Power supply control circuit and method for ion implanter and electronic equipment

Abstract

The invention provides a power supply control circuit and method for an ion implanter and electronic equipment, and relates to the field of automatic control, the circuit comprises a second bypass switch, the second bypass switch is connected in series with a shielding door contactor controlled by a shielding door, under the condition that a first bypass switch connected in parallel with the shielding door contactor is switched off, the second bypass switch is switched on, and the shielding door contactor is switched off. Therefore, under the condition that the shielding door contactor is closed, the distribution box can be used for supplying power to the ion implanter; and when the first bypass switch is closed, the second bypass switch is disconnected, so that the distribution box cannot supply power to the ion implanter. The distribution box is controlled to supply power to the ion implanter through the second bypass switch which is opposite to the first bypass switch in on-off condition, whether the first bypass switch is closed or not can be determined in time according to the starting state of the ion implanter, potential safety hazards possibly caused by normally-closed first bypass switch are avoided, and the use safety of the ion implanter is improved.

Description

Technical Field

[0001] The present invention relates to the field of automatic control technology, and in particular to a power supply control circuit, method and electronic equipment for an ion implanter. Background Art

[0002] An ion implanter obtains the desired ions from an ion source and accelerates them to produce an ion beam with energies of several hundred kiloelectronvolts. This beam is used for ion implantation in semiconductor materials, large-scale integrated circuits, and devices, as well as for surface modification and film formation of metal materials. Ion implanters generate high levels of electrical energy during operation, posing a potential safety threat to the surrounding environment. Therefore, a shielded door is typically installed at the implanter's location, and the implanter can only operate when the door is closed. Specifically, when a distribution box is used to power the implanter, the box's control circuit includes a relay associated with the shielded door. This relay must be engaged to activate the distribution box and supply power to the ion implanter. This relay only activates when the shielded door is locked.

[0003] When the area where the ion implantation machine is located needs to be debugged or maintained, the shielding door of the area where the ion implantation machine is located needs to be kept open. In related technologies, a bypass switch is connected in parallel with a relay associated with the shielding door to enable the distribution box to be opened when the shielding door is open.

[0004] In this way, if the bypass switch is damaged by human error and becomes normally closed, the shielding door may not be closed and the ion implanter may be started, which may lead to a safety accident. Summary of the Invention

[0005] In view of this, embodiments of the present invention provide a power supply control circuit, method, and electronic device for an ion implanter to improve the safety of the ion implanter.

[0006] According to one aspect of the present invention, a power supply control circuit for an ion implanter is provided. The power supply control circuit for the ion implanter is applied to a power supply control circuit for a distribution box. The power supply control circuit for the distribution box includes a first power supply, a first bypass switch, and a shielding door contactor. The first bypass switch is connected in parallel with the shielding door contactor. When the first bypass switch and / or the shielding door contactor are closed, the first power supply is used to control the power supply to the distribution box.

[0007] The ion implanter power supply control circuit includes: a second power supply, a second bypass switch and the shielding door contactor, the second power supply, the second bypass switch and the shielding door contactor are connected in series, and the second power supply is a power supply for controlling the operation of the high-voltage power supply of the ion implanter;

[0008] The second bypass switch is configured to remain in an open state when the first bypass switch is closed; and remain in a closed state when the first bypass switch is open, so that the second power supply can be used to power the ion implanter when the shield door contactor is closed.

[0009] In a possible embodiment, the ion implanter power supply control circuit further includes: a high-voltage switch, the high-voltage switch being connected in series with the second power supply, the second bypass switch, and the shield door contactor;

[0010] The high-voltage switch is used to use the second power supply to supply power to the ion implanter when the second bypass switch, the shielding door contactor and the high-voltage switch are closed.

[0011] In a possible embodiment, the high-voltage switch includes: a high-voltage on switch and a high-voltage off switch. When the high-voltage on switch is off, the high-voltage switch is off; when the high-voltage on switch is closed and the high-voltage off switch is closed, the high-voltage switch is closed.

[0012] In a possible embodiment, the ion implanter power supply control circuit further includes: a relay, the relay including a contact pair and a relay coil, the contact pair being connected in parallel with the high-voltage on switch and in series with the high-voltage off switch, and the relay coil being connected in series with the high-voltage on switch and the high-voltage off switch;

[0013] The relay coil is used to energize when the second bypass switch, the shielding door contactor, the high-voltage opening switch, and the high-voltage closing switch are all closed, and to control the contact pair to be attracted, so that when the second bypass switch, the shielding door contactor, and the high-voltage closing switch are all closed and the high-voltage opening switch is disconnected, the second power supply is used to power the ion implanter.

[0014] In a possible embodiment, the ion implanter power supply control circuit further includes: a high-voltage indicator light; the high-voltage indicator light is used to display the on / off status of the high-voltage switch according to a preset display rule.

[0015] In a possible embodiment, the power supply control circuit of the distribution box further includes: an external gas source and a solenoid valve, wherein the solenoid valve includes a sub-gas valve; the solenoid valve is connected in series with the external gas source, the first power supply, the first bypass switch, and the shielding door contactor, and the external gas source is connected in parallel with the first power supply, the first bypass switch, and the shielding door contactor;

[0016] The solenoid valve is used to detect the compressed air delivered by the external air source, close the sub-air valve, and use the first power supply to control the distribution box to supply power when the first bypass switch and / or the shielding door contactor are closed.

[0017] According to another aspect of the present invention, a method for controlling power supply to an ion implanter is provided. The method is applied to a power supply control circuit of a distribution box, wherein the power supply control circuit of the distribution box includes a first power supply, a first bypass switch, and a shielding door contactor, wherein the first bypass switch is connected in parallel with the shielding door contactor. When the first bypass switch and / or the shielding door contactor are closed, the first power supply is used to control power supply to the distribution box. The method includes:

[0018] When detecting that the first bypass switch is closed, controlling the second bypass switch to be open;

[0019] When detecting that the first bypass switch is disconnected, controlling the second bypass switch to be closed, and detecting whether the shield door contactor is closed;

[0020] When the shield door contactor is closed, the second power supply is used to power the ion implanter, and the second power supply is a power supply for controlling the operation of the high-voltage power supply of the ion implanter.

[0021] In a possible embodiment, the method further includes:

[0022] detecting whether a high-voltage switch is closed, the high-voltage switch being connected in series with the second power supply, the second bypass switch, and the shield door contactor;

[0023] When the second bypass switch is closed, the shield door contactor is engaged, and the high-voltage switch is closed, the second power supply is used to supply power to the ion implanter.

[0024] According to another aspect of the present invention, there is provided an electronic device, comprising:

[0025] processor; and

[0026] Memory for storing programs,

[0027] The program includes instructions, and when the instructions are executed by the processor, the processor executes any of the above-mentioned ion implanter power supply control methods.

[0028] According to another aspect of the present invention, a non-transitory computer-readable storage medium storing computer instructions is provided, wherein the computer instructions are used to enable a computer to execute any of the above-mentioned ion implanter power supply control methods.

[0029] One or more technical solutions provided in an embodiment of the present invention provide an ion implanter power supply control circuit, and control the startup of the ion implanter through the ion implanter power supply control circuit. Specifically, the ion implanter power supply control circuit includes a second bypass switch, which is connected in series with a shielding door contactor controlled by a shielding door. When the first bypass switch connected in parallel with the shielding door contactor is disconnected, the second bypass switch is closed, thereby enabling the ion implanter to be powered by a distribution box when the shielding door contactor is closed. When the first bypass switch is closed, the second bypass switch is disconnected, rendering the distribution box unable to power the ion implanter. By controlling the distribution box to power the ion implanter with the second bypass switch, which operates in the opposite manner to the first bypass switch, the startup status of the ion implanter can be used to promptly determine whether the first bypass switch is closed, thereby avoiding potential safety hazards caused by the first bypass switch being normally closed, and improving the safety of the ion implanter. BRIEF DESCRIPTION OF THE DRAWINGS

[0030] Further details, features and advantages of the present invention are disclosed in the following description of exemplary embodiments in conjunction with the accompanying drawings, in which:

[0031] Figure 1 A schematic diagram of a logic structure of a power supply control circuit for an ion implanter provided in an embodiment of the present invention;

[0032] Figure 2 A schematic diagram of a logic structure of a power supply control circuit for a distribution box provided in an embodiment of the present invention;

[0033] Figure 3 A schematic diagram of another logic structure of the power supply control circuit of the ion implanter provided in an embodiment of the present invention;

[0034] Figure 4 A schematic flow chart of a power supply control method for an ion implanter provided in an embodiment of the present invention;

[0035] Figure 5 A block diagram of an exemplary electronic device capable of implementing the embodiments of the present invention is shown. DETAILED DESCRIPTION

[0036] Embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although certain embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can be implemented in various forms and should not be construed as limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the present invention. It should be understood that the drawings and embodiments of the present invention are for illustrative purposes only and are not intended to limit the scope of protection of the present invention.

[0037] It should be understood that the various steps described in the method embodiments of the present invention may be performed in different orders and / or in parallel. In addition, the method embodiments may include additional steps and / or omit the steps shown. The scope of the present invention is not limited in this respect.

[0038] The term "including" and its variations used in this document are open inclusions, that is, "including but not limited to". The term "based on" means "based at least in part on". The term "one embodiment" means "at least one embodiment"; the term "another embodiment" means "at least one other embodiment"; the term "some embodiments" means "at least some embodiments". The relevant definitions of other terms will be given in the following description. It should be noted that the concepts of "first", "second", etc. mentioned in the present invention are only used to distinguish different devices, modules or units, and are not used to limit the order or interdependence of the functions performed by these devices, modules or units.

[0039] It should be noted that the modifications of "one" and "multiple" mentioned in the present invention are illustrative rather than restrictive. Those skilled in the art should understand that unless otherwise clearly indicated in the context, it should be understood as "one or more".

[0040] The names of the messages or information exchanged between multiple devices in the embodiments of the present invention are only used for illustrative purposes and are not used to limit the scope of these messages or information.

[0041] To improve the operational safety of an ion implanter, embodiments of the present invention provide an ion implanter power supply control circuit, method, and electronic device. An ion implanter is typically placed in a dedicated machine room, and power is supplied to the ion implanter via a distribution box within the room. The distribution box is a power distribution device specifically designed to distribute electricity. Specifically, the distribution box is connected to a power supply, thereby providing power to various electronic devices connected to the distribution box based on the electricity generated by the power supply. In one possible embodiment, the ion implanter power supply control circuit provided by the present invention can be applied to a distribution box power supply control circuit, which utilizes a power supply to supply power to the distribution box.

[0042] Exemplarily, the power distribution box power supply control circuit includes a first power source, a first bypass switch, and a shield door contactor. The first bypass switch is connected in parallel with the shield door contactor. When the first bypass switch and / or the shield door contactor are closed, the first power source is used to control the power supply to the distribution box. The following describes the present invention with reference to the accompanying drawings:

[0043] like Figure 1As shown, the ion implanter power supply control circuit includes: a second power supply 101, a second bypass switch 102 and the shielding door contactor 103, the second power supply 101, the second bypass switch 102 and the shielding door contactor 103 are connected in series, and the second power supply is a power supply for controlling the operation of the high-voltage power supply of the ion implanter;

[0044] The second bypass switch is configured to remain in an open state when the first bypass switch is closed; and remain in a closed state when the first bypass switch is open, so that the second power supply can be used to power the ion implanter when the shield door contactor is closed.

[0045] According to an embodiment of the present invention, an ion implanter power supply control circuit is provided, and the startup of the ion implanter is controlled by the ion implanter power supply control circuit. Specifically, the ion implanter power supply control circuit includes a second bypass switch, which is connected in series with a shielding door contactor controlled by a shielding door. When the first bypass switch, which is connected in parallel with the shielding door contactor, is disconnected, the second bypass switch is closed, thereby enabling the ion implanter to be powered by a distribution box when the shielding door contactor is closed. When the first bypass switch is closed, the second bypass switch is disconnected, rendering the distribution box unable to power the ion implanter. By controlling the distribution box to power the ion implanter with the second bypass switch, which operates in the opposite manner to the first bypass switch, the startup status of the ion implanter can be used to promptly determine whether the first bypass switch is closed, thereby avoiding potential safety hazards caused by the first bypass switch being normally closed and improving the operational safety of the ion implanter.

[0046] The following is an exemplary description of the ion implanter power supply control circuit provided by the embodiment of the present invention:

[0047] As described above, the ion implanter power supply control circuit provided by the embodiment of the present invention can be applied to the power supply control circuit of the distribution box. In one possible embodiment, the power supply control circuit of the distribution box may include a shielding door contactor, a first power supply, and a first bypass switch. The shielding door contactor may be a relay, which is an electrical control device. When the change in the input quantity reaches the specified requirement, it can cause a predetermined step change in the controlled quantity in the electrical output circuit. The shielding door contactor is a relay associated with the shielding door switch status. Specifically, when the shielding door is not closed, the shielding door contactor is disconnected, and when the shielding door is closed, the shielding door contactor is closed. The shielding door being closed means that the shielding door is locked, and the shielding door not being closed means that the shielding door is not locked. The shielding door refers to a door with a shielding function used to form a closed space in the area where the ion implanter is located. The ion implanter can only be started when the shielding door is in the closed state.

[0048] The first power supply controls the power supply to the distribution box and is typically a 24V DC power supply. The first bypass switch is connected in parallel with the shielding door contactor, and both the shielding door contactor and the first bypass switch are connected in series with the first power supply. When the shielding door contactor and / or the first bypass switch are closed, the first power supply can be used to activate power supply to the distribution box.

[0049] For example, if the ion implanter needs to be used, the shield door can be closed, thereby closing the shield door contactor, turning on the power supply control circuit of the distribution box, and using the first power supply to start powering the distribution box. For another example, if the area where the ion implanter is located needs to be maintained or repaired, the first bypass switch can be closed, so that even if the shield door is open, the distribution box can still be powered by the first power supply, thereby allowing the distribution box to power various electronic devices even if the shield door is not closed.

[0050] In one possible embodiment, the power supply control circuit of the distribution box may also include an air supply passageway, through which gas can be delivered to the distribution box and exhausted through a gas circuit to cool the distribution box, thereby maintaining stable operation of the distribution box. The air supply passageway may include an external air source, an air valve, a solenoid valve, etc. The solenoid valve is connected in series with the external air source, the first power source, the first bypass switch, and the shielding door contactor, and the external air source is connected in parallel with the first power source, the first bypass switch, and the shielding door contactor. The solenoid valve includes a sub-air valve, which energizes upon detecting compressed air, causing the solenoid valve to energize. After the air valve is opened, compressed air begins to be injected. The sub-air valve energizes upon detecting compressed air, causing the solenoid valve to energize. Thus, when the shielding door contactor or the first bypass switch is closed, the first power source is used to power the distribution box.

[0051] like Figure 2 As shown, Figure 2 This is a structural diagram of the power supply control circuit of the above-mentioned distribution box, which includes an external gas source, a first power supply, a gas valve, a solenoid valve, a shielding door contactor (corresponding to contacts 73 and 74) and a first bypass switch (corresponding to contacts 3 and 4). The first bypass switch is connected in parallel with the shielding door contactor, and the first bypass switch and the shielding door contactor are both connected in series with the power supply and the solenoid valve.

[0052] The above-mentioned sub-gas valve is energized when it detects air delivered by an external gas source, and the gas circuit is opened, so that the solenoid valve is turned on. When the first bypass switch or shield door contactor is closed, the power supply control circuit of the distribution box is turned on, and the distribution box SGM PD (source gas box distribution box) starts to supply power to the outside.

[0053] It can be seen from the above-mentioned distribution box power supply control circuit that when the shielding door is closed or the first bypass switch is closed, the distribution box power supply control circuit can be turned on, so that the distribution box can supply power to the outside. When the first bypass switch is damaged and becomes normally closed, even if the shielding door is not closed, the distribution box can still supply power to the ion implanter normally, which will cause the ion implanter to start when the shielding door is not closed, which poses certain safety hazards. In order to avoid this safety hazard, an ion implanter power supply control circuit can be set.

[0054] The ion implanter power supply control circuit may include a second power supply, a second bypass switch, and a shield door contactor, which are connected in series. The second power supply controls the operation of the ion implanter's high-voltage power supply. Exemplarily, the second power supply may be a 24VAC (alternating current) power supply. The second bypass switch is associated with the on / off state of the first bypass switch. Specifically, the on / off state of the second bypass switch is opposite to that of the first bypass switch. That is, when the first bypass switch is closed, the second bypass switch is open, and when the first bypass switch is open, the second bypass switch is closed. Exemplarily, the first and second bypass switches may be switches controlled by NAND or XOR gates with inverted switching phases. The inverted control signal of the first bypass switch serves as the control signal of the second bypass switch, achieving switch phase inversion. The shield door contactor in the ion implanter power supply control circuit and the shield door contactor in the distribution box power supply control circuit are associated with the closed state of the same shield door. The two shield door contactors have the same on / off state and may be the same contactor.

[0055] In the ion implanter power supply control circuit, if the second bypass switch is closed and the shield door contactor is engaged, the ion implanter power supply control circuit can be turned on, and the second power supply can be used to control the ion implanter's high-voltage power supply to begin operation. If the second bypass switch is disconnected or the shield door contactor is not engaged, the ion implanter power supply control circuit cannot be turned on. Because the first and second bypass switches have opposite opening and closing states, that is, when the first bypass switch is closed, the second bypass switch will be open. Therefore, regardless of whether the shield door is closed, the ion implanter cannot be powered, causing the ion implanter to be inoperative. Relevant personnel can determine whether the first bypass switch is closed by observing the operating status of the ion implanter.

[0056] In one possible embodiment, the ion implanter power supply control circuit further includes a high-voltage switch capable of providing precise voltage control and rapid switching for the ion implanter. The high-voltage switch is connected in series with the second power supply, the second bypass switch, and the shield door contactor, and is configured to control the voltage of the ion implanter based on the second power supply. Specifically, when the second bypass switch, the shield door contactor, and the high-voltage switch are closed, the ion implanter power supply is turned on using the second power supply.

[0057] In one possible embodiment, the high-voltage switch may include a high-voltage on switch and a high-voltage off switch, which are connected in series. When the ion implanter is not in use, the high-voltage on switch is disconnected, and the high-voltage off switch is usually closed, at which point the high-voltage switch is in an off state. When the ion implanter is needed, the high-voltage on switch is closed. If the ion implanter needs to be stopped, the high-voltage off switch can be pressed, causing the high-voltage off switch to change from a closed state to an off state, thereby disconnecting the ion implanter power supply control circuit, preventing the ion implanter from being powered.

[0058] In a possible embodiment, the ion implanter power supply control circuit may further include a relay, the relay including a relay coil and a contact pair, the contact pair being connected in parallel with the high-voltage on switch and in series with the high-voltage off switch, and the relay coil being connected in series with the high-voltage on switch and the high-voltage off switch;

[0059] The relay coil is used to energize when the second bypass switch, the shielding door contactor, the high-voltage opening switch, and the high-voltage closing switch are all closed, and to control the contact pair to be attracted, so that when the second bypass switch, the shielding door contactor, and the high-voltage closing switch are all closed and the high-voltage opening switch is disconnected, the ion implanter power supply is turned on by the second power supply.

[0060] When the second bypass switch, the shield door contactor, and the high-voltage switch are all closed, the ion implanter power supply control circuit is turned on, energizing the coil. When the coil is energized, the contacts in the relay connect, thereby maintaining the ion implanter power supply control circuit on, powering the ion implanter. In actual applications, the high-voltage start switch typically pops open after closing, meaning the high-voltage start switch remains closed for a short period of time, such as 1 second or 500 milliseconds. After the high-voltage start switch closes, the coil is energized, connecting the contacts in the relay. Even if the high-voltage start switch pops open after closing for a short time, the ion implanter power supply control circuit remains on, powering the ion implanter.

[0061] In one possible embodiment, the ion implanter power supply control circuit may further include a high-voltage indicator light configured to display the on / off status of the high-voltage switch according to a preset display rule. As a possible implementation, different color indicators or different frequencies may be provided for different states of the high-voltage switch.

[0062] The above-mentioned high-voltage indicator light is connected in series with the second bypass switch, the shield door contactor and the high-voltage switch, and in parallel with the above-mentioned relay coil. When the power supply control circuit of the ion implanter is turned on, the high-voltage indicator light is displayed according to the preset rules to indicate the closed state of the high-voltage switch.

[0063] like Figure 3 As shown, Figure 3 A schematic diagram of a structure of an ion implanter power supply control circuit provided by an embodiment of the present invention, wherein the ion implanter power supply control circuit is applied to a power distribution box power supply control circuit. Figure 3 As shown in the upper middle circuit, it includes an air supply path and an electric supply path, wherein the air supply path includes an air source, an air valve, and an electromagnetic valve SGM PD interlocks, and the electric supply path includes a first power supply +24VDC, a shielding door contactor doors lock, and a first bypass switch. The contacts corresponding to the above-mentioned shielding door contactor are contacts 73 and contact 74.

[0064] In the power supply control circuit, the air valve opens, allowing air to flow from the source into the air supply passage. When the solenoid valve (SGM) PD interlocks detect compressed air, they energize, opening the air supply passageway and delivering air to the SGM distribution box to cool the distribution box. When the air supply passageway is open, the solenoid valve energizes. When the first bypass switch is closed or the shield door contactor is engaged, the power supply passageway is opened. This power supply passage delivers electrical energy to the 24V RTN circuit, which includes the distribution box and the electronic devices that draw power from it.

[0065] The above ion implanter power supply control circuit is as follows Figure 3 The circuit in the lower center section includes a second bypass switch S1-A, the doors lock contactor (corresponding to contacts 43 and 44), a high-voltage on-switch HV on, a relay contact pair K1B, a high-voltage off-switch HV off, and a high-voltage indicator light. Relay contact pair K1B is associated with the state of coil K1A. The second bypass switch S1-A, the doors lock contactor, the high-voltage on-switch HV on, the high-voltage off-switch HV off, and the high-voltage indicator light DSI are connected in series. Relay K1B is connected in parallel with the high-voltage on-switch HV on. Relay coil K1A is connected in parallel with the high-voltage indicator light and in series with the second bypass switch S1-A, the doors lock contactor, the high-voltage on-switch HV on, relay K1B, and the high-voltage off-switch HV off.

[0066] The above-mentioned second bypass switch and the first bypass switch are in reverse phase. When the first bypass switch is disconnected, the second bypass switch is closed. In this way, when the high-voltage start switch is closed and the high-voltage shutdown switch is closed, the ion implanter power supply control circuit is turned on, the coil and the high-voltage indicator light are energized, and when the coil is energized, the relay K1B is energized. In this way, after the high-voltage start switch pops open, the ion implanter power supply control circuit is still turned on until the high-voltage shutdown switch is disconnected.

[0067] When the embodiment of the present invention is applied, if the switch is damaged or becomes normally closed, a chain circuit will be triggered, and the ion implanter will be unable to work until the staff finds and solves the problem.

[0068] Based on the same inventive concept, an embodiment of the present invention also provides a power supply control method for an ion implanter, the method being applied to a power supply control circuit of a distribution box, the power supply control circuit of the distribution box comprising a first power supply, a first bypass switch and a shielding door contactor, the first bypass switch being connected in parallel with the shielding door contactor; when the first bypass switch and / or the shielding door contactor are closed, the first power supply is used to control the power supply of the distribution box. Figure 4 As shown, the method includes:

[0069] S401: When detecting that the first bypass switch is closed, control the second bypass switch to be open;

[0070] S402: When detecting that the first bypass switch is disconnected, controlling the second bypass switch to be closed, and detecting whether the shield door contactor is engaged;

[0071] S403 : When the shield door contactor is closed, the ion implanter is powered by a second power supply, where the second power supply is a power supply for controlling the operation of a high-voltage power supply of the ion implanter.

[0072] In a possible embodiment, the method further includes:

[0073] detecting whether a high-voltage switch is closed, the high-voltage switch being connected in series with the second power supply, the second bypass switch, and the shield door contactor;

[0074] When the second bypass switch is closed, the shield door contactor is engaged, and the high-voltage switch is closed, the second power supply is used to supply power to the ion implanter.

[0075] An exemplary embodiment of the present invention further provides an electronic device, comprising: at least one processor; and a memory communicatively connected to the at least one processor. The memory stores a computer program executable by the at least one processor, wherein the computer program, when executed by the at least one processor, causes the electronic device to perform a method according to an embodiment of the present invention.

[0076] Exemplary embodiments of the present invention further provide a non-transitory computer-readable storage medium storing a computer program, wherein the computer program, when executed by a processor of a computer, is used to cause the computer to perform a method according to an embodiment of the present invention.

[0077] An exemplary embodiment of the present invention further provides a computer program product, comprising a computer program, wherein when the computer program is executed by a processor of a computer, the computer is configured to cause the computer to perform a method according to an embodiment of the present invention.

[0078] refer to Figure 5 , a block diagram of an electronic device 500 that can serve as a server or client of the present invention will now be described, which is an example of a hardware device that can be applied to various aspects of the present invention. The electronic device is intended to represent various forms of digital electronic computer devices, such as laptop computers, desktop computers, workstations, personal digital assistants, servers, blade servers, mainframe computers, and other suitable computers. The electronic device can also represent various forms of mobile devices, such as personal digital processing, cellular phones, smart phones, wearable devices and other similar computing devices. The components shown herein, their connections and relationships, and their functions are merely examples and are not intended to limit the implementation of the present invention described and / or required herein.

[0079] like Figure 5 As shown, the electronic device 500 includes a computing unit 501, which can perform various appropriate actions and processes according to a computer program stored in a read-only memory (ROM) 502 or a computer program loaded from a storage unit 508 into a random access memory (RAM) 503. Various programs and data required for the operation of the electronic device 500 can also be stored in the RAM 503. The computing unit 501, the ROM 502, and the RAM 503 are connected to each other via a bus 504. An input / output (I / O) interface 505 is also connected to the bus 504.

[0080] Multiple components within electronic device 500 are connected to I / O interface 505, including an input unit 506, an output unit 507, a storage unit 508, and a communication unit 509. Input unit 506 can be any type of device capable of inputting information into electronic device 500. Input unit 506 can receive input numeric or character information and generate key input signals related to user settings and / or function control of the electronic device. Output unit 507 can be any type of device capable of presenting information and may include, but is not limited to, a display, a speaker, a video / audio output terminal, a vibrator, and / or a printer. Storage unit 508 may include, but is not limited to, a magnetic disk or an optical disk. Communication unit 509 allows electronic device 500 to exchange information / data with other devices via computer networks such as the Internet and / or various telecommunication networks and may include, but is not limited to, a modem, a network card, an infrared communication device, a wireless communication transceiver and / or chipset, such as a Bluetooth™ device, a WiFi device, a WiMax device, a cellular communication device, and / or the like.

[0081] The computing unit 501 can be various general and / or special processing components with processing and computing capabilities. Some examples of the computing unit 501 include but are not limited to a central processing unit (CPU), a graphics processing unit (GPU), various dedicated artificial intelligence (AI) computing chips, various computing units for running machine learning model algorithms, digital signal processors (DSPs), and any appropriate processors, controllers, microcontrollers, etc. The computing unit 501 performs the various methods and processes described above. For example, in some embodiments, any of the above-described ion implanter power supply control methods can be implemented as a computer software program, which is tangibly contained in a machine-readable medium, such as a storage unit 508. In some embodiments, part or all of the computer program can be loaded and / or installed on the electronic device 500 via ROM 502 and / or communication unit 509. In some embodiments, the computing unit 501 can be configured to perform any of the above-described ion implanter power supply control methods by any other appropriate means (e.g., by means of firmware).

[0082] The program code for implementing the method of the present invention can be written in any combination of one or more programming languages. Such program code can be provided to a processor or controller of a general-purpose computer, a special-purpose computer, or other programmable data processing device so that when the program code is executed by the processor or controller, the functions / operations specified in the flow chart and / or block diagram are implemented. The program code can be executed entirely on the machine, partially on the machine, as a stand-alone software package, partially on the machine and partially on a remote machine, or entirely on a remote machine or server.

[0083] In the context of the present invention, machine-readable medium can be a tangible medium that can contain or store a program for use with an instruction execution system, device or equipment or used in combination with an instruction execution system, device or equipment. Machine-readable medium can be a machine-readable signal medium or a machine-readable storage medium. Machine-readable medium can include, but is not limited to, electronic, magnetic, optical, electromagnetic, infrared or semiconductor systems, devices or equipment, or any suitable combination of the foregoing. More specific examples of machine-readable storage media can include electrical connections based on one or more lines, portable computer disks, hard disks, random access memories (RAM), read-only memories (ROM), erasable programmable read-only memories (EPROM or flash memory), optical fibers, portable compact disk read-only memories (CD-ROM), optical storage devices, magnetic storage devices, or any suitable combination of the foregoing.

[0084] As used herein, the terms "machine-readable medium" and "computer-readable medium" refer to any computer program product, apparatus, and / or device (e.g., a magnetic disk, an optical disk, a memory, a programmable logic device (PLD)) for providing machine instructions and / or data to a programmable processor, including machine-readable media that receive machine instructions as machine-readable signals. The term "machine-readable signal" refers to any signal used to provide machine instructions and / or data to a programmable processor.

[0085] To provide interaction with a user, the systems and techniques described herein can be implemented on a computer having: a display device (e.g., a CRT (cathode ray tube) or LCD (liquid crystal display) monitor) for displaying information to the user; and a keyboard and pointing device (e.g., a mouse or trackball) through which the user can provide input to the computer. Other types of devices can also be used to provide interaction with the user; for example, the feedback provided to the user can be any form of sensory feedback (e.g., visual feedback, auditory feedback, or tactile feedback); and input from the user can be received in any form (including acoustic input, voice input, or tactile input).

[0086] The systems and techniques described herein can be implemented in a computing system that includes back-end components (e.g., as a data server), or a computing system that includes middleware components (e.g., an application server), or a computing system that includes front-end components (e.g., a user computer having a graphical user interface or a web browser through which a user can interact with implementations of the systems and techniques described herein), or a computing system that includes any combination of such back-end components, middleware components, or front-end components. The components of the system can be interconnected by any form or medium of digital data communication (e.g., a communication network). Examples of communication networks include a local area network (LAN), a wide area network (WAN), and the Internet.

[0087] Computer systems may include clients and servers. A client and server are generally remote from each other and typically interact through a communication network. The client and server relationship arises through computer programs running on the respective computers and having a client-server relationship to each other.

Claims

1. An ion implanter power supply control circuit, characterized in that: The ion implanter power supply control circuit is applied to the power supply control circuit of the distribution box, and the power supply control circuit of the distribution box includes a first power supply, a first bypass switch and a shielding door contactor, wherein the first bypass switch is connected in parallel with the shielding door contactor; when the first bypass switch and / or the shielding door contactor are closed, the first power supply is used to control the power supply of the distribution box; The ion implanter power supply control circuit includes: a second power supply, a second bypass switch and the shielding door contactor, the second power supply, the second bypass switch and the shielding door contactor are connected in series, and the second power supply is a power supply for controlling the operation of the high-voltage power supply of the ion implanter; The second bypass switch is configured to remain in an open state when the first bypass switch is closed; and remain in a closed state when the first bypass switch is open, so that the second power supply can be used to power the ion implanter when the shield door contactor is closed.

2. The ion implanter power supply control circuit according to claim 1, characterized in that: The ion implanter power supply control circuit further includes: a high-voltage switch, the high-voltage switch being connected in series with the second power supply, the second bypass switch, and the shield door contactor; The high-voltage switch is used to use the second power supply to supply power to the ion implanter when the second bypass switch, the shielding door contactor and the high-voltage switch are closed.

3. The ion implanter power supply control circuit according to claim 2, characterized in that: The high-voltage switch includes: a high-voltage on switch and a high-voltage off switch. When the high-voltage on switch is off, the high-voltage switch is off; when the high-voltage on switch is closed and the high-voltage off switch is closed, the high-voltage switch is closed.

4. The ion implanter power supply control circuit according to claim 3, characterized in that: The ion implanter power supply control circuit further includes: a relay, the relay including a contact pair and a relay coil, the contact pair being connected in parallel with the high-voltage on switch and in series with the high-voltage off switch, and the relay coil being connected in series with the high-voltage on switch and the high-voltage off switch; The relay coil is used to energize when the second bypass switch, the shielding door contactor, the high-voltage opening switch, and the high-voltage closing switch are all closed, and to control the contact pair to be attracted, so that when the second bypass switch, the shielding door contactor, and the high-voltage closing switch are all closed and the high-voltage opening switch is disconnected, the second power supply is used to power the ion implanter.

5. The ion implanter power supply control circuit according to claim 4, characterized in that: The ion implanter power supply control circuit further includes: a high-voltage indicator light; the high-voltage indicator light is used to display the on / off status of the high-voltage switch according to a preset display rule.

6. The ion implanter power supply control circuit according to claim 1, characterized in that: The power supply control circuit of the distribution box further includes: an external gas source and a solenoid valve, wherein the solenoid valve includes a sub-gas valve; the solenoid valve is connected in series with the external gas source, the first power supply, the first bypass switch and the shielding door contactor, and the external gas source is connected in parallel with the first power supply, the first bypass switch and the shielding door contactor; The solenoid valve is used to detect the compressed air delivered by the external air source, close the sub-air valve, and use the first power supply to control the distribution box to supply power when the first bypass switch and / or the shielding door contactor are closed.

7. A power supply control method for an ion implanter, characterized in that: The method is applied to a power supply control circuit of a distribution box, wherein the power supply control circuit of the distribution box includes a first power supply, a first bypass switch and a shielding door contactor, wherein the first bypass switch is connected in parallel with the shielding door contactor; When the first bypass switch and / or the shield door contactor are closed, the first power supply is used to control the power distribution box to supply power; the method includes: When detecting that the first bypass switch is closed, controlling the second bypass switch to be open; When detecting that the first bypass switch is disconnected, controlling the second bypass switch to be closed, and detecting whether the shield door contactor is closed; When the shield door contactor is closed, the second power supply is used to power the ion implanter, and the second power supply is a power supply for controlling the operation of the high-voltage power supply of the ion implanter.

8. The method according to claim 7, characterized in that The method further comprises: detecting whether a high-voltage switch is closed, the high-voltage switch being connected in series with the second power supply, the second bypass switch, and the shield door contactor; When the second bypass switch is closed, the shield door contactor is engaged, and the high-voltage switch is closed, the second power supply is used to supply power to the ion implanter.

9. An electronic device comprising: processor; as well as Memory for storing programs, The program includes instructions, which, when executed by the processor, cause the processor to perform the method according to any one of claims 7 to 8.

10. A non-transitory computer-readable storage medium storing computer instructions, wherein: The computer instructions are used to make a computer execute the method according to any one of claims 7-8.

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