A device and method for detecting the flatness and straightness of a vacuum chamber.

Abstract

This invention relates to a device and method for detecting the flatness and straightness of a vacuum chamber. The device includes a support platform, an XY dual-axis motion platform, a detection and adjustment device, and a fixed support. The support platform includes a marble platform; the XY dual-axis motion platform includes a Y-axis motion mechanism, an X-axis motion mechanism, and an air flotation system. The Y-axis motion mechanism performs Y-axis linear motion on the marble platform, and the X-axis motion mechanism is mounted on the Y-axis motion mechanism and performs X-axis linear motion. The air flotation system provides an air source for the X and Y axis motion mechanisms. An adjustment pad is mounted on the fixed support, and an oscillator bracket and a vacuum chamber are mounted on the fixed support. The adjustment pad defines a reference surface. The detection and adjustment device includes a detection bracket mounted on the X-axis motion mechanism and first, second, and third sensors. The first and second sensors correspond to the upper surface and side surface of the vacuum chamber, respectively, and the third sensor corresponds to the reference surface. This invention enables long-stroke, high-precision vacuum chamber positioning detection.

Description

Technical Field

[0001] This invention relates to the field of precision testing equipment technology, and in particular to a device and method for testing the flatness and straightness of a vacuum chamber. Background Technology

[0002] In large-scale scientific projects such as nuclear fusion devices and particle accelerators, the (U26 / U55) undulator is a key component, and the installation accuracy of its vacuum chamber directly affects the overall performance of the system. The vacuum chamber has a slender structure (length ≥ 4 meters), and its installation must meet stringent requirements of flatness ±0.1 mm and straightness ±0.1 mm.

[0003] Traditional detection methods rely on manual multi-point measurement or single sensor scanning, which has the following drawbacks:

[0004] 1. Low measurement efficiency: Manual point-by-point inspection is time-consuming and cannot meet the progress requirements of modern engineering projects;

[0005] 2. Limited accuracy: Long-distance measurements are susceptible to environmental vibration, temperature changes and mechanical friction, making it difficult to guarantee repeatability accuracy of ±0.1mm;

[0006] 3. Poor stability: Traditional detection devices are only suitable for short strokes (usually ≤1 meter), and displacement deviations are prone to occur during long strokes (over 4 meters).

[0007] 4. Low level of automation: It lacks an integrated control system and cannot achieve multi-axis coordinated motion and real-time data feedback. Summary of the Invention

[0008] This invention provides a device and method for detecting the flatness and straightness of a vacuum chamber, in order to solve the above-mentioned technical problems.

[0009] To address the aforementioned technical problems, this invention provides a vacuum chamber flatness and straightness detection device, comprising a support platform, an XY dual-axis motion platform, a detection and adjustment device, and a fixed support.

[0010] The support platform includes a marble platform and a first adjustable support leg installed at the bottom of the marble platform;

[0011] The XY dual-axis motion platform includes a Y-axis motion mechanism, an X-axis motion mechanism, and an air-bearing system. The Y-axis motion mechanism includes a first permanent magnet stator, a first moving air-bearing slider, and a Y-guide rail. The Y-guide rail is laid on the upper surface of the marble platform. The first permanent magnet stator is installed between the Y-guide rails. The first moving air-bearing slider is positioned above the Y-guide rails. A first grating ruler is installed on the side of the marble platform, and a first reading head corresponding to the first grating ruler is installed inside the first moving air-bearing slider. The X-axis motion mechanism includes a base plate, an X-guide rail, and a second... The system comprises a permanent magnet stator and a second mover air-bearing slider. A base plate is mounted on the first mover air-bearing slider. An X-axis guide rail is laid on the upper surface of the base plate. The second permanent magnet stator is mounted between the X-axis guide rails. The second mover air-bearing slider is positioned above the X-axis guide rails. A second grating ruler is mounted on the side of the base plate. A second reading head corresponding to the second grating ruler is mounted on the second mover air-bearing slider. Multiple air holes are provided on the inner surfaces of the first and second mover air-bearing sliders. The air-bearing system communicates with these air holes and provides an air source to them.

[0012] The fixed support is equipped with a second adjustable support leg at the bottom and an adjusting pad at the top. The oscillator bracket and vacuum chamber are mounted on the fixed support. There are three adjusting pads, and the three adjusting pads define a reference plane.

[0013] The detection and adjustment device includes a detection bracket mounted on the second mover air-bearing slider and a first sensor, a second sensor, and a third sensor arranged longitudinally along the detection bracket. The first sensor corresponds to the upper surface of the vacuum chamber, the second sensor corresponds to the side surface of the vacuum chamber, and the third sensor corresponds to the reference surface.

[0014] Preferably, mechanical hard stops are provided at both ends of the Y-guide rail and the X-guide rail, and anti-collision pads are provided on the side of the mechanical hard stops near the Y-guide rail or the X-guide rail.

[0015] Preferably, the marble platform is provided with multiple photoelectric switches, which correspond to the zero and extreme positions of the X-axis and Y-axis, respectively.

[0016] Preferably, the input / output port cables of the Y-axis motion mechanism are secured and wrapped with a silent cable chain.

[0017] Preferably, the air flotation system includes an air compressor, a refrigerated dryer, an oil-water separator, and a micro-particle separator connected in sequence by pipelines.

[0018] Preferably, a counterweight is installed on the side of the second mover air-bearing slider away from the detection and adjustment device.

[0019] Preferably, the detection bracket is also equipped with a lateral anti-collision sensor.

[0020] Preferably, the fixed support is also provided with an adjustment mechanism corresponding to the side of the marble platform.

[0021] Preferably, the bottom of the fixed support is also equipped with an L-shaped support leg for fixing the position.

[0022] The present invention also provides a method for detecting the flatness and straightness of a vacuum chamber, which uses the vacuum chamber flatness and straightness detection device described above and includes the following steps:

[0023] Step 1: Set up a cleanroom;

[0024] Step 2: Install the support platform and the XY dual-axis motion platform inside the cleanroom;

[0025] Step 3: Check the levelness of the marble platform and adjust the height of the first adjustable support leg until the flatness is <0.1mm;

[0026] Step 4: Complete the overall installation of the air flotation system and test the stability of the air source;

[0027] Step 5: Install the fixed support and adjust the parallelism between the fixed support and the marble platform;

[0028] Step 6: Check and adjust the flatness of the fixed support, and adjust the height of the second adjusting support leg until the flatness is <0.1mm;

[0029] Step 7: Install the undulator bracket and vacuum chamber onto the fixed support;

[0030] Step 8: Adjust the X-axis motion mechanism to position the first, second, and third sensors in the effective detection position;

[0031] Step 9: Drive the Y-axis motion mechanism, use the second sensor to perform multi-point measurements on the side of the undulator bracket, and adjust the straightness of the undulator bracket;

[0032] Step 10: Use the second sensor to perform multi-point measurements on the side of the vacuum chamber and adjust the straightness of the vacuum chamber;

[0033] Step 11: Drive the Y-axis motion mechanism and use the third sensor to detect the flatness of the reference surface;

[0034] Step 12: Based on the flatness of the reference surface meeting the requirements, the flatness of the vacuum chamber is measured and adjusted using the first sensor.

[0035] Compared with the prior art, the vacuum chamber flatness and straightness detection device and method provided by the present invention have the following advantages:

[0036] 1. This invention can achieve ultra-high precision detection, with a comprehensive measurement error ≤ ±0.05mm (better than the design requirement of ±0.1mm) and repeatability at the μ level;

[0037] 2. This invention has a short single detection time and supports remote fully automatic / manual dual-mode switching, enabling efficient detection;

[0038] 3. In this invention, the air flotation system enables the Y-axis motion mechanism and X-axis motion mechanism to move without mechanical contact wear, the linear motor drive has a long service life, and the maintenance cost is low;

[0039] 4. This invention is compatible with various vacuum chamber specifications such as U26 / U55, and features a standardized flange interface design, ensuring strong compatibility. Attached Figure Description

[0040] Figure 1 This is a three-dimensional structural diagram of a vacuum chamber flatness and straightness detection device according to a specific embodiment of the present invention;

[0041] Figure 2 This is a schematic diagram of the installation of the Y-axis motion mechanism in a specific embodiment of the present invention;

[0042] Figure 3 This is a schematic diagram of the X-axis motion mechanism in a specific embodiment of the present invention;

[0043] Figure 4 This is a schematic diagram of the installation of the air flotation system in a specific embodiment of the present invention;

[0044] Figure 5 This is a schematic diagram of the pore distribution in a specific embodiment of the present invention;

[0045] Figure 6 This is a schematic diagram of the structure of the fixed support in a specific embodiment of the present invention;

[0046] Figure 7 This is a schematic diagram of the installation of the undulator bracket and vacuum chamber in a specific embodiment of the present invention;

[0047] Figure 8 This is a schematic diagram of the detection and adjustment device in a specific embodiment of the present invention;

[0048] Figure 9 This is a schematic diagram of a method for detecting the flatness and straightness of a vacuum chamber in a specific embodiment of the present invention.

[0049] In the diagram: 001-Oscillator bracket, 002-Vacuum chamber, 003-Surface bolt, 004-Side bolt; 100-Bearing platform, 110-Marble platform, 111-Photoelectric switch, 120-First adjusting support leg, 200-XY dual-axis motion platform, 210-Y-axis motion mechanism, 211-First permanent magnet stator, 212-First mover air-bearing slider, 213-Y-guide rail, 214-First grating ruler, 215-First reading head, 216-Air hole, 217-Mechanical hard limit, 218-Anti-collision pad, 219-Silent cable chain, 220-X-axis motion mechanism, 221-Base plate, 222 - X-guide rail, 223-second permanent magnet stator, 224-second mover air-bearing slider, 225-second grating ruler, 226-second reading head, 227-counterweight, 230-air-bearing system, 231-air compressor, 232-refrigerated dryer, 233-oil-water separator, 234-micro-object separator, 300-detection and adjustment device, 310-detection bracket, 311-anti-collision sensor, 320-first sensor, 330-second sensor, 340-third sensor, 400-fixed support, 410-second adjusting support leg, 420-adjusting pad, 430-adjusting mechanism, 440-L-shaped support leg. Detailed Implementation

[0050] To illustrate the technical solutions of the invention in more detail, specific embodiments are listed below to demonstrate the technical effects; it should be emphasized that these embodiments are used to illustrate the invention and not to limit the scope of the invention.

[0051] The vacuum chamber flatness and straightness detection device provided by this invention, such as... Figure 1 As shown, it includes a support platform 100, an XY dual-axis motion platform 200, a detection and adjustment device 300, and a fixed support 400, wherein:

[0052] The supporting platform 100 includes a marble platform 110 and first adjustable support legs 120 installed at the bottom of the marble platform 110. The main material of the marble platform 110 is marble, which has the characteristics of high stability. Eight first adjustable support legs 120 are provided at the bottom to adjust the height and level of the marble platform 110.

[0053] The XY dual-axis motion platform 200 includes a Y-axis motion mechanism 210, an X-axis motion mechanism 220, and an air flotation system 230. Please refer to the following for details. Figure 2The Y-axis motion mechanism 210 includes a first permanent magnet stator 211, a first mover air-bearing slider 212, and a Y-axis guide rail 213. The first permanent magnet stator 211 and the first mover air-bearing slider 212 form a permanent magnet linear motor. The Y-axis guide rail 213 is laid on the upper surface of the marble platform 110, and the first permanent magnet stator 211 is installed between the Y-axis guide rails 213 and is externally encased in stainless steel. The first mover air-bearing slider 212 is located above the Y-axis guide rail 213, providing power and buoyancy for the Y-axis motion. A first grating ruler 214 is installed on the side of the marble platform 110, and a first reading head 215 corresponding to the first grating ruler 214 is installed inside the first mover air-bearing slider 212, which can provide real-time position feedback during Y-axis motion. Based on the feedback data, the driver will perform PI control (resolution 0.1μm). Please refer to the following for details. Figure 3 The X-axis motion mechanism 220 includes a base plate 221, an X-axis guide rail 222, a second permanent magnet stator 223, and a second mover air-bearing slider 224. The base plate 221 is mounted on the first mover air-bearing slider 212 and moves synchronously with it. The X-axis guide rail is laid on the upper surface of the base plate. The second permanent magnet stator 223 is installed between the X-axis guide rails 222. The second mover air-bearing slider 224 is located above the X-axis guide rails 222, providing power and buoyancy for the X-axis motion. A second grating ruler 225 is mounted on the side of the base plate 221, and a second reading head 226 corresponding to the second grating ruler 225 is mounted on the second mover air-bearing slider 224 to provide real-time feedback of X-axis motion information. Please refer to this document for more details. Figure 4 and Figure 5 The inner surfaces of the first moving air-bearing slider 212 and the second moving air-bearing slider 224 are provided with multiple air holes 216. The air-bearing system 230 communicates with the air holes 216 and provides an air source for the air holes 216. Specifically, gas is introduced between the air-bearing slider (including the first moving air-bearing slider 212 and the second moving air-bearing slider 224) and the guide rails (including the X-guide rail 222 and the Y-guide rail 213). The gas is evenly distributed in the narrow gap, forming an air film with a certain load-bearing capacity. This air film can isolate the air-bearing slider from the guide rail, avoiding direct contact between solids, thereby greatly reducing friction. Gas has compressible properties. When the air-bearing slider is subjected to external impact or vibration, the gas in the air film can be compressed to absorb and disperse some of the energy, playing a buffering and shock-absorbing role, ensuring the stability and accuracy of the air-bearing slider's operation. Gas also has viscosity. When the gas flows between the air-bearing slider and the guide rail, the viscous force will cause the gas to form a stable flow field distribution. This stable flow field helps maintain the uniformity and stability of the air film, ensuring that the air-floating slider can move smoothly.

[0054] Please refer to this carefully. Figure 6 and Figure 7 The fixed support 400 has a second adjustable support leg 410 installed at the bottom and an adjusting pad 420 installed at the top. The undulator bracket 001 and the vacuum chamber 002 are installed on the adjusting pad 420 of the fixed support 400. There are three adjusting pads 420. The three planes of the adjusting pads 420 can be leveled by a high-precision laser tracker. The detection head collects data from the three planes and fits them into a reference plane.

[0055] Please refer to this carefully. Figure 7 and Figure 8 The detection and adjustment device 300 includes a detection bracket 310 mounted on the second mover air-bearing slider 224 and a first sensor 320, a second sensor 330, and a third sensor 340 arranged longitudinally along the detection bracket 310. Multiple high-precision laser sensors (first sensor 320, second sensor 330, and third sensor 340) are arranged. The first sensor 320 corresponds to the upper surface of the vacuum chamber 002 and is used to detect the flatness of the vacuum chamber 002. The second sensor 330 corresponds to the side of the vacuum chamber 002 and is used to detect the straightness of the vacuum chamber 002. The third sensor 340 corresponds to the reference surface and is used to determine the installation reference of the vacuum chamber 002.

[0056] This invention can achieve ultra-high precision detection, with a comprehensive measurement error of ≤±0.05mm (better than the design requirement of ±0.1mm) and repeatability at the μ level. This invention utilizes an air flotation system 230 to achieve motion of the Y-axis motion mechanism 210 and X-axis motion mechanism 220 without mechanical contact wear, resulting in a long linear motor drive life and low maintenance cost. This invention can be adapted to various specifications of vacuum chambers such as U26 / U55, with a standardized flange interface design and strong compatibility.

[0057] In some embodiments, please refer to the following: Figure 2 and Figure 3 The Y-guide rail 213 and X-guide rail 222 are respectively provided with mechanical hard limiters 217 at both ends to prevent the corresponding first mover air float slider 212 and second mover air float slider 224 from moving too far. The mechanical hard limiters 217 are provided with anti-collision pads 218 on the side of the Y-guide rail 213 or X-guide rail 222 to play a protective role.

[0058] In some embodiments, please refer to Figure 2The marble platform 110 is equipped with multiple photoelectric switches 111 on one side of the X-axis and Y-axis, respectively. The photoelectric switches 111 correspond to the zero position and limit position (including upper limit and lower limit) of the X-axis and Y-axis. When powered on, the zero position is automatically queried. The photoelectric switches 111 at the upper and lower limit positions are the operating limit positions of the XY axis. When the photoelectric switches 111 at the upper and lower limit positions fail, they are used to monitor, limit, and ensure the safety of movement.

[0059] In some embodiments, please refer to the following: Figure 2 and Figure 4 The input and output port cables of the Y-axis motion mechanism 210 are fixedly wrapped with silent drag chains 219, so that when various cables follow the X-axis motion and deformation, they have the advantages of low noise and strong wear resistance.

[0060] In some embodiments, please refer to the following: Figure 4 and Figure 5 The air flotation system 230 includes an air compressor 231, a refrigerated dryer 232, an oil-water separator 233, and a micro-particle separator 234, which are connected in sequence by pipelines. The air compressor 231 provides a 0.6 MPa air source, the refrigerated dryer 232 filters oil mist and water, the oil-water separator 233 performs secondary filtration with a precision of 5 μm, and the micro-particle separator performs tertiary filtration with a filtration precision of 0.5 μm. This three-stage filtration ensures the cleanliness of the air source, thereby guaranteeing stable suspension over the long Y-axis stroke. The first mover air flotation slider 212 has small gaps between its three inner surfaces and the guide rail. Each surface of the air flotation slider has uniformly distributed micron-sized air holes 216. A micron-sized dynamic air film is formed between the compressed air and the guide rail, achieving zero-friction suspension motion. In some embodiments, the air flotation system 230 further includes a pressure regulating valve, a pressure sensor, and a flow sensor installed on the first moving air flotation slider 212. The pressure regulating valve is used to set the pressure value of the air flotation slider, the pressure sensor is used to detect the air pressure, and the flow sensor is used to detect the flow rate. The air flotation slider can only move when the pressure sensor and the flow sensor detect that the pressure and flow rate meet the set values.

[0061] In some embodiments, please refer to the following: Figure 3 A counterweight 227 is installed on the side of the second moving air-bearing slider 224 away from the detection and adjustment device 300 to adjust the X-axis balance and ensure that the air-bearing slider does not contact the marble platform 110.

[0062] In some embodiments, please refer to the following: Figure 8 The detection bracket 310 is also equipped with a lateral anti-collision sensor 311. Since there are water pipe joints at both ends of the vacuum chamber 002, the anti-collision sensor 311 can monitor the distance to the water pipe joints to prevent the detection adjustment device 300 from colliding with the vacuum chamber 002.

[0063] In some embodiments, please refer to the following: Figure 6 and Figure 7 The fixed support 400 is also provided with an adjustment mechanism 430 corresponding to the side of the marble platform 110. The adjustment mechanism 430 can adjust the front-back and left-right positions of the fixed support 400 by tightening the screws, thereby adjusting the vacuum chamber 002 fixed on it to be parallel to the marble platform 110.

[0064] In some embodiments, please refer to Figure 6 and Figure 7 The fixed support 400 is also equipped with an L-shaped support leg 440 for fixing its position. Six second adjustable support legs 410 are installed under the fixed support 400 for fine-tuning the height and level of the fixed support 400. After fine-tuning, the bolts of the L-shaped support legs 440 are tightened to stabilize the height of the fixed support 400.

[0065] The present invention also provides a method for detecting the flatness and straightness of a vacuum chamber, which uses the vacuum chamber flatness and straightness detection device described above and includes the following steps:

[0066] Step 1: Set up a cleanroom to ensure that the installation and testing work is carried out in a clean environment.

[0067] Step 2: Install the support platform 100 and the XY dual-axis motion platform 200 inside the cleanroom.

[0068] Step 3: Detect the levelness of the marble platform 110 using a laser measuring instrument, and adjust the height of the first adjusting support leg 120 until the flatness is <0.1mm.

[0069] Step 4: Complete the overall installation of the air flotation system 230 and test the stability of the air source, ±0.6Mpa.

[0070] Step 5: Install the fixed support 400, and use the adjustment mechanism 430 to adjust the parallelism difference between the fixed support 400 and the marble platform 110 to control it within ±1mm.

[0071] Step 6: Use a laser measuring instrument to check and adjust the flatness of the fixed support 400, and adjust the height of the six second adjustable support legs 410 at the bottom until the flatness is <0.1mm.

[0072] Step 7: Install the undulator bracket 001 and vacuum chamber 002 on the fixed support 400.

[0073] Step 8: Adjust the position of the second mover air-float slider 224 and the counterweight 227 on the X-axis motion mechanism 220, adjust the first sensor 320, the second sensor 330 and the third sensor 340 to the effective detection position and ensure that the detection adjustment device 300 does not collide with the vacuum chamber 002.

[0074] Step 9: The Y-axis motion mechanism 210 is remotely driven by the PLC+servo system. The first grating ruler 214 monitors the Y-axis motion accuracy in real time. The second sensor 330 is used to perform multi-point measurements on the side of the oscillator bracket 001. If the measurement results are not qualified, the straightness of the oscillator bracket 001 is adjusted by adjusting the adjusting bolts at the bottom of the oscillator bracket 001 until its straightness is ≤0.1mm.

[0075] Step 10: Use the second sensor 330 to perform multi-point measurements on the side of the vacuum chamber 002. If the measurement is not satisfactory, adjust the straightness of the vacuum chamber 002 in the X direction using the adjusting bolts on the undulator bracket 001.

[0076] Step 11: The Y-axis motion mechanism 210 is remotely driven by a PLC and servo system. The first grating ruler 214 monitors the Y-axis motion accuracy in real time. The flatness of the three reference surfaces is detected by the third sensor 340 through two-point three-position detection, and the readings are fed back into the system.

[0077] Step 12: Based on the flatness of the reference surface meeting the requirements, remotely drive the Y-axis motion mechanism 210, and measure and adjust the flatness of the vacuum chamber 002 to ≤0.1mm through the first sensor 320.

[0078] Using the above method, a single detection takes a short time, supports remote fully automatic / manual dual-mode switching, and can achieve efficient detection.

[0079] Specifically, the installation instructions for the undulator and vacuum chamber 002 are as follows:

[0080] 1. The oscillator bracket 001 was pre-installed on site.

[0081] 2. Vacuum chamber 002 and vacuum chamber bracket (not shown) are pre-installed by the manufacturer and shipped after passing inspection.

[0082] 3. Receive vacuum chamber 002 on site and perform leak detection.

[0083] 4. Connect the vacuum chamber 002 to the undulator bracket 001 using multiple sets of bolts.

[0084] 5. After installation, perform flatness and straightness checks.

[0085] like Figure 9As shown, the flatness testing method for vacuum chamber 002 is as follows: Each bolt 003 on the upper surface of vacuum chamber 002 is used as a measuring point (two points per group) to form a plane, and the flatness is measured. The flatness measurement accuracy is ±0.1mm. The straightness testing method for vacuum chamber 002 is as follows: Each side bolt 004 on the outer side of vacuum chamber 002 is selected as a point, forming a straight line, and the straightness is measured. The straightness measurement accuracy is ±0.1mm.

[0086] In summary, the vacuum chamber flatness and straightness detection device and method provided by the present invention include a support platform 100, an XY dual-axis motion platform 200, a detection and adjustment device 300, and a fixed support 400. The support platform 100 includes a marble platform 110 and a first adjusting support leg 120 installed at the bottom of the marble platform 110. The XY dual-axis motion platform 200 includes a Y-axis motion mechanism 210, an X-axis motion mechanism 220, and an air flotation system 230. The Y-axis motion mechanism 210 includes a first permanent magnet stator 211, a first mover air flotation slider 212, and a Y-guide rail 213. The Y-guide rail 213 is laid... On the upper surface of the marble platform 110, the first permanent magnet stator 211 is installed between the Y-guide rails 213, the first movable air-bearing slider 212 is disposed above the Y-guide rails 213, a first grating ruler 214 is installed on the side of the marble platform 110, and a first reading head 215 corresponding to the first grating ruler 214 is installed inside the first movable air-bearing slider 212; the X-axis motion mechanism 220 includes a base plate 221, an X-guide rail 222, a second permanent magnet stator 223, and a second movable air-bearing slider 224, the base plate 221 is installed on the first movable air-bearing slider 212, and the X-guide rail is laid on the upper surface of the marble platform 110. On the upper surface of the base plate 221, the second permanent magnet stator 223 is installed between the X-guide rails 222, and the second mover air-bearing slider 224 is located above the X-guide rails 222. A second grating ruler 225 is installed on the side of the base plate 221, and a second reading head 226 corresponding to the second grating ruler 225 is installed on the second mover air-bearing slider 224. The inner surfaces of the first mover air-bearing slider 212 and the second mover air-bearing slider 224 are provided with a plurality of air holes 216. The air-bearing system 230 communicates with the air holes 216 and provides an air source for the air holes 216. A second adjusting support leg 410 is installed at the bottom of the fixed support 400. An adjustment pad 420 is installed on the upper part, and the undulator bracket 001 and vacuum chamber 002 are installed on the adjustment pad 420 of the fixed support 400; the three adjustment pads 420 define a reference plane; the detection and adjustment device 300 includes a detection bracket 310 installed on the second mover air-bearing slider 224 and a first sensor 320, a second sensor 330 and a third sensor 340 arranged longitudinally along the detection bracket 310. The first sensor 320 corresponds to the upper surface of the vacuum chamber 002, the second sensor 330 corresponds to the side of the vacuum chamber 002, and the third sensor 340 corresponds to the reference plane.This invention can achieve ultra-high precision detection, with a comprehensive measurement error of ≤±0.05mm (better than the design requirement of ±0.1mm) and repeatability at the μ level. This invention utilizes an air flotation system 230 to achieve motion of the Y-axis motion mechanism 210 and X-axis motion mechanism 220 without mechanical contact wear, resulting in a long linear motor drive life and low maintenance cost. This invention can be adapted to various specifications of vacuum chambers such as U26 / U55, with a standardized flange interface design and strong compatibility.

[0087] Obviously, those skilled in the art can make various modifications and variations to the invention without departing from the spirit and scope of the invention. Therefore, if these modifications and variations fall within the scope of the claims of the invention and their equivalents, the invention is also intended to include these modifications and variations.

Claims

1. A device for detecting the flatness and straightness of a vacuum chamber, characterized in that, Includes a load-bearing platform, an XY dual-axis motion platform, a detection and adjustment device, and fixed supports. The support platform includes a marble platform and a first adjustable support leg installed at the bottom of the marble platform; The XY dual-axis motion platform includes a Y-axis motion mechanism, an X-axis motion mechanism, and an air-bearing system. The Y-axis motion mechanism includes a first permanent magnet stator, a first moving air-bearing slider, and a Y-guide rail. The Y-guide rail is laid on the upper surface of the marble platform. The first permanent magnet stator is installed between the Y-guide rails. The first moving air-bearing slider is positioned above the Y-guide rails. A first grating ruler is installed on the side of the marble platform, and a first reading head corresponding to the first grating ruler is installed inside the first moving air-bearing slider. The X-axis motion mechanism includes a base plate, an X-guide rail, and a second... The system comprises a permanent magnet stator and a second mover air-bearing slider. A base plate is mounted on the first mover air-bearing slider. An X-axis guide rail is laid on the upper surface of the base plate. The second permanent magnet stator is mounted between the X-axis guide rails. The second mover air-bearing slider is positioned above the X-axis guide rails. A second grating ruler is mounted on the side of the base plate. A second reading head corresponding to the second grating ruler is mounted on the second mover air-bearing slider. Multiple air holes are provided on the inner surfaces of the first and second mover air-bearing sliders. The air-bearing system communicates with these air holes and provides an air source to them. The fixed support is equipped with a second adjustable support leg at the bottom and an adjusting pad at the top. The oscillator bracket and vacuum chamber are mounted on the fixed support. There are three adjusting pads, and the three adjusting pads define a reference plane. The detection and adjustment device includes a detection bracket mounted on the second mover air-bearing slider and a first sensor, a second sensor, and a third sensor arranged longitudinally along the detection bracket. The first sensor corresponds to the upper surface of the vacuum chamber, the second sensor corresponds to the side surface of the vacuum chamber, and the third sensor corresponds to the reference surface.

2. The vacuum chamber flatness and straightness detection device as described in claim 1, characterized in that, The Y-rail and X-rail are respectively provided with mechanical hard limiters at both ends, and anti-collision pads are provided on the side of the mechanical hard limiters near the Y-rail or X-rail.

3. The vacuum chamber flatness and straightness detection device as described in claim 1, characterized in that, The marble platform is equipped with multiple photoelectric switches, which correspond to the zero and extreme positions of the X and Y axes, respectively.

4. The vacuum chamber flatness and straightness detection device as described in claim 1, characterized in that, The input / output port cables of the Y-axis motion mechanism are secured and wrapped with a silent drag chain.

5. The vacuum chamber flatness and straightness detection device as described in claim 1, characterized in that, The air flotation system includes an air compressor, a refrigerated dryer, an oil-water separator, and a micro-particle separator, which are connected in sequence by pipelines.

6. The vacuum chamber flatness and straightness detection device as described in claim 1, characterized in that, A counterweight is installed on the side of the second moving air-bearing slider away from the detection and adjustment device.

7. The vacuum chamber flatness and straightness detection device as described in claim 1, characterized in that, The detection bracket is also equipped with a lateral anti-collision sensor.

8. The vacuum chamber flatness and straightness detection device as described in claim 1, characterized in that, The fixed support is also equipped with an adjustment mechanism corresponding to the side of the marble platform.

9. The vacuum chamber flatness and straightness detection device as described in claim 1, characterized in that, The bottom of the fixed support is also equipped with an L-shaped support leg for fixing the position.

10. A method for detecting the flatness and straightness of a vacuum chamber, employing the vacuum chamber flatness and straightness detection device as described in any one of claims 1-9, characterized in that, Includes the following steps: Step 1: Set up a cleanroom; Step 2: Install the support platform and the XY dual-axis motion platform inside the cleanroom; Step 3: Check the levelness of the marble platform and adjust the height of the first adjustable support leg until the flatness is <0.1mm; Step 4: Complete the overall installation of the air flotation system and test the stability of the air source; Step 5: Install the fixed support and adjust the parallelism between the fixed support and the marble platform; Step 6: Check and adjust the flatness of the fixed support, and adjust the height of the second adjusting support leg until the flatness is <0.1mm; Step 7: Install the undulator bracket and vacuum chamber onto the fixed support; Step 8: Adjust the X-axis motion mechanism to position the first, second, and third sensors in the effective detection position; Step 9: Drive the Y-axis motion mechanism, use the second sensor to perform multi-point measurements on the side of the undulator bracket, and adjust the straightness of the undulator bracket; Step 10: Use the second sensor to perform multi-point measurements on the side of the vacuum chamber and adjust the straightness of the vacuum chamber; Step 11: Drive the Y-axis motion mechanism and use the third sensor to detect the flatness of the reference surface; Step 12: Based on the flatness of the reference surface meeting the requirements, the flatness of the vacuum chamber is measured and adjusted using the first sensor.

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