Gas cylinder replacement equipment used in special gas conveying system
By designing an automatically controlled gas cylinder replacement device in the special gas delivery system, the problems of valves not closing tightly and control system power failure are solved, and efficient and safe gas cylinder replacement and use are achieved.
Patent Information
- Application Number
- CN202511166439.6
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2025-08-20
- Publication Date
- 2025-10-10
AI Technical Summary
In the existing special gas delivery system, the valve is not closed tightly when the gas cylinder is replaced, resulting in leakage, the flow of foreign matter in the pipeline affects use, and the valve cannot be closed when the control system is powered off, resulting in gas mixing, posing a safety hazard.
A gas cylinder replacement device was designed, which includes a replacement mechanism, a filtering component and a cut-off component. It uses a solenoid valve, a pressure sensor and a controller to automatically control the replacement of gas cylinders, filter foreign matter, cut off gas flow, and reduce manual operations.
It improves the efficiency of gas cylinder replacement, prevents gas leakage and mixing, ensures safe use, reduces the impact of foreign matter on gas use, and avoids danger when the control system fails.
Smart Images
Figure CN120760059A_ABST
Abstract
Description
Technical Field
[0001] The present invention relates to the technical field of gas cylinder replacement, and in particular to a gas cylinder replacement device used in a special gas delivery system. Background Art
[0002] Gas cylinders are containers for storing gases. In the semiconductor manufacturing industry, chip production involves hundreds of steps, requiring the use of large quantities of specialized gases. These gases must be stored in gas cylinders. Most specialized gases are flammable, explosive, highly toxic, and corrosive. To ensure the safe transportation and use of these hazardous gases, semiconductor factories install electronic specialty gas systems equipped with specialized equipment such as electronic specialty gas cabinets (GCs), gas distribution boxes (VMBs), and specialty gas leak detection and alarms.
[0003] In addition, during the replacement of gas cylinders in the special gas delivery system, manual operation is usually used to close the cylinders. The current gas cylinder replacement equipment used in the special gas delivery system still has the following shortcomings when in use: When replacing an existing gas cylinder, personnel need to manually close the valve, dismantle the gas cylinder, carry the new gas cylinder to the pipeline, and then reconnect it. However, manually closing the valve may not be tight enough, causing gas leakage inside the pipeline. When gas flows inside the pipeline for a long time, foreign matter will be present inside. The foreign matter will flow into other pipelines along the pipeline, which will affect the subsequent use of the gas. Moreover, after long-term use of the filter structure, its surface will absorb too much foreign matter, which will affect the filter structure's ability to filter foreign matter. When the control system on the pipeline loses power, its valve cannot be closed, causing the gases inside the pipeline to mix together. This makes it easy for the gases to react, resulting in personal injury, which is also an urgent problem that needs to be solved. Summary of the Invention
[0004] In response to the deficiencies in the prior art, the present invention provides a gas cylinder replacement device for a special gas delivery system, which is mainly designed to solve the problem that when the gas cylinder is replaced, the valve is manually closed, which may not be closed tightly enough. The gas flows inside the pipeline for a long time, and foreign matter may exist inside. The foreign matter flows into other pipelines along the pipeline, which will affect the subsequent use of the gas. In addition, when the control system on the pipeline is powered off, the valve cannot be closed, resulting in the mixing of the gas inside the pipeline, which makes it easy for the gas to react and cause personal injury.
[0005] To achieve the above object, the present invention provides the following technical solutions: A gas cylinder replacement device for a special gas delivery system comprises a pipeline, wherein a guide tube is fixedly mounted on the bottom and one side of the surface of the pipeline, and a main gas cylinder and a spare gas cylinder are fixedly mounted on one end of the guide tube; A solenoid valve is fixedly mounted on one side of the guide tube surface, a pressure sensor is fixedly mounted on the other side of the guide tube surface and the surface of the pipeline, an exhaust pipe is fixedly mounted in the middle of the guide tube surface, and one end of the exhaust pipe is externally connected to a gas collecting device; The middle part of the pipeline surface is connected by a threaded pipe, a replacement mechanism is provided below the threaded pipe, a filter assembly is provided inside the threaded pipe, and a cut-off assembly is provided above the threaded pipe; A controller is fixedly installed on one side of the pipeline surface. The controller can control the solenoid valve and the pressure sensor, and the controller can also control the start-up of the replacement mechanism.
[0006] Based on the above-mentioned scheme, the replacement mechanism includes an installation frame fixedly installed on one side of the pipeline, an electric push rod is fixedly installed on the top of the installation frame, a connecting plate is fixedly installed on the output end of the electric push rod, a moving block is fixedly installed on the bottom of the connecting plate, and a positioning block is fixedly installed on one side inside the pipeline.
[0007] As a further solution of the present invention, a through groove is opened on the surface of the positioning block, and the through groove guides the gas flowing out of the spare gas cylinder. The through groove and the spare gas cylinder form an air flow channel.
[0008] The moving block moves up and down inside the pipeline through the connecting plate, and the moving block moves upward to seal and block the output end of the main gas cylinder.
[0009] Furthermore, after the replacement mechanism is started, the moving block moves upward, which will drive the moving block to block and seal the output end of the main gas cylinder. When the moving block moves downward, it cooperates with the positioning block to block and seal the output end of the spare gas cylinder. The replacement mechanism can be used to quickly switch between the main gas cylinder and the spare gas cylinder when the internal air pressure of the main gas cylinder is insufficient, reducing manual operation of personnel and improving the efficiency of replacing gas cylinders.
[0010] Based on the above scheme, the filter assembly includes guide grooves opened on both sides of the threaded tube, the inside of the guide groove is slidably connected to the filter plate, and telescopic rods are fixedly installed on both sides of the bottom of the filter plate, and a spring is sleeved on the surface of the telescopic rod.
[0011] As a further solution of the present invention, a limiting block is fixedly mounted on one end of the telescopic rod, the diameter of the limiting block is larger than the diameter of the spring, and one end of the spring is fixedly mounted on the back of the limiting block.
[0012] Furthermore, the filter assembly can be quickly and conveniently disassembled, which effectively improves the efficiency of reusing the filter plate after disassembly and cleaning. The filter plate is easy to install, reducing the traditional method of positioning with bolts. The filter assembly can adsorb and block foreign matter flowing inside the pipeline, reducing the foreign matter from entering other pipelines along the flow of gas and affecting the subsequent use of the gas. The quick-disassembly structure of the filter assembly facilitates its disassembly, and personnel can clean the filter assembly and reuse it.
[0013] Based on the above-mentioned scheme, the cutting component includes a control rod that is rotatably connected to the control plate, and a control rod is fixedly installed on the surface of the control plate. There are guide grooves on both sides of the surface of the control plate, and the inside of the guide groove is slidably connected to a guide rod. The bottom of the guide rod is fixedly installed with two sealing plates that are relatively arranged and adapted to each other. The edge of the sealing plate is slidably connected to a guide plate, and the guide plate is fixedly installed to the inside of the pipe.
[0014] As a further solution of the present invention, the size of the guide rod is adapted to the size of the guide groove, and the guide rod moves inside the guide groove to drive the sealing plate to move synchronously toward the middle or to both sides.
[0015] A limiting groove is provided in the middle of the surface of the guide plate. The size of the limiting groove matches the size of the sealing plate, and the sealing plate moves laterally inside the limiting groove.
[0016] An arc groove is provided on the surface of the pipe. The size of the arc groove matches the size of the control rod on the control panel, and the arc groove guides the control rod.
[0017] Furthermore, when the entire pipeline needs to be repaired or parts need to be replaced, personnel can cut off the pipeline through the cut-off component. When the pipeline is not powered, the control system cannot operate, which will cause gas loss and increase costs. When the pipeline is not powered, the cut-off component can be used by personnel to manually cut off the gas inside the pipeline for emergency use to prevent the mixed gas from entering other pipelines, or when the control system is paralyzed and the pipeline needs to be closed but cannot be closed.
[0018] Compared with the prior art, the present invention provides a gas cylinder replacement device for a special gas delivery system, which has the following beneficial effects: 1. The present invention utilizes a replacement mechanism to quickly switch between the main gas cylinder and the spare gas cylinder when the internal gas pressure of the main gas cylinder is insufficient, thereby reducing manual operation and improving the efficiency of gas cylinder replacement.
[0019] 2. The present invention utilizes a filter assembly to adsorb and block foreign matter flowing inside the pipeline, thereby reducing the risk of foreign matter entering other pipelines along the flow of gas and affecting the subsequent use of the gas. The quick-release structure of the filter assembly facilitates its disassembly, and personnel can clean the filter assembly and reuse it.
[0020] 3. The present invention utilizes a cut-off component. When the gas inside the pipeline is mixed or the control system is powered off, personnel can use the cut-off component to manually cut off the gas inside the pipeline for emergency use to prevent the mixed gas from entering other pipelines, or when the control system is paralyzed and the pipeline needs to be closed but cannot be closed. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] Figure 1 This is a schematic diagram of the overall structure of a gas cylinder replacement device for a special gas delivery system proposed by the present invention; Figure 2 This is a schematic diagram of the disassembled structure of a gas cylinder replacement device for a special gas delivery system proposed by the present invention; Figure 3 This is a schematic cross-sectional structure diagram of a replacement mechanism of a gas cylinder replacement device for a special gas delivery system proposed by the present invention; Figure 4 This is a schematic structural diagram of a truncation assembly for a gas cylinder replacement device in a special gas delivery system proposed by the present invention; Figure 5 This is a schematic diagram of the structure of a filter assembly for a gas cylinder replacement device in a special gas delivery system proposed by the present invention.
[0022] In the figure: 1. pipeline; 2. guide tube; 3. main gas cylinder; 4. spare gas cylinder; 5. solenoid valve; 6. pressure sensor; 7. exhaust pipe; 8. threaded pipe; 9. replacement mechanism; 91. mounting frame; 92. electric push rod; 93. connecting plate; 94. moving block; 95. positioning block; 10. filter assembly; 101. guide groove; 102. filter plate; 103. telescopic rod; 104. spring; 11. cut-off assembly; 111. control board; 112. guide rod; 112. guide rod; 113. sealing plate; 114. guide plate; 12. controller. DETAILED DESCRIPTION
[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.
[0024] Reference Figure 1-Figure 5A gas cylinder replacement device for a special gas delivery system includes a pipeline 1, a guide tube 2 is fixedly installed on the bottom and one side of the surface of the pipeline 1, and a main gas cylinder 3 and a spare gas cylinder 4 are fixedly installed on one end of the guide tube 2.
[0025] A solenoid valve 5 is fixedly mounted on one side of the surface of the guide tube 2, a pressure sensor 6 is fixedly mounted on the other side of the surface of the guide tube 2 and the surface of the pipeline 1, an exhaust pipe 7 is fixedly mounted in the middle of the surface of the guide tube 2, and one end of the exhaust pipe 7 is connected to a gas collecting device; The SMC solenoid valve 5 model is VT315-024G, and the pressure sensor 6 model is Kulite HKM-312(M), micro piezoresistive, threaded interface / O-ring seal / range 0-70MPa.
[0026] The middle part of the surface of the pipe 1 is connected by a threaded pipe 8, a replacement mechanism 9 is provided below the threaded pipe 8, a filter assembly 10 is provided inside the threaded pipe 8, and a cut-off assembly 11 is provided above the threaded pipe 8; A controller 12 is fixedly installed on one side of the surface of the pipeline 1. The controller 12 can control the solenoid valve 5 and the pressure sensor 6, and the controller 12 can also control the start-up of the replacement mechanism 9.
[0027] Controller 12 is model S7-200 / S7-1200: compact design, S7-1200 is an upgraded version of S7-200, supports module expansion (1214C can expand 8 modules), suitable for single-machine control or small production lines.
[0028] When the pressure sensor 6 detects that the air pressure inside the main gas cylinder 3 is too low, it will transmit a signal to the controller 12. The controller 12 will close the solenoid valve 5 on the main gas cylinder 3 and open the solenoid valve 5 on the backup gas cylinder 4. Then the controller 12 will replace the mechanism 9. The replacement mechanism 9 seals the output end of the main gas cylinder 3 and opens the output end of the backup gas cylinder 4. The gas inside the backup gas cylinder 4 then enters the interior of the pipeline 1. After the gas enters the pipeline, the filter component 10 will block foreign matter in the air. When the control input system on the pipeline 1 is powered off and the pipeline needs to be closed, personnel can cut off the pipeline through the cut-off component 11.
[0029] The replacement mechanism 9 includes a mounting frame 91 fixedly mounted on one side of the pipeline 1, an electric push rod 92 fixedly mounted on the top of the mounting frame 91, a connecting plate 93 fixedly mounted on the output end of the electric push rod 92, a moving block 94 fixedly mounted on the bottom of the connecting plate 93, a positioning block 95 fixedly mounted on one side of the interior of the pipeline 1, a through groove is provided on the surface of the positioning block 95, the through groove guides the gas flowing out of the spare gas cylinder 4, the through groove and the spare gas cylinder 4 form an air flow channel, the moving block 94 moves up and down inside the pipeline 1 through the connecting plate 93, and the moving block 94 moves upward to seal and block the output end of the main gas cylinder 3, so as to quickly switch between the main gas cylinder 3 and the spare gas cylinder 4, thereby reducing manual operation of personnel and improving the efficiency of replacing gas cylinders; After the controller 12 connects the power to the electric push rod 91 on the mounting frame 91, its output end will drive the connecting plate 93 to move upward, and the connecting plate 93 will drive the moving block 94 to move upward. When the moving block 94 moves, the distance between it and the positioning block 95 changes, and the gas inside the spare gas cylinder 4 will enter the interior of the pipeline 1 through the through groove. After the main gas cylinder 3 is replaced, the controller 12 will close the solenoid valve 5 on the spare gas cylinder 4 and open the solenoid valve on the main gas cylinder 3. The electric push rod 92 will drive the moving block 93 to move downward, and the moving block 93 and the positioning block 95 will approach each other and merge to seal the through groove.
[0030] The filter assembly 10 includes guide grooves 101 formed on both sides of the inner portion of the threaded tube 8. A filter plate 102 is slidably connected to the inner portion of the guide groove. Telescopic rods 103 are fixedly mounted on both sides of the bottom of the filter plate 102. A spring 104 is sleeved on the surface of the telescopic rod 103. A limiting block is fixedly mounted on one end of the telescopic rod 102. The diameter of the limiting block is larger than that of the spring 103. One end of the spring 103 is fixedly mounted on the back of the limiting block. When installing the filter plate 102, the personnel moves the filter plate 102 downward through the guide groove 101. After moving to the appropriate position, the bottom of the telescopic rod 103 will contact the inner bottom of the guide groove 101. Then the personnel rotates the filter plate 102, and the filter plate 102 will move with the telescopic rod 103. The guide groove 101 squeezes the spring 104 on the telescopic rod 103 through the filter plate 102. Due to the characteristics of the spring 104, the spring 104 will drive the filter plate 102 to move upward through the telescopic rod 103. The surface of the filter plate 102 contacts the inner top of the guide groove 101, and the filter plate 102 is completed. When the filter plate 102 needs to be disassembled and cleaned, the personnel rotate the filter plate 102 through the guide groove 101, and the filter plate 102 is taken out. The filter plate 102 adsorbs and blocks foreign matter flowing inside the pipeline, reducing the foreign matter from entering other pipelines along the flow of gas and affecting the subsequent use of the gas. The quick-release structure of the filter assembly facilitates its disassembly, and the personnel can clean the filter assembly and reuse it.
[0031] The cutting assembly 11 includes a control rod 111 that is rotatably connected to the control plate 111, and a control rod is fixedly installed on the surface of the control plate 111. Both sides of the surface of the control plate 111 are guide grooves, and a guide rod 112 is slidably connected inside the guide groove. The bottom of the guide rod 112 is fixedly installed with two sealing plates 113 that are relatively arranged and adapted to each other. The edge of the sealing plate 113 is slidably connected with a guide plate 114. The guide plate 114 is fixedly installed to the inside of the pipe 1. The size of the guide rod 112 is adapted to the size of the guide groove. The guide rod 112 moves inside the guide groove to drive the sealing plate 113 to move synchronously to the middle or to both sides. A limiting groove is provided in the middle of the surface of the guide plate 114, and the size of the limiting groove is adapted to the size of the sealing plate 113. The sealing plate 113 moves laterally inside the limiting groove. An arc groove is provided on the surface of the pipe 1, and the size of the arc groove is adapted to the size of the control rod on the control plate 111. The arc groove guides the control rod; When the control system on pipeline 1 is powered off and pipeline 1 needs to be cut off, the personnel will rotate the control lever through the arc groove, and the control lever will drive the control panel 111 to rotate. When the control panel 111 rotates, it will drive the guide rod 112 to move through the guide groove. When the guide rod 112 moves, it will drive the sealing plate 113 to move synchronously to the middle. When the sealing plate 113 moves, the guide plate 114 will guide the sealing plate 113 through the limit groove. After the opposite ends of the sealing plate 113 contact each other, the sealing plate 113 will cut off the pipeline 1 to prevent the mixed gas from entering other pipelines, or the control system will be paralyzed and the pipeline needs to be closed but cannot be closed.
[0032] Working principle: When the pressure sensor 6 detects that the air pressure inside the main gas cylinder 3 is too low, it will transmit a signal to the controller 12. The controller 12 will close the solenoid valve 5 on the main gas cylinder 3 and open the solenoid valve 5 on the backup gas cylinder 4. Then the controller 12 will connect the electric push rod 91 on the mounting frame 91 to the power supply, and its output end will drive the connecting plate 93 to move upward, and the connecting plate 93 will drive the moving block 94 to move upward. When the moving block 94 moves, the distance between it and the positioning block 95 changes, and the gas inside the backup gas cylinder 4 will enter the pipeline 1 through the through groove. After the main gas cylinder 3 is replaced, the controller 12 will close the solenoid valve 5 on the spare gas cylinder 4 and open the solenoid valve on the main gas cylinder 3. The electric push rod 92 will drive the moving block 93 to move downward, and the moving block 93 and the positioning block 95 will be close to each other and merged to seal the through groove. After the gas enters the pipeline, the gas will be filtered through the filter plate 102. When installing the filter plate 102, the personnel will move the filter plate 102 downward through the guide groove 101. After moving to the appropriate position, the bottom of the telescopic rod 103 will be aligned with the inner part of the guide groove 101. The bottom of the filter plate 102 is in contact with each other, and then the personnel rotates the filter plate 102, and the filter plate 102 will move with the telescopic rod 103. The guide groove 101 squeezes the spring 104 on the telescopic rod 103 through the filter plate 102. Due to the characteristics of the spring 104, the spring 104 will drive the filter plate 102 to move upward through the telescopic rod 103. The surface of the filter plate 102 contacts the inner top of the guide groove 101, and the filter plate 102 is completed. When the filter plate 102 needs to be disassembled and cleaned, the personnel rotates the filter plate 102 through the guide groove 101, and the filter plate 102 is then When it is taken out and the control system on the pipeline 1 is powered off and the pipeline 1 needs to be cut off, the personnel will rotate the control lever through the arc groove, and the control lever will drive the control plate 111 to rotate. When the control plate 111 rotates, it will drive the guide rod 112 to move through the guide groove. When the guide rod 112 moves, it will drive the sealing plate 113 to move synchronously to the middle. When the sealing plate 113 moves, the guide plate 114 will guide the sealing plate 113 through the limit groove. After the opposite ends of the sealing plate 113 contact each other, the sealing plate 113 will cut off the pipeline 1.
[0033] The electrical components mentioned in this article are all connected to an external main controller and 220V AC power, and the main controller can be a conventional known device that performs control such as a computer.
[0034] In the description herein, it should be noted that, unless otherwise expressly specified or limited, the terms "connected" and "connection" should be understood broadly. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to mechanical connections, electrical connections, direct connections, or indirect connections through an intermediary. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.
[0035] In the description herein, it should be noted that relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Furthermore, the terms "include," "comprise," or any other variations thereof are intended to encompass non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.
[0036] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.
Claims
1. A gas cylinder replacement device for a special gas delivery system, comprising a pipeline (1), characterized in that: A guide tube (2) is fixedly mounted on the bottom and one side of the surface of the pipeline (1), and a main gas cylinder (3) and a spare gas cylinder (4) are fixedly mounted on one end of the guide tube (2); A solenoid valve (5) is fixedly mounted on one side of the surface of the guide tube (2), a pressure sensor (6) is fixedly mounted on the other side of the surface of the guide tube (2) and the surface of the pipeline (1), an exhaust pipe (7) is fixedly mounted in the middle of the surface of the guide tube (2), and one end of the exhaust pipe (7) is connected to a gas collecting device; The middle part of the surface of the pipeline (1) is connected via a threaded tube (8), a replacement mechanism (9) is provided adjacent to the lower portion of the threaded tube (8), a filtering assembly (10) is provided inside the threaded tube (8), and a cut-off assembly (11) is provided adjacent to the upper portion of the threaded tube (8); A controller (12) is fixedly mounted on one side of the surface of the pipeline (1). The controller (12) can control the solenoid valve (5) and the pressure sensor (6), and the controller (12) can also control the start-up of the replacement mechanism (9).
2. The gas cylinder replacement device for a special gas delivery system according to claim 1, characterized in that: The replacement mechanism (9) comprises a mounting frame (91) fixedly mounted on one side of the pipeline (1); an electric push rod (92) is fixedly mounted on the top of the mounting frame (91); a connecting plate (93) is fixedly mounted on the output end of the electric push rod (92); a moving block (94) is fixedly mounted on the bottom of the connecting plate (93); and a positioning block (95) is fixedly mounted on one side inside the pipeline (1).
3. The gas cylinder replacement device for a special gas delivery system according to claim 2, characterized in that: A through groove is provided on the surface of the positioning block (95), and the through groove guides the gas flowing out of the spare gas cylinder (4). The through groove and the spare gas cylinder (4) form an air flow channel.
4. The gas cylinder replacement device for a special gas delivery system according to claim 2, characterized in that: The moving block (94) moves up and down inside the pipeline (1) via the connecting plate (93), and the upward movement of the moving block (94) can seal and block the output end of the main gas cylinder (3).
5. The gas cylinder replacement device for a special gas delivery system according to claim 1, characterized in that: The filter assembly (10) comprises guide grooves (101) provided on both sides of the interior of the threaded tube (8), a filter plate (102) being slidably connected to the interior of the guide groove, telescopic rods (103) being fixedly mounted on both sides of the bottom of the filter plate (102), and a spring (104) being sleeved on the surface of the telescopic rod (103).
6. The gas cylinder replacement device for a special gas delivery system according to claim 5, characterized in that: A limiting block is fixedly mounted on one end of the telescopic rod (102), wherein the diameter of the limiting block is larger than the diameter of the spring (103), and one end of the spring (103) is fixedly mounted on the back of the limiting block.
7. The gas cylinder replacement device for a special gas delivery system according to claim 1, characterized in that: The cut-off assembly (11) includes a control rod rotatably connected to a control plate (111), and a control rod is fixedly installed on the surface of the control plate (111). Both sides of the surface of the control plate (111) are provided with guide grooves, and a guide rod (112) is slidably connected inside the guide groove. Two sealing plates (113) arranged opposite to each other and adapted to each other are fixedly installed at the bottom of the guide rod (112). A guide plate (114) is slidably connected at the edge of the sealing plate (113), and the guide plate (114) is fixedly installed inside the pipe (1).
8. The gas cylinder replacement device for a special gas delivery system according to claim 7, characterized in that: The size of the guide rod (112) is adapted to the size of the guide groove, and the guide rod (112) moves inside the guide groove to drive the sealing plate (113) to move synchronously toward the middle or toward both sides.
9. The gas cylinder replacement device for a special gas delivery system according to claim 7, characterized in that: A limiting groove is provided in the middle of the surface of the guide plate (114), the size of the limiting groove being adapted to the size of the sealing plate (113), and the sealing plate (113) moves laterally inside the limiting groove.
10. The gas cylinder replacement device for a special gas delivery system according to claim 1, characterized in that: An arc-shaped groove is provided on the surface of the pipe (1), the size of the arc-shaped groove being adapted to the size of the control rod on the control panel (111), and the arc-shaped groove guides the control rod.