3D printing jetting device and method suitable for precise deposition and shaping of nanoparticles

Abstract

The application discloses a 3D printing jetting device and method suitable for nanoparticle precise deposition and forming, a sheath flow inlet channel is arranged outside a main nozzle, the sheath flow channel is coaxially distributed with a main nozzle outlet, and the sheath flow inlet channel is connected with a sheath flow gas source. By adjusting the sheath flow and the main flow, a stable covering gas flow can be formed around the aerosol, the main jetting gas flow is accelerated and focused, and the diffusion and splashing of the nanoparticles can be effectively avoided. Meanwhile, a micro-beam adjustable ultraviolet irradiation module is integrated, local light processing operation in the deposition beam spot range is carried out, and the printing efficiency is improved. A multistage contraction cone structure design is adopted inside the main nozzle, when the main gas flow enters the nozzle, a stepped acceleration effect is formed, and then the sheath gas flow is combined to complete 3D printing.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of micro-nano 3D printing, and particularly relates to a 3D printing jetting device suitable for precise deposition and forming of nanoparticles, and also relates to a 3D printing jetting method suitable for precise deposition and forming of nanoparticles. BACKGROUND

[0002] Nanoparticles are the basis of many devices and applications with complex properties and functions. Due to their flexibility and compatibility, nanoparticles have attracted much attention in many studies, including microelectronics, optics and sensing. The focusing and deposition of aerosol nanoparticles face serious difficulties related to the basic properties of nanoparticles, such as high diffusivity and low inertia. In order to overcome these major limitations of aerosol nanoparticle beam printing, two methods have been adopted. The first method is to use aerosol deposition of liquid droplets containing nanoparticles. This method is close to droplet inkjet printing, and its disadvantages are that the ink containing nanoparticles must be prepared and stored, and solvents are used during printing. The second method is to deposit nanoparticles on a substrate by using some aerodynamic lenses or coaxial nozzles. It includes obtaining droplets by spraying, drying, charging and electromobility separation to dispense a fraction of nanoparticles, and then aerodynamic particle focusing. The most widely used application is to use a dry aerosol direct writing technology to selectively generate a nanoparticle pattern on a substrate.

[0003] In the existing nanoparticle 3D printing jetting device, the gas flow at the nozzle outlet will produce violent fluctuations due to the complex action of fluid mechanics, causing the nanoparticles to be disturbed by unstable aerodynamic forces during the jetting process, resulting in the particle trajectory being easily deviated. This deviation not only causes the deposition area beam spot to appear serious uneven phenomenon, causing material distribution dispersion, but also greatly reduces the deposition efficiency, resulting in a large number of nanoparticles cannot be effectively deposited in the target area. The unevenness of the deposition beam spot and the low efficiency will further affect the subsequent processing quality, making the performance parameters of different batches of products differ significantly, seriously damaging the repeatability and reliability of the processing process. Several existing particle focusing strategies, including aerodynamic, electrostatic and electro / thermal phoretic focusing. Given the working principle of the dry aerosol direct writing method and the electrical neutrality of nanoparticles, electrostatic and electro / thermal phoretic focusing methods are not the best choice for particle focusing in the dry aerosol direct writing method. On the other hand, the traditional single-gas-flow nozzle structure only relies on a single gas flow to transport and constrain nanoparticles, and when controlling the particle motion path, it is difficult to accurately guide the particles to move according to the predetermined trajectory due to the lack of sufficient control dimensions. And in terms of suppressing jet diffusion, the limited restraining ability of single gas flow cannot effectively resist external interference and the diffusion trend of the fluid itself, resulting in the jet gradually diverging during transmission. Especially under the condition of high-speed compressible jet flow, the particles are affected by shock wave disturbance and shear layer instability. This deficiency is in sharp contradiction with the high resolution and high stability deposition required by high-precision micro-nano manufacturing, and it is difficult to meet the increasingly stringent processing precision requirements of nanoparticle jet deposition technology in current advanced manufacturing fields.

[0004] Therefore, it is an urgent problem in the field to develop a nanoparticle 3D printing jetting device that can effectively regulate the interaction between the sheath flow and the main gas flow, and realize stable particle transmission and accurate deposition. SUMMARY

[0005] The purpose of the present application is to provide a 3D printing jetting device suitable for nanoparticle accurate deposition and forming, aiming to solve the problems of unstable gas flow at the nozzle outlet and low particle deposition rate in the prior art.

[0006] The technical scheme adopted by the present application is a 3D printing jetting device suitable for nanoparticle accurate deposition and forming, comprising a control console fixedly connected to an insulating support platform, two stepper motors are arranged on the control console, the output ends of the two stepper motors are connected with a four-way pipe through flanges, one of the passages formed by the four-way pipe is connected with a 3D printing nozzle in a printing cavity through connected main gas path pipeline a, main gas path pipeline b, and the other is connected with a gas cylinder; the gas cylinder is connected with the sheath gas inlet of the 3D printing nozzle through a sheath gas path pipeline.

[0007] The present application is characterized in that,

[0008] The printing cavity is provided with a printing nozzle and a micro-beam adjustable ultraviolet irradiation device inside a cavity, and the printing nozzle and the micro-beam adjustable ultraviolet irradiation device are fixed on the upper part of the cavity through a V-shaped support; the printing nozzle is sealingly connected with the end of the main gas path pipeline b which extends into the cavity through a sealing sleeve.

[0009] A ceramic heating pipe is arranged on the main gas path pipeline b, and a ceramic heating pipe protection sleeve is arranged outside the ceramic heating pipe; a section of Laval pipeline is connected to the lower part of the ceramic heating pipe, and the Laval pipeline has a variable cross-section structure with a throat contraction and an outlet expansion; the Laval pipeline is connected to the main gas path pipeline b through a sleeve pipe reducing joint.

[0010] The main gas path pipeline a is connected with the main gas path pipeline b through a bend sleeve pipe joint and a sleeve pipe joint a; the main gas path pipeline b is connected with the 3D printing nozzle through a sleeve pipe joint b, a flange connecting disc a and a V-shaped support.

[0011] The 3D printing nozzle comprises a multi-stage contraction cone body which is mounted in a detachable shell; the main gas path pipeline b is sealingly connected with the upper part of the multi-stage contraction cone body through a sealing gasket; a sheath flow inlet channel is formed between the multi-stage contraction cone body and the detachable shell; the sheath gas in the sheath gas inlet merges with the main gas after entering the sheath flow inlet channel; the end of the detachable shell is a flow guide outlet, and the flow guide outlet is a straight pipe with an inner diameter of 0.15-0.25 mm.

[0012] An intermediate cavity is formed inside the four-way pipe, and a discharge end electrode and a cylindrical electrode are symmetrically arranged inside the intermediate cavity; the discharge gap between the two discharge end electrodes is arranged close to the position of the gas inlet connected to the gas cylinder.

[0013] The step motor is further connected with an input conductive rod, and an insulating sleeve is arranged outside the input conductive rod; the input conductive rod is a metal conductor, one end of which is connected with an external high-voltage power supply, and the other end of the input conductive rod is connected with the cylindrical electrode, and the cylindrical electrode is connected with the discharge end electrode.

[0014] The step motor, the intermediate cavity of the four-way pipe, the electrodes and the external high-voltage power supply constitute a spark discharge generator. The control console of the spark discharge generator comprises a high-voltage power supply control module and a step motor driving module, which are used for centralized control and parameter adjustment of the spark discharge energy and the position of the conductive rod.

[0015] The printing cavity comprises a chamber, a visible cavity door and a control panel are arranged on the chamber, a chamber exhaust port is arranged on the chamber, and the chamber exhaust port is connected with a gas pump; the visible cavity door is connected with the chamber through a hinge.

[0016] A mass flow controller c is arranged on the main gas path pipeline a, a mass flow controller a is arranged on the sheath gas path pipeline, and a mass flow controller b is arranged on the pipeline connected between the gas cylinder and the four-way pipeline.

[0017] The micro-beam adjustable ultraviolet irradiation device comprises an ultraviolet light source driving motor connected with a focusing cylinder through a light source connecting piece and a flange connecting disc b; the focusing cylinder is connected with an adjustable diaphragm group connected with a collimating light guide cover, and the collimating light guide cover is provided with an irradiation port at the tail end.

[0018] The V-shaped support is connected with the detachable shell through the internal hexagonal taper end set screw and the nozzle support shell.

[0019] The chamber is also provided with an illuminating lamp, and a movable platform is arranged directly below the 3D printing nozzle and the micro-beam adjustable ultraviolet irradiation device, and a movable printing substrate is arranged on the movable platform.

[0020] The second technical scheme adopted by the application is a 3D printing jetting method suitable for precise deposition and forming of nanoparticles, nanoparticles are generated by ablating two discharge electrodes by plasma, inert gas and nanoparticles are mixed to form an aerosol by a gas cylinder, the aerosol is delivered to a 3D printing nozzle through main gas path pipelines a and b, a sheath flow gas source is connected to a sheath flow inlet channel outside the 3D printing nozzle. By adjusting the flow rates of the sheath flow and the main flow, a stable sheath flow can be formed around the aerosol, a ceramic heating tube is arranged in the main gas path section to realize precise heating and regulation of the main flow and the nanoparticles, and the main jetting flow is accelerated and focused, which can effectively prevent the diffusion and splashing of the nanoparticles; a micro-beam adjustable ultraviolet irradiation module is integrated to perform local light processing operation within the deposition beam spot range to complete the printing work.

[0021] The beneficial effects of the application are:

[0022] Firstly, the application adopts dry particle deposition, that is, inert gas is used to carry nanoparticles to directly form a powder aerosol, while traditional inkjet printing is to deposit liquid droplets containing surfactant stabilized nanoparticles on a substrate to form a required pattern. The use of chemical reagents for stabilizing the suspension during the synthesis of nanoparticles and printing may cause pollution and affect the performance of the nanoparticle film. Unlike the solvent-based nanoparticle deposition method, there is no chemical reagent in the dry technology during the particle synthesis and deposition process, which reduces the possibility of particle contamination and impurities.

[0023] Secondly, the focused deposition of nanoparticles (i.e. particles with an aerodynamic diameter of less than 100 nanometers) is challenging because of their low inertia and easy to leave the deposition chamber along the streamline without being deposited. Due to the existence of the carrier gas and the outlet vacuum environment, a stable sheath flow can be formed around the aerosol, the main jetting flow is sheared and stabilized, the nanoparticles are effectively guided to the target substrate for high-speed concentrated deposition, and the deposition efficiency is improved.

[0024] Thirdly, the present application introduces a Laval nozzle structure in the main gas path, so that the gas reaches the speed of sound in the throat area and further accelerates to supersonic speed in the expansion section, effectively improving the speed and kinetic energy of the nanoparticles into the nozzle, and enhancing the particle transport capacity. By adjusting the throat diameter and expansion angle, the Mach number of the main gas flow can also be flexibly controlled to adapt to different particle characteristics and process requirements, improving the universality and aerodynamic efficiency of the system.

[0025] Fourthly, the present application integrates a micro-beam adjustable ultraviolet irradiation unit in the side of the nozzle. This irradiation unit has adjustable beam spot size and variable irradiation direction functions, and can realize precise and local ultraviolet light processing on the beam spot area below the nozzle. By controlling the spot range and irradiation angle, it can be matched with the nanoparticle deposition area, effectively improving the edge definition of the deposition pattern and the inter-particle bonding strength. This ultraviolet irradiation module is started during the deposition process, has instant post-processing capability, and helps to enhance the density, adhesion and functional stability of the deposited structure, thereby improving the deposition quality and process precision of the nanoparticle printing system.

[0026] Fifthly, a ceramic heating pipe is arranged in the main gas path section, which can fully preheat the main gas path before entering the nozzle, thereby improving the thermal energy stability and dynamic performance of the main gas flow. By accurately controlling the heating temperature, the kinetic energy matching relationship between the gas and the particles can be effectively improved, and the particle carrying capacity and directional transmission effect can be enhanced. In addition, the ceramic heating element has excellent thermal stability and corrosion resistance, and is suitable for long-term continuous operation, significantly enhancing the reliability and service life of the device.

[0027] Sixthly, a multi-stage contraction cone structure is adopted inside the main nozzle. When the main gas flow enters the nozzle, under the guidance of the first-stage contraction cone, the flow passage cross-sectional area gradually decreases, the gas flow starts to accelerate and preliminarily realizes the conversion of pressure energy to kinetic energy. As the gas flow continues to advance to the subsequent multi-stage contraction cone, each stage of contraction structure further compresses the gas flow, forming a stepped acceleration effect. This step-by-step contraction design avoids the vortex and turbulence phenomena caused by sudden contraction of the gas flow, so that the main gas flow realizes smooth speed improvement and pressure conversion during the jetting process. Not only can it effectively enhance the carrying capacity of the gas flow to the nanoparticles, but also can ensure that the nanoparticles are sprayed to the substrate with more accurate trajectory under the action of stable gas flow, improving the beam spot precision and deposition rate of the deposition area.

[0028] Seventh, the guide outlet structure is arranged at the end of the main nozzle outlet cone, effectively avoiding the adverse pressure area problem caused by airflow turbulence. When the airflow carrying nanoparticles is accelerated through the multi-stage contraction cone and directly injected into the open space, the airflow will form a backflow due to the sudden change of pressure, forming an adverse pressure area near the nozzle outlet. The reverse airflow in this area will interfere with the normal trajectory of the nanoparticles, causing uneven dispersion and deposition of the particles. The introduction of the guide outlet can guide and constrain the high-speed airflow, allowing the airflow to be smoothly and stably ejected from the nozzle, reducing the turbulent interaction between the airflow and the external environment, eliminating the adverse pressure area, and enabling the airflow to continuously and stably push the nanoparticles to move in the preset direction. BRIEF DESCRIPTION OF DRAWINGS

[0029] Figure 1 The overall structure diagram of the nanoparticle 3D printing jet device described in the present application is shown in the figure.

[0030] In the figure: 1. Support table, 2. Insulating support platform, 3. Control console, 4. Stepper motor, 5. Gas cylinder, 6. Sheath gas pipeline, 7. Mass flow controller a, 8. Mass flow controller b, 9. Mass flow controller c, 10. Intermediate cavity, 11. Main gas pipeline a, 12. Ceramic heating sleeve, 13. Printing cavity, 14. Hinge, 15. Control panel, 16. Visible cavity door, 17. Chamber exhaust, 18. Air pump.

[0031] Figure 2 The internal structure diagram of the printing cavity of the nanoparticle 3D printing jet device described in the present application is shown in the figure.

[0032] In the figure: 19. Sealing sleeve, 20. V-shaped support, 21. Illumination lamp, 22. 3D printing nozzle, 23. Micro-beam adjustable ultraviolet irradiation device, 24. Movable printing substrate.

[0033] Figure 3(a) is a schematic diagram of the overall structure of the nanoparticle 3D printing nozzle described in the present application.

[0034] Figure 3(b) is a schematic diagram of the cross-section of the nanoparticle 3D printing nozzle described in the present application.

[0035] In the figure: 25. Elbow sleeve pipe joint, 26. Sleeve pipe joint a, 27. Sleeve pipe reducing joint, 28. Sleeve pipe joint b, 29. Flange connection disc a, 30. Sheath gas inlet, 31. Removable shell, 32. Main gas pipeline b, 33. Ceramic heating tube, 34. Ceramic heating tube protection sleeve, 35. Laval pipeline, 36. Nozzle support shell, 37. Internal hexagonal taper end set screw, 38. Sealing gasket, 39. Sealing washer, 40. Multi-stage contraction cone, 41. Guide outlet.

[0036] Figure 4This is a schematic diagram of the structure of the microbeam adjustable ultraviolet irradiation device described in this invention;

[0037] In the figure: 42. Ultraviolet light source drive motor, 43. Light source connector, 44. Flange connection plate b, 45. Focusing tube, 46. Adjustable aperture assembly, 47. Collimation guide cover, 48. Irradiation port.

[0038] Figure 5 This is a schematic diagram of the spark discharge generator described in this invention;

[0039] Figure 6 This is a schematic cross-sectional view of the intermediate cavity of the present invention;

[0040] In the diagram: 49. Connection to the main air circuit, 50. Input conductive rod, 51. Insulating sleeve, 52. Air inlet, 53. Discharge electrode, 54. Cylindrical electrode, 55. Air outlet.

[0041] Figure 7 This is a flowchart of the method of the present invention. Detailed Implementation

[0042] The present invention will be further described below with reference to the accompanying drawings and specific embodiments.

[0043] Example 1

[0044] This invention relates to a 3D printing jetting device suitable for the precise deposition and shaping of nanoparticles, using a coaxial flow nozzle operating at high subsonic speeds as the focusing system. It employs methods such as... Figure 1 The schematic diagram of the device shows that the nanoparticle pneumatic jetting device includes an overall support frame, a spark discharge generator, a gas path system, a nanoparticle 3D printing nozzle, and a micro-beam adjustable ultraviolet irradiation unit. Nanoparticles are generated by the spark discharge generator and mixed with inert gas in gas cylinder 5 to form an aerosol. This aerosol is accelerated through the main gas path pipe a11 and the Laval pipe 35 in Figure 3, entering the nanoparticle 3D printing nozzle 22 to deposit particles in conjunction with the movable printing substrate 24. Simultaneously, the integrated micro-beam adjustable ultraviolet irradiation device 23 performs localized light processing within the deposition beam area.

[0045] Example 2

[0046] A 3D printing jetting device suitable for precise deposition and shaping of nanoparticles includes a control console 3 fixedly connected to an insulating support platform 2. The control console 3 is equipped with two stepper motors 4. The output ends of the two stepper motors 4 are connected to a four-way pipe through flanges. One path of the four-way pipe is connected to the 3D printing nozzle 22 in the printing cavity 13 through the connected main air pipe a11 and main air pipe b32. The other path is connected to a gas cylinder 5. The gas cylinder 5 is connected to the sheath gas inlet 32 ​​of the 3D printing nozzle 22 through a sheath gas pipe 6.

[0047] The cavity of the printing cavity 13 is provided with a 3D printing nozzle 22 and a micro-beam adjustable ultraviolet irradiation device 23, which are fixed on the upper part of the cavity through a V-shaped support 20; the 3D printing nozzle 22 is sealingly connected with the end of the main gas path pipeline b32 extending into the cavity through a sealing sleeve 19.

[0048] A ceramic heating pipe 33 is arranged in the main gas path pipeline b32, and a ceramic heating pipe protection sleeve 34 is arranged outside the ceramic heating pipe 33. A section of Laval pipeline 35 is connected to the lower part of the ceramic heating pipe 33, and the Laval pipeline 35 has a variable cross-section structure with a throat contraction and an outlet expansion. The Laval pipeline 35 is connected to the main gas path pipeline b32 through a clamping sleeve pipe reducing joint 27.

[0049] The main gas path pipeline a11 is connected with the main gas path pipeline b32 through an elbow clamping sleeve joint 25 and a clamping sleeve joint a26. The main gas path pipeline b32 is connected with the 3D printing nozzle 22 through a clamping sleeve joint b28, a flange connecting disc a29 and a V-shaped support 20.

[0050] The 3D printing nozzle 22 comprises a multi-stage contraction cone 40 installed in a detachable shell 31. The main gas path pipeline b32 is sealingly connected with the upper part of the multi-stage contraction cone 40 through a sealing gasket 39. A sheath flow inlet channel is formed between the multi-stage contraction cone 40 and the detachable shell 31. The sheath gas in the sheath gas inlet 30 enters the sheath flow inlet channel and converges with the main gas. The end of the detachable shell 31 is a flow guide outlet 41, which is a straight pipe with an inner diameter of 0.15-0.25 mm.

[0051] As shown in Figure 6 An intermediate cavity 10 is formed inside the four-way pipe, and a discharge end electrode 53 and a cylindrical electrode 54 are symmetrically arranged inside the intermediate cavity 10. The two discharge end electrodes 53 form a discharge gap opposite to each other. The cylindrical electrode 54 is connected with the output end of the stepper motor. The gas inlet 52 connected with the gas cylinder 5 is arranged near the discharge gap position of the two discharge end electrodes 53.

[0052] The stepper motor 4 is further connected with an input conductive rod 50, and the input conductive rod 50 is externally provided with an insulating sleeve 51. The input conductive rod 50 is a metal conductor, one end of which is connected with an external high-voltage power supply, and the other end thereof passes through an electrode mounting structure and is connected with the cylindrical electrode 54.

[0053] The printing cavity 13 comprises a chamber, and a visible cavity door 16 and a control panel 15 are arranged on the chamber. A chamber exhaust port 17 is arranged on the chamber and is connected with a gas pump 18. The visible cavity door 16 is connected with the chamber through a hinge 14.

[0054] The main gas path pipeline a11 is provided with a mass flow controller c9, the sheath gas path pipeline 6 is provided with a mass flow controller a7, and the gas cylinder 5 is provided with a mass flow controller b8 on the pipeline connected with the four-way pipeline.

[0055] The micro-beam adjustable ultraviolet irradiation device 23 comprises an ultraviolet light source driving motor 42 connected with a focusing cylinder 45 through a light source connecting piece 43 and a flange connecting disc b 44, the focusing cylinder 45 is connected with an adjustable diaphragm group 46, the adjustable diaphragm group 46 is connected with a collimating light guide cover 47, and the collimating light guide cover 47 is provided with an irradiation port 48 at the tail end.

[0056] The V-shaped support 20 is connected with the detachable shell 31 through the inner hexagonal taper end locking screw 37 and the nozzle support shell 36.

[0057] The chamber is also provided with an illuminating lamp 21, a movable platform is arranged directly below the 3D printing nozzle and the micro-beam adjustable ultraviolet irradiation device, and a movable printing substrate is arranged on the movable platform.

[0058] Example 3

[0059] On the basis of example 2, as Figure 5The ablation object of the spark discharge generator is the electrode, and a mixture of electrode material and gas phase called aerosol is generated. The insulating support platform 2 is located above the support table 1 and is fixedly connected by bolts to provide a structural support base for the control console 3. The material is alumina ceramic, which ensures good structural stability and electrical insulation performance. The control console 3 is fixedly installed on the insulating support platform 2 by bolt connection, and a stepper motor 4 is arranged thereon. The stepper motor 4 is linked with the input conducting rod 50 through a fine adjustment mechanism and drives the input conducting rod 50 to move axially to adjust the discharge gap. The power supply uses pulse AC power, and the control of the stepper motor 4 and the mass flow controller b8 is integrated. The motor control precision is high, and the spacing adjustment can be realized to the level of 0.01 mm, which is suitable for different discharge energy and breakdown distance requirements. The input conducting rod 50 is a cylindrical metal conductor, one end of which is connected with an external high-voltage power supply, and the other end penetrates through the electrode mounting structure and is connected with the cylindrical electrode 54 to realize the introduction of high-voltage electricity. The input conducting rod 50 is provided with an insulating sleeve 51 outside to avoid breakdown during discharge. The intermediate cavity 10 of the spark discharge generator is the core area of the device, and the discharge end electrode 53 and the cylindrical electrode 54 are symmetrically arranged inside. On the one hand, the cavity bears the gas flow guiding function, and on the other hand, it provides a sealed environment for the discharge process to form a high-voltage breakdown condition. The cavity structure is made of non-conductive material to prevent arc creeping. The main gas connection end 49 is arranged at the left end of the intermediate cavity 10 of the spark discharge generator and has a through-hole structure. The gas is introduced into the nozzle through the joint action of the elbow sleeve joint 25 and the mass flow controller c9. The gas inlet 52 is arranged at the right end of the intermediate cavity 10 of the spark discharge generator, and the inert gas in the gas cylinder 5 is introduced into the cavity, and the mass flow controller b8 is used for gas flow adjustment. The argon gas supplied through the gas inlet 52 can form a protective atmosphere in the discharge area to reduce electrode oxidation or particle escape. The discharge end electrode 53 is installed in the intermediate cavity 10 of the spark discharge generator and is located on one side of the electrode gap. The electrode material is preferably a high-melting-point metal to ensure that it does not melt or deform under the action of high temperature and high current. The cylindrical electrode 54 is arranged opposite to the discharge end electrode 53 and forms a counter electrode during discharge. The electrode is designed as a cylindrical flat end, which has a large current-carrying surface and is helpful to form a stable plasma channel and prolong the discharge duration. The gas outlet 55 is arranged at the left end of the intermediate cavity and forms a flow path with the gas inlet 52. The gas and plasma mixture generated during discharge passes through the main gas pipeline b32 into the 3D printing nozzle 22 through the gas outlet 55.

[0060] Example 4

[0061] On the basis of Example 2, as Figure 1The printing cavity 13 is placed on the support table 1, and a part of the cavity is placed inside the spark discharge generator insulating support platform 2, effectively saving space. The sealing sleeve 19 is arranged between the sleeve joint b28 and the upper part of the printing cavity 13, which facilitates the sealing of the cavity. The visible cavity door 16 is connected and installed on the front part of the printing cavity through the hinge 14, which can realize multi-angle rotation. The inside of the visible cavity door 16 is provided with a sealing strip, which is used to realize real-time visual monitoring of the deposition process of nanoparticles in the cavity while maintaining the sealing of the cavity. The visible cavity door is made of a high-transmittance corrosion-resistant material, which has good optical transmittance and sealing performance, facilitating the naked eye observation of the deposition state by the operator. The left side of the printing cavity 13 is provided with a printing cavity control panel 15, which is used for centralized control and operation of the working environment parameters and auxiliary function modules in the printing cavity. The control panel can realize real-time adjustment and monitoring of key parameters such as temperature, atmosphere composition, ultraviolet irradiation, and particle spraying state, and can also link to control the working state of the nanoparticle nozzle, the substrate moving mechanism, the heating unit, the air pumping system and other modules. The right side of the printing cavity 13 is provided with a cavity exhaust port 17 which is tightly connected with the air pump 18, which is used to realize the rapid replacement of the gas inside the cavity. The exhaust structure can effectively discharge the residual gas, suspended nanoparticles and reaction by-products generated during the printing process in time, so as to maintain the clean environment and stable pressure condition inside the cavity. The air pump 18 can periodically or in real time pump out the gas according to the set program, so as to match the working rhythm of the main gas path, the sheath gas path and the heating assembly, and avoid the problems of gas flow disorder, particle backflow or pollution accumulation. For example Figure 2 The illumination lamp 21 is arranged inside the printing cavity 13, which is used to provide stable visible light illumination during the printing process, so as to facilitate the operator to observe the working state of the printing area, the material spraying condition and whether the equipment is running normally, and to improve the visibility and safety of the operation. The V-shaped support 20 is connected with the upper part of the printing cavity 13 through screws and bolts, and the V-shaped structure can effectively improve the overall rigidity and stability of the support, and enhance the support capacity of the nozzle to prevent shaking or displacement during the working process.

[0062] Example 5

[0063] On the basis of embodiment 2, the nanoparticles 3D printing nozzle as described in Figure 3, the mixture of nanoparticles and gas phase output from the gas outlet 55 enters the main gas path pipeline b32 through the main gas path pipeline a11 connected with the main gas path end 49, a bend sleeve pipe joint 25 is arranged between the main gas path pipeline a11 and the main gas path pipeline b32, and the main gas path pipeline a11 and the main gas path pipeline b32 are connected through internal and external threads, the main gas is downwardly conveyed through the main gas path pipeline b32, the pipeline is a hollow channel structure, a ceramic heating pipe 33 is arranged outside the main gas path pipeline, and a ceramic heating pipe protection sleeve 34 is arranged outside the ceramic heating pipe 33, so that efficient and stable external heating treatment can be realized on the carrier gas in the main gas path. The gas is preheated through the ceramic heating pipe, the kinetic energy and thermal stability of the gas can be improved, the external ceramic protection sleeve can effectively play the roles of heat retention, protection against collision and isolation of external interference, and the safety and service life of the heating structure are enhanced. A Laval pipeline 35 is connected inside, the Laval pipeline 35 has a variable cross-section structure of throat contraction-outlet expansion, is used for realizing acceleration and pressure drop control of the main gas flow, realizes local supersonic gas flow at the nozzle outlet, and improves the particle carrying capacity. At the lower end of the main gas path, the main nozzle module is connected through a sleeve pipe reducing joint 27, the internal sleeve structure is convenient for assembly and disassembly, and simultaneously has the functions of sealing and stability. A V-shaped support 20 is a bearing frame of the lower part of the whole nozzle and the micro-beam adjustable ultraviolet irradiation device, a flange connecting disc a 29 is arranged on the V-shaped support 20, and detachable connection is realized through a plurality of fastening screws. The support material is preferably aluminum alloy or high-strength plastic, has good structural rigidity and heat conduction performance. A detachable shell 31 is embedded outside a nozzle support shell 36 through an internal hexagonal taper end locking screw 37, the V-shaped support 20 is connected with a multi-stage contraction cone 40 through internal and external threads, a sealing washer 39 is arranged therebetween, the main gas path is hermetically sealed, a sealing gasket 38 is additionally arranged between the multi-stage contraction cone 40 and the detachable shell 31, and sheath gas leakage is avoided, so that the internal airtightness of the nozzle is ensured. The detachable shell 31 can be replaced with nozzles of different sizes or angles according to actual needs, so as to adapt to the needs of different flow rates and jetting modes. A sheath gas inlet 30 is arranged on one side of the detachable shell 31, is used for connecting an external sheath gas source gas cylinder 5, and is combined with a mass flow controller a 7 to accurately control the sheath gas flow. The gas is guided into the nozzle through a sheath gas path pipeline 6, is mixed with the main gas flow through the annular pipeline outside the multi-stage contraction cone 40 at the convergence section. The convergence section is designed as a multi-channel integrated area, coaxial coupling of the main gas flow and the sheath gas is realized through flow field guidance, and the central jet flow is ensured to be stable. Finally, the mixed gas flow is sprayed from a flow guide outlet 41, the gas and particle transmission process after acceleration, mixing and regulation are completed, and accurate deposition is realized on the movable printing substrate 24. Through the movement mode such as translation or lifting of the substrate, the nozzle system is matched, the accuracy, consistency and repeatability of the deposited pattern are effectively improved, and the layer-by-layer construction of complex patterns is supported, so that key support is provided for high-resolution printing.

[0064] Embodiment 6

[0065] On the basis of embodiment 2, as Figure 4 The micro-beam adjustable ultraviolet irradiation device is arranged on the side of the fixed nozzle and mainly comprises an ultraviolet light source driving assembly, a focusing adjusting cylinder, an adjustable aperture mechanism and a collimating light outlet system, so that the direction of the ultraviolet light beam is variable and the light spot size is controllable. The device can perform high-precision and directional irradiation on the nozzle deposition beam spot area and is suitable for immediate light processing operation during or after the deposition process. The ultraviolet irradiation device is fixedly installed on the upper side wall of the V-shaped support 20 through the flange connecting disc b44 and the light source connecting piece 43, and the light outlet direction thereof is directed to the deposition beam spot area directly below the nozzle outlet. A micro stepping motor is arranged in the ultraviolet light source driving motor 42 and is used to rotate the adjustable aperture assembly 46 and the focusing cylinder 45 in linkage, so as to realize the control of the light spot angle and size. By adjusting the light spot range and irradiation angle, the adhesion stability of the nanoparticles on the substrate surface and the pattern edge definition can be significantly improved, the compactness and functional consistency of the deposition structure can be improved, and the forming quality of the deposition pattern in the micro-nano scale can be enhanced. After the nozzle completes a deposition track, the main control system sends a signal to drive the ultraviolet light source to irradiate for a short time, so as to realize the immediate processing of irradiation during deposition. The adjustable aperture assembly 46 is controlled by a servo system and supports the adjustment of the light spot diameter of 0.1 mm to 3 mm, so as to accurately match the size of the deposition beam spot. The overall irradiation path is preliminarily focused by the lens system in the focusing cylinder 45 and is collimated by the collimating light guide cover 47, and then is emitted from the irradiation port 48. The ultraviolet light source cable is led out through the flange reserved hole, and the stability of the nozzle structure is not affected.

[0066] As Figure 7 shown, the present application is suitable for a 3D printing jetting method for precise deposition and forming of nanoparticles, and the specific operation steps are as follows:

[0067] Step 1: Nanoparticles are generated by plasma ablation of two discharge electrodes, and inert gas and nanoparticles are mixed to form an aerosol through a gas cylinder;

[0068] In this process, the inert gas flow is adjusted by the mass flow controller b to stably maintain the aerosol concentration;

[0069] Step 2: The aerosol enters the main gas path and is precisely heated by the ceramic heating tube; the heated aerosol enters the throat of the Laval pipe to reach the sound speed, and is accelerated to supersonic speed in the expansion section; the sheath gas enters the detachable shell through the sheath gas inlet to form a stable sheath gas flow with the main gas flow; and then the 3D deposition printing is performed through the flow guide outlet;

[0070] In this process, the sheath gas flow is adjusted by the mass flow controller a, and the multi-stage contraction cone effectively suppresses vortex and turbulence by stepwise acceleration of the main gas flow; the flow guide outlet is designed as a straight pipe to reduce the reverse pressure area, avoid particle dispersion, guide the aerosol to be directionally jetted to the substrate for precise deposition and forming, and complete the 3D printing.

[0071] Meanwhile, the micro-beam adjustable ultraviolet irradiation device is started, the focused light beam matches the deposition beam spot range, and periodic ultraviolet irradiation can improve the inter-particle bonding force.

Claims

1. A 3D printing jetting device suitable for precise deposition and shaping of nanoparticles, characterized in that, The control console (3) is fixedly connected to the insulating support platform (2), two stepping motors (4) are arranged on the control console (3), the output ends of the two stepping motors (4) are connected with a four-way pipe through flanges, one of the passages formed by the four-way pipe is connected with a 3D printing nozzle (22) in a printing cavity (13) through connected main gas path pipes a (11) and b (32), and the other passage is connected with a gas cylinder (5); the gas cylinder (5) is connected with a sheath gas inlet (30) of the 3D printing nozzle (22) through a sheath gas path pipe (6); The 3D printing nozzle (22) and a micro-beam adjustable ultraviolet irradiation device (23) are arranged in the cavity of the printing cavity (13), the 3D printing nozzle (22) and the micro-beam adjustable ultraviolet irradiation device (23) are fixed on the upper part of the cavity through a V-shaped support (20); the 3D printing nozzle (22) is sealingly connected with the end of the main gas path pipe b (32) extending into the cavity through a sealing sleeve (19); A ceramic heating pipe (33) is arranged on the main gas path pipe b (32), a ceramic heating pipe protection sleeve (34) is arranged outside the ceramic heating pipe (33), and a section of Laval pipe (35) is connected to the lower part of the ceramic heating pipe (33); the Laval pipe (35) is connected to the main gas path pipe b (32) through a clamping sleeve pipe reducing joint (27); The main gas path pipe a (11) is connected with the main gas path pipe b (32) through a bend clamping sleeve joint (25) and a clamping sleeve joint a (26); the main gas path pipe b (32) is connected with the 3D printing nozzle (22) through a clamping sleeve joint b (28), a flange connection disc a (29) and the V-shaped support (20); The 3D printing nozzle (22) comprises a multi-stage contraction cone (40) arranged in a detachable shell (31), the main gas path pipe b (32) is sealingly connected with the upper part of the multi-stage contraction cone (40) through a sealing gasket (39); a sheath flow inlet channel is formed between the multi-stage contraction cone (40) and the detachable shell (31), and sheath gas in the sheath gas inlet (30) is combined with main gas after entering the sheath flow inlet channel; the end of the detachable shell (31) is a flow guide outlet (41), and the flow guide outlet (41) is a straight pipe with an inner diameter of 0.15-0.25 mm; The micro-beam adjustable ultraviolet irradiation device (23) comprises an ultraviolet light source driving motor (42), the ultraviolet light source driving motor (42) is connected with a focusing cylinder (45) through a light source connecting piece (43) and a flange connection disc b (44); the focusing cylinder (45) is connected with an adjustable diaphragm group (46), the adjustable diaphragm group (46) is connected with a collimating light guide cover (47), and the collimating light guide cover (47) is provided with an irradiation port (48) at the end.

2. The 3D printing jetting device suitable for precise deposition and shaping of nanoparticles according to claim 1, characterized in that, An intermediate cavity (10) is formed inside the four-way pipe, and the intermediate cavity (10) is internally provided with symmetrically arranged discharge end electrodes (53) and a cylindrical electrode (54), the two discharge end electrodes (53) oppositely form a discharge gap; the gas inlet (52) connected with the gas cylinder (5) is arranged close to the position of the discharge gap of the two discharge end electrodes (53); The stepping motor (4) is further connected with an input conductive rod (50), and the input conductive rod (50) is externally provided with an insulating sleeve (51); the input conductive rod (50) is a metal conductor, one end of which is connected with an external high-voltage power supply, and the other end of which is connected through the cylindrical electrode (54), and the cylindrical electrode (54) is connected with the discharge end electrode (53).

3. The 3D printing jetting device suitable for precise deposition and shaping of nanoparticles according to claim 1, wherein, The printing cavity (13) comprises a chamber, the chamber is provided with a visible cavity door (16) and a control panel (15), the chamber is provided with a chamber exhaust port (17), the chamber exhaust port (17) is connected with a gas pump (18); the visible cavity door (16) is connected with the chamber through a hinge (14).

4. The 3D printing jetting device suitable for precise deposition and shaping of nanoparticles according to claim 1, wherein, The main gas path pipeline a (11) is provided with a mass flow controller c (9), the sheath gas path pipeline (6) is provided with a mass flow controller a (7), and the gas cylinder (5) is provided with a mass flow controller b (8) on the pipeline connected with the four-way pipeline.

5. The 3D printing jetting device suitable for precise deposition and shaping of nanoparticles according to claim 3, wherein, The chamber is further provided with an illuminating lamp (21), a movable platform is arranged directly below the 3D printing nozzle and the micro-beam adjustable ultraviolet irradiation device, and a movable printing substrate is arranged on the movable platform.

6. A 3D printing jetting method suitable for precise deposition and shaping of nanoparticles, characterized in that, The 3D printing jet device suitable for precise deposition and forming of nanoparticles is used, and the specific operation steps are as follows: The two discharge end electrodes are used to generate nanoparticles by plasma ablation, the inert gas and the nanoparticles are mixed to form an aerosol by a gas cylinder, the aerosol is delivered to the 3D printing nozzle through the main gas path pipelines a and b, the sheath flow gas source is connected through the sheath flow inlet channel outside the periphery of the 3D printing nozzle; by adjusting the sheath flow and the main flow, a stable sheath flow is formed around the aerosol, a ceramic heating pipe is arranged in the main gas path section to realize precise heating regulation of the main gas flow and the nanoparticles, the main jet gas flow is accelerated and focused, and a micro-beam adjustable ultraviolet irradiation module is integrated to perform local light processing operation within the deposition beam spot range to complete the printing operation.

Images