Six-dimensional force sensor

Abstract

The invention relates to the technical field of force sensors, and discloses a six-dimensional force sensor comprising a mounting seat; the cover plate can rotate around a first direction and a second direction relative to the inner core to drive the inner core to rotate around a third direction and move along the first direction, the second direction and the third direction; a first rotary connection assembly; the first tangential force sensitive core body is used for detecting a first tangential force; a second rotary connection assembly; the second tangential force sensitive core body is used for detecting a second tangential force; the third tangential force sensitive core body is used for detecting a third tangential force; the force transmission piece is arranged on the inner core in a sleeving manner; the first direction force sensitive core body is used for detecting a first acting force; the second direction force sensitive core body is used for detecting a second acting force; the second force transmission piece is fixed on the movable piece; and the third direction force sensitive core body detects the third acting force. According to the six-dimensional force sensor disclosed by the invention, the defects of low detection precision, poor creep resistance, low frequency response and remarkable temperature drift of a strain gauge type six-dimensional force sensor are improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of force sensors, in particular to a six-dimensional force sensor. BACKGROUND

[0002] In the field of modern industrial automation, robots, etc., as a key sensing device, the six-dimensional force sensor can detect the force in each direction in real time and provide accurate force feedback information for the control end. With the wide application of six-dimensional force sensors, the requirements for anti-crosstalk, high precision, anti-overload, frequency response and other parameter indicators of six-dimensional force sensors are also increasing. However, most of the existing six-dimensional force sensors are detected by strain gauge sensors. Such sensors are easy to manufacture, low in price, and have a certain universality. However, considering the complexity of the application environment and the high requirements of the parameter indicators, the strain gauge six-dimensional force sensor has the following problems in actual application.

[0003] Firstly, the detection accuracy is low. Since the working principle of the strain gauge sensor is to measure the deformation of the material after being stressed to calculate the stress, the detection accuracy is greatly affected by factors such as material properties and manufacturing process. It is difficult to achieve high-precision detection of small forces in actual application. Secondly, the anti-creep ability is poor. After long-term stress, the sensitive element of the strain gauge sensor will creep, causing the output signal of the sensor to drift, thereby affecting the accuracy of the detection. Thirdly, the frequency response is low. The strain gauge sensor is usually glued to the stress concentration area with structural adhesive, which has low long-term reliability and is prone to additional stress, resulting in drift. In addition, the deformation of the structural adhesive also causes hysteresis and deterioration of the repeatability of the strain gauge sensor, resulting in low frequency response of the sensor and failing to meet the increasingly stringent high-frequency requirements. Finally, the temperature drift is significant. It is difficult to eliminate the influence of temperature on the output signal of the strain gauge sensor in actual application, which increases the detection error and further reduces the accuracy of the detection. SUMMARY

[0004] Based on the above, the purpose of the present application is to provide a six-dimensional force sensor, which improves the shortcomings of the existing strain gauge six-dimensional force sensor, such as low detection accuracy, poor anti-creep ability, low frequency response and significant temperature drift, and promotes the application of six-dimensional force sensors in the field of high-precision force control.

[0005] To achieve the above purpose, the technical scheme adopted by the present application is as follows: A six-dimensional force sensor, comprising: a mounting seat, which is provided with a mounting cavity; An inner core and a cover plate, wherein the inner core is located in the mounting cavity, the cover plate is disposed on the inner core and spaced apart from the mounting seat, the cover plate being rotatable relative to the inner core about a first direction and a second direction, the cover plate being further capable of driving the inner core to rotate about a third direction, and being capable of moving along the first direction, the second direction, and the third direction; a first rotating connection assembly, comprising a first rotating main bracket disposed on the inner core and fixedly connected to the cover plate, wherein the first rotating main bracket is capable of rotating relative to the inner core around the first direction; a first tangential force-sensitive core, disposed on the inner core or the first rotating main bracket, the first tangential force-sensitive core being capable of abutting against the first rotating main bracket or the inner core to detect a first tangential force generated when the cover plate rotates in the first direction; a second rotating connection assembly, comprising a second rotating main bracket disposed on the inner core and fixedly connected to the cover plate, the second rotating main bracket being capable of rotating relative to the inner core about the second direction; a second tangential force-sensitive core, disposed on the inner core or the first rotating main bracket, the second tangential force-sensitive core being capable of abutting against the second rotating main bracket or the inner core to detect a second tangential force generated when the cover plate rotates in the second direction; a third tangential force-sensitive core disposed in the mounting cavity, the inner core being capable of abutting against the third tangential force-sensitive core to detect a third tangential force generated when the inner core rotates about the third direction; a force transmission member, sleeved on the inner core and capable of moving along the first direction and the second direction with the inner core, and the inner core can move along the third direction relative to the force transmission member; a first direction force-sensitive core, disposed on a side wall of the mounting cavity or the force transmission member, wherein the first direction force-sensitive core can abut against the force transmission member or the mounting seat to detect a first force in the first direction; a second direction force-sensitive core, disposed on a side wall of the mounting cavity or the force transmission member, the second direction force-sensitive core being capable of abutting against the force transmission member or the mounting seat to detect a second force in the second direction; a third-direction force-sensitive core, disposed on the inner wall of the mounting cavity or the inner core, the third-direction force-sensitive core being capable of abutting against the inner core or the mounting seat to detect a third force in the third direction; The first tangential force-sensitive core, the second tangential force-sensitive core, the third tangential force-sensitive core, the first directional force-sensitive core, the second directional force-sensitive core and the third directional force-sensitive core are all chip-type force-sensitive cores.

[0006] As a preferred scheme of the six-dimensional force sensor, the first rotating connection assembly further comprises a first decoupling rotating support, which is arranged at the top end of the inner core and fixedly connected with the cover plate, so that the cover plate can rotate relative to the inner core along the first direction; The second rotating connection assembly further comprises a second decoupling rotating support, which is arranged at the top end of the inner core and fixedly connected with the cover plate, so that the cover plate can rotate relative to the inner core along the second direction; The connecting line of the rotation centers of the first decoupling rotating support, the second decoupling rotating support, the first rotating main support and the second rotating main support extends along the third direction.

[0007] As a preferred scheme of the six-dimensional force sensor, the number of the first tangential force force-sensitive cores is two, the first rotating main support comprises a first rotating cross beam, two first rotating connection main beams and two first rotating vertical beams, the first rotating cross beam is hinged on the inner core and can rotate relative to the inner core around the first direction, the two first rotating connection main beams are symmetrically arranged on the first rotating cross beam and are fixedly connected with the cover plate, and the two first rotating vertical beams are symmetrically arranged on the first rotating cross beam and correspond to the two first tangential force force-sensitive cores respectively.

[0008] As a preferred scheme of the six-dimensional force sensor, the number of the second tangential force force-sensitive cores is two, the second rotating main support comprises a second rotating cross beam, two second rotating connection main beams and two second rotating vertical beams, the second rotating cross beam is hinged on the inner core and can rotate relative to the inner core around the second direction, the two second rotating connection main beams are symmetrically arranged on the second rotating cross beam and are fixedly connected with the cover plate, and the two second rotating vertical beams are symmetrically arranged on the second rotating cross beam and correspond to the two second tangential force force-sensitive cores respectively.

[0009] As a preferred scheme of the six-dimensional force sensor, the mounting cavity comprises a first movable cavity, a second movable cavity and a third movable cavity which are sequentially communicated, the inner core comprises a main core body, a connecting core and a limiting block which are sequentially fixedly connected, the main core body is located in the first movable cavity, the force transmission member and the limiting block are both located in the third movable cavity, the connecting core is located in the second movable cavity, the force transmission member is sleeved on the connecting core, and the force transmission member limits the limiting block in the third movable cavity.

[0010] As a preferred solution of a six-dimensional force sensor, the inner core also includes a sleeve fixed on the main core body, a torque transmission groove is provided at the bottom of the first active cavity, one end of the sleeve is located in the torque transmission groove and can rotate around the third direction, and the number of the third tangential force sensitive cores is two, and the two third tangential force sensitive cores are arranged in the torque transmission groove. One of the third tangential force sensitive cores can detect the third tangential force in the clockwise direction around the third direction, and the other third tangential force sensitive core can detect the third tangential force in the counterclockwise direction around the third direction.

[0011] As a preferred solution of a six-dimensional force sensor, the mounting cavity also includes a receiving groove, the inner core also includes a circular pressure plate and a circular pressure block arranged on the circular pressure plate, the circular pressure plate is fixed on the main core and is located in the receiving groove, the number of the third-direction force-sensitive cores is at least two, at least one of the third-direction force-sensitive cores is arranged at the top of the receiving groove and facing the circular pressure plate to detect the third force acting upward along the third direction; at least one of the third-direction force-sensitive cores is arranged at the bottom end of the first active cavity and facing the sleeve to detect the third force acting downward along the third direction.

[0012] As a preferred solution of a six-dimensional force sensor, the number of the first-direction force-sensitive cores and the second-direction force-sensitive cores are both two, the force transmission member is a cross member, and the cross member includes two first force transmission brackets extending along the first direction and two second force transmission brackets extending along the second direction. The two first force transmission brackets correspond one-to-one to the two first-direction force-sensitive cores, and the two second force transmission brackets correspond one-to-one to the two second-direction force-sensitive cores.

[0013] As a preferred solution of a six-dimensional force sensor, two first mounting slots and two second mounting slots are provided in the mounting cavity, and a first-direction force-sensitive core is fixedly provided in each of the first mounting slots. When the measurement value of the first-direction force-sensitive core reaches a third preset force value, the end face of the first force transmission bracket abuts against the wall of the mounting cavity; a second-direction force-sensitive core is fixedly provided in each of the second mounting slots. When the measurement value of the second-direction force-sensitive core reaches a fourth preset force value, the end face of the second force transmission bracket abuts against the wall of the mounting cavity.

[0014] As a preferred solution for a six-dimensional force sensor, the chip-type force-sensitive core includes a core base, a force-sensitive chip and a force-sensitive membrane. The force-sensitive membrane is fixed on the core base and the two form a liquid cavity. The liquid cavity is filled with a hydraulic medium. The force-sensitive chip is fixed on the bottom wall of the liquid cavity. The chip-type force-sensitive core can detect the force transmitted to the hydraulic medium through the force-sensitive membrane.

[0015] The beneficial effects of the present invention are: The six-dimensional force sensor disclosed in the present invention has a first tangential force-sensitive core, a second tangential force-sensitive core and a third tangential force-sensitive core that can respectively detect the first tangential force, the second tangential force and the third tangential force, and a first direction force-sensitive core, a second direction force-sensitive core and a third direction force-sensitive core that can respectively detect the first force, the second force and the third force, and the first tangential force-sensitive core, the second tangential force-sensitive core, the third tangential force-sensitive core, the first direction force-sensitive core, the second direction force-sensitive core and the third direction force-sensitive core are all chip-type force-sensitive cores. The chip-type force-sensitive core has the characteristics of high detection accuracy, strong anti-creep ability and small temperature drift, overcoming the technical bias of the prior art that can only use strain gauge sensors to detect stress in various directions due to the limitation of the structure of the six-dimensional force sensor. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the following briefly introduces the drawings required for use in describing the embodiments of the present invention. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the contents of the embodiments of the present invention and these drawings without any creative work.

[0017] Figure 1 is a first cross-sectional view of a six-dimensional force sensor provided by a specific embodiment of the present invention; Figure 2 is a second cross-sectional view of the six-dimensional force sensor provided by a specific embodiment of the present invention; Figure 3 is a cross-sectional view of a mounting base of a six-dimensional force sensor provided by a specific embodiment of the present invention; Figure 4 Schematic diagram of a mounting base and a third tangential force sensitive core of a six-dimensional force sensor provided by a specific embodiment of the present invention; Figure 5 is a schematic diagram of a force transmission member of a six-dimensional force sensor provided in a specific embodiment of the present invention; Figure 6 Schematic diagram of a first rotating main bracket and a second rotating main bracket of a six-axis force sensor provided by a specific embodiment of the present invention; Figure 7It is a cross-sectional view of a chip-type force-sensitive core of a six-dimensional force sensor provided by a specific embodiment of the present invention.

[0018] In the picture: 1. Mounting seat; 101. Mounting cavity; 1011. First movable cavity; 1012. Second movable cavity; 1013. Third movable cavity; 1014. Accommodating slot; 102. First mounting slot; 103. Second mounting slot; 104. Torque transmission slot; 105. Third mounting slot; 11. Upper seat; 12. Intermediate connecting seat; 13. Lower seat; 2. Inner core; 201. First through hole; 202. Second through hole; 203. Third through hole; 204. Fourth through hole; 21. Main core; 22. Connecting core; 23. Limit block; 24. Sleeve; 25. Circular pressure plate; 26. Circular pressure block; 3. Cover plate; 41. First rotating main support; 411. First rotating horizontal beam; 412. First rotating vertical beam; 413. First rotating pressure block; 414. First rotating connecting main beam; 42. First decoupling rotating support; 43. First articulated support; 51. Second rotating main bracket; 511. Second rotating horizontal beam; 512. Second rotating vertical beam; 513. Second rotating pressing block; 514. Second rotating connecting main beam; 52. Second decoupling rotating bracket; 53. Second hinged support; 601, core base; 6010, liquid chamber; 602, force-sensitive chip; 603, force-sensitive membrane; 61, first tangential force-sensitive core; 62, second tangential force-sensitive core; 63, third tangential force-sensitive core; 64, first directional force-sensitive core; 65, second directional force-sensitive core; 66, third directional force-sensitive core; 7. Force transmission member; 71. First force transmission bracket; 72. Second force transmission bracket; 73. Force transmission connecting block; 74. First force transmission pressure block; 75. Second force transmission pressure block; 81. Fixed seat; 82. Third hinged support; 83. Fourth hinged support; 9. PCB. DETAILED DESCRIPTION

[0019] To make the technical problems solved, the technical solutions adopted, and the technical effects achieved by the present invention more clearly understood, the technical solutions of the embodiments of the present invention will be further described in detail below with reference to the accompanying drawings. It is apparent that the described embodiments are only some of the embodiments of the present invention, not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without creative effort shall fall within the scope of protection of the present invention.

[0020] In the description of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first", "second" are only for the purpose of description, and cannot be understood as indicating or implying relative importance. Among them, the terms "first position" and "second position" are two different positions.

[0021] In the description of the present application, it should be noted that unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting" should be understood broadly, for example, it can be fixed connection, or it can be detachable connection; can be mechanical connection, or can be electrical connection; can be directly connected, or can be indirectly connected through an intermediate medium; can be the communication inside two elements. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0022] The present embodiment provides a six-dimensional force sensor, such as Figures 1 to 6As shown, it comprises a mounting seat 1, an inner core 2, a cover plate 3, a first rotary connection assembly, a first tangential force sensitive core 61, a second rotary connection assembly, a second tangential force sensitive core 62, a third tangential force sensitive core 63, a force transmission piece 7, a first directional force sensitive core 64, a second directional force sensitive core 65, and a third directional force sensitive core 66. The mounting seat 1 is provided with a mounting cavity 101, and the inner core 2 is located in the mounting cavity 101. The cover plate 3 is arranged on the inner core 2 and is spaced apart from the mounting seat 1. The cover plate 3 can rotate relative to the inner core 2 about the first direction and the second direction. The cover plate 3 can not only drive the inner core 2 to rotate about the third direction, but also drive the inner core 2 to move along the first direction, the second direction and the third direction. The first rotary connection assembly comprises a first rotary main support 41 arranged on the inner core 2 and fixedly connected with the cover plate 3. The first rotary main support 41 can rotate relative to the inner core 2 about the first direction. The first tangential force sensitive core 61 is arranged on the inner core 2 and can abut against the first rotary main support 41 to detect the first tangential force generated when the cover plate 3 rotates about the first direction. The second rotary connection assembly comprises a second rotary main support 51 arranged on the inner core 2 and fixedly connected with the cover plate 3. The second rotary main support 51 can rotate relative to the inner core 2 about the second direction. The second tangential force sensitive core 62 is arranged on the inner core 2 and can abut against the second rotary main support 51 to detect the second tangential force generated when the cover plate 3 rotates about the second direction. The third tangential force sensitive core 63 is arranged in the mounting cavity 101. The inner core 2 can abut against the third tangential force sensitive core 63 to detect the third tangential force generated when the cover plate 3 drives the inner core 2 to rotate about the third direction.

[0023] As shown in Figure 1 and Figure 2 The force transmission piece 7 is arranged on the inner core 2 and can move along the first direction and the second direction with the inner core 2. The inner core 2 can move up and down along the third direction relative to the force transmission piece 7, while the force transmission piece 7 does not move along the third direction with the inner core 2. The first directional force sensitive core 64 is arranged on the side wall of the mounting cavity 101 and can abut against the force transmission piece 7 to detect the first force in the first direction. The second directional force sensitive core 65 is arranged on the side wall of the mounting cavity 101 and can abut against the force transmission piece 7 to detect the second force in the second direction. The third directional force sensitive core 66 is arranged on the inner wall of the mounting cavity 101 and can abut against the inner core 2 to detect the third force in the third direction.

[0024] It should be noted that in other embodiments of the present application, the first tangential force force-sensitive core 61 can also be arranged at the end of the first rotating main support 41, and the first tangential force force-sensitive core 61 can be in abutment with the inner core 2 to detect the first tangential force generated when the cover plate 3 rotates in the first direction; the second tangential force force-sensitive core 62 can also be arranged at the end of the second rotating main support 51, and the second tangential force force-sensitive core 62 can be in abutment with the inner core 2 to detect the second tangential force generated when the cover plate 3 rotates in the second direction; the first direction force-sensitive core 64 can also be arranged on the force transmission member 7, and the first direction force-sensitive core 64 can be in abutment with the mounting seat 1 to detect the first force in the first direction; the second direction force-sensitive core 65 can also be arranged on the force transmission member 7, and the second direction force-sensitive core 65 can be in abutment with the mounting seat 1 to detect the second force in the second direction; and the third direction force-sensitive core 66 can also be arranged on the inner core 2, and the third direction force-sensitive core 66 can be in abutment with the mounting seat 1 to detect the third force in the third direction, which is arranged according to actual needs.

[0025] As shown in Figure 1 and Figure 2 , the first direction, the second direction and the third direction of the present embodiment are the X-axis direction, the Y-axis direction and the Z-axis direction respectively. It should be noted that the first tangential force force-sensitive core 61, the second tangential force force-sensitive core 62, the third tangential force force-sensitive core 63, the first direction force-sensitive core 64, the second direction force-sensitive core 65 and the third direction force-sensitive core 66 of the present embodiment are all chip-type force-sensitive cores. The cover plate 3 can rotate in the first direction, the second direction and the third direction by a very small angle, all within 2°. The cover plate 3 can move the force transmission member 7 in the first direction, the second direction and the third direction by a very small distance, all within 2mm. In other embodiments of the present application, the above-mentioned rotation angle can also be greater than 2°, and the movement distance can also be greater than 2mm, which is arranged according to actual needs.

[0026] The six-dimensional force sensor provided by the present embodiment can detect the first tangential force, the second tangential force and the third tangential force through the first tangential force force-sensitive core 61, the second tangential force force-sensitive core 62 and the third tangential force force-sensitive core 63 respectively, and can detect the first force, the second force and the third force through the first direction force-sensitive core 64, the second direction force-sensitive core 65 and the third direction force-sensitive core 66 respectively, and the first tangential force force-sensitive core 61, the second tangential force force-sensitive core 62, the third tangential force force-sensitive core 63, the first direction force-sensitive core 64, the second direction force-sensitive core 65 and the third direction force-sensitive core 66 are all chip-type force-sensitive cores, which have the characteristics of high detection precision, strong anti-creep ability and small temperature drift, and overcome the technical prejudice that the existing technology can only use strain gauge sensors to detect stress in each direction due to the limitation of the structure of the six-dimensional force sensor.

[0027] Specifically, when detecting the first torque in the first direction, the second torque in the second direction and the third torque in the third direction, the cover plate 3 can rotate relative to the inner core 2 around the first direction, the first rotating main support 41 abuts against the first tangential force sensitive core 61, and the detection of the first tangential force by the first tangential force sensitive core 61 is realized; the cover plate 3 can rotate relative to the inner core 2 around the second direction, the second rotating main support 51 abuts against the second tangential force sensitive core 62, and the detection of the second tangential force by the second tangential force sensitive core 62 is realized; the cover plate 3 can also drive the inner core 2 to rotate around the third direction, the inner core 2 abuts against the third tangential force sensitive core 63, and the detection of the third tangential force by the third tangential force sensitive core 63 is realized. Since the first force arm is the distance from the first tangential force sensitive core 61 to the rotating center of the first rotating main support 41 and is a constant value, the second force arm is the distance from the second tangential force sensitive core 62 to the rotating center of the second rotating main support 51 and is a constant value, and the third force arm is the distance from the third tangential force sensitive core 63 to the central axis of the inner core 2 and is a constant value, the first torque, the second torque and the third torque can be obtained respectively.

[0028] As shown in Figure 1 and Figure 2 The six-dimensional force sensor of the embodiment further includes a fixed seat 81, a third hinged support 82 and a fourth hinged support 83, the fixed seat 81 is fixed at the top end of the inner core 2 and is spaced apart from the cover plate 3, the third hinged support 82 and the fourth hinged support 83 are both arranged on the fixed seat 81, the first rotating connection assembly further includes a first decoupling rotating support 42, the first decoupling rotating support 42 is hinged on the third hinged support 82 and the first decoupling rotating support 42 is fixedly connected with the cover plate 3, so that the cover plate 3 can rotate relative to the inner core 2 along the first direction. The second rotating connection assembly further includes a second decoupling rotating support 52, the second decoupling rotating support 52 is hinged on the fourth hinged support 83 and the second decoupling rotating support 52 is fixedly connected with the cover plate 3, so that the cover plate 3 can rotate relative to the inner core 2 around the second direction. The connecting line of the rotating centers of the first decoupling rotating support 42, the second decoupling rotating support 52, the first rotating main support 41 and the second rotating main support 51 extends along the third direction, and the rotating centers of the above four supports are all located on the central axis of the inner core 2.

[0029] The number of the first tangential force sensitive cores 61 of the embodiment is two, as shown in Figure 6As shown, the first rotating main bracket 41 includes a first rotating cross beam 411, two first rotating connecting main beams 414, two first rotating vertical beams 412 and two first rotating pressure blocks 413. The first rotating cross beam 411 is hinged on the inner core 2 and can rotate around the first direction relative to the inner core 2. The two first rotating connecting main beams 414 are symmetrically arranged on the first rotating cross beam 411 and are both fixedly connected to the cover plate 3. The two first rotating vertical beams 412 are symmetrically arranged on the first rotating cross beam 411 and respectively correspond one-to-one to the two first tangential force-sensitive cores 61. The first rotating pressure block 413 is arranged on the first rotating vertical beam 412. The two second rotating pressure blocks 513 are respectively arranged one-to-one to the two second rotating vertical beams 512.

[0030] like Figure 1 and Figure 2 As shown, the inner core 2 of this embodiment is provided with a first through hole 201 passing through along the second direction, and a first hinged support 43 is provided in the first through hole 201. The first rotating main bracket 41 is hinged on the first hinged support 43 and passes through the first through hole 201. The first rotating main bracket 41 can rotate around the first direction and abut against the first tangential force sensitive core 61 to realize the detection of the third tangential force. When the end face of the first rotating main bracket 41 abuts against the inner core 2, the measurement value of the first tangential force sensitive core 61 reaches the first preset force value, and the measurement value of the first tangential force sensitive core 61 reaches the maximum.

[0031] When the first tangential force-sensitive core 61 detects the first tangential force, the cover plate 3 rotates relative to the inner core 2 in the first direction. At this time, the first decoupling rotating bracket 42 and the first rotating main bracket 41 both rotate synchronously. Therefore, the cover plate 3 does not directly drive the inner core 2 to rotate. The inner core 2 is only affected by the first rotating main bracket 41. Since the inner core 2 is long enough, the bottom end of the inner core 2 abuts against the bottom wall of the installation cavity 101 and does not rotate around the first direction. The first rotating pressure block 413 on the first rotating vertical beam 412 abuts against the first tangential force-sensitive core 61, and the force-sensitive membrane 603 of the first tangential force-sensitive core 61 continues to deform. When the top surface of the first rotating vertical beam 412 abuts against the wall surface of the inner core 2, the deformation of the force-sensitive membrane 603 of the first tangential force-sensitive core 61 is the largest, and the measured value of the first tangential force-sensitive core 61 reaches the first preset force value. The first preset force value is the maximum measurement value that can be achieved when the first tangential force-sensitive core 61 measures the first tangential force. The top surface of the first rotating vertical beam 412 abuts against the wall surface of the inner core 2, which can prevent the first rotating pressing block 413 from continuing to press the first tangential force-sensitive core 61. In other embodiments of the present invention, the first rotating pressing block 413 may also be provided with a first boss, and the first boss abuts against the first tangential force-sensitive core 61. When the first rotating pressing block 413 abuts against the wall surface of the inner core 2, the measurement value of the first tangential force-sensitive core 61 reaches the first preset force value, which is specifically set according to actual needs.

[0032] The number of the second tangential force force sensing cores 62 is two, as shown in the figure. Figure 6 As shown in the figure, the second rotating main support 51 comprises a second rotating cross beam 511, two second rotating connecting main beams 514, two second rotating vertical beams 512 and two second rotating pressing blocks 513. The second rotating cross beam 511 is hinged on the inner core 2 and can rotate relative to the inner core 2 around the second direction. The two second rotating connecting main beams 514 are symmetrically arranged on the second rotating cross beam 511 and are both fixedly connected with the cover plate 3. The two second rotating vertical beams 512 are symmetrically arranged on the second rotating cross beam 511 and are respectively arranged in one-to-one correspondence with the two second tangential force force sensing cores 62. The second rotating pressing blocks 513 are arranged on the second rotating vertical beams 512, and the two second rotating pressing blocks 513 are arranged in one-to-one correspondence with the two second rotating vertical beams 512.

[0033] As shown in the figure, Figure 1 and Figure 2 The inner core 2 is further provided with a second through hole 202 penetrating along the first direction. The second through hole 202 is provided with a second hinge support 53. The second rotating main support 51 is hinged on the second hinge support 53 and penetrates the second through hole 202. The second rotating main support 51 can rotate around the second direction and abuts against the second tangential force force sensing core 62 to realize the detection of the second tangential force. When the end surface of the second rotating main support 51 abuts against the inner core 2, the measurement value of the second tangential force force sensing core 62 reaches the maximum, which is the second preset force value.

[0034] When the second tangential force force sensing core 62 detects the second tangential force, the cover plate 3 rotates relative to the inner core 2 in the second direction, at this time, the second decoupling rotating support 52 and the second rotating main support 51 are synchronously rotated, so the cover plate 3 does not directly drive the inner core 2 to rotate, the inner core 2 is only affected by the first rotating main support 41, and the bottom end of the inner core 2 abuts against the bottom wall of the mounting cavity 101 and cannot rotate in the second direction due to the sufficient length of the inner core 2, the second rotating block 513 on the second rotating vertical beam 512 abuts against the second tangential force force sensing core 62, and the force sensing film 603 of the second tangential force force sensing core 62 continuously deforms, when the top end surface of the second rotating vertical beam 512 abuts against the wall surface of the inner core 2, the deformation amount of the force sensing film 603 of the second tangential force force sensing core 62 is maximum, and the measurement value of the second tangential force force sensing core 62 reaches the second preset force value. The second preset force value is the maximum measurement value of the second tangential force force sensing core 62 when measuring the second tangential force, and the top end surface of the second rotating vertical beam 512 abuts against the wall surface of the inner core 2, which can prevent the second rotating block 513 from continuously pressing the second tangential force force sensing core 62. In other embodiments of the present application, the second rotating block 513 can also be provided with a second boss, the second boss abuts against the second tangential force force sensing core 62, and when the second rotating block 513 abuts against the wall surface of the inner core 2, the measurement value of the second tangential force force sensing core 62 reaches the second preset force value, which is specifically set according to actual needs.

[0035] As shown in FIG. 1, Figure 3 The mounting cavity 101 of the present embodiment includes a first movable cavity 1011, a second movable cavity 1012 and a third movable cavity 1013 which are sequentially communicated, and the inner core 2 includes a main core 21, a connecting core 22 and a limiting block 23 which are sequentially fixedly connected, the main core 21 is located in the first movable cavity 1011, the force transmission member 7 and the limiting block 23 are both located in the third movable cavity 1013, the connecting core 22 is located in the second movable cavity 1012, the force transmission member 7 is sleeved on the connecting core 22, and the force transmission member 7 limits the limiting block 23 in the third movable cavity 1013, so as to limit the distance of upward movement of the main core 21 along the Z-axis direction through the connecting core 22 to drive the limiting block 23, and the limiting block 23 can also move along the first direction, the second direction and the third direction. Specifically, the first movable cavity 1011 includes two cylindrical cavities with different diameters, and the second movable cavity 1012 and the third movable cavity 1013 are also cylindrical cavities.

[0036] When the cover plate 3 is subjected to a first action force in a first direction, the cover plate 3 drives the force transmission member 7 to move along the first direction through the inner core 2, so that the force transmission member 7 abuts against the first-direction force sensitive core 64, the first action force is transmitted to the first-direction force sensitive core 64, and the measurement of the first-direction force sensitive core 64 on the first action force is realized; when the cover plate 3 is subjected to a second action force in a second direction, the cover plate 3 drives the force transmission member 7 to move along the second direction through the inner core 2, so that the force transmission member 7 abuts against the second-direction force sensitive core 65, the second action force is transmitted to the second-direction force sensitive core 65, and the measurement of the second-direction force sensitive core 65 on the second action force is realized; when the cover plate 3 is subjected to a third action force in a third direction, the cover plate 3 drives the inner core 2 to move along the third direction, the inner core 2 abuts against the third-direction force sensitive core 66, the third action force is transmitted to the third-direction force sensitive core 66, and the measurement of the third-direction force sensitive core 66 on the third action force is realized.

[0037] As shown in Figure 2 and Figure 3 , the inner core 2 further comprises a sleeve 24 fixed on the main core 21, the bottom of the first movable cavity 1011 is provided with a moment transmission groove 104, one end of the sleeve 24 is located in the moment transmission groove 104 and can rotate around the third direction, the number of the third tangential force force sensitive cores 63 is two, and the two third tangential force force sensitive cores 63 are arranged in the moment transmission groove 104, one third tangential force force sensitive core 63 can detect the third tangential force in the clockwise direction around the third direction, and the other third tangential force force sensitive core 63 can detect the third tangential force in the counterclockwise direction around the third direction.

[0038] Specifically, the moment transmission groove 104 of the embodiment is composed of two moment arc grooves, the number of the third tangential force force sensitive cores 63 is two, and each third tangential force force sensitive core 63 is a crescent force sensitive core as shown in Figure 4 , the two crescent force sensitive cores are respectively fixed at the end of the two moment arc grooves, the sleeve 24 comprises two arc-shaped cylinders corresponding to the two moment arc grooves, when detecting the third tangential force, the two arc-shaped cylinders can rotate in the two moment arc grooves respectively, and the two ends of one arc-shaped cylinder can abut against the two crescent force sensitive cores respectively. It should be noted that in other embodiments of the present application, the shape of the third tangential force force sensitive core 63 is not limited to the above-mentioned crescent shape, and can also be other shapes; the moment transmission groove 104 can also be a moment annular transmission groove, and the two third tangential force force sensitive cores 63 are fixed in the moment annular transmission groove with a spacing, which is specifically set according to actual needs.

[0039] As shown in Figure 2 and Figure 3As shown, the installation cavity 101 of this embodiment also includes a receiving groove 1014, and the inner core 2 also includes a circular pressure plate 25 and a circular pressure block 26 fixed on the circular pressure plate 25. The circular pressure plate 25 is fixed on the main core body 21 and is located in the receiving groove 1014. The number of the third-direction force-sensitive cores 66 is four, two of which are arranged at the top of the receiving groove 1014 and face the circular pressure plate 25 to detect the third force acting upward along the third direction; two of which are arranged at the bottom of the first active cavity 1011 and face the sleeve 24 to detect the third force acting downward along the third direction. When the end face of the circular pressure plate 25 or the bottom end of the sleeve 24 abuts against the wall of the installation cavity 101, the measurement value of the third-direction force-sensitive core 66 reaches the maximum, and the measurement value of the third-direction force-sensitive core 66 reaches the fifth preset force value.

[0040] Specifically, if Figure 1 and Figure 2 As shown, a third mounting slot 105 is provided at the top of the receiving slot 1014, wherein two third-direction force-sensitive cores 66 are mounted in the third mounting slot 105, and another two third-direction force-sensitive cores 66 are mounted at the bottom of the first active cavity 1011. In other embodiments, the number of third-direction force-sensitive cores 66 is not limited to the four in this embodiment, but may also be two, three, or more than four, and at least one third-direction force-sensitive core 66 is mounted in the third mounting slot 105 at the top of the receiving slot 1014 to detect a third force acting in the third upward direction; and at least one third-direction force-sensitive core 66 is mounted in the third mounting slot 105 at the bottom of the first active cavity 1011 to detect a third force acting in the third downward direction.

[0041] When detecting the third upward force in the third direction, the cover plate 3 drives the inner core 2 upward, and the annular pressure block 26 abuts the force-sensitive membrane 603 of the third-direction force-sensitive core 66. The force-sensitive membrane 603 is compressed and slightly deformed. The hydraulic medium transmits the third force to the force-sensitive chip 602. When the upper end surface of the annular pressure plate 25 abuts the wall of the installation cavity 101, the force-sensitive membrane 603 of the third-direction force-sensitive core 66 reaches its maximum deformation. At this time, the measured value of the third-direction force-sensitive core 66 is the maximum, which is the fifth preset force value. In this embodiment, the fifth preset force value is the maximum range of the third-direction force-sensitive core 66 and is set according to actual needs. When detecting the third downward force in the third direction, the cover plate 3 drives the inner core 2 to move downward, and the sleeve 24 abuts against the force-sensitive membrane 603 of the third-direction force-sensitive core 66. The force-sensitive membrane 603 is compressed and slightly deformed. The hydraulic medium transmits the third force to the force-sensitive chip 602 to detect the third downward force in the third direction. When the third force reaches the fifth preset force value, the measured value of the third-direction force-sensitive core 66 is the largest. The lower end face of the annular pressure plate 25 abuts against the wall of the installation cavity 101, and the force-sensitive membrane 603 of the third-direction force-sensitive core 66 reaches the maximum deformation.

[0042] like Figure 5 As shown, the number of first-direction force-sensitive cores 64 and the number of second-direction force-sensitive cores 65 are both two, and the force transmission member 7 is a cross member, which includes two first force transmission brackets 71 extending along the first direction and two second force transmission brackets 72 extending along the second direction. The two first force transmission brackets 71 correspond one-to-one to the two first-direction force-sensitive cores 64, and the two second force transmission brackets 72 correspond one-to-one to the two second-direction force-sensitive cores 65.

[0043] Specifically, if Figure 3 As shown, two first mounting grooves 102 and two second mounting grooves 103 are provided in the mounting cavity 101, and a first direction force-sensitive core 64 is fixedly provided in each first mounting groove 102. When the end face of the first force transmission bracket 71 abuts against the wall of the mounting cavity 101, the measurement value of the first direction force-sensitive core 64 reaches a maximum, and the measurement value of the first direction force-sensitive core 64 reaches a third preset force value; a second direction force-sensitive core 65 is provided in each second mounting groove 103. When the end face of the second force transmission bracket 72 abuts against the wall of the mounting cavity 101, the measurement value of the second direction force-sensitive core 65 reaches a maximum, reaching the fourth preset force value.

[0044] like Figure 5As shown, the cross member of the embodiment further comprises a force transmission connecting block 73, a first force transmission pressing block 74, and a second force transmission pressing block 75. The force transmission connecting block 73 is provided with a through hole, and one end of the connecting core 22 penetrates through the through hole. Each first force transmission pressing block 74 is arranged at the end of a first force transmission support 71 and corresponds to a first direction force sensitive core 64. When the first force transmission pressing block 74 abuts against the inner wall of the mounting cavity 101, the measurement value of the first direction force sensitive core 64 reaches the maximum, which is the third preset force value. The abutment of the first force transmission pressing block 74 against the inner wall of the mounting cavity 101 can avoid the first direction force sensitive core 64 from being continuously extruded, thereby playing a role of protecting the first direction force sensitive core 64. Each second force transmission pressing block 75 is arranged at the end of a second force transmission support 72 and corresponds to a second direction force sensitive core 65. When the second force transmission pressing block 75 abuts against the inner wall of the mounting cavity 101, the measurement value of the second direction force sensitive core 65 reaches the maximum, which is the fourth preset force value. The abutment of the second force transmission pressing block 75 against the inner wall of the mounting cavity 101 can avoid the second direction force sensitive core 65 from being continuously extruded, thereby playing a role of protecting the second direction force sensitive core 65.

[0045] The cross section of the force transmission connecting block 73 is square, and the first force transmission support 71 and the second force transmission support 72 are both cuboids, and the longitudinal cross sections of the two are both square. In other embodiments, the cross section of the force transmission connecting block 73 can also be circular, hexagonal, octagonal, or other shapes, and the first force transmission support 71 and the second force transmission support 72 can also be cylindrical supports or supports of other shapes, which are specifically arranged according to actual needs.

[0046] It should be noted that in other embodiments of the present application, the diameter of the first force transmission pressing block 74 can be smaller than the side length of the first force transmission support 71. When the end surface of the first force transmission support 71 abuts against the inner wall of the mounting cavity 101, the measurement value of the first direction force sensitive core 64 reaches the maximum, which is the third preset force value. The abutment of the end surface of the first force transmission support 71 against the inner wall of the mounting cavity 101 can limit the force sensitive membrane 603 of the first direction force sensitive core 64 from being deformed more seriously due to a larger first acting force. The diameter of the second force transmission pressing block 75 can be smaller than the side length of the second force transmission support 72. When the end surface of the second force transmission support 72 abuts against the inner wall of the mounting cavity 101, the measurement value of the second direction force sensitive core 65 reaches the maximum, which is the fourth preset force value. The abutment of the end surface of the second force transmission support 72 against the inner wall of the mounting cavity 101 can limit the force sensitive membrane 603 of the second direction force sensitive core 65 from being deformed more seriously due to a larger second acting force.

[0047] The first force transmission block 74 and the second force transmission block 75 of the embodiment are both abutting blocks, and the abutting blocks comprise abutting pieces and abutting bosses. The abutting boss of the first force transmission block 74 corresponds to the first direction force sensing core 64, and the abutting boss of the second force transmission block 75 corresponds to the second direction force sensing core 65. Specifically, when detecting the first force in the first direction, the first force transmission block 74 can transmit the first force to the first direction force sensing core 64, the force sensing film 603 of the first direction force sensing core 64 is slightly deformed under compression, and the hydraulic medium transmits the first force to the force sensing chip 602. When the abutting piece of the first force transmission block 74 abuts against the inner wall of the mounting cavity 101, the force sensing film 603 of the first direction force sensing core 64 reaches the maximum deformation amount, at this time, the measurement value of the first direction force sensing core 64 is the maximum, and the first force reaches the third preset force value. When detecting the second force in the second direction, the second force transmission block 75 can transmit the second force to the second direction force sensing core 65, the force sensing film 603 of the second direction force sensing core 65 is slightly deformed under compression, and the hydraulic medium transmits the second force to the force sensing chip 602. When the abutting piece of the second force transmission block 75 abuts against the inner wall of the mounting cavity 101, the force sensing film 603 of the second direction force sensing core 65 reaches the maximum deformation amount, at this time, the measurement value of the second direction force sensing core 65 is the maximum, and the second force reaches the fourth preset force value. The third preset force value of the embodiment is the maximum range of the first direction force sensing core 64, and the fourth preset force value is the maximum range of the second direction force sensing core 65. The specific values of the third preset force value and the fourth preset force value are set according to actual needs.

[0048] As shown in Figure 1 and Figure 2 The first through hole 201 and the second through hole 202 of the embodiment are both arranged on the main core 21, the sleeve 24 is provided with a third through hole 203 opposite to the first through hole 201 and a fourth through hole 204 opposite to the second through hole 202, the first rotating main support 41 is hinged on the first hinge support 43 and penetrates the first through hole 201 and the third through hole 203. The second rotating main support 51 is hinged on the second hinge support 53 and penetrates the second through hole 202 and the fourth through hole 204. The main core 21 of the embodiment is also provided with a first mounting hole (not shown in the figure) extending in the second direction and a second mounting hole (not shown in the figure) extending in the first direction. The first rotating main support 41 can be mounted on the first hinge support 43 by the first mounting hole through the tightening tool, and the second rotating main support 51 can be mounted on the second hinge support 53 by the second mounting hole through the tightening tool.

[0049] As shown in Figure 1 and Figure 2As shown, the six-dimensional force sensor of this embodiment also includes a PCB 9, which is electrically connected to the first tangential force sensitive core 61, the second tangential force sensitive core 62, the third tangential force sensitive core 63, the first direction force sensitive core 64, the second direction force sensitive core 65 and the third direction force sensitive core 66, respectively. The mounting seat 1 includes an upper seat 11, an intermediate connecting seat 12 and a lower seat 13 fixedly connected in sequence from top to bottom.

[0050] like Figure 7 As shown, the chip-type force-sensitive core of this embodiment includes a core base 601, a force-sensitive chip 602, and a force-sensitive membrane 603. The force-sensitive membrane 603 is fixed to the core base 601 and the two form a liquid cavity 6010. The liquid cavity 6010 is filled with a hydraulic medium. The force-sensitive chip 602 is fixed to the bottom wall of the liquid cavity 6010. The force-sensitive chip 602 can detect the force transmitted to the hydraulic medium through the force-sensitive membrane 603. The hydraulic medium of this embodiment is silicone oil or other incompressible and stable liquid, which is filled according to actual needs. Specifically, when the chip-type force-sensitive core is the first-direction force-sensitive core 64, the second-direction force-sensitive core 65, the third-direction force-sensitive core 66, the first tangential force-sensitive core 61, or the second tangential force-sensitive core 62, the outer contour of the core base 601 is cylindrical; when the chip-type force-sensitive core is the third tangential force-sensitive core 63, the outer contour of the core base 601 is crescent-shaped. It should be noted that in other embodiments of the present invention, the structure of the chip-type force-sensitive core is not limited to the above-mentioned limitation, and can also be a ceramic capacitor-type pressure core including a force-sensitive chip 602 or other chip-type force-sensitive core including a force-sensitive chip 602, which is selected according to actual needs.

[0051] To assemble the six-axis force sensor, follow the steps below: Fix the PCB 9 to the top of the upper base 11, and fix the two third-direction force-sensitive cores 66 for detecting the third direction upward in the third mounting groove 105 of the upper base 11; The first rotating beam 411 and the second rotating beam 511 are respectively mounted on the main core 21. The main core 21, the sleeve 24, the annular pressure plate 25 and the annular pressure block 26 are an integrated structure. The two first rotating vertical beams 412 with the first rotating pressing blocks 413 are fixed to the two ends of the first rotating horizontal beam 411 respectively, and the two second rotating vertical beams 512 with the second rotating pressing blocks 513 are fixed to the two ends of the second rotating horizontal beam 511 respectively; The two first rotating connecting main beams 414 are respectively installed at the two ends of the first rotating cross beam 411, and the two second rotating connecting main beams 514 are respectively installed at the two ends of the second rotating cross beam 511; Install the above structure into the installation cavity 101 and fix the connecting core 22 on the main core body 21; After installing two third tangential force-sensitive cores 63 and two third direction force-sensitive cores 66 on the intermediate connecting seat 12, the intermediate connecting seat 12 is fixed to the upper seat 11, and the two first direction force-sensitive cores 64 and the second direction force-sensitive cores 65 are fixed in the first installation groove 102 and the second installation groove 103 of the intermediate connecting seat 12. At the same time, the force transmission member 7 is sleeved on the connecting core 22 so that the force transmission member 7 is facing the first direction force-sensitive core 64 and the second direction force-sensitive core 65; The limit block 23 is fixedly installed on the end of the connecting core 22, and the lower seat 13 is fixedly installed on the middle connecting seat 12; The fixing base 81 on which the first decoupling rotating bracket 42 and the second decoupling rotating bracket 52 are mounted is fixedly mounted on the cover plate 3, so that both ends of the first decoupling rotating bracket 42 and the second decoupling rotating bracket 52 are fixedly connected to the cover plate 3; The fixing seat 81 is fixedly installed on the top end of the inner core 2 , and the two first rotating connecting main beams 414 and the two second rotating connecting main beams 514 are fixed on the cover plate 3 . At this point, the six-dimensional force sensor is assembled.

[0052] It should be noted that the above assembly steps are only one of the methods for assembling a six-axis force sensor provided in this embodiment, and can be adjusted according to actual needs, and are not limited here one by one.

[0053] Note that the above are only preferred embodiments of the present invention and the technical principles employed. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described herein, and that various obvious changes, readjustments, and substitutions can be made by those skilled in the art without departing from the scope of protection of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments and may include many other equivalent embodiments without departing from the concept of the present invention. The scope of the present invention is determined by the scope of the appended claims.

Claims

1. A six-dimensional force sensor, characterized in that: include: A mounting seat having a mounting cavity therein; An inner core and a cover plate, wherein the inner core is located in the mounting cavity, the cover plate is disposed on the inner core and spaced apart from the mounting seat, the cover plate being rotatable relative to the inner core about a first direction and a second direction, the cover plate being further capable of driving the inner core to rotate about a third direction, and being capable of moving along the first direction, the second direction, and the third direction; a first rotating connection assembly, comprising a first rotating main bracket disposed on the inner core and fixedly connected to the cover plate, wherein the first rotating main bracket is capable of rotating relative to the inner core around the first direction; a first tangential force-sensitive core, disposed on the inner core or the first rotating main bracket, the first tangential force-sensitive core being capable of abutting against the first rotating main bracket or the inner core to detect a first tangential force generated when the cover plate rotates in the first direction; a second rotating connection assembly, comprising a second rotating main bracket disposed on the inner core and fixedly connected to the cover plate, the second rotating main bracket being capable of rotating relative to the inner core about the second direction; a second tangential force-sensitive core, disposed on the inner core or the first rotating main bracket, the second tangential force-sensitive core being capable of abutting against the second rotating main bracket or the inner core to detect a second tangential force generated when the cover plate rotates in the second direction; a third tangential force-sensitive core disposed in the mounting cavity, the inner core being capable of abutting against the third tangential force-sensitive core to detect a third tangential force generated when the inner core rotates about the third direction; a force transmission member, sleeved on the inner core and capable of moving along the first direction and the second direction with the inner core, and the inner core can move along the third direction relative to the force transmission member; a first direction force-sensitive core, disposed on a side wall of the mounting cavity or the force transmission member, wherein the first direction force-sensitive core can abut against the force transmission member or the mounting seat to detect a first force in the first direction; a second direction force-sensitive core, disposed on a side wall of the mounting cavity or the force transmission member, the second direction force-sensitive core being capable of abutting against the force transmission member or the mounting seat to detect a second force in the second direction; a third-direction force-sensitive core, disposed on the inner wall of the mounting cavity or the inner core, the third-direction force-sensitive core being capable of abutting against the inner core or the mounting seat to detect a third force in the third direction; The first tangential force-sensitive core, the second tangential force-sensitive core, the third tangential force-sensitive core, the first directional force-sensitive core, the second directional force-sensitive core and the third directional force-sensitive core are all chip-type force-sensitive cores.

2. The six-dimensional force sensor according to claim 1, characterized in that: The first rotation connection assembly further includes a first decoupling rotation bracket, which is disposed at the top end of the inner core and fixedly connected to the cover plate, so that the cover plate can rotate relative to the inner core along the first direction; The second rotation connection assembly further includes a second decoupling rotation bracket, which is disposed at the top end of the inner core and fixedly connected to the cover plate so that the cover plate can rotate relative to the inner core along the second direction; A line connecting the rotation centers of the first decoupling rotation bracket, the second decoupling rotation bracket, the first main rotation bracket, and the second main rotation bracket extends along the third direction.

3. The six-dimensional force sensor according to claim 1, characterized in that: There are two first tangential force-sensitive cores, and the first rotating main bracket includes a first rotating crossbeam, two first rotating connecting main beams and two first rotating vertical beams. The first rotating crossbeam is hinged on the inner core and can rotate around the first direction relative to the inner core. The two first rotating connecting main beams are symmetrically arranged on the first rotating crossbeam and are fixedly connected to the cover plate. The two first rotating vertical beams are symmetrically arranged on the first rotating crossbeam and correspond one-to-one to the two first tangential force-sensitive cores respectively.

4. The six-dimensional force sensor according to claim 1, characterized in that: There are two second tangential force-sensitive cores, and the second rotating main bracket includes a second rotating crossbeam, two second rotating connecting main beams and two second rotating vertical beams. The second rotating crossbeam is hinged on the inner core and can rotate around the second direction relative to the inner core. The two second rotating connecting main beams are symmetrically arranged on the second rotating crossbeam and are both fixedly connected to the cover plate. The two second rotating vertical beams are symmetrically arranged on the second rotating crossbeam and correspond one-to-one to the two second tangential force-sensitive cores respectively.

5. The six-dimensional force sensor according to claim 1, characterized in that: The installation cavity includes a first active cavity, a second active cavity and a third active cavity which are connected in sequence. The inner core includes a main core body, a connecting core and a limit block which are fixedly connected in sequence. The main core body is located in the first active cavity. The force transmission member and the limit block are both located in the third active cavity. The connecting core is located in the second active cavity. The force transmission member is sleeved on the connecting core. The force transmission member limits the limit block in the third active cavity.

6. The six-dimensional force sensor according to claim 5, characterized in that: The inner core also includes a sleeve fixed on the main core body, and a torque transmission groove is provided at the bottom of the first active cavity. One end of the sleeve is located in the torque transmission groove and can rotate around the third direction. There are two third tangential force-sensitive cores, and two third tangential force-sensitive cores are arranged in the torque transmission groove. One third tangential force-sensitive core can detect the third tangential force in the clockwise direction around the third direction, and the other third tangential force-sensitive core can detect the third tangential force in the counterclockwise direction around the third direction.

7. The six-dimensional force sensor according to claim 6, characterized in that: The mounting cavity further includes a receiving groove, the inner core further includes a circular pressure plate and a circular pressure block arranged on the circular pressure plate, the circular pressure plate is fixed to the main core body and is located in the receiving groove, the number of the third-direction force-sensitive cores is at least two, at least one of the third-direction force-sensitive cores is arranged at the top of the receiving groove and faces the circular pressure plate to detect the third force acting upward along the third direction; At least one third-direction force-sensitive core is arranged at the bottom end of the first active cavity and facing the sleeve to detect the third force acting downward along the third direction.

8. The six-dimensional force sensor according to claim 1, characterized in that: There are two first-direction force-sensitive cores and two second-direction force-sensitive cores, and the force transmission member is a cross member. The cross member includes two first force transmission brackets extending along the first direction and two second force transmission brackets extending along the second direction. The two first force transmission brackets correspond one-to-one to the two first-direction force-sensitive cores, and the two second force transmission brackets correspond one-to-one to the two second-direction force-sensitive cores.

9. The six-dimensional force sensor according to claim 8, characterized in that: Two first mounting slots and two second mounting slots are provided in the mounting cavity. A first-direction force-sensitive core is fixedly provided in each of the first mounting slots. When the measured value of the first-direction force-sensitive core reaches a third preset force value, the end face of the first force transmission bracket abuts against the wall of the mounting cavity. A second-direction force-sensitive core is fixedly provided in each of the second mounting slots. When the measured value of the second-direction force-sensitive core reaches a fourth preset force value, the end face of the second force transmission bracket abuts against the wall of the mounting cavity.

10. The six-dimensional force sensor according to claim 1, characterized in that: The chip-type force-sensitive core includes a core base, a force-sensitive chip and a force-sensitive film. The force-sensitive film is fixed on the core base and the two form a liquid cavity. The liquid cavity is filled with hydraulic medium. The force-sensitive chip is fixed on the bottom wall of the liquid cavity. The chip-type force-sensitive core can detect the force transmitted to the hydraulic medium through the force-sensitive membrane.

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