A motion mechanism

Abstract

The application provides a motion mechanism, and relates to the technical field of semiconductor manufacturing. The motion mechanism comprises a bottom plate, a first motion plate arranged above the bottom plate, a first driving mechanism connected with the first motion plate through a first direction spring sheet module, a second motion plate arranged above the first motion plate, and a second driving mechanism connected with the second motion plate; two first driving mechanisms are used for driving the first motion plate to move along a first direction or rotate around a third direction relative to the bottom plate through corresponding first direction spring sheet modules; the second driving mechanism is used for driving the second motion plate to move along a second direction relative to the first motion plate; the second direction is perpendicular to the first direction, a plane where the first direction and the second direction are located is the same plane as the bottom plate, and the third direction is perpendicular to the first direction and the second direction.

Description

TECHNICAL FIELD

[0001] The present specification relates to the technical field of semiconductor manufacturing, and in particular, to a motion mechanism. BACKGROUND

[0002] An XYT motion module is a motion module that can control two linear translation axes and one rotation axis simultaneously. The XYT motion module can control the translation of a driven member along an X-axis and / or a Y-axis in a plane, while controlling the rotational motion of the driven member around an axis perpendicular to the XY plane, where T can represent the rotation angle. The XYT motion module can include a base plate, a carrier plate supported by air floating on the base plate, and a linear motion system, the carrier plate being used to carry, connect or fix the driven member, and the linear motion system being capable of driving the carrier plate to move or rotate relative to the base plate. However, the XYT motion module using air floating support has a large number of pipelines, high control and structural complexity. In addition, the XYT motion module using air floating support occupies a large planar size space and cannot achieve large-angle precise rotational motion. SUMMARY

[0003] One or more embodiments of the present specification provide a motion mechanism, comprising: a base plate, a first motion plate arranged above the base plate, a first driving mechanism connected to the first motion plate through a first direction spring sheet module, a second motion plate arranged above the first motion plate, and a second driving mechanism connected to the second motion plate; two first driving mechanisms are used to drive the first motion plate to move relative to the base plate along a first direction or rotate around a third direction through corresponding first direction spring sheet modules; the second driving mechanism is used to drive the second motion plate to move relative to the first motion plate along a second direction; the second direction is perpendicular to the first direction, the plane where the first direction and the second direction are located is the same plane as the base plate, and the third direction is perpendicular to the first direction and the second direction.

[0004] In some embodiments, the first motion plate is configured to be able to rotate around a rotation axis, and the two first driving mechanisms are symmetrically arranged relative to the rotation axis; the first direction spring sheet module is configured such that a part of the first direction spring sheet module is able to translate along the first direction; and the first driving mechanism is configured to be able to provide linear power along the first direction to the corresponding first direction spring sheet module, while being able to translate along the second direction.

[0005] In some embodiments, the first direction spring module comprises a first direction compensation decoupling mechanism connected with the first driving mechanism and a first direction differential decoupling mechanism connecting the first direction compensation decoupling mechanism and the first motion plate; the first direction compensation decoupling mechanism is configured to be rigid in the first direction, flexible for rotation around the second direction and rotation around the third direction; the first direction differential decoupling mechanism is configured to be rigid in the third direction, rigid for rotation around the first direction and rotation around the second direction, and flexible for rotation around the third direction.

[0006] In some embodiments, the first direction differential decoupling mechanism comprises a first member, a second member and a first direction differential decoupling spring connecting the first member and the second member; the first member and the second member are both rigid members; the first member connects the first motion plate and the first direction compensation decoupling mechanism; the second member is configured to be able to translate in the first direction; the first direction differential decoupling spring is configured to be rigid in the third direction, rigid for rotation around the first direction and rotation around the second direction, and flexible for rotation around the third direction.

[0007] In some embodiments, the first direction differential decoupling mechanism further comprises a first direction guiding module arranged between the second member and the bottom plate for guiding the second member in the first direction.

[0008] In some embodiments, the first direction differential decoupling spring comprises a first part extending in the first direction and a second part extending in the second direction connected with the first part; one of the first part and the second part is fixedly connected with the first member, and the other of the first part and the second part is fixedly connected with the second member.

[0009] In some embodiments, the motion mechanism further comprises a parasitic displacement compensation guiding module arranged between the first driving mechanism and the bottom plate for guiding the first driving mechanism in the second direction.

[0010] In some embodiments, the first direction differential decoupling mechanism comprises one or more first direction differential decoupling spring groups; each of the first direction differential decoupling spring groups comprises two first direction differential decoupling springs arranged in axial symmetry.

[0011] In some embodiments, one of the first member and the second member is provided with one or more reed limiting structures, and the other of the first member and the second member is provided with one or more reed limiting slots matching the shape of the reed limiting structures; the reed limiting structures and the reed limiting slots match to limit the position of the first member relative to the second member in the first direction, in the second direction, and / or in rotation around the third direction.

[0012] In some embodiments, the motion mechanism further comprises a first-direction intermediate guiding module provided on the bottom plate, the first-direction intermediate guiding module comprising an intermediate guiding rail fixedly connected with the bottom plate, an intermediate guiding slider provided on the intermediate guiding rail, and a rotating member fixedly connected with the intermediate guiding slider, the first motion plate being capable of rotating around a third direction relative to the rotating member; the rotating member provides a rotation axis, and the first motion plate is configured to be capable of rotating around the rotation axis.

[0013] In some embodiments, the rotating member comprises a bearing mounting seat fixedly connected with the intermediate guiding slider, a bearing pressing cap provided on the bearing mounting seat, and a bearing provided between the bearing mounting seat and the bearing pressing cap; the first motion plate is in interference fit with the bearing; the first motion plate is configured to be capable of displacing and being fixed in the third direction relative to the bearing.

[0014] In some embodiments, the bearing mounting seat is provided with one or more bearing mounting seat extension structures; the motion mechanism further comprises a first-direction position measuring mechanism and / or a third-direction rotation position measuring mechanism; the first-direction position measuring mechanism is provided on one of the bearing mounting seat extension structures, and the third-direction rotation position measuring mechanism is provided on another of the bearing mounting seat extension structures.

[0015] In some embodiments, the motion mechanism further comprises a brake assembly, the brake assembly comprising a fixed base fixedly connected with the second motion plate, an air-floating brake block provided between the bottom plate and the first motion plate, and a brake spring connecting the fixed base and the air-floating brake block; the air-floating brake block is configured to provide positive pressure, negative pressure, or no gas to the bottom plate; the brake spring is configured to be flexible in the third direction.

[0016] In some embodiments, the two first driving mechanisms are arranged in mirror symmetry relative to a plane in which the rotation axis is located; or, the two first driving mechanisms are arranged in central symmetry relative to a point on the rotation axis.

[0017] The beneficial effects that the embodiments of the specification can bring include but are not limited to: (1) the movement of the first movement plate relative to the base plate is guided by the first direction spring piece module, avoiding the use of air floating guidance, reducing the number of pipelines, and having lower control and structure complexity; (2) the first driving mechanism is configured to be able to translate along the second direction, avoiding the influence of the parasitic motion of the first driving mechanism caused by the rotation of the first movement plate on the degree of freedom, while maintaining the driving accuracy of the first driving mechanism in the first direction; (3) the installation position deviation of the first driving mechanism is avoided by the first direction compensation decoupling mechanism; (4) the rotation of the first movement plate is avoided by the first direction differential decoupling mechanism; (5) the spring piece limiting structure of the first direction differential decoupling mechanism can limit the displacement and rotation between the first member and the second member, preventing plastic deformation of the weak part of the first direction differential decoupling spring piece caused by unexpected situations; (6) the intermediate guide module can improve the stiffness of the first movement plate in the second direction, reducing or avoiding the displacement of the first movement plate in the second direction; (7) the intermediate guide module can guide the rotation of the first movement plate, and the intermediate guide module will not affect the displacement of the first movement plate in the first direction; (8) the bearing mounting seat extension structure allows the first direction position measuring mechanism and / or the third direction rotary position measuring mechanism to be arranged on the intermediate guide module, so that the first direction position measuring mechanism and / or the third direction rotary position measuring mechanism can be close to the geometric center of the first movement plate, thereby avoiding signal loss caused by translation or rotation of the first movement plate, and obtaining a larger measurement range; (9) the brake assembly can realize the position locking of the second movement plate after reaching the position; (10) the mirror image arrangement of the two first driving mechanisms can make the outgoing directions of the two first driving mechanisms located on the same side, simplifying the wiring; (11) the central symmetry arrangement of the two first driving mechanisms can avoid using additional mirror image processing parts. It should be noted that different embodiments can have different beneficial effects, and in different embodiments, the beneficial effects that can be produced can be any one or a combination of the above, or any other beneficial effects that can be obtained. BRIEF DESCRIPTION OF DRAWINGS

[0018] The specification will be further illustrated in the form of exemplary embodiments, which will be described in detail with reference to the accompanying drawings. The same reference numbers in the drawings represent the same structures or steps.

[0019] Figure 1 is a perspective view of a movement mechanism according to some embodiments of the specification.

[0020] Figure 2 is a side view of a movement mechanism according to some embodiments of the specification.

[0021] Figure 3is a schematic view of an inverted state of a motion mechanism according to some embodiments of the present specification.

[0022] Figure 4 is an exploded schematic view of a first motion plate and a second motion plate of a motion mechanism according to some embodiments of the present specification.

[0023] Figure 5 is a schematic view of a second drive mechanism and a second direction compensation decoupling mechanism of a motion mechanism according to some embodiments of the present specification.

[0024] Figure 6 is a schematic view of a second direction compensation decoupling mechanism of a motion mechanism according to some embodiments of the present specification.

[0025] Figure 7 、 Figure 8 is an exploded schematic view of a motion mechanism according to some embodiments of the present specification.

[0026] Figure 9 is a schematic view of a first drive mechanism and a first direction leaf spring module of a motion mechanism according to some embodiments of the present specification.

[0027] Figure 10 is a schematic view of a parasitic displacement of a motion mechanism according to some embodiments of the present specification.

[0028] Figure 11 is a schematic view of a first direction leaf spring module according to some embodiments of the present specification.

[0029] Figure 12 is a schematic view of a first direction leaf spring module according to some other embodiments of the present specification.

[0030] Figure 13 is a schematic view of a first direction intermediate guiding module according to some embodiments of the present specification.

[0031] Figure 14 is a sectional view of a first direction intermediate guiding module according to some embodiments of the present specification.

[0032] Figure 15 is a schematic view of a first direction intermediate guiding module according to some other embodiments of the present specification.

[0033] Figure 16 is a sectional view of a first direction intermediate guiding module according to some other embodiments of the present specification.

[0034] Figure 17 is a schematic view of a band brake assembly according to some embodiments of the present specification.

[0035] Figure 18 is a schematic view of a brake spring according to some embodiments of the present specification.

[0036] Figure Mark: 1 Base plate; 2 First movement plate; 3 First direction spring module; 31 First direction compensation decoupling mechanism; 311 First direction compensation decoupling mechanism first structural part; 312 First direction compensation decoupling mechanism first spring; 313 First direction compensation decoupling mechanism second structural part; 314 First direction compensation decoupling mechanism second spring; 32 First direction differential decoupling mechanism; 321 First member; 322 Second member; 323 First direction differential decoupling spring; 3231 First part; 3232 Second part; 324 First direction guide module; 325 Spring limiting structure; 326 Spring limiting groove; 4 First driving mechanism; 41 Parasitic displacement compensation guide module; 5 Second movement plate; 6 Second driving mechanism; 61 Second direction compensation decoupling mechanism; 611 Second direction compensation decoupling mechanism first structural part; 612 Second direction compensation decoupling mechanism first spring; 613 Second direction compensation decoupling mechanism second structural part; 614 Second direction compensation decoupling mechanism second spring; 7 First direction intermediate guide module; 71 Intermediate guide rail; 72 Intermediate guide slider; 73 Rotating member; 731 Bearing mounting seat; 7311 Bearing mounting seat extension structure; 732 Bearing gland; 733 Bearing; 81 First direction position measurement mechanism; 811 First direction position measurement read head; 812 First direction position measurement grating ruler; 82 Third direction rotating position measurement mechanism; 821 Third direction rotating position measurement read head; 822 Third direction rotating position measurement grating ruler; 9 Brake assembly; 91 Fixed base; 92 Air floating brake block; 93 Brake spring; 931 Brake spring first part; 932 Brake spring second part. DETAILED DESCRIPTION

[0037] In order to more clearly illustrate the technical solutions of the embodiments of the present specification, the embodiments will be described in detail below with reference to the drawings. Obviously, the following description is some examples or embodiments of the present specification, and those skilled in the art can also apply the technical solutions or means disclosed in the present specification to other scenarios without creative labor.

[0038] It should be understood that the terms "system", "apparatus", "device", "unit", "module" and / or "means" used in the present specification are used in a manner to indicate different components, elements, parts, sections, or assemblies of different levels of abstraction. However, if other words can achieve the same purpose, the words can be replaced by other expressions.

[0039] In the present specification, the technical terms of components, elements, etc. described in the present specification are not intended to refer to a single number, but can also include a plurality. Generally, the terms "include", "comprise" and the like indicate only the inclusion of the steps, elements or components explicitly identified, and these steps, elements and components do not constitute an exclusive list, and the method or device described can also include other steps or components.

[0040] In the description of the present specification, it should be understood that the orientation description, such as the orientation or position relationship indicated by up, down, front, back, left, right, etc. is based on the orientation or position relationship shown in the drawings, and is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In the description of the present specification, unless otherwise expressly limited, the words of arrangement, installation, connection, etc. should be broadly understood, and those skilled in the art can reasonably determine the specific meaning of the above words in the present specification in combination with the specific content of the technical solution.

[0041] The XYT motion module (or XYθ motion module) is a motion module that can control the motion of two linear translation axes (for example, X-axis and Y-axis) and a rotation axis (for example, T-axis, Theta-axis or θ-axis) at the same time. In some embodiments, the XYT motion module can control the translation of a driven member along the X-axis and / or the Y-axis in a plane, while controlling the rotational motion of the driven member around an axis perpendicular to the XY plane (for example, Z-axis), where T or θ can represent the rotation angle.

[0042] In some related embodiments, the XYT motion module can include a base plate, a carrier plate supported by air floating on the base plate, and a linear motion system capable of driving the carrier plate to move or rotate relative to the base plate. However, the XYT motion module using air floating support has many pipelines, high control and structural complexity. In addition, the XYT motion module using air floating support occupies a large planar size space and cannot achieve large-angle precise rotational motion.

[0043] Therefore, in one or more embodiments of the present specification, a motion mechanism is provided, which is decoupled by a spring piece module cooperating with a guide, without using an air floating mechanism, reducing the pipeline arrangement, and having a simple control and structure, occupying a small planar size space.

[0044] Figure 1 is a perspective view of a motion mechanism according to some embodiments of the present specification, Figure 2 is a side view of a motion mechanism according to some embodiments of the present specification, Figure 3 is a schematic view of an inverted state of a motion mechanism according to some embodiments of the present specification, Figure 4 is an exploded view of a first motion plate and a second motion plate of a motion mechanism according to some embodiments of the present specification. Referring to Figures 1 to 4 In one or more embodiments of the present specification, a motion mechanism can include a base plate 1, a first motion plate 2 arranged above the base plate 1, a first driving mechanism 4 connected to the first motion plate 2 via a first directional leaf spring module 3, a second motion plate 5 arranged above the first motion plate 2, and a second driving mechanism 6 connected to the second motion plate 5. In some embodiments, the base plate 1 is used as a fixed base of the motion mechanism. In some embodiments, the base plate 1 can be fixed to the upper surface of a structure such as the ground, a support, a base, etc. In other embodiments, the base plate 1 can also be arranged on the lower surface of a structure such as a ceiling, a beam, etc. In other words, the motion mechanism in one or more embodiments of the present specification can be arranged in a forward direction or in a reverse direction (i.e. a suspended arrangement). In some embodiments, the second motion plate 5 is used to realize the connection with a driven member. In some embodiments, the second motion plate 5 can form a carrier plate for carrying the driven member, or the second motion plate 5 can be connected to a carrier plate for carrying the driven member.

[0045] In some embodiments, two first driving mechanisms 4 are used to drive the first motion plate 2 to move along a first direction Y or rotate around a third direction Z relative to the base plate 1 via corresponding first directional leaf spring modules 3. In some embodiments, the two first driving mechanisms 4 can be linear driving mechanisms, such as shaft motors.

[0046] In some embodiments, referring to Figure 7 In some embodiments, the two first driving mechanisms 4 are arranged in parallel, and the driving portions of the two first driving mechanisms 4 have the same arrangement direction. In this embodiment, the driving portions of the two first driving mechanisms 4 move in the same direction synchronously (e.g. the driving portions of the two first driving mechanisms 4 extend synchronously at the same time), thereby realizing the movement (e.g. translation) of the first motion plate 2 along the first direction Y relative to the base plate 1. In this embodiment, the driving portions of the two first driving mechanisms 4 move in opposite directions (e.g. the driving portion of one first driving mechanism 4 extends, and the driving portion of the other first driving mechanism 4 retracts), thereby realizing the rotation of the first motion plate 2 around the third direction Z relative to the base plate 1.

[0047] In some embodiments, referring to Figure 8As shown, two first driving mechanisms 4 can be arranged in parallel, and the driving portions of the two first driving mechanisms 4 have different arrangement directions. In this embodiment, the driving portions of the two first driving mechanisms 4 move synchronously in opposite directions (e.g. the driving portion of one first driving mechanism 4 extends by a distance, and the driving portion of the other first driving mechanism 4 retracts by the same distance), so as to realize the movement (e.g. translation) of the first movement plate 2 relative to the base plate 1 along the first direction Y. In this embodiment, the driving portions of the two first driving mechanisms 4 move synchronously in the same direction (e.g. the driving portions of the two first driving mechanisms 4 extend at the same time), so as to realize the rotation of the first movement plate 2 relative to the base plate 1 around the third direction Z.

[0048] In some embodiments, the first direction spring module 3 is used to realize the decoupling between the first driving mechanism 4 and the first movement plate 2. In some embodiments, decoupling refers to decomposing the movement of a component (e.g. the first movement plate 2) in its movement direction into movement in one or more other directions, so as to eliminate or significantly reduce the mutual influence (or coupling) between different degrees of freedom (different movement directions or movement types).

[0049] For example, the two first driving mechanisms 4 are configured to provide power to the first movement plate 2 along the first direction Y, the synchronous movement of the two first driving mechanisms 4 drives the translation of the first movement plate 2, and the differential drive of the two first driving mechanisms 4 drives the rotation of the first movement plate 2. Since the first movement plate 2 can have translation, rotation, or rotation while translating, the connection position of the first movement plate 2 connected to the first driving mechanism 4 can have translation or rotation, and if the driving portion of the first driving mechanism 4 is directly connected to the connection position, interference between different movements may occur during translation or rotation. In some embodiments, the first driving mechanism 4 is connected to the connection position of the first movement plate 2 through the first direction spring module 3, and the decoupling of the first direction spring module 3 avoids the above-mentioned interference between different movements.

[0050] In some embodiments, the first direction spring module 3 is configured to be flexible for rotation around the third direction Z. In some embodiments, the first direction spring module 3 can be further configured to be flexible for rotation around the second direction X.

[0051] In some embodiments, the second driving mechanism 6 is used to drive the second movement plate 5 to move relative to the first movement plate 2 along the second direction X. In some embodiments, referring to Figure 5 As shown, the second driving mechanism 6 can be a linear driving mechanism, such as a shaft motor.

[0052] In some embodiments, the second direction X is perpendicular to the first direction Y, the plane XY in which the first direction Y and the second direction X lie is the same plane in which the base plate 1 lies, and the third direction Z is perpendicular to the first direction Y and the second direction X. In some embodiments, the first motion plate 2 is parallel to the base plate 1. In some embodiments, the second motion plate 5 is parallel to the first motion plate 2. In other embodiments, the second direction X can intersect the first direction Y, and the third direction Z is perpendicular to the first direction Y and the second direction X.

[0053] In one or more embodiments of the present specification, the first motion plate 2 is configured to be able to rotate around a rotation axis, and the two first driving mechanisms 4 are symmetrically arranged relative to the rotation axis. In some embodiments, the first motion plate 2 can rotate around a rotation shaft, which provides the rotation axis described above. In some embodiments, the middle part of the first motion plate 2 is provided with a hole, and the rotation shaft is arranged inside the hole.

[0054] In some embodiments, the first direction spring piece module 3 is configured such that a part of the first direction spring piece module 3 is able to translate along the first direction Y to allow the part of the first direction spring piece module 3 to translate with the translation of the first motion plate 2.

[0055] In some embodiments, the first driving mechanism 4 is configured to be able to provide linear power along the first direction Y to the corresponding first direction spring piece module 3 while being able to translate along the second direction X.

[0056] In some embodiments, when the two first driving mechanisms 4 drive the first motion plate 2 to rotate, due to the fixed shape of the first motion plate 2, the span between the two first driving mechanisms 4 changes, thereby causing the overall of each first driving mechanism 4 to generate parasitic motion along the second direction X. For example, as shown in FIG. 2, the length of the first motion plate 2 is constant, the first motion plate 2 extends in the second direction X in the initial state, the driving direction of the two first driving mechanisms 4 is arranged along the first direction Y, and the initial span of the two first driving mechanisms 4 is L0. Figure 10 When the first motion plate 2 rotates by an angle of θ, the span between the two first driving mechanisms 4 changes from the initial span L0 to the rotated span L1. When the first motion plate 2 rotates by an angle of θ, the span between the two first driving mechanisms 4 changes from the initial span L0 to the rotated span L1. When the first motion plate 2 rotates by an angle of θ, the span between the two first driving mechanisms 4 changes from the initial span L0 to the rotated span L1. , , .

[0057] ​In some embodiments, the degree of the reduction of the span is related to the value of the initial span and the value of the rotation angle θ. When the value of θ is small enough, the span can be considered as unchanged; while when a larger angle of rotation of the first motion plate 2 needs to be achieved, the change of the span will act on the first driving mechanism 4, causing the first driving mechanism 4 to displace or rotate, resulting in the change of the driving direction of the first driving mechanism 4, and thus causing the interference between the rotational motion of the first motion plate 2 and the change of the driving direction of the first driving mechanism 4.

[0058] In some embodiments, since the first driving mechanism 4 is configured to be able to translate along the second direction X, the translation provides displacement compensation for the first driving mechanism 4, enabling the two first driving mechanisms 4 to adaptively adjust the span of the two first driving mechanisms 4, avoiding the rotation of the first driving mechanism 4, so that the driving direction of the two first driving mechanisms 4 can remain driving along the first direction Y, thereby avoiding the interference between the rotational motion of the first motion plate 2 and the change of the driving direction of the first driving mechanism 4.

[0059] In some embodiments, referring to Figures 7 to 9 As shown, the motion mechanism further comprises a parasitic displacement compensation guiding module 41 provided between the first driving mechanism 4 and the base plate 1, for guiding the first driving mechanism 4 in the second direction X. In some embodiments, the parasitic displacement compensation guiding module 41 can comprise a guide rail extending along the second direction X and a slider matched with the guide rail. In some embodiments, the guide rail of the parasitic displacement compensation guiding module 41 can be fixedly connected with the base plate 1, and the slider of the parasitic displacement compensation guiding module 41 can be fixedly connected with the first driving mechanism 4, so as to guide the translation of the first driving mechanism 4 in the second direction X.

[0060] In some embodiments, the first driving mechanism 4 can be arranged on a first driving mechanism seat, and the slider of the parasitic displacement compensation guiding module 41 can be fixedly connected with the first driving mechanism seat. In some embodiments, the number of the parasitic displacement compensation guiding modules 41 can be multiple.

[0061] In one or more embodiments of the present specification, referring to Figure 9 As shown, the first direction spring piece module 3 comprises a first direction compensation decoupling mechanism 31 connected with the first driving mechanism 4 and a first direction differential decoupling mechanism 32 connecting the first direction compensation decoupling mechanism 31 and the first motion plate 2.

[0062] In some embodiments, the first direction compensation decoupling mechanism 31 is configured to have rigidity in the first direction Y and flexibility for rotation around the second direction X and rotation around the third direction Z.

[0063] In some embodiments, referring to Figure 9, in combination Figure 11 、 Figure 12 As shown in FIG. 31, the first direction compensation decoupling mechanism 31 can include a first direction compensation decoupling mechanism first structural member 311, a first direction compensation decoupling mechanism first spring 312, a first direction compensation decoupling mechanism second structural member 313, and a first direction compensation decoupling mechanism second spring 314. In some embodiments, the first direction compensation decoupling mechanism first structural member 311 is directly or indirectly fixedly connected with the driving part of the first driving mechanism 4. In some embodiments, the first direction compensation decoupling mechanism first spring 312 connects the first direction compensation decoupling mechanism first structural member 311 and the first direction compensation decoupling mechanism second structural member 313. In some embodiments, the first direction compensation decoupling mechanism second spring 314 directly or indirectly connects the first direction compensation decoupling mechanism second structural member 313 and the first direction differential decoupling mechanism 32.

[0064] In some embodiments, the first direction compensation decoupling mechanism first spring 312 can be parallel to the XY plane, which allows the first direction compensation decoupling mechanism second structural member 313 to rotate around the second direction X relative to the first direction compensation decoupling mechanism first structural member 311.

[0065] In some embodiments, the first direction compensation decoupling mechanism second spring 314 can be parallel to the YZ plane, which allows the first direction differential decoupling mechanism 32 to rotate around the third direction Z relative to the first direction compensation decoupling mechanism second structural member 313.

[0066] The thickness and length of the first direction compensation decoupling mechanism first spring 312 and the first direction compensation decoupling mechanism second spring 314, and other related dimensions, affect their stiffness, which needs to be reasonably designed to have high stiffness in the first direction Y and low stiffness in other directions. In some embodiments, the first direction compensation decoupling mechanism first spring 312 and the first direction compensation decoupling mechanism second spring 314 can be designed with the aid of simulation.

[0067] In some embodiments, the first direction compensation decoupling mechanism 31 can be used to compensate for the driving deviation and / or guiding direction deviation of the first driving mechanism 4 caused by insufficient machining precision and / or installation precision.

[0068] In some embodiments, the first direction differential decoupling mechanism 32 is configured to have rigidity in the third direction Z, rigidity for rotation around the first direction Y and rotation around the second direction X, and flexibility for rotation around the third direction Z.

[0069] In some embodiments, the first direction differential decoupling mechanism 32 comprises a first member 321, a second member 322, and a first direction differential decoupling spring 323 connecting the first member 321 and the second member 322. In some embodiments, the first member 321 and the second member 322 are both rigid members. In some embodiments, the first member 321 is connected to the first motion plate 2 and the first direction compensation decoupling mechanism 31.

[0070] In some embodiments, the first member 321 can be in a C shape. In some embodiments, the second member 322 can be substantially in a rectangular shape. In some embodiments, one end of the first member 321 can protrude from the second member for forming a connection structure with the first direction compensation decoupling mechanism 31 (e.g. the first direction compensation decoupling mechanism second spring 314 of the first direction compensation decoupling mechanism 31).

[0071] In some embodiments, the second member 322 can be arranged within the range of the C shape of the first member 321. In some embodiments, there is a gap between the second member 322 and the first member 321. For example, the second member 322 and the first member 321 have a gap in the first direction Y and the second direction X, so that the second member 322 can rotate relative to the first member 321 around the third direction Z.

[0072] In some embodiments, the second member 322 is configured to be able to translate in the first direction Y. In some embodiments, the first direction differential decoupling mechanism 32 further comprises a first direction guiding module 324 arranged between the second member 322 and the bottom plate 1 for guiding the second member 322 in the first direction Y. In some embodiments, the first direction guiding module 324 can comprise a guide rail extending in the first direction Y and a slider matching the guide rail. In some embodiments, the guide rail of the first direction guiding module 324 can be fixedly connected to the bottom plate 1, and the slider of the first direction guiding module 324 can be fixedly connected to the second member 322, so as to guide the translation of the second member 322 in the first direction Y.

[0073] In some embodiments, the first direction differential decoupling spring 323 is configured to have rigidity in the third direction Z, rigidity for rotation around the first direction Y and the second direction X, and flexibility for rotation around the third direction Z.

[0074] In some embodiments, referring to Figure 9 , in combination with Figure 11 , Figure 12As shown, the first-direction differential decoupling spring 323 includes a first portion 3231 extending in the first direction Y and a second portion 3232 connected to the first portion 3231 and extending in the second direction X. In some embodiments, one of the first portion 3231 and the second portion 3232 is fixedly connected to the first member 321, and the other of the first portion 3231 and the second portion 3232 is fixedly connected to the second member 322.

[0075] In some embodiments, the first-direction spring module 3 includes one or more first-direction differential decoupling spring groups. In some embodiments, each first-direction differential decoupling spring group includes two first-direction differential decoupling springs 323 arranged axially symmetrically. In some embodiments, the two first-direction differential decoupling springs 323 can be arranged axially symmetrically with respect to a symmetry axis extending in the second direction X (e.g., a symmetry axis located in the middle of the first-direction spring module 3).

[0076] In some embodiments, referring to Figure 11 As shown, the first-direction differential decoupling mechanism 32 includes two first-direction differential decoupling springs 323 arranged axially symmetrically (i.e., a group of first-direction differential decoupling spring groups). In some embodiments, the two first-direction differential decoupling springs 323 are arranged on the side of the second member 322 facing the first driving mechanism 4.

[0077] In some embodiments, referring to Figure 11 As shown, one of the first member 321 and the second member 322 is provided with a spring limiting structure 325, and the other of the first member 321 and the second member 322 is provided with a spring limiting groove 326 matching the shape of the spring limiting structure 325. In some embodiments, the spring limiting structure 325 and the spring limiting groove 326 match to limit the position of the first member 321 relative to the second member 322 in the first direction Y, in the second direction X, and / or around the third direction Z. In some embodiments, the spring limiting groove 326 is formed on the side of the second member 322 facing away from the first driving mechanism 4. In some embodiments, the spring limiting structure 325 is T-shaped, and the spring limiting structure 325 and the spring limiting groove 326 have a gap in the first direction Y and the second direction X, allowing and limiting the rotation of the spring limiting structure 325 relative to the spring limiting groove 326 around the third direction Z.

[0078] In some embodiments, the spring limiting structure 325 and the spring limiting groove 326 can be used to prevent plastic deformation of the weak part of the first-direction differential decoupling spring 323 caused by accidental situations, and the shape of the spring limiting structure and the reserved gap between the spring limiting structure and the spring limiting groove can be reasonably designed according to actual needs.

[0079] In some embodiments, referring to FIG. 1, the first direction differential decoupling mechanism 32 is arranged on the second member 322, and the first direction differential decoupling mechanism 32 is arranged on the first member 321 in some other embodiments. Figure 12 As shown, the first direction differential decoupling mechanism 32 includes four sets of first direction differential decoupling spring sets, and each set of first direction differential decoupling spring sets includes two axisymmetrically arranged first direction differential decoupling springs 323. In some embodiments, one set of first direction differential decoupling spring sets is arranged on the side of the second member 322 facing the first driving mechanism 4, and the other three sets of first direction differential decoupling spring sets are arranged on the side of the second member 322 facing away from the first driving mechanism 4. In some embodiments, referring to FIG. 2, the first direction differential decoupling spring sets arranged on the upper middle part of the second member 322, in the same first direction differential decoupling spring set, the two first direction differential decoupling springs 323 can share the same second part 3232. Figure 12 As shown, the first direction differential decoupling mechanism 32 includes four sets of first direction differential decoupling spring sets, and each set of first direction differential decoupling spring sets includes two axisymmetrically arranged first direction differential decoupling springs 323. In some embodiments, one set of first direction differential decoupling spring sets is arranged on the side of the second member 322 facing the first driving mechanism 4, and the other three sets of first direction differential decoupling spring sets are arranged on the side of the second member 322 facing away from the first driving mechanism 4. In some embodiments, referring to FIG. 2, the first direction differential decoupling spring sets arranged on the upper middle part of the second member 322, in the same first direction differential decoupling spring set, the two first direction differential decoupling springs 323 can share the same second part 3232.

[0080] It should be noted that the increase in the number of first direction differential decoupling springs 323 can improve the stiffness of the first direction differential decoupling mechanism 32 in the third direction Z.

[0081] In some other embodiments, referring to FIG. 1, the first direction differential decoupling mechanism 32 is arranged on the second member 322, and the first direction differential decoupling mechanism 32 is arranged on the first member 321 in some other embodiments. Figure 12 As shown, one of the first member 321 and the second member 322 is provided with two spring limiting structures 325, and the other of the first member 321 and the second member 322 is provided with two spring limiting grooves 326 matched with the shapes of the spring limiting structures 325. In some embodiments, the spring limiting structure 325 and the spring limiting groove 326 are matched to limit the position of the first member 321 relative to the second member 322 in the first direction Y, the second direction X, and / or the rotation around the third direction Z. In some embodiments, referring to FIG. 3, the two spring limiting grooves 326 are respectively arranged at the left and right ends of the second member 322, and in some embodiments, the spring limiting structure 325 is T-shaped, and the spring limiting structure 325 and the spring limiting groove 326 have a gap in the first direction Y and the second direction X, allowing and limiting the rotation of the spring limiting structure 325 relative to the spring limiting groove 326 around the third direction Z. Figure 12 As shown, one of the first member 321 and the second member 322 is provided with two spring limiting structures 325, and the other of the first member 321 and the second member 322 is provided with two spring limiting grooves 326 matched with the shapes of the spring limiting structures 325. In some embodiments, the spring limiting structure 325 and the spring limiting groove 326 are matched to limit the position of the first member 321 relative to the second member 322 in the first direction Y, the second direction X, and / or the rotation around the third direction Z. In some embodiments, referring to FIG. 3, the two spring limiting grooves 326 are respectively arranged at the left and right ends of the second member 322, and in some embodiments, the spring limiting structure 325 is T-shaped, and the spring limiting structure 325 and the spring limiting groove 326 have a gap in the first direction Y and the second direction X, allowing and limiting the rotation of the spring limiting structure 325 relative to the spring limiting groove 326 around the third direction Z.

[0082] In some other embodiments, the spring limiting structure 325 and the spring limiting groove 326 can be used to prevent plastic deformation of the weak part of the first direction differential decoupling spring 323 caused by accidental situations, and the shape of the spring limiting structure and the reserved gap between the spring limiting structure and the spring limiting groove can be reasonably designed according to actual needs.

[0083] In some other embodiments, the first-direction differential decoupling mechanism 32 may also be arranged with other numbers of first-direction differential decoupling springs 323, such as three, five, seven, or two, three, or five groups. In some other embodiments, the first-direction differential decoupling mechanism 32 may also be arranged with other numbers of spring limiting structures 325 and spring limiting grooves 326, such as three, four, or five.

[0084] In one or more embodiments of this specification, see Figure 8 As shown, the two first drive mechanisms 4 are arranged in a mirror-symmetric manner with respect to a plane containing the rotation axis. In one or more embodiments, the first direction spring module 3 corresponding to each of the two first drive mechanisms 4 is also arranged in a mirror-symmetric manner with respect to a plane containing the rotation axis. In this embodiment, the mirror arrangement of the two first drive mechanisms 4 allows the relevant wiring harnesses of the two first drive mechanisms 4 to exit from the same side, which simplifies wiring, but requires additional mirror-processed parts (i.e., at least two types of mirror-symmetric first direction spring modules 3 are required).

[0085] In one or more embodiments of this specification, see Figure 9 As shown, the two first drive mechanisms 4 are arranged centrally symmetrically with respect to a point on the rotation axis. In one or more embodiments, the first direction reed modules 3 corresponding to each of the two first drive mechanisms 4 are also arranged centrally symmetrically with respect to a point on the rotation axis. In this embodiment, the centrally symmetrical arrangement of the two first drive mechanisms 4 allows the two first drive mechanisms 4 and their corresponding first direction reed modules 3 to use identical parts without providing additional mirror-machined parts, but it will cause the motor output directions of the first drive mechanisms 4 to be located on both sides.

[0086] In some embodiments, the two first drive mechanisms 4 can be configured as either mirror-symmetric or centrally symmetric, depending on actual needs (such as environmental requirements, processing cost requirements, etc.).

[0087] In one or more embodiments of this specification, see Figures 1 to 5 As shown, the second drive mechanism 6 can drive the second motion plate 5 to move relative to the first motion plate 2 along the second direction X via the second direction compensation decoupling mechanism 61. In some embodiments, a slot is formed on the second motion plate 5, and the second drive mechanism 6 is arranged inside the slot. In some embodiments, the housing of the second drive mechanism 6 is fixedly connected to the first motion plate 2, and the drive part of the second drive mechanism 6 is fixedly connected to the second motion plate 5.

[0088] In some embodiments, the second-direction compensation decoupling mechanism 61 is configured to be rigid in the second direction X and flexible for rotation about the first direction Y and about the third direction Z.

[0089] In some embodiments, referring to Figure 6 As shown, the second direction compensation decoupling mechanism 61 can include: a second direction compensation decoupling mechanism first structural member 611, a second direction compensation decoupling mechanism first spring piece 612, a second direction compensation decoupling mechanism second structural member 613, and a second direction compensation decoupling mechanism second spring piece 614. In some embodiments, the second direction compensation decoupling mechanism first structural member 611 is directly or indirectly fixedly connected with the driving part of the second driving mechanism 6. In some embodiments, the second direction compensation decoupling mechanism first spring piece 612 connects the second direction compensation decoupling mechanism first structural member 611 and the second direction compensation decoupling mechanism second structural member 613. In some embodiments, the second direction compensation decoupling mechanism second spring piece 614 directly or indirectly connects the second direction compensation decoupling mechanism second structural member 613 and the second motion plate 5.

[0090] In some embodiments, the second direction compensation decoupling mechanism first spring piece 612 can be parallel to the XY plane, which allows the second direction compensation decoupling mechanism second structural member 613 to rotate around the first direction Y relative to the second direction compensation decoupling mechanism first structural member 611.

[0091] In some embodiments, the second direction compensation decoupling mechanism second spring piece 614 can be parallel to the XZ plane, which allows the second motion plate 5 to rotate around the third direction Z relative to the second direction compensation decoupling mechanism second structural member 613.

[0092] The thickness and length of the second direction compensation decoupling mechanism first spring piece 612 and the second direction compensation decoupling mechanism second spring piece 614 and other related dimensions affect their stiffness, which need to be reasonably designed to have higher stiffness in the second direction X and lower stiffness in other directions. In some embodiments, the second direction compensation decoupling mechanism first spring piece 612 and the second direction compensation decoupling mechanism second spring piece 614 can be designed with the aid of simulation.

[0093] In some embodiments, the second direction compensation decoupling mechanism 61 can be used to compensate for the driving deviation and / or guiding direction deviation of the second driving mechanism 6 caused by insufficient machining precision and / or installation precision.

[0094] In one or more embodiments of the present specification, referring to Figure 4 , Figure 7 , Figure 8 As shown, the motion mechanism further includes a first direction intermediate guiding module 7 arranged on the bottom plate 1. In some embodiments, the first direction intermediate guiding module 7 provides the above-mentioned rotation axis. In some embodiments, the first direction intermediate guiding module 7 can be arranged at the geometric center of the first motion plate 2.

[0095] In some embodiments, referring toFigures 13 to 16 As shown, the first direction intermediate guiding module 7 comprises an intermediate guiding rail 71 fixedly connected with the base plate 1, an intermediate guiding slider 72 arranged on the intermediate guiding rail 71, and a rotating member 73 fixedly connected with the intermediate guiding slider 72, and the first movement plate 2 is capable of rotating relative to the rotating member around the third direction Z. In some embodiments, the rotating member 73 provides the rotating axis mentioned above, and the first movement plate 2 is configured to be capable of rotating around the rotating axis.

[0096] In some embodiments, the first direction intermediate guiding module 7 limits the movement of the first movement plate 2 relative to the base plate 1 in the second direction X, but does not limit the movement of the first movement plate 2 relative to the base plate 1 in the first direction Y. In some embodiments, the first direction intermediate guiding module 7 and the first movement plate 2 as a whole are capable of moving along the first direction Y.

[0097] In some embodiments, the rotating member 73 can comprise a bearing mounting seat 731 fixedly connected with the intermediate guiding slider 72, a bearing gland 732 arranged on the bearing mounting seat 731, and a bearing 733 arranged between the bearing mounting seat 731 and the bearing gland 732. In some embodiments, the first movement plate 2 is in interference fit with the outer ring of the bearing 733, thereby realizing the connection between the first movement plate 2 and the bearing 733.

[0098] In some embodiments, the bearing mounting seat 731 can be a multi-stage stepped structure, such as a two-stage stepped structure or a three-stage stepped structure. In some embodiments, the bearing 733 is sleeved on the bearing mounting seat 731 and is capable of rotating relative to the bearing mounting seat 731. In some embodiments, the bearing gland 732 is fixedly connected with the bearing mounting seat 731, for example, through a threaded connecting member or the like. In some embodiments, the bearing gland 732 and the bearing mounting seat 731 form a bearing mounting groove for mounting the bearing 733, and in some embodiments, the bearing 733 is limited in the bearing mounting groove. In some embodiments, the bearing 733 can be a deep groove ball bearing.

[0099] In some embodiments, the first movement plate 2 is configured to be capable of displacing and fixing relative to the bearing 733 in the third direction Z. For example, the thickness of the first movement plate 2 is greater than the thickness of the bearing 733, so as to adjust the position of the first movement plate 2 in the third direction Z. In some embodiments, the first movement plate 2 is provided with a through hole along the third direction Z, the bearing 733 can be arranged inside the through hole, and its position in the through hole can be adjusted.

[0100] In other embodiments, a stepped structure can be arranged inside the through hole of the first movement plate 2, and no stepped structure is arranged at the bearing mounting seat 731.

[0101] In some embodiments, when the first motion plate 2 is driven by the first driving mechanism 4 to translate along the first direction Y, the first motion plate 2 drives the bearing 733 and further drives the bearing mount 731 to move along the first direction Y based on the guiding action of the intermediate guiding rail 71 and the intermediate guiding slider 72.

[0102] In some embodiments, when the first motion plate 2 generates movement or vibration along the second direction X, the first motion plate 2 drives the bearing 733 and further drives the bearing mount 731 to generate movement or vibration along the second direction X, which is blocked by the guiding action of the intermediate guiding rail 71 and the intermediate guiding slider 72, so as to stabilize the first motion plate 2 in the second direction X. Therefore, the first direction intermediate guiding module 7 can improve the rigidity of the non-movement direction (i.e. the second direction X) of the first motion plate 2.

[0103] In some embodiments, referring to Figures 15 to 16 As shown, the bearing mount 731 is provided with one or more bearing mount extension structures 7311. In some embodiments, one end of the bearing mount 731 extends outward to form the bearing mount extension structure 7311. In other embodiments, both ends of the bearing mount 731 extend outward to form two bearing mount extension structures 7311.

[0104] In some embodiments, the motion mechanism further comprises a first direction position measuring mechanism 81, which is arranged on one bearing mount extension structure 7311. The first direction position measuring mechanism 81 is used to measure the displacement of the first motion plate 2 relative to the base plate 1 in the first direction Y. Since the bearing mount extension structure 7311 moves along the first direction Y with the first motion plate 2 when the first motion plate 2 moves along the first direction Y, the first direction position measuring mechanism 81 can be arranged between the bearing mount extension structure 7311 and the base plate 1.

[0105] In some embodiments, referring to Figure 16 As shown, the first direction position measuring mechanism 81 comprises a first direction position measuring read head 811 and a first direction position measuring grating ruler 812. In some embodiments, the first direction position measuring grating ruler 812 of the first direction position measuring mechanism 81 is arranged on the lower surface of one bearing mount extension structure 7311. In some embodiments, the first direction position measuring read head 811 of the first direction position measuring mechanism 81 is arranged on the upper surface of the base plate 1.

[0106] In some embodiments, referring to Figures 15 to 16As shown, the motion mechanism further comprises a third direction rotation position measuring mechanism 82 disposed on the other bearing mount extension structure 7311. The third direction rotation position measuring mechanism 82 is used to measure the rotation of the first motion plate 2 around the third direction Z relative to the base plate 1. Since the bearing mount extension structure 7311 does not rotate based on the guiding action of the intermediate guide rail 71 and the intermediate guide slider 72 when the first motion plate rotates around the third direction Z, the third direction rotation position measuring mechanism 82 can be disposed between the bearing mount extension structure 7311 and the first motion plate 2.

[0107] In some embodiments, referring to Figure 16 As shown, the third direction rotation position measuring mechanism 82 comprises a third direction rotation position measuring read head 821 and a third direction rotation position measuring grating ruler 822. In some embodiments, the third direction rotation position measuring grating ruler 822 of the third direction rotation position measuring mechanism 82 is disposed on the side of the other bearing mount extension structure 7311. In some embodiments, the third direction rotation position measuring grating ruler 822 of the third direction rotation position measuring mechanism 82 can be a circular arc ruler. In some embodiments, the third direction rotation position measuring read head 821 of the third direction rotation position measuring mechanism 82 is disposed on the upper surface of the first motion plate 2.

[0108] It should be noted that since the third direction rotation position measuring read head 821 and the third direction rotation position measuring grating ruler 822 of the third direction rotation position measuring mechanism 82 move with the first motion plate 2 when the first motion plate 2 moves relative to the base plate 1 along the first direction Y, the third direction rotation position measuring read head 821 will not be separated from the third direction rotation position measuring grating ruler 822, and will not cause signal loss, and has a large measurement range. In some related embodiments, if the third direction rotation position measuring read head of the third direction rotation position measuring mechanism is disposed on the upper surface of the base plate 1, and the third direction rotation position measuring grating ruler of the third direction rotation position measuring mechanism can be disposed on the lower surface of the first motion plate 2, since there is a displacement between the first motion plate 2 and the base plate 1 along the first direction Y, the third direction rotation position measuring grating ruler of the third direction rotation position measuring mechanism can be separated from the reading range of the third direction rotation position measuring read head of the third direction rotation position measuring mechanism, thereby limiting the travel of the first motion plate 2 along the first direction Y.

[0109] Similarly, since the first direction position measurement mechanism 81 is arranged at the first direction intermediate guiding module 7 which is located at or close to the geometric center of the first motion plate 2, when the first motion plate 2 rotates relative to the base plate 1, the linear displacement of the first direction position measurement mechanism 81 is smaller than when it is arranged at the side of the first motion plate 2, so the first direction position measurement read head 811 of the first direction position measurement mechanism 81 is not easy to be separated from the first direction position measurement grating ruler 812, which will not cause signal loss and has a larger measurement range.

[0110] In one or more embodiments of the present specification, the first direction position measurement mechanism can also be arranged at a position other than the first direction intermediate guiding module 7. In some embodiments, the first direction position measurement mechanism can be arranged between the base plate 1 and the first motion plate 2. For example, the first direction position measurement read head of the first direction position measurement mechanism can be arranged on the upper surface of the base plate 1, and the first direction position measurement grating ruler of the first direction position measurement mechanism can be arranged on the lower surface of the first motion plate 2. In some embodiments, the first direction position measurement mechanism can be located on one side or both sides of the first direction intermediate guiding module 7.

[0111] In some embodiments, the third direction rotation position measurement mechanism can also be arranged at a position other than the first direction intermediate guiding module 7. In some embodiments, the third direction rotation position measurement mechanism can be arranged between the base plate 1 and the first motion plate 2. For example, the third direction rotation position measurement read head of the third direction rotation position measurement mechanism can be arranged on the upper surface of the base plate 1, and the third direction rotation position measurement grating ruler of the third direction rotation position measurement mechanism can be arranged on the lower surface of the first motion plate 2. In some embodiments, the third direction rotation position measurement mechanism can be located on one side or both sides of the first direction intermediate guiding module 7.

[0112] In one or more embodiments of the present specification, the motion mechanism can further comprise a second direction position measurement mechanism for measuring the displacement of the second motion plate 5 relative to the first motion plate 2 in the second direction X. In some embodiments, the second direction position measurement mechanism can be arranged between the second motion plate 5 and the first motion plate 2. For example, the second direction position measurement read head of the second direction position measurement mechanism can be arranged on the upper surface of the first motion plate 2, and the second direction position measurement grating ruler of the second direction position measurement mechanism can be arranged on the lower surface of the second motion plate 5.

[0113] In one or more embodiments of the present specification, since the motion mechanism in the above one or more embodiments adopts mechanical guiding instead of air floating guiding, it not only reduces the air path, but also makes the motion mechanism applicable to a vacuum environment.

[0114] In one or more embodiments of the present specification, referring to Figures 1 to 4 , in combination with Figure 17 , Figure 18 , the motion mechanism can further comprise: a brake assembly 9, the brake assembly 9 being configured to lock the position of the second motion plate 5 relative to the base plate 1 after the first motion plate 2 and / or the second motion plate 5 is moved into position, the brake assembly 9 being configured to lock the position of the driven member relative to the base plate 1.

[0115] In some embodiments, the brake assembly 9 comprises: a fixed base 91 fixedly connected with the second motion plate 5, an air floating brake block 92 disposed between the base plate 1 and the first motion plate 2, and a brake spring 93 connecting the fixed base 91 and the air floating brake block 92. In some embodiments, the brake spring 93 is configured to be flexible in the third direction Z.

[0116] In some embodiments, referring to Figure 18 , the brake spring 93 comprises a brake spring first part 931 fixedly connected with the fixed base 91 and a brake spring second part 932 fixedly connected with the air floating brake block 92, the brake spring first part 931 and the brake spring second part 932 being connected with each other. In some embodiments, the brake spring first part 931 and the brake spring second part 932 are integrally connected. In some embodiments, the brake spring first part 931 and the brake spring second part 932 have an included angle therebetween. In some embodiments, the included angle between the brake spring first part 931 and the brake spring second part 932 can be an acute angle. In some embodiments, the included angle between the brake spring first part 931 and the brake spring second part 932 is adjusted by elastic deformation, thereby achieving flexibility in the third direction Z.

[0117] In some embodiments, the air floating brake block 92 is configured to be able to provide positive pressure, negative pressure or no gas to the base plate 1. In some embodiments, when the air floating brake block 92 does not provide any gas to the base plate 1, it allows the first motion plate 2 and the second motion plate 5 to move relative to the base plate 1. In some embodiments, when the air floating brake block 92 provides positive pressure to the base plate 1, it allows the first motion plate 2 and the second motion plate 5 to move relative to the base plate 1, and reduces or avoids the possibility of scratching between the air floating brake block 92 and the base plate 1. In some embodiments, when the air floating brake block 92 provides negative pressure to the base plate 1, the air floating brake block 92 is adsorbed to the base plate 1, so that the second motion plate 5 is relatively fixed with the base plate 1, forming a lock.

[0118] In some embodiments, the air floating brake block 92 can have a positive pressure area for providing positive pressure and a negative pressure area for providing negative pressure.

[0119] Having described the basic concepts, it is obvious that the above detailed disclosure is intended to be illustrative only and not restrictive of the scope of the present specification. Although not explicitly described, modifications, improvements, and alterations will occur to those skilled in the art upon reading the description. It is intended to include all such modifications, improvements, and alterations in so far as they come within the scope of the examples of the present specification.

Claims

1. A motion mechanism characterized by, Comprising: a base plate, a first moving plate arranged above the base plate, a first driving mechanism connected with the first moving plate through a first direction spring sheet module, a second moving plate arranged above the first moving plate, and a second driving mechanism connected with the second moving plate; two first driving mechanisms are used to drive the first moving plate to move relative to the base plate along a first direction or rotate around a third direction through corresponding first direction spring sheet modules; the second driving mechanism is used to drive the second moving plate to move relative to the first moving plate along a second direction; the second direction is perpendicular to the first direction, the plane where the first direction and the second direction are located is the same plane as the base plate, and the third direction is perpendicular to the first direction and the second direction; the first direction spring sheet module comprises a first direction compensation decoupling mechanism connected with the first driving mechanism and a first direction differential decoupling mechanism connecting the first direction compensation decoupling mechanism and the first moving plate; the first direction compensation decoupling mechanism is configured to be rigid in the first direction, flexible for rotation around the second direction and rotation around the third direction; the first direction differential decoupling mechanism is configured to be rigid in the third direction, rigid for rotation around the first direction and rotation around the second direction, and flexible for rotation around the third direction.

2. The motion mechanism of claim 1, wherein, the first moving plate is configured to be able to rotate around a rotation axis, and the two first driving mechanisms are symmetrically arranged relative to the rotation axis; the first direction spring sheet module is configured to be able to translate a part of the first direction spring sheet module along the first direction; the first driving mechanism is configured to be able to provide linear power along the first direction to the corresponding first direction spring sheet module while being able to translate along the second direction.

3. The motion mechanism of claim 1, wherein, the first direction differential decoupling mechanism comprises a first member, a second member, and a first direction differential decoupling spring sheet connecting the first member and the second member; the first member and the second member are both rigid members; the first member connects the first moving plate and the first direction compensation decoupling mechanism; the second member is configured to be able to translate along the first direction; the first direction differential decoupling spring sheet is configured to be rigid in the third direction, rigid for rotation around the first direction and rotation around the second direction, and flexible for rotation around the third direction.

4. The motion mechanism of claim 3, wherein, the first direction differential decoupling mechanism further comprises a first direction guiding module arranged between the second member and the base plate, used to guide the second member in the first direction.

5. The motion mechanism of claim 3, wherein, the first direction differential decoupling spring sheet comprises a first part extending in the first direction and a second part extending in the second direction connected with the first part; one of the first part and the second part is fixedly connected with the first member, and the other of the first part and the second part is fixedly connected with the second member.

6. The motion mechanism of claim 3, wherein, Further comprising: The parasitic displacement compensation guide module is arranged between the first driving mechanism and the bottom plate, and is used for guiding the first driving mechanism in the second direction.

7. The motion mechanism according to any one of claims 3 to 6, characterized in that The first-direction differential decoupling mechanism comprises one or more first-direction differential decoupling spring sets. Each first-direction differential decoupling spring set comprises two first-direction differential decoupling springs arranged in axial symmetry.

8. The motion mechanism according to any one of claims 3 to 6, wherein One of the first member and the second member is provided with one or more spring limiting structures, and the other of the first member and the second member is provided with one or more spring limiting grooves matched with the shapes of the spring limiting structures. The spring limiting structures and the spring limiting grooves are matched, and are used for limiting the position of the first member relative to the second member in the first direction, the position of the first member relative to the second member in the second direction, and / or the rotational position of the first member relative to the second member around the third direction.

9. The motion mechanism of claim 1, wherein, Further comprising: a first-direction intermediate guide module arranged on the bottom plate, wherein the first-direction intermediate guide module comprises: an intermediate guide rail fixedly connected with the bottom plate, an intermediate guide slider arranged on the intermediate guide rail, and a rotating member fixedly connected with the intermediate guide slider, wherein the first moving plate is capable of rotating around the third direction relative to the rotating member; the rotating member provides a rotating axis, and the first moving plate is configured to be capable of rotating around the rotating axis.

10. The motion mechanism of claim 9, wherein, The rotating member comprises: a bearing mounting seat fixedly connected with the intermediate guide slider, a bearing pressing cap arranged on the bearing mounting seat, and a bearing arranged between the bearing mounting seat and the bearing pressing cap; the first moving plate is in interference fit with the bearing; the first moving plate is configured to be capable of displacing and being fixed in the third direction relative to the bearing.

11. The motion mechanism of claim 10, wherein, The bearing mounting seat is provided with one or more bearing mounting seat extension structures; the movement mechanism further comprises: a first-direction position measuring mechanism and / or a third-direction rotational position measuring mechanism; the first-direction position measuring mechanism is arranged on one bearing mounting seat extension structure, and the third-direction rotational position measuring mechanism is arranged on another bearing mounting seat extension structure.

12. The motion mechanism of claim 1, wherein, Further comprising: a brake assembly, wherein the brake assembly comprises: a fixed base fixedly connected with the second moving plate, an air-floating brake block arranged between the bottom plate and the first moving plate, and a brake spring connecting the fixed base and the air-floating brake block; the air-floating brake block is configured to provide positive pressure, negative pressure, or no gas to the bottom plate; the brake spring is configured to be flexible in the third direction.

13. The motion mechanism of any one of claims 2, 9-11, wherein, The two first driving mechanisms are arranged in mirror symmetry relative to a plane in which the rotating axis is located. Alternatively, the two first driving mechanisms are arranged in central symmetry relative to a point on the rotating axis.

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