Rotary table device

Abstract

The application provides a rotary table device, which comprises a shell, a worm arranged in the shell and extending in a first direction in a horizontal plane, a worm wheel arranged in the shell and located on one side of the worm wheel in a second direction in the horizontal plane, the worm being engaged with the worm wheel, the first direction being perpendicular to the second direction, and an adjusting assembly arranged in the shell and used for adjusting the relative position of the worm and the worm wheel, the adjusting assembly comprising a first adjusting part formed as a column extending in an up-down direction, the first adjusting part being connected between the worm and the shell, the worm being rotatably connected with the shell about an axis extending in the up-down direction through the first adjusting part to adjust the fitting degree of the worm and the worm wheel when engaged. According to the rotary table device, the first adjusting part is arranged, the part where the worm wheel and the worm are drivingly connected can be effectively prevented from being worn, the service life of the rotary table device can be ensured, and the maintenance cost is reduced.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of rotary table device manufacturing, and in particular to a rotary table device. BACKGROUND

[0002] The rotary table device in the prior art has the problem that the gear gap between the worm and the worm gear gradually increases during long-term use of the rotary table device, which causes wear at the matching part between the worm and the worm gear, and thus affects the service life of the rotary table device and the rotation accuracy of the rotary table device. SUMMARY

[0003] The present application aims to solve at least one of the problems in the prior art. To this end, the present application provides a rotary table device that can ensure the service life of the rotary table device.

[0004] The rotary table device according to the present application comprises a housing, a worm arranged in the housing and extending in a first direction in a horizontal plane, a worm gear arranged in the housing and located on one side of the worm gear in a second direction in the horizontal plane, the worm being engaged with the worm gear, the first direction being perpendicular to the second direction, and an adjusting assembly arranged in the housing and used for adjusting the relative position of the worm and the worm gear, the adjusting assembly comprising a first adjusting member formed as a column extending in an up-down direction, the first adjusting member being connected between the protective shell and the housing, the protective shell being rotatably connected with the housing about an axis extending in the up-down direction through the first adjusting member to adjust the fitting degree of the worm and the worm gear when engaged.

[0005] The rotary table device according to the present application has the first adjusting member arranged to adjust the fitting degree of the worm and the worm gear when engaged, which can effectively prevent the wear at the part where the worm and the worm gear are drivingly connected, avoid the jamming of the worm and the worm gear due to lack of lubrication in a vacuum environment, ensure the service life of the rotary table device, reduce the maintenance cost, effectively eliminate the back stroke error, and thus effectively ensure the rotation accuracy.

[0006] According to some embodiments of the present application, the rotary table device further comprises a protective shell arranged in the housing, the protective shell being provided with an opening, the worm being rotatably arranged in the protective shell and exposed from the opening, and the worm gear being engaged with the worm at the opening.

[0007] According to some optional embodiments of the present application, one end of the first adjusting member is fixedly connected with the housing, the outer surface of the protective shell is provided with a first groove, and the other end of the first adjusting member is rotatably fitted in the first groove.

[0008] According to some optional embodiments of the present application, the number of the first adjusting members is two, and the two first adjusting members are arranged on the upper and lower sides of the protective shell. The number of the first grooves is two, and the first grooves correspond to the first adjusting members one by one.

[0009] According to some embodiments of the present application, the rotating table device comprises a bushing arranged between the first adjusting member and the inner wall of the first groove.

[0010] According to some optional embodiments of the present application, the bushing is provided with a flange towards one side surface of the shell, the flange is supported on the periphery of the first groove, and abuts between the first adjusting member and the outer wall surface of the protective shell in the up-down direction.

[0011] According to some embodiments of the present application, the shell is provided with a first through hole corresponding to the first groove in the up-down direction, the diameter of the first through hole is greater than the diameter of the first groove, the first adjusting member is cylindrical and comprises a first column and a second column, the second column is arranged on the side of the first column towards the worm, the first column is fitted in the first through hole and is adapted to the shape of the first through hole, and the second column is fitted in the first groove and is adapted to the shape of the first groove.

[0012] According to some embodiments of the present application, the adjusting assembly comprises a second adjusting member arranged between the shell and the protective shell and configured to push the protective shell to move in the up-down direction.

[0013] According to some optional embodiments of the present application, the second adjusting member is a column extending in the up-down direction, the shell is provided with a first mounting hole penetrating through one side wall of the shell in the up-down direction, the second adjusting member is arranged in the first mounting hole, one end of the second adjusting member towards the protective shell abuts against the protective shell, and the relative position of the second adjusting member in the first mounting hole in the up-down direction is adjustable.

[0014] According to some optional embodiments of the present application, the number of the second adjusting members is two, and the two second adjusting members are arranged on the upper and lower sides of the protective shell.

[0015] According to some embodiments of the present application, the adjusting assembly further comprises a third adjusting member arranged between the shell and the protective shell and configured to push the protective shell to move in the second direction.

[0016] According to some optional embodiments of the present application, the third adjusting member is a column extending along the second direction, the shell is provided with a second mounting opening penetrating through a side wall of the shell along the second direction, the third adjusting member is arranged in the second mounting opening, and one end of the third adjusting member is in abutment with the protective shell, and the relative position of the third adjusting member in the second mounting opening along the second direction is adjustable.

[0017] According to some embodiments of the present application, the rotary table device comprises: a grating assembly arranged on the worm wheel and located on one side in the radial direction of the worm wheel, the grating assembly being provided with a scale extending along the circumferential direction of the worm wheel; and a reading head assembly configured to read the scale of the grating assembly to obtain the rotation angle of the worm wheel.

[0018] According to some optional embodiments of the present application, the rotary table device further comprises: a limiting structure configured to limit the rotation angle of the worm wheel, the limiting structure comprising: two limiting switches arranged at intervals on the shell and being respectively a first limiting switch and a second limiting switch; and two limiting members arranged at intervals on the grating assembly in the circumferential direction of the grating assembly and being respectively a first limiting member and a second limiting member, the worm wheel being rotatable between a first position and a second position, the first limiting switch being in limiting cooperation with the first limiting member when the worm wheel is located at the first position, and the second limiting switch being in limiting cooperation with the second limiting member when the worm wheel is located at the second position.

[0019] According to some optional embodiments of the present application, the relative positions of the first limiting member and the second limiting member to the grating assembly in the circumferential direction of the grating assembly are adjustable.

[0020] According to some optional embodiments of the present application, the limiting member comprises: a sliding block, the outer side edge of the grating assembly being provided with a sliding groove extending along the circumferential direction of the grating assembly, the sliding block being slidably fitted in the sliding groove; and a locking screw, the locking screw being detachably connected with the sliding block, and the sliding block being fastened with the grating assembly through the locking screw.

[0021] According to some optional embodiments of the present application, the limiting switch has a touch arm, and the limiting member further comprises: an abutment arm, the abutment arm being fixed with the sliding block through the locking screw, and the abutment arm triggering the limiting switch when the abutment arm is in contact with the touch arm.

[0022] According to some embodiments of the present application, the rotating table device comprises a driving motor and a speed reducer, the driving motor is connected with the worm gear through the speed reducer, and the speed reducer is connected with the protective shell.

[0023] According to some optional embodiments of the present application, the rotating table device comprises an elastic connecting member, which is arranged between the shell and the protective shell, and the protective shell is connected with the shell through the elastic connecting member.

[0024] According to some optional embodiments of the present application, the shell is provided with a recessed mounting groove towards the end surface of the protective shell along the first direction, the mounting groove extends along the first direction, and the elastic connecting member comprises an elastic member extending along the first direction and arranged in the mounting groove, and a ball head connected to one end of the elastic member towards the protective shell and located between the protective shell and the shell.

[0025] According to some embodiments of the present application, the shell comprises a first shell which is a hollow column extending along the up-down direction, and the worm gear is arranged on the first shell; and a second shell which is connected to one side of the first shell in the second direction and is a hollow column extending along the first direction, and the second shell is provided with a mounting cavity, and the protective shell is arranged in the second shell.

[0026] According to some optional embodiments of the present application, the second shell is provided with a filling port on the side wall of the second shell in the second direction, the filling port penetrates the cavity wall of the mounting cavity along the second direction, and the filling port is used for filling lubricating medium, and the rotating table device further comprises a plugging member used for plugging the filling port.

[0027] Additional aspects and advantages of the present application will be given in part in the following description, become apparent from the following description, or be understood through practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0028] Figure 1 is a schematic view of one angle of the rotating table device according to an embodiment of the present application;

[0029] Figure 2 is Figure 1 is a schematic view of another angle of the rotating table device shown in FIG. 1;

[0030] Figure 3 is Figure 2 is an enlarged view of A in FIG. 1;

[0031] Figure 4 is Figure 2 is an enlarged view of B in FIG. 1;

[0032] Figure 5 is a sectional view along the line C-C in Figure 2

[0033] Figure 6 is a schematic view of a part of the structure of the rotary table device shown in Figure 1

[0034] Figure 7 is a sectional view along the line D-D in Figure 6

[0035] Figure 8 is a schematic view of a part of the structure of the rotary table device shown in Figure 1

[0036] Figure 9 is a close-up view of E in Figure 8

[0037] Figure 10 is a sectional view along the line F-F in Figure 8

[0038] Figure 11 is a schematic view of a part of the structure of the rotary table device shown in Figure 1

[0039] Figure 12 is a sectional view along the line G-G in Figure 11

[0040] Figure 13 is a close-up view of H in Figure 12

[0041] Figure 14 is a schematic view of a part of the structure of the rotary table device shown in Figure 1

[0042] Figure 15 is a schematic view of a part of the structure of the rotary table device shown in Figure 1

[0043] Reference signs:

[0044] 100, rotary table device

[0045] 10, housing; 11, first housing; 12, second housing; 121, obturator

[0046] 21, worm; 22, worm wheel

[0047] 30, adjustment assembly; 31, first adjustment member; 311, first cylinder; 312, second cylinder; 32, second adjustment member; 33, third adjustment member

[0048] 40, protective housing ​​​​​​​​​​​

[0049] 50. Bushing; 51. Flanged edge;

[0050] 61. Grating assembly; 62. Reading head assembly;

[0051] 70. Limiting structure; 71. Limiting switch; 711. Contact arm; 72. Limiting component; 721. Sliding block; 722. Locking screw; 723. Abutment arm;

[0052] 81. Drive motor; 82. Reducer; 83. Flexible connector; 831. Flexible element; 832. Ball head;

[0053] 91. Support bearing; 92. Rotary bearing; 93. Coupling. Detailed Implementation

[0054] Embodiments of the present invention are described in detail below, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0055] The following is a reference appendix. Figures 1-15 A rotary table device 100 according to an embodiment of the present invention is described.

[0056] Reference Figure 1 , Figure 2 , Figure 3 , Figure 5 , Figure 8 , Figure 9 and Figure 10 According to an embodiment of the present invention, the rotary table device 100 includes: a housing 10, a worm gear 21, a worm wheel 22, and an adjustment assembly 30.

[0057] Specifically, the worm gear 21 is disposed within the housing 10 and along a first direction in the horizontal plane (e.g., Figure 5 Extending in the front-to-back direction (as shown); the worm gear 22 is disposed within the housing 10 and located in the second direction of the worm gear 22 in the horizontal plane (as shown). Figure 1 On one side of the left and right directions shown (e.g.) Figure 1 (As shown, on the right side of the worm gear 22), the worm 21 meshes with the worm gear 22, with the first direction perpendicular to the second direction; an adjustment assembly 30 is disposed in the housing 10, and the adjustment assembly 30 is used to adjust the relative position of the worm 21 and the worm gear 22. The adjustment assembly 30 includes: a first adjustment member 31, which is formed along the vertical direction (e.g., on the right side of the worm gear 22). Figure 9The first adjusting member 31 is connected between the protective shell 40 and the shell 10, and the protective shell 40 is rotatably connected to the shell 10 around the up-down extending axis through the first adjusting member 31 to adjust the fitting degree of the worm 21 and the worm wheel 22 when meshing.

[0058] For example, as shown in Figure 1 、 Figure 2 、 Figure 3 、 Figure 5 、 Figure 8 、 Figure 9 and Figure 10 The worm 21 is arranged in the shell 10, extends along the front-rear direction, and is located at the right side of the worm wheel 22 in the horizontal plane. The worm 21 is meshingly connected to the worm wheel 22. The adjusting assembly 30 is arranged on the shell 10. The first adjusting member 31 forms a cylindrical body extending along the up-down direction. The first adjusting member 31 is connected between the protective shell 40 and the shell 10. The upper end of the first adjusting member 31 is connected to the shell 10, and the lower end of the first adjusting member 31 is connected to the outer wall surface of the protective shell 40. Preferably, the worm wheel 22 is made of beryllium bronze material. The material has excellent mechanical properties and small friction coefficient. In a vacuum environment, the material is not easy to volatilize and oxidize, and the worm wheel 22 can work stably for a long time.

[0059] When assembling the rotary table device 100, the worm wheel 22 is first matched with the worm 21 in the shell 10, and then the adjusting assembly 30 is adjusted. The distance between the gear on the worm 21 and the gear on the worm wheel 22 is controlled by the adjusting assembly 30. For example, the worm 21 can be rotated, the position of the worm 21 can be adjusted in the up-down direction, and the position of the worm 21 can be adjusted in the left-right direction to adjust the fitting degree of the worm 21 and the worm wheel 22 when meshing.

[0060] It should be explained that the rotary table device 100 of the present application can be applied to the fields of semiconductor manufacturing, aerospace part processing and detection, high-end optical coating, and micro-particle beam research, especially in a high vacuum environment. The rotary table device 100 is prone to jamming between the worm wheel 22 and the worm 21 due to the vacuum environment. The rotary table device 100 of the present application controls the fitting degree of the worm 21 and the worm wheel 22 when meshing through the adjusting assembly 30, which can effectively prevent the worm 21 and the worm wheel 22 from jamming, thereby ensuring that the rotary table device 100 can work stably.

[0061] The rotating table device 100 of the present application is provided with the first adjusting member 31, the protective shell 40 can rotate around the axis extending upward and downward in the horizontal plane through the first adjusting member 31, so that the inclination angle formed by the worm 21 and the worm gear 22 in the vertical plane can be avoided, and the normal meshing of the worm gear 22 and the worm 21 can be ensured, so that the wear of the transmission connection part of the worm gear 22 and the worm 21 can be effectively prevented, and the service life of the rotating table device 100 can be ensured, and the maintenance cost is reduced, and at the same time, the worm is not in a normal fitting relationship when cooperating with the worm gear, and the fitting tolerance of the worm and the worm gear can be expanded by rotating the worm, and the fitting and installation of the worm and the worm gear can be facilitated.

[0062] In addition, the distance between the worm 21 and the worm gear 22 can be avoided to be too large, so that the transmission loss of the worm gear 22 and the worm 21 is increased, so that the transmission energy consumption of the worm gear 22 and the worm 21 can be reduced, and at the same time, the distance between the worm 21 and the worm gear 22 can be avoided to be too small, so that the worm gear 22 and the worm 21 cannot normally operate, and therefore, the relative position of the worm gear 22 and the worm 21 is adjusted, so that the rotating table device 100 can be stably and normally operated.

[0063] In addition, the distance between the worm 21 and the worm gear 22 can be avoided to be too large, so that the transmission loss of the worm gear 22 and the worm 21 is increased, so that the transmission energy consumption of the worm gear 22 and the worm 21 can be reduced, and at the same time, the distance between the worm 21 and the worm gear 22 can be avoided to be too small, so that the worm gear 22 and the worm 21 cannot normally operate, and therefore, the relative position of the worm gear 22 and the worm 21 is adjusted, so that the rotating table device 100 can be stably and normally operated.

[0064] In addition, the distance between the worm 21 and the worm gear 22 can be avoided to be too large, so that the transmission loss of the worm gear 22 and the worm 21 is increased, so that the transmission energy consumption of the worm gear 22 and the worm 21 can be reduced, and at the same time, the distance between the worm 21 and the worm gear 22 can be avoided to be too small, so that the worm gear 22 and the worm 21 cannot normally operate, and therefore, the relative position of the worm gear 22 and the worm 21 is adjusted, so that the rotating table device 100 can be stably and normally operated.

[0065] The rotating table device 100 according to the embodiment of the present application is provided with the first adjusting member 31, the fitting degree of the worm 21 and the worm gear 22 when meshing can be adjusted, so that the wear of the transmission connection part of the worm gear 22 and the worm 21 can be effectively prevented, and the jamming of the worm 21 and the worm gear 22 in the vacuum environment due to lack of lubrication can be avoided, and therefore, the service life of the rotating table device 100 can be ensured, and the maintenance cost is reduced, and at the same time, the return error can be effectively eliminated, so that the rotation accuracy can be effectively ensured.

[0066] According to some embodiments of the present application, with reference to Figure 5 , Figure 8 and Figure 10 , the rotating table device 100 comprises a protective shell 40, which is arranged in the shell 10 and is provided with an opening, the worm 21 is rotatably arranged in the protective shell 40 and exposed from the opening, and the worm wheel 22 is engaged with the worm 21 at the opening. In this way, the protective shell 40 is arranged to protect the worm 21, so that the rotation of the worm 21 can be effectively prevented from being affected by adjacent components, thereby ensuring that the rotating table device 100 can operate stably. Meanwhile, the adjusting assembly 30 adjusts the worm 21 by adjusting the protective shell 40, so that the position of the worm 21 can be adjusted and the normal rotation of the worm 21 can be prevented from being affected by the adjusting assembly 30.

[0067] For example, as shown in Figure 5 , Figure 8 and Figure 10 , the protective shell 40 extends in the front-rear direction, the opening is arranged in the protective shell 40, the worm 21 is rotatably arranged in the protective shell 40, the left side of the protective shell 40 is provided with an opening, the opening penetrates the left side wall of the protective shell 40 in the left-right direction, and the worm 21 is exposed from the opening to cooperate with the worm wheel 22.

[0068] According to some embodiments of the present application, with reference to Figure 3 , Figure 5 and Figure 9 , one end of the first adjusting member 31 (for example, the upper end of the first adjusting member 31 as shown in Figure 5 ) is fixedly connected with the shell 10, the outer surface of the protective shell 40 is provided with a first recess, and the other end of the first adjusting member 31 (for example, the lower end of the first adjusting member 31 as shown in Figure 5 ) is rotatably fitted in the first recess. In this way, the first adjusting member 31 is fitted in the first recess, so that the stability of the cooperation between the first adjusting member 31 and the protective shell 40 can be ensured, and the first adjusting member 31 can be effectively prevented from being separated from the protective shell 40 when the protective shell 40 is rotated relative to the shell 10 by the first adjusting member 31, thereby ensuring that the adjusting assembly 30 can normally adjust the position of the worm 21. In addition, the first adjusting member 31 can serve as a rotating shaft for the rotation of the protective shell 40, thereby ensuring the stability of the rotation of the protective shell 40.

[0069] For example, as shown in Figure 3 , Figure 5 and Figure 9 , the upper end of the first adjusting member 31 is fixedly connected with the shell 10, the outer surface of the protective shell 40 is provided with a first recess which is recessed inwardly in the up-down direction, and the lower end of the first adjusting member 31 is rotatably fitted in the first recess.

[0070] Further, as shown in Figure 3 ,Figure 5 and Figure 9 As shown in FIG. 1, the first adjusting member 31 is in interference fit with the shell 10, and when the first adjusting member 31 is fixed with the shell 10, an external tool can be used to knock or press, etc. to fix the first adjusting member 31 with the shell 10.

[0071] According to some optional embodiments of the present application, referring to Figure 3 , Figure 5 and Figure 9 , the number of the first adjusting member 31 is two, and the two first adjusting members 31 are arranged on the upper and lower sides of the protective shell 40 (such as the upper and lower sides of the protective shell 40 shown in Figure 5 ), and the number of the first recess is two, and the first recess corresponds to the first adjusting member 31 one by one.

[0072] In this way, the two first adjusting members 31 can form rotating shafts on the upper and lower sides of the protective shell 40, so as to ensure the stability of the rotation of the protective shell 40 relative to the shell 10, effectively prevent the protective shell 40 from being stuck during rotation, and further ensure the adjusting effect of the adjusting assembly 30.

[0073] For example, as shown in Figure 3 , Figure 5 and Figure 9 , the two first adjusting members 31 are arranged on the upper and lower sides of the protective shell 40, respectively, the first recess on the upper side of the protective shell 40 is recessed downward, the first recess on the lower side of the protective shell 40 is recessed upward, the lower end of the first adjusting member 31 on the upper side is inserted into the first recess on the upper side, and the upper end of the first adjusting member 31 on the lower side is inserted into the first recess on the lower side.

[0074] According to some embodiments of the present application, referring to Figure 8 and Figure 9 , the rotating table device 100 comprises a bushing 50, which is arranged between the first adjusting member 31 and the inner wall of the first recess. Thus, the bushing 50 can reduce the friction between the first adjusting member 31 and the inner wall of the first recess, so as to ensure that the protective shell 40 can rotate stably relative to the first adjusting member 31.

[0075] According to some optional embodiments of the present application, referring to Figure 8 and Figure 9 , the side surface of the bushing 50 facing the shell 10 is provided with a flange 51, the flange 51 is supported on the periphery of the first recess, and abuts between the first adjusting member 31 and the outer wall of the protective shell 40 along the up-down direction (such as the up-down direction shown in Figure 8 ). Thus, by providing the flange 51, the bushing 50 can be prevented from moving on the first adjusting member 31 along the axial direction of the first adjusting member 31, so as to ensure that the bushing 50 can be stably arranged between the first adjusting member 31 and the inner wall of the first recess.

[0076] For example, as shown in Figure 8 and Figure 9 , taking the lower side bushing 50 as an example, the lower side of the bushing 50 is provided with a flange 51, the flange 51 is supported on the periphery of the first groove, and abuts between the first adjusting part 31 and the outer wall surface of the protective shell 40 in the up-down direction, and the upper side bushing 50 and the lower side bushing 50 are arranged symmetrically in the up-down direction.

[0077] According to some embodiments of the present application, referring to Figure 8 and Figure 9 , the shell 10 is provided with a first through hole corresponding to the first groove in the up-down direction, the diameter of the first through hole is larger than the diameter of the first groove, the first adjusting part 31 is cylindrical and includes a first column 311 and a second column 312, the second column 312 is arranged on the side of the first column 311 facing the worm 21, the first column 311 is fitted in the through hole and is adapted to the shape of the first through hole, and the second column 312 is fitted in the first groove and is adapted to the shape of the first groove.

[0078] In this way, the second column 312 extends into the first groove, so that the protective shell 40 can rotate relative to the second column 312, thereby realizing the rotation of the worm 21 relative to the shell 10, and the first column 311 cooperates with the first through hole to prevent the second column 312 from being separated from the first groove, thereby ensuring the stability of the cooperation between the first adjusting part 31 and the protective shell 40, and at the same time, the diameters of the first column 311 and the second column 312 are different, which facilitates the cooperation and installation of the first adjusting part 31 and the protective shell 40.

[0079] For example, as shown in Figure 8 and Figure 9 , taking the lower side first adjusting part 31 as an example, the second column 312 is arranged on the upper side of the first column 311, the diameter of the second column 312 is smaller than that of the first column 311, the second column 312 is located in the first groove, and the first column 311 is located in the first through hole, and the upper side first adjusting part 31 and the lower side first adjusting part 31 are arranged symmetrically in the up-down direction.

[0080] According to some embodiments of the present application, referring to Figure 2 , Figure 4 and Figure 5 , the adjusting assembly 30 includes a second adjusting part 32, the second adjusting part 32 is arranged between the shell 10 and the protective shell 40, and is configured to push the protective shell 40 in the up-down direction (as Figure 5The second adjusting member 32 adjusts the position of the protective shell 40 in the up-down direction, so as to adjust the position of the worm 21 in the up-down direction, and further adjust the fitting degree of the worm 21 and the worm gear 22 when they are engaged, effectively preventing the abrasion of the transmission connection part of the worm 21 and the worm gear 22. Meanwhile, the second adjusting member 32 adjusts the worm 21 through the protective shell 40, which can avoid the direct contact of the second adjusting member 32 with the worm 21 to affect the rotation of the worm 21.

[0081] According to some optional embodiments of the present application, referring to Figure 2 、 Figure 4 and Figure 5 , the second adjusting member 32 is a column extending in the up-down direction, and the housing 10 is provided with a first mounting port penetrating through the side wall of the housing 10 in the up-down direction (as shown in the up-down direction in the figure), and the second adjusting member 32 is arranged in the first mounting port, one end of the second adjusting member 32 abuts against the protective shell 40, and the relative position of the second adjusting member 32 in the first mounting port in the up-down direction is adjustable. Figure 5

[0082] In this way, the first mounting port is arranged to facilitate the connection of the second adjusting member 32 with the housing 10, so as to facilitate the fixation of the second adjusting member 32, and meanwhile, one end of the second adjusting member 32 abuts against the protective shell 40, which can ensure that the second adjusting member 32 can adjust the position of the protective shell 40 in the up-down direction, and further adjust the worm 21.

[0083] For example, as shown in Figure 2 、 Figure 4 and Figure 5 , the second adjusting member 32 is a column extending in the up-down direction, and the housing 10 is provided with a first mounting port penetrating through the side wall of the housing 10 in the up-down direction, and one end of the second adjusting member 32 abuts against the protective shell 40.

[0084] It should be explained that the second adjusting member 32 and the first mounting port are in interference fit, and when the second adjusting member 32 is fixed with the first mounting port, an external tool can be used to knock or pressurize to fix the second adjusting member 32 with the housing 10.

[0085] According to some optional embodiments of the present application, referring to Figure 4 and Figure 5 ​The second adjusting member 32 is provided in a number of two, and the two second adjusting members 32 are arranged on the upper and lower sides of the protective shell 40. In this way, the two second adjusting members 32 can stably support the protective shell 40 in the up-down direction, and stabilize the protective shell 40 at a certain position, and meanwhile, the protective shell 40 can be prevented from escaping from the space defined by the two second adjusting members 32 when the worm 21 rotates, so that the worm 21 can be maintained at a proper position at all times, and the adjusting effect of the adjusting assembly 30 can be ensured.

[0086] For example, as shown in Figure 4 and Figure 5 , the second adjusting member 32 is provided in a number of two, and the two second adjusting members 32 are arranged on the upper and lower sides of the protective shell 40. In this way, the two second adjusting members 32 can stably support the protective shell 40 in the up-down direction, and stabilize the protective shell 40 at a certain position, and meanwhile, the protective shell 40 can be prevented from escaping from the space defined by the two second adjusting members 32 when the worm 21 rotates, so that the worm 21 can be maintained at a proper position at all times, and the adjusting effect of the adjusting assembly 30 can be ensured.

[0087] According to some embodiments of the present application, referring to Figure 1 and Figure 4 , the adjusting assembly 30 further comprises a third adjusting member 33, which is arranged between the shell 10 and the protective shell 40, and is configured to push the protective shell 40 to move in the second direction. In this way, the third adjusting member 33 can adjust the position of the protective shell 40 in the second direction, so as to adjust the position of the worm 21 in the second direction, and further adjust the fitting degree of the worm 21 and the worm wheel 22 when they are engaged, and meanwhile, the third adjusting member 33 adjusts the worm 21 through the protective shell 40, so as to avoid the third adjusting member 33 directly contacting the worm 21 to affect the rotation of the worm 21.

[0088] According to some optional embodiments of the present application, referring to Figure 1 and Figure 4 , the third adjusting member 33 is a column extending in the second direction (e.g. the left-right direction as shown in Figure 1 ), and the shell 10 is provided with a second mounting port, which penetrates through a side wall of the shell 10 in the second direction (e.g. the right side wall of the shell 10 as shown in Figure 1 ), and the third adjusting member 33 is arranged in the second mounting port, one end of the third adjusting member 33 (e.g. the left end of the third adjusting member 33 as shown in Figure 1 ) facing the protective shell 40 abuts against the protective shell 40, and the relative position of the third adjusting member 33 in the second mounting port in the second direction is adjustable.

[0089] In this way, the second mounting port is arranged, so as to facilitate the connection between the third adjusting member 33 and the shell 10, and further facilitate the fixation of the third adjusting member 33, and meanwhile, one end of the third adjusting member 33 abuts against the protective shell 40, so as to ensure that the third adjusting member 33 can adjust the position of the protective shell 40 in the second direction, and further adjust the worm 21.

[0090] For example, as shown inFigure 1 and Figure 4 As shown, the third adjusting member 33 is a column extending in the left-right direction. The housing 10 has a second mounting opening that penetrates the right sidewall of the housing 10 in the left-right direction. The third adjusting member 33 passes through the second mounting opening, and its left end abuts against the protective shell 40. The relative position of the third adjusting member 33 within the second mounting opening in the left-right direction is adjustable. Preferably, the third adjusting member 33 and the third mounting opening have a mating threaded structure. By rotating the third adjusting member 33, the relative position of the third adjusting member 33 and the housing 10 in the left-right direction can be adjusted, thereby adjusting the position of the protective shell 40 in the left-right direction.

[0091] According to some embodiments of the present invention, with reference to Figure 1 , Figure 11 and Figure 15 The rotary table device 100 includes a grating assembly 61 and a reading head assembly 62. Specifically, the grating assembly 61 is disposed on the worm gear 22 and located on one side of the worm gear 22 in the radial direction (e.g., Figure 1 (The radial outer side of the worm gear 22 shown) The grating assembly 61 is provided with a scale extending circumferentially along the worm gear 22; the reading head assembly 62 is configured to read the scale of the grating assembly 61 to obtain the rotation angle of the worm gear 22.

[0092] In this way, the grating assembly 61 and the worm gear 22 rotate together, so that the rotation angle of the worm gear 22 can be obtained directly through the grating assembly 61, thereby ensuring the accuracy of the data. At the same time, the reading head assembly 62 is used to read the scale of the grating assembly 61, which can realize automated operation and effectively improve reading efficiency.

[0093] For example, such as Figure 1 , Figure 11 and Figure 15 As shown, the grating assembly 61 is disposed on the worm gear 22 and located on the radial outer side of the worm gear 22. The grating assembly 61 is a hollow cylindrical structure. The outer periphery of the grating assembly 61 is provided with a scale extending circumferentially along the worm gear 22. The reading head assembly 62 is provided with a reading head for reading the scale of the grating assembly 61.

[0094] According to some optional embodiments of the present invention, refer to Figure 11 , Figure 13 and Figure 15The rotary table device 100 further comprises a limiting structure 70 configured to limit the rotation angle of the worm wheel 22, the limiting structure 70 comprising two limiting switches 71 and two limiting members 72. Specifically, the two limiting switches 71 are arranged at intervals on the housing 10 and are respectively a first limiting switch and a second limiting switch; the two limiting members 72 are both provided on the grating assembly 61 and are arranged at intervals in the circumferential direction of the grating assembly 61, and are respectively a first limiting member and a second limiting member; the worm wheel 22 is rotatable between a first position and a second position, when the worm wheel 22 is located at the first position, the first limiting switch is in limiting cooperation with the first limiting member, and when the worm wheel 22 is located at the second position, the second limiting switch is in limiting cooperation with the second limiting member.

[0095] In this way, the limiting structure 70 can limit the rotation angle of the worm wheel 22, which can avoid the rotary table device 100 exceeding the limited rotation angle and causing damage to the components, thereby ensuring that the worm wheel 22 rotates within a safe range. At the same time, through the cooperation of the two limiting switches 71 and the corresponding two limiting members 72, the control logic can be simplified and the accuracy can be improved, thereby effectively limiting the rotation angle of the worm wheel 22, and further ensuring that the rotary table device 100 can operate safely.

[0096] For example, as shown in Figure 11 、 Figure 13 and Figure 15 , the first limiting switch and the second limiting switch are arranged at intervals on the housing 10, the first limiting member and the second limiting member are arranged at intervals on the grating assembly 61, the first limiting switch is in corresponding cooperation with the first limiting member, and the second limiting switch is in corresponding cooperation with the second limiting member, thereby effectively limiting the rotation angle of the worm wheel 22.

[0097] When the rotary table device 100 is in operation, first, the first limiting member cooperates with the first limiting switch as the initial point of the rotation of the worm wheel 22, the worm wheel 22 drives the grating assembly 61 to rotate, and the grating assembly 61 drives the first limiting member and the second limiting member to rotate. When the second limiting member cooperates with the second limiting switch, the second limiting switch is triggered, and at this time the worm wheel 22 reaches the maximum rotation angle.

[0098] According to some optional embodiments of the present application, referring to Figure 11 、 Figure 13 and Figure 15 , the relative positions of the first limiting member and the second limiting member to the grating assembly 61 in the circumferential direction of the grating assembly 61 are adjustable. Thus, the rotation angle of the worm wheel 22 is adjustable, so that the rotation angle of the worm wheel 22 can be limited according to actual needs, thereby improving the versatility of the rotary table device 100 and meeting various use requirements.

[0099] It needs to be explained that the angle of the first limiting piece and the second limiting piece in the circumferential direction of the grating assembly 61 can be adjusted between 0°-360°.

[0100] According to some optional embodiments of the present application, referring to Figure 11 、 Figure 12 and Figure 13 , the limiting piece 72 comprises a sliding block 721 and a locking screw 722. Specifically, the outer side edge of the grating assembly 61 is provided with a sliding groove extending in the circumferential direction of the grating assembly 61, and the sliding block 721 is slidably fitted in the sliding groove; the locking screw 722 is detachably connected with the sliding block 721, and the sliding block 721 is tightly connected with the grating assembly 61 through the locking screw 722.

[0101] In this way, the sliding block 721 is arranged, and when the locking screw 722 is separated from the sliding block 721, the sliding block 721 slides in the sliding groove, so that the adjustment of the distance between the first limiting piece and the second limiting piece can be realized, and the angle of rotation of the worm wheel 22 can be adjusted. At the same time, this structure is simple and convenient to operate, so that the adjustment efficiency can be improved.

[0102] For example, as shown in Figure 11 、 Figure 12 and Figure 13 , the outer side edge of the grating assembly 61 is provided with a sliding groove extending in the circumferential direction of the grating assembly 61, the sliding block 721 is a square block, and the sliding block 721 can slide in the sliding groove, so that the distance between the first limiting piece and the second limiting piece can be adjusted. The locking screw 722 extends in the radial direction of the grating, and when the locking screw 722 is tightened with the sliding block 721, the sliding block 721 can be tightly fixed in the sliding groove, effectively preventing the sliding block 721 from sliding, and further stabilizing the rotation angle of the worm wheel 22.

[0103] According to some optional embodiments of the present application, referring to Figure 12 、 Figure 13 and Figure 14 , the limiting switch 71 has a touch arm 711, and the limiting piece 72 further comprises an abutting arm 723, which is fixed with the sliding block 721 through the locking screw 722. When the abutting arm 723 contacts with the touch arm 711, the limiting switch 71 is triggered. In this way, the touch arm 711 can facilitate the cooperation between the abutting arm 723 of the limiting piece 72 and the limiting switch 71, avoiding the direct contact between the limiting piece 72 and the limiting switch 71, which may cause damage to the limiting switch 71, so as to protect the limiting switch 71. At the same time, through the cooperation of the touch arm 711 and the abutting arm 723, the cooperation difficulty between the limiting piece 72 and the limiting switch 71 can be reduced, so as to facilitate the cooperation between the limiting piece 72 and the limiting switch 71.

[0104] For example, as shown in Figure 12 、 Figure 13 andFigure 14 As shown in the figure, one side of the limit switch 71 is provided with a contact arm 711 extending along the circumference of the grating assembly 61, and the abutting arm 723 extends along the axial direction of the grating assembly 61, and the lower end of the abutting arm 723 is in contact with the contact arm 711, thereby triggering the limit switch 71.

[0105] According to some embodiments of the present application, referring to Figure 1 , Figure 2 and Figure 10 , the rotary table device 100 comprises a driving motor 81 and a speed reducer 82, the driving motor 81 is drivingly connected with the worm 21 through the speed reducer 82, and the speed reducer 82 is connected with the protective shell 40. In this way, the driving motor 81 drives the worm 21 through the speed reducer 82, so that the rotary table device 100 can operate normally, and at the same time, the speed reducer can control the speed reduction ratio of the driving motor 81 and the worm 21, so that the rotation angle of the worm wheel 22 can be adjusted slightly. Preferably, the speed reducer 82 is a speed reducer, so that the rotation angle of the worm wheel 22 can be adjusted slightly.

[0106] Further, as shown in Figure 1 , Figure 5 and Figure 10 , a shaft coupling 93 is arranged between the speed reducer 82 and the second shell 12, and the speed reducer 82 is drivingly connected with the worm 21 through the shaft coupling 93.

[0107] According to some optional embodiments of the present application, referring to Figure 1 , Figure 2 and Figure 3 , the rotary table device 100 comprises an elastic connecting piece 83, which is arranged between the shell 10 and the protective shell 40, and the protective shell 40 is connected with the shell 10 through the elastic connecting piece 83. When the protective shell 40 rotates relative to the shell 10, if the shell 10 and the protective shell 40 are in surface contact, the protective shell 40 cannot rotate relative to the shell 10. Therefore, the elastic connecting piece 83 is arranged, so that the protective shell 40 can be adjusted normally, and when the protective shell 40 is adjusted, the protective shell 40 and the shell 10 are in line contact. Through the cooperation of the elastic connecting piece 83, the connecting area between the protective shell 40 and the shell 10 can be increased, and the connecting strength can be increased, thereby effectively preventing the protective shell 40 from separating from the shell 10.

[0108] According to some optional embodiments of the present application, referring to Figure 1 , Figure 2 and Figure 3 , along the first direction (e.g. the front-back direction as shown in Figure 1 , the end surface of the shell 10 facing the protective shell 40 (e.g. the end surface of the shell 10 facing the protective shell 40 as shown in Figure 1The rear end face of the shell 10 shown is provided with a recessed mounting groove extending in the first direction, and the elastic connecting piece 83 comprises an elastic piece 831 extending in the first direction and arranged in the mounting groove, and a ball head 832 connected to the elastic piece 831 at the end thereof facing the protective shell 40 (such as the rear end of the elastic piece 831 shown). Figure 3 The ball head 832 is located between the protective shell 40 and the shell 10.

[0109] In this way, the mounting groove is arranged to facilitate the mounting of the ball head 832, and the ball head 832 can increase the connecting area between the shell 10 and the protective shell 40, thereby preventing the protective shell 40 from separating from the shell 10 when the protective shell 40 rotates. In addition, the elastic piece 831 is elastic, and when the protective shell 40 rotates, the elastic piece 831 is compressed and deformed, thereby achieving flexible connection between the protective shell 40 and the shell 10, and ensuring that the protective shell 40 can normally rotate relative to the shell 10.

[0110] For example, as shown in Figure 1 , Figure 2 and Figure 3 , the rear end face of the second shell 12 is provided with a forwardly recessed mounting groove extending in the front-rear direction, and the elastic piece 831 is a spring extending in the front-rear direction, the elastic piece 831 is located in the mounting groove, and the ball head 832 is connected to the rear end of the elastic piece 831 and located between the protective shell 40 and the second shell 12.

[0111] According to some embodiments of the present application, referring to Figure 1 , Figure 2 and Figure 7 , the shell 10 comprises a first shell 11 and a second shell 12. Specifically, the first shell 11 is a hollow column extending in the up-down direction (such as the up-down direction shown in Figure 1 ), and the worm gear 22 is arranged on the first shell 11; the second shell 12 is connected to one side of the first shell 11 in the second direction (such as the left-right direction shown in Figure 1 ), such as the right side of the first shell 11 shown in Figure 1 ), and the second shell 12 is a hollow column extending in the first direction (such as the front-rear direction shown in Figure 1 ), and the second shell 12 is provided with a mounting cavity, and the protective shell 40 is arranged in the second shell 12.

[0112] In this way, the first shell 11 can provide a mounting position for the worm gear 22, thereby facilitating the arrangement of the worm gear 22, and the second shell 12 can provide a mounting position for the protective shell 40, thereby facilitating the arrangement of the protective shell 40. In addition, the second shell 12 is connected to one side of the first shell 11, so that the shell 10 is a whole, thereby ensuring the strength of the shell 10, and in addition, the engagement of the worm 21 and the worm gear 22 inside the second shell 12 can be facilitated.

[0113] For example, as shown in Figure 1 , Figure 2 and Figure 7 , the first shell 11 is a hollow cylinder extending in the up-down direction, the worm wheel 22 is arranged on the first shell 11, the second shell 12 is connected to the right side of the first shell 11, the second shell 12 is a hollow cylinder extending in the front-back direction, the second shell 12 is provided with a mounting cavity, and the protective shell 40 is arranged in the mounting cavity.

[0114] Further, as shown in Figure 3 and Figure 5 , the protective shell 40 is provided with a support bearing 91 for supporting the worm 21 so that the worm 21 can run smoothly in the protective shell 40.

[0115] Further, as shown in Figure 6 and Figure 7 , a rotating bearing 92 is arranged between the first shell 11 and the worm wheel 22, and the worm wheel 22 rotates relative to the first shell 11 through the rotating bearing 92 to ensure that the worm wheel 22 can run smoothly.

[0116] According to some optional embodiments of the present application, referring to Figure 1 , Figure 2 and Figure 7 , the second shell 12 is provided with a filling port on the side wall (such as the right side wall of the second shell 12 as shown in Figure 7 in the second direction (such as the left-right direction as shown in Figure 7 ), the filling port penetrates the cavity wall of the mounting cavity in the second direction, and the filling port is used to fill the lubricating medium. The rotary table device 100 further comprises a sealing member 121 for sealing the filling port. In this way, the lubricating medium can be filled through the filling port, so that the parts driven by the worm wheel 22 and the worm 21 can be lubricated, thereby preventing the worm wheel 22 and the worm 21 from being stuck. At the same time, the sealing member 121 is used to seal the filling port, so as to avoid the lubricating medium flowing out of the filling port. Preferably, the lubricating medium is a vacuum lubricating medium, so that the rotary table device 100 can run stably in a vacuum environment.

[0117] One specific embodiment of the rotary table device 100 of the present application will be described below with reference to Figures 1-15 .

[0118] The rotary table device 100 comprises a shell 10, a worm 21, a worm wheel 22, an adjusting assembly 30, a protective shell 40, a bushing 50, a grating assembly 61, a reading head assembly 62, a limiting structure 70, a driving motor 81, a speed reducer 82, an elastic connecting member 83 and a sealing member 121.

[0119] The shell 10 comprises a first shell 11 and a second shell 12, the first shell 11 is a hollow column extending in the up-down direction, the worm wheel 22 is arranged on the first shell 11, and the second shell 12 is connected to the right side of the first shell 11, the second shell 12 is a hollow column extending in the front-back direction, and the second shell 12 is provided with a mounting cavity. The right side wall of the second shell 12 is provided with a filling opening penetrating through the cavity wall of the mounting cavity in the left-right direction, the filling opening is used for filling the lubricating medium, and the sealing piece 121 is used for sealing the filling opening. The rear end face of the second shell 12 is provided with a recessed mounting groove extending in the front-back direction.

[0120] The protective shell 40 is arranged in the mounting cavity, the protective shell 40 is provided with an opening, the worm 21 is rotatably arranged in the protective shell 40 and exposed from the opening position, and the worm wheel 22 is engaged with the worm 21 at the opening position.

[0121] The adjusting assembly 30 is arranged on the second shell 12, and the adjusting assembly 30 comprises a first adjusting piece 31, a second adjusting piece 32 and a third adjusting piece 33.

[0122] The protective shell 40 is rotatably connected with the shell 10 around the axis extending in the up-down direction through the first adjusting piece 31. The number of the first adjusting piece 31 is two, and the two first adjusting pieces 31 are arranged on the upper and lower sides of the protective shell 40. Taking the upper first adjusting piece 31, the first groove and the bushing 50 as an example, the first adjusting piece 31 is formed as a cylinder extending in the up-down direction, the upper end of the first adjusting piece 31 is fixed with the shell 10, the outer surface of the protective shell 40 is provided with the first groove on the upper side, the lower end of the first adjusting piece 31 extends into and is rotatably connected with the inner wall of the first groove, the bushing 50 is arranged between the first adjusting piece 31 and the inner wall of the first groove, the upper side surface of the bushing 50 is provided with the flange 51, the flange 51 is supported on the circumferential edge of the first groove and abuts between the first adjusting piece 31 and the outer wall of the protective shell 40 in the up-down direction, and the lower first adjusting piece 31, the first groove and the bushing 50 are symmetrically arranged with the upper first adjusting piece 31, the first groove and the bushing 50 in the up-down direction.

[0123] The shell 10 is provided with a first through hole corresponding to the first groove in the up-down direction, and taking the upper first through hole as an example, the diameter of the first through hole is greater than that of the first groove, the first adjusting piece 31 is a cylinder and comprises a first column body 311 and a second column body 312, the second column body 312 is arranged on the lower side of the first column body 311, the first column body 311 is matched in the first through hole and is adapted to the shape of the first through hole, the second column body 312 is matched in the first groove and is adapted to the shape of the first groove, and the lower first through hole is symmetrically arranged with the upper first through hole in the up-down direction.

[0124] The second adjusting member 32 is arranged between the shell 10 and the protective shell 40 and is configured to push the protective shell 40 to move in the up-down direction. The number of the second adjusting member 32 is two, and the two second adjusting members 32 are arranged on the upper and lower sides of the protective shell 40. The second adjusting member 32 is a column extending in the up-down direction. The shell 10 is provided with a first mounting hole. The upper first mounting hole penetrates the upper side wall of the shell 10 in the up-down direction, and the lower first mounting hole penetrates the lower side wall of the shell 10 in the up-down direction. The upper second adjusting member 32 is arranged in the upper first mounting hole, and the lower second adjusting member 32 is arranged in the lower first mounting hole. One end of the second adjusting member 32, which is close to the protective shell 40, abuts against the protective shell 40. The relative position of the second adjusting member 32 in the first mounting hole in the up-down direction is adjustable.

[0125] The third adjusting member 33 is arranged between the shell 10 and the protective shell 40 and is configured to push the protective shell 40 to move in the left-right direction. The third adjusting member 33 is a column extending in the left-right direction. The shell 10 is provided with a second mounting hole. The second mounting hole penetrates the right side wall of the shell 10 in the left-right direction. The third adjusting member 33 is arranged in the second mounting hole. The left end of the third adjusting member 33 abuts against the protective shell 40. The relative position of the third adjusting member 33 in the second mounting hole in the left-right direction is adjustable.

[0126] The grating assembly 61 is arranged on the worm wheel 22 and located on the outer side of the worm wheel 22 in the radial direction. The grating assembly 61 is provided with a scale extending in the circumferential direction of the worm wheel 22. The reading head assembly 62 is configured to read the scale of the grating assembly 61 to obtain the rotation angle of the worm wheel 22.

[0127] The limiting structure 70 includes a first limiting switch, a second limiting switch, a first limiting member, and a second limiting member. The first limiting switch and the second limiting switch are arranged on the shell 10 in a spaced manner. The first limiting member and the second limiting member are arranged on the grating assembly 61 in a spaced manner. The worm wheel 22 is rotatable between a first position and a second position. When the worm wheel 22 is located at the first position, the first limiting switch is in limiting cooperation with the first limiting member. When the worm wheel 22 is located at the second position, the second limiting switch is in limiting cooperation with the second limiting member.

[0128] The limiting member 72 includes a sliding block 721, a locking screw 722, and an abutting arm 723. The abutting arm 723 is fixed to the sliding block 721 by the locking screw 722. The grating assembly 61 is provided with a sliding groove extending in the circumferential direction of the grating assembly 61 on the outer side edge of the grating assembly 61. The sliding block 721 is slidably arranged in the sliding groove. The locking screw 722 is detachably connected to the sliding block 721. The sliding block 721 is tightly connected to the grating assembly 61 by the locking screw 722. The limiting switch 71 has a touching arm 711. When the abutting arm 723 contacts the touching arm 711, the limiting switch 71 is triggered.

[0129] The driving motor 81 is in transmission connection with the worm 21 through a speed reducer 82, and an elastic connecting piece 83 is arranged between the second shell 12 and the protective shell 40. The elastic connecting piece 83 comprises an elastic piece 831 and a ball head 832, the elastic piece 831 extends along the front-rear direction and is arranged in the mounting groove, and the ball head 832 is connected to the rear end of the elastic piece 831 and is located between the second shell 12 and the protective shell 40.

[0130] Before using the rotary table device 100, the protective shell 40 is first arranged in the mounting cavity of the second shell 12, at this time, the position between the worm 21 and the worm wheel 22 is adjusted by rotating the protective shell 40 in the horizontal plane through the first adjusting piece 31, then the position of the protective shell 40 is adjusted in the up-down direction through the second adjusting piece 32, thereby realizing the adjustment of the position of the worm 21 in the up-down direction, and then the position of the protective shell 40 is adjusted in the left-right direction through the third adjusting piece 33, thereby realizing the adjustment of the position of the worm 21 in the left-right direction, so as to realize the adjustment of the fitting degree of the worm 21 and the worm wheel 22 when meshing.

[0131] In order to limit the rotation angle of the worm 21, the locking screw 722 is first separated from the sliding block 721, the sliding block 721 is slid in the sliding groove to adjust the distance between the first limiting piece and the second limiting piece, and after the adjustment is completed, the locking screw 722 is fastened with the sliding block 721 to complete the adjustment of the distance between the first limiting piece and the second limiting piece, thereby completing the adjustment of the rotation angle of the worm 21.

[0132] The rotary table device 100 according to the embodiment of the present application is provided with the first adjusting piece 31, the fitting degree of the worm 21 and the worm wheel 22 when meshing can be adjusted, so as to effectively prevent the wear of the transmission connection part between the worm wheel 22 and the worm 21, and avoid the jamming of the worm 21 and the worm wheel 22 in the vacuum environment due to lack of lubrication, thereby ensuring the service life of the rotary table device 100, reducing the maintenance cost, and effectively eliminating the back stroke error, so as to effectively ensure the rotation accuracy.

[0133] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0134] In addition, the terms "first", "second", etc. are used only to describe purposes and can not be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first", "second" can explicitly or implicitly include one or more of the features. In the description of the present application, the meaning of "a plurality of" is two or more, unless otherwise explicitly specified and limited.

[0135] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting", "fixing" and other terms should be understood broadly, for example, it can be fixed connection, or detachable connection, or integrated; it can be mechanical connection, or electrical connection, or communication; it can be directly connected, or indirectly connected through intermediate medium, it can be the internal communication of two elements or the interaction relationship between two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0136] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In the present application, the illustrative description of the above terms is not necessarily for the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine the different embodiments or examples described in the present application and the features of the different embodiments or examples without contradiction.

[0137] Although the embodiments of the present application have been shown and described, those skilled in the art can understand that various changes, modifications, replacements and variations can be made to the embodiments without departing from the principles and purposes of the present application, and the scope of the present application is defined by the claims and their equivalents.

Claims

1. A rotary table apparatus, characterized by, The utility model provides a worm gear device, comprising: a housing (10); a worm (21) arranged in the housing (10) and extending in a first direction in a horizontal plane; a worm wheel (22) arranged in the housing (10) and located on one side of the worm wheel (22) in a second direction in the horizontal plane, the worm (21) being engaged with the worm wheel (22), the first direction being perpendicular to the second direction; an adjusting assembly (30) arranged in the housing (10), the adjusting assembly (30) being used for adjusting the relative position of the worm (21) and the worm wheel (22), the adjusting assembly (30) comprising a first adjusting member (31) formed as a column extending in an up-down direction; a protective shell (40) arranged in the housing (10), the protective shell (40) being provided with an opening, the worm (21) being rotatably arranged in the protective shell (40) and exposed from the opening, the worm wheel (22) being engaged with the worm (21) at the opening; the first adjusting member (31) being connected between the protective shell (40) and the housing (10), one end of the first adjusting member (31) being fixedly connected with the housing (10), the outer surface of the protective shell (40) being provided with a first groove, the other end of the first adjusting member (31) being rotatably fitted in the first groove; the protective shell (40) being rotatably connected with the housing (10) about an axis extending in the up-down direction through the first adjusting member (31) to adjust the fitting degree of the worm (21) and the worm wheel (22) when engaged.

2. The rotary table apparatus of claim 1, wherein, The number of the first adjusting members (31) is two, the two first adjusting members (31) being arranged on the upper and lower sides of the protective shell (40), and the number of the first grooves is two, the first grooves corresponding to the first adjusting members (31) one by one.

3. The rotary table apparatus of claim 1, wherein, The utility model provides a worm gear device, comprising: a bushing (50) arranged between the first adjusting member (31) and the inner wall of the first groove.

4. The rotary table apparatus of claim 3, wherein, The side surface of the bushing (50) facing the housing (10) is provided with a flange (51) supported on the circumferential edge of the first groove and abutting between the first adjusting member (31) and the outer wall of the protective shell (40) in the up-down direction.

5. The rotary table apparatus of claim 3, wherein, The housing (10) is provided with a first through hole corresponding to the first groove in the up-down direction, the diameter of the first through hole being greater than the diameter of the first groove, the first adjusting member (31) being cylindrical and comprising a first column (311) and a second column (312), the second column (312) being arranged on the side of the first column (311) facing the worm (21), the first column (311) being fitted in the first through hole and being shape-fitted with the first through hole, and the second column (312) being fitted in the first groove and being shape-fitted with the first groove.

6. The rotary table apparatus of claim 1, wherein, The adjusting assembly (30) comprises a second adjusting member (32) arranged between the shell (10) and the protective shell (40) and configured to push the protective shell (40) to move in the up-down direction.

7. The rotary table apparatus of claim 6, wherein, The second adjusting member (32) is a column extending in the up-down direction, the shell (10) is provided with a first mounting opening penetrating a side wall of the shell (10) in the up-down direction, the second adjusting member (32) is arranged in the first mounting opening, one end of the second adjusting member (32) facing the protective shell (40) abuts against the protective shell (40), and the relative position of the second adjusting member (32) in the first mounting opening in the up-down direction is adjustable.

8. The rotary table apparatus of claim 7, wherein, The number of the second adjusting members (32) is two, and the two second adjusting members (32) are arranged on the upper and lower sides of the protective shell (40).

9. The rotary table apparatus of claim 1, wherein, The adjusting assembly (30) further comprises a third adjusting member (33) arranged between the shell (10) and the protective shell (40) and configured to push the protective shell (40) to move in the second direction.

10. The rotary table apparatus of claim 9, wherein, The third adjusting member (33) is a column extending in the second direction, the shell (10) is provided with a second mounting opening penetrating a side wall of the shell (10) in the second direction, the third adjusting member (33) is arranged in the second mounting opening, one end of the third adjusting member (33) facing the protective shell (40) abuts against the protective shell (40), and the relative position of the third adjusting member (33) in the second mounting opening in the second direction is adjustable.

11. The rotary table apparatus of claim 1, wherein, It comprises: A grating assembly (61) arranged on the worm gear (22) and located on one side in the radial direction of the worm gear (22), the grating assembly (61) is provided with a scale extending in the circumferential direction of the worm gear (22); A reading head assembly (62) configured to read the scale of the grating assembly (61) to obtain the rotation angle of the worm gear (22).

12. The rotary table apparatus of claim 11, wherein, It further comprises: A limiting structure (70) configured to limit the rotation angle of the worm gear (22), the limiting structure (70) comprises: Two limit switches (71) arranged on the shell (10) and respectively being a first limit switch and a second limit switch; Two limit members (72) arranged on the grating assembly (61) and respectively being a first limit member and a second limit member, The worm gear (22) is rotatable between a first position and a second position, when the worm gear (22) is located at the first position, the first limit switch is in limiting cooperation with the first limit member, and when the worm gear (22) is located at the second position, the second limit switch is in limiting cooperation with the second limit member.

13. The rotary table apparatus of claim 12, wherein, The relative positions of the first limiting member and the second limiting member to the grating assembly (61) are adjustable in the circumferential direction of the grating assembly (61).

14. The rotary table apparatus of claim 13, wherein, The limiting member (72) comprises: A sliding block (721) is provided outside the grating assembly (61) and is slidably fitted in a sliding groove extending in the circumferential direction of the grating assembly (61); A locking screw (722) is detachably connected with the sliding block (721), and the sliding block (721) is tightly connected with the grating assembly (61) through the locking screw (722).

15. The rotary table apparatus of claim 14, wherein, The limiting switch (71) has a contact arm (711), and the limiting member (72) further comprises an abutting arm (723) fixed with the sliding block (721) through the locking screw (722), and the abutting arm (723) triggers the limiting switch (71) when it contacts with the contact arm (711).

16. The rotary table apparatus of claim 1, wherein, It comprises: A drive motor (81) and a speed reducer (82), the drive motor (81) is drivingly connected with the worm (21) through the speed reducer (82), and the speed reducer (82) is connected with the protective shell (40).

17. The rotary table apparatus of claim 16, wherein, It comprises: An elastic connecting member (83) is arranged between the shell (10) and the protective shell (40), and the protective shell (40) is connected with the shell (10) through the elastic connecting member (83).

18. The rotary table apparatus of claim 17, wherein, In the first direction, the shell (10) is provided with a recessed mounting groove towards the end surface of the protective shell (40), and the mounting groove extends in the first direction, The elastic connecting member (83) comprises: An elastic member (831) extending in the first direction and arranged in the mounting groove; A ball head (832) connected to one end of the elastic member (831) towards the protective shell (40) and located between the protective shell (40) and the shell (10).

19. The rotary table apparatus of claim 1, wherein, The shell (10) comprises: A first shell (11) which is a hollow column extending in the up-down direction, and the worm wheel (22) is arranged on the first shell (11); A second shell (12) connected to one side of the first shell (11) in the second direction, which is a hollow column extending in the first direction, and the second shell (12) is provided with a mounting cavity, and the protective shell (40) is arranged in the second shell (12).

20. The rotary table apparatus of claim 19, wherein, The second shell (12) is provided with a filling port on the side wall of the second direction, which penetrates the cavity wall of the mounting cavity in the second direction, and the filling port is used for filling lubricating medium, and the rotary table device (100) further comprises a plugging member (121) for plugging the filling port.

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