Intelligent work order filling methods, devices, storage media and equipment

Abstract

This invention provides a method, apparatus, storage medium, and device for filling out intelligent work orders, including: if the faulty equipment unit determines that the reported fault information does not belong to the laboratory equipment unit, it provides a verification prompt for filling out intelligent work orders; if the faulty equipment unit is inconsistent with the fault type or fault description information, it generates a verification prompt for filling out intelligent work orders based on the faulty equipment unit, fault type, and / or fault description information, and provides the verification prompt; if any one of the faulty equipment unit, fault type, and fault description information is empty, it provides a first supplementary prompt for filling out intelligent work orders; if any one of the faulty equipment unit, fault type, and fault description information specifies a non-unique object, it generates a second supplementary prompt for filling out intelligent work orders based on the faulty equipment unit and / or fault type and / or fault description information, and provides the second supplementary prompt.

Description

Technical Field

[0001] This invention relates to the field of work order filling, and specifically to intelligent work order filling methods, devices, storage media, and equipment. Background Technology

[0002] In semiconductor micro-nano fabrication platforms, there are numerous process equipment and routine equipment, involving complex professional knowledge. The operational status of each piece of equipment in a semiconductor micro-nano fabrication platform requires regular inspection or maintenance. Current technologies often require professional maintenance personnel to regularly monitor each piece of equipment for faults and report them in a timely manner.

[0003] However, when equipment malfunctions, the entire process is recorded using work orders. But this work order recording model presents many pain points in practice. For example, on-site maintenance personnel need to manually input work order information when reporting problems, a process involving a huge amount of data entry and significantly reducing work efficiency. Furthermore, when describing fault information, the lack of precise extraction of key fault information often prevents relevant personnel from fully and accurately grasping the on-site fault situation in a timely manner, seriously affecting subsequent maintenance work. Moreover, when handling fault issues, laboratory managers and maintenance personnel often use multiple communication methods such as WeChat, DingTalk, and email to analyze the cause of the fault and specify solutions. This information is scattered across various communication channels, requiring maintenance personnel to organize and summarize this scattered information before reflecting it in the work order, undoubtedly wasting a lot of effort. There is also the possibility that some crucial and effective information for resolving the fault may be overlooked during the solution development process. Furthermore, since maintenance personnel need to connect with hundreds of devices simultaneously, and when a device malfunctions, they usually only briefly report the fault work order information, the maintenance personnel may need to check the faulty device repeatedly to determine the accurate fault information during the subsequent maintenance process. This results in a slow maintenance process and is not conducive to the efficient operation of the micro-nano processing platform equipment. Summary of the Invention

[0004] Based on this, the present invention provides a method, apparatus, storage medium and equipment for filling out intelligent work orders. By automatically extracting the corresponding equipment fault information from the information reported by the inspection personnel and generating intelligent work orders, the efficiency and accuracy of the inspection personnel in reporting faulty equipment are improved.

[0005] In a first aspect, the present invention provides an intelligent work order filling method, comprising:

[0006] Receive fault reports sent by inspection personnel;

[0007] Extract the faulty equipment unit, fault type, fault reporting time, fault description information, and inspection personnel ID from the fault reporting information;

[0008] If the fault report information is determined to be outside the scope of the laboratory equipment unit based on the faulty equipment unit, a smart work order filling verification prompt will be given in conjunction with the inspection personnel ID.

[0009] If the fault report information is determined to belong to the laboratory equipment unit based on the faulty equipment unit, determine whether any one of the faulty equipment unit, the fault type, and the fault description information is empty. If any one of the faulty equipment unit, the fault type, and the fault description information is empty, fill in the first supplementary prompt in conjunction with the inspection personnel ID feedback smart work order.

[0010] If the faulty equipment unit, the fault type, and the fault description information are all not empty, determine whether the faulty equipment unit, the fault type, and the fault description information are consistent. If the faulty equipment unit is inconsistent with the fault type or the fault description information, generate a smart work order filling verification prompt based on the faulty equipment unit, the fault type, and / or the fault description information, and provide feedback on the smart work order filling verification prompt based on the inspection personnel ID.

[0011] If the faulty equipment unit, the fault type, and the fault description information are consistent, determine whether the objects specified by the faulty equipment unit, the fault type, and the fault description information are unique; if the objects specified by any one of the faulty equipment unit, the fault type, and the fault description information are not unique, generate a second supplementary prompt for filling out the smart work order based on the faulty equipment unit and / or the fault type and / or the fault description information, and provide feedback on the second supplementary prompt for filling out the smart work order based on the inspection personnel ID.

[0012] Furthermore, the intelligent work order filling method also includes: if the faulty equipment unit determines that the fault reporting information belongs to the laboratory equipment unit, the faulty equipment unit, the fault type and the fault description information are all not empty, and the faulty equipment unit, the fault type and the fault description information are consistent and the specified object is unique, an intelligent work order is generated based on the faulty equipment unit, the fault type, the fault reporting time, the fault description information and the inspection personnel ID.

[0013] Furthermore, the fault reporting information sent by the inspection personnel includes text fault reporting information and voice fault reporting information sent by the inspection personnel.

[0014] Furthermore, the intelligent work order filling method also includes:

[0015] Retrieve historical fault information of the faulty equipment unit;

[0016] Historical fault alerts are generated based on the historical fault information and sent to the inspection personnel.

[0017] Furthermore, the intelligent work order filling method also includes:

[0018] Retrieve the associated equipment units of the faulty equipment unit;

[0019] Based on the correlation between the associated equipment unit and the faulty equipment unit, associated equipment fault inspection information is generated and sent to the inspection personnel.

[0020] Furthermore, the intelligent work order filling method also includes:

[0021] Based on the impact level of the faulty equipment unit corresponding to the smart work order, the smart work orders are sorted, and the sorted smart work orders are sent to the inspection personnel for verification in turn.

[0022] Furthermore, the intelligent work order filling method also includes:

[0023] After the smart work order is generated, maintenance suggestions from engineers regarding the faulty equipment unit are obtained through various communication methods.

[0024] The maintenance suggestion information is integrated based on the time series to obtain the maintenance suggestion plan for the faulty equipment unit.

[0025] Furthermore, the intelligent work order filling method also includes:

[0026] If the suggested repair plan for the faulty equipment unit lacks the cause of the fault or the repair method, a reference repair suggested plan will be obtained from the reference database based on the intelligent work order.

[0027] Furthermore, the intelligent work order filling method also includes:

[0028] If the maintenance suggestion plan for the faulty equipment unit records the cause of the fault and the maintenance method, search the reference database for at least one reference fault cause and at least one reference maintenance method according to the intelligent work order;

[0029] Determine the similarity between the fault cause and the reference fault cause, as well as the similarity between the corresponding repair method and the reference repair method. If the similarity between the fault cause and the reference fault cause is lower than the analysis confidence threshold and / or the similarity between the repair method and the reference repair method is lower than the operation confidence threshold, change the fault cause in the repair suggestion plan to the reference fault cause, and change the repair method in the fault repair suggestion plan to the reference repair method.

[0030] Furthermore, the intelligent work order filling method also includes:

[0031] Obtain the historical maintenance plans for the faulty equipment unit;

[0032] If there are multiple suggested repair solutions for the faulty equipment unit, the following steps are set for any one of the suggested repair solutions:

[0033] If the similarity between the suggested repair solution and the historical repair solution is greater than a first threshold, and the number of times the similarity between the suggested repair solution and the historical repair solution is greater than the first threshold is greater than a second threshold;

[0034] The priority of the proposed repair solutions is reduced according to a preset weight.

[0035] The repair suggestions with adjusted priorities are sorted, and the sorted repair suggestions are pushed to the repair personnel.

[0036] Furthermore, the intelligent work order filling method also includes:

[0037] Obtain the historical maintenance plans for the faulty equipment unit;

[0038] If the similarity between the suggested repair solution and the historical repair solution is greater than a first threshold, and the frequency of the historical repair solution within a preset period is higher than a third threshold;

[0039] The system generates an invalid repair suggestion message based on the smart work order and sends it to the repair personnel.

[0040] Secondly, the present invention also provides an intelligent work order filling device, comprising:

[0041] The fault reporting module is used to obtain fault reporting information sent by inspection personnel;

[0042] The information extraction module is used to extract the faulty equipment unit, fault type, fault reporting time, fault description information and inspection personnel ID from the fault reporting information;

[0043] The equipment verification module is used to provide a smart work order filling verification prompt if the fault report information is determined to be outside the scope of laboratory equipment units based on the faulty equipment unit, in conjunction with the inspection personnel ID.

[0044] The information gap verification module is used to determine whether any one of the faulty equipment group, the fault type, and the fault description information is empty if the faulty equipment group, the fault type, and the fault description information are determined to be within the scope of laboratory equipment group based on the faulty equipment group. If any one of the faulty equipment group, the fault type, and the fault description information is empty, the module combines the inspection personnel ID to feed in the first supplementary prompt in the intelligent work order.

[0045] The information consistency verification module is used to determine whether the faulty equipment unit, the fault type, and the fault description information are consistent if the faulty equipment unit, the fault type, and the fault description information are all not empty. If the faulty equipment unit is inconsistent with the fault type or the fault description information, the module generates a smart work order filling verification prompt based on the faulty equipment unit, the fault type, and / or the fault description information, and feeds back the smart work order filling verification prompt based on the inspection personnel ID.

[0046] The unique information verification module is used to determine whether the objects specified by the faulty equipment group, the fault type, and the fault description information are unique if the faulty equipment group, the fault type, and the fault description information are consistent. If the objects specified by any one of the faulty equipment group, the fault type, and the fault description information are not unique, a second supplementary prompt for filling in the smart work order is generated by combining the faulty equipment group and / or the fault type and / or the fault description information, and the second supplementary prompt for filling in the smart work order is fed back by combining the inspection personnel ID.

[0047] Thirdly, the present invention also provides a computer-readable storage medium having a computer program stored thereon, wherein the computer program, when executed by a processor, implements the steps of any of the intelligent work order filling methods in the first aspect.

[0048] Fourthly, the present invention also provides a computer device, including a memory and a processor, wherein the memory stores a computer program, and when the processor executes the computer program, it executes any one of the intelligent work order filling methods in the first aspect.

[0049] The beneficial effects of adopting the above technical solution are as follows: This embodiment extracts and verifies the fault information reported by the inspection personnel, and provides feedback to the inspection personnel on the problems in filling out the intelligent work order. Without requiring the inspection personnel to have a large amount of knowledge, it improves the accuracy and efficiency of filling out the intelligent work order, which helps laboratory personnel to quickly grasp the fault status of the equipment inside the laboratory, and provides a data foundation for the effective maintenance of a large number of equipment faults in the laboratory. Attached Figure Description

[0050] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0051] Figure 1 This is a schematic diagram of a smart work order filling method in one embodiment of this application;

[0052] Figure 2 This is a schematic diagram of an intelligent work order filling device in one embodiment of this application. Detailed Implementation

[0053] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. To describe the present invention in more detail, the intelligent work order filling method, apparatus, storage medium, and device provided by the present invention will be specifically described below with reference to the accompanying drawings.

[0054] Unless otherwise defined, the technical or scientific terms used in this application shall have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms "first," "second," and similar terms used in this invention do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, the terms "an," "a," or "the" do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms "comprising" or "including" mean that the preceding element or object encompasses the elements or objects listed after the word and their equivalents, without excluding other elements or objects. The terms "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up," "down," "left," "right," etc., are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0055] The micro-nano fabrication experimental platform includes process equipment and plant equipment. The process equipment includes, but is not limited to, multiple processes in semiconductor micro-nano fabrication, such as photolithography equipment, deposition equipment, etching equipment, and doping equipment. Each process of micro-nano fabrication equipment requires a certain level of knowledge in semiconductor micro-nano fabrication to operate, while the equipment maintenance phase requires even more comprehensive and in-depth knowledge of micro-nano fabrication. The plant equipment generally includes power systems, pure water systems, cooling water systems, nitrogen generation systems, and ventilation systems. Each piece of plant equipment needs high-precision control, high-purity assurance, and low-interference operation to meet the stringent environmental requirements of micro-nano fabrication and provide stable and reliable infrastructure support for high-precision micro-nano manufacturing.

[0056] However, existing technologies often employ a model where inspection personnel report equipment malfunctions on micro-nano processing platforms, followed by inspection and maintenance by professional maintenance personnel. But because inspection personnel have limited professional knowledge of micro-nano processing platforms and their descriptions of equipment malfunctions are inaccurate, it is easy for professional maintenance personnel to misunderstand the malfunction information reported in the work order after the malfunction is reported. This is not conducive to the subsequent maintenance work, and may even lead to incorrect malfunction reports, causing delays in subsequent maintenance work and having a significant impact.

[0057] This application provides an application scenario for intelligent work order filling. This application scenario includes the terminal devices provided in the embodiment. The terminal devices include, but are not limited to, smartphones and computer devices. The computer device can be at least one of desktop computers, portable computers, laptop computers, mainframe computers, tablet computers, etc. The terminal device receives fault reporting information sent by inspection personnel, analyzes whether the fault reporting information accurately describes the problem existing in the faulty unit, and provides feedback to the inspection personnel accordingly. Figure 1 The diagram shows the method for filling out intelligent work orders. For details, please refer to the example of intelligent work order filling.

[0058] Step S100: Obtain the fault report information sent by the inspection personnel.

[0059] Specifically, in this embodiment, the fault reporting information sent by the inspection personnel can be in the form of text or voice. The inspection personnel can send text fault reporting information and / or voice fault reporting information through specific communication terminal devices to describe the equipment fault situation that occurs in the micro-nano fabrication platform.

[0060] Step S200: Extract the faulty equipment unit, fault type, fault reporting time, fault description information, and inspection personnel ID from the fault reporting information.

[0061] Specifically, the fault reporting information sent by inspection personnel should include the information required to generate a smart work order, such as the faulty equipment unit, fault type, fault reporting time, fault description information, and inspection personnel ID. The faulty equipment unit can be described using its name and location, or using an ID associated with it. The faulty equipment unit is used to identify the specific faulty equipment. The fault type includes the type of fault occurring in the faulty equipment unit, such as a liquid level fault, a gas pressure fault, or a temperature fault. The fault reporting time is the time the inspection personnel send the fault reporting information. The fault description information specifically describes the faulty equipment unit, facilitating maintenance personnel's understanding of the specific fault situation. For example, the fault description information could be "Liquid level fault in equipment A, current liquid level is 0.36m" or "Temperature fault in equipment B, current temperature is 800℃." The inspection personnel ID is used to record the personnel information that sent the fault reporting information, facilitating the sending of subsequent corresponding prompts or the traceability of subsequent equipment fault reporting information.

[0062] Step S300: If, based on the faulty equipment unit, it is determined that the fault report information does not belong to the laboratory equipment unit, a smart work order filling verification prompt is provided in conjunction with the inspection personnel ID.

[0063] Specifically, when a fault report is received from the inspection personnel, it is necessary to first verify whether the fault report falls within the scope of the laboratory equipment unit. If the fault report does not fall within the scope of the laboratory equipment unit, it indicates that the fault report is incorrect and the inspection personnel need to verify the fault report.

[0064] Among them, the micro-nano fabrication experimental platform has a laboratory equipment unit database. The faulty equipment units extracted from the fault reports sent by the inspection personnel are compared with the laboratory equipment unit database by traversing the database. If no matching faulty equipment unit is found after traversing the laboratory equipment unit database, the inspection personnel need to be informed that the faulty equipment unit does not exist. Specifically, the intelligent work order filling verification prompt is fed back in combination with the inspection personnel ID.

[0065] Step S400: If the fault reporting information is determined to belong to the laboratory equipment unit based on the faulty equipment unit, determine whether any one of the faulty equipment unit, the fault type, and the fault description information is empty. If any one of the faulty equipment unit, the fault type, and the fault description information is empty, fill in the first supplementary prompt in conjunction with the inspection personnel ID feedback smart work order.

[0066] Specifically, in the process of managing the failure of experimental equipment within the micro-nano fabrication platform, it is essential to determine the accurate description of the equipment failure, including the faulty equipment unit, the failure type, and the failure description information. If any of the above items are empty, it is impossible to locate the specific situation of the faulty equipment. In this case, it is necessary to provide the inspection personnel with the first supplementary prompt for filling in the smart work order, so as to supplement the necessary information for filling in the smart work order for the faulty equipment unit.

[0067] Step S500: If the faulty equipment unit, the fault type, and the fault description information are all not empty, determine whether the faulty equipment unit, the fault type, and the fault description information are consistent. If the faulty equipment unit is inconsistent with the fault type or the fault description information, generate a smart work order filling verification prompt based on the faulty equipment unit, the fault type, and / or the fault description information, and provide feedback on the smart work order filling verification prompt based on the inspection personnel ID.

[0068] Specifically, due to the limited knowledge base of inspection personnel regarding the equipment units within the micro-nano processing platform, discrepancies may arise between the reported faulty equipment unit and the stated fault type or description. In such cases, it is necessary to generate a smart work order verification prompt based on the faulty equipment unit, fault type, and / or fault description information. For example, if the faulty equipment unit in a reported fault is a pure water system device, but the corresponding fault type is "low pressure" or the fault description is "low pressure alarm E1," which is clearly inconsistent with the reported faulty equipment unit, then a smart work order verification prompt needs to be generated based on the above information to remind the inspection personnel whether they have confused the fault type or fault description information of other faulty equipment units.

[0069] Step S600: If the faulty equipment unit, the fault type, and the fault description information are consistent, determine whether the objects specified by the faulty equipment unit, the fault type, and the fault description information are unique. If the objects specified by any one of the faulty equipment unit, the fault type, and the fault description information are not unique, generate a second supplementary prompt for filling in the smart work order by combining the faulty equipment unit and / or the fault type and / or the fault description information, and provide feedback on the second supplementary prompt for filling in the smart work order by combining the inspection personnel ID.

[0070] Specifically, if any of the specified objects in the faulty equipment unit, the fault type, and the fault description information are not unique, it indicates that the fault reporting information sent by the inspection personnel is ambiguous, which is not conducive to the maintenance personnel determining the specific fault situation of the equipment unit. In this case, the inspection personnel need to further supplement the above-mentioned situation where the specified object is not unique in order to clearly and accurately describe the fault information of the faulty equipment unit.

[0071] The specific determination process for whether any one of the above-mentioned items—faulty equipment unit, fault type, and fault description information—is unique is as follows:

[0072] If the faulty equipment unit ID determined by traversing the laboratory equipment unit database is empty or more than one, then the object specified by the faulty equipment unit is not unique.

[0073] If a faulty equipment unit is identified by traversing the laboratory equipment unit database, the preset fault type of that faulty equipment unit is retrieved based on the faulty equipment unit ID.

[0074] If the fault type ID determined by the preset fault type of the faulty equipment unit is empty or more than one, then the object specified by the fault type is not unique.

[0075] If the fault type traversal of the preset fault types of the faulty equipment unit determines that there is only one fault type ID, the data type of the fault type description is retrieved according to the fault type ID.

[0076] If the fault description information does not match the data type of the fault type description, then the object specified by the fault description information is not unique.

[0077] Furthermore, a range determination for the aforementioned fault description information is also set, specifically as follows:

[0078] Retrieve the threshold data describing the fault type based on the fault type ID;

[0079] If the fault description information exceeds the maximum proportion of the fault type description data threshold range, then the fault description information is incorrect, and an error message will be sent to the smart work order based on the patrol personnel ID.

[0080] To better understand the technical solutions described in this application, and in conjunction with specific examples of micro-nano fabrication platforms, it is explained that the object specified in any of the above-mentioned faulty equipment units, fault types, and fault description information is not unique:

[0081] When the fault reported by the inspection personnel is an alarm in a chiller / hot water unit and the fault type is abnormal pressure, if the fault description is not in accordance with the preset fault type description data type (such as the fault codes displayed on the panel, E3: exhaust pressure alarm, E4: low pressure alarm, etc.), but is described as "low pressure", the fault description cannot determine the specific pressure abnormality of the chiller / hot water unit. In this case, the inspection personnel need to be reminded to report the pressure abnormality in accordance with the preset fault type description data type.

[0082] Using the same example of the chiller / hot water unit, if the fault codes corresponding to the abnormal pressure of the chiller / hot water unit only include E1-E6, but the fault description information is recorded as "E8: exhaust pressure alarm", then the fault description information is incorrect, and it is necessary to fill in the error message in the smart work order based on the inspection personnel ID.

[0083] Step S700: If the faulty equipment unit determines that the fault reporting information belongs to the laboratory equipment unit range, the faulty equipment unit, the fault type and the fault description information are not empty, and the faulty equipment unit, the fault type and the fault description information are consistent and the specified object is unique, an intelligent work order is generated based on the faulty equipment unit, the fault type, the fault reporting time, the fault description information and the inspection personnel ID.

[0084] For example, in the fault report information sent by the inspection personnel, the faulty equipment unit is identified as PWC water tank 001, the fault type is liquid level alarm, the fault reporting time is time 'a', the fault description is "liquid level deviates from the normal range, current liquid level is 2.5m", and the inspection personnel ID is Inspection 007. Based on this information, a smart work order can be generated, recorded as "Fault reporting personnel: Inspection 007; Fault reporting time: time 'a'; Faulty equipment unit: PWC water tank 001; Fault type: liquid level alarm; Fault description: liquid level 2.5m". According to this smart work order, the inspection personnel can quickly identify the faulty equipment unit and the corresponding fault condition, and quickly provide solutions to eliminate the fault, effectively maintaining the equipment on the micro-nano processing platform.

[0085] Furthermore, based on the above solution, this embodiment also considers the possibility that fault reporting information may overlap with historical fault reporting information. In this case, the historical fault reporting information can be combined to provide a reference for the accurate description of the current fault reporting information, so that inspection personnel can quickly and accurately describe the equipment unit fault situation. Specifically:

[0086] Step S801: Retrieve historical fault information of the faulty equipment unit.

[0087] It should be noted that the historical fault information of the faulty equipment unit is a historical fault information that accurately describes the fault situation of the faulty equipment unit, and the historical maintenance plan is also recorded in the historical fault information.

[0088] Step S802: Generate historical fault prompt information based on the historical fault information and send it to the inspection personnel.

[0089] In this embodiment, historical fault alerts can be generated and sent to inspection personnel based on the historical fault information that occurs most frequently within a preset historical time period, so that the inspection personnel can quickly describe the faulty equipment unit. The historical fault alerts include a historical fault type and a historical fault description. The historical fault type is the historical fault type that occurs most frequently within the historical time period, and the historical fault description is the historical fault description information that corresponds to the most frequent historical fault type.

[0090] Furthermore, considering that the equipment within the micro-nano fabrication laboratory does not exist independently, when one equipment unit malfunctions, linked equipment units may also malfunction. Therefore, the intelligent work order should include a description of the associated equipment, specifically:

[0091] Step S901: Retrieve the associated equipment units of the faulty equipment unit.

[0092] In this embodiment, taking the plant equipment of a micro-nano fabrication laboratory as an example, the plant equipment includes a power system, a pure water system, an ultrapure water system, a chilled water system, a cooling water system, a hot water system, a medium-temperature water system, a nitrogen generation system, an air compressor system, a vacuum system, a process cooling water system, an air conditioning unit, a wastewater system, an exhaust system, a bulk gas system, a specialty gas system, and a chemical supply system; the related equipment of the above-mentioned plant equipment is as follows:

[0093] (1) If the power system suddenly loses power, all plant systems will shut down; if any two systems lose power, it is highly likely that the cause is a power system failure.

[0094] (2) If the pure water system is shut down, ① it will affect the operation of the humidification module of the air conditioning unit, and the temperature and humidity will be out of control after 2 hours; ② it will affect the operation of the nitrogen generation system, and the air compressor screw used for the nitrogen generation system will stop operating after about 3 days without pure water; ③ it will affect the scrubber of the special gas system, and the special gas cannot be replaced.

[0095] (3) If the ultrapure water system is shut down, it will not affect other plant systems, but it will affect the process equipment that uses ultrapure water. Wet cleaning, wet etching and water-based developing equipment cannot be used. However, it is best not to shut down the ultrapure water system for 4 hours. If it is shut down for too long, it will cause water quality deterioration.

[0096] (4) If the chilled water system stops, it will immediately affect the temperature and humidity of the entire laboratory and needs to be restored immediately.

[0097] (5) If the cooling water system stops, the chilled water system will not be able to operate normally. The chilled water system will stop immediately, which will immediately affect the temperature and humidity of the entire clean room and needs to be restored immediately.

[0098] (6) If the hot water system stops, it will affect the operation of the cleanroom air conditioner, and the temperature and humidity will be uncontrollable. It needs to be restored immediately.

[0099] (7) If the medium-temperature water system stops, ① it will affect the operation of the air compressor system. The air compressor will stop after about 5 minutes because the medium-temperature water plays a cooling role in the air compressor system. The stop of the medium-temperature water system will cause the temperature to be too high and the air compressor will stop automatically; ② it will affect the operation of the nitrogen generator system. The nitrogen generator will stop after about 5 minutes because the medium-temperature water plays a cooling role in the nitrogen generator system. The stop of the medium-temperature water system will cause the temperature to be too high and the nitrogen generator will stop automatically; ③ it will affect the temperature of the entire clean room because the medium-temperature water is the cooling water for the dry cooling coil.

[0100] (8) If the nitrogen generation system stops, ① it will affect the special gas system. The nitrogen already produced can still be supplied for 20 minutes. After 20 minutes, the special gas system will immediately stop supplying gas because all pneumatic valves will be closed; ② it will affect the operation of the ultrapure water system. The nitrogen already produced can still be supplied for 20 minutes. After about 20 minutes, the ultrapure water system will stop operating because there is no nitrogen supply to the ultrapure water nitrogen sealing tank; ③ after the nitrogen supply stops for 20 minutes, it will affect the use of all process equipment.

[0101] (9) If the air compressor system stops, ① it will affect the pure water system. The pure water system will stop 4 hours after the air compressor stops; ② it will cause 80% of the process equipment to malfunction.

[0102] (10) If the vacuum system stops, it will not affect other plant equipment, but it will affect the process equipment that uses vacuum, such as coating and developing equipment, lithography machine, etching machine, etc.

[0103] (11) If the process cooling water system is shut down, it will not affect other plant equipment, but it will affect the process equipment using PCW, accounting for about 90% of the process equipment.

[0104] (12) If the air conditioning unit stops, it will immediately affect the temperature and humidity of the entire laboratory and needs to be restored immediately.

[0105] (13) If the wastewater system is shut down, it will not affect other plant equipment. The wastewater system has a temporary storage tank that can support 8 hours. After 8 hours, it will affect the wastewater discharge of the process equipment, which will affect the coating and developing equipment and the wet processing table.

[0106] (14) If the exhaust system stops, ① it will affect the operation of the special gas system, affect the false alarm of the gas detector, cause the special gas system to stop supplying gas immediately, and the process equipment using the special gas cannot operate normally; ② almost all exhaust process equipment cannot be used.

[0107] (15) If the bulk gas is shut down, it will not affect other plant equipment. However, the process equipment that uses bulk gas cannot be used normally, accounting for about 90% of the process equipment.

[0108] (16) If the special gas system shuts down, it will not affect other plant equipment. However, the process equipment using the special gas will not be able to operate normally, accounting for about 50% of the process equipment.

[0109] (17) If the chemical supply system is shut down, it will not affect other plant equipment, but it will affect the wet cleaning and etching equipment.

[0110] The process equipment will be explained using fully automated coating and developing equipment and MOCVD equipment as examples, as detailed below:

[0111] Fully automatic coating and developing equipment includes the main unit and an auxiliary temperature and humidity control system. Under normal circumstances, the auxiliary system provides a constant temperature and humidity environment for the main unit, precisely controlling the coating and developing process. However, if the auxiliary system malfunctions, the main unit can still operate and perform the coating and developing processes normally, but the results will be poor. Therefore, when the fully automatic coating and developing equipment malfunctions or the process results significantly deteriorate, the auxiliary system should be listed as a related device in the smart work order so that staff can consider whether the system is faulty when troubleshooting the fully automatic equipment.

[0112] Under normal circumstances, the exhaust gas treatment equipment of the micro-nano fabrication platform is used to treat the exhaust gas from the MOCVD equipment, ensuring that the exhaust gas meets the standards before it can be discharged. If the exhaust gas treatment device malfunctions, the MOCVD equipment cannot operate normally and must remain in a non-operational state. Direct discharge of exhaust gas without proper treatment is dangerous. Therefore, if the exhaust gas treatment device malfunctions or malfunctions, the MOCVD system needs to be shut down, and the shutdown status should be recorded in the smart work order along with the associated equipment. This allows staff to quickly understand the reason for the MOCVD shutdown.

[0113] Step S902: Generate associated equipment fault inspection information based on the correlation between the associated equipment unit and the faulty equipment unit, and send it to the inspection personnel.

[0114] Specifically, based on the correlation between the associated equipment units and the faulty equipment units shown in the above example, associated equipment fault inspection information is generated and sent to the inspection personnel so that the inspection personnel can promptly check the operating status of the associated equipment units or take shutdown measures.

[0115] Furthermore, considering that the micro-nano fabrication platform may receive multiple smart work orders at any given time, and that inspection personnel need to verify the information of each smart work order, and taking into account that different equipment unit failures have different impact ranges or levels on the micro-nano fabrication platform, the smart work orders need to be sorted and checked sequentially when the inspection personnel verify them. Specifically:

[0116] Based on the impact level of the faulty equipment unit corresponding to the smart work order, the smart work orders are sorted, and the sorted smart work orders are sent to the inspection personnel for verification in turn.

[0117] Taking plant equipment as an example, the impact levels of faulty equipment units are classified as follows:

[0118] Level 1: Those that affect laboratory safety, such as alarms from detectors in special gas systems or leak alarms in chemical supply systems;

[0119] Level 2: Affects the use of all process equipment in the laboratory, such as sudden power outages, shutdowns of the chilled water system, cooling water system, medium-temperature water system, and air conditioning units.

[0120] Level 3: Affects the use of some process equipment in the laboratory, such as the shutdown of the ultrapure water system and the shutdown of the chemical process system;

[0121] Level 4: The use of process equipment will not be affected in the short term, but repairs are needed as soon as possible, such as wastewater systems.

[0122] The smart work orders corresponding to the above impact levels are ranked as follows: Level 1 > Level 2 > Level 3 > Level 4.

[0123] After identifying the specific faulty equipment unit and its corresponding fault condition based on the aforementioned smart work order, a specific maintenance suggestion plan can be generated by combining the maintenance suggestions provided by the engineer. This allows maintenance engineers to quickly perform maintenance based on the content described in the smart work order. Specifically:

[0124] Step S1001: After the smart work order is generated, obtain maintenance suggestions from engineers regarding the faulty equipment unit through various communication methods.

[0125] Specifically, the communication methods include WeChat, email, WeChat for Business, WeChat for Government Affairs, DingTalk, and other methods. The name of the faulty equipment unit in the smart work order is used as a keyword to extract information from the communication records of various communication methods, thereby obtaining the maintenance suggestions from engineers regarding the faulty equipment unit.

[0126] Step S1002: Integrate the maintenance suggestion information according to the time series to obtain the maintenance suggestion plan for the faulty equipment unit.

[0127] Specifically, considering that the communication process of maintenance suggestion information proceeds over time, the maintenance suggestion information of the faulty equipment unit is integrated according to the time sequence to obtain the maintenance suggestion plan for the faulty equipment unit.

[0128] The process of integrating maintenance suggestion information involves filtering the information.

[0129] The maintenance suggestion information is input into the trained semantic recognition model to obtain the semantic representation of the maintenance suggestion information;

[0130] When the semantic representation of the maintenance suggestion information is positive, the maintenance suggestion information is retained;

[0131] When the semantic representation of the maintenance suggestion information is reversed, the maintenance suggestion information is discarded.

[0132] The retained maintenance suggestion information is integrated in chronological order to obtain a maintenance suggestion plan for the faulty equipment unit.

[0133] The following is an example of the process for integrating the above maintenance suggestion information:

[0134] On January 26, 2025, two leaks occurred in the ultrapure water system: one from the water supply resistivity probe and the other from the primary TOC flange. The details of the leaks were discussed in a WeChat group chat as follows:

[0135] Engineer: Mr. Zhang, have you found the cause of the leak in the first-level TOC flange and the leak in the water supply resistivity probe?

[0136] Mr. Zhang: The leak in the Tier 1 TOC flange is caused by a pinhole in the full weld. We need to find a worker to re-weld it, and please provide details of the leak. The cause of the leak in the water supply resistivity probe has not yet been found; we will continue our investigation.

[0137] Engineer: Okay, then please continue to investigate the cause of the water supply resistivity probe leakage.

[0138] Mr. Zhang: Okay.

[0139] The DingTalk chat log from January 27th is as follows:

[0140] Engineer Zhang: (At this point, you can refer to the engineer's question from yesterday) The reason for the water supply resistivity probe leaking water is that the original sealing PTFE tape has aged and loosened due to the long-term use of the probe under water pressure, and it needs to be rewrapped with sealing PTFE tape.

[0141] Engineer: Okay, then please proceed according to the plan.

[0142] At this point, the suggested repair solutions for the leak in the primary TOC flange of the ultrapure water system can be summarized as follows: "The leak in the primary TOC flange is caused by a pinhole in the full weld, which requires a worker to re-weld it, along with an explanation of the cause of the leak." The suggested repair solutions for the leak in the water supply resistivity probe are as follows: "The leak in the water supply resistivity probe is caused by the aging of the original sealing PTFE tape due to the long-term use of the probe under water pressure, which has led to loosening and leakage. It is necessary to re-wrap the sealing PTFE tape."

[0143] Furthermore, to avoid situations where the integrated fault repair plan is incompatible with the existing faults in the equipment unit, or where the integrated fault repair plan, while solving the current faults in the equipment unit, may introduce other safety hazards, the repair suggestions for the faulty equipment unit obtained in step S1002 need to be verified in conjunction with the knowledge system or repair suggestions in publicly available literature. Specifically:

[0144] Step S1003: If the maintenance suggestion plan for the faulty equipment unit lacks the cause of the fault or maintenance method of the faulty equipment unit, a reference maintenance suggestion plan is obtained from the reference database based on the intelligent work order.

[0145] Specifically, during the process of engineers discussing maintenance plans for faulty equipment units, they may not be able to determine the specific cause of the fault or the maintenance method. However, due to the step of integrating the fault maintenance plan, an incomplete fault maintenance plan is still generated. This incomplete fault maintenance plan cannot solve the problem of the faulty equipment unit. At this time, it is necessary to introduce reference maintenance suggestion plans from the reference database to solve the problem of the faulty equipment unit.

[0146] Step S1004: If the maintenance suggestion plan for the faulty equipment unit records the cause of the fault and the maintenance method of the faulty equipment unit, search the reference database for at least one reference fault cause and at least one reference maintenance method according to the intelligent work order.

[0147] Step S1005: Determine the similarity between the fault cause and the reference fault cause, and the similarity between the corresponding repair method and the reference repair method. If the similarity between the fault cause and the reference fault cause is lower than the analysis confidence threshold and / or the similarity between the repair method and the reference repair method is lower than the operation confidence threshold, change the fault cause in the repair suggestion plan to the reference fault cause, and change the repair method in the fault repair suggestion plan to the reference repair method.

[0148] It should be noted that the micro-nano fabrication platform in this embodiment is equipped with a reference database, which contains fault manuals for each piece of equipment, including the causes of various fault phenomena and specific repair methods. Therefore, when it is determined that the repair suggestion solution communicated and integrated by the engineer is complete, it is possible to further determine whether the repair suggestion solution is reliable. For example, whether the repair suggestion solution has not appeared in the fault manual. If so, it means that the repair suggestion solution may not be correct, and the fault causes and specific repair methods in the fault manual should be taken as the standard. In the above step S1005, the analysis reliability threshold and the operation reliability threshold can be set according to the acceptability of the deviation between the repair suggestion solution and the corresponding content in the fault manual. For example, the analysis reliability threshold can be set to 10%, and the operation reliability threshold can be set to 40%.

[0149] Furthermore, considering that maintenance solutions for the same faults in equipment units within the micro-nano fabrication platform can be somewhat relevant, these solutions may only address the current fault. If the frequency of the same fault occurs too frequently within a set time period, it means that the historical maintenance solutions for that fault did not adequately resolve the issue. In this case, adjustments to the historical maintenance solutions are necessary, as follows:

[0150] Step S1101: Obtain the historical maintenance plan of the faulty equipment unit.

[0151] Step S1102: If there are multiple maintenance suggestion schemes for the faulty equipment unit, the following steps are set for any one of the maintenance suggestion schemes:

[0152] Step S1103: If the similarity between the suggested repair scheme and the historical repair scheme is greater than a first threshold, and the number of times the similarity between the historical repair scheme and the suggested repair scheme is greater than the first threshold is greater than a second threshold.

[0153] It should be noted that, considering the descriptions of the suggested repair solutions may not be entirely identical, if the similarity between the current and historical suggested repair solutions exceeds a first threshold, then the current and historical suggested repair solutions can be considered the same. It should also be noted that the similarity between the current and historical suggested repair solutions primarily depends on the cause analysis, the parts to be repaired, and the handling methods for those parts.

[0154] In this embodiment, the first threshold for similarity and the second threshold corresponding to the number of times the historical maintenance plan appears can be set according to the acceptance of maintenance plans that do not solve the fundamental problem for the specific equipment unit. In this embodiment, the first threshold can be set to 85% and the second threshold can be set to 3, which means that when the similarity between the current maintenance suggestion plan and the historical maintenance suggestion plan exceeds 85%, it is considered as the same maintenance suggestion plan; when the same maintenance suggestion plan appears more than 3 times in the historical maintenance plan, the priority of the historical maintenance plan needs to be reduced according to a preset weight (such as 5% or 10%).

[0155] Step S1104: Reduce the priority of the maintenance suggestion scheme according to the preset weight.

[0156] Step S1105: Sort the maintenance suggestion schemes with adjusted priorities and push the sorted maintenance suggestion schemes to the maintenance personnel.

[0157] Furthermore, considering the high frequency of identical equipment unit failures described above in the historical maintenance solutions, it means that the historical maintenance solutions cannot resolve the equipment unit failure. In this case, whether there are multiple historical maintenance solutions or only one historical maintenance solution, the historical maintenance solution is not applicable, and a new maintenance solution is urgently needed.

[0158] Step S1201: Obtain the historical maintenance plan of the faulty equipment unit.

[0159] Step S1202: If the similarity between the suggested repair scheme and the historical repair scheme is greater than a first threshold, and the frequency of the historical repair scheme within a preset period is higher than a third threshold.

[0160] Step S1203: Generate an invalid maintenance suggestion message based on the intelligent work order and send it to the maintenance personnel.

[0161] In this embodiment, the first threshold for similarity and the third threshold corresponding to the number of times the historical maintenance plan appears can be set according to the acceptance of maintenance plans that do not solve the fundamental problem for the specific equipment unit. In this embodiment, the first threshold can be set to 85%, and the third threshold can be set to a frequency of 3 times a day.

[0162] To better illustrate the above embodiments, the alarm of the chiller unit in the micro-nano fabrication platform will be used as an example:

[0163] At 12:40 PM on June 19th, the chiller unit of the chilled water system automatically shut down during operation, displaying an alarm message of E4: low pressure alarm. It was immediately reset, and the equipment returned to normal operation.

[0164] The same shutdown occurred at 4:20 PM on June 19th. A reset was immediately performed, and the equipment returned to normal operation.

[0165] The same shutdown occurred at 7:30 PM on June 19th. A reset was immediately performed, and the equipment returned to normal operation. While the equipment was recovering, possible causes were investigated. At this point, resetting did not resolve the issue, and further investigation was required.

[0166] During the troubleshooting process, the same shutdown occurred at 21:05 on June 19th. The solution was then changed to increasing the water supply pressure threshold of the chilled water system's constant pressure water supply device, which was considered to have resolved the issue.

[0167] On June 23rd at 5:50 PM, the same shutdown occurred. The previous solution only resolved the short-term problem, and the root cause was not found. Further contact was made with external expert resources to troubleshoot the issue. It was confirmed that the pipes might be blocked. The filter was opened and foreign objects were removed. So far, it has been operating normally.

[0168] The aforementioned intelligent work order filling method effectively reviews equipment fault reports sent by inspection personnel and adjusts any missing or unreasonable parts of the reports, thereby improving the efficiency and effectiveness of intelligent work order filling. Furthermore, this embodiment integrates maintenance suggestions from various communication methods to generate maintenance suggestion plans based on intelligent work order filling. It also adjusts the current maintenance suggestion plans based on historical equipment fault data and maintenance plans, further improving the maintenance efficiency and effectiveness of the micro-nano processing platform equipment.

[0169] It should be understood that, although attached Figure 1 The steps in the flowchart are shown sequentially according to the arrows, but these steps are not necessarily executed in the order indicated by the arrows. Unless otherwise specified in this document, there is no strict order requirement for the execution of these steps, and they can be executed in other orders. Furthermore, [the following is a list of steps]. Figure 1 At least some of the steps in the process may include multiple sub-steps or sub-stages. These sub-steps or stages are not necessarily completed at the same time, but can be executed at different times. The execution order of these sub-steps or stages is not necessarily sequential, but can be executed in turn or alternately with other steps or at least some of the sub-steps or stages of other steps.

[0170] The above-described embodiments of the present invention describe a method for filling out intelligent work orders. Since this method can be implemented using various types of devices, the present invention also discloses an intelligent work order filling device. Figure 2The following are specific embodiments for detailed explanation.

[0171] The fault reporting module 1301 is used to obtain fault reporting information sent by inspection personnel;

[0172] Information extraction module 1302 is used to extract the faulty equipment unit, fault type, fault reporting time, fault description information and inspection personnel ID from the fault reporting information;

[0173] The equipment verification module 1303 is used to provide a smart work order filling verification prompt based on the inspection personnel ID if it is determined from the faulty equipment unit that the faulty reported information does not belong to the laboratory equipment unit.

[0174] The information gap verification module 1304 is used to determine whether any one of the faulty equipment group, the fault type, and the fault description information is empty if the faulty equipment group, the fault type, and the fault description information are determined to be within the scope of laboratory equipment group based on the faulty equipment group. If any one of the faulty equipment group, the fault type, and the fault description information is empty, the first supplementary prompt is filled in in conjunction with the inspection personnel ID feedback smart work order.

[0175] The information consistency verification module 1305 is used to determine whether the faulty equipment unit, the fault type, and the fault description information are consistent if the faulty equipment unit, the fault type, and the fault description information are all not empty. If the faulty equipment unit is inconsistent with the fault type or the fault description information, it generates a smart work order filling verification prompt based on the faulty equipment unit, the fault type, and / or the fault description information, and feeds back the smart work order filling verification prompt based on the inspection personnel ID.

[0176] The unique information verification module 1306 is used to determine whether the objects specified by the faulty equipment group, the fault type, and the fault description information are unique if the faulty equipment group, the fault type, and the fault description information are consistent. If the objects specified by any one of the faulty equipment group, the fault type, and the fault description information are not unique, a second supplementary prompt for filling in the smart work order is generated by combining the faulty equipment group and / or the fault type and / or the fault description information, and the second supplementary prompt for filling in the smart work order is fed back by combining the inspection personnel ID.

[0177] The details of the intelligent work order filling device can be found in the above description of the method limitations, and will not be repeated here. Each module in the above device can be implemented entirely or partially through software, hardware, or a combination thereof. These modules can be embedded in the processor of the terminal device in hardware form or independent of it, or stored in the memory of the terminal device in software form, so that the processor can call and execute the corresponding operations of each module.

[0178] In one embodiment, the present invention also provides a computer-readable storage medium having a computer program stored thereon, wherein the computer program, when executed by a processor, implements the steps of the above-described intelligent work order filling method.

[0179] The computer-readable storage medium may be an electronic storage device such as flash memory, EEPROM (Electrically Erasable Programmable Read-Only Memory), EPROM (Erasable Programmable Read-Only Memory), hard disk, or ROM. Optionally, the computer-readable storage medium includes a non-transitory computer-readable storage medium. The computer-readable storage medium has storage space for program code that performs any of the method steps described above. This program code can be read from or written to one or more computer program products, and the program code may be compressed in an appropriate form.

[0180] In one embodiment, the present invention provides a computer device including a memory and a processor, wherein the memory stores a computer program, and the processor executes the above-described intelligent work order filling method when executing the computer program.

[0181] The computer device includes a memory, a processor, and one or more computer programs, wherein the one or more computer programs can be stored in the memory and configured to be executed by one or more processors, and one or more application programs are configured to perform the above-described intelligent work order filling method.

[0182] A processor may include one or more processing cores. The processor connects to various parts of the computer device using various interfaces and lines, and performs various functions and processes data by running or executing instructions, programs, code sets, or instruction sets stored in memory, and by calling data stored in memory. Optionally, the processor may be implemented using at least one hardware form of Digital Signal Processing (DSP), Field-Programmable Gate Array (FPGA), or Programmable Logic Array (PLA). The processor may integrate one or a combination of several of the following: Central Processing Unit (CPU), Graphics Processing Unit (GPU), and modem. The CPU primarily handles the operating system, user interface, and applications; the GPU is responsible for rendering and drawing the displayed content; and the modem handles wireless communication. It is understood that the modem may also be implemented separately as a communication chip, without being integrated into the processor.

[0183] The memory may include random access memory (RAM) or read-only memory (ROM). The memory can be used to store instructions, programs, code, code sets, or instruction sets. The memory may include a program storage area and a data storage area. The program storage area may store instructions for implementing an operating system, instructions for implementing at least one function (such as touch functionality, sound playback functionality, image playback functionality, etc.), and instructions for implementing the various method embodiments described above. The data storage area may also store data created by the terminal device during use.

[0184] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A method for filling out intelligent work orders, characterized in that, include: Receive fault reports sent by inspection personnel; Extract the faulty equipment unit, fault type, fault reporting time, fault description information, and inspection personnel ID from the fault reporting information; If the fault report information is determined to be outside the scope of the laboratory equipment unit based on the faulty equipment unit, a smart work order filling verification prompt will be given in conjunction with the inspection personnel ID. If the fault report information is determined to belong to the laboratory equipment unit based on the faulty equipment unit, determine whether any one of the faulty equipment unit, the fault type, and the fault description information is empty. If any one of the faulty equipment unit, the fault type, and the fault description information is empty, fill in the first supplementary prompt in conjunction with the inspection personnel ID feedback smart work order. If the faulty equipment unit, the fault type, and the fault description information are all not empty, determine whether the faulty equipment unit, the fault type, and the fault description information are consistent. If the faulty equipment unit is inconsistent with the fault type or the fault description information, generate a smart work order filling verification prompt based on the faulty equipment unit, the fault type, and / or the fault description information, and provide feedback on the smart work order filling verification prompt based on the inspection personnel ID. If the faulty equipment unit, the fault type, and the fault description information are consistent, determine whether the objects specified by the faulty equipment unit, the fault type, and the fault description information are unique. If the objects specified by any one of the faulty equipment unit, the fault type, and the fault description information are not unique, generate a second supplementary prompt for filling out the smart work order based on the faulty equipment unit and / or the fault type and / or the fault description information, and provide feedback on the second supplementary prompt for filling out the smart work order based on the inspection personnel ID. After the smart work order is generated, maintenance suggestions from engineers regarding the faulty equipment unit are obtained through various communication methods. The maintenance suggestion information is integrated based on the time series to obtain the maintenance suggestion plan for the faulty equipment unit.

2. The intelligent work order filling method as described in claim 1, characterized in that, Also includes: If, based on the faulty equipment unit, the fault report information belongs to the laboratory equipment unit range, and the faulty equipment unit, the fault type, and the fault description information are all non-empty, and the faulty equipment unit, the fault type, and the fault description information are consistent and the specified object is unique, a smart work order is generated based on the faulty equipment unit, the fault type, the fault report time, the fault description information, and the inspection personnel ID.

3. The intelligent work order filling method as described in claim 1, characterized in that, The fault reporting information sent by the inspection personnel includes text fault reporting information and / or voice fault reporting information sent by the inspection personnel.

4. The intelligent work order filling method as described in claim 1, characterized in that, Also includes: Retrieve historical fault information of the faulty equipment unit; Historical fault alerts are generated based on the historical fault information and sent to the inspection personnel.

5. The intelligent work order filling method as described in claim 1, characterized in that, Also includes: Retrieve the associated equipment units of the faulty equipment unit; Based on the correlation between the associated equipment unit and the faulty equipment unit, associated equipment fault inspection information is generated and sent to the inspection personnel.

6. The intelligent work order filling method as described in claim 1, characterized in that, Also includes: Based on the impact level of the faulty equipment unit corresponding to the smart work order, the smart work orders are sorted, and the sorted smart work orders are sent to the inspection personnel for verification in turn.

7. The intelligent work order filling method as described in claim 1, characterized in that, Also includes: If the suggested repair plan for the faulty equipment unit lacks the cause of the fault or the repair method, a reference repair suggested plan will be obtained from the reference database based on the intelligent work order.

8. The intelligent work order filling method as described in claim 7, characterized in that, Also includes: If the maintenance suggestion plan for the faulty equipment unit records the cause of the fault and the maintenance method, search the reference database for at least one reference fault cause and at least one reference maintenance method according to the intelligent work order; Determine the similarity between the fault cause and the reference fault cause, as well as the similarity between the corresponding repair method and the reference repair method. If the similarity between the fault cause and the reference fault cause is lower than the analysis confidence threshold and / or the similarity between the repair method and the reference repair method is lower than the operation confidence threshold, change the fault cause in the repair suggestion plan to the reference fault cause, and change the repair method in the repair suggestion plan to the reference repair method.

9. The intelligent work order filling method as described in claim 1, characterized in that, Also includes: Obtain the historical maintenance plans for the faulty equipment unit; If there are multiple suggested repair solutions for the faulty equipment unit, the following steps are set for any one of the suggested repair solutions: If the similarity between the suggested repair solution and the historical repair solution is greater than a first threshold, and the number of times the similarity between the suggested repair solution and the historical repair solution is greater than the first threshold is greater than a second threshold; The priority of the proposed repair solutions is reduced according to a preset weight. The repair suggestions with adjusted priorities are sorted, and the sorted repair suggestions are pushed to the repair personnel.

10. The intelligent work order filling method as described in claim 7, characterized in that, Also includes: Obtain the historical maintenance plans for the faulty equipment unit; If the similarity between the suggested repair solution and the historical repair solution is greater than a first threshold, and the frequency of the historical repair solution within a preset period is higher than a third threshold; The system generates an invalid repair suggestion message based on the smart work order and sends it to the repair personnel.

11. An intelligent work order filling device, characterized in that, include: The fault reporting module is used to obtain fault reporting information sent by inspection personnel; The information extraction module is used to extract the faulty equipment unit, fault type, fault reporting time, fault description information and inspection personnel ID from the fault reporting information; The equipment verification module is used to provide a smart work order filling verification prompt if the fault report information is determined to be outside the scope of laboratory equipment units based on the faulty equipment unit, in conjunction with the inspection personnel ID. The information gap verification module is used to determine whether any one of the faulty equipment group, the fault type, and the fault description information is empty if the faulty equipment group, the fault type, and the fault description information are determined to be within the scope of laboratory equipment group based on the faulty equipment group. If any one of the faulty equipment group, the fault type, and the fault description information is empty, the module combines the inspection personnel ID to feed in the first supplementary prompt in the intelligent work order. The information consistency verification module is used to determine whether the faulty equipment unit, the fault type, and the fault description information are consistent if the faulty equipment unit, the fault type, and the fault description information are all not empty. If the faulty equipment unit is inconsistent with the fault type or the fault description information, the module generates a smart work order filling verification prompt based on the faulty equipment unit, the fault type, and / or the fault description information, and feeds back the smart work order filling verification prompt based on the inspection personnel ID. The unique information verification module is used to determine whether the objects specified by the faulty equipment group, the fault type, and the fault description information are unique if the faulty equipment group, the fault type, and the fault description information are consistent. If the objects specified by any one of the faulty equipment group, the fault type, and the fault description information are not unique, the module generates a second supplementary prompt for filling out the smart work order based on the faulty equipment group and / or the fault type and / or the fault description information, and feeds back the second supplementary prompt for filling out the smart work order based on the inspection personnel ID. After the smart work order is generated, maintenance suggestions from engineers regarding the faulty equipment unit are obtained through various communication methods. The maintenance suggestion information is integrated based on the time series to obtain the maintenance suggestion plan for the faulty equipment unit.

12. A computer-readable storage medium having a computer program stored thereon, characterized in that, When the computer program is executed by the processor, it implements the steps of any one of the intelligent work order filling methods in claims 1-10.

13. A computer device comprising a memory and a processor, wherein the memory stores a computer program, characterized in that, When the processor executes the computer program, it performs any one of the intelligent work order filling methods according to claims 1-10.

Images