An apparatus for ultrasonically cleaning a tube furnace quartz tube

Abstract

The application discloses a device for ultrasonic cleaning of a quartz tube of a tubular furnace, which comprises an ultrasonic cleaning tank, wherein an elevating adjusting mechanism is arranged at the upper end of the ultrasonic cleaning tank, an internal quartz tube cleaning mechanism is arranged in the elevating adjusting mechanism, and a quartz tube fixing structure is arranged in the ultrasonic cleaning tank. The device for ultrasonic cleaning of the quartz tube of the tubular furnace is characterized in that the quartz tube cleaning mechanism is arranged, after the quartz tube is placed in the quartz tube fixing structure, the cleaning brush extends to the inside of the quartz tube, the sliding sleeve is slid on the surface of the driving shaft through the extrusion of the contact, the first connecting rod cooperates with the second connecting rod to push the clamping frame to extend so that the cleaning brush is tightly attached to the inner wall of the quartz tube, and the quartz tube inside can be completely cleaned through the driving of the second speed reducer, and the cleaning effect can be further improved through the sound emission of the ultrasonic generator in the ultrasonic cleaning tank.

Description

TECHNICAL FIELD

[0001] The application relates to the technical field of quartz tube processing, in particular to an ultrasonic cleaning device for a quartz tube of a tube furnace. BACKGROUND

[0002] The quartz tube is a special industrial technical glass tube material made of natural crystalline quartz (such as crystal or pure silica stone) or synthetic silane through high-temperature melting of silicon dioxide as the main component. It is a kind of basic material with excellent physical and chemical properties.

[0003] As disclosed in Chinese Patent Publication No. (CN109365399A), an ultrasonic cleaning device for a quartz tube of a tube furnace is disclosed, wherein it is recorded that: "In order to solve the problem that the quartz tube of the tube furnace is long and slender, cleaning is time-consuming and laborious, and the waste liquid after cleaning is not easy to collect due to the long furnace tube and the open ends, and there is a safety hazard, which may cause harm to the cleaning personnel. The quartz tube is fixed on the cleaning frame, the top plug and the bottom plug are respectively installed at the upper and lower openings of the quartz tube, the output end of the ultrasonic generator extends below the liquid level of the cleaning liquid in the quartz tube through the top plug, and one end of the water outlet pipe communicates with the inside of the quartz tube through the bottom plug, and the other end of the water outlet pipe communicates with the waste liquid pool. The ultrasonic cleaning device for the quartz tube of the tube furnace can realize closed cleaning of the quartz tube of the tube furnace, and effectively collect the waste liquid after cleaning".

[0004] In summary, the device still has the following technical problems: the above-mentioned device is provided with an ultrasonic generator, which realizes the cleaning purpose of the quartz tube through the principle of low-frequency vibration, but general ultrasonic cleaning can only clean the dirt accumulated on the surface of the quartz tube, but the quartz tube will have a carbonized layer after high-temperature treatment, which is a residue on the surface of the quartz tube when other materials are heated. Therefore, only ultrasonic cleaning cannot achieve complete cleaning, and therefore, it is necessary to propose an ultrasonic cleaning device for a quartz tube of a tube furnace to solve the technical problems mentioned in the above patent and provide a new technical solution. SUMMARY

[0005] Therefore, it is necessary to provide an ultrasonic cleaning device for a quartz tube of a tube furnace to solve the above technical problems, which is provided with a quartz tube cleaning mechanism. After the quartz tube is placed in the inside of the quartz tube fixing structure, the cleaning brush extends to the inside of the quartz tube, the sliding sleeve is slid on the surface of the driving shaft through the contact head extrusion, the first connecting rod cooperates with the second connecting rod to push the clamping frame to extend so that the cleaning brush is tightly attached to the inner wall of the quartz tube, and the driving of the second speed reducer can realize the comprehensive cleaning of the inside of the quartz tube, and the ultrasonic generator can further improve the cleaning effect in the inside of the ultrasonic cleaning pool.

[0006] In order to solve the above technical problems, the application adopts the following technical solutions:

[0007] An ultrasonic cleaning device for a tube furnace quartz tube.

[0008] The ultrasonic cleaning device for the tube furnace quartz tube specifically comprises an ultrasonic cleaning pool, an upper end of the ultrasonic cleaning pool is provided with a lifting adjusting mechanism, an inside of the lifting adjusting mechanism is provided with a quartz tube cleaning mechanism, and an inside of the ultrasonic cleaning pool is provided with a quartz tube fixing structure.

[0009] The lifting adjusting mechanism comprises two electric telescopic rods fixedly connected to a back surface of the ultrasonic cleaning pool, an upper end of the ultrasonic cleaning pool is provided with a top frame, and a bottom end of the ultrasonic cleaning pool is fixedly connected with an ultrasonic generator.

[0010] As a preferred embodiment of the ultrasonic cleaning device for the tube furnace quartz tube, one side of the top frame is fixedly connected with a side support plate, the side support plate is fixedly connected to an output end of the electric telescopic rod, four corners of the top frame are respectively fixedly connected with connecting seats, insides of the connecting seats are respectively fixedly connected with guide rods, and the guide rods are slidingly arranged on the front and back sides of the ultrasonic cleaning pool.

[0011] As a preferred embodiment of the ultrasonic cleaning device for the tube furnace quartz tube, the quartz tube cleaning mechanism comprises two light rods symmetrically fixedly arranged in an inside of the top frame, the inside of the top frame is fixedly connected with a first speed reducer, a transmission end of the first speed reducer is rotatably connected with a lead screw, a surface of the lead screw is threadedly connected with a moving seat, and the moving seat is slidingly connected to a surface of the light rod.

[0012] As a preferred embodiment of the ultrasonic cleaning device for the tube furnace quartz tube, a bottom end of the moving seat is fixedly connected with a connecting frame, a top surface of the connecting frame is fixedly connected with a guide frame, an inside of the guide frame is provided with a sliding groove, a surface of the lead screw is slidingly connected with a bearing block, the bearing block is arranged in the inside of the sliding groove, the bearing block is arranged on a side of the top frame close to the first speed reducer, a bottom end of the bearing block is fixedly connected with a sliding rod, and the sliding rod is slidingly arranged on an inner wall of the sliding groove.

[0013] As a preferred embodiment of the ultrasonic cleaning device for the tube furnace quartz tube, a sliding rod is slidingly connected to an inside of the connecting frame, the connecting frame is in an L shape as a whole, a surface of a short end of the connecting frame is fixedly connected with a second speed reducer, a transmission end of the second speed reducer is rotatably connected with a transmission wheel, an inside of the connecting frame is rotatably connected with a driving shaft, one end of the driving shaft close to the transmission wheel is fixedly connected with a driven wheel, and the driven wheel and the transmission wheel are drivingly connected through a belt.

[0014] As a kind of preferred embodiment of the device for ultrasonic cleaning tube furnace quartz tube provided by the application, the surface of the driving shaft is fixedly connected with the first support disc, the surface of the driving shaft is provided with the guide groove, the surface of the driving shaft is sleeved with the sliding sleeve, the inside of the sliding sleeve is fixedly connected with the guide rod, and the guide rod is slidably arranged in the guide groove.

[0015] As a kind of preferred embodiment of the device for ultrasonic cleaning tube furnace quartz tube provided by the application, the end of the sliding sleeve away from the first support disc is fixedly connected with the second support disc, the surface of the driving shaft is sleeved with the first spring, the surface of the first support disc is hingedly connected with the second connecting rod, the side of the second support disc close to the first support disc is hingedly connected with the first connecting rod, the ends of the first connecting rod and the second connecting rod close to each other are hingedly connected with the clamping frame, the surface of the clamping frame is fixedly connected with the cleaning brush, the inside of the ultrasonic cleaning pool is fixedly connected with the touch plate, and the side of the second support disc away from the first support disc is fixedly connected with the contact head.

[0016] As a kind of preferred embodiment of the device for ultrasonic cleaning tube furnace quartz tube provided by the application, the inside of the ultrasonic cleaning pool is fixedly provided with the rectangular frame, the two sides of the ultrasonic cleaning pool are provided with the avoiding groove, and the front face of the ultrasonic cleaning pool is provided with the feeding groove.

[0017] As a kind of preferred embodiment of the device for ultrasonic cleaning tube furnace quartz tube provided by the application, the two sides of the rectangular frame are provided with the rectangular groove, the inside of the rectangular frame is slidably connected with the lifting plate, the bottom surface of the lifting plate is fixedly connected with the lifting rod, the two ends of the lifting rod are slidably arranged on the inner wall of the rectangular groove, the inside of the rectangular frame is provided with the second spring, the top surface of the lifting plate is fixedly connected with the vertical rod, the upper end of the vertical rod is provided with the fixing ring, and the fixing ring and the vertical rod are clamped.

[0018] Compared with the prior art, the application has the following beneficial effects:

[0019] The device for ultrasonic cleaning tube furnace quartz tube provided by the application is provided with the quartz tube cleaning mechanism, after the quartz tube is placed in the inside of the quartz tube fixing structure, the cleaning brush extends to the inside of the quartz tube, the sliding sleeve is slid on the surface of the driving shaft through the extrusion of the contact head, the first connecting rod cooperates with the second connecting rod to push the clamping frame to extend so that the cleaning brush is tightly attached to the inner wall of the quartz tube, and the comprehensive cleaning of the inside of the quartz tube can be realized through the driving of the second speed reducer, and the cleaning effect can be further improved through the sound generation of the ultrasonic generator in the inside of the ultrasonic cleaning pool.

[0020] The device for ultrasonic cleaning of a quartz tube of a tube furnace provided by the application can adapt to quartz tubes of various lengths and various sizes by parallel arrangement of the connecting frame in the quartz tube cleaning mechanism and the cleaning brush, and can expand the cleaning brush by the first connecting rod and the second connecting rod, so that the cleaning brush can match the interiors of quartz tubes of various sizes, and thus the cleaning of various quartz tubes can be realized, thereby improving the overall application range of the device.

[0021] The device for ultrasonic cleaning of a quartz tube of a tube furnace provided by the application can replace different fixing rings according to different sizes of the quartz tube by the clamping of the fixing ring and the vertical rod, and thus the cleaning of various quartz tubes can be realized, and the lifting rod can be pushed to slide downward in the interior of the rectangular groove when the overall connecting frame is lowered, and thus the quartz tube can be lowered, so that the quartz tube can be completely soaked in the cleaning solution, thereby increasing the efficiency of ultrasonic cleaning. BRIEF DESCRIPTION OF DRAWINGS

[0022] In order to more clearly illustrate the schemes in the application, the drawings needed in the following embodiment description will be briefly introduced. Obviously, the drawings in the following description are some embodiments of the application, and other drawings can be obtained by those skilled in the art without creative labor.

[0023] Figure 1 The overall structure schematic diagram of the device for ultrasonic cleaning of a quartz tube of a tube furnace provided by the application is shown in the figure.

[0024] Figure 2 The overall rear view structure schematic diagram of the device for ultrasonic cleaning of a quartz tube of a tube furnace provided by the application is shown in the figure.

[0025] Figure 3 The connection structure schematic diagram of the lifting adjusting mechanism and the quartz tube cleaning mechanism of the device for ultrasonic cleaning of a quartz tube of a tube furnace provided by the application is shown in the figure.

[0026] Figure 4 The structure schematic diagram of the quartz tube cleaning mechanism of the device for ultrasonic cleaning of a quartz tube of a tube furnace provided by the application is shown in the figure.

[0027] Figure 5 The device for ultrasonic cleaning of a quartz tube of a tube furnace provided by the application Figure 4 The enlarged structure schematic diagram of position A in the device for ultrasonic cleaning of a quartz tube of a tube furnace provided by the application is shown in the figure.

[0028] Figure 6 The structure schematic diagram of the cleaning brush in the quartz tube cleaning mechanism of the device for ultrasonic cleaning of a quartz tube of a tube furnace provided by the application is shown in the figure.

[0029] Figure 7 The internal structure schematic diagram of the sliding sleeve of the device for ultrasonic cleaning of a quartz tube of a tube furnace provided by the application is shown in the figure.

[0030] Figure 8 The device for ultrasonic cleaning of the quartz tube of the tubular furnace provided by the application is connected with the quartz tube fixing structure of the ultrasonic cleaning tank through the connection structure.

[0031] Figure 9 The internal structure of the quartz tube fixing structure of the device for ultrasonic cleaning of the quartz tube of the tubular furnace provided by the application is shown in the schematic view.

[0032] Figure 10 The device for ultrasonic cleaning of the quartz tube of the tubular furnace provided by the application Figure 6 The enlarged structure at B in the middle is shown in the schematic view.

[0033] The labels in the figure are explained as follows:

[0034] 1, ultrasonic cleaning tank; 2, lifting adjusting mechanism; 3, quartz tube cleaning mechanism; 4, quartz tube fixing structure; 5, electric telescopic rod; 6, side support plate; 7, top frame; 8, connecting seat; 9, guide rod; 10, first speed reducer motor; 11, screw rod; 12, light rod; 13, moving seat; 14, connecting frame; 15, bearing block; 16, guide frame; 17, sliding groove; 18, sliding rod; 19, second speed reducer motor; 20, drive shaft; 21, transmission wheel; 22, driven wheel; 23, belt; 24, first support disc; 25, first spring; 26, sliding sleeve; 27, second support disc; 28, first connecting rod; 29, second connecting rod; 30, clamping frame; 31, cleaning brush; 32, contact; 33, guide groove; 34, guide rod; 35, avoiding groove; 36, feeding groove; 37, touch plate; 38, rectangular frame; 39, rectangular groove; 40, lifting plate; 41, lifting rod; 42, second spring; 43, vertical rod; 44, fixing ring; 45, ultrasonic generator. DETAILED DESCRIPTION

[0035] In order for those skilled in the art to better understand the technical scheme of the present application, the technical scheme in the embodiments of the present application will be described clearly and completely below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor should belong to the scope of protection of the present application.

[0036] As described in the background, general ultrasonic cleaning can only clean the dirt accumulated on the surface of the quartz tube, but after high-temperature treatment, a carbonized layer will be formed inside the quartz tube, which is residual on the surface of the quartz tube when other materials are heated, so that the ultrasonic cleaning cannot achieve complete cleaning.

[0037] In order to solve this technical problem, the present application provides a device for ultrasonic cleaning of the quartz tube of the tubular furnace.

[0038] Specifically, refer to Figures 1-9 The device for ultrasonic cleaning of a tubular furnace quartz tube specifically comprises an ultrasonic cleaning tank 1, a lifting adjusting mechanism 2 arranged at the upper end of the ultrasonic cleaning tank 1, a quartz tube cleaning mechanism 3 arranged in the interior of the lifting adjusting mechanism 2, and a quartz tube fixing structure 4 arranged in the interior of the ultrasonic cleaning tank 1.

[0039] The lifting adjusting mechanism 2 comprises two electric telescopic rods 5 fixedly connected to the back of the ultrasonic cleaning tank 1, a top frame 7 arranged at the upper end of the ultrasonic cleaning tank 1, and an ultrasonic generator 45 fixedly connected to the bottom end of the ultrasonic cleaning tank 1.

[0040] The device for ultrasonic cleaning of a tubular furnace quartz tube provided by the application can realize comprehensive cleaning of the interior of the quartz tube through the quartz tube cleaning mechanism 3, the cleaning brush 31 extending to the interior of the quartz tube, the sliding sleeve 26 sliding on the surface of the driving shaft 20 through the contact 32 extrusion, the first connecting rod 28 cooperating with the second connecting rod 29 to push the clamping frame 30 to extend so that the cleaning brush 31 is tightly attached to the inner wall of the quartz tube, and the driving of the second speed reducer 19, and can further improve the cleaning effect through the sound emission of the ultrasonic generator 45 in the interior of the ultrasonic cleaning tank 1.

[0041] In order for the personnel in the technical field to better understand the application scheme, the technical solutions in the embodiments of the application will be clearly and completely described below in combination with the drawings.

[0042] Embodiment 1

[0043] Please refer to Figures 1-9 The device for ultrasonic cleaning of a tubular furnace quartz tube specifically comprises an ultrasonic cleaning tank 1, a lifting adjusting mechanism 2 arranged at the upper end of the ultrasonic cleaning tank 1, a quartz tube cleaning mechanism 3 arranged in the interior of the lifting adjusting mechanism 2, and a quartz tube fixing structure 4 arranged in the interior of the ultrasonic cleaning tank 1.

[0044] The lifting adjusting mechanism 2 comprises two electric telescopic rods 5 fixedly connected to the back of the ultrasonic cleaning tank 1, a top frame 7 arranged at the upper end of the ultrasonic cleaning tank 1, and an ultrasonic generator 45 fixedly connected to the bottom end of the ultrasonic cleaning tank 1.

[0045] Specifically, the interior of the ultrasonic cleaning tank 1 is fixedly provided with a rectangular frame 38, both sides of the ultrasonic cleaning tank 1 are provided with avoiding grooves 35, and the front face of the ultrasonic cleaning tank 1 is provided with a feeding groove 36.

[0046] Specifically, the two sides of the rectangular frame 38 are provided with rectangular grooves 39, the inside of the rectangular frame 38 is slidably connected with a lifting plate 40, the bottom surface of the lifting plate 40 is fixedly connected with a lifting rod 41, the two ends of the lifting rod 41 are slidably arranged on the inner wall of the rectangular groove 39, the inside of the rectangular frame 38 is provided with a second spring 42, the top surface of the lifting plate 40 is fixedly connected with a vertical rod 43, the upper end of the vertical rod 43 is provided with a fixing ring 44, the fixing ring 44 is arranged in a clamping manner with the vertical rod 43, and the bottom end of the fixing ring 44 is connected in a plug-in manner through the socket provided on the top end of the vertical rod 43.

[0047] Through the above structural design, when the device is used, first, the upper end of the vertical rod 43 is replaced with a suitable fixing ring 44, then the quartz tube is installed in the inside of the fixing ring 44 through the feeding groove 36, and after the completion, the first speed reducer 10 is started, the first speed reducer 10 drives the screw rod 11 to rotate, and then the connecting frame 14 can be driven to move to one side of the first speed reducer 10.

[0048] Embodiment 2

[0049] The device for cleaning the quartz tube of the ultrasonic cleaning tube furnace provided in Embodiment 1 is further optimized, specifically, as shown in Figures 3-7 The side of the top frame 7 is fixedly connected with a side support plate 6, the side support plate 6 is fixedly connected to the output end of the electric telescopic rod 5, the four corners of the top frame 7 are respectively fixedly connected with connecting seats 8, the inside of the connecting seat 8 is respectively fixedly connected with guide rods 9, and the guide rods 9 are slidably arranged on the front and back sides of the ultrasonic cleaning pool 1.

[0050] Specifically, the quartz tube cleaning mechanism 3 includes two light rods 12 symmetrically and fixedly arranged in the inside of the top frame 7, the inside of the top frame 7 is fixedly connected with a first speed reducer 10, the transmission end of the first speed reducer 10 is rotatably connected with a screw rod 11, the surface of the screw rod 11 is threadedly connected with a moving seat 13, and the moving seat 13 is slidably connected to the surface of the light rod 12.

[0051] Specifically, the bottom end of the moving seat 13 is fixedly connected with a connecting frame 14, the top surface of the connecting frame 14 is fixedly connected with a guide frame 16, the inside of the guide frame 16 is provided with a sliding groove 17, the surface of the screw rod 11 is slidably connected with a bearing block 15, the bearing block 15 is arranged in the inside of the sliding groove 17, the bearing block 15 is arranged on the side of the top frame 7 close to the first speed reducer 10, the bottom end of the bearing block 15 is fixedly connected with a sliding rod 18, and the sliding rod 18 is slidably arranged on the inner wall of the sliding groove 17.

[0052] Specific, the inside sliding connection of connecting frame 14 has slide bar 18, the whole of connecting frame 14 is L-shaped, the surface of the short end of connecting frame 14 is fixedly connected with second speed reducer 19, the transmission end of second speed reducer 19 is rotatably connected with transmission wheel 21, the inside of connecting frame 14 is rotatably connected with drive shaft 20, the end of drive shaft 20 close to transmission wheel 21 is fixedly connected with driven wheel 22, driven wheel 22 and transmission wheel 21 are drivingly connected through belt 23.

[0053] Specific, the surface of drive shaft 20 is fixedly connected with first support disc 24, the surface of drive shaft 20 is provided with guide groove 33, the surface of drive shaft 20 is sleeved with sliding sleeve 26, the inside of sliding sleeve 26 is fixedly connected with guide rod 34, guide rod 34 is slidingly arranged in the inside of guide groove 33.

[0054] Specific, the end of sliding sleeve 26 away from first support disc 24 is fixedly connected with second support disc 27, the surface of drive shaft 20 is sleeved with first spring 25, the surface of first support disc 24 is hingedly connected with second connecting rod 29, the side of second support disc 27 close to first support disc 24 is hingedly connected with first connecting rod 28, the ends of first connecting rod 28 and second connecting rod 29 close to each other are hingedly connected with clamping frame 30, the surface of clamping frame 30 is fixedly connected with cleaning brush 31, the inside of ultrasonic cleaning tank 1 is fixedly connected with touch plate 37, the side of second support disc 27 away from first support disc 24 is fixedly connected with contact head 32.

[0055] Through the above structure design, moving seat 13 drives connecting frame 14 to move, at the same time, drive shaft 20 at the bottom passes through avoiding groove 35 and is inserted into the inside of quartz tube, drive shaft 20 continuously moves to make contact head 32 contact with touch plate 37, at this time, contact head 32 applies reaction force to second support disc 27, at the same time, second support disc 27 slides on the surface of drive shaft 20 and compresses first spring 25, second support disc 27 and first support disc 24 move close to each other at the same time, second connecting rod 29 and first connecting rod 28 extend outward, first connecting rod 28 and second connecting rod 29 extend at the same time to push clamping frame 30 to drive cleaning brush 31 to tightly contact with the inner wall of quartz tube.

[0056] At this time, electric telescopic rod 5 is turned on to make its output end contract, at the same time, electric telescopic rod 5 output end contracts to pull top frame 7 to move downward through side support plate 6, at the same time, guide rod 9 slides downward in the inside of ultrasonic cleaning tank 1.

[0057] The top frame 7 moves while driving the connecting frame 14 and the drive shaft 20 to descend as a whole. The drive shaft 20 drives the cleaning brush 31 to descend while descending. The cleaning brush 31 pulls the quartz tube inside the fixed ring 44 to move to the inside of the ultrasonic cleaning tank 1. The fixed ring 44 is stressed and transmitted to the lifting plate 40 through the stand rod 43. The lifting plate 40 is extruded to drive the lifting rod 41 to slide downward in the rectangular groove 39 and compress the second spring 42 at the same time. Until the quartz tube is completely soaked in the inside of the ultrasonic cleaning tank 1, the ultrasonic generator 45 and the second reduction motor 19 are turned on. The second reduction motor 19 drives the transmission wheel 21 to rotate through the belt 23 to drive the driven wheel 22 to rotate. The driven wheel 22 drives the drive shaft 20 to rotate while driving the cleaning brush 31 to rotate in the inside of the quartz tube and clean, cooperating with the ultrasonic cleaning of the ultrasonic generator 45. After cleaning, the electric telescopic rod 5 pushes the top frame 7 to rise. At this time, the quartz tube rises from the water, and after completion, the second reduction motor 19 and the ultrasonic generator 45 are turned off. The first reduction motor 10 is turned on. The first reduction motor 10 reverses to drive the lead screw 11 to rotate reversely. At this time, the moving seat 13 drives the connecting frame 14 to move away from the side of the first reduction motor 10. At the same time, the contact 32 gradually reduces the pressure. The second connecting rod 29 and the first connecting rod 28 shrink inward. The first spring 25 pushes the second support disc 27 to reset. The first connecting rod 28 and the second connecting rod 29 flip while the cleaning brush 31 stops contacting the inner wall of the quartz tube. After the whole quartz tube cleaning mechanism 3 is taken out from the inside of the quartz tube, the fixed ring 44 can be opened to take out the cleaned quartz tube.

Claims

1. A device for ultrasonically cleaning quartz tubes in a tubular furnace, characterized in that; Including ultrasonic cleaning tank (1), the upper end of ultrasonic cleaning tank (1) is provided with lifting adjusting mechanism (2), the inside of lifting adjusting mechanism (2) is provided with quartz tube cleaning mechanism (3), the inside of ultrasonic cleaning tank (1) is provided with quartz tube fixing structure (4); The lifting adjusting mechanism (2) includes two electric telescopic rods (5) fixedly connected to the back of the ultrasonic cleaning tank (1), the upper end of the ultrasonic cleaning tank (1) is provided with a top frame (7), and the bottom end of the ultrasonic cleaning tank (1) is fixedly connected with an ultrasonic generator (45); The quartz tube cleaning mechanism (3) includes two light poles (12) symmetrically fixed in the inside of the top frame (7), the inside of the top frame (7) is fixedly connected with a first speed reducer motor (10), the transmission end of the first speed reducer motor (10) is rotatably connected with a lead screw (11), the surface of the lead screw (11) is threadedly connected with a moving seat (13), and the moving seat (13) is slidably connected to the surface of the light pole (12); The bottom end of the moving seat (13) is fixedly connected with a connecting frame (14), the top surface of the connecting frame (14) is fixedly connected with a guide frame (16), the inside of the guide frame (16) is provided with a sliding groove (17), the surface of the lead screw (11) is slidably connected with a bearing block (15), the bearing block (15) is arranged in the inside of the sliding groove (17), and the bearing block (15) is arranged on the side of the top frame (7) close to the first speed reducer motor (10), the two sides of the bearing block (15) are fixedly connected with sliding rods (18), and the sliding rods (18) are slidably arranged on the inner wall of the sliding groove (17); The inside of the connecting frame (14) is slidably connected with a sliding rod (18), the connecting frame (14) is L-shaped as a whole, the surface of the short end of the connecting frame (14) is fixedly connected with a second speed reducer motor (19), the transmission end of the second speed reducer motor (19) is rotatably connected with a transmission wheel (21), the inside of the connecting frame (14) is rotatably connected with a drive shaft (20), one end of the drive shaft (20) close to the transmission wheel (21) is fixedly connected with a driven wheel (22), and the driven wheel (22) is drivingly connected with a belt (23) through the belt (23); The surface of the drive shaft (20) is fixedly connected with a first support disc (24), the surface of the drive shaft (20) is provided with a guide groove (33), the surface of the drive shaft (20) is provided with a sliding sleeve (26), the inside of the sliding sleeve (26) is fixedly connected with a guide rod (34), and the guide rod (34) is slidably arranged in the inside of the guide groove (33); The second support disc (27) is fixedly connected with the first support disc (24) away from one end of the sliding sleeve (26), the surface of the drive shaft (20) is sleeved with the first spring (25), the surface of the first support disc (24) is hingedly connected with the second connecting rod (29), the surface of the second support disc (27) close to the first support disc (24) is hingedly connected with the first connecting rod (28), the ends of the first connecting rod (28) and the second connecting rod (29) close to each other are hingedly connected with the clamping frame (30), the surface of the clamping frame (30) is fixedly connected with the cleaning brush (31), the inside of the ultrasonic cleaning tank (1) is fixedly connected with the touch plate (37), and the surface of the second support disc (27) away from the first support disc (24) is fixedly connected with the contact (32). The inside of the ultrasonic cleaning tank (1) is fixedly provided with the rectangular frame (38), both sides of the ultrasonic cleaning tank (1) are provided with the avoiding groove (35), and the front surface of the ultrasonic cleaning tank (1) is provided with the feeding groove (36). Both sides of the rectangular frame (38) are provided with the rectangular groove (39), the inside of the rectangular frame (38) is slidably connected with the lifting plate (40), the bottom surface of the lifting plate (40) is fixedly connected with the lifting rod (41), both ends of the lifting rod (41) are slidably arranged on the inner wall of the rectangular groove (39), the inside of the rectangular frame (38) is provided with the second spring (42), the top surface of the lifting plate (40) is fixedly connected with the vertical rod (43), the upper end of the vertical rod (43) is provided with the fixed ring (44), and the fixed ring (44) and the vertical rod (43) are clamped.

2. The apparatus for ultrasonically cleaning a quartz tube of a tube furnace according to claim 1, wherein One side of the top frame (7) is fixedly connected with the side support plate (6), the side support plate (6) is fixedly connected with the output end of the electric telescopic rod (5), four corners of the top frame (7) are respectively fixedly connected with the connecting seat (8), the inside of the connecting seat (8) is respectively fixedly connected with the guide rod (9), and the guide rod (9) is slidably arranged on the front and rear sides of the ultrasonic cleaning tank (1).

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