Rotary table device

Abstract

The invention provides a rotary table device. The rotary table device comprises a shell; the worm is arranged in the shell and extends in the first direction in the horizontal plane. The worm gear is arranged in the shell and located on one side, in the second direction in the horizontal plane, of the worm gear, the worm is meshed with the worm gear, and the first direction is perpendicular to the second direction; the adjusting assembly is arranged on the shell, the adjusting assembly is used for adjusting the relative position of the worm and the worm gear, the adjusting assembly comprises a first adjusting piece, the first adjusting piece forms a cylinder extending in the vertical direction, the first adjusting piece is connected between the worm and the shell, and the worm is rotationally connected with the shell around the axis extending vertically through the first adjusting piece; therefore, the fitting degree of the worm and the worm gear during meshing is adjusted. According to the rotating table device, the first adjusting piece is arranged, the transmission connection part of the worm gear and the worm can be effectively prevented from being abraded, and therefore the service life of the rotating table device can be guaranteed, and the maintenance cost is reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of turntable device manufacturing, in particular to a turntable device. Background Art

[0002] In the conventional turntable device, when the turntable device is used for a long time, the tooth clearance between the worm wheel and the worm will gradually increase, which will cause wear of the fitting parts between the worm wheel and the worm, thereby affecting the service life of the turntable device and the rotation accuracy of the turntable device. Summary of the Invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention is to provide a turntable device, which can ensure the service life of the turntable device.

[0004] According to an embodiment of the present invention, a rotary table device includes: a housing; a worm, which is arranged in the housing and extends along a first direction in a horizontal plane; a worm wheel, which is arranged in the housing and is located on one side of the worm wheel in a second direction in the horizontal plane, the worm being meshed with the worm wheel, and the first direction is perpendicular to the second direction; an adjusting assembly, which is arranged in the housing and is used to adjust the relative position of the worm and the worm wheel, and the adjusting assembly includes: a first adjusting member, which is formed as a column extending in an up-down direction, and the first adjusting member is connected between the protective shell and the housing, and the protective shell is rotatably connected to the housing around an axis extending up and down through the first adjusting member to adjust the degree of fit between the worm and the worm wheel when meshing.

[0005] According to the rotary table device of the present invention, a first adjusting member is provided to adjust the degree of fit between the worm and the worm wheel when they are engaged, thereby effectively preventing wear of the portion where the worm wheel and the worm drive are connected, and also preventing the worm and the worm wheel from getting stuck due to lack of lubrication in a vacuum environment, thereby ensuring the service life of the rotary table device and reducing maintenance costs. At the same time, it can effectively eliminate return errors, thereby effectively ensuring rotation accuracy.

[0006] According to some embodiments of the present invention, the turntable device further includes: a protective shell, the protective shell being disposed in the shell, the protective shell being provided with an opening, the worm being rotatably disposed in the protective shell and exposed from the opening, the worm wheel being engaged with the worm at the opening.

[0007] According to some optional embodiments of the present invention, one end of the first adjusting member is fixedly connected to the shell, a first groove is provided on the outer surface of the protective shell, and the other end of the first adjusting member is rotatably engaged in the first groove.

[0008] According to some optional embodiments of the present invention, there are two first adjustment members, which are arranged on the upper and lower sides of the protective shell, and there are two first grooves, which correspond one to one to the first adjustment members.

[0009] According to some embodiments of the present invention, the rotary table device includes: a bushing, which is arranged between the first adjustment member and the inner wall of the first groove.

[0010] According to some optional embodiments of the present invention, a flange is provided on a side surface of the bushing facing the shell, and the flange is supported on the periphery of the first groove and abuts between the first adjustment member and the outer wall surface of the protective shell in the up and down directions.

[0011] According to some embodiments of the present invention, the shell is provided with a first opening corresponding to the first groove in the upper and lower directions, the diameter of the first opening is larger than the diameter of the first groove, the first adjusting member is cylindrical and includes a first cylinder and a second cylinder, the second cylinder is arranged on the side of the first cylinder facing the worm, the first cylinder fits in the first opening and adapts to the shape of the first opening, and the second cylinder fits in the first groove and adapts to the shape of the first groove.

[0012] According to some embodiments of the present invention, the adjustment assembly includes: a second adjustment member, which is disposed between the housing and the protective shell and is configured to push the protective shell to move in an up and down direction.

[0013] According to some optional embodiments of the present invention, the second adjusting member is a column extending in the up-down direction, a first mounting opening is provided on the shell, the first mounting opening passes through one side wall of the shell in the up-down direction, the second adjusting member is passed through the first mounting opening, and the second adjusting member abuts against the protective shell at one end facing the protective shell, and the relative position of the second adjusting member in the up-down direction in the first mounting opening is adjustable.

[0014] According to some optional embodiments of the present invention, the number of the second adjusting members is two, and the two second adjusting members are arranged on the upper and lower sides of the protective shell.

[0015] According to some embodiments of the present invention, the adjustment assembly further includes: a third adjustment member, which is disposed between the housing and the protective shell and is configured to push the protective shell to move along the second direction.

[0016] According to some optional embodiments of the present invention, the third adjusting member is a column extending along the second direction, a second mounting opening is provided on the shell, the second mounting opening passes through one side wall of the shell along the second direction, the third adjusting member is passed through the second mounting opening, and the third adjusting member abuts against the protective shell at one end facing the protective shell, and the relative position of the third adjusting member along the second direction in the second mounting opening is adjustable.

[0017] According to some embodiments of the present invention, the rotating stage device includes: a grating assembly, which is arranged on the worm gear and is located on one side of the radial direction of the worm gear, and the grating assembly is provided with a scale extending along the circumference of the worm gear; and a reading head assembly, which is configured to read the scale of the grating assembly to obtain the rotation angle of the worm gear.

[0018] According to some optional embodiments of the present invention, the rotating table device further includes: a limit structure, which is configured to limit the rotation angle of the worm gear, and the limit structure includes: two limit switches, which are arranged at intervals on the housing, and are respectively a first limit switch and a second limit switch; two limit members, which are both provided on the grating assembly and arranged at intervals in the circumferential direction of the grating assembly, and are respectively a first limit member and a second limit member, and the worm gear is rotatable between a first position and a second position, and when the worm gear is in the first position, the first limit switch is limitedly matched with the first limit member, and when the worm gear is in the second position, the second limit switch is limitedly matched with the second limit member.

[0019] According to some optional embodiments of the present invention, in the circumferential direction of the grating assembly, the relative positions of the first limiting member and the second limiting member and the grating assembly are adjustable.

[0020] According to some optional embodiments of the present invention, the limiting member includes: a sliding block, the outer edge of the grating assembly is provided with a sliding groove extending circumferentially along the grating assembly, and the sliding block can be slidably engaged in the sliding groove; a locking screw, the locking screw is detachably connected to the sliding block, and the sliding block is fastened to the grating assembly via the locking screw.

[0021] According to some optional embodiments of the present invention, the limit switch has a touch arm, and the limit member further includes: an abutment arm, which is fixed to the sliding block by the locking screw, and triggers the limit switch when the abutment arm contacts the touch arm.

[0022] According to some embodiments of the present invention, the rotary table device includes: a driving motor and a reducer, the driving motor is connected to the worm gear through the reducer, and the reducer is connected to the protective shell.

[0023] According to some optional embodiments of the present invention, the rotating table device includes: an elastic connecting member, wherein the elastic connecting member is provided between the shell and the protective shell, and the protective shell is connected to the shell via the elastic connecting member.

[0024] According to some optional embodiments of the present invention, along the first direction, a recessed mounting groove is provided on the end surface of the shell facing the protective shell, and the mounting groove extends along the first direction. The elastic connecting member includes: an elastic member, which extends along the first direction and is provided in the mounting groove; and a ball head, which is connected to one end of the elastic member facing the protective shell and is located between the protective shell and the shell.

[0025] According to some embodiments of the present invention, the shell includes: a first shell, which is a hollow cylinder extending in the up and down directions, and the worm gear is arranged on the first shell; a second shell, which is connected to one side of the first shell in the second direction, and the second shell is a hollow cylinder extending along the first direction, and an installation cavity is provided in the second shell, and the protective shell is arranged in the second shell.

[0026] According to some optional embodiments of the present invention, a side wall of the second shell on one side in the second direction is provided with a filling port that penetrates the cavity wall of the mounting cavity along the second direction, and the filling port is used to fill the lubricating medium. The turntable device also includes: a sealing member, which is used to seal the filling port.

[0027] Additional aspects and advantages of the present invention will be set forth in part in the description which follows and, in part, will be obvious from the description which follows, or may be learned by practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] Figure 1 is a schematic diagram of an angle of a rotating stage device according to an embodiment of the present invention; Figure 2 yes Figure 1 A schematic diagram of another angle of the rotating stage device shown in ; Figure 3 yes Figure 2 A partial enlarged view of point A in the middle; Figure 4 yes Figure 2 A partial enlarged view of point B in the middle; Figure 5 It is along Figure 2 Cross-sectional view along the mid-CC line; Figure 6 yes Figure 1 A schematic diagram of a partial structure of the rotating stage device shown in; Figure 7 It is along Figure 6 Cross-sectional view along the mid-DD line; Figure 8 yes Figure 1 A schematic diagram of a partial structure of the rotating stage device shown in; Figure 9 yes Figure 8 A partial enlarged view of point E in the middle; Figure 10 It is along Figure 8 Cross-sectional view along the midline FF; Figure 11 yes Figure 1 A schematic diagram of a partial structure of the rotating stage device shown in; Figure 12 It is along Figure 11 Cross-sectional view along the mid-GG line; Figure 13 yes Figure 12 A partial enlarged view of the H in the middle; Figure 14 yes Figure 1 A schematic diagram of a partial structure of the rotating stage device shown in; Figure 15 yes Figure 1 Schematic diagram of the readhead assembly shown in .

[0029] Reference numerals: 100. Rotating table device; 10. Shell; 11. First shell; 12. Second shell; 121. Blocking member; 21. Worm; 22. Worm wheel; 30. Adjustment assembly; 31. First adjustment member; 311. First column; 312. Second column; 32. Second adjustment member; 33. Third adjustment member; 40. Protective case; 50. Bushing; 51. Flanging; 61. Grating assembly; 62. Reading head assembly; 70. Limit structure; 71. Limit switch; 711. Touch arm; 72. Limit member; 721. Sliding block; 722. Locking screw; 723. Abutment arm; 81. Drive motor; 82. Reducer; 83. Elastic connector; 831. Elastic member; 832. Ball head; 91. Support bearing; 92. Rotating bearing; 93. Coupling. DETAILED DESCRIPTION

[0030] The following describes embodiments of the present invention in detail, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and are not to be construed as limiting the present invention.

[0031] Please refer to the following Figure 1-15 A rotation stage apparatus 100 according to an embodiment of the present invention is described.

[0032] Reference Figure 1 、 Figure 2 、 Figure 3 、 Figure 5 、 Figure 8 、 Figure 9 and Figure 10 The rotary table device 100 according to the embodiment of the present invention includes: a housing 10, a worm 21, a worm wheel 22 and an adjustment assembly 30.

[0033] Specifically, the worm 21 is disposed in the housing 10 and is rotated along a first direction in a horizontal plane (eg Figure 5 The worm gear 22 is provided in the housing 10 and is located in the second direction of the worm gear 22 in the horizontal plane (such as Figure 1 on one side (as shown in the left and right directions) Figure 1 The worm 21 is meshed with the worm wheel 22, and the first direction is perpendicular to the second direction; the adjusting assembly 30 is provided on the housing 10, and the adjusting assembly 30 is used to adjust the relative position of the worm 21 and the worm wheel 22. The adjusting assembly 30 includes: a first adjusting member 31, the first adjusting member 31 is formed along the up and down direction (as shown in FIG. Figure 9 The protective shell 40 is rotatably connected to the housing 10 around an axis extending up and down through the first adjusting member 31 to adjust the fit between the worm 21 and the worm wheel 22 when they are engaged.

[0034] For example, Figure 1 、 Figure 2 、 Figure 3 、 Figure 5 、 Figure 8 、 Figure 9 and Figure 10As shown, the worm 21 is disposed within the housing 10, extending in the front-to-rear direction and located to the right of the worm wheel 22 in the horizontal plane. The worm 21 is meshed with the worm wheel 22. The adjustment assembly 30 is disposed on the housing 10, and the first adjustment member 31 forms a cylinder extending in the up-down direction. The first adjustment member 31 is connected between the protective shell 40 and the housing 10, with the upper end of the first adjustment member 31 connected to the housing 10 and the lower end of the first adjustment member 31 connected to the outer wall of the protective shell 40. Preferably, the worm wheel 22 is made of beryllium bronze, which has excellent mechanical properties, a low friction coefficient, and is less susceptible to volatilization and oxidation in a vacuum environment, thereby ensuring that the worm wheel 22 can operate stably and for a long time.

[0035] When assembling the turntable device 100, the worm wheel 22 and the worm 21 are first matched in the housing 10, and then the adjustment component 30 is adjusted to control the distance between the gear on the worm 21 and the gear on the worm wheel 22. For example, the worm 21 can be rotated, the position of the worm 21 can be adjusted in the up and down directions, and the position of the worm 21 can be adjusted in the left and right directions to adjust the degree of fit between the worm 21 and the worm wheel 22 when they are engaged.

[0036] It should be explained that the turntable device 100 of the present application can be applied to fields such as semiconductor manufacturing, aerospace parts processing and testing, high-end optical coating and microscopic particle beam research. Especially in a high vacuum environment, the turntable device 100 is prone to jamming between the worm wheel 22 and the worm 21 due to the vacuum environment. The turntable device 100 of the present application controls the degree of fit between the worm 21 and the worm wheel 22 during meshing by adjusting the component 30, which can effectively prevent the worm 21 and the worm wheel 22 from getting stuck, thereby ensuring that the turntable device 100 can operate stably.

[0037] The rotary table device 100 of the present invention is provided with a first adjusting member 31, and the protective shell 40 can be rotated around an axis extending up and down in a horizontal plane through the first adjusting member 31, thereby avoiding the worm 21 and the worm wheel 22 from forming an inclination angle in a vertical plane, thereby ensuring that the worm wheel 22 and the worm 21 can be normally engaged, thereby effectively preventing the wear of the transmission connection part of the worm wheel 22 and the worm 21, thereby ensuring the service life of the rotary table device 100 and reducing maintenance costs. At the same time, when the worm is matched with the worm wheel, it is not an orthogonal matching relationship. By rotating the worm, the allowable error of the matching between the worm and the worm wheel can be expanded, thereby facilitating the matching installation of the worm wheel and the worm.

[0038] Furthermore, it is possible to avoid the worm 21 and the worm wheel 22 being too far apart, which would result in an increase in the transmission loss between the worm wheel 22 and the worm 21, thereby reducing the transmission energy consumption of the worm wheel 22 and the worm 21. At the same time, it is also possible to avoid the worm 21 and the worm wheel 22 being too short, which would result in the worm wheel 22 and the worm 21 not being able to operate normally. Therefore, adjusting the relative position of the worm wheel 22 and the worm 21 can ensure that the turntable device 100 can operate stably and normally.

[0039] In addition, due to manufacturing errors and wear after long-term use, the tooth side clearance of the common worm wheel 22 and worm 21 transmission continues to increase, resulting in obvious return error when the rotary table device 100 switches between forward and reverse rotations, seriously affecting the positioning accuracy. The present application can effectively eliminate the return error by adjusting the distance between the worm wheel 22 and the worm 21, thereby effectively ensuring the rotation accuracy.

[0040] In addition, when the turntable device 100 is used in a vacuum environment, due to the lack of lubrication between the worm 21 and the worm wheel 22, it is easy to cause jamming between the worm 21 and the worm wheel 22, thereby affecting the normal use of the turntable device 100. However, the present application adjusts the distance between the worm 21 and the worm wheel 22, and can still ensure that the turntable device 100 can be used normally even in the absence of adjustment of the lubricating medium, thereby increasing the use scenarios of the turntable device 100. At the same time, the adjustment component 30 is adjusted according to the gap between the worm 21 and the worm wheel 22, thereby improving the stability of the turntable device 100 in a vacuum environment and ensuring that the turntable device 100 can operate stably for a long time.

[0041] According to the rotary table device 100 of the embodiment of the present invention, a first adjustment member 31 is provided to adjust the degree of fit between the worm 21 and the worm wheel 22 during meshing, thereby effectively preventing wear at the portion where the worm wheel 22 and the worm 21 are connected in transmission. It also prevents the worm 21 and the worm wheel 22 from getting stuck due to lack of lubrication in a vacuum environment, thereby ensuring the service life of the rotary table device 100 and reducing maintenance costs. At the same time, it can effectively eliminate return errors, thereby effectively ensuring rotation accuracy.

[0042] According to some embodiments of the present invention, referring to Figure 5 、 Figure 8 and Figure 10The rotary table device 100 includes a protective shell 40 disposed within the housing 10 and having an opening. The worm 21 is rotatably disposed within the protective shell 40 and exposed through the opening. The worm wheel 22 engages with the worm 21 at the opening. Thus, the protective shell 40 protects the worm 21, thereby effectively preventing adjacent components from affecting the rotation of the worm 21, thereby ensuring the stable operation of the rotary table device 100. Furthermore, the adjustment assembly 30 adjusts the worm 21 by adjusting the protective shell 40, thereby both adjusting the position of the worm 21 and preventing the adjustment assembly 30 from affecting the normal rotation of the worm 21.

[0043] For example, Figure 5 、 Figure 8 and Figure 10 As shown, the protective shell 40 extends in the front-to-back direction, and an opening is provided in the protective shell 40. The worm 21 is rotatably provided in the protective shell 40. An opening is provided on the left side of the protective shell 40, and the opening penetrates the left side wall of the protective shell 40 in the left-right direction. The worm 21 is exposed in the opening and cooperates with the worm wheel 22.

[0044] According to some embodiments of the present invention, referring to Figure 3 、 Figure 5 and Figure 9 , one end of the first adjusting member 31 (such as Figure 5 The upper end of the first adjusting member 31 is fixedly connected to the housing 10, and the outer surface of the protective shell 40 is provided with a first groove. The other end of the first adjusting member 31 is fixedly connected to the housing 10. Figure 5 The lower end of the first adjusting member 31 shown in the figure is rotatably engaged with the first groove. Thus, the engagement of the first adjusting member 31 with the first groove ensures the stability of the engagement between the first adjusting member 31 and the protective shell 40. When the protective shell 40 rotates relative to the housing 10 via the first adjusting member 31, the first adjusting member 31 and the protective shell 40 are effectively prevented from separating, thereby ensuring that the adjustment assembly 30 can properly adjust the position of the worm 21. Furthermore, the first adjusting member 31 serves as a rotation axis for the protective shell 40, thereby ensuring the stability of the rotation of the protective shell 40.

[0045] For example, Figure 3 、 Figure 5 and Figure 9 As shown, the upper end of the first adjusting member 31 is fixedly connected to the shell 10, and the outer surface of the protective shell 40 is provided with a first groove that is concave inward along the up and down directions, and the lower end of the first adjusting member 31 is rotatably engaged in the first groove.

[0046] Furthermore, if Figure 3 、 Figure 5 and Figure 9As shown, the first adjusting member 31 and the housing 10 are interference fit. When fixing the first adjusting member 31 and the housing 10 , the first adjusting member 31 and the housing 10 can be fixed by knocking or applying pressure using an external tool.

[0047] According to some optional embodiments of the present invention, referring to Figure 3 、 Figure 5 and Figure 9 The number of the first adjusting members 31 is two, and the two first adjusting members 31 are arranged on the upper and lower sides of the protective shell 40 (such as Figure 5 The upper and lower sides of the protective shell 40 shown in the figure) are provided with two first grooves, which correspond one to one with the first adjustment members 31.

[0048] In this way, the two first adjustment parts 31 can form a rotating axis on the upper and lower sides of the protective shell 40, thereby ensuring the stability of the rotation of the protective shell 40 relative to the shell 10, effectively preventing the protective shell 40 from getting stuck during rotation, and thus ensuring the adjustment function of the adjustment component 30.

[0049] For example, Figure 3 、 Figure 5 and Figure 9 As shown, the two first adjustment members 31 are respectively arranged on the upper and lower sides of the protective shell 40, the first groove on the upper side of the protective shell 40 is recessed downward, and the first groove on the lower side of the protective shell 40 is recessed upward, the lower end of the first adjustment member 31 on the upper side extends into the first groove on the upper side, and the upper end of the first adjustment member 31 on the lower side extends into the first groove on the lower side.

[0050] According to some embodiments of the present invention, referring to Figure 8 and Figure 9 The rotating stage device 100 includes a bushing 50 disposed between the first adjusting member 31 and the inner wall of the first groove. Thus, the bushing 50 can reduce the friction between the first adjusting member 31 and the inner wall of the first groove, thereby ensuring that the protective shell 40 can rotate stably relative to the first adjusting member 31.

[0051] According to some optional embodiments of the present invention, referring to Figure 8 and Figure 9 The bushing 50 is provided with a flange 51 on one side of the surface facing the housing 10. The flange 51 is supported on the periphery of the first groove and extends in the up-down direction (eg Figure 8 The flange 51 prevents the bushing 50 from moving on the first adjusting member 31 along the axial direction of the first adjusting member 31, thereby ensuring that the bushing 50 remains stable between the first adjusting member 31 and the inner wall of the first groove.

[0052] For example, Figure 8 and Figure 9 As shown, taking the lower side bushing 50 as an example, the lower side of the bushing 50 is provided with a flange 51, which is supported on the periphery of the first groove and abuts between the first adjustment member 31 and the outer wall surface of the protective shell 40 in the up and down directions. The upper side bushing 50 and the lower side bushing 50 are arranged symmetrically in the up and down directions.

[0053] According to some embodiments of the present invention, referring to Figure 8 and Figure 9 The shell 10 is provided with a first through opening corresponding to the first groove in the up and down directions. The diameter of the first through opening is larger than the diameter of the first groove. The first adjusting member 31 is cylindrical and includes a first cylinder 311 and a second cylinder 312. The second cylinder 312 is provided on the side of the first cylinder 311 facing the worm 21. The first cylinder 311 fits in the through opening and adapts to the shape of the first through opening. The second cylinder 312 fits in the first groove and adapts to the shape of the first groove.

[0054] In this way, the second column 312 extends into the first groove so that the protective shell 40 can rotate relative to the second column 312, thereby realizing the rotation of the worm 21 relative to the shell 10. The first column 311 cooperates with the first opening to prevent the second column 312 from escaping from the first groove, thereby ensuring the stability of the cooperation between the first adjustment member 31 and the protective shell 40. At the same time, the diameters of the first column 311 and the second column 312 are different, which can facilitate the cooperation and installation of the first adjustment member 31 and the protective shell 40.

[0055] For example, Figure 8 and Figure 9 As shown, taking the first adjusting member 31 on the lower side as an example, the second column 312 is arranged on the upper side of the first column 311, the second column 312 is smaller than the diameter of the first column 311, the second column 312 is located in the first groove, and the first column 311 is located in the first opening. The first adjusting member 31 on the upper side and the first adjusting member 31 on the lower side are arranged symmetrically in the upper and lower directions.

[0056] According to some embodiments of the present invention, referring to Figure 2 、 Figure 4 and Figure 5 The adjustment assembly 30 includes: a second adjustment member 32, the second adjustment member 32 is provided between the housing 10 and the protective shell 40, and is configured to push the protective shell 40 in the up and down directions (such as Figure 5 Thus, by adjusting the vertical position of the protective housing 40 via the second adjusting member 32, the vertical position of the worm 21 can be adjusted, and the degree of fit between the worm 21 and the worm wheel 22 during meshing can be adjusted, effectively preventing wear of the portion of the transmission connection between the worm 21 and the worm wheel 22. Furthermore, by adjusting the worm 21 via the protective housing 40, the second adjusting member 32 can prevent direct contact between the second adjusting member 32 and the worm 21, which can affect the rotation of the worm 21.

[0057] According to some optional embodiments of the present invention, referring to Figure 2 、 Figure 4 and Figure 5 The second adjusting member 32 is a column extending in the vertical direction. The housing 10 is provided with a first mounting opening. The first mounting opening is provided in the vertical direction (such as Figure 5 The second adjusting member 32 is inserted into the first mounting opening, and one end of the second adjusting member 32 facing the protective shell 40 abuts against the protective shell 40. The relative position of the second adjusting member 32 in the first mounting opening is adjustable along the up and down directions.

[0058] In this way, setting up the first mounting port can facilitate the connection between the second adjusting member 32 and the shell 10, thereby facilitating the fixation of the second adjusting member 32. At the same time, one end of the second adjusting member 32 abuts against the protective shell 40, which can ensure that the second adjusting member 32 can adjust the position of the protective shell 40 in the up and down directions, thereby realizing the adjustment of the worm 21.

[0059] For example, Figure 2 、 Figure 4 and Figure 5 The second adjusting member 32 is a cylinder extending in the up-down direction. The shell 10 is provided with a first mounting opening that passes through the side wall of one side of the shell 10 in the up-down direction. One end of the second adjusting member 32 abuts against the protective shell 40.

[0060] It should be explained that the second adjusting member 32 and the first mounting opening are interference fit. When fixing the second adjusting member 32 to the first mounting opening, the second adjusting member 32 and the housing 10 can be fixed by knocking or pressurizing with an external tool.

[0061] According to some optional embodiments of the present invention, referring to Figure 4 and Figure 5 There are two second adjustment members 32, which are arranged on the upper and lower sides of the protective shell 40. Therefore, the two second adjustment members 32 can not only stably support the protective shell 40 in the upper and lower directions, stabilizing the protective shell 40 in a certain position, but also prevent the protective shell 40 from escaping from the space defined by the two second adjustment members 32 when the worm 21 rotates, thereby always maintaining the worm 21 in the appropriate position, thereby ensuring the adjustment function of the adjustment assembly 30.

[0062] For example, Figure 4 and Figure 5 As shown, there are two second adjusting members 32, and the two second adjusting members 32 are arranged on the upper and lower sides of the protective shell 40. The upper second adjusting member 32 is matched with the first mounting port on the upper side, and the lower second adjusting member 32 is matched with the first mounting port on the lower side.

[0063] According to some embodiments of the present invention, referring to Figure 1 and Figure 4 The adjustment assembly 30 further includes a third adjustment member 33 disposed between the housing 10 and the protective shell 40 and configured to push the protective shell 40 to move in the second direction. Thus, the third adjustment member 33 can adjust the protective shell 40 in the second direction, thereby adjusting the position of the worm 21 in the second direction, and further adjusting the degree of fit between the worm 21 and the worm wheel 22 during engagement. Furthermore, the third adjustment member 33 adjusts the worm 21 through the protective shell 40, thereby preventing the third adjustment member 33 from directly contacting the worm 21 and affecting its rotation.

[0064] According to some optional embodiments of the present invention, referring to Figure 1 and Figure 4 , the third adjusting member 33 is along the second direction (such as Figure 1 The housing 10 is provided with a second mounting opening, which penetrates a side wall of the housing 10 along the second direction (as shown in the left and right directions). Figure 1 The third adjusting member 33 is disposed in the second mounting opening, and the third adjusting member 33 faces one end of the protective shell 40 (as shown in FIG. Figure 1 The left end of the third adjusting member 33 shown in the figure abuts against the protective shell 40, and the relative position of the third adjusting member 33 in the second mounting opening along the second direction is adjustable.

[0065] In this way, setting up the second mounting port can facilitate the connection between the third adjusting member 33 and the shell 10, thereby facilitating the fixation of the third adjusting member 33. At the same time, one end of the third adjusting member 33 abuts against the protective shell 40, which can ensure that the third adjusting member 33 can adjust the position of the protective shell 40 in the second direction, thereby realizing the adjustment of the worm 21.

[0066] For example, Figure 1 and Figure 4 As shown, the third adjusting member 33 is a column extending in the left-right direction. The housing 10 is provided with a second mounting opening that extends through the right sidewall of the housing 10 in the left-right direction. The third adjusting member 33 is inserted into the second mounting opening, and the left end of the third adjusting member 33 abuts the protective shell 40. The relative position of the third adjusting member 33 in the left-right direction within the second mounting opening is adjustable. Preferably, the third adjusting member 33 and the third mounting opening are provided with mutually cooperating threaded structures. By rotating the third adjusting member 33, the relative position of the third adjusting member 33 and the housing 10 in the left-right direction can be adjusted, thereby adjusting the position of the protective shell 40 in the left-right direction.

[0067] According to some embodiments of the present invention, referring to Figure 1 、 Figure 11 and Figure 15The rotating stage device 100 includes: a grating component 61 and a reading head component 62. Specifically, the grating component 61 is provided on the worm gear 22 and is located on one side of the worm gear 22 in the radial direction (such as Figure 1 The grating assembly 61 is provided with a scale extending along the circumference of the worm gear 22; the reading head assembly 62 is configured to read the scale of the grating assembly 61 to obtain the rotation angle of the worm gear 22.

[0068] In this way, the grating component 61 rotates together with the worm gear 22, so that the rotation angle of the worm gear 22 can be directly obtained through the grating component 61, thereby ensuring the accuracy of the data. At the same time, the reading head component 62 is used to read the scale of the grating component 61, which can realize automated operation and effectively improve the reading efficiency.

[0069] For example, Figure 1 、 Figure 11 and Figure 15 As shown, the grating assembly 61 is provided on the worm gear 22 and is located radially outside the worm gear 22. The grating assembly 61 is a hollow cylindrical structure. The outer periphery of the grating assembly 61 is provided with a scale extending along the circumference of the worm gear 22. The reading head assembly 62 is provided with a reading head for reading the scale of the grating assembly 61.

[0070] According to some optional embodiments of the present invention, referring to Figure 11 、 Figure 13 and Figure 15 The rotating stage device 100 further includes a limiting structure 70, which is configured to limit the rotation angle of the worm gear 22. The limiting structure 70 includes two limit switches 71 and two limit members 72. Specifically, the two limit switches 71 are arranged on the housing 10 at intervals, and are respectively a first limit switch and a second limit switch; the two limit members 72 are both provided on the grating assembly 61 and are arranged at intervals in the circumferential direction of the grating assembly 61, and are respectively a first limit member and a second limit member; the worm gear 22 is rotatable between a first position and a second position. When the worm gear 22 is in the first position, the first limit switch is in a limited cooperation with the first limit member, and when the worm gear 22 is in the second position, the second limit switch is in a limited cooperation with the second limit member.

[0071] In this way, the limiting structure 70 can limit the rotation angle of the worm gear 22, thereby preventing the turntable device 100 from exceeding the limited rotation angle and causing damage to components, thereby ensuring that the worm gear 22 rotates within a safe range. At the same time, by cooperating with the two limit switches 71 and the corresponding two limiting members 72, the control logic can be simplified and the accuracy can be improved, thereby effectively limiting the rotation angle of the worm gear 22, thereby ensuring that the turntable device 100 can operate safely.

[0072] For example, Figure 11 、 Figure 13 and Figure 15 As shown, the first limit switch and the second limit switch are arranged at intervals on the housing 10, the first limit member and the second limit member are arranged at intervals on the grating assembly 61, the first limit switch corresponds to the first limit member, and the second limit switch corresponds to the second limit member, thereby effectively limiting the rotation angle of the worm gear 22.

[0073] When the rotating table device 100 is running, the first limit member first cooperates with the first limit switch, which serves as the starting point of the rotation of the worm gear 22. The worm gear 22 rotates to drive the grating assembly 61 to rotate, and the grating assembly 61 drives the first limit member and the second limit member to rotate. When the second limit member cooperates with the second limit switch, the second limit switch is triggered, and the worm gear 22 reaches the maximum rotation angle.

[0074] According to some optional embodiments of the present invention, referring to Figure 11 、 Figure 13 and Figure 15 The relative positions of the first and second limiting members and the grating assembly 61 are adjustable in the circumferential direction of the grating assembly 61. Thus, the rotation angle of the worm gear 22 is adjustable, thereby limiting the rotation angle of the worm gear 22 according to actual needs, thereby improving the versatility of the rotary stage device 100 and meeting various usage requirements.

[0075] It should be explained that the angles of the first limiting member and the second limiting member in the circumferential direction of the grating assembly 61 can be adjusted between 0° and 360°.

[0076] According to some optional embodiments of the present invention, referring to Figure 11 、 Figure 12 and Figure 13 The limiting member 72 includes a sliding block 721 and a locking screw 722. Specifically, a sliding groove extending along the circumference of the grating assembly 61 is provided on the outer edge of the grating assembly 61, and the sliding block 721 is slidably engaged in the sliding groove; the locking screw 722 is detachably connected to the sliding block 721, and the sliding block 721 is fastened to the grating assembly 61 via the locking screw 722.

[0077] In this way, a sliding block 721 is provided, and when the locking screw 722 is separated from the sliding block 721, the sliding block 721 slides in the sliding groove, thereby adjusting the distance between the first limit member and the second limit member, and then adjusting the rotation angle of the worm gear 22. At the same time, this structure is simple and easy to operate, thereby improving the adjustment efficiency.

[0078] For example, Figure 11 、 Figure 12 and Figure 13As shown, the outer edge of the grating assembly 61 is provided with a sliding groove extending circumferentially along the grating assembly 61, and the sliding block 721 is a square block. The sliding block 721 can slide in the sliding groove, so that the distance between the first limit member and the second limit member can be adjusted. The locking screw 722 extends along the radial direction of the grating. When the locking screw 722 is tightened with the sliding block 721, the sliding block 721 can be fastened in the sliding groove, effectively preventing the sliding block 721 from sliding, and thus the rotation angle of the worm gear 22 can be stably limited.

[0079] According to some optional embodiments of the present invention, referring to Figure 12 、 Figure 13 and Figure 14 The limit switch 71 includes a contact arm 711, and the limit member 72 further includes an abutting arm 723. The abutting arm 723 is fixed to the sliding block 721 via a locking screw 722. When the abutting arm 723 contacts the touch arm 711, the limit switch 71 is triggered. As a result, the touch arm 711 facilitates the cooperation between the abutting arm 723 of the limit member 72 and the limit switch 71, preventing the limit member 72 from directly contacting the limit switch 71 and causing damage to the limit switch 71, thereby protecting the limit switch 71. At the same time, the cooperation between the touch arm 711 and the abutting arm 723 reduces the difficulty of cooperation between the limit member 72 and the limit switch 71, thereby facilitating the cooperation between the limit member 72 and the limit switch 71.

[0080] For example, Figure 12 、 Figure 13 and Figure 14 As shown, a touch arm 711 extending circumferentially along the grating assembly 61 is provided on one side of the limit switch 71, and an abutment arm 723 extends along the axial direction of the grating assembly 61. The lower end of the abutment arm 723 contacts the touch arm 711, thereby triggering the limit switch 71.

[0081] According to some embodiments of the present invention, referring to Figure 1 、 Figure 2 and Figure 10 The rotary table device 100 includes a drive motor 81 and a reducer 82. The drive motor 81 is connected to the worm 21 through the reducer 82, and the reducer 82 is connected to the protective shell 40. Thus, the drive motor 81 drives the worm 21 through the reducer 82, thereby ensuring the normal operation of the rotary table device 100. At the same time, the reducer can control the reduction ratio between the drive motor 81 and the worm 21, thereby slightly adjusting the rotation angle of the worm wheel 22. Preferably, the reducer 82 is a speed reducer, so that the rotation angle of the worm wheel 22 can be slightly adjusted.

[0082] Furthermore, if Figure 1 、 Figure 5 and Figure 10As shown, a coupling 93 is provided between the reducer 82 and the second housing 12 , and the reducer 82 is transmission-connected to the worm 21 via the coupling 93 .

[0083] According to some optional embodiments of the present invention, referring to Figure 1 、 Figure 2 and Figure 3 The rotating stage device 100 includes an elastic connector 83, which is provided between the housing 10 and the protective shell 40. The protective shell 40 is connected to the housing 10 through the elastic connector 83. When the protective shell 40 rotates relative to the housing 10, if there is surface contact between the housing 10 and the protective shell 40, the protective shell 40 cannot rotate relative to the housing 10. Therefore, the elastic connector 83 is provided so that the protective shell 40 can be adjusted normally. At the same time, when the protective shell 40 is adjusted, there is line contact between the protective shell 40 and the housing 10. Through the cooperation of the elastic connector 83, the connection area between the protective shell 40 and the housing 10 can be increased, thereby increasing the connection strength and effectively preventing the protective shell 40 from separating from the housing 10.

[0084] According to some optional embodiments of the present invention, referring to Figure 1 、 Figure 2 and Figure 3 , along the first direction (such as Figure 1 The front and rear directions shown in FIG), the housing 10 faces the end surface of the protective shell 40 (as shown in FIG). Figure 1 The rear end surface of the housing 10 shown in FIG. 1 is provided with a recessed mounting groove, which extends along the first direction. The elastic connecting member 83 includes: an elastic member 831 and a ball head 832. The elastic member 831 extends along the first direction and is disposed in the mounting groove; the ball head 832 is connected to one end of the elastic member 831 facing the protective shell 40 (as shown in FIG. Figure 3 The rear end of the elastic member 831 is shown in FIG, and is located between the protective shell 40 and the housing 10.

[0085] In this way, providing the mounting groove can facilitate the installation of the ball head 832. At the same time, the ball head 832 can increase the connection area between the shell 10 and the protective shell 40, thereby preventing the protective shell 40 from separating from the shell 10 when the protective shell 40 rotates. Furthermore, the elastic member 831 is elastic. When the protective shell 40 rotates, the elastic member 831 is squeezed and deformed, thereby realizing a flexible connection between the protective shell 40 and the shell 10, thereby ensuring that the protective shell 40 can rotate normally relative to the shell 10.

[0086] For example, Figure 1 、 Figure 2 and Figure 3As shown, the rear end face of the second shell 12 is provided with a forward-concave mounting groove, which extends in the front-to-back direction. The elastic member 831 is a spring extending in the front-to-back direction. The elastic member 831 is located in the mounting groove, and the ball head 832 is connected to the rear end of the elastic member 831 and is located between the protective shell 40 and the second shell 12.

[0087] According to some embodiments of the present invention, referring to Figure 1 、 Figure 2 and Figure 7 The housing 10 includes a first shell 11 and a second shell 12. Specifically, the first shell 11 is Figure 1 The worm gear 22 is provided on the first shell 11; the second shell 12 is connected to the first shell 11 in the second direction (as shown in FIG. Figure 1 left and right directions) on one side (as shown in Figure 1 The second shell 12 is along the first direction (as shown in FIG. Figure 1 The second shell 12 is a hollow cylinder extending in the front-to-back direction (as shown), a mounting cavity is defined in the second shell 12, and the protective shell 40 is disposed in the second shell 12.

[0088] In this way, the first shell 11 can provide an installation position for the worm gear 22, thereby facilitating the arrangement of the worm gear 22. At the same time, the second shell 12 can provide an installation position for the protective shell 40, thereby facilitating the arrangement of the protective shell 40. Furthermore, the second shell 12 is connected to one side of the first shell 11, so that the shell 10 is a whole, thereby ensuring the strength of the shell 10. In addition, it can also facilitate the engagement of the worm 21 and the worm gear 22 inside the second shell 12.

[0089] For example, Figure 1 、 Figure 2 and Figure 7 As shown, the first shell 11 is a hollow cylinder extending in the up-down direction, the worm gear 22 is arranged on the first shell 11, the second shell 12 is connected to the right side of the first shell 11, the second shell 12 is a hollow cylinder extending in the front-back direction, and an installation cavity is provided in the second shell 12, and the protective shell 40 is provided in the installation cavity.

[0090] Furthermore, if Figure 3 and Figure 5 As shown, a support bearing 91 is provided in the protective shell 40 , and the support bearing 91 is used to support the worm 21 so that the worm 21 can run smoothly in the protective shell 40 .

[0091] Furthermore, if Figure 6 and Figure 7 As shown, a rotary bearing 92 is provided between the first housing 11 and the worm gear 22 , and the worm gear 22 rotates relative to the first housing 11 via the rotary bearing 92 to ensure that the worm gear 22 can run smoothly.

[0092] According to some optional embodiments of the present invention, referring to Figure 1 、 Figure 2 and Figure 7 , the second shell 12 in the second direction (such as Figure 7 The left and right directions shown) on one side wall (such as Figure 7 The right sidewall of the second housing 12 (shown as a diagram) is provided with a filling port extending along the second direction through the wall of the mounting cavity. This filling port is used to fill the lubricating medium. The rotary table apparatus 100 further includes a sealing member 121 for sealing the filling port. Thus, lubricating medium can be filled through the filling port, thereby lubricating the transmission connection between the worm gear 22 and the worm 21, thereby preventing the worm gear 22 and the worm 21 from becoming stuck. Furthermore, the sealing member 121 blocks the filling port, preventing the lubricating medium from escaping from the filling port. Preferably, the lubricating medium is a vacuum lubricating medium, enabling the rotary table apparatus 100 to operate stably in a vacuum environment.

[0093] Reference below Figures 1-15 A specific embodiment of the rotation stage device 100 of the present application is described.

[0094] The rotating table device 100 includes: a housing 10, a worm 21, a worm wheel 22, an adjustment assembly 30, a protective shell 40, a bushing 50, a grating assembly 61, a reading head assembly 62, a limiting structure 70, a drive motor 81, a reducer 82, an elastic connector 83 and a sealing member 121.

[0095] The housing 10 comprises a first shell 11 and a second shell 12. The first shell 11 is a hollow cylinder extending vertically. The worm gear 22 is mounted on the first shell 11. The second shell 12 is connected to the right side of the first shell 11. The second shell 12 is a hollow cylinder extending in the front-to-back direction and contains a mounting cavity. A filling port is provided on the right sidewall of the second shell 12, extending horizontally through the cavity wall. This filling port is used to fill the lubricant, and a sealing member 121 is used to seal the filling port. A recessed mounting groove is provided on the rear end of the second shell 12, extending in the front-to-back direction.

[0096] The protective shell 40 is disposed in the installation cavity. The protective shell 40 is provided with an opening. The worm 21 is rotatably disposed in the protective shell 40 and exposed from the opening. The worm wheel 22 is engaged with the worm 21 at the opening.

[0097] The adjustment assembly 30 is disposed on the second housing 12 , and includes a first adjustment member 31 , a second adjustment member 32 , and a third adjustment member 33 .

[0098] The protective shell 40 is rotatably connected to the housing 10 around an axis extending vertically through a first adjusting member 31. There are two first adjusting members 31, which are arranged on the upper and lower sides of the protective shell 40. Taking the upper first adjusting member 31, the first groove and the bushing 50 as an example, the first adjusting member 31 is formed into a cylinder extending in the vertical direction. The upper end of the first adjusting member 31 is fixed to the housing 10. The upper surface of the outer surface of the protective shell 40 is provided with a first groove. The lower end of the first adjusting member 31 extends into and is rotatably connected to the inner wall of the first groove. The bushing 50 is provided between the first adjusting member 31 and the inner wall of the first groove. The upper surface of the bushing 50 is provided with a flange 51, which is supported on the periphery of the first groove and abuts between the first adjusting member 31 and the outer wall of the protective shell 40 in the vertical direction. The lower first adjusting member 31, the first groove and the bushing 50 are symmetrically arranged in the vertical direction with the upper first adjusting member 31, the first groove and the bushing 50.

[0099] The shell 10 is provided with a first opening corresponding to the first groove in the up and down directions. Taking the first opening on the upper side as an example, the diameter of the first opening is larger than the diameter of the first groove. The first adjusting member 31 is cylindrical and includes a first column 311 and a second column 312. The second column 312 is provided on the lower side of the first column 311. The first column 311 fits in the first opening and adapts to the shape of the first opening. The second column 312 fits in the first groove and adapts to the shape of the first groove. The lower first opening and the upper first opening are symmetrically arranged in the up and down directions.

[0100] The second adjusting member 32 is disposed between the housing 10 and the protective shell 40 and is configured to push the protective shell 40 to move in the vertical direction. There are two second adjusting members 32, which are disposed on the upper and lower sides of the protective shell 40. The second adjusting member 32 is a column extending in the vertical direction. The housing 10 is provided with a first mounting opening. The upper first mounting opening passes through the upper side wall of the housing 10 in the vertical direction, and the lower first mounting opening passes through the lower side wall of the housing 10 in the vertical direction. The upper second adjusting member 32 is inserted into the first mounting opening, and the lower second adjusting member 32 is inserted into the lower first mounting opening. The end of the second adjusting member 32 facing the protective shell 40 abuts against the protective shell 40, and the relative position of the second adjusting member 32 in the first mounting opening is adjustable in the vertical direction.

[0101] The third adjustment member 33 is disposed between the housing 10 and the protective shell 40 and is configured to push the protective shell 40 in the left-right direction. The third adjustment member 33 is a column extending in the left-right direction. The housing 10 is provided with a second mounting opening that extends through the right sidewall of the housing 10 in the left-right direction. The third adjustment member 33 is disposed within the second mounting opening, with the left end of the third adjustment member 33 abutting the protective shell 40. The relative position of the third adjustment member 33 in the left-right direction within the second mounting opening is adjustable.

[0102] The grating assembly 61 is provided on the worm gear 22 and is located on the outside of the worm gear 22 in the radial direction. The grating assembly 61 is provided with a scale extending along the circumference of the worm gear 22. The reading head assembly 62 is configured to read the scale of the grating assembly 61 to obtain the rotation angle of the worm gear 22.

[0103] The limit structure 70 includes a first limit switch, a second limit switch, a first limit member, and a second limit member. The first limit switch and the second limit switch are spaced apart on the housing 10, and the first limit member and the second limit member are spaced apart on the grating assembly 61. The worm gear 22 is rotatable between a first position and a second position. When the worm gear 22 is in the first position, the first limit switch and the first limit member engage in a limited position. When the worm gear 22 is in the second position, the second limit switch and the second limit member engage in a limited position.

[0104] The limit member 72 includes a sliding block 721, a locking screw 722, and an abutting arm 723. The abutting arm 723 is secured to the sliding block 721 via the locking screw 722. A sliding groove extending circumferentially along the outer edge of the grating assembly 61 is provided, and the sliding block 721 slidably fits within the sliding groove. The locking screw 722 is detachably connected to the sliding block 721, and the sliding block 721 is securely connected to the grating assembly 61 via the locking screw 722. The limit switch 71 includes a contact arm 711. When the abutting arm 723 contacts the contact arm 711, the limit switch 71 is triggered.

[0105] The drive motor 81 is connected to the worm 21 via a speed reducer 82. The elastic connector 83 is disposed between the second shell 12 and the protective shell 40. The elastic connector 83 includes an elastic member 831 and a ball head 832. The elastic member 831 extends in the front-to-back direction and is disposed within the mounting groove. The ball head 832 is connected to the rear end of the elastic member 831 and is located between the second shell 12 and the protective shell 40.

[0106] Before using the rotating table device 100, the protective shell 40 is first installed in the installation cavity of the second shell 12. At this time, the protective shell 40 is rotated in the horizontal plane by the first adjusting member 31 to adjust the position between the worm wheel 22 and the worm 21. Then, the position of the protective shell 40 is adjusted in the up and down directions by the second adjusting member 32, thereby realizing the adjustment of the up and down position of the worm 21. Thereafter, the position of the protective shell 40 is adjusted in the left and right directions by the third adjusting member 33, thereby realizing the adjustment of the left and right position of the worm 21. In this way, the degree of fit between the worm 21 and the worm wheel 22 when they are engaged is adjusted.

[0107] In order to limit the rotation angle of the worm 21, first separate the locking screw 722 from the sliding block 721, and slide the sliding block 721 in the sliding groove to adjust the distance between the first limit member and the second limit member. After the adjustment is completed, tighten the locking screw 722 and the sliding block 721 to complete the adjustment of the distance between the first limit member and the second limit member, thereby completing the adjustment of the rotation angle of the worm 21.

[0108] According to the rotary table device 100 of the embodiment of the present invention, a first adjustment member 31 is provided to adjust the degree of fit between the worm 21 and the worm wheel 22 during meshing, thereby effectively preventing wear at the portion where the worm wheel 22 and the worm 21 are connected in transmission. It also prevents the worm 21 and the worm wheel 22 from getting stuck due to lack of lubrication in a vacuum environment, thereby ensuring the service life of the rotary table device 100 and reducing maintenance costs. At the same time, it can effectively eliminate return errors, thereby effectively ensuring rotation accuracy.

[0109] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like to indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present invention.

[0110] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature identified as "first" or "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, "plurality" means two or more, unless otherwise specifically defined.

[0111] In the present invention, unless otherwise expressly specified or limited, terms such as "mounted," "connected," "connect," and "fixed" should be understood broadly. For example, they may refer to fixed connection, detachable connection, or integration; mechanical connection, electrical connection, or communication; direct connection or indirect connection through an intermediate medium; and internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on specific circumstances.

[0112] In the description of this specification, the reference terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and features of different embodiments or examples without contradiction.

[0113] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to the embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the claims and their equivalents.

Claims

1. A rotating table device, characterized in that: include: housing (10); a worm (21), the worm (21) being disposed in the housing (10) and extending along a first direction in a horizontal plane; a worm wheel (22), the worm wheel (22) being disposed in the housing (10) and located on one side of the worm wheel (22) in a second direction in a horizontal plane, the worm (21) being meshed with the worm wheel (22), the first direction being perpendicular to the second direction; An adjusting assembly (30) is provided on the housing (10), and is used to adjust the relative position of the worm (21) and the worm wheel (22). The adjusting assembly (30) comprises: a first adjusting member (31), the first adjusting member (31) being formed as a column extending in an up-down direction, the first adjusting member (31) being connected between the worm (21) and the housing (10), and the worm (21) being rotatably connected to the housing (10) around an axis extending up-down through the first adjusting member (31), so as to adjust the degree of fit between the worm (21) and the worm wheel (22) when they are engaged.

2. The turntable device according to claim 1, wherein: Also includes: A protective shell (40) is provided in the housing (10), the protective shell (40) is provided with an opening, the worm (21) is rotatably provided in the protective shell (40) and exposed from the opening, and the worm wheel (22) is engaged with the worm (21) at the opening.

3. The turntable device according to claim 2, wherein: One end of the first adjusting member (31) is fixedly connected to the housing (10), and a first groove is provided on the outer surface of the protective shell (40), and the other end of the first adjusting member (31) is rotatably engaged in the first groove.

4. The turntable device according to claim 3, wherein: The number of the first adjusting members (31) is two, and the two first adjusting members (31) are arranged on the upper and lower sides of the protective shell (40). The number of the first grooves is two, and the first grooves correspond to the first adjusting members (31) one by one.

5. The turntable device according to claim 3, wherein: include: A bushing (50), the bushing (50) being arranged between the first adjusting member (31) and the inner wall of the first groove.

6. The turntable device according to claim 5, wherein: A flange (51) is provided on a surface of the bushing (50) facing the housing (10). The flange (51) is supported on the periphery of the first groove and abuts between the first adjusting member (31) and the outer wall of the protective shell (40) in the vertical direction.

7. The turntable device according to claim 5, wherein: The housing (10) is provided with a first opening corresponding to the first groove in the up-down direction, and the diameter of the first opening is larger than the diameter of the first groove. The first adjusting member (31) is cylindrical and comprises a first column (311) and a second column (312), wherein the second column (312) is arranged on a side of the first column (311) facing the worm (21), the first column (311) fits into the first through-opening and is adapted to the shape of the first through-opening, and the second column (312) fits into the first groove and is adapted to the shape of the first groove.

8. The turntable device according to claim 2, wherein: The adjustment assembly (30) comprises a second adjustment member (32), the second adjustment member (32) being arranged between the housing (10) and the protective shell (40) and configured to push the protective shell (40) to move in an up-down direction.

9. The turntable device according to claim 8, wherein: The second adjusting member (32) is a column extending in the up-down direction. The shell (10) is provided with a first mounting opening, the first mounting opening passes through a side wall of the shell (10) in the up-down direction, the second adjusting member (32) is inserted into the first mounting opening, one end of the second adjusting member (32) facing the protective shell (40) abuts against the protective shell (40), and the relative position of the second adjusting member (32) in the up-down direction in the first mounting opening is adjustable.

10. The turntable device according to claim 9, wherein: The number of the second adjusting members (32) is two, and the two second adjusting members (32) are arranged on the upper and lower sides of the protective shell (40).

11. The turntable device according to claim 2, wherein: The adjustment assembly (30) further comprises a third adjustment member (33), the third adjustment member (33) being disposed between the housing (10) and the protective shell (40) and configured to push the protective shell (40) to move along the second direction.

12. The turntable device according to claim 11, wherein: The third adjusting member (33) is a column extending along the second direction. The shell (10) is provided with a second mounting opening, and the second mounting opening passes through a side wall of the shell (10) along the second direction. The third adjusting member (33) is inserted into the second mounting opening. One end of the third adjusting member (33) facing the protective shell (40) abuts against the protective shell (40). The relative position of the third adjusting member (33) along the second direction in the second mounting opening is adjustable.

13. The turntable device according to claim 1, wherein include: a grating component (61), the grating component (61) being provided on the worm wheel (22) and located on one side in a radial direction of the worm wheel (22), the grating component (61) being provided with a scale extending along the circumference of the worm wheel (22); A reading head assembly (62) is configured to read the scale of the grating assembly (61) to obtain the rotation angle of the worm gear (22).

14. The turntable device according to claim 13, wherein: Also includes: A limiting structure (70), the limiting structure (70) being configured to limit the rotation angle of the worm gear (22), the limiting structure (70) comprising: Two limit switches (71), the two limit switches (71) are arranged on the housing (10) at intervals and are respectively a first limit switch and a second limit switch; Two limiting members (72), both of which are provided on the grating assembly (61) and are arranged at intervals in the circumferential direction of the grating assembly (61), and are respectively a first limiting member and a second limiting member, The worm wheel (22) is rotatable between a first position and a second position. When the worm wheel (22) is in the first position, the first limit switch is in limited cooperation with the first limit member. When the worm wheel (22) is in the second position, the second limit switch is in limited cooperation with the second limit member.

15. The turntable device according to claim 14, wherein: In the circumferential direction of the grating component (61), the relative positions of the first limiting member, the second limiting member and the grating component (61) are adjustable.

16. The turntable device according to claim 15, wherein: The limiting member (72) includes: A sliding block (721), wherein the outer edge of the grating component (61) is provided with a sliding groove extending along the circumference of the grating component (61), and the sliding block (721) is slidably engaged in the sliding groove; A locking screw (722), wherein the locking screw (722) is detachably connected to the sliding block (721), and the sliding block (721) is fastened to the grating assembly (61) via the locking screw (722).

17. The turntable device according to claim 16, wherein: The limit switch (71) has a touch arm (711), and the limit member (72) further includes an abutment arm (723), wherein the abutment arm (723) is fixed to the sliding block (721) via the locking screw (722), and the limit switch (71) is triggered when the abutment arm (723) contacts the touch arm (711).

18. The turntable device according to claim 2, wherein: include: A drive motor (81) and a reducer (82), wherein the drive motor (81) is transmission-connected to the worm (21) via the reducer (82), and the reducer (82) is connected to the protective shell (40).

19. The turntable device according to claim 18, wherein: include: An elastic connecting member (83), wherein the elastic connecting member (83) is provided between the housing (10) and the protective shell (40), and the protective shell (40) is connected to the housing (10) via the elastic connecting member (83).

20. The turntable device according to claim 19, wherein: Along the first direction, the housing (10) is provided with a recessed mounting groove on an end surface facing the protective shell (40), and the mounting groove extends along the first direction. The elastic connecting member (83) comprises: an elastic member (831), the elastic member (831) extending along the first direction and disposed in the mounting groove; A ball head (832), the ball head (832) is connected to one end of the elastic member (831) facing the protective shell (40), and is located between the protective shell (40) and the housing (10).

21. The turntable device according to claim 2, wherein: The housing (10) comprises: A first shell (11), the first shell (11) is a hollow column extending in an up-down direction, and the worm gear (22) is provided on the first shell (11); A second shell (12), the second shell (12) is connected to one side of the first shell (11) in the second direction, the second shell (12) is a hollow cylinder extending along the first direction, a mounting cavity is provided in the second shell (12), and the protective shell (40) is provided in the second shell (12).

22. The turntable device according to claim 21, wherein: The second shell (12) is provided with a filling port on a side wall in the second direction that penetrates the cavity wall of the installation cavity along the second direction, and the filling port is used to fill the lubricating medium. The rotary table device (100) further includes a sealing member (121), and the sealing member (121) is used to seal the filling port.

Images