Mask assembly, mask mechanism and mask device

Abstract

The invention relates to a mask assembly, a mask mechanism and a mask device, and belongs to the field of exposure machines, the mask assembly comprises a mask frame and a mask plate, the mask frame is provided with a first through hole, the mask plate is attached to the first side face, provided with the first through hole, of the mask frame, and one end of the first through hole is blocked and sealed; a plurality of first air suction holes are formed in the first side face and distributed around the first through hole in the circumferential direction. A guide frame is attached to the first side face, the first air suction hole is located between the mask plate and the guide frame, and the thickness of the guide frame is not smaller than that of the mask plate. According to the mask assembly, the air suction holes are formed in the mask frame, after the two mask assemblies clamp the to-be-exposed material and are tightly attached, air between the two mask assemblies is extracted through the air suction holes, the to-be-exposed material and the mask plate are tightly attached together in a vacuum adsorption mode, and therefore the exposure quality is improved, the projection error is reduced, and the exposure efficiency is improved. And meanwhile, deformation of the mask cannot be caused.

Description

Technical Field

[0001] The present application relates to the field of exposure machines, and in particular to a mask assembly, a mask mechanism and a mask device. Background Art

[0002] Currently, exposure is a core technology for assisting patterning in electronic device manufacturing. While specific applications vary, certain strip materials, such as metal masks (FMMs), metal mesh (a nearly invisible conductive mesh woven from ultra-fine metal wires on a transparent film, as found in televisions and mobile phones), and flexible metal chip mounting frames, all require double-sided exposure-assisted patterning to achieve precise micron-level structural control.

[0003] The current double-sided exposure process is to pass the strip material to be exposed (such as a metal grid, a chip mounting frame, or a metal mask) between a pair of spaced-apart masks. Flat light passes through the mask and is directed toward the material to complete the exposure of the material. The exposed material is then etched or electroplated to obtain a finished product. The current problem with this exposure process is that the exposure quality is not high, and there is an error between the light projection position on the material and the theoretical design position, which affects the subsequent etching accuracy. Even if a pair of spaced-apart masks are squeezed to make them close to the material, the error is still relatively large. At the same time, the squeezing force on the mask cannot be too large. Otherwise, if the squeezing force on the mask is too large, the mask itself will be deformed, exacerbating the deterioration of the exposure quality. Summary of the Invention

[0004] In order to solve the problem of low mask exposure quality in the current double-sided exposure process mentioned in the background technology, the present application provides a mask assembly, a mask mechanism and a mask device.

[0005] The present application provides a mask assembly, comprising a mask frame and a mask plate, wherein the mask frame is configured with a through hole 1, and the mask plate is attached to a side surface 1 of the mask frame configured with the through hole 1, and blocks and seals one end of the through hole 1, and the side surface 1 is configured with a plurality of suction holes 1, and the plurality of suction holes 1 are distributed circumferentially around the through hole; The side surface is provided with a guide frame, the air intake hole is located between the mask and the guide frame, and the thickness of the guide frame is not less than the thickness of the mask; An air extraction hole connected with the air suction hole is constructed inside the mask frame, and one end of the air extraction hole extends to the outer wall of the mask frame.

[0006] By adopting the above technical solution, when the two mask assemblies clamp the material to be exposed, the air between the two mask assemblies is extracted with the help of the suction holes, so that the material to be exposed and the mask are vacuum-adsorbed and tightly attached together, thereby improving the exposure quality and reducing the projection error, without causing deformation of the mask itself.

[0007] Preferably, the side surface is constructed with a meandering groove 1, the meandering groove 1 is constructed with an air suction hole 2 connected with the air extraction hole, the through hole 1 is located inside the meandering groove 1, and the mask covers the meandering groove 1.

[0008] By adopting the above technical solution, the mask frame can be adsorbed and installed on the mask, which reduces the difficulty of installing the mask and facilitates the disassembly and assembly of the mask.

[0009] Preferably, the side surface one is constructed with a serpentine groove two connected to the exhaust hole, the guide frame covers the serpentine groove two, a sealing ring one is tightly clamped between the guide frame and the side surface one, the serpentine groove two is located on the inner side of the sealing ring one, and a gap is constructed between the guide frame located on the inner side of the serpentine groove two and the side surface one, and the gap is constructed to allow the gas inside the guide frame to pass through and enter the serpentine groove two.

[0010] By adopting the above technical solution, the vacuum pressure around the mask can be equalized, and the vacuum adsorption quality of the material and the mask can be improved.

[0011] Preferably, a second sealing ring is provided on the side of the guide frame facing away from the mask frame.

[0012] By adopting the above technical solution, the clamping and sealing performance of the two mask assemblies on the material to be exposed is improved, and the air between the two mask assemblies is extracted better and faster.

[0013] Preferably, a roller 1 and a roller 2 are respectively provided at the upper and lower ends of the mask frame; The side surface 1 is provided with a plurality of limit blocks around the circumference of the mask, and the limit blocks abut against the edge of the mask; The side surface 1 is provided with a guide wheel, and the guide wheel is suitable for being connected with the bottom surface of the mask in a rolling manner.

[0014] By adopting the above technical solution, the mask assembly and the mask plate can be easily disassembled and assembled.

[0015] In addition, the present application also proposes a mask mechanism, comprising a mounting frame 1, a mounting frame 1, and the aforementioned mask assembly, wherein the mounting frame 1 and the mounting frame 1 are connected via a connector, and the connector is configured to drive the mounting frame 1 to slide up and down and left and right relative to the mounting frame 1; The first mounting frame is configured with a second through hole, and the first mounting frame is provided with a clamp, which is configured to clamp and fix the mask assembly on the side of the first mounting frame configured with the second through hole, and to make the first through hole and the second through hole face each other.

[0016] By adopting the above technical solution, the position of the mask assembly can be adjusted to align the material to be exposed.

[0017] In addition, the present application also proposes a mask mechanism, comprising a mounting frame 1, a mounting frame 1, and the aforementioned mask assembly, wherein the mask assembly comprises a first roller and a second roller, the first mounting frame 1 being connected to the first mounting frame 1 via a connector, the connector being configured to drive the first mounting frame 1 to slide up and down and left and right relative to the first mounting frame 1; The first mounting frame is configured with a second through hole, and the first mounting frame is provided with a clamp, wherein the clamp is configured to clamp and fix the mask assembly on a side of the first mounting frame configured with the second through hole, with the first through hole facing the second through hole; The installation frame 1 is provided with a slide rail 1 and a slide rail 2, the roller 1 is connected to the slide rail 1 in a rolling manner, and the roller 2 is connected to the slide rail 2 in a rolling manner, and the rolling directions of the roller 1 and the roller 2 are parallel to the side of the installation frame 1 having the through hole 2.

[0018] By adopting the above technical solution, the mask assembly can be easily disassembled and assembled.

[0019] Preferably, a plurality of limiting wheels are arranged on the first mounting frame in a circumferential direction around the second through hole, and the clamps include a first clamp, a second clamp, and a third clamp. The first clamp and the second clamp are arranged in a circumferential direction around the second through hole, and the first clamp and the second clamp are adapted to press the mask assembly to contact the limiting wheels, and the pressing direction is perpendicular to the side surface of the first mounting frame having the second through hole; The clamp three is located on one side of the mounting frame one, and a stop block is provided on the other side of the mounting frame one. The clamp three is suitable for pressing the mask assembly to contact the stop block, and the pressing direction is parallel to the side of the mounting frame one having the through hole two.

[0020] By adopting the above technical solution, the mask assembly and the mounting frame are not easily worn while ensuring that the mask assembly is clamped and fixed.

[0021] Preferably, the mounting frame 1 is provided with a positioning detector for detecting the position of the mask assembly relative to the mounting frame 1.

[0022] By adopting the above technical solution, the mask assembly installed on the installation frame can be positioned, so that the mask assembly can be adjusted and installed in place accurately and quickly.

[0023] Preferably, the connector is further configured to drive the mounting frame to slide forward and backward relative to the mounting rack.

[0024] By adopting the above technical solution, the mask assembly can be moved back and forth relative to the mounting frame, and cooperate with another mask assembly to clamp and seal the strip material to be exposed.

[0025] Preferably, the connector includes connector 1, connector 2, connector 3, and connector 4, and the connector 1, connector 2, and connector 3 are distributed around the mounting frame 1, and there is at least one connector. The connector 1 includes a lifting assembly 1 fixedly connected to the mounting frame 1 and a slider 1 laterally slidably connected to the lifting assembly 1; The second connector includes a transverse moving component 1 fixedly connected to the mounting frame 1 and a slider 2 connected to the transverse moving component 1 in a lifting and sliding manner; The connector three includes a slider three connected to the mounting frame one for transverse sliding, and a slider four connected to the slider three for lifting and sliding. The movement direction of the lifting component one is parallel to the sliding directions of the sliders two and four, and the movement direction of the transverse movement component one is parallel to the sliding directions of the sliders one and three. The sliders 1, 2 and 4 are all fixedly connected to the connector 4, and the connector 4 includes a slider 5 and a lifting assembly 2. The fixed end of the lifting assembly 2 is fixedly connected to the slider 1, the slider 2 or the slider 4. The mounting frame 1 is connected to the fixed end of the lifting assembly 2 for forward and backward sliding. The slider 5 is connected to the movable end of the lifting assembly 2, and the slider 5 is constructed to be connected to the mounting frame 1 for oblique sliding, so that when the lifting assembly 2 drives the slider 5 to rise and fall, the mounting frame 1 is driven to slide forward and backward.

[0026] By adopting the above technical solution, the installation frame 1 can be smoothly moved forward and backward, up and down, left and right to adjust the position of the mask assembly, and the movement accuracy of the installation frame 1 is high.

[0027] In addition, the present application also proposes a mask device for double-sided exposure of strip materials, including the two aforementioned mask mechanisms, wherein at least one mask mechanism has a mounting frame with a forward and backward sliding function, and the mask components of the two mask mechanisms are symmetrically arranged at intervals and suitable for close fitting to clamp and seal one section of the strip material.

[0028] By adopting the above technical solution, after the two mask assemblies clamp and seal one section of the strip material, the air between the two mask assemblies is extracted with the help of the suction holes, so that one section of the strip material and the mask are vacuum-adsorbed and tightly attached together, thereby improving the exposure quality of the strip material and reducing projection errors, without causing deformation of the mask itself.

[0029] Preferably, the mask device also includes a fixed base and a movable base suitable for sliding connection with the fixed base, and a pair of machine bases suitable for sliding connection with the movable base, the sliding direction of the movable base is parallel to the side of the mounting frame 1 having the through hole 2, the sliding direction of the machine base is perpendicular to the side of the mounting frame 1 having the through hole 2, the pair of machine bases are arranged at intervals, the mask mechanism of any one of claims 6 to 9 is installed on one of the machine bases, and the mask mechanism of claim 10 or 11 is installed on the other machine base.

[0030] By adopting the above technical solution, the two mask mechanisms can be moved horizontally toward or away from each other, and the two mask mechanisms can be slid horizontally in a direction parallel to the side surface of the first mounting frame having the second through hole.

[0031] Preferably, the fixed base is provided with a guide roller 1 located below between a pair of mask assemblies, the movable base is constructed with a discharge port 1, the external covers of the two mask mechanisms are provided with a machine cover, the top of the machine cover is constructed with a feed port, and the feed port is located above between a pair of mask assemblies. The strip material passes through the pair of mask assemblies downward from the feed port and then bypasses the guide roller 1 and extends out of the discharge port 1.

[0032] By adopting the above technical solution, the strip material can smoothly pass through the mask device to form a strip material assembly line exposure operation with high exposure efficiency.

[0033] In summary, this application includes at least one of the following beneficial technical effects: 1. The mask assembly of the present application is provided with suction holes on the mask frame. When the two mask assemblies clamp the material to be exposed and fit tightly together, the air between the two mask assemblies is extracted with the help of the suction holes, so that the material to be exposed and the mask are vacuum-adsorbed and tightly attached together, thereby improving the exposure quality and reducing the projection error, and at the same time will not cause deformation of the mask itself.

[0034] 2. The mask assembly of the present application installs the mask by adsorption on the mask frame, which reduces the difficulty of mask installation and facilitates the disassembly and assembly of the mask. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 It is a structural schematic diagram of the mask assembly in Example 1 of the present application.

[0036] Figure 2 yes Figure 1 Schematic diagram after removing the mask and guide frame.

[0037] Figure 3 yes Figure 2 A partial enlarged view of .

[0038] Figure 4 This is a schematic diagram of the structure of the guide frame in Example 1 Figure 1 .

[0039] Figure 5 This is a schematic diagram of the structure of the guide frame in Example 1 Figure 2 .

[0040] Figure 6 This is a schematic diagram of the structure of the mask mechanism in the second embodiment of the present application. Figure 1 .

[0041] Figure 7 This is a schematic diagram of the structure of the mask mechanism in the second embodiment of the present application. Figure 2 .

[0042] Figure 8This is a schematic diagram of the installation of the mounting frame 1 and the mask assembly in the second embodiment of the present application. Figure 1 .

[0043] Figure 9 This is a schematic diagram of the installation of the mounting frame 1 and the mask assembly in the second embodiment of the present application. Figure 2 .

[0044] Figure 10 This is a schematic diagram of the installation of the mounting frame 1 and the mask assembly in the second embodiment of the present application. Figure 3 .

[0045] Figure 11 This is a schematic diagram of the structure of the mounting frame 1 in the second embodiment of the present application. Figure 1 .

[0046] Figure 12 This is a schematic diagram of the structure of the mounting frame 1 in the second embodiment of the present application. Figure 2 .

[0047] Figure 13 This is a schematic diagram of the structure of the mask mechanism in the third embodiment of the present application. Figure 1 .

[0048] Figure 14 This is a schematic diagram of the structure of the mask mechanism in the third embodiment of the present application. Figure 2 .

[0049] Figure 15 This is a structural diagram of connector four in embodiment three of the present application.

[0050] Figure 16 yes Figure 15 Enlarged view of part H in .

[0051] Figure 17 This is a schematic diagram of the structure of the mask device in the fourth embodiment of the present application. Figure 1 .

[0052] Figure 18 This is a schematic diagram of the structure of the mask device in the fourth embodiment of the present application. Figure 2 .

[0053] Figure 19 This is a schematic diagram of the structure of the mask device in the fourth embodiment of the present application after removing the cover. Figure 1 .

[0054] Figure 20 This is a schematic diagram of the structure of the mask device in the fourth embodiment of the present application after removing the cover. Figure 2 .

[0055] Figure 21 yes Figure 19 Schematic diagram after removing the two mask mechanisms Figure 1 .

[0056] Figure 22 yes Figure 19 Schematic diagram after removing the two mask mechanisms Figure 2 .

[0057] Explanation of Reference Numerals: A, mask assembly; 1, mask frame; 2, guide frame; 3, pipe joint; 4, pressure block; 5, exhaust hole; 6, first air suction hole; 7, limit block; 8, guide wheel; 9, mask; 10, handle; 11, second roller; 12, first roller; 13, first return groove; 14, second return groove; 15, first sealing ring; 16, second air suction hole; 17, third return groove; 18, second sealing ring; 19, first through hole; B, mask mechanism; 20, mounting frame 1; 21, connector 1; 211, lifting assembly 1; 212, slider 1; 22, connector 2; 221, traverse assembly 1; 222, slider 2; 23, connector 3; 231, slider 3; 232, slider 4; 24, positioning detector; 241, three-axis translation assembly; 242, visual camera; 25, mounting frame 1; 251, through hole 2; 26, slide rail 1; 27, slide rail 2; 28, limit wheel; 29, connector Connecting block; 30, clamp 1; 301, push-pull device 1; 302, mounting base 1; 303, pressure rod 1; 31, clamp 2; 310, mounting base 2; 311, push-pull device 2; 312, push-pull device 3; 313, pressure rod 2; 314, mounting base 3; 32, clamp 3; 33, stopper; 34, mounting frame 2; 35, connector 4; 351, mounting base 4; 352, slider 5; 353, lifting assembly 2; 354, slider 6; 355, slide rail 3; C. Mask device; 39. Machine base; 40. Fixed base; 41. Transverse movement component 2; 42. Movable base; 43. Transverse movement component 3; 44. Guide roller 1; 45. Roller frame 1; 46. Discharge port 1; 47. Carrying frame; 48. Guide rail; 49. Machine cover; 50. Feed port. DETAILED DESCRIPTION

[0058] The following is combined with Figure 1-22 This application is described in further detail.

[0059] Example 1: The embodiment of the present application discloses a mask assembly A. Figure 1-Figure 3 As shown, the mask assembly A includes a mask frame 1 and a mask plate 9, the mask frame 1 is constructed with a through hole 19, the mask plate 9 is attached to the side surface of the mask frame 1 constructed with the through hole 19, and one end of the through hole 19 is blocked and sealed, the side surface is constructed with multiple suction holes 6, and the multiple suction holes 6 are distributed circumferentially around the through hole 19. This design can quickly remove the air around the mask plate 9, quickly realize the vacuum adsorption of the material and the mask plate 9, and equalize the vacuum pressure around the mask plate 9, thereby improving the vacuum adsorption quality of the material and the mask plate 9.

[0060] In this embodiment, if Figure 1-Figure 3 As shown, the side surface is provided with a guide frame 2, the air suction hole 6 is located between the mask plate 9 and the guide frame 2, and the thickness of the guide frame 2 is not less than the thickness of the mask plate 9. This design can avoid the pair of mask assemblies A from being unable to fit tightly and unable to clamp and seal the material. The pair of mask assemblies A are tightly fitted together by the two guide frames 2 of the pair of mask assemblies A being tightly fitted together.

[0061] In this embodiment, if Figure 1-Figure 3 As shown, the mask frame 1 is internally constructed with an exhaust hole 5 connected to an air suction hole 6. One end of the exhaust hole 5 extends to the outer wall of the mask frame 1. By connecting one end of the exhaust hole 5 to an exhaust device, the air between the pair of mask assemblies A can be extracted after the pair of mask assemblies A are tightly attached, creating a vacuum between the pair of mask assemblies A. This allows the material between the pair of mask assemblies A to be tightly attached to the reticle 9, and the material to be exposed and the reticle 9 are tightly attached together by vacuum suction, thereby improving exposure quality and reducing projection errors, while also preventing deformation of the reticle itself. To facilitate the connection of the exhaust hole 5 to the exhaust device, a pipe joint 3 can be installed at one end of the exhaust hole 5.

[0062] In this embodiment, further, Figure 2 As shown, the side surface is constructed with a meandering groove 13, and the meandering groove 13 is constructed with an air suction hole 2 16 connected to the air extraction hole 5, and the through hole 19 is located on the inner side of the meandering groove 13. The mask 9 covers the meandering groove 13. With this design, the air extraction hole 5 extracts the air in the meandering groove 13 through the air suction hole 2 16, so that the mask frame 1 can adsorb and install the mask 9, reducing the difficulty of installing the mask 9 and facilitating the disassembly and assembly of the mask 9. The mask 9 blocks and seals one end of the through hole 19 by vacuum adsorption.

[0063] In this embodiment, further, Figure 2 As shown, the side surface 1 is constructed with a circular groove 2 14 connected to the exhaust hole 5, and the guide frame 2 covers the circular groove 2 14. A sealing ring 15 is tightly sandwiched between the guide frame 2 and the side surface 1. The position of the sealing ring 15 on the guide frame 2 is shown in FIG. Figure 4As shown, the serpentine groove 2 14 is located on the inner side of the sealing ring 15, and a gap is constructed between the guide frame 2 and the side surface 1 located on the inner side of the serpentine groove 2 14. The gap is constructed to allow the gas inside the guide frame 2 to pass through and enter the serpentine groove 2 14. The setting of the sealing ring 15 makes the guide frame 2 and the mask frame 1 reliably sealed and connected. When the exhaust hole 5 is evacuated, the air between a pair of mask assemblies A enters the serpentine groove 2 14 through the gap between the guide frame 2 and the side surface 1 on the inner side of the serpentine groove 2 14, and then enters the exhaust hole 5. The setting of the sealing ring 15 effectively prevents air leakage. Setting a gap and then using the serpentine groove 2 14 to assist the suction hole 1 6 in exhausting air can not only speed up the exhaust speed, but also further equalize the vacuum pressure around the mask 9, thereby improving the vacuum adsorption quality of the material and the mask 9.

[0064] In this embodiment, further, Figure 5 As shown, the side of the guide frame 2 facing away from the mask frame 1 is provided with a second sealing ring 18. After the pair of mask assemblies A are tightly fitted, the pair of guide frames 2 squeeze the second sealing ring 18. The second sealing ring 18 improves the tight fit of the pair of mask assemblies A. To facilitate the installation of the second sealing ring 18 on the guide frame 2, as shown in FIG. Figure 5 As shown, a third meandering groove 17 can be provided on the side of the guide frame 2 facing away from the mask frame 1 , and a portion of the second sealing ring 18 is placed in the third meandering groove 17 .

[0065] In this embodiment, further, Figure 1-Figure 2 As shown, a pressing block 4 is provided on the side wall of the mask frame 1 , and the pressing block 4 is used to cooperate with the clamp 3 32 of the mask mechanism B to clamp and fix the mask assembly A.

[0066] In this embodiment, further, Figure 1-Figure 3 As shown, roller one 12 and roller two 11 are respectively provided at the upper and lower ends of the mask frame 1. The setting of roller one 12 and roller two 11 can be adapted to slide rail one 26 and slide rail two 27 of the mask mechanism B, so as to realize the horizontal sliding of the mask assembly A on the mounting frame one 25, thereby facilitating the disassembly and assembly of the mask assembly A.

[0067] In this embodiment, further, Figure 1-Figure 3 As shown, the side surface is provided with a plurality of limit blocks 7 around the circumference of the mask 9, and the limit blocks 7 are in contact with the edge of the mask 9, and are used to limit the mask 9 when the mask 9 is installed, so that it can be quickly and accurately installed at the specified position on the mask frame 1; the side surface is provided with a guide wheel 8, and the guide wheel 8 is suitable for being connected with the bottom surface of the mask 9 in a rolling manner. Since the mask 9 is heavy, the setting of the guide wheel 8 facilitates the movement of the mask 9 to the installation position on the mask frame 1, reduces the wear of the mask 9 during the disassembly and assembly process, and facilitates the disassembly and assembly of the mask 9.

[0068] In this embodiment, further, Figure 1-Figure 2As shown, a handle 10 is provided on the side of the mask frame 1 so that a person can manually pull the mask assembly A to slide horizontally on the mounting frame 1 25 .

[0069] Example 2: This embodiment discloses a mask mechanism B, such as Figure 6 and Figure 7 As shown, it includes a mounting frame 20, a mounting frame 25 and a mask assembly A of embodiment 1, wherein the mounting frame 20 and the mounting frame 25 are connected via a connector, and the connector is configured to drive the mounting frame 25 to slide up and down and left and right relative to the mounting frame 20.

[0070] Specifically, the connector includes a connector 1 21, a connector 22, and a connector 3 23. The connector 1 21, the connector 22, and the connector 3 23 are distributed around the mounting frame 1 20, and there is at least one of them, for example Figure 11 and Figure 12 There are two connectors 21 shown, which are respectively arranged on the left and right sides of the upper end of the mounting frame 20, and connectors 22 and 3 23 are respectively arranged on the left and right sides of the lower end of the mounting frame 20. Figure 12 As shown, the connector 21 includes a lifting component 211 fixedly connected to the mounting frame 20 and a slider 212 connected to the lifting component 211 in a transverse sliding manner; Figure 11 As shown, connector 22 includes a transverse assembly 1 221 fixedly connected to mounting frame 1 20 and a slider 2 222 connected to transverse assembly 1 221 for lifting and sliding. Connector 3 23 includes a slider 3 231 connected to mounting frame 1 20 for transverse sliding and a slider 4 232 connected to slider 3 231 for lifting and sliding. The movement direction of lifting assembly 1 211 is parallel to the sliding directions of sliders 222 and 4 232, while the movement direction of transverse assembly 1 221 is parallel to the sliding directions of sliders 1 212 and 3 231. Sliders 1 212, 222, and 4 232 are all fixedly connected to mounting frame 1 25. Movement of lifting assembly 1 211 drives the mounting frame 1 25 up and down, while movement of transverse assembly 1 221 drives the mounting frame 1 25 left and right. This structural design of the connector enables mounting frame 1 25 to smoothly move up and down, left and right, to adjust the position of mask assembly A on mounting frame 1 20, and achieves high movement precision for mounting frame 1 25. Of course, in other embodiments, the connector may also use a conventional moving mechanism such as a two-axis translation mechanism to achieve the up-down and left-right movement of the mounting frame 1 25 relative to the mounting frame 1 20 .

[0071] To facilitate the connection of slider 1 212, slider 2 222, and slider 4 232 with mounting frame 1 25, as shown in FIG. Figure 9 and Figure 10As shown, the slider 1 212, the slider 222, and the slider 4 232 are connected to the installation frame 1 25 through the connecting block 29. The slider 1 212, the slider 222, and the slider 4 232 are fixedly connected to the connecting block 29, and the connecting block 29 is rotationally connected to the installation frame 1 25.

[0072] In this embodiment, if Figures 8-10 As shown, the mounting frame 1 25 is constructed with a through hole 251, and the mounting frame 1 25 is provided with a clamp, and the clamp is constructed to be suitable for clamping the mask assembly A on the side of the mounting frame 1 25 constructed with the through hole 251, and to make the through hole 1 19 and the through hole 2 251 opposite to each other. With this design, the parallel light passes through the through hole 251 and the through hole 1 19 in turn and then is emitted to the mask plate 9.

[0073] In this embodiment, further, Figure 6 and Figure 8 As shown, the mounting frame 1 25 is provided with a slide rail 1 26 and a slide rail 2 27, the roller 12 is connected to the slide rail 1 26 in a rolling manner, and the roller 2 11 is connected to the slide rail 2 27 in a rolling manner, and the rolling directions of the roller 12 and the roller 2 11 are parallel to the side of the mounting frame 1 25 having the through hole 251. With this design, a person can pull the mask assembly A to slide horizontally on the mounting frame 1 25 by relying on the handle 10. During the sliding process, the roller 12 rolls along the slide rail 1 26, and the roller 2 11 rolls along the slide rail 2 27, thereby removing the mask assembly A from the mounting frame 1 25 or installing the mask assembly A to the installation position on the mounting frame 1 25. The presence of the roller 12 and the roller 2 11 facilitates the movement of the mask assembly A on the mounting frame 1 25, reduces the friction loss between the mounting frame 1 25 and the mask assembly A, and facilitates the disassembly and assembly of the mask assembly A.

[0074] Preferably, Figure 9 and Figure 10 As shown, the mounting frame 1 25 is provided with a plurality of limiting wheels 28 around the through hole 251. Figure 6 and Figure 8As shown, the clamp includes a clamp 30, a clamp 2 31 and a clamp 32. There are multiple clamps 30 and clamps 31, and they are arranged circumferentially around the through hole 251 to ensure that the mask assembly A is reliably clamped and fixed. The clamps 30 and clamps 31 are suitable for pressing the mask assembly A to contact the limiting wheel 28, and the pressing direction is perpendicular to the side of the mounting frame 25 having the through hole 251; the clamp 32 is located on one side of the mounting frame 25. A stop block 33 is fixedly provided on the other side of the frame 1 25, and the clamp 32 is suitable for pressing the mask assembly A to contact the stop block 33. The pressing direction is parallel to the side of the mounting frame 1 25 having the through hole 251, so as to clamp the mask assembly A on the mounting frame 1 25. The setting of the limiting wheel 28 is not easy to cause wear of the mask assembly A and the mounting frame 1 25 under the premise of ensuring that the mask assembly A is clamped and fixed, so as to facilitate the movement of the mask assembly A on the mounting frame 1 25.

[0075] Specifically, such as Figure 8 As shown, the clamp 30 includes a push-pull device 301, a mounting seat 302, and a pressure rod 303. The fixed end of the push-pull device 301, the mounting seat 302 and the mounting frame 25 are fixedly connected. The movable end of the push-pull device 301 is hinged to one end of the pressure rod 303. The pressure rod 303 is hinged to the mounting seat 302. The movement of the push-pull device 301 drives the other end of the pressure rod 303 to approach or move away from the mask frame 1, and when the mask assembly A needs to be fixed, it contacts the side of the mask frame 1, and then presses the mask frame 1 to contact the limiting wheel 28, and relies on the limiting wheel 28 and the other end of the pressure rod 303 to clamp and fix the mask frame 1.

[0076] Preferably, Figure 6 As shown, the clamp 2 31 is located on the side of the mask frame 1 where the handle 10 is provided. With this design, after the clamp 2 31 is opened, the mask frame 1 can move along the slide rail 1 26 and the slide rail 2 27 under the pull of the handle 10. At this time, the clamp 1 30 and the clamp 2 31 will not hinder the movement of the mask frame 1.

[0077] Specifically, the clamp 2 31 includes a mounting seat 2 310, a push-pull device 2 311, a push-pull device 3 312, a pressure rod 2 313, and a mounting seat 314. The mounting seat 2 310 is fixedly connected to the mounting frame 1 25, and the mounting seat 3 314 is hinged to the mounting frame 1 25. The fixed end and the movable end of the push-pull device 2 311 are respectively hinged to the mounting seat 2 310 and the mounting seat 3 314, so that the push-pull device 2 311 drives the mounting seat 3 314 to swing. The push-pull device 3 31 The fixed end and movable end of the clamp 2 are respectively hinged to the mounting seat 314 and one end of the pressure rod 213. One end of the pressure rod 213 is also hinged to the mounting seat 314. The push-pull device 312 is used to drive the other end of the pressure rod 213 to move closer to or away from the mask frame 1. When the mask assembly A needs to be fixed, it contacts the side of the mask frame 1, and then presses the mask frame 1 to contact the limiting wheel 28. The limiting wheel 28 and the other end of the pressure rod 213 clamp the mask frame 1. When the clamp 21 is opened, the push-pull device 211 drives the mounting seat 314 to move closer to or away from the mask frame 1. Figure 6 The position shown is rotated 90 degrees, so that the second pressing rod 313 moves away from the moving path of the mask frame 1, thereby preventing the second pressing rod 313 from hindering the mask frame 1 from moving along the first slide rail 26 and the second slide rail 27 when pulled by the handle 10.

[0078] In this embodiment, further, Figure 7 、 Figure 11 、 Figure 12 As shown, the mounting frame 20 is provided with a positioning detector 24 for detecting the position of the mask assembly A relative to the mounting frame 20, so as to timely control the connector action to adjust the position of the mask assembly A according to the detection result, thereby realizing the positioning of the mask assembly A installed on the mounting frame 25, and facilitating the accurate and rapid adjustment and installation of the mask assembly A into place.

[0079] Preferably, Figure 12 As shown, the positioning detector 24 includes a three-axis translation assembly 241 and a visual camera 242. The three-axis translation assembly 241 is connected to the mounting frame 20, and the visual camera 242 is connected to the three-axis translation assembly 241. The three-axis translation assembly 241 drives the visual camera 242 to move forward, backward, left, right, and up and down to detect the position of the mask assembly A relative to the mounting frame 20. Of course, in other embodiments, the positioning detector 24 may also use conventional positioning methods such as laser positioning.

[0080] Example 3: The difference between this embodiment and the second embodiment is that the connector is also constructed to be suitable for driving the mounting frame 25 to slide back and forth relative to the mounting frame 20, so as to realize the forward and backward movement of the mask assembly A relative to the mounting frame 20, and cooperate with another mask assembly A to clamp and seal the strip material to be exposed.

[0081] Specifically, the connector further includes a connector 4 35, and the slider 1 212, the slider 2 222, and the slider 4 232 are all fixedly connected to the connector 4 35. Further, in order to facilitate the connection between the slider 1 212, the slider 2 222, the slider 4 232 and the connector 4 35, as shown in FIG. Figure 13-15 As shown, slider one 212, slider two 222, and slider four 232 are all fixedly connected to mounting frame two 34, and connector four 35 is installed and fixed on mounting frame two 34. There are multiple connector fours 35, and they are all connected to mounting frame one 25. Mounting frame one 25 is driven to move forward and backward through connector four 35.

[0082] Specifically, such as Figure 15 and Figure 16 As shown, the connector 4 35 includes at least a slider 5 352 and a lifting assembly 2 353. The fixed end of the lifting assembly 2 353 is fixedly connected to the slider 1 212, the slider 2 222, the slider 4 232, or the mounting frame 2 34. The mounting frame 1 25 is connected to the fixed end of the lifting assembly 2 353 for forward and backward sliding. The slider 5 352 is connected to the movable end of the lifting assembly 2 353. The slider 5 352 is configured to be connected to the mounting frame 1 25 for tilting and sliding. When the lifting assembly 2 353 drives the slider 5 352 to move upward and downward, the mounting frame 1 25 is driven to slide forward and backward. This structure of the connector 4 35 enables the mounting frame 1 25 to smoothly move forward and backward to adjust the position of the mask assembly A, and the movement of the mounting frame 1 25 is highly precise. Of course, in other embodiments, the connector 4 35 may also utilize conventional linear actuators such as linear motors, pneumatic cylinders, and hydraulic cylinders.

[0083] Furthermore, in order to facilitate the assembly and connection of the slider five 352 and the lifting assembly two 353 with the slider one 212, the slider two 222, the slider four 232, the mounting frame two 34, and the mounting frame one 25, and to improve the sliding stability of the mounting frame one 25, the connector four 35 further includes a mounting seat four 351, a slider six 354, and a slide rail three 355, as shown in FIG. Figure 15 and Figure 16 As shown, the mounting seat four 351 is fixedly connected to the slider one 212 or the slider two 222 or the slider four 232 or the mounting frame two 34, the fixed end of the lifting component two 353 is fixedly installed on the mounting seat four 351, the slider five 352 is installed on the mounting seat four 351 for sliding up and down, the slide rail three 355 is horizontally fixedly installed on the mounting seat four 351, the slider six 354 is connected to the slide rail three 355 for sliding back and forth, and at the same time, the slider six 354 is also fixedly connected to the mounting frame one 25, the slider five 352 and the slider six 354 are connected for tilting and sliding, the lifting component two 353 pushes the slider five 352 to move up and down, driving the slider six 354 to slide back and forth along the slide rail three 355, and then driving the mounting frame one 25 to slide back and forth.

[0084] Example 4: This embodiment discloses a mask device C for double-sided exposure of a strip of material. The mask device C includes at least two mask mechanisms B, at least one of which is the mask mechanism B of the third embodiment. Therefore, the two mask mechanisms B of this embodiment can both be the mask mechanism B of the third embodiment, or one can be the mask mechanism B of the third embodiment and the other can be the mask mechanism B of the second embodiment. Furthermore, at least one of the two mask assemblies A of the two mask mechanisms B has a second sealing ring 18 to ensure that a section of the strip of material is securely clamped and sealed.

[0085] In this embodiment, if Figure 19 and Figure 20 As shown, the mask components A of the two mask mechanisms B are symmetrically arranged and suitable for close fitting to clamp and seal one section of the strip material. After the two mask components A are closely fitted, the air between the two mask components A is extracted through the exhaust hole 5 to achieve a vacuum close fit between one section of the strip material and the mask plate 9, thereby improving the exposure quality of the strip material and reducing the projection error without causing deformation of the mask plate itself.

[0086] Further, such as Figures 19-22 As shown, the mask device C also includes a fixed base 40 and a movable base 42 suitable for sliding connection with the fixed base 40, and a pair of machine bases 39 suitable for sliding connection with the movable base 42. The sliding direction of the movable base 42 is parallel to the side of the installation frame 1 25 having the second through-hole 251, and the sliding direction of the machine base 39 is perpendicular to the side of the installation frame 1 25 having the second through-hole 251. The pair of machine bases 39 are arranged at intervals, and the two mask mechanisms B are respectively installed on the two machine bases 39. The two machine bases 39 move closer to or farther away from each other, driving the two mask mechanisms B closer to or farther away from each other. The movable base 42 moves relative to the fixed base 40 to adjust the position of the two mask mechanisms B, so as to facilitate the precise clamping of the sealing strip material. Preferably, the horizontal movement of the two mask mechanisms B closer to or farther away from each other can be achieved by the transverse movement component 3 43, as shown in FIG. Figure 21 and Figure 22 As shown, the transverse moving component three 43 is installed on the movable base 42 and is connected to the machine base 39. The machine base 39 is driven to move by the transverse moving component three 43. Accordingly, the horizontal sliding of the two mask mechanisms B along the direction parallel to the side of the installation frame 25 having the through hole 251 can be completed by the transverse moving component two 41. The transverse moving component two 41 is installed on the fixed base 40 and is connected to the movable base 42. The movable base 42 is driven to move on the fixed base 40 by the transverse moving component two 41. Specifically, the transverse moving component two 41 and the transverse moving component three 43 are conventional linear actuators such as linear motors, cylinders or hydraulic cylinders.

[0087] In this embodiment, if Figure 21 and Figure 22As shown, the fixed base 40 is provided with a guide roller 44 located below a pair of mask assemblies A. The guide roller 44 is rotatably mounted on a roller frame 45. The roller frame 45 is fixedly connected to the fixed base 40. The movable base 42 is constructed with a discharge port 46. Figure 17 and Figure 18 As shown, the outer cover of the two mask mechanisms B is provided with a machine cover 49, and the top of the machine cover 49 is constructed with a feed port 50, which is located above the pair of mask components A. The strip material passes through the pair of mask components A from the feed port 50 downward, then passes around the guide roller 44 and extends out from the discharge port 46. When the strip material stops moving, the pair of mask components A approach each other to clamp and seal one section of the strip material, and then the parallel light is passed from Figure 18 The left and right sides of the mask device C in the middle are irradiated to the mask assembly A, and the parallel light passes through the through hole 2 251 and the through hole 1 19 in turn and then shines on the mask plate 9, performing double-sided exposure for one section of the strip material. After the exposure is completed, the pair of mask assemblies A separate from each other, and then the strip material continues to move, so that the next section of the material to be exposed enters between the pair of mask assemblies A, and then the above exposure action is repeated, so that a continuous exposure operation in an assembly line can be realized with fast exposure speed and high efficiency.

[0088] In this embodiment, further, Figure 17 and Figure 19 As shown, a carrier frame 47 is provided on the fixed base 40, and a guide rail 48 is provided on the carrier frame 47. The carrier frame 47 is located on the side of the mask frame 1 where the handle 10 is provided. With this design, after the mask assembly A is pulled out from the mask mechanism B, the mask assembly A can be temporarily placed on the carrier frame 47, and the roller 2 11 rolls on the guide rail 48, which facilitates the disassembly and assembly of the mask assembly A.

[0089] Of course, in other embodiments, both mask mechanisms B may be the mask mechanisms B of the second embodiment. In this case, the mask device C further includes a moving mechanism for driving the mask assemblies A of the two mask mechanisms B to approach each other.

[0090] Unless otherwise defined, the technical or scientific terms used in this application shall have the usual meanings understood by persons of ordinary skill in the field to which this application belongs. The words "first", "second", "third" and similar terms used in the specification and claims of this application do not indicate any order, quantity or importance, but are only used to distinguish different components. Words such as "one" or "a" do not indicate a quantity limitation, but rather indicate the existence of at least one. Words such as "include" or "comprise" mean that the elements or objects appearing before "include" or "comprises" cover the elements or objects listed after "include" or "comprises" and their equivalents, and do not exclude other elements or objects. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0091] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A mask assembly comprising a mask frame and a mask plate, wherein the mask frame is provided with a through hole 1, and the mask plate is attached to a side surface 1 of the mask frame provided with the through hole 1, thereby blocking and sealing one end of the through hole 1, characterized in that: The side surface is configured with a plurality of air suction holes, which are distributed circumferentially around the through hole. The side surface is provided with a guide frame, the air intake hole is located between the mask and the guide frame, and the thickness of the guide frame is not less than the thickness of the mask; An air extraction hole connected with the air suction hole is constructed inside the mask frame, and one end of the air extraction hole extends to the outer wall of the mask frame.

2. A mask assembly according to claim 1, characterized in that: The side surface is constructed with a zigzag groove 1, the zigzag groove is constructed with a suction hole 2 connected with the exhaust hole, the through hole 1 is located inside the zigzag groove 1, and the mask covers the zigzag groove 1.

3. The mask assembly according to claim 1, wherein: The side surface one is constructed with a serpentine groove two connected to the exhaust hole, the guide frame covers the serpentine groove two, a sealing ring one is tightly clamped between the guide frame and the side surface one, the serpentine groove two is located on the inner side of the sealing ring one, and a gap is constructed between the guide frame located on the inner side of the serpentine groove two and the side surface one, and the gap is constructed to allow the gas inside the guide frame to pass through and enter the serpentine groove two.

4. The mask assembly according to claim 1, wherein: A second sealing ring is provided on the side of the guide frame facing away from the mask frame.

5. The mask assembly according to claim 1, wherein: The mask frame is provided with a first roller and a second roller at the upper and lower ends respectively; The side surface 1 is provided with a plurality of limit blocks around the circumference of the mask, and the limit blocks abut against the edge of the mask; The side surface 1 is provided with a guide wheel, and the guide wheel is suitable for being connected with the bottom surface of the mask in a rolling manner.

6. A mask mechanism, characterized in that: The mask assembly comprises a mounting frame 1, a mounting frame 1, and the mask assembly according to any one of claims 1 to 4, wherein the mounting frame 1 and the mounting frame 1 are connected via a connector, and the connector is configured to drive the mounting frame 1 to slide up and down and left and right relative to the mounting frame 1; The first mounting frame is configured with a second through hole, and the first mounting frame is provided with a clamp, which is configured to clamp and fix the mask assembly on the side of the first mounting frame configured with the second through hole, and to make the first through hole and the second through hole face each other.

7. A mask mechanism, characterized in that: The mask assembly comprises a mounting frame 1, a mounting frame 1 and the mask assembly of claim 5, wherein the mounting frame 1 and the mounting frame 1 are connected via a connector, and the connector is configured to drive the mounting frame 1 to slide up and down and left and right relative to the mounting frame 1; The first mounting frame is configured with a second through hole, and the first mounting frame is provided with a clamp, wherein the clamp is configured to clamp and fix the mask assembly on a side of the first mounting frame configured with the second through hole, with the first through hole facing the second through hole; The installation frame 1 is provided with a slide rail 1 and a slide rail 2, the roller 1 is connected to the slide rail 1 in a rolling manner, and the roller 2 is connected to the slide rail 2 in a rolling manner, and the rolling directions of the roller 1 and the roller 2 are parallel to the side of the installation frame 1 having the through hole 2.

8. The mask mechanism according to claim 6 or 7, characterized in that: The first mounting frame is provided with a plurality of limiting wheels circumferentially around the second through hole, and the clamps include a first clamp, a second clamp, and a third clamp. The first clamp and the second clamp are arranged circumferentially around the second through hole, and the first clamp and the second clamp are adapted to press the mask assembly into contact with the limiting wheels, with the pressing direction being perpendicular to the side surface of the first mounting frame having the second through hole; The clamp three is located on one side of the mounting frame one, and a stop block is provided on the other side of the mounting frame one. The clamp three is suitable for pressing the mask assembly to contact the stop block, and the pressing direction is parallel to the side of the mounting frame one having the through hole two.

9. The mask mechanism according to claim 6 or 7, characterized in that: The mounting frame 1 is provided with a positioning detector for detecting the position of the mask assembly relative to the mounting frame 1.

10. The mask mechanism according to claim 6 or 7, characterized in that: The connector is also configured to drive the mounting frame to slide forward and backward relative to the mounting rack.

11. The mask mechanism according to claim 10, characterized in that: The connectors include connector 1, connector 2, connector 3, and connector 4. The connectors 1, 2, and 3 are distributed around the mounting frame 1, and there is at least one of them. The connector 1 includes a lifting assembly 1 fixedly connected to the mounting frame 1 and a slider 1 laterally slidably connected to the lifting assembly 1; The second connector includes a transverse moving component 1 fixedly connected to the mounting frame 1 and a slider 2 connected to the transverse moving component 1 in a lifting and sliding manner; The connector three includes a slider three connected to the mounting frame one for transverse sliding, and a slider four connected to the slider three for lifting and sliding. The movement direction of the lifting component one is parallel to the sliding directions of the sliders two and four, and the movement direction of the transverse movement component one is parallel to the sliding directions of the sliders one and three. The sliders 1, 2 and 4 are all fixedly connected to the connector 4, and the connector 4 includes a slider 5 and a lifting assembly 2. The fixed end of the lifting assembly 2 is fixedly connected to the slider 1, the slider 2 or the slider 4. The mounting frame 1 is connected to the fixed end of the lifting assembly 2 for forward and backward sliding. The slider 5 is connected to the movable end of the lifting assembly 2, and the slider 5 is constructed to be connected to the mounting frame 1 for oblique sliding, so that when the lifting assembly 2 drives the slider 5 to rise and fall, the mounting frame 1 is driven to slide forward and backward.

12. A mask device for double-sided exposure of a strip material, characterized in that: It comprises a mask mechanism according to any one of claims 6 to 9 and a mask mechanism according to claim 10 or 11, wherein the mask assembly of the mask mechanism according to any one of claims 6 to 9 and the mask assembly of the mask mechanism according to claim 10 or 11 are symmetrically arranged at intervals and are suitable for fitting tightly to clamp and seal one section of the strip material.

13. The mask device according to claim 12, wherein: It also includes a fixed base and a movable base suitable for sliding connection with the fixed base, and a pair of machine bases suitable for sliding connection with the movable base, the sliding direction of the movable base is parallel to the side of the installation frame with the through hole 2, the sliding direction of the machine base is perpendicular to the side of the installation frame with the through hole 2, the pair of machine bases are arranged at intervals, the mask mechanism of any one of claims 6-9 is installed on one of the machine bases, and the mask mechanism of claim 10 or 11 is installed on the other machine base.

14. The mask device according to claim 13, wherein: The fixed base is provided with a guide roller 1 located below a pair of mask assemblies, the movable base is configured with a discharge port 1, the external covers of the two mask mechanisms are provided with a machine cover, the top of the machine cover is configured with a feed port, and the feed port is located above a pair of mask assemblies. The strip material passes through the pair of mask assemblies downward from the feed port, bypasses the guide roller 1, and extends out of the discharge port 1.

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