need for laborious handling or dragging.

[0017] In one possible embodiment, the at least two sets of universal ball transfer assemblies are four sets, with the four sets of universal ball transfer assemblies being located on two opposing sides of the mounting frame, or the four sets of universal ball transfer assemblies being located on four sides of the mounting frame. Multiple universal ball transfer assemblies distributed on two or four sides of the mounting frame provide more uniform force distribution, enabling support and leveling of the chamber from multiple directions. Compared to single-point support, this significantly improves leveling accuracy and stability.

[0018] In one possible embodiment, the mounting frame is equipped with at least two adjustable leveling plates, which are movably connected to the mounting frame via bolts. The operator can precisely control the raising and lowering of the leveling plates by rotating the bolts, thereby achieving precise leveling of the chamber. This ensures horizontal stability of the chamber under varying ground conditions, improving the performance and safety of the equipment.

[0019] In one possible embodiment, the at least two leveling plates are four, each of which is located at the corners of the mounting frame. The four leveling plates, distributed at the four corners of the mounting frame, form a stable support structure. By adjusting the height of each leveling plate individually, the leveling state of the chamber can be precisely controlled. The coordinated action of the four leveling plates ensures more uniform leveling.

[0020] In the second aspect, the present application provides a semiconductor device, comprising: a chamber, the chamber is arranged on a supporting structure, the supporting structure is provided with an installation device for docking the chamber with a machine as described in any of the above items, and a positioning pin is provided on one side of the chamber, and the positioning pin is insertable and arranged in a pin hole of the machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0022] Figure 1 A side view of the mounting device for docking a chamber and a machine provided in an embodiment of the present application;

[0023] Figure 2 A schematic diagram of the structure of the guide assembly provided in an embodiment of the present application;

[0024] Figure 3 A schematic diagram of the structure of the guide structure provided in an embodiment of the present application;

[0025] Figure 4 A schematic diagram of the structure of the guide rail provided in an embodiment of the present application;

[0026] Figure 5 A schematic diagram of a partial structure of a mounting device for docking a chamber and a machine platform provided in an embodiment of the present application;

[0027] Figure 6 for Figure 5 Side view of;

[0028] Figure 7 This is a schematic structural diagram of the leveling assembly and positioning assembly provided in an embodiment of the present application.

[0029] Description of reference numerals:

[0030] 10-chamber, 101-locating pin;

[0031] 20- load-bearing structure, 201- casters;

[0032] 30-machine;

[0033] 1-guide assembly, 11-guide rail, 111-limiting pin, 112-flange, 12-guide structure, 121-fixing part, 122-guide part, 123-connecting part, 1231-limiting hole, 124-reinforcement plate;

[0034] 2-leveling assembly, 21-mounting frame, 22-universal ball, 23-leveling plate;

[0035] 3- Positioning assembly, 31- Support block, 32- Knob screw plug. DETAILED DESCRIPTION

[0036] The following will be combined with the drawings in the embodiments of this application to clearly and completely describe the technical solutions in the embodiments of this application. Obviously, the embodiments described are only part of the embodiments of this application, not all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of this application.

[0037] In this application, unless otherwise specified or limited, the terms "mounted," "connected," "connect," "fixed," etc. should be understood broadly. For example, they can refer to fixed connection, detachable connection, or integral connection; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; or internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.

[0038] This application provides a chamber-to-platform docking installation device, primarily used in semiconductor manufacturing equipment, including but not limited to semiconductor manufacturing and precision engineering. It is intended to address the difficulty in docking the chamber 10 of an integrated platform 30 with a wafer transfer platform 30. By providing the installation device, positioning and guiding the chamber 10 of the platform 30 during installation are made more convenient and safe, thereby achieving efficient docking between the chamber 10 of the platform 30 and the wafer transfer platform 30.

[0039] Example 1

[0040] Please refer to Figure 1, a mounting device for docking a chamber and a machine, the chamber 10 is movably arranged on the supporting structure 20, a positioning pin 101 is provided on one side of the chamber 10, and the machine 30 is provided with a pin hole, and the positioning pin 101 is pluggable and arranged in the pin hole of the machine 30, the mounting device includes: a guide assembly 1, the guide assembly 1 includes a guide rail 11 and a guide structure 12 slidably arranged along the guide rail 11, the guide rail 11 and the machine 30 are arranged in the same plane, and the guide rail 11 is provided on the side of the machine 30 provided with the pin hole, the guide structure 12 is provided at the bottom of the supporting structure 20, and the guide structure 12 is configured to slide to the bottom along the guide rail 11 to limit the position of the supporting structure 20 and the machine 30; a leveling assembly 2 is provided on the supporting structure 20 and is located at the bottom of the chamber 10, the leveling assembly 2 is used to adjust the levelness of the chamber 10, a positioning hole is provided at the bottom of the chamber 10, a positioning assembly 3 is provided on the leveling assembly 2, and the positioning assembly 3 is pluggable and arranged in the positioning hole. By moving the supporting structure 20, the chamber 10 is driven to move synchronously. During the movement, the guide structure 12 of the supporting structure 20 slides along the guide rail 11 to limit the moving trajectory of the supporting structure 20, guiding the movement of the supporting structure 20, so as to control the moving direction of the supporting structure 20 and reduce the difficulty of docking the integrated chamber 10 with the machine 30. After the guide structure 12 slides to the bottom along the guide rail 11, the position of the supporting structure 20 relative to the machine 30 is fixed. On this basis, the level of the chamber 10 is adjusted by the leveling component 2 so that the positioning pin 101 of the chamber 10 is aligned with the pin hole of the machine 30, the positioning component 3 is pulled out from the positioning hole of the chamber 10, and the chamber 10 is pushed so that the positioning pin 101 of the chamber 10 is inserted into the pin hole of the machine 30, thereby completing the effective docking of the chamber 10 and the machine 30.

[0041] Please refer to Figure 2 and Figure 3 The guide structure 12 includes a fixing portion 121, a guiding portion 122, and a connecting portion 123 for connecting the fixing portion 121 and the guiding portion 122. The fixing portion 121 is connected to the bottom of the supporting structure 20, and the guiding portion 122 is slidably arranged along the guide rail 11. The fixing portion 121 is provided to achieve connection with the supporting structure 20. The guiding portion 122 is provided to cooperate with the guide rail 11 so that the supporting structure 20 can move along a specified trajectory, guiding the movement of the supporting structure 20, so as to facilitate controlling the movement direction of the supporting structure 20. The connecting portion 123 is provided to achieve connection between the fixing portion 121 and the guiding portion 122, while ensuring that the fixing portion 121 and the guiding portion 122 can each play their respective roles.

[0042] For example, the guide portion 122 of the guide structure 12 slides along the guide rail 11, guiding the supporting structure 20 to move precisely along the predetermined track, allowing it to quickly reach the designated position, avoiding deviations that may occur during manual operation and greatly improving assembly efficiency. Due to the sliding guidance of the guide portion 122, the entire operation process is smoother, reducing accidents caused by shaking or inaccurate positioning, allowing operators to complete tasks more easily and stably, and reducing operational difficulty and labor intensity. The connection between the fixed portion 121 and the bottom of the supporting structure 20 provides a stable support base for the entire guide structure 12. This connection method ensures that the guide structure 12 will not loosen or shift during use, thereby ensuring the stability of the overall movement. The provision of the connecting portion 123 plays a role in dispersing stress, rationally distributing the applied force to the fixed portion 121 and the guide portion 122, avoiding structural damage that may be caused by stress concentration. This enables the guide structure 12 to withstand greater loads and more frequent use, thereby extending its service life and reducing maintenance and replacement costs.

[0043] The guide structure 12 can be flexibly designed and arranged according to the size and shape of the support structure 20. Whether the support structure 20 is of regular or irregular shape, its movement requirements can be met by properly arranging the guide structure 12. This flexibility enables the guide structure 12 to be widely applicable to different types of support structures 20, and has strong adaptability.

[0044] Furthermore, the guide portion 122 slides along the guide rail 11, effectively limiting the direction of movement of the supporting structure 20 and preventing the supporting structure 20 from swaying or tipping over during movement, thereby improving the safety of the supporting structure 20. Due to the guiding effect of the guide structure 12, operators can more accurately perform operations when docking or disassembling the supporting structure 20, providing operators with a clear operating path and improving the safety and reliability of the operation.

[0045] In one possible embodiment, the connecting portion 123 is perpendicular to the middle of the fixing portion 121 and the guide portion 122. The connecting portion 123 is provided with a limiting hole 1231. The guide rail 11 is provided with a limiting pin 111. The limiting pin 111 is inserted into the limiting hole 1231 and is removable. When the guide portion 122 slides to a specific position along the guide rail 11, the limiting pin 111 can be inserted into the limiting hole 1231 to achieve precise positioning, thereby improving positioning reliability.

[0046] Exemplarily, the connection portion 123 is provided with a limiting hole 1231, the guide rail 11 is provided with a limiting pin 111, and the limiting pin 111 is pluggable and arranged in the limiting hole 1231, so that when the guide portion 122 slides to a specific position along the guide rail 11, the limiting pin 111 can be inserted into the limiting hole 1231 to achieve precise positioning and reliable fixation. This avoids the positional displacement of the guide portion 122 due to external vibration or misoperation in a non-working state, thereby ensuring the stability and reliability of the guide structure 12 during use. The cooperation between the limiting hole 1231 and the limiting pin 111 further strengthens the connection relationship between the connection portion 123 and the guide rail 11, enhances the structure's anti-deformation ability and bearing capacity, can better cope with various external forces, and improves the service life and safety of the guide structure 12.

[0047] The guide portion 122 can be secured and released simply by pulling out and inserting the stop pin 111, eliminating the need for complex tools or tedious steps, reducing operational difficulty and operator skill requirements. This simplified operational process makes the guide structure 12 easier to use, improving the user-friendliness of the entire system. The design of the stop hole 1231 and the stop pin 111 provides the operator with a clear indication of whether the guide portion 122 is securely fastened, enhancing operational safety.

[0048] When the guide part 122 is in a fixed state, the cooperation between the limit pin 111 and the limit hole 1231 can effectively prevent the guide part 122 from moving due to accidental vibration or impact, thereby avoiding collision between other components or objects in the supporting structure 20, and can effectively reduce the risk of safety accidents caused by collision, thereby improving the safety performance of the supporting structure 20.

[0049] In one possible embodiment, the guide portion 122 is a plate-like structure having an opening therein. One end of the opening is connected to a side edge of the plate-like structure, and the other end of the opening is tapered. The shape of the outer edge of the guide rail 11 is consistent with the shape of the opening, so that the opening slides along the outer edge of the guide rail 11. The tapered opening can better adapt to the shape changes of the guide rail 11, allowing the opening to closely fit and slide along the outer edge of the guide rail 11. This ensures that the guide portion 122 always maintains a precise fit with the guide rail 11 during movement, avoids shaking or jamming caused by shape mismatch, improves the accuracy and reliability of the guide, and ensures the smooth operation of the entire guide structure 12.

[0050] Exemplarily, one end of the opening of the guide portion 122 is connected to the edge of one side of the plate-like structure, and the other end is tapered, and the shape of the outer edge of the guide rail 11 is consistent with the shape of the opening, so that the opening can fit tightly against the outer edge of the guide rail 11 and slide along it, ensuring that the guide portion 122 always maintains a precise fit with the guide rail 11 during movement, avoiding shaking or jamming due to shape mismatch, improving the accuracy and reliability of guidance, and ensuring the smooth operation of the entire guide structure 12. The tapered opening can better adapt to the shape changes of the guide rail 11, and even if there are slight processing errors or wear on the guide rail 11, it can still maintain good guiding performance, so that the guide structure 12 can maintain a stable operating state during long-term use, reducing the risk of failure due to poor guidance, and extending the service life of the guide structure 12. Due to the close fit between the guide portion 122 and the guide rail 11, the vibration and shaking of the guide portion 122 during the sliding process are reduced, thereby reducing the noise generated by vibration.

[0051] This intuitive guidance method reduces the operator's skill level and the possibility of operator error. Furthermore, the simple and quick operation process reduces operator workload and fatigue, thereby improving work efficiency and job satisfaction.

[0052] In one possible embodiment, the central axis of the opening is collinear with the central axis of the plate-like structure. This symmetrical design allows the guide portion 122 to receive a more even force when sliding along the guide rail 11, better maintaining linear motion and ensuring that the guide portion 122 does not deviate or wobble during movement, thereby improving guidance accuracy and stability.

[0053] For example, the central axis of the opening is collinear with the central axis of the plate-like structure, which can improve guiding accuracy and stability, allowing the guide portion 122 to be better balanced when subjected to force, reducing the risk of structural deformation or damage caused by asymmetric force, extending the service life of the guide structure 12, and enhancing its reliability during long-term use, reducing the frequency of maintenance and replacement. The symmetrical structure ensures that the guide portion 122 is subjected to more uniform force during sliding, reducing vibration and shaking, and thus reducing noise caused by vibration.

[0054] In one possible embodiment, a reinforcing plate 124 is provided between the fixing portion 121 and the guide portion 122. The reinforcing plate 124 connects the bottom of the fixing portion 121 to the top of the guide portion 122. The provision of the reinforcing plate 124 between the fixing portion 121 and the guide portion 122 effectively disperses and supports the forces exerted on the guide portion 122 as it slides along the guide rail 11, thereby enhancing the rigidity of the entire guide structure 12, enabling it to withstand greater external forces without deformation or damage, thereby improving the stability and reliability of the entire structure.

[0055] For example, the reinforcing plate 124 connects the bottom of the fixed portion 121 and the top of the guide portion 122, forming a more stable frame structure, improving the connection reliability, making the connection between the two more secure and reliable, and ensuring that the fixed portion 121 and the guide portion 122 will not loosen or separate during long-term use, thereby ensuring the normal function and stability of the guide structure 12. It can also enhance the rigidity of the entire guide structure 12, allowing it to withstand greater external forces without deformation or damage. Whether it is the lateral force from the sliding of the guide portion 122 or the tension or pressure at the connection between the fixed portion 121 and the supporting structure 20, the reinforcing plate 124 can effectively disperse and bear the load, thereby improving the stability and reliability of the entire structure. During actual use, the supporting structure 20 may be affected by various vibration sources. The provision of the reinforcing plate 124 can effectively enhance the vibration resistance of the guide structure 12 and reduce the impact of vibration on the sliding accuracy of the guide portion 122 and the connection stability of the fixed portion 121. This helps ensure that the guide structure 12 can still maintain normal operation in a vibrating environment and extend its service life.

[0056] The support provided by the reinforcing plate 124 allows the guide portion 122 to maintain its original shape and positional accuracy during sliding, reducing any guiding errors caused by structural deformation or offset. This helps ensure that the guide portion 122 always slides smoothly along the predetermined trajectory of the guide rail 11, thereby improving the accuracy and reliability of the guide.

[0057] In one possible embodiment, at least two reinforcing plates 124 are provided, and the at least two reinforcing plates 124 are symmetrically arranged on both sides of the guide portion 122. The symmetrical reinforcing plates 124 can evenly distribute the force acting on the guide portion 122 and the fixing portion 121 throughout the entire structure, so that the entire structure shares the load, rather than just the guide portion 122 or the fixing portion 121. This improves the load-bearing capacity of the structure and reduces the risk of structural damage caused by excessive local force.

[0058] Exemplarily, at least two reinforcing plates 124 are symmetrically arranged on either side of the guide portion 122, significantly enhancing the rigidity of the entire guide structure 12 and enabling it to better withstand various external forces. The symmetrical reinforcing plates 124 can evenly disperse these forces, avoiding local stress concentration, thereby improving the stability and reliability of the entire structure, and can also effectively enhance the guide portion 122's ability to resist deformation during sliding. Because the reinforcing plates 124 on both sides jointly support the guide portion 122, it can maintain better shape and position accuracy when subjected to external forces, reducing guidance errors caused by structural deformation, ensuring that the guide portion 122 always slides smoothly along the predetermined trajectory of the guide rail 11, and improving the accuracy and reliability of the guidance.

[0059] Among them, the symmetrical reinforcing plate 124 can evenly distribute the force acting on the guide part 122 and the fixing part 121 to the entire structure, thereby improving the bearing capacity of the structure and reducing the risk of structural damage caused by excessive local force.

[0060] Please refer to Figure 4 The guide rail 11 is provided with outwardly extending flanges 112 on both sides. The bottom ends of the flanges 112 and the bottom ends of the guide rail 11 are located on the same horizontal plane. Four casters 201 are provided at the bottom of the supporting structure 20. The distance between the two casters 201 near the machine platform 30 is consistent with the distance between the outer edges of the flanges 112 on both sides of the guide rail 11, so that the casters 201 slide along the outer edges of the flanges 112. The flanges 112 on both sides of the guide rail 11 cooperate with the casters 201 at the bottom of the supporting structure 20, allowing the casters 201 to slide along the outer edges of the flanges 112, providing a clear guide path for the movement of the supporting structure 20, ensuring that the supporting structure 20 remains stable during movement and does not tilt or deviate from the predetermined track. The operator only needs to push the supporting structure 20 into the direction of the guide rail 11, and the casters 201 will automatically align and slide along the outer edges of the flanges 112, reducing the time and effort of manual position adjustment, allowing the supporting structure 20 to be quickly positioned to the designated position, and improving operational efficiency.

[0061] For example, the flanges 112 on both sides of the guide rail 11 cooperate with the casters 201 at the bottom of the supporting structure 20, so that the casters 201 can slide along the outer edges of the flanges 112, providing a clear guide path for the movement of the supporting structure 20, and ensuring that the supporting structure 20 always remains stable during movement and does not tilt or deviate from the predetermined track. The bottom end of the flange 112 and the bottom end of the guide rail 11 are located on the same horizontal plane, so that the casters 201 can fit closely to the outer edges of the flanges 112 during sliding, reducing the gap between the casters 201 and the flanges 112. The tight fit between the casters 201 and the flanges 112 can effectively prevent the casters 201 from derailing during movement, thereby improving the safety of the supporting structure 20 during movement.

[0062] The coordination of casters 201 and flange 112 allows the support structure 20 to be quickly positioned. Operators simply push the support structure 20 into the direction of the guide rail 11, and the casters 201 automatically align and slide along the outer edge of flange 112, reducing the time and effort required for manual positioning. This rapid positioning feature significantly improves operational efficiency and reduces operational difficulty. Operators no longer need to worry about the stability or positional deviation of the support structure 20 during movement, thereby reducing the possibility of operational errors and improving work efficiency.

[0063] Furthermore, the close fit between the flange 112 and the caster 201 reduces vibration and shaking of the bearing structure 20 during movement, thereby reducing noise generated by vibration.

[0064] The installation device includes two structural parts. The guide structure 12 can be regarded as the female part, and the guide rail 11 can be regarded as the male part. The guide structure 12 is fixed to the supporting structure 20, and the guide rail 11 is fixed to the elevated floor of the semiconductor manufacturing plant. During the docking process, the guide structure 12 moves with the supporting structure 20, and the guide rail 11 is fixed; the caster 201 of the supporting structure 20 is first guided by the flange 112 of the guide rail 11 to form the first level of guidance, and then the guide part 122 of the guide structure 12 is combined with the guide rail 11 to form the second level of guidance. Finally, the limit pin 111 of the guide rail 11 is inserted into the limit hole 1231 of the guide structure 12 to form the third level of guidance. The device divides the final guidance target into multiple levels, reducing the difficulty of achieving each level of guidance.

[0065] Please refer to Figure 5 、 Figure 6 and Figure 7 The leveling assembly 2 includes a mounting frame 21, which is fixed to the supporting structure 20 in the horizontal direction. At least two sets of positioning assemblies 3 are provided on the mounting frame 21. The positioning assembly 3 includes a support block 31 and a knob screw plug 32 provided on the support block 31. The knob screw plug 32 is retractable on the support block 31 in a direction perpendicular to the horizontal direction. The knob plunger is extended in the initial state so that the top of the knob plunger is higher than the top of the support block 31. Pull down the knob plunger and rotate it 90 degrees to lock the knob plunger in the retracted state so that the top of the knob plunger is lower than the top of the support block 31.

[0066] For example, by providing a positioning assembly 3, effective positioning of the chamber 10 can be achieved. In the initial state, the knob plunger extends and inserts into the positioning hole of the chamber 10 to limit the position of the chamber 10 on the support structure 20 and prevent the chamber 10 from sliding during the movement of the support structure 20. After the support structure 20 is moved into position, the chamber 10 can be leveled using the leveling assembly 2. After the positioning pin 101 of the chamber 10 is aligned with the pin hole of the machine platform 30, the knob plunger can be pulled down and rotated to lock it in the retracted state, so that the top of the knob plunger is lower than the top of the support block 31, thereby preventing the knob plunger from interfering with the docking of the chamber 10 and the machine platform 30. The operation is simple, convenient and fast, and can achieve rapid unlocking and positioning of the chamber 10, thereby improving docking efficiency.

[0067] The operation of the knob screw plug 32 is simple and quick, saving time and energy. This locking mechanism ensures the stability of the chamber 10 during the leveling process.

[0068] In one possible embodiment, at least two sets of positioning assemblies 3 are provided on two opposite sides of the mounting frame 21. By positioning the two opposite sides separately, it is possible to effectively avoid deviation or shaking caused by uneven force at a single point, ensuring that the chamber 10 always remains in a precise predetermined position during use.

[0069] Exemplarily, at least two groups of positioning components 3 are provided and distributed on two opposite sides of the mounting frame 21, so that the chamber 10 can be positioned from multiple directions. By multi-point positioning, the positioning accuracy and stability are improved, and the offset or shaking caused by uneven force at a single point can be effectively avoided, ensuring that the chamber 10 always remains in a precise predetermined position during use, and also allowing the operator to quickly position and adjust from multiple directions.

[0070] In one possible embodiment, the mounting frame 21 is equipped with at least two sets of liftable universal ball transfer assemblies. The universal ball transfers 22 of these assemblies are movably connected to the mounting frame 21 via bolts, and the universal ball transfers 22 are in rolling contact with the chamber 10. This liftable universal ball transfer assembly allows operators to adjust the height of the universal ball transfers 22 as needed, thereby achieving precise leveling of the chamber 10. This ensures the chamber 10's horizontal stability under varying floor conditions, improving the device's performance and safety. Furthermore, the rolling contact between the universal ball transfers 22 and the chamber 10 provides a low-friction method of movement, allowing operators to easily push and pull the chamber 10 to the desired location without the need for laborious handling or dragging.

[0071] For example, with a liftable universal ball transfer assembly, the operator can adjust the height of the universal ball transfer 22 according to actual needs, thereby achieving precise leveling of the chamber 10. This leveling method can ensure the horizontal stability of the chamber 10 under different ground conditions, improving the performance and safety of the equipment. After leveling, the chamber 10 can be placed more stably on the mounting frame 21, reducing shaking or tilting caused by uneven ground. The liftable design of the universal ball transfer assembly makes the leveling operation more efficient. The operator can quickly adjust the horizontal state of the chamber 10 through a simple lifting operation, improving operational efficiency and saving time and energy.

[0072] Furthermore, the universal ball 22 is in rolling contact with the chamber 10, providing a low-friction movement method. The operator can easily push and pull the chamber 10 to the desired position without the need for laborious carrying or dragging, thereby improving the convenience and flexibility of operation and reducing operation time and physical exertion.

[0073] Among them, the design of the universal ball assembly makes it adaptable to chambers 10 of different sizes and shapes. Regardless of whether the chamber 10 is of regular shape or irregular shape, the universal ball 22 can roll in contact with the surface of the chamber 10, providing flexible movement and stable support.

[0074] In one possible embodiment, the at least two sets of universal ball assemblies are four sets, and the four sets of universal ball assemblies are arranged on two opposite sides of the mounting frame 21, or the four sets of universal ball assemblies are arranged on four sides of the mounting frame 21. The four sets of universal ball assemblies distributed on two or four sides of the mounting frame 21 make the force more uniform, and can support and level the chamber 10 from multiple directions. Compared with single-point support, the leveling accuracy and stability can be significantly improved.

[0075] For example, multiple universal ball assemblies are distributed on two or four sides of the mounting frame 21, which can support and level the chamber 10 from multiple directions. Compared with single-point support, this multi-point support method can significantly improve the accuracy and stability of leveling. By adjusting the height of each universal ball assembly separately, the horizontal state of the chamber 10 can be precisely controlled to ensure its stability under different ground conditions. The symmetrical distribution of multiple universal ball assemblies can ensure that the weight of the chamber 10 is evenly distributed on each support point, reducing structural damage caused by local overload. This uniform force design not only improves the long-term stability of the equipment, but also extends the service life of the universal ball assembly and the mounting frame 21.

[0076] In one possible embodiment, the mounting frame 21 is provided with at least two elevating leveling plates 23, which are movably connected to the mounting frame 21 via bolts. The operator can precisely control the elevation of the leveling plates 23 by rotating the bolts, thereby achieving precise leveling of the chamber 10. This ensures the horizontal stability of the chamber 10 under various ground conditions, thereby improving the performance and safety of the equipment.

[0077] For example, the liftable leveling plate 23 is movably connected to the mounting frame 21 via bolts, allowing the plate 23 to be adjusted in height as needed. The operator can precisely control the raising and lowering of the leveling plate 23 by rotating the bolts, thereby achieving precise leveling of the chamber 10 and ensuring the horizontal stability of the chamber 10 under various floor conditions. The raising and lowering of the leveling plate 23 is simple and quick; leveling can be achieved simply by rotating the bolts, allowing the operator to quickly complete the leveling of the chamber 10, saving time and effort. Furthermore, the locking function of the bolts ensures stability after leveling, reducing the risk of leveling failure due to accidental contact.

[0078] The chamber 10 is leveled by the leveling plate 23 as a secondary guarantee for leveling. When the universal ball assembly fails, the chamber 10 can be leveled by the leveling plate 23.

[0079] In one possible embodiment, the at least two leveling plates 23 are four, and the four leveling plates 23 are disposed at the corners of the mounting frame 21. The four leveling plates 23 are distributed at the four corners of the mounting frame 21 to form a stable support structure. By adjusting the height of each leveling plate 23 separately, the horizontal state of the chamber 10 can be precisely controlled. The coordinated action of the four leveling plates 23 makes the leveling more uniform.

[0080] For example, four leveling plates 23 are located at the four corners of the mounting frame 21, forming a stable support structure. This multi-point support significantly improves leveling accuracy and stability. By adjusting the height of each leveling plate 23 individually, the horizontal position of the supporting structure 20 and chamber 10 can be precisely controlled, ensuring its stability under varying floor conditions. The coordinated action of the four leveling plates 23 ensures more uniform leveling and reduces tilt or sway caused by insufficient single-point support.

[0081] The leveling assembly 2 is fixed to the supporting structure 20 and includes a mounting frame 21 made of square steel and at least three universal ball assemblies with lifting functions. The chamber 10 is placed on the universal ball 22 of the universal ball assembly. The lifting and lowering of the universal ball 22 is used to adjust the height and level the chamber 10. At the same time, the chamber 10 can slide in any direction on the universal ball 22. This structural design can simultaneously meet the dual functions of leveling and movement, achieving the effect of docking and adjusting at the same time, reducing the number of tooling required and simplifying the installation operation. The device can achieve docking and installation of the chamber 10 and the machine 30. The installation and docking of the machine 30 can be divided into two stages: the first stage can achieve the guidance and positioning of the supporting structure 20, and the second stage can achieve the leveling and sliding installation of the chamber 10 within the supporting structure 20.

[0082] Example 2

[0083] Based on the above embodiments, this embodiment provides a semiconductor device, including: a chamber 10, the chamber 10 is arranged on a supporting structure 20, the supporting structure 20 is provided with an installation device for docking the chamber with the machine as described above, and a positioning pin 101 is provided on one side of the chamber 10, and the positioning pin 101 is pluggable and arranged in a pin hole of the machine 30.

[0084] When using the device, first move the supporting structure 20 so that the guide structure 12 of the supporting structure 20 slides along the guide rail 11 to limit the moving trajectory of the supporting structure 20 and guide the movement of the supporting structure 20, so as to control the moving direction of the supporting structure 20 and reduce the difficulty of docking the integrated chamber 10 with the machine 30. After the guide structure 12 slides to the bottom along the guide rail 11, the position of the supporting structure 20 relative to the machine 30 is fixed. On this basis, the level of the chamber 10 is adjusted by the leveling component 2 so that the positioning pin 101 of the chamber 10 is aligned with the pin hole of the machine 30, the positioning component 3 is pulled out from the positioning hole of the chamber 10, and the chamber 10 is pushed so that the positioning pin 101 of the chamber 10 is inserted into the pin hole of the machine 30, thereby completing the effective docking of the chamber 10 and the machine 30.

[0085] The above preferred embodiments further illustrate the objectives, technical solutions and advantages of the present invention in detail. It should be understood that the above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A mounting device for docking a chamber with a machine, characterized in that: The chamber is movably mounted on the supporting structure. A positioning pin is provided on one side of the chamber. The positioning pin can be inserted into a pin hole of the machine. The mounting device includes: A guide assembly, the guide assembly comprising a guide rail and a guide structure slidably arranged along the guide rail, the guide rail being arranged in the same plane as the machine platform and corresponding to a side of the machine platform where a pin hole is provided, the guide structure being arranged at the bottom of the supporting structure and configured to slide into the guide rail to limit the position of the supporting structure and the machine platform; A leveling assembly is provided on the supporting structure. The leveling assembly is used to adjust the horizontality of the chamber so that the positioning pin is aligned with the pin hole. The chamber is provided with a positioning hole. The leveling assembly is provided with a positioning assembly. The positioning assembly is pluggable and arranged in the positioning hole.

2. The chamber and machine docking installation device according to claim 1, characterized in that: The guide structure includes a fixing portion, a guiding portion, and a connecting portion for connecting the fixing portion and the guiding portion. The fixing portion is connected to the bottom of the bearing structure, and the guiding portion is slidably arranged along the guide rail.

3. The chamber-to-machine docking installation device according to claim 2, characterized in that: The connecting portion is perpendicular to the fixing portion and the middle portion of the guide portion. The connecting portion is provided with a limiting hole. The guide rail is provided with a limiting pin. The limiting pin is pluggable and arranged in the limiting hole.

4. The chamber-to-machine docking installation device according to claim 2, characterized in that: The guide portion is a plate-like structure with an opening provided on the plate-like structure. One end of the opening is connected to a side edge of the plate-like structure, and the other end of the opening is tapered. The shape of the outer edge of the guide rail is consistent with the shape of the opening, so that the opening slides along the outer edge of the guide rail.

5. The chamber-to-machine docking installation device according to claim 4, characterized in that: The central axis of the opening is collinear with the central axis of the plate-like structure.

6. The chamber-to-machine docking installation device according to any one of claims 2 to 5, characterized in that: A reinforcing plate is provided between the fixing portion and the guiding portion, and the reinforcing plate connects the bottom of the fixing portion and the top of the guiding portion.

7. The chamber-to-machine docking installation device according to claim 6, characterized in that: At least two reinforcing plates are provided, and at least two reinforcing plates are symmetrically arranged on both sides of the guide portion.

8. The chamber-to-machine docking installation device according to any one of claims 1 to 7, characterized in that: Flanges extending outward are provided on both sides of the guide rail, and the bottom ends of the flanges are located on the same horizontal plane as the bottom ends of the guide rails. Four casters are provided at the bottom of the supporting structure, and the distance between the two casters close to the machine is consistent with the distance between the outer edges of the flanges on both sides of the guide rails, so that the casters slide along the outer edges of the flanges.

9. The chamber-to-machine docking installation device according to any one of claims 1 to 8, characterized in that: The leveling assembly includes a mounting frame, which is fixed to the bearing structure in a horizontal direction. At least two groups of positioning assemblies are provided on the mounting frame. The positioning assembly includes a support block and a knob screw plug provided on the support block. The knob screw plug is retractably provided on the support block in a direction perpendicular to the horizontal direction. The knob plunger is extended in an initial state so that the top of the knob plunger is higher than the top of the support block. The knob plunger is pulled down and rotated 90 degrees to lock the knob plunger in a retracted state so that the top of the knob plunger is lower than the top of the support block.

10. The chamber-to-machine docking installation device according to claim 9, characterized in that: At least two groups of positioning components are arranged on two opposite sides of the installation frame.

11. The chamber-to-machine docking installation device according to any one of claims 9 or 10, characterized in that: At least two groups of liftable universal ball assemblies are provided on the installation frame. The universal balls of the universal ball assemblies are movably connected to the installation frame through bolts, and the universal balls are in rolling contact with the chamber.

12. The chamber-to-machine docking installation device according to claim 11, characterized in that: At least two groups of the universal ball assemblies make four groups, and the four groups of the universal ball assemblies are arranged on two opposite sides of the mounting frame, or the four groups of the universal ball assemblies are arranged on four sides of the mounting frame.

13. The chamber-to-machine docking installation device according to any one of claims 9 to 12, characterized in that: The installation frame is provided with at least two liftable adjustment plates, and the adjustment plates are movably connected to the installation frame through bolts.

14. The chamber-to-machine docking installation device according to claim 13, characterized in that: At least two of the adjustment plates are provided with four, and the four adjustment plates are provided at the corners of the installation frame.

15. A semiconductor device, characterized in that: It comprises: a chamber, the chamber is arranged on a bearing structure, the bearing structure is provided with an installation device for docking the chamber and the machine as described in any one of claims 1-14, a positioning pin is provided on one side of the chamber, and the positioning pin is pluggable and arranged in a pin hole of the machine.

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