Load-carrying type double-valve-cover mechanism

Abstract

The load-carrying type double-valve-cover mechanism comprises a vacuum cavity, a vacuum molecular pump, a driving air cylinder, a molecular pump valve cover and a load-carrying arm, wherein the vacuum molecular pump and the driving air cylinder are installed on the vacuum cavity, and the molecular pump valve cover and the load-carrying arm are arranged in the vacuum cavity. Openings of the vacuum molecular pumps are formed in the inner side of the vacuum cavity, each vacuum molecular pump is correspondingly provided with a molecular pump valve cover, and the molecular pump valve covers face the openings of the vacuum molecular pumps; an output shaft of the driving air cylinder is connected with the middle of the carrying arm, the two ends of the carrying arm are each connected with a molecular pump valve cover, the carrying arm is used for driving the molecular pump valve covers to move, and opening and closing of an opening of the vacuum molecular pump are achieved. A load-carrying type mechanism is adopted, opening and closing of the two molecular pump valve covers are synchronously controlled, the cost is better than that of multiple control mechanisms, the size is reduced, the utilization rate of a vacuum cavity is increased, and the production and manufacturing cost of equipment is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum pumps, and in particular to a carrying-type double-valve cover mechanism. Background Art

[0002] High vacuum molecular pump is a standard component widely used in vacuum industry to obtain the vacuum required for production. Vacuum refers to the pressure below 10 5 Pa gas state, range: 10 5 Pa to 1x10 -11 Pa or even lower. The high vacuum molecular pump involved in the present invention has a vacuum range of up to: 10 -4 ~10 -7 mmHg, 1.33x10 -2 ~1.33x10 -4 Pa.

[0003] In order to understand the working principle of this mechanism, it is necessary to first introduce the working principle of the high vacuum valve: When negative pressure is generated in the system, the pressure difference between atmospheric pressure and system pressure acts on the seal, thereby pushing the vacuum valve seal to open the sealing surface and introduce the outside atmosphere into the system, causing the system pressure to increase and destroy the negative pressure until the vacuum valve seal falls again and seals again to block the atmosphere, and the outside atmosphere no longer enters the system.

[0004] When the system generates positive pressure, the working medium enters the upper part of the seal and presses the seal downward. The higher the system pressure, the tighter the seal. This ensures the vacuum breaker is airtight under positive pressure, achieving a leak-proof effect.

[0005] Control valves installed in vacuum systems are commonly referred to as vacuum breakers or anti-vacuum valves. Vacuum breakers are a process design requirement, used to break the system vacuum state, enabling shutdown or partial shutdown of the system to facilitate maintenance or system switching. Depending on process requirements, vacuum breakers can be manual or automatic. Their purpose is to open the valve to introduce the required medium into the system, thereby increasing the system's absolute pressure.

[0006] Existing high vacuum valves often use independent control for opening and closing of their bonnets. However, when multiple high vacuum valve bonnets need to be controlled and the installation location is relatively small, existing high vacuum valve technology has the disadvantage of increasing costs and is not suitable for such a small space environment.

[0007] Therefore, the existing technology has defects and needs to be improved. Summary of the Invention

[0008] The technical problem to be solved by the present invention is to provide a carrying-type double-valve cover mechanism, which can realize the control of multiple molecular pump valve covers at the same time and is convenient for application.

[0009] The technical solution of the present invention is as follows: a carrying-type double-valve cover mechanism is provided, comprising: a vacuum cavity, a vacuum molecular pump and a driving cylinder respectively installed on the vacuum cavity, and a molecular pump valve cover and a carrying arm respectively arranged in the vacuum cavity; the opening of the vacuum molecular pump is arranged on the inner side of the vacuum cavity, and each vacuum molecular pump is correspondingly provided with a molecular pump valve cover, and the molecular pump valve cover faces the opening of the vacuum molecular pump; the output shaft of the driving cylinder is connected to the middle of the carrying arm, and the two ends of the carrying arm are respectively connected to a molecular pump valve cover, which is used to drive the molecular pump valve cover to move, so as to realize the opening of the vacuum molecular pump.

[0010] The use of a carrying mechanism to synchronously control the opening and closing of the valve covers of the two molecular pumps is more cost-effective than using multiple sets of control mechanisms, reducing the volume, improving the utilization rate of the vacuum chamber, and reducing the production cost of the equipment. To a certain extent, it simplifies the mechanical structure, reduces the overall size of the equipment, reduces the space occupied by the equipment, and reduces the number of driving cylinders, which greatly reduces the cost and control difficulty and improves the convenience of control.

[0011] Furthermore, the carrying arm is connected to the molecular pump valve cover via a pressure regulating mechanism; the pressure regulating mechanism includes: a mounting member connected to the carrying arm, a plurality of screws connecting the molecular pump valve cover and the mounting member, a nut locking the screws, and a spring sleeved on the screws, wherein the springs respectively abut the molecular pump valve cover and the mounting member. The mounting member can move up and down along the screws, and by adjusting the stroke of the cylinder, the pressure acting on the molecular pump valve cover at the vacuum molecular pump opening can be adjusted.

[0012] Furthermore, the carrying-type dual-valve cover mechanism further includes: a central shaft connected to the center of the molecular pump valve cover, and a locking member engaged with the central shaft; the central shaft passes through the mounting member and is connected to the locking member. The screw surrounds the central shaft. Similarly, the mounting member can move up and down along the central shaft, and the central shaft and the screw cooperate to ensure more stable movement of the molecular pump valve cover.

[0013] Furthermore, the mounting member includes: a circular ring connected to the carrying arm, and a base plate connected to the circular ring; and the screw rod passes through the base plate.

[0014] Furthermore, the carrying-type dual-valve cover mechanism further includes an anti-rotation assembly, the ends of which are connected to the carrying arm and the vacuum chamber, respectively. The anti-rotation assembly is used to prevent the carrying arm from rotating when it moves up and down under the action of the driving cylinder, thereby ensuring that the molecular pump valve cover is accurately aligned with the opening of the vacuum molecular pump.

[0015] Furthermore, the anti-rotation assembly includes: a support connected to the vacuum chamber, a rotating plate movably connected to the support, and two rotating rods movably connected to the rotating plate; both rotating rods are movably connected to the carrying arm, and the center of the carrying arm is positioned midway between the locations where the two rotating rods connect to the carrying arms. The support and the rotating plate, the rotating plate and the rotating rods, and the rotating rods and the carrying arms are all connected by rotating shafts to achieve movable connection.

[0016] Furthermore, the vacuum chamber includes a cylinder mounting plate, the driving cylinder is mounted on the cylinder mounting plate, and one end of the anti-rotation component is mounted on the cylinder mounting plate.

[0017] Furthermore, the vacuum molecular pump is installed at the upper part and / or the lower part of the vacuum cavity.

[0018] By adopting the above scheme, the present invention provides a carrying-type double valve cover mechanism, which uses a single set of driving cylinders to synchronously control the opening and closing of the two molecular pump valve covers, and has the following beneficial effects: 1. It is more cost-effective than using multiple sets of control mechanisms, reducing the production cost of the equipment; 2. To a certain extent, it simplifies the mechanical structure, reduces the overall size of the equipment, and reduces the space occupied by the equipment; 3. The number of driving cylinders is reduced, which greatly reduces the control difficulty and improves the convenience of control. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A schematic structural diagram of an embodiment of the present invention; Figure 2 It is a structural diagram of the vacuum molecular pump, driving cylinder, molecular pump valve cover, and carrying arm; Figure 3 for Figure 2 Magnified view of area A in center. DETAILED DESCRIPTION

[0020] The present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0021] See also Figure 1-Figure 3The present invention provides a carrying-type double-valve cover mechanism, comprising: a vacuum chamber 10, a vacuum molecular pump 11 and a driving cylinder 12 respectively installed on the vacuum chamber 10, a molecular pump valve cover 13 and a carrying arm 14 respectively arranged in the vacuum chamber 10; the opening of the vacuum molecular pump 11 is arranged on the inner side of the vacuum chamber 10, and each vacuum molecular pump 11 is correspondingly provided with a molecular pump valve cover 13, and the molecular pump valve cover 13 faces the opening of the vacuum molecular pump 11; the output shaft of the driving cylinder 12 is connected to the middle of the carrying arm 14, and the two ends of the carrying arm 14 are respectively connected to a molecular pump valve cover 13, which is used to drive the molecular pump valve cover 13 to move, thereby realizing the opening of the vacuum molecular pump 11 to be opened and closed. In this embodiment, the vacuum molecular pump 11 is installed at the upper and lower parts of the vacuum chamber 10.

[0022] The use of a carrying mechanism to synchronously control the opening and closing of the two molecular pump valve covers 13 is more cost-effective than using multiple sets of control mechanisms, reducing the volume, improving the utilization rate of the vacuum chamber 10, and reducing the production cost of the equipment. To a certain extent, it simplifies the mechanical structure, reduces the overall size of the equipment, reduces the space occupied by the equipment, and reduces the number of driving cylinders 12, thereby greatly reducing the cost and control difficulty and improving the convenience of control.

[0023] In this embodiment, the carrying arm 14 is connected to the molecular pump valve cover 13 via a pressure regulating mechanism. The pressure regulating mechanism includes: a mounting member connected to the carrying arm 14, a plurality of screws 15 connecting the molecular pump valve cover 13 and the mounting member, a nut 16 locking the screws 15, and a spring 17 sleeved on the screws 15, wherein the spring 17 abuts against the molecular pump valve cover 13 and the mounting member, respectively. The mounting member can move up and down along the screws 15, and by adjusting the stroke of the cylinder, the pressure acting on the molecular pump valve cover 13 at the opening of the vacuum molecular pump 11 can be adjusted.

[0024] In this embodiment, the carrying-type dual-valve cover mechanism further includes: a central shaft 18 connected to the center of the molecular pump valve cover 13, and a locking member 19 that cooperates with the central shaft 18; the central shaft 18 passes through the mounting member and is connected to the locking member 19. The screw 15 surrounds the central shaft 18. Similarly, the mounting member can move up and down along the central shaft 18. The central shaft 18 and the screw 15 cooperate with each other to ensure more stable movement of the molecular pump valve cover 13.

[0025] In this embodiment, the mounting member includes: a ring 20 connected to the carrying arm 14 , and a bottom plate 21 connected to the ring 20 ; the screw rod 15 passes through the bottom plate.

[0026] In this embodiment, the carrying-type dual-valve cover mechanism further includes an anti-rotation assembly, the ends of which are respectively connected to the carrying arm 14 and the vacuum chamber 10. The anti-rotation assembly is used to prevent the carrying arm 14 from rotating when it moves up and down under the action of the driving cylinder 12, thereby ensuring that the molecular pump valve cover 13 is accurately aligned with the opening of the vacuum molecular pump 11.

[0027] In this embodiment, the anti-rotation assembly includes: a support 22 connected to the vacuum chamber 10, a rotating plate 23 movably connected to the support 22, and two rotating rods 24 movably connected to the rotating plate 23. Both rotating rods 24 are movably connected to the carrying arm 14, and the center of the carrying arm 14 is located in the middle of the position where the two rotating rods 24 connect to the carrying arm 14. The support 22 and the rotating plate 23, the rotating plate 23 and the rotating rods 24, and the rotating rods 24 and the carrying arm 14 are all connected by rotating shafts to achieve movable connection.

[0028] In this embodiment, the vacuum chamber 10 includes a cylinder mounting plate 25 , the driving cylinder 12 is mounted on the cylinder mounting plate 25 , and one end of the anti-rotation assembly is mounted on the cylinder mounting plate 25 .

[0029] In summary, the present invention provides a carrying-type double valve cover mechanism, which uses a single set of driving cylinders to synchronously control the opening and closing of two molecular pump valve covers 13, and has the following beneficial effects: 1. It is more cost-effective than using multiple sets of control mechanisms, reducing the production cost of the equipment; 2. To a certain extent, it simplifies the mechanical structure, reduces the overall size of the equipment, and reduces the space occupied by the equipment; 3. The number of driving cylinders is reduced, which greatly reduces the control difficulty and improves the convenience of control.

[0030] The above are only preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A carrying-type double valve cover mechanism, characterized in that: include: A vacuum cavity, a vacuum molecular pump and a driving cylinder respectively installed on the vacuum cavity, and a molecular pump valve cover and a carrying arm respectively arranged in the vacuum cavity; the opening of the vacuum molecular pump is arranged on the inner side of the vacuum cavity, and each vacuum molecular pump is correspondingly provided with a molecular pump valve cover, and the molecular pump valve cover faces the opening of the vacuum molecular pump; the output shaft of the driving cylinder is connected to the middle of the carrying arm, and the two ends of the carrying arm are respectively connected to a molecular pump valve cover for driving the molecular pump valve cover to move, so as to realize the opening of the vacuum molecular pump.

2. The carrying type double valve cover mechanism according to claim 1, characterized in that: The carrying arm is connected to the molecular pump valve cover through a pressure regulating mechanism; the pressure regulating mechanism includes: a mounting piece connected to the carrying arm, a plurality of screws connecting the molecular pump valve cover and the mounting piece, a nut locking the screw, and a spring sleeved on the screw, wherein the spring is respectively in contact with the molecular pump valve cover and the mounting piece.

3. The carrying type double valve cover mechanism according to claim 2, characterized in that: Also includes: A central shaft connected to the center of the molecular pump valve cover, and a locking member matched with the central shaft; The central axis rod passes through the mounting member and is connected to the locking member.

4. The carrying-type double valve cover mechanism according to claim 3, characterized in that: The screw rod surrounds the central shaft rod.

5. The carrying-type double-valve cover mechanism according to claim 2, characterized in that: The mounting member comprises: a circular ring connected to the carrying arm, and a bottom plate connected to the circular ring; the screw rod passes through the bottom plate.

6. The carrying-type double-valve cover mechanism according to claim 1, characterized in that: Also includes: Anti-rotation component; the two ends of the anti-rotation component are respectively connected to the carrying arm and the vacuum cavity.

7. The carrying type double valve cover mechanism according to claim 6, characterized in that: The anti-rotation assembly includes: a support connected to the vacuum chamber, a rotating plate movably connected to the support, and two rotating rods movably connected to the rotating plate; both of the rotating rods are movably connected to the carrying arm, and the middle of the carrying arm is set in the middle of the position where the two rotating rods connect the carrying arms.

8. The carrying-type double-valve cover mechanism according to claim 7, characterized in that: The support and the rotating plate, the rotating plate and the rotating rod, and the rotating rod and the carrying arm are all connected through rotating shafts to achieve movable connection.

9. The carrying-type double-valve cover mechanism according to claim 6, characterized in that: The vacuum chamber includes a cylinder mounting plate, the driving cylinder is mounted on the cylinder mounting plate, and one end of the anti-rotation component is mounted on the cylinder mounting plate.

10. The carrying-type double-valve cover mechanism according to claim 1, characterized in that: The vacuum molecular pump is installed on the upper part and / or the lower part of the vacuum chamber.

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