Substrate ultrasonic-assisted cutting device

Abstract

The invention discloses a substrate ultrasonic-assisted cutting device which comprises a workbench and a cutting mechanism, the cutting mechanism is arranged on the workbench, and the cutting mechanism comprises a cutter assembly and a displacement driving unit for driving the cutter assembly to move along a cutting path; the ultrasonic wave generation unit is arranged between the cutter assembly and the displacement driving unit and used for applying high-frequency vibration to the cutter assembly, and according to the substrate ultrasonic wave auxiliary cutting device, the high-frequency vibration generated by the ultrasonic wave generation unit is optimized through the vibration conduction assembly and then transmitted to a cutter, so that the cutter assembly can cut the substrate. Intermittent high-frequency impact is formed between the cutter and a substrate, microcrack propagation on the surface of a hard and brittle material is controlled, defects such as edge collapse and disordered cracks are inhibited, the smoothness of a cut edge and the uniformity of subsequent treatment are improved, and meanwhile, the amplitude amplification effect of the amplitude-change pole and the frequency matching function of the tuning block ensure that the amplitude of the cutter head is stable and the cutting depth is uniform. And the high-precision cutting requirement is met.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of substrate processing, in particular to a substrate ultrasonic-assisted cutting device. BACKGROUND

[0002] The display screen substrate is a basic component for manufacturing a display screen, which is usually a thin plate-shaped material with certain flatness and light transmittance, used for carrying and supporting various functional layers in the display screen. Commonly, it is a glass substrate.

[0003] In the field of cutting processing of display screen substrates, due to the high hardness and brittleness of the material itself, high cutting precision, edge quality and processing stability are required. At present, the cutting of such materials mainly adopts traditional mechanical scribing, laser cutting or simple ultrasonic-assisted cutting technology, but all have obvious limitations. Traditional mechanical scribing forms cracks by continuously contacting the tool with the material to apply pressure. In this process, the cutting resistance is large, which easily leads to defects such as edge collapse, chaotic micro-cracks and the like in the material, and the scribing depth is difficult to accurately control, which easily causes breaking deviation during subsequent separation, and cannot meet the requirements of high-precision substrates for edge smoothness and neatness. Laser cutting can achieve a relatively fine scribing, but there is a heat-affected zone, which will cause thermal stress on the surface of the material, resulting in damage to the performance of hard and brittle materials, especially not suitable for display screen substrates sensitive to heat.

[0004] Although the existing ultrasonic-assisted cutting technology improves the cutting performance by introducing high-frequency vibration, the problems of low vibration energy transmission efficiency and poor amplitude stability have not been effectively solved. On the one hand, there is a lack of a special amplitude amplification structure, which leads to insufficient actual vibration amplitude of the tool bit, making it difficult to form controllable micro-cracks on the surface of hard and brittle materials, and the scribing depth uniformity is poor. On the other hand, the resonant frequency of the vibration system does not match the output frequency of the ultrasonic wave generating unit, resulting in serious energy loss and large fluctuation of the amplitude of the tool bit, which not only affects the scribing precision, but also accelerates the tool wear due to invalid vibration, limiting the improvement of processing efficiency and equipment durability.

[0005] Therefore, a substrate ultrasonic-assisted cutting device is proposed to solve the above problems. SUMMARY

[0006] The purpose of the present application is to propose a substrate ultrasonic-assisted cutting device to solve the limitations of existing mechanical scribing and laser cutting methods, and the problems of low vibration energy transmission efficiency and poor amplitude stability of existing simple ultrasonic-assisted cutting technology.

[0007] To achieve this purpose, the following technical solutions are adopted: A substrate ultrasonic-assisted cutting device, comprising a workbench, A cutting mechanism, the cutting mechanism being disposed on the workbench and comprising a tool assembly and a displacement drive unit for driving the tool assembly to move along a cutting path; an ultrasonic generating unit, the ultrasonic generating unit being disposed between the tool assembly and the displacement driving unit and being used for applying high-frequency vibration to the tool assembly; A vibration conduction component is arranged between the ultrasonic generating unit and the tool assembly, and the vibration conduction component includes a variable amplitude rod and a tuning block. One end of the variable amplitude rod is connected to the ultrasonic generating unit for amplifying the amplitude of the ultrasonic wave; the tuning block is installed at the end of the variable amplitude rod away from the ultrasonic generating unit, and the tuning block is connected to the tool assembly. The tuning block is used to adjust the resonant frequency of the vibration system composed of the vibration conduction component and the tool assembly so that the resonant frequency matches the output frequency of the ultrasonic generating unit.

[0008] Optionally, the ultrasonic generating unit applies high-frequency vibration to the tool assembly at a frequency of 20 to 100 kHz.

[0009] Optionally, the tool assembly includes: A tool handle, one end of which is fixedly connected to the tuning block; a cutter head, the cutter head being detachably mounted on an end of the cutter handle away from the tuning block; An ultrasonic coupling layer is provided at the assembly interface between the tool handle and the tool head, and the ultrasonic coupling layer is composed of a functional layer having both elasticity and thermal conductivity.

[0010] Optionally, the ultrasonic coupling layer includes: an elastic metal layer, the elastic metal layer being installed between the knife handle and the knife head; The thermally conductive filling layer is filled between the elastic metal layer and the surface of the tool handle, or between the elastic metal layer and the surface of the tool head, or between the elastic metal layer and the surface of the tool handle and between the elastic metal layer and the surface of the tool head at the same time.

[0011] Optionally, the cutting edge radius of the tool head is 5 to 10 μm; the thickness of the elastic metal film is 0.1 to 0.5 mm, and the material is beryllium bronze or titanium alloy; the thermal conductive filling layer is thermal conductive silicone grease, and the thermal conductivity of the thermal conductive silicone grease is greater than or equal to 5 W / m·K.

[0012] Optionally, the displacement drive unit includes a y-axis linear module, a z-axis linear module and a connecting member; the number of the connecting members is two and they are arranged at intervals along the workbench; a y-axis linear module is installed between the two connecting members, and a z-axis linear module is installed on the y-axis linear module, and the length direction of the z-axis linear module is perpendicular to the surface of the workbench, and the z-axis linear module is also connected to the ultrasonic generating unit.

[0013] Optionally, the workbench is provided with a control system, and the control system is electrically connected to the cutting mechanism and the ultrasonic generating unit.

[0014] Optionally, the ultrasonic generating unit includes: An ultrasonic generator, installed between the z-axis linear module and the horn; An amplitude monitoring module is installed on the tool assembly and is used to detect the vibration amplitude of the tool assembly in real time and feed the detection data back to the control system.

[0015] Optionally, the vibration conduction component further includes an impedance matching layer, which is disposed between the amplitude transformer and the tuning block, and an acoustic impedance value of the impedance matching layer is between the acoustic impedance of the amplitude transformer and the acoustic impedance of the tool assembly.

[0016] Optionally, the workbench is provided with an x-axis linear module and a slide rail along the length direction, the x-axis linear module is provided with an adsorption platform, and the slide rail is slidably connected to a slider connected to the adsorption platform.

[0017] Compared with the prior art, the beneficial effects of this application are: 1. The high-frequency vibration generated by the ultrasonic generating unit is transmitted to the tool after optimization by the vibration conduction component, so that the tool and the substrate form intermittent high-frequency impact, which controls the expansion of micro-cracks on the surface of hard and brittle materials, suppresses defects such as edge chipping and messy cracks, and improves the smoothness of the cutting edge and the neatness of subsequent processing. At the same time, the amplitude amplification effect of the amplitude transformer and the frequency matching function of the tuning block ensure that the amplitude of the tool head is stable and the cutting depth is uniform, meeting the requirements of high-precision cutting.

[0018] 2. The amplitude transformer of the vibration transmission component amplifies the amplitude through cross-sectional design. The tuning block adjusts the resonant frequency to accurately match the ultrasonic output frequency to reduce energy reflection and loss. The impedance matching layer further reduces energy reflection, ensuring that more ultrasonic energy is efficiently transmitted to the cutter head, reducing fatigue loss of components caused by ineffective vibration, and extending the service life of the device.

[0019] 3. Ultrasonic high-frequency vibration makes the tool and substrate intermittently contact, reducing cutting resistance and friction heat accumulation. The elastic metal layer of the ultrasonic coupling layer adapts to the vibration displacement deviation, and the thermal conductive filling layer quickly conducts heat from the tool head to avoid increased wear caused by overheating. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] The accompanying drawings further illustrate the present application, but the contents in the accompanying drawings do not constitute any limitation to the present application.

[0021] Figure 1 It is a schematic diagram of the overall structure of this application; Figure 2 This is a schematic structural diagram of the tool assembly, vibration conduction assembly, and ultrasonic generating unit of the present application; Figure 3 This application Figure 2 Enlarged view of point A in the middle; Figure 4 It is an exploded view of the adsorption platform and displacement drive unit of this application.

[0022] In the accompanying drawings: 1. workbench; 2. cutting mechanism; 21. tool assembly; 211. tool handle; 212. tool head; 213. ultrasonic coupling layer; 2131. elastic metal layer; 2132. thermal conductive filling layer; 22. displacement drive unit; 221. y-axis linear module; 222. z-axis linear module; 223. connector; 3. ultrasonic generating unit; 31. ultrasonic generator; 32. amplitude monitoring module; 4. control system; 5. vibration conduction component; 51. amplitude rod; 52. tuning block; 53. impedance matching layer; 61. x-axis linear module; 62. slide rail; 63. slider; 7. adsorption platform. DETAILED DESCRIPTION

[0023] The following describes embodiments of the present application in detail, with examples of the embodiments illustrated in the accompanying drawings, wherein identical or similar reference numerals throughout denote identical or similar elements or elements having identical or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and intended solely for the purpose of explaining the present application and are not to be construed as limiting the present application. In the description of the present application, it should be understood that terms such as "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "back," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise" indicate positions or positional relationships based on those shown in the accompanying drawings and are intended solely for the purpose of describing the present application and simplifying the description. They are not intended to indicate or imply that the devices or elements referred to must have, be constructed, or operate in a specific orientation, and are therefore not to be construed as limiting the present application. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly specifying the number of the technical features indicated. Thus, features designated "first" or "second" may explicitly or implicitly include one or more of the aforementioned features. In the description of the present application, “a plurality of” means two or more, and “a number of” means one or more, unless otherwise clearly defined.

[0024] In the description of this application, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; they can refer to mechanical connections, electrical connections, or connections that can communicate with each other; they can refer to direct connections or indirect connections through an intermediate medium; they can refer to internal communication between two components or the interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this application based on the specific circumstances.

[0025] In this application, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0026] The disclosure below provides many different embodiments or examples for realizing different structures of the present application. In order to simplify the disclosure of the present application, the components and settings of specific examples are described below. Of course, they are merely examples and are not intended to limit the present application. In addition, the present application may repeat reference numbers and / or reference letters in different examples, and such repetition is for the purpose of simplicity and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the present application provides examples of various specific processes and materials, but those of ordinary skill in the art will appreciate the application of other processes and / or the use of other materials.

[0027] In this embodiment, Figure 1-4 A device for ultrasonically assisted cutting of a substrate is provided, comprising a workbench 1, a cutting mechanism 2, an ultrasonic generating unit 3, and a vibration conducting component 5. The cutting mechanism 2 is arranged on the workbench 1, and comprises a tool assembly 21 and a displacement driving unit 22 for driving the tool assembly 21 to move along a cutting path. The ultrasonic generating unit 3 is arranged between the tool assembly 21 and the displacement driving unit 22, and is used to apply high-frequency vibration to the tool assembly 21. The vibration conducting component 5 is arranged between the ultrasonic generating unit 3 and the tool assembly 21, and comprises an horn 51 and a tuning block 52. One end of the horn 51 is connected to the ultrasonic generating unit 3 for amplifying the amplitude of the ultrasonic wave; the tuning block 52 is installed at the end of the horn 51 away from the ultrasonic generating unit 3, and the tuning block 52 is connected to the tool assembly 21. The tuning block 52 is used to adjust the resonant frequency of the vibration system composed of the vibration conducting component 5 and the tool assembly 21, so that the resonant frequency matches the output frequency of the ultrasonic generating unit 3.

[0028] The ultrasonic generating unit 3 applies high-frequency vibration to the tool assembly 21 at a frequency of 20 to 100 kHz.

[0029] Specifically, the choice of 20 to 100 kHz as the high-frequency vibration frequency is the result of a comprehensive consideration of physical properties, notching requirements, and technical feasibility. From a physical definition, ultrasonic waves must be above 20 kHz, which is audible to the human ear. This frequency is the starting point for concentrated energy transfer. Below this frequency, energy is dispersed, noise is high, and it is difficult to accurately cut a hole on the substrate surface. Above 100 kHz, the vibration is severely attenuated in components such as the horn 51, resulting in significant loss of effective energy and difficulty in controlling the notching depth and accuracy. A frequency of 20 to 100 kHz can balance attenuation and transmission efficiency, ensuring the notching effect.

[0030] In terms of scoring requirements, this device is designed for hard and brittle materials like computer display substrates. Precise control of scoring depth and trajectory is required, relying on high-frequency impact to create controlled microcracks on the surface. A frequency too low (near 20kHz) results in fewer vibrations and longer contact times, which can lead to excessive microcrack propagation, exceeding the intended scoring range. A high frequency (near 100kHz) produces a finer scoring, but the strong impact can cause unnecessary cracking on the substrate surface and accelerate wear on the blade 212. A frequency between 20 and 100kHz achieves a balance between microcrack control and scoring accuracy, making it ideal for scoring display substrates. For example, 60kHz is commonly used for scoring computer display screen substrates (mostly 1.1mm thick tempered glass). The blade 212 of the tool assembly 21 vibrates 60,000 times per second with an amplitude of 8 to 35μm. This pulsed impact can precisely create a cut 0.3-0.5mm deep on the substrate surface. Because the vibration frequency is adapted to the brittle nature of glass, the force applied during scoring is lower than that of traditional mechanical scoring. This effectively prevents the formation of random microcracks at the cut edge and ensures a clean, even cut during subsequent breaking. Furthermore, at 60kHz, the vibration energy is attenuated by approximately 18%-22% within the transmission component. The effective energy reaching the blade 212 is sufficient to ensure a uniform cut depth. The wear rate of the diamond-tipped blade 212 is reduced by over 35%, effectively balancing cut quality with equipment durability.

[0031] Reference Figure 2 and Figure 3 As shown, specifically, the amplitude of the mechanical vibration is amplified by the amplitude transformer 51 of the vibration transmission component 5 and is transmitted to the tool component 21 after frequency matching optimization by the tuning block 52 .

[0032] The horn 51 is a key component for amplifying amplitude and transmitting energy. It typically has a rod-shaped structure with a tapered, stepped, or exponential shape. The exponential shape refers to an exponential increase or decrease in amplitude at one end of the horn 51 compared to the other. The horn 51 is often made of high-strength alloys (such as 45 steel or titanium alloy) with excellent elasticity and vibration conductivity. When the high-frequency vibrations (e.g., 20 to 100 kHz) generated by the ultrasonic generator 31 are transmitted to the horn 51, the input small-amplitude vibrations are amplified by the change in the cross-sectional dimensions of the horn 51 (e.g., a gradual change from the thick end to the thin end). According to wave theory, when vibration energy is transmitted in a rod, the amplitude is inversely proportional to the cross-sectional area. Therefore, by reducing the cross-sectional area at the output end, the horn 51 amplifies the amplitude (typically by a factor of 2-10) while maintaining the vibration frequency. This ensures efficient energy transfer to subsequent components (such as the tuning block 52 and the tool).

[0033] The tuning block 52 is a key component for optimizing vibration transmission efficiency. It is typically cylindrical or block-shaped, often made of high-strength alloys (such as aluminum or titanium) or composite materials, and requires excellent elasticity and vibration conduction properties. When ultrasonic vibrations are transmitted to the tuning block 52 via the horn 51, the tuning block 52 adjusts its resonant frequency through its geometric dimensions (such as length and diameter) and material properties, precisely matching the output frequency of the ultrasonic generator 31. In this resonant state, vibration energy loss is minimized and amplitude stability is maximized, thereby achieving efficient transmission of ultrasonic energy.

[0034] In other words, the tuning block modifies the natural frequency of the entire vibration system, consisting of the vibration transmission component and the tool assembly, through its geometric dimensions (such as length and diameter) and material properties. When the system's natural frequency is adjusted to align with the output frequency of the ultrasonic generator, resonant frequency matching is achieved. This minimizes vibration energy loss, maximizes amplitude stability, and effectively transmits ultrasonic energy to the tool.

[0035] Reference Figures 1 to 3 As shown above, the vibration system consists of an ultrasonic generator unit 3 and a vibration transmission component 5. The ultrasonic generator unit 3 generates high-frequency vibrations in the range of 20 to 100 kHz. The amplitude of the mechanical vibrations is amplified by the horn 51 of the vibration transmission component 5, and the tuning block 52 performs frequency matching optimization before transmitting the vibrations to the tool assembly 21. Simultaneously, the displacement drive unit 22 drives the tool along a preset cutting path, causing the tool assembly 21 to superimpose high-frequency micro-amplitude vibrations during the substrate cutting process. Its core effects are: the ultrasonic high-frequency vibrations achieve intermittent contact between the tool and the substrate material, significantly reducing cutting resistance and suppressing edge chipping and microcracks common in traditional cutting. The amplitude amplification effect of the horn 51 enhances the efficiency of vibration energy transmission, while the tuning block 52 ensures the resonance state of the vibration system and reduces energy loss. The high-frequency micro-impact promotes plastic cutting of brittle materials, improving the smoothness of the cut edge of the glass substrate. The intermittent cutting mechanism reduces frictional heat accumulation and extends tool life. While maintaining cutting accuracy, it allows for increased feed speed, comprehensively improving processing efficiency and yield.

[0036] It should be noted that the change in the cross-sectional size of the horn 51 can be used to amplify the input small-amplitude vibration, and according to the "wave theory", when the vibration energy is transmitted in the rod, the amplitude is inversely proportional to the cross-sectional area.

[0037] As another embodiment of the present application, the tool assembly 21 includes a tool handle 211, a tool head 212, and an ultrasonic coupling layer 213. One end of the tool handle 211 is fixedly connected to the tuning block 52; the tool head 212 is detachably mounted on the end of the tool handle 211 away from the tuning block 52; the ultrasonic coupling layer 213 is arranged at the assembly joint surface between the tool handle 211 and the tool head 212, and the ultrasonic coupling layer 213 is composed of a functional layer with both elasticity and thermal conductivity. It is used to efficiently transmit high-frequency mechanical vibrations between the tool handle 211 and the tool head 212, and at the same time conduct the heat generated by the tool head 212 during the cutting process to the tool handle 211; The ultrasonic coupling layer 213 includes an elastic metal layer 2131 and a thermally conductive filling layer 2132. The elastic metal layer 2131 is installed between the handle 211 and the blade 212; the thermally conductive filling layer 2132 is filled in the following locations: between the elastic metal layer 2131 and the surface of the handle 211, or between the elastic metal layer 2131 and the surface of the blade 212, or between the elastic metal layer 2131 and the surface of the handle 211 and the surface of the blade 212 simultaneously. The elastic metal layer 2131 can be a metal layer with a specific shape and elastic deformation, such as a metal plate with a wave-like structure. The elastic metal layer 2131 can also be composed of two metal plates and an elastic member, such as a spring, with the elastic member installed between the two metal plates.

[0038] In this embodiment, referring to Figure 2 and Figure 3 As shown, in the tool assembly 21, one end of the tool handle 211 is fixedly connected to the tuning block 52 to receive optimized high-frequency vibrations, and the other end is detachably mounted with a cutter head 212 to facilitate changing the cutting edge according to substrate characteristics. The detachable mounting method is preferably bolted. Specifically, both the tool handle 211 and the cutter head 212 have through holes, through which the threaded end of the bolt passes and is fastened with a flat washer and a lock nut to achieve detachable mounting of the cutter head 212.

[0039] In addition, the ultrasonic coupling layer 213 between the knife handle 211 and the knife head 212 adopts a laminated structure functional layer with both elasticity and thermal conductivity, and the laminated structure functional layer is composed of an elastic metal layer 2131 and a thermally conductive filling layer 2132, wherein the elastic metal layer 2131 is installed between the knife handle 211 and the knife head 212, and the thermally conductive filling layer 2132 is filled between the elastic metal layer 2131 and the surface of the knife handle 211 or the knife head 212, or between the elastic metal layer 2131 and the surface of the knife handle 211 or the knife head 212. During operation, the high-frequency mechanical vibration transmitted by the tuning block 52 is first transmitted to the knife handle 211, and then the elastic deformation ability of the elastic metal layer 2131 adapts to the slight displacement deviation in the vibration transmission, ensuring that the high-frequency vibration is efficiently transmitted to the cutter head 212. At the same time, the thermal conductive filling layer 2132 tightly fills the gap between the contact surface (between the elastic metal layer 2131 and the surface of the knife handle 211 or the cutter head 212, or between the elastic metal layer 2131 and the surface of the knife handle 211 or the cutter head 212), which not only enhances the continuity of vibration transmission, but also scratches the cutter head 212. The heat generated by friction during cutting is quickly conducted to the elastic metal layer 2131 and then dissipated through the tool handle 211. This stacked structural design not only ensures the efficient and stable transmission of high-frequency mechanical vibrations between the tool handle 211 and the tool head 212, so that the tool head 212 can obtain uniform vibration to improve the cutting accuracy and consistency, but also can promptly conduct the heat of the tool head 212 through the heat conduction path composed of the elastic metal layer 2131, the heat conductive filling layer 2132 and the tool handle 211, thereby avoiding aggravated wear of the tool head 212 or local heat damage to the substrate due to overheating.

[0040] In the stacked structure of the ultrasonic coupling layer 213 , there are three specific situations for the filling position of the thermal conductive filling layer 2132 . The functional logic of each situation is the same, but the coverage range is slightly different, as follows: Case 1: The heat conductive filling layer 2132 is only filled between the elastic metal layer 2131 and the surface of the handle 211 Positional relationship: The elastic metal layer 2131 is sandwiched between the knife handle 211 and the knife head 212, and the thermal conductive filling layer 2132 is filled only in the gap between the surface of the elastic metal layer 2131 facing the knife handle 211 and the knife handle 211; the contact surface between the elastic metal layer 2131 and the knife head 212 is in direct contact (no filling layer).

[0041] Functional effect: Vibration transmission: The heat-conducting filling layer 2132 eliminates the gap between the elastic metal layer 2131 and the knife handle 211, ensuring the continuous transmission of high-frequency vibration from the knife handle 211 through the heat-conducting filling layer 2132, the elastic metal layer 2131, and the knife head 212 in sequence, thereby reducing the attenuation of vibration at the contact point between the knife handle 211 and the elastic metal layer 2131; Heat dissipation path: The heat generated by the cutter head 212 is first directly transferred to the thermally conductive filling layer 2132 in contact with the handle 211 through the elastic metal layer 2131, and then quickly introduced into the handle 211 through the thermally conductive filling layer 2132 for dissipation, thereby preventing heat from being retained in the contact gap between the elastic metal layer 2131 and the handle 211.

[0042] Case 2: The thermal conductive filling layer 2132 is only filled between the elastic metal layer 2131 and the surface of the blade 212 Positional relationship: The elastic metal layer 2131 is sandwiched between the knife handle 211 and the knife head 212, and the thermal conductive filling layer 2132 is filled only in the gap between the surface of the elastic metal layer 2131 facing the knife head 212 and the knife head 212; the contact surface between the elastic metal layer 2131 and the knife handle 211 is in direct contact (no filling layer).

[0043] Functional effect: Vibration transmission: The thermally conductive filling layer 2132 eliminates the gap between the elastic metal layer 2131 and the cutter head 212, ensuring that high-frequency vibration is efficiently transmitted through the handle 211, the elastic metal layer 2131, and then through the thermally conductive filling layer 2132 and the cutter head 212, thereby avoiding vibration loss at the contact point between the elastic metal layer 2131 and the cutter head 212. Heat dissipation path: The heat generated by friction in the cutter head 212 is directly transferred to the elastic metal layer 2131 through the thermally conductive filling layer 2132. The heat is then introduced into the cutter handle 211 through direct contact between the elastic metal layer 2131 and the cutter handle 211 for dissipation. This prevents heat from being retained in the contact gap between the elastic metal layer 2131 and the cutter head 212, shortens the heat conduction time from the cutter head 212 to the cutter handle 211, and improves heat dissipation efficiency.

[0044] Case 3: The heat conductive filling layer 2132 is simultaneously filled between the elastic metal layer 2131 and the surfaces of the handle 211 and the blade 212 Positional relationship: The elastic metal layer 2131 is sandwiched between the knife handle 211 and the knife head 212, and the thermal conductive filling layer 2132 is filled in the gaps between the side surface of the elastic metal layer 2131 facing the knife handle 211 and the side surface facing the knife head 212 and the knife handle 211 and the knife head 212, respectively, forming a sandwich structure of "knife handle 211-thermal conductive filling layer 2132-elastic metal layer 2131-thermal conductive filling layer 2132-knife head 212".

[0045] Functional effect: Vibration transmission: The double-layer heat-conductive filling layer 2132 eliminates the gaps between the elastic metal layer 2131 and the handle 211, and between the elastic metal layer 2131 and the cutter head 212, minimizing the attenuation of vibration in the transmission path. This ensures the stable transmission of high-frequency vibration from the handle 211 to the cutter head 212, further improving the uniformity of the cutter head vibration. Heat dissipation path: Heat from the blade head 212 is conducted through the thermally conductive filling layers 2132 on both sides, creating a "double-layer conduction" path. This creates a heat conduction path from blade head 212 - thermally conductive filling layer 2132 - elastic metal layer 2131 - thermally conductive filling layer 2132 - handle 211. This prevents heat from being trapped in the contact gaps between the elastic metal layer 2131 and the blade head 212 and handle 211, improving heat dissipation efficiency and effectively preventing localized overheating of the blade head 212 and elastic metal layer 2131.

[0046] The core design logic of the three cases is consistent: the thermally conductive filling layer 2132 fills the contact surface gap between the elastic metal layer 2131 and the tool handle 211 or the tool head 212, or the thermally conductive filling layer 2132 fills the contact surface gap between the elastic metal layer 2131 and the tool handle 211 or the tool head 212. In all three cases, "vibration transmission continuity" and "heat conduction efficiency" are enhanced. In actual applications, an adaptation solution can be selected based on the different vibration accuracy and heat dissipation requirements of the cutting scenario. Among them, the comprehensive effect of case 3 is the best, and it is suitable for scenarios with extremely high requirements for cutting accuracy and tool head life (such as ultra-thin glass substrate cutting).

[0047] As another embodiment of the present application, the cutting edge radius of the cutter head 212 is 5 to 10 μm; the thickness of the elastic metal layer 2131 is 0.1 to 0.5 mm, and the material is beryllium bronze or titanium alloy; the thermal conductive filling layer 2132 is thermal conductive silicone grease, and the thermal conductivity of the thermal conductive silicone grease is greater than or equal to 5 W / m·K.

[0048] In this embodiment, referring to Figure 3 As shown, the cutting edge radius is 5 to 10 μm, which can accurately act on the surface of the substrate to achieve fine scoring. The elastic metal layer 2131 has a thickness of 0.1 to 0.5 mm and is made of beryllium bronze or titanium alloy. It has good elasticity to adapt to small displacement deviations in vibration transmission and has a certain structural strength to ensure the stability of vibration transmission. The thermal conductive filling layer 2132 is a thermal conductive silicone grease with a thermal conductivity of ≥ 5 W / m•K. The heat generated by the scoring of the tool head 212 is quickly transferred to the elastic metal layer 2131 through the thermal conductive silicone grease with high thermal conductivity, and then dissipated by the tool handle 211 to prevent the tool head 212 from overheating. The elastic metal layer 2131 made of beryllium bronze or titanium alloy has both elasticity and thermal conductivity, which further assists in heat transfer. This structure and parameter design not only ensures the fineness of the scoring through a small cutting edge radius, but also relies on the combination of the elastic metal layer 2131 of specific material and thickness and the high thermal conductive silicone grease to ensure efficient and stable transmission of high-frequency vibration and timely heat removal.

[0049] As another embodiment of the present application, the displacement drive unit 22 includes a y-axis linear module 221, a z-axis linear module 222 and a connecting member 223; the number of the connecting members 223 is two and they are spaced apart along the workbench 1 (along Figure 1A y-axis linear module 221 is installed between the two connecting members 223, and a z-axis linear module 222 is installed on the y-axis linear module 221. The length direction of the z-axis linear module 222 is perpendicular to the surface of the workbench 1, and the z-axis linear module 222 is also connected to the ultrasonic generating unit 3.

[0050] In this embodiment, referring to Figure 1 As shown, in the displacement drive unit 22, the connecting member 223 supports the y-axis linear module 221, and the z-axis linear module 222 is installed on the y-axis linear module 221 (the length direction is perpendicular to the surface of the workbench 1) and is connected to the ultrasonic generating unit 3. When working, the y-axis linear module 221 drives the z-axis linear module 222 to move along the width direction of the workbench 1 (i.e. Figure 1 The z-axis linear module 222 controls the vertical movement of the ultrasonic generator unit 3 and the tool assembly 21. The two work together to achieve precise feeding of the tool along the vertical and horizontal paths to adjust the spatial position of the ultrasonic generator unit 3 and the tool assembly 21, thereby driving the tool assembly 21 to perform notching on the substrate.

[0051] As another embodiment of the present application, the workbench 1 is provided with a control system 4, and the control system 4 is electrically connected to the cutting mechanism 2 and the ultrasonic generating unit 3; The ultrasonic generating unit 3 includes an ultrasonic generator 31 and an amplitude monitoring module 32. The ultrasonic generator 31 is installed between the z-axis linear module 222 and the amplitude transformer 51. The amplitude monitoring module 32 is installed on the tool assembly 21 and is used to detect the vibration amplitude of the tool assembly 21 in real time and feed the detection data back to the control system 4.

[0052] In this embodiment, referring to Figures 1 to 3 As shown, the control system 4 of the workbench 1 is electrically connected to the cutting mechanism 2 and the ultrasonic generating unit 3. The ultrasonic generator 31 of the ultrasonic generating unit 3 is installed between the z-axis linear module 222 and the amplitude rod 51, and the amplitude monitoring module 32 is installed on the tool assembly 21. During operation, the control system 4 regulates the displacement driving unit 22 of the cutting mechanism 2 to drive the tool to move, and at the same time controls the ultrasonic generator 31 to generate high-frequency vibration and transmit it through the amplitude rod 51. The amplitude monitoring module 32 detects the vibration amplitude of the tool assembly 21 in real time and feeds back to the control system 4, forming a closed-loop control, so that the system can adjust the ultrasonic output and displacement parameters in time according to the feedback, ensure the stability of the vibration amplitude, ensure the uniformity of the cutting depth and the consistency of the accuracy, avoid cutting defects caused by amplitude fluctuations, and improve the cutting quality and stability.

[0053] As another embodiment of the present application, the vibration conduction component 5 also includes an impedance matching layer 53, which is arranged between the amplitude transformer 51 and the tuning block 52. The acoustic impedance value of the impedance matching layer 53 is between the acoustic impedance of the amplitude transformer 51 and the acoustic impedance of the tool assembly 21, and is used to reduce the reflection of ultrasonic energy.

[0054] In this embodiment, referring to Figure 3 As shown, the impedance matching layer 53 of the vibration conduction component 5 is arranged between the horn 51 and the tuning block 52, and its acoustic impedance value is between the acoustic impedance of the horn 51 and the tool assembly 21. During operation, the high-frequency vibration generated by the ultrasonic generator 31 is amplified by the horn 51 and transmitted to the impedance matching layer 53. Due to the gradient transition characteristics of the acoustic impedance value, the energy reflection of the ultrasonic wave at the interface between the horn 51 and the tool assembly 21 can be effectively reduced, so that more vibration energy can be efficiently transmitted to the tool assembly 21 after optimizing the frequency matching through the tuning block 52, thereby enhancing the vibration intensity of the cutter head 212, thereby improving the substrate cutting efficiency, and at the same time reducing the interface heating caused by energy reflection, reducing component loss, and extending service life. The setting of the impedance matching layer 53 not only ensures the efficient transmission of high-frequency vibration, but also improves the stability and durability of the device.

[0055] As another embodiment of the present application, the workbench 1 is provided with an x-axis linear module 61 and a slide rail 62 along the length direction. The x-axis linear module 61 is provided with an adsorption platform 7. The slide rail 62 is slidably connected to a slider 63 connected to the adsorption platform 7.

[0056] In this embodiment, referring to Figure 4 As shown, the x-axis linear module drives the adsorption platform 7 along the length direction (ie Figure 1 The slide 63 moves along the slide rail 62 in the middle X direction, and the two cooperate to make the adsorption platform 7 move stably when carrying the substrate, avoiding the deflection caused by the single-point drive, and ensuring the relative position accuracy of the substrate and the tool assembly 21 when the adsorption platform 7 moves. The sliding connection between the slide rail 62 and the slide 63 can also share the load of the adsorption platform 7, reduce the stress deformation of the x-axis linear module, and improve the movement stability. At the same time, the x-axis linear module cooperates with the y-axis linear module 221 and the z-axis linear module 222 to form a three-axis linkage movement system (based on Figure 1 The x-axis linear module controls the movement of the adsorption platform 7 and the substrate along the length of the worktable 1. The y-axis linear module 221 and the z-axis linear module 222 control the movement of the tool assembly 21 along the width of the worktable 1 and perpendicular to the surface of the worktable 1, respectively. This three-axis motion system can meet various substrate scoring requirements.

[0057] In addition, the adsorption platform 7 can fix the substrate through vacuum negative pressure adsorption. When the tool cuts along the preset path, it can firmly fix the substrate to prevent it from being displaced or shaken due to the high-frequency vibration of the tool and the feed force, ensuring that the cutting trajectory is precisely consistent with the preset path, avoiding cutting defects caused by position deviation; at the same time, the stable fixed state can reduce substrate vibration, and combined with the high-frequency vibration cutting of the tool, it can further reduce the risk of edge chipping, improve the consistency of cutting quality, and provide a reliable foundation for efficient and accurate substrate cutting operations.

[0058] In addition, the z-axis linear module 222 and the ultrasonic generating unit 3 can also be connected through a rotating structure. The rotating structure includes a motor, a worm gear mechanism, etc., as long as it can rotate to adjust the position of the ultrasonic generating unit 3, thereby indirectly adjusting the orientation of the tool assembly 21 to change the direction of the cut, such as changing the horizontal direction to the vertical direction (based on Figure 1 axis x-axis and y-axis direction).

[0059] Throughout this specification, reference to terms such as "an embodiment," "one embodiment," "certain embodiments," "illustrative embodiments," "example," "specific example," or "some examples" means that a specific feature, structure, material, or characteristic described in conjunction with the embodiment or example is included in at least one embodiment or example of the present application. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0060] The technical principles of the present application have been described above in conjunction with specific embodiments. These descriptions are intended solely to explain the principles of the present application and should not be construed in any way as limiting the scope of protection of the present application. Based on the explanations herein, those skilled in the art will be able to conceive of other specific embodiments of the present application without inventive effort, and such equivalent variations or substitutions are encompassed within the scope defined by the claims of the present application.

Claims

1. A substrate ultrasonic-assisted cutting device, comprising a workbench (1), characterized in that: A cutting mechanism (2), the cutting mechanism (2) being arranged on the workbench (1), the cutting mechanism (2) comprising a tool assembly (21) and a displacement drive unit (22) for driving the tool assembly (21) to move along a cutting path; an ultrasonic generating unit (3), the ultrasonic generating unit (3) being arranged between the tool assembly (21) and the displacement driving unit (22) and being used for applying high-frequency vibration to the tool assembly (21); A vibration conduction component (5), wherein the vibration conduction component (5) is arranged between the ultrasonic generating unit (3) and the tool assembly (21), and the vibration conduction component (5) includes a variable amplitude rod (51) and a tuning block (52), one end of the variable amplitude rod (51) is connected to the ultrasonic generating unit (3) and is used to amplify the amplitude of the ultrasonic wave; the tuning block (52) is installed at the end of the variable amplitude rod (51) away from the ultrasonic generating unit (3), and the tuning block (52) is connected to the tool assembly (21), and the tuning block (52) is used to adjust the resonant frequency of the vibration system composed of the vibration conduction component (5) and the tool assembly (21), so that the resonant frequency matches the output frequency of the ultrasonic generating unit (3).

2. The ultrasonic-assisted cutting device for substrates according to claim 1, characterized in that: The ultrasonic generating unit (3) applies high-frequency vibration to the tool assembly (21) at a frequency of 20 to 100 kHz.

3. The ultrasonic-assisted cutting device for substrates according to claim 1, characterized in that: The tool assembly (21) comprises: A knife handle (211), one end of the knife handle (211) is fixedly connected to the tuning block (52); a cutter head (212), the cutter head (212) being detachably mounted on an end of the cutter handle (211) away from the tuning block (52); An ultrasonic coupling layer (213) is provided at the assembly joint surface between the knife handle (211) and the knife head (212), and the ultrasonic coupling layer (213) is composed of a functional layer having both elasticity and thermal conductivity.

4. The ultrasonic-assisted cutting device for substrates according to claim 3, characterized in that: The ultrasonic coupling layer (213) comprises: an elastic metal layer (2131), the elastic metal layer (2131) being installed between the knife handle (211) and the knife head (212); A heat-conducting filling layer (2132), wherein the filling position of the heat-conducting filling layer (2132) includes: between the elastic metal layer (2131) and the surface of the knife handle (211), or between the elastic metal layer (2131) and the surface of the knife head (212), or between the elastic metal layer (2131) and the surface of the knife handle (211), and between the elastic metal layer (2131) and the surface of the knife head (212) are filled simultaneously.

5. The ultrasonic-assisted cutting device for substrates according to claim 4, characterized in that: The cutting edge radius of the cutter head (212) is 5 to 10 μm; the thickness of the elastic metal layer (2131) is 0.1 to 0.5 mm, and the material is beryllium bronze or titanium alloy; the thermal conductive filling layer (2132) is thermal conductive silicone grease, and the thermal conductivity of the thermal conductive silicone grease is greater than or equal to 5 W / m·K.

6. The ultrasonic-assisted cutting device for substrates according to claim 1, characterized in that: The displacement drive unit (22) comprises a y-axis linear module (221), a z-axis linear module (222) and a connecting member (223); the number of the connecting members (223) is two and they are arranged at intervals along the workbench (1); a y-axis linear module (221) is installed between the two connecting members (223), a z-axis linear module (222) is installed on the y-axis linear module (221), the length direction of the z-axis linear module (222) is perpendicular to the surface of the workbench (1), and the z-axis linear module (222) is also connected to the ultrasonic generating unit (3).

7. The ultrasonic-assisted substrate cutting device according to claim 1, characterized in that: The workbench (1) is provided with a control system (4), and the control system (4) is electrically connected to the cutting mechanism (2) and the ultrasonic generating unit (3).

8. The ultrasonic-assisted substrate cutting device according to claim 7, characterized in that: The ultrasonic generating unit (3) comprises: An ultrasonic generator (31), the ultrasonic generator (31) being installed between the z-axis linear module (222) and the horn (51); An amplitude monitoring module (32) is installed on the tool assembly (21) and is used to detect the vibration amplitude of the tool assembly (21) in real time and feed back the detection data to the control system (4).

9. The ultrasonic-assisted substrate cutting device according to claim 1, characterized in that: The vibration conduction component (5) further includes an impedance matching layer (53), the impedance matching layer (53) being arranged between the amplitude variable rod (51) and the tuning block (52), and the acoustic impedance value of the impedance matching layer (53) being between the acoustic impedance of the amplitude variable rod (51) and the acoustic impedance of the tool assembly (21).

10. The ultrasonic-assisted substrate cutting device according to claim 1, characterized in that: The workbench (1) is provided with an x-axis linear module (61) and a slide rail (62) along the length direction; the x-axis linear module (61) is provided with an adsorption platform (7); and the slide rail (62) is slidably connected to a slider (63) connected to the adsorption platform (7).

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