Oxide high-barrier coating equipment and vacuum winding system thereof

Abstract

The invention relates to the technical field of coating equipment, and particularly discloses oxide high-barrier coating equipment and a vacuum winding system thereof.The oxide high-barrier coating equipment comprises a vacuum coating box, an exhaust pipe is fixedly connected to one side of the top end of the vacuum coating box, the exhaust pipe is fixed to the vacuum coating box, and a first pump body, a second pump body and a third pump body are installed on the exhaust pipe; the low-efficiency air exhaust mode of a traditional single vacuum pump is changed, the primary rotary vane pump rapidly pre-exhausts most air, the intermediate roots pump increases the air exhaust speed in a relay mode, the high-grade molecular pump accurately achieves the high vacuum degree, all the pump bodies cooperate in a division mode, and the air exhaust efficiency is improved. The time for the vacuum coating chamber to reach the target vacuum degree is remarkably shortened, the overall efficiency of the vacuum pumping system is greatly improved, meanwhile, gas residues are effectively reduced in the multi-stage pumping process, the external air permeation risk is reduced, a more stable vacuum environment is created for coating, and the coating quality and effect are improved.

Description

Technical Field

[0001] The present invention relates to the technical field of film coating equipment, in particular to an oxide high-barrier film coating equipment and a vacuum winding system thereof. Background Art

[0002] In many fields such as packaging and electronic display, oxide high-barrier films are widely used due to their excellent barrier properties against oxygen and water vapor. Oxide high-barrier coating equipment gives the substrate high barrier properties by coating an oxide film layer on the surface of the substrate film.

[0003] At present, there are some problems in the actual application of the existing oxide high-barrier coating equipment. The traditional single vacuum pump is difficult to quickly reach the high vacuum degree required for coating, the pumping time is long, and the vacuum pumping system is inefficient. During the vacuum winding process, it is easy for outside air to enter, affecting the coating quality and effect. In addition, the target material utilization rate in the coating device is low. After long-term use, the traditional fixed target material has uneven surface sputtering, resulting in material waste. In addition, the existing substrate film winding roller is usually installed on the equipment bracket by bolt fastening or key connection. When performing roller installation and disassembly operations, the staff needs to use a variety of tools such as wrenches and screwdrivers to disassemble multiple fixed components in turn. The entire disassembly and assembly process is cumbersome and complicated, and consumes a lot of manpower and time costs. Summary of the Invention

[0004] The object of the present invention is to provide an oxide high-barrier coating device and a vacuum winding system thereof to solve the problems raised in the above background technology.

[0005] To achieve the above-mentioned objectives, the present invention provides an oxide high-barrier coating device, comprising a vacuum coating box, wherein a vacuum coating box is fixedly connected to a vacuum pipe on one side of the top end, a first pump body is fixedly connected to one side of the vacuum coating box, a second pump body is fixedly connected to the vacuum pipe on one side of the first pump body, a third pump body is fixedly connected to the vacuum pipe on one side of the second pump body, a gas filter cover is fixedly connected to the side where the vacuum coating box extends into the vacuum coating box, a gas supply pipe is fixedly connected to the top end of the vacuum coating box on one side of the vacuum coating pipe, a gas distributor is fixedly connected to the bottom end of the gas supply pipe, an adjustment mechanism is provided on one side of the vacuum coating box, and a target body is rotatably connected to the interior of the vacuum coating box through the adjustment mechanism.

[0006] Furthermore, the adjustment mechanism includes a fixed seat, which is fixedly connected to the top inner wall of the vacuum coating box. A first power component is provided on one side of the fixed seat. The interior of the fixed seat is rotatably connected to a first screw rod through the first power component. The outer surface of the first screw rod is threadedly connected to a first slider. The first slider is slidably connected to the interior of the fixed seat, and a transmission component is provided between the first slider and the target material body.

[0007] Furthermore, the first power assembly includes a first motor, which is fixedly connected to one side of a fixed base, an output end of the first motor is fixedly connected to a first driving gear, one side of the first driving gear is meshedly connected to a first driven gear, and one side of the first driven gear is fixedly connected to one side of the first screw rod.

[0008] Furthermore, the transmission assembly includes a first block, which is fixedly connected to one side of the first slider, and the first block is hinged to a first hinged rod on a side away from the first slider, and the first hinged rod is hinged to a second block on a side away from the first block, and one side of the second block is fixedly connected to an assembly plate, and the target body is fixedly connected to the assembly plate, and a third block is fixedly connected to a side of the top inner wall of the vacuum coating box close to the fixed seat, and one side of the third block is hinged to a second hinged rod, and the second hinged rod is hinged to a fourth block on a side away from the third block, and one side of the fourth block is fixedly connected to one side of the assembly plate.

[0009] Furthermore, one side of the exhaust pipe is fixedly connected to a docking pipe, and the side of the docking pipe away from the exhaust pipe is fixedly connected to a flange.

[0010] Furthermore, eddy current heating devices are fixedly connected to both sides of the interior of the vacuum coating box, and the two eddy current heating devices are alternately arranged in opposite directions.

[0011] The lifting of the ...

[0012] Furthermore, the second power assembly includes a second motor, which is fixedly connected to the back of the vacuum coating box. The output end of the second motor is fixedly connected to a second driving gear, one side of the second driving gear is meshed with a second driven gear, and one side of the second driven gear is fixedly connected to one side of the sleeve shaft.

[0013] Furthermore, the first repositioning component includes a third motor, which is fixedly connected to both sides of the interior of the vacuum coating box, and the output end of the third motor is fixedly connected to a second screw rod, and the outer surface of the second screw rod is threadedly connected to a second slider, and the second slider is slidably connected to the interior of the cavity of the vacuum coating box, and one side of the second slider is fixedly connected to a moving block, and the second repositioning component is arranged on the moving block.

[0014] Furthermore, the second repositioning component includes a fourth motor, which is fixedly connected to one side of the interior of the moving block. The output end of the fourth motor is fixedly connected to a third screw rod, and the outer surface of the third screw rod is threadedly connected to a third slider, and the third slider is slidably connected to the interior of the moving block.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] First, in the present invention, by fixing the exhaust pipe on the vacuum coating box, installing the first pump body, the second pump body, and the third pump body on the exhaust pipe, which are the primary rotary vane pump, the intermediate Roots pump, and the advanced molecular pump respectively, the inefficient exhaust mode of the traditional single vacuum pump is changed. The primary rotary vane pump quickly pre-extracts most of the gas, the intermediate Roots pump relays to increase the exhaust speed, and the advanced molecular pump accurately achieves a high vacuum degree. The pump bodies work together to significantly shorten the time it takes for the vacuum coating chamber to reach the target vacuum degree, greatly improving the overall efficiency of the vacuum exhaust system. At the same time, the multi-stage exhaust process effectively reduces gas residue and reduces the risk of external air infiltration, creating a more stable vacuum environment for coating, and improving the quality and effect of coating.

[0017] Secondly, in the present invention, a fixed seat is installed on the vacuum coating box, and the first power component is used to drive the first screw in the fixed seat to rotate, so that the first slider on the first screw slides in the fixed seat, and the transmission component is driven to work by the first slider, so that the transmission component drives the target body to rotate and adjust the inclination angle. Compared with the traditional fixed target material, this design can effectively avoid uneven sputtering, so that the atoms or molecules on the surface of the target body are evenly sputtered to the substrate film. During the coating process, the utilization rate of each part of the target material can be balanced, reducing material waste and significantly improving the overall utilization rate of the target material.

[0018] Thirdly, in the present invention, by rotating two sleeve shafts in the vacuum coating box, a winding roller and a guide roller are respectively installed on the two sleeve shafts, and the first repositioning component and the second repositioning component cooperate to drive the assembly block to move, and the force block on the assembly block is rotated, and the force block is driven by the assembly block to be inserted into the force groove of the sleeve shaft, so that the sleeve shaft can be closed. Therefore, the cumbersome disassembly and assembly method of traditional bolt fastening or key connection is solved, and there is no need to use multiple tools for disassembly, which greatly simplifies the disassembly and assembly process of the winding roller and the unwinding roller, and reduces the difficulty of equipment maintenance. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a structural schematic diagram of the present invention;

[0020] Figure 2 This is a schematic diagram of the structure of the vacuum coating box in the present invention when viewed from above;

[0021] Figure 3 This is a schematic diagram of the structure of the vacuum coating box in the present invention when viewed from above from the other side;

[0022] Figure 4 For the present invention Figure 3 A schematic diagram of the enlarged structure at point A;

[0023] Figure 5 This is a schematic diagram of the back structure of the present invention;

[0024] Figure 6 This is a schematic diagram of the internal structure of one side of the vacuum coating box in the present invention;

[0025] Figure 7 For the present invention Figure 6 A schematic diagram of the enlarged structure at point B;

[0026] Figure 8 This is a schematic diagram of the structure of one side of the winding roller and the assembly plate in the present invention;

[0027] Figure 9 It is a schematic diagram of the assembly plate structure in the present invention.

[0028] In the figure: 1. Vacuum coating box; 2. Exhaust pipe; 3. First pump body; 4. Second pump body; 5. Third pump body; 6. Air filter cover; 7. Gas distributor; 8. Gas supply pipe; 9. Target body; 10. Adjustment mechanism; 101. Fixing seat; 102. First screw rod; 103. First slider; 104. First power assembly; 1041. First motor; 1042. First driving gear; 1043. First driven gear; 105. Transmission assembly; 1051. First block; 1052. First hinged rod; 1053. Second block; 1054. Third block; 1055. Second hinged rod; 1056 , fourth block; 1057, assembly plate; 11, docking tube; 12, flange; 13, eddy current heating device; 14, unwinding roller; 15, winding roller; 16, guide roller; 17, second power assembly; 171, second motor; 172, second driving gear; 173, second driven gear; 18, sleeve; 19, force groove; 20, force block; 21, assembly block; 22, first repositioning assembly; 221, third motor; 222, second screw rod; 223, second slider; 224, moving block; 23, second repositioning assembly; 231, fourth motor; 232, third screw rod; 233, third slider. DETAILED DESCRIPTION

[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0030] See also Figures 1-9 In an embodiment of the present invention, an oxide high-barrier coating device includes a vacuum coating box 1. The vacuum coating box 1 is also hinged with a sealed box door, which is not shown in the figure. It belongs to the conventional structure of this technology. The vacuum coating box 1 is sealed and blocked. An exhaust pipe 2 is fixedly connected to one side of the top of the vacuum coating box 1. One side of the exhaust pipe 2 is fixedly connected to a first pump body 3. A second pump body 4 is fixedly connected to the exhaust pipe 2 on one side of the first pump body 3. A third pump body 5 is fixedly connected to the exhaust pipe 2 on one side of the second pump body 4. The exhaust pipe 2 extends into the vacuum coating box 1 and is fixedly connected to a gas filter cover 6, which is made of nickel-based alloy and can filter some impurities in the gas. A plurality of vacuum pressure sensors are also installed inside the vacuum coating box 1, which are not shown in the figure. It belongs to the conventional structure of this technology and can collect real-time data at different positions in the vacuum coating box 1. The vacuum degree data is set, the top of the vacuum coating box 1 is located on one side of the exhaust pipe 2 and is fixedly connected to a gas supply pipe 8, the gas supply pipe 8 is connected to an external gas source, and the gas is transported to the gas distributor 7 through the gas supply pipe 8, and the gas is evenly distributed in the vacuum coating box 1 by the gas distributor 7, and the bottom end of the gas supply pipe 8 is fixedly connected to the gas distributor 7. An adjustment mechanism 10 is provided on one side of the vacuum coating box 1. By adjusting the angle, targeted sputtering is performed on different areas of the film to improve the coating efficiency. The interior of the vacuum coating box 1 is rotatably connected to a target body 9 through the adjustment mechanism 10. The target body 9 is a rectangular structure and is suitable for the coating of large-area substrate films. It should be supplemented that a magnetron sputtering power supply is provided outside the vacuum coating box 1, which is connected to the internal target material through a feed-through device to provide energy for the magnetron sputtering process and form a plasma environment.

[0031] See also Figures 1-4The adjusting mechanism 10 includes a fixed seat 101, which is fixedly connected to the inner wall of the top of the vacuum coating box 1. A first power component 104 is provided on one side of the fixed seat 101. The interior of the fixed seat 101 is rotatably connected to a first screw rod 102 through the first power component 104. The outer surface of the first screw rod 102 is threadedly connected to a first slider 103. The first slider 103 is slidably connected to the interior of the fixed seat 101. A transmission component 105 is provided between the first slider 103 and the target body 9. The first power component 104 includes a first motor 1041, which is fixedly connected to one side of the fixed seat 101. The first motor The output end of the motor 1041 is fixedly connected to the first driving gear 1042, one side of the first driving gear 1042 is meshedly connected to the first driven gear 1043, and one side of the first driven gear 1043 is fixedly connected to one side of the first screw rod 102; by setting the adjustment mechanism 10, when it is necessary to adjust the angle of the target body 9, the first motor 1041 drives the first driving gear 1042 to rotate, and the first driving gear 1042 meshes and drives the first driven gear 1043 to rotate, thereby rotating the first screw rod 102 connected to the first driven gear 1043, causing the first slider 103 to slide inside the fixed block, and driving the target body 9 to rotate through the transmission assembly 105 to adjust the inclination angle.

[0032] See also Figures 1-2 The transmission assembly 105 includes a first block 1051, which is fixedly connected to one side of the first slider 103. The first block 1051 is hinged to a first hinged rod 1052 on the side away from the first slider 103. The first hinged rod 1052 is hinged to a second block 1053 on the side away from the first block 1051. One side of the second block 1053 is fixedly connected to an assembly plate 1057. The target body 9 is fixedly connected to the assembly plate 1057. The top inner wall of the vacuum coating box 1 is fixedly connected to a side close to the fixed seat 101. The third block 1054 is hinged to a second hinged rod 1055 on one side of the third block 1054. The second hinged rod 1055 is away from the third block 1 A fourth block 1056 is hinged on one side of 054, and one side of the fourth block 1056 is fixedly connected to one side of the assembly plate 1057; by setting a transmission component 105, the first slider 103 drives the first block 1051 to move, and the first block 1051 pushes the second block 1053 through the first hinge rod 1052, and the second block 1053 drives the assembly plate 1057 and the target body 9 fixed thereon to move; at the same time, the structure composed of the third block 1054, the second hinge rod 1055 and the fourth block 1056 plays a supporting and auxiliary adjustment role to ensure the smooth rotation of the target body 9, and by flexibly adjusting the angle of the target body 9, the atoms or molecules on the surface of the target are evenly sputtered to the substrate film, thereby improving the utilization of various parts of the target body 9.

[0033] See also Figure 1 One side of the exhaust pipe 2 is fixedly connected to a butt joint 11, and the side of the butt joint 11 away from the exhaust pipe 2 is fixedly connected to a flange 12; by setting the butt joint 11 and the flange 12, it can be used to connect other auxiliary equipment to improve scalability.

[0034] See also Figures 1-2 , both sides of the interior of the vacuum coating box 1 are fixedly connected with eddy current heating devices 13, and the two eddy current heating devices 13 are arranged alternately in opposite directions; before the substrate film enters the coating link, the eddy current heating devices 13 on both sides of the interior of the vacuum coating box 1 are started, and the two eddy current heating devices 13 arranged alternately in opposite directions generate an alternating magnetic field, so that the substrate film in the magnetic field generates an induced current, and the current flows inside the film to generate heat, thereby preheating the film. The eddy current heating device 13 preheats the substrate film, effectively improves the surface activity of the film, enhances the adhesion between the coating layer and the film, avoids the coating layer from falling off or the appearance of bubbles and other defects, and improves the coating quality. It should be noted that the eddy current heating device 13 is mainly composed of an electromagnetic coil and a power controller. and a heat-insulating protective shell. The electromagnetic coil is the core component and is usually wound with high-conductivity copper wire. It is distributed on the inner wall of the vacuum coating box 1 through a special winding process and is used to generate an alternating magnetic field; the power controller is responsible for providing stable and adjustable alternating current to the electromagnetic coil. By changing the frequency and intensity of the current, the intensity and characteristics of the generated magnetic field are accurately controlled, thereby adjusting the heating temperature of the substrate film; the heat-insulating protective shell is wrapped around the outside of the electromagnetic coil and is made of a material with good heat-insulating properties. It can prevent heat loss and improve heating efficiency, and protect the electromagnetic coil from the influence of the external environment. At the same time, it prevents operators from accidentally contacting high-temperature components to ensure the safe operation of the equipment. The above structural composition and working principle belong to the existing technology and will not be elaborated here.

[0035] See also Figures 1-2, a vacuum winding system for oxide high barrier coating equipment, the interior of the vacuum coating box 1 is rotatably connected with sleeve shafts 18 on both sides, the cross-section of the sleeve shaft 18 is a square structure, one side of the sleeve shaft 18 is sleeved with a unwinding roller 14, and one side of the other sleeve shaft 18 is sleeved with a winding roller 15, the interior of the vacuum coating box 1 is provided with a guide roller 16 between the unwinding roller 14 and the winding roller, and the guide roller 16 is provided with multiple groups, and the multiple groups of guide rollers 16 can guide the substrate to pass through, which is convenient for the unwinding and rewinding work. The back side of the vacuum coating box 1 is fixedly connected with a second power assembly 17, and the unwinding roller 14 and the winding roller 15 are both rotatably connected to the vacuum coating box 1 through the second power assembly 17. Inside the membrane box 1, a force groove 19 is opened on one side of the sleeve shaft 18, and a force block 20 is inserted into the inside of the force groove 19. The cross-sections of the force groove 19 and the force block 20 are both diamond-shaped structures. One side of the force block 20 is rotatably connected with an assembly block 21. The force block 20 is inserted into the force groove 19. When the sleeve shaft 18 rotates, the other side of the sleeve shaft 18 and the assembly block 21 can be rotated to make the rotation of the sleeve shaft 18 stable. Both sides of the vacuum coating box 1 are provided with a first repositioning component 22, and one side of the first repositioning component 22 is provided with a second repositioning component 23. The assembly block 21 is movably connected to the inside of the vacuum coating box 1 through the first repositioning component 22 and the second repositioning component 23.

[0036] See also Figure 5 The second power assembly 17 includes a second motor 171, which is fixedly connected to the back of the vacuum coating box 1, and the output end of the second motor 171 is fixedly connected to the second driving gear 172, and one side of the second driving gear 172 is meshed with the second driven gear 173, and one side of the second driven gear 173 is fixedly connected to one side of the sleeve shaft 18; by setting the second power assembly 17, the second motor 171 drives the second driving gear 172 to rotate, and the second driving gear 172 drives the second driven gear 173 to rotate, so that the second driven gear 173 drives the sleeve shaft 18 to rotate, so that the unwinding roller 14 mounted on the sleeve shaft 18 releases the substrate film, or the winding roller 15 winds up the film that has been coated, and the square cross-section design of the sleeve shaft 18 ensures stable transmission between the unwinding roller 14 and the winding roller 15 to prevent slipping.

[0037] See also Figure 7The first repositioning component 22 includes a third motor 221, which is fixedly connected to both sides of the interior of the vacuum coating box 1. The output end of the third motor 221 is fixedly connected to a second screw rod 222, and the outer surface of the second screw rod 222 is threadedly connected to a second slider 223. The second slider 223 is slidably connected to the interior of the cavity of the vacuum coating box 1, and one side of the second slider 223 is fixedly connected to a moving block 224. The second repositioning component 23 is arranged on the moving block 224; by setting the first repositioning component 22, after the unwinding roller 14 or the winding roller 15 is sleeved on the sleeve shaft 18, the third motor 221 is used to drive the second screw rod 222 to rotate, drive the second slider 223 to slide, so that the second slider 223 drives the moving block 224 to move, thereby causing the moving block 224 to drive the assembly block 21 to move, so that the force block 20 is docked with the force groove 19.

[0038] See also Figures 8-9 , the second repositioning component 23 includes a fourth motor 231, the fourth motor 231 is fixedly connected to the inner side of the moving block 224, the output end of the fourth motor 231 is fixedly connected to the third screw rod 232, the outer surface of the third screw rod 232 is threadedly connected to the third slider 233, and the third slider 233 is slidably connected to the inside of the moving block 224; by setting the second repositioning component 23, when it is necessary to place the unwinding roller 14 and the winding roller 15, the fourth motor 231 is used to drive the third screw rod 232 to rotate, so that the third slider 233 on the surface of the third screw rod 232 moves, so that the third slider 233 drives the assembly block 21 to move upward, so that it leaves the side of the sleeve shaft 18, so as to facilitate the placement of the winding roller 15 or the unwinding roller 14.

[0039] The working principle of the present invention is as follows: when the unwinding roller 14 and the winding roller 15 with the substrate are installed on the sleeve shaft 18, the fourth motor 231 is used to drive the third screw rod 232 to rotate, so that the third slider 233 on the surface of the third screw rod 232 moves, and drives the assembly block 21 to move upward, so that it leaves one side of the sleeve shaft 18, so as to facilitate the insertion of the winding roller 15 or the unwinding roller 14. After completion, the assembly block 21 is reset, the unwinding roller 14 is sleeved on one side of the sleeve shaft 18, and the winding roller 15 is sleeved on the other side of the sleeve shaft 18, and the third motor 221 is used to drive the second screw rod 222 to rotate, drive the second slider 223 to slide, so that the second slider 223 drives the moving block 224 to move, so that the moving block 224 drives the assembly block 21 to move, so that the force block 20 is aligned with the force groove 1 9 docking, complete the installation of the unwinding roller 14 and the winding roller 15. When the equipment is working, start the first pump body 3, the second pump body 4 and the third pump body 5, which are the primary rotary vane pump, the intermediate Roots pump and the advanced molecular pump respectively, which changes the inefficient exhaust mode of the traditional single vacuum pump. The primary rotary vane pump quickly pre-extracts most of the gas, the intermediate Roots pump relays to increase the exhaust speed, and the advanced molecular pump accurately achieves a high vacuum degree. The division of labor and cooperation of each pump body significantly shortens the time for the vacuum coating chamber to reach the target vacuum degree, greatly improving the overall efficiency of the vacuum exhaust system. At the same time, the multi-stage exhaust process effectively reduces gas residue and reduces the risk of external air infiltration, creating a more stable vacuum environment for coating, and improving the coating quality and effect. Before the substrate film enters the coating link, both sides of the interior of the vacuum coating box 1 The eddy current heating devices 13 arranged alternately in opposite directions are started, and the electromagnetic coil generates an alternating magnetic field, so that the substrate film in the magnetic field generates an induced current. The current flows inside the film to generate heat, thereby preheating the film and improving the surface activity of the film. When the angle of the target body 9 needs to be adjusted, the first motor 1041 drives the first driving gear 1042 to rotate, and the first driving gear 1042 engages and drives the first driven gear 1043 to rotate, thereby rotating the first screw rod 102 connected to the first driven gear 1043, so that the first slider 103 slides inside the fixed block, and the first slider 103 drives the first block 1051 to move, and the first block 1051 pushes the second block 1053 through the first hinge rod 1052, and the second block 1051 moves. 53 drives the assembly plate 1057 and the target body 9 fixed thereon to move. At the same time, the structure composed of the third block 1054, the second hinged rod 1055 and the fourth block 1056 plays a supporting and auxiliary adjustment role, ensuring that the target body 9 rotates smoothly and is adjusted to a suitable tilt angle, effectively avoiding uneven sputtering, so that the atoms or molecules on the surface of the target body 9 are evenly sputtered to the substrate film. During the coating process, the utilization rate of each part of the target is balanced, reducing material waste. Since the magnetron sputtering power supply is connected to the internal target body 9 through the feed-through device, it provides energy for the magnetron sputtering process and forms a plasma environment. The second motor 171 drives the second driving gear 172 to rotate, and the second driving gear 172 drives the second driven gear 173 to rotate.The second driven gear 173 drives the sleeve shaft 18 to rotate, and the unwinding roller 14 unwinds the substrate film. As the film moves within the vacuum coating chamber 1, atoms or molecules on the surface of the target material are evenly sputtered onto the surface of the substrate film under the plasma environment, completing the coating. The winding roller 15 rotates synchronously to rewind the coated film.

Claims

1. An oxide high barrier coating device, characterized in that: The invention comprises a vacuum coating box (1), wherein a vacuum pipe (2) is fixedly connected to one side of the top of the vacuum coating box (1), a first pump body (3) is fixedly connected to one side of the vacuum coating box (2), a second pump body (4) is fixedly connected to one side of the vacuum coating box (2) located on the first pump body (3), a third pump body (5) is fixedly connected to one side of the vacuum coating box (2) located on the second pump body (4), a filter cover (6) is fixedly connected to one side of the vacuum coating box (1) where the vacuum coating box (2) extends, a gas supply pipe (8) is fixedly connected to one side of the vacuum coating box (1) located on the top of the vacuum coating box (1), a gas supply pipe (8) is fixedly connected to the bottom end of the gas supply pipe (8), an adjustment mechanism (10) is provided on one side of the vacuum coating box (1), and a target body (9) is rotatably connected to the interior of the vacuum coating box (1) through the adjustment mechanism (10).

2. The oxide high barrier coating device according to claim 1, characterized in that: The adjustment mechanism (10) includes a fixed seat (101), the fixed seat (101) is fixedly connected to the top inner wall of the vacuum coating box (1), a first power assembly (104) is provided on one side of the fixed seat (101), the interior of the fixed seat (101) is rotatably connected to a first screw rod (102) through the first power assembly (104), the outer surface of the first screw rod (102) is threadedly connected to a first slider (103), the first slider (103) is slidably connected to the interior of the fixed seat (101), and a transmission assembly (105) is provided between the first slider (103) and the target body (9).

3. The oxide high barrier coating device according to claim 2, characterized in that: The first power assembly (104) comprises a first motor (1041), the first motor (1041) being fixedly connected to one side of a fixing base (101), an output end of the first motor (1041) being fixedly connected to a first driving gear (1042), one side of the first driving gear (1042) being meshedly connected to a first driven gear (1043), and one side of the first driven gear (1043) being fixedly connected to one side of the first screw rod (102).

4. The oxide high barrier coating device according to claim 2, characterized in that: The transmission assembly (105) comprises a first block (1051), the first block (1051) is fixedly connected to one side of the first slider (103), a first hinged rod (1052) is hinged to the side of the first block (1051) away from the first slider (103), a second block (1053) is hinged to the side of the first hinged rod (1052) away from the first block (1051), and a mounting plate (1057) is fixedly connected to one side of the second block (1053). The material body (9) is fixedly connected to the assembly plate (1057); a third block (1054) is fixedly connected to the side of the top inner wall of the vacuum coating box (1) close to the fixed seat (101); a second hinged rod (1055) is hinged to one side of the third block (1054); a fourth block (1056) is hinged to the side of the second hinged rod (1055) away from the third block (1054); and one side of the fourth block (1056) is fixedly connected to one side of the assembly plate (1057).

5. The oxide high barrier coating device according to claim 1, characterized in that: One side of the exhaust pipe (2) is fixedly connected to a butt joint pipe (11), and the side of the butt joint pipe (11) away from the exhaust pipe (2) is fixedly connected to a flange (12).

6. The oxide high barrier coating device according to claim 1, characterized in that: Both sides of the interior of the vacuum coating box (1) are fixedly connected with eddy current heating devices (13), and the two eddy current heating devices (13) are arranged alternately in opposite directions.

7. A vacuum winding system for the oxide high barrier coating equipment according to any one of claims 1 to 6, characterized in that: Both sides of the interior of the vacuum coating box (1) are rotatably connected to sleeve shafts (18), the cross section of the sleeve shaft (18) is a square structure, one side of the sleeve shaft (18) is sleeved with a reeling roller (14), and the other side of the sleeve shaft (18) is sleeved with a reeling roller (15), the interior of the vacuum coating box (1) is provided with a guide roller (16) between the reeling roller (14) and the reeling roller, and the guide roller (16) is provided with multiple groups, and both sides of the back of the vacuum coating box (1) are fixedly connected to a second power assembly (17), and the reeling roller (14) and the reeling roller (15) are rotatably connected to the vacuum coating box (1) through the second power assembly (17). Inside the empty coating box (1), a force groove (19) is provided on one side of the sleeve shaft (18), a force block (20) is inserted into the inside of the force groove (19), and the cross-sections of the force groove (19) and the force block (20) are both diamond-shaped structures. One side of the force block (20) is rotatably connected to an assembly block (21), and both sides of the vacuum coating box (1) are provided with a first repositioning component (22), and one side of the first repositioning component (22) is provided with a second repositioning component (23), and the assembly block (21) is movably connected to the inside of the vacuum coating box (1) through the first repositioning component (22) and the second repositioning component (23).

8. The vacuum winding system of the oxide high barrier coating equipment according to claim 7, characterized in that: The second power assembly (17) includes a second motor (171), the second motor (171) is fixedly connected to the back of the vacuum coating box (1), the output end of the second motor (171) is fixedly connected to a second driving gear (172), one side of the second driving gear (172) is meshedly connected to a second driven gear (173), and one side of the second driven gear (173) is fixedly connected to one side of the sleeve shaft (18).

9. The vacuum winding system of the oxide high barrier coating equipment according to claim 7, characterized in that: The first repositioning component (22) includes a third motor (221), the third motor (221) is fixedly connected to both sides of the interior of the vacuum coating box (1), the output end of the third motor (221) is fixedly connected to a second screw rod (222), the outer surface of the second screw rod (222) is threadedly connected to a second slider (223), the second slider (223) is slidably connected to the interior of the cavity of the vacuum coating box (1), one side of the second slider (223) is fixedly connected to a moving block (224), and the second repositioning component (23) is arranged on the moving block (224).

10. The vacuum winding system of the oxide high barrier coating equipment according to claim 9, characterized in that: The second repositioning assembly (23) includes a fourth motor (231), the fourth motor (231) is fixedly connected to one side of the interior of the moving block (224), the output end of the fourth motor (231) is fixedly connected to a third screw rod (232), the outer surface of the third screw rod (232) is threadedly connected to a third slider (233), and the third slider (233) is slidably connected to the interior of the moving block (224).

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