Method and apparatus for controlling information of micro-nano processing laboratory equipment

Abstract

The application provides a micro-nano processing laboratory equipment information control method and device, which comprises the following steps: obtaining user login information; calling user project information, user reservation experiment information, user associated equipment information and user historical query information according to the user login information; predicting the attention weight of each laboratory equipment management information of the user in combination with the user identity authority, the user project information, the user reservation experiment information, the user associated equipment information and the user historical query information; adjusting the display order and the detail degree of each laboratory equipment management information in combination with the attention weight; and sending the data board of the laboratory equipment management information to the user according to the display order and the detail degree.

Description

Technical Field

[0001] This invention relates to the field of laboratory equipment, and more specifically to a method and apparatus for information control of laboratory equipment based on micro-nano fabrication. Background Technology

[0002] The micro-nano fabrication laboratory involves multiple experimental stages of semiconductor micro-nano fabrication, including but not limited to pattern transfer (such as photolithography), thin film deposition (such as CVD), etching (dry / wet), testing and packaging, etc. Each experimental stage is equipped with one or more important experimental process equipment, and each experimental process equipment needs to be matched with plant facilities (pure water system, exhaust gas treatment device, etc.), forming a multi-layered dependency relationship.

[0003] In existing technologies, the management of micro-nano fabrication laboratory equipment typically employs a large-scale laboratory equipment management system. This system integrates the operational data of experimental process equipment and plant equipment corresponding to each experimental stage. When laboratory managers or maintenance personnel need to obtain relevant data for specific equipment, they need to locate the experimental stage to which the equipment belongs and the accurate equipment name. However, the data storage location of specific equipment is complex to operate, and it is difficult for personnel who do not have a detailed understanding of the laboratory equipment or external experimental personnel to quickly and accurately find the corresponding equipment data. When an emergency occurs with the laboratory equipment, it is also difficult for technicians to quickly retrieve the specific parameters of the equipment. Summary of the Invention

[0004] Based on this, the present invention provides a method and apparatus for controlling information of laboratory equipment in micro-nano fabrication laboratories. According to the user's project information, scheduled experiment information and related equipment information, combined with the user's historical query information, the method quickly and accurately displays the laboratory equipment management data that the user is most interested in, reduces redundant laboratory equipment data retrieval processes and improves the efficiency of the user in retrieving laboratory equipment data.

[0005] In a first aspect, the present invention provides a method for controlling information on micro / nano fabrication laboratory equipment, wherein the method is applied at a user end and includes:

[0006] Obtain user login information;

[0007] Based on the user login information, retrieve the user's project information, user's reserved experiment information, user's historical operating device information, and user's historical query information;

[0008] By combining user identity and permissions, user's project information, user's booked experiment information, user's historical equipment operation information, and user's historical query information, we can predict the user's attention weight for various laboratory equipment management information.

[0009] The display order and level of detail of various laboratory equipment management information will be adjusted based on the aforementioned attention weights.

[0010] Furthermore, the method of predicting the user's attention weight for various laboratory equipment management information by combining user identity permissions, user's project information, user's booked experiment information, user's historical equipment operation information, and user's historical query information is as follows:

[0011] The user's identity and permissions, the user's project information, the user's reserved experiment information, the user's historical equipment operation information, and the user's historical query information are input into the attention prediction model to obtain the user's attention weight for each laboratory equipment management information.

[0012] The user identity permissions include the user's permission to browse devices and the user's permission to browse device information content. The user's project information includes the user's project funding balance and the user's project progress information. The user's booked experiment information includes the booked experiment time slots and the booked experiment progress. The user's historical device operation information includes the user's historical device booking records and the user's historical device operation records. The user's historical query information includes the user's historical browsing of device management information and the duration of browsing various device management information.

[0013] Furthermore, the adjustment of the display order and level of detail of various laboratory equipment management information based on the aforementioned attention weights specifically involves:

[0014] Obtain the original weights of various laboratory equipment management information;

[0015] The display weights for each type of laboratory equipment management information are obtained by combining the attention weights and the original weights.

[0016] The display order and level of detail of various laboratory equipment management information are determined based on the aforementioned display weights.

[0017] Furthermore, the information control method for the micro / nano fabrication laboratory equipment also includes:

[0018] Statistics on the duration of user browsing of various equipment management information items in the data dashboard for laboratory equipment management information;

[0019] Based on the historical average browsing time of various device management information in the user's historical query information, if the browsing time of any device management information is less than a preset threshold ratio of the historical average browsing time, the parameters of the attention prediction model are adjusted.

[0020] Furthermore, the information control method for the micro / nano fabrication laboratory equipment also includes:

[0021] Retrieve the user's query command;

[0022] The actual query command of the user is obtained based on the user's project information, user's reserved experiment information, user's historical equipment operation information, user's historical query information, and query command.

[0023] Based on the user's query command, retrieve and display the target data for laboratory equipment management.

[0024] Furthermore, the step of obtaining the user's actual query instruction based on the user's project information, user's scheduled experiment information, user's associated device information, query instructions, and user's historical query information specifically involves:

[0025] The query command is input into the natural language recognition model to obtain the query keywords;

[0026] The user's project information, the user's booked experiment information, the user's historical device operation information, the user's historical query information, and query keywords are input into the deep learning network model to obtain the user's actual query command.

[0027] Furthermore, the user query real instruction includes one or more query real instructions;

[0028] When the user query command is a single instruction, the laboratory equipment management target data is retrieved and displayed according to the user query command.

[0029] When the user query has more than one real instruction, the reliability of each real query instruction is calculated.

[0030] Retrieve and display target data for laboratory equipment management based on the most reliable query commands.

[0031] Furthermore, the information control method for the micro / nano fabrication laboratory equipment also includes:

[0032] When there is more than one user query command, obtain the user's feedback information on the target data for laboratory equipment management;

[0033] If the feedback information is negative, the reliability of each actual query instruction is recalculated based on the feedback information.

[0034] Retrieve and display laboratory equipment management target data based on the most reliable recalculated query commands.

[0035] Furthermore, the information control method for the micro / nano fabrication laboratory equipment also includes:

[0036] Obtain the user's laboratory equipment reservation request, which includes the user's preferred equipment and the user's preferred reservation time;

[0037] The system generates and sends out experimental equipment reservation recommendations by combining users' laboratory equipment reservation requests, various laboratory equipment management information, the user's attention weight for various laboratory equipment management information, and the user's actual query commands.

[0038] Secondly, the present invention also provides a method for controlling information on micro-nano fabrication laboratory equipment, wherein the method is applied to an administrator and includes:

[0039] Obtain information on laboratory equipment, laboratory project management, and laboratory personnel management.

[0040] Based on the administrator's login timestamp and historical browsing duration, set the display priority for laboratory equipment information, laboratory project management information, and laboratory personnel management information;

[0041] When an emergency occurs in the laboratory equipment information, laboratory project management information, or laboratory personnel management information, the display priority of that emergency will be adjusted to the highest level.

[0042] The laboratory equipment information, laboratory project management information, and laboratory personnel management information are sorted and displayed according to the adjusted priority.

[0043] Furthermore, by combining the administrator's login timestamp and historical browsing duration, the display priority of laboratory equipment information, laboratory project management information, and laboratory personnel management information is set, specifically as follows:

[0044] Filter laboratory management history browsing records with similar time characteristics based on the administrator's login timestamp;

[0045] Based on the laboratory management history browsing records with similar time characteristics and the historical browsing duration of each information item corresponding to the laboratory management history browsing record, the display priority of laboratory equipment information, laboratory project management information, and laboratory personnel management information is set.

[0046] Thirdly, the present invention provides an information control device for micro / nano fabrication laboratory equipment, wherein the information control device for micro / nano fabrication laboratory equipment is applied at the user end, comprising:

[0047] The user information acquisition module is used to acquire user login information;

[0048] The information retrieval module is used to retrieve information about the user's project, the user's scheduled experiments, the user's historical operating equipment, and the user's historical query information based on the user's login information.

[0049] The information weight determination module is used to predict the user's attention weight for various laboratory equipment management information by combining user identity and permissions, user's project information, user's reserved experiment information, user's historical equipment operation information, and user's historical query information.

[0050] The information display settings module is used to adjust the display order and level of detail of various laboratory equipment management information based on the aforementioned attention weights.

[0051] Fourthly, the present invention also provides a micro-nano fabrication laboratory equipment information control device, which is applied to an administrator and includes:

[0052] The laboratory information acquisition module is used to acquire information on laboratory equipment, laboratory project management, and laboratory personnel management.

[0053] The information priority setting module is used to set the display priority of laboratory equipment information, laboratory project management information, and laboratory personnel management information by combining the administrator's login timestamp and historical browsing duration;

[0054] The priority adjustment module is used to adjust the display priority of the emergency information, laboratory project management information or laboratory personnel management information to the highest level when an emergency occurs.

[0055] The information management terminal display module is used to sort and display the laboratory equipment information, laboratory project management information, and laboratory personnel management information according to the adjusted priority.

[0056] Fifthly, the present invention also provides a computer-readable storage medium having a computer program stored thereon, wherein the computer program, when executed by a processor, implements the steps of the micro / nano fabrication laboratory equipment information control method of either the first or second aspect.

[0057] In a sixth aspect, the present invention also provides a computer device, including a memory and a processor, wherein the memory stores a computer program, and when the processor executes the computer program, it executes any one of the micro-nano fabrication laboratory equipment information control methods in the first and second aspects.

[0058] The beneficial effects of adopting the above technical solution are as follows: In the digital management system of the micro-nano fabrication laboratory, this embodiment relies on advanced data processing technology to comprehensively integrate user project information, scheduled experiment information, and related equipment information. By deeply analyzing the research direction of user projects, such as nanomaterial preparation and semiconductor device processing, the required equipment type is accurately located; based on data such as the time, duration, and frequency of scheduled experiments, user usage habits are understood; simultaneously, information such as the technical parameters, operating status, and maintenance records of the associated equipment is linked to form a complete equipment profile. On this basis, the system reviews the user's historical query records and uses machine learning algorithms to mine their data query preferences, such as whether the user is more concerned about equipment usage scheduling, real-time operating parameters, or maintenance and calibration information. By constructing a personalized data recommendation model, when a user logs into the system or initiates a query request, the system can quickly match and filter the equipment management data that best suits their needs. Attached Figure Description

[0059] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0060] Figure 1 This is a schematic diagram of a micro / nano fabrication laboratory equipment information control method in one embodiment of this application;

[0061] Figure 2 This is a schematic diagram of a micro-nano fabrication laboratory equipment information control device in one embodiment of this application. Detailed Implementation

[0062] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present invention. To describe the present invention in more detail, the information control method and apparatus for micro-nano fabrication laboratory equipment provided by the present invention will be specifically described below with reference to the accompanying drawings.

[0063] Unless otherwise defined, the technical or scientific terms used in this application shall have the ordinary meaning understood by one of ordinary skill in the art to which this invention pertains. The terms "first," "second," and similar terms used in this invention do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Similarly, the terms "an," "a," or "the" do not indicate a quantity limitation, but rather indicate the presence of at least one. The terms "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. The terms "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up," "down," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0064] Micro-nano fabrication laboratories involve various high-precision equipment, including lithography machines and electron beam processing equipment. The data generated by these devices includes operating parameters, maintenance parameters, and usage logs, exhibiting diverse data types and structures. Existing equipment management systems for micro-nano fabrication laboratories are often displayed via web pages. Based on the different micro-nano fabrication processes each equipment corresponds to, the laboratory equipment is divided into several equipment groups, with each group containing one or more micro-nano fabrication devices. Furthermore, the focus of equipment management differs between users and administrators. When users lack a comprehensive understanding of the equipment in the micro-nano fabrication laboratory, it is difficult to quickly find the corresponding data information for specific equipment within the equipment system. Simultaneously, because each process device in the micro-nano fabrication laboratory system contains numerous data types and a large volume of data, it is not conducive to laboratory personnel quickly locating the specific data for a particular process device.

[0065] The micro-nano fabrication laboratory equipment information control method provided in this invention is applied to a micro-nano fabrication platform. This platform has multiple identity attributes, including users and administrators. The user group can be further divided into project leaders and project members. During the equipment information acquisition phase, the project leader's main concerns include the experimental yield of the micro-nano fabrication equipment, the advancement of the equipment, the overall progress of the experimental project, and the experimental results of the project members. The project members' main concerns include the available time for scheduling the micro-nano fabrication equipment, the historical yield of the required equipment, and alternative equipment. The administrator's main concerns include fault alarm information of the micro-nano fabrication equipment, the equipment usage accuracy of users on the micro-nano fabrication platform, and the equipment usage time of users on the platform.

[0066] This invention provides an application scenario for the information control method of micro-nano fabrication laboratory equipment. This application scenario includes the terminal devices provided in the embodiments. The terminal devices include, but are not limited to, smartphones and computer devices. The computer device can be at least one of desktop computers, portable computers, laptop computers, mainframe computers, tablet computers, etc. The terminal device, upon receiving user login information, predicts and displays the user's interest in information related to the micro-nano fabrication laboratory equipment. (See attached...) Figure 1 The diagram shows a method for controlling information on equipment in a micro / nano fabrication laboratory. For details, please refer to the embodiments of the method for controlling information on equipment in a micro / nano fabrication laboratory.

[0067] When the information control method for micro / nano fabrication laboratory equipment is applied to the user end, it specifically includes the following steps:

[0068] Step S101: Obtain user login information.

[0069] The user login information includes the user's username and password. Each user on the micro-nano fabrication platform is configured with a corresponding username and password. Users enter their username and password through the micro-nano fabrication platform's login interface.

[0070] Step S102: Retrieve the user's project information, the user's reserved experiment information, the user's historical operating device information, and the user's historical query information based on the user login information.

[0071] Specifically, the user's account name is used throughout all technological processes on the micro-nano fabrication platform, such as experiment task reservation, experiment equipment reservation, and experiment task data query. Through the user's account name, information about the user's project, reserved experiments, historical equipment operation, and historical query history can be retrieved on the platform. It should be noted that experiments on the micro-nano fabrication platform are initiated in teams. While different users within the same team may have the same project information, their reserved experiment information, historical equipment operation information, and historical query history will differ.

[0072] In this embodiment, considering that users log in to the equipment management system of the micro-nano fabrication platform to view specific information related to their projects or experiments, the system retrieves information such as the user's project information, the user's booked experiments, the user's historical equipment operation information, and the user's historical query information based on the user's login information to collaboratively predict the equipment information that the user is interested in. The user's project information includes member information of the user's project, information on completed experiments, information on booked experiments, and project progress. The user's booked experiments information refers to one or more experiments booked by the user within a preset time period, including the booked experiment time, the available time of the equipment required for the booked experiment, and the expected delivery time of the booked experiment. The user's historical equipment operation information includes the user's historical equipment booked records and the user's historical equipment operation records. The user's historical query information includes the user's historical browsing of equipment management information and the duration of browsing each piece of equipment management information, where the user's historical browsing of equipment management information includes the user's historical browsing of equipment information, historical querying of equipment information, historical browsing of project information, and historical querying of project information.

[0073] Step S103: Combine user identity and permissions, user's project information, user's booked experiment information, user's historical equipment operation information, and user's historical query information to predict the user's attention weight for various laboratory equipment management information.

[0074] In this embodiment, the user identity permissions include the user's permission to browse devices and the user's permission to browse device information content; the user's project information includes the user's project funding balance and the user's project progress information; the user's booked experiment information includes the booked experiment time slots and the booked experiment progress; the user's historical device operation information includes the user's historical device booking records and the user's historical device operation records; the user's historical query information includes the user's historical browsing of device management information and the duration of browsing various device management information. Laboratory equipment management information includes user project information (including project content and progress), user-booked experiment information (including booked experiment content, booked experiment members, booked experiment objectives, and booked experiment duration), user-booked equipment information (including available booking time, technical parameters, status, historical yield, and maintenance time), user-interested equipment information (including equipment information and equipment related to the user's project, specifically available booking time, technical parameters, status, historical yield, and maintenance time), user historical experiment information (including historical experiment results, historical equipment operation parameters, historical equipment operation status, historical equipment operation violations, and historical equipment yield), project funding usage, project-related experiment violation records, and user-queried equipment information (including available booking time, technical parameters, status, yield, and maintenance time).

[0075] In this embodiment, by inputting user identity and permissions, user's project information, user's booked experiment information, user's associated equipment information, and user's historical query information into the attention prediction model, the user's attention weight for each piece of laboratory equipment management information is obtained. The attention prediction model is a deep learning prediction model, trained on the user's historical dataset on the micro-nano fabrication platform, and its specific parameters are adjusted to predict the user's attention weight for each piece of laboratory equipment management information based on user identity and permissions, user's project information, user's booked experiment information, user's associated equipment information, and user's historical query information. Specifically, the attention prediction model adjusts the attention weight based on the frequency of the same equipment in the user's booked experiment information in the user's historical query information; the higher the frequency of the same equipment in the user's booked experiment information in the user's historical query information, the higher the attention weight of that equipment information. The attention prediction model also adjusts the user's associated equipment information based on the user's project information and user's booked experiment information; if the user's associated equipment information belongs to the user's project or is related to the user's booked experiment, the higher the attention weight of that user's associated equipment information.

[0076] For example, when User A is a member of Project A, their user privileges only allow them to view experimental task progress, experimental reservation information, and equipment information related to their experimental tasks. By retrieving specific information about Project A (such as whether Project A is a key experimental project or whether Project A's project funding has been restructured), User A's reserved experimental information (including specific experimental task information, reserved experimental time, and time limits for experimental equipment usage), User A's associated equipment information (including User A's historical equipment operation information, reserved equipment idle time, and reserved equipment operating status), and User A's historical query information (such as User A's multiple queries about the idle time of lithography equipment in historical query information), the retrieved user A's user privileges, project information, reserved experimental information, associated equipment information, and historical query information are input into the attention prediction model. Through deep learning and processing of the above content by the attention prediction model, it is predicted that User A has a high level of attention to lithography equipment information in reserved experiments on the micro-nano processing platform. Therefore, it can be determined that User A has the highest attention weight for lithography equipment information among various laboratory equipment management information, the second highest attention weight for the available time information of equipment required for reserved experimental tasks, and the lowest attention weight for project progress.

[0077] When User B is the project leader of Project B, their user privileges allow them to view the progress of all experimental tasks related to their project, the information on booked experiments, and the equipment information. By retrieving specific information about User B's Project B (such as whether Project B is an urgent task, its progress, funding, and the yield rate of the experimental tasks it contains), User B's booked experiment information (including specific experimental task information, booked experiment time, and equipment usage time limits), User B's associated equipment information (including User B's historical equipment operation information, the available time of the equipment booked by User B, and the operating status of the equipment booked by User B), and User B's historical query information (such as User B's multiple queries about project progress and the yield rate of the experimental tasks included in the project), and through deep learning processing of the above content using an attention prediction model, it is predicted that User B has a high level of attention to project progress and the yield rate of the tasks included in the project within the micro-nano fabrication platform. This determines that User B has the highest attention weight for the information of their project.

[0078] Step S104: Adjust the display order and level of detail of various laboratory equipment management information based on the attention weights.

[0079] Specifically, step S104 above includes the following steps:

[0080] Step S1041: Obtain the original weights of various laboratory equipment management information.

[0081] Step S1042: Combine the attention weight and the original weight to obtain the display weight of each laboratory equipment management information.

[0082] Step S1043: Obtain the display order and level of detail of each laboratory equipment management information according to the display weight.

[0083] The higher the display weight of any laboratory equipment management information, the earlier it will be displayed and the more detailed it will be. This allows users to quickly learn about the laboratory equipment management information that they are most interested in. On the other hand, laboratory equipment management information that is less interesting can be moved to the back of the display page and displayed with less detail or even skipped.

[0084] It should be noted that in this embodiment, each piece of laboratory equipment management information in the micro-nano fabrication laboratory equipment management system has an original weight. This original weight can serve as the initial display order and level of detail for each piece of laboratory equipment management information in the micro-nano fabrication laboratory equipment management system. The attention weight, on the other hand, is adjusted based on the user's specific related information, so that the user can quickly find the equipment information that the user is actually interested in in the micro-nano fabrication laboratory equipment management platform, thereby improving the effectiveness of the user's browsing of equipment information in the micro-nano fabrication laboratory equipment management platform.

[0085] In this embodiment, the original weight settings for various laboratory equipment management information differ slightly between the project member side and the project administrator side. For the project member side, the original weight settings for laboratory equipment management information are as follows: User project information >> User reserved experiment information > User reserved equipment information > User interested equipment information > User historical experiment information > Project fund usage > Project-related experiment violation records > User historical query equipment information. For the project administrator side, the original weight settings for laboratory equipment management information are as follows: User project information >> Project fund usage > Project-related experiment violation records >> User historical experiment information > User reserved experiment information > User reserved equipment information > User interested equipment information > User historical query equipment information.

[0086] The original weights of various laboratory equipment management information items can be represented numerically, while the attention weights are represented as specific proportions. The display weight is represented as the product of the original weight and the attention weight. A detail threshold is set for the display weight of each piece of laboratory equipment management information item. When the display weight of a piece of laboratory equipment management information item exceeds the corresponding detail threshold, the item is displayed in detail; when the display weight is less than the corresponding detail threshold, the item is displayed briefly. Furthermore, if the display weight of any piece of laboratory equipment management information item is less than a preset omission threshold, that item is not displayed. Further, the display order of various laboratory equipment management information items is adjusted by sorting them according to their display weights. The higher the display weight, the earlier the item is displayed. However, since user project information is far greater than other equipment information, its corresponding display weight is the highest, so user project information is always displayed first.

[0087] Specifically, in this embodiment, the adjusted laboratory equipment management information, after changing its display order and level of detail, can be presented to the user in the form of a data board. The display area ratio of each piece of laboratory equipment management information on the data board can be calculated based on the quantity and level of detail of each item. The information is then arranged according to its display order to obtain the adjusted data board. Alternatively, in this embodiment, the adjusted laboratory equipment management information can also be presented to the user in a list format. Each piece of laboratory equipment management information is displayed sequentially, with the content adjusted according to its level of detail. When any piece of laboratory equipment management information is presented in a brief manner, it can be described using concise text or data. When any piece of laboratory equipment management information is presented in a detailed manner, it can be described using specific text or data, or even combined with specific charts or demonstration videos.

[0088] To further improve the accuracy of information delivery in the aforementioned information control method for micro / nano fabrication laboratory equipment, this embodiment also incorporates a corresponding feedback mechanism based on user behavior, specifically:

[0089] Step 201: Calculate the time users spend browsing various equipment management information items in the data dashboard of laboratory equipment management information.

[0090] Step S202: Based on the historical average browsing time of each device management information in the user's historical query information, if the browsing time of any device management information is less than a preset threshold ratio of the historical average browsing time, adjust the parameters of the attention prediction model.

[0091] For example, tracking the time users spend browsing various equipment management information items on the data dashboard for laboratory equipment management information, such as the time users spend browsing the available appointment times for etching equipment. Less than the average browsing time of users' history of the available time for etching equipment If the preset threshold ratio means that the user is not paying much attention to the available time of the etching equipment during this login process, the parameters of the attention prediction model will be adjusted to increase the weight of information that the user is truly concerned about.

[0092] Based on the above technical solution, and considering that users can obtain target data not only through the displayed laboratory equipment management information but also through searching, this application embodiment further improves the micro-nano fabrication laboratory equipment information control method by combining user search for specific laboratory equipment management information, specifically including the following steps:

[0093] Step S106: Obtain the user's query command.

[0094] In this embodiment, user query commands are generally input in natural language. User query commands can be entered via an assistant dialog box or directly in the search box. Examples include "lithography equipment parameters," "which etching equipment is available for booking," and "violation of regulations."

[0095] Step S107: Obtain the user's actual query instruction based on the user's project information, user's reserved experiment information, user's historical equipment operation information, user's historical query information, and query instruction.

[0096] Specifically, obtaining the user's actual query instruction based on the user's project information, user's booked experiment information, user's historical device operation information, user's historical query information, and query instructions involves:

[0097] Step S1071: Input the query command into the natural language recognition model to obtain query keywords.

[0098] The query keywords correspond to one or more keywords related to the management information of micro-nano fabrication laboratory equipment. The types of query keywords include, but are not limited to, time features, project features, equipment features, and query purpose. In this embodiment, the specific content matching the user's query instruction with the micro-nano fabrication laboratory equipment management auxiliary platform can be obtained through the combination of query keywords. The time feature can indicate whether the user is querying current or historical information; the project feature can indicate the specific project name or number that the user is querying; the equipment feature can indicate the specific type or name of the equipment that the user is querying; and the query purpose can indicate whether the user is querying specific data or needs to make an appointment.

[0099] Step S1072: Input the user's project information, user's reserved experiment information, user's historical operating device information, user's historical query information and query keywords into the deep learning network model to obtain the user's actual query command.

[0100] Given the similar wording of equipment names, project names, or specific equipment numbers in the micro-nano fabrication laboratory equipment management auxiliary platform, ordinary users may not necessarily know the correct wording of each piece of equipment name or specific query command in the platform. Therefore, the combination of query keywords obtained by the natural language recognition model may result in one or more results. In this case, to more accurately understand the user's query command, the actual query command can be deduced by combining the user's project information, the user's booked experiments, the user's historical equipment operation information, the user's historical query information, and the query command itself. For example, if the user's query command is input into the natural language recognition model and the query keyword only includes "etching equipment," the micro-nano fabrication laboratory equipment management auxiliary platform can obtain multiple query commands based solely on this keyword. In this case, the actual query command corresponding to the query keyword can be deduced by combining whether the user's project information includes any experiments using etching equipment, whether the user's booked experiments include any experiments using etching equipment, whether the user's historical equipment operation information contains any records of using etching equipment, and whether the user's historical query information contains any records of queries using etching equipment.

[0101] Furthermore, when there are too many query commands corresponding to the query keywords, the aforementioned deep learning network model can only perform partial filtering. Therefore, in this embodiment, regarding the user query commands obtained in step S1072, there may be cases where the user query commands include one or more query commands:

[0102] When the user query command is a single instruction, the laboratory equipment management target data is retrieved and displayed according to the user query command.

[0103] When the user queries more than one real instruction, the reliability of each real instruction is calculated; the laboratory equipment management target data is retrieved and displayed based on the real instruction with the highest reliability.

[0104] Specifically, keywords are extracted from each real query command, and the frequency of each keyword in the user's historical query commands is retrieved. The higher the frequency of all keywords in the same real query command in historical query commands, the higher the reliability of the real query command.

[0105] Step S108: Retrieve and display the target data for laboratory equipment management based on the user's query command.

[0106] It should be noted that in this embodiment, the user query real command also includes emotional intensity. When the user query real command points to the available time of laboratory equipment or the yield rate of laboratory equipment, the most detailed laboratory equipment management target data is retrieved and displayed according to the user query real command.

[0107] Furthermore, considering that a user's query command may contain more than one true instruction, and taking into account that the reliability calculation may not fully represent the user's true intention, this embodiment also includes a feedback mechanism. This mechanism adjusts the reliability based on user feedback, dynamically adjusting the reliability calculation method for different users. This allows the micro-nano fabrication laboratory management support platform to have a higher hit rate for subsequent queries from the same user. Therefore, the micro-nano fabrication laboratory equipment information control method in this embodiment also includes:

[0108] Step S203: When the user query real command is more than one, obtain the user's feedback information on the target data of laboratory equipment management.

[0109] Step S204: If the feedback information is negative, recalculate the reliability of each actual query instruction based on the feedback information.

[0110] For example, if a user's query for a real instruction yields more than one result, and the user reports that the current target data for laboratory equipment management is not the data they actually queried, then the previously predicted real user query instruction is considered unreliable, and the reliability of each real query instruction needs to be recalculated based on the feedback data.

[0111] Step S205: Retrieve and display the target data for laboratory equipment management based on the recalculated query command with the highest reliability.

[0112] For example, when a user queries three results: the available time of the lithography equipment, the historical experimental yield of the lithography equipment, and the fault record of the lithography equipment, the historical yield of the lithography equipment is fed back to the user based on the reliability of each query instruction. When the user feedback is received that "I don't want to query the historical yield, I need to query the available time of the lithography equipment", the reliability of the above query instructions needs to be recalculated based on the feedback information. After recalculation, the reliability of "available time of the lithography equipment" is the highest.

[0113] Furthermore, the aforementioned disclosed method for controlling information on micro-nano fabrication laboratory equipment, whether in the display stage of laboratory equipment management information or in the stage of pushing query results based on user query commands, only pushes the specific micro-nano fabrication laboratory equipment management information that the user wants to know. Considering that the user's purpose in understanding the micro-nano laboratory equipment management information is to form a data foundation for the experimental equipment reservation stage, the embodiments of this application can also generate a specific laboratory equipment reservation recommendation scheme based on the user's laboratory equipment reservation request, including the following specific steps:

[0114] Step S301: Obtain the user's laboratory equipment reservation request, which includes the user's preferred equipment and the user's preferred reservation time.

[0115] The user's intended device is any micro-nano fabrication laboratory equipment that the user has access to. The user's intended reservation time is any time period within the preset time cycle in which the user submits the reservation request for the laboratory equipment, and the length of this time period is not less than the minimum reservation time for that laboratory equipment.

[0116] Step S302: Combine the user's laboratory equipment reservation request, laboratory equipment management information, the user's attention weight for each type of laboratory equipment management information, and the user's actual query command to generate and send a laboratory equipment reservation recommendation scheme.

[0117] The laboratory equipment management information includes user project information (including project content and progress), user-booked experiment information (including booked experiment content, booked experiment members, booked experiment objectives, and booked experiment duration), user-booked equipment information (including equipment availability time, equipment technical parameters, equipment status, equipment historical yield, and equipment maintenance time), user-interested equipment information (including equipment information that the user is interested in and equipment information related to the user's project, specifically equipment availability time, equipment technical parameters, equipment status, equipment historical yield, and equipment maintenance time), user historical experiment information (including user historical experiment results, user historical equipment operation parameters, user historical equipment operation status, user historical equipment operation violation records, user historical equipment operation yield, etc.), project funding usage, project-related experiment violation records, and user historical query equipment information (including equipment availability time, equipment technical parameters, equipment status, equipment yield, and equipment maintenance time, etc.).

[0118] The generation phase of the above-mentioned experimental equipment reservation recommendation scheme is subject to the following specific constraints working together:

[0119] (1) Equipment constraints

[0120] First, the planned reservation time for the user's intended equipment is determined based on the user's historical experimental information, historical query information, and project funding usage in the laboratory equipment management information. If the planned reservation time for the user's intended equipment is inconsistent with the user's intended reservation time, the user's intended reservation time shall prevail, and the planned reservation time for the user's intended equipment shall be reserved as a backup.

[0121] Taking lithography machine A as an example, based on the user's historical experimental information and historical query information, it is found that the user prefers off-peak hours for lithography machine A in both historical operation records and historical query information. Furthermore, the user's project funding usage is below 30% of the balance. Therefore, the user's planned reservation time for lithography machine A is off-peak hours from 02:00 to 03:00. At this time, combined with the user's laboratory equipment reservation request indicating that the intended reservation time for lithography machine A is peak hours from 09:00 to 10:00, the planned reservation time for lithography machine A can be reserved as a backup, and the user's intended reservation time for lithography machine A should be taken as the final decision.

[0122] Then, based on the user's historical operational equipment violation records and historical operational equipment yield, as well as the device status, historical yield, and maintenance time of the user's intended device, the error rate of the user's operation on the intended device is predicted. If the user's error rate on the intended device is lower than the preset fault tolerance rate, a recommended experimental equipment reservation plan is formed according to the intended device's reservation time. If the user's error rate on the intended device is higher than the preset fault tolerance rate, it is determined whether experimental assistants are set up for the planned reservation time and the intended reservation time. If experimental assistants are set up for the intended reservation time, a recommended experimental equipment reservation plan is formed according to the intended device's reservation time. If experimental assistants are not set up for the intended reservation time, but experimental assistants are set up for the planned reservation time, a recommended experimental equipment reservation plan is formed according to the intended device's planned reservation time.

[0123] For example, continuing the above example, if the user's historical operation violation records show a large number of violations related to lithography machine A, and the historical equipment yield is low, and considering the equipment status, historical yield, and maintenance time of lithography machine A, it is predicted that the user's error rate for operating lithography machine A is as high as 70%, this indicates that even if the user operates according to the intended equipment reservation time, there may still be many violations and a high error rate. In this case, it is necessary to further check whether the user has set up experimental assistants during the intended and planned reservation times to ensure that the user can complete the experiment with the assistance of experimental assistants and avoid violations.

[0124] (2) User constraints

[0125] Based on user constraints, the generation of experimental equipment reservation recommendation schemes needs to consider the level of the user's project content, the user's platform activity level, and the user's equipment preferences, specifically including the following:

[0126] The project content of a user is classified into four levels: priority urgent, general urgent, priority non-urgent, and non-urgent. Each level corresponds to a different priority weight for equipment reservation. When the user's project content is classified as priority urgent, the priority weight for equipment reservation is the highest. When the user's project content is classified as general urgent, the priority weight for equipment reservation is the second highest. When the user's project content is classified as priority non-urgent, the priority weight for equipment reservation decreases. When the user's project content is classified as non-urgent, the priority weight for equipment reservation is the lowest.

[0127] User platform activity is determined by a weighted calculation based on the number of times a user logs in within a preset time period, the cumulative number of times a user makes device reservations, and the number of times a user participates in training. The specific expression is as follows: .

[0128] A user's equipment preferences can be determined by combining information on equipment the user is interested in, the user's historical experimental information, and the user's historical query information. The information on equipment the user is interested in is determined based on the user's weight in relation to various laboratory equipment management information. When the user's information on equipment the user is interested in, the user's historical experimental information, and the user's historical query information all indicate that the user has a high preference for one of the multiple pieces of equipment they intend to use on the micro-nano fabrication platform, then a recommended experimental equipment reservation scheme is generated based on the device with the highest user preference.

[0129] If two or more users have conflicting recommendations for the experimental equipment reservation, the recommendation will be sent to the user with the highest overall equipment reservation priority and platform activity, taking into account the equipment reservation priority weight corresponding to the level of the user's project content.

[0130] (3) Experimental procedure constraints

[0131] Furthermore, considering the potential correlation between different experiments, when generating an experimental equipment reservation plan, it is also necessary to combine the equipment information related to the user's project from the information on equipment the user is interested in to generate an experimental equipment reservation recommendation plan.

[0132] For example, micro-nano fabrication experiments may require the coordinated use of multiple devices, such as a process chain of photolithography → etching → thin film deposition. When the user's intended device is a photolithography device, the available time slots of the etching and thin film deposition devices can be locked in, and a recommended reservation plan for the experimental equipment can be generated by combining the available time slots of the photolithography, etching, and thin film deposition devices. Another example is the dependency relationship between certain experimental devices in micro-nano fabrication experiments. In this case, it is necessary to determine whether the user's intended device is dependent on other devices. If a dependency exists, a recommended reservation plan for the experimental equipment needs to be generated by combining the available time slots of the dependent devices. For instance, if a measurement experiment must follow a photolithography experiment, then when the user's intended device is a photolithography device, a dependency relationship exists between the photolithography device and the measurement device. Therefore, a recommended reservation plan for the photolithography device needs to be generated by combining the available time slots of the measurement device.

[0133] To ensure the reliability of the experimental equipment reservation scheme, this embodiment sets the following three constraints: the equipment constraints are satisfied only after the user constraints and experimental process constraints are met; if the user constraints and experimental process constraints cannot be met, the user is advised to change the experimental scheme; if the equipment constraints cannot be met, an experimental equipment reservation scheme is generated based on the equipment's available time closest to the user's intended reservation time.

[0134] The aforementioned disclosed method for controlling equipment information in a micro / nano fabrication laboratory determines the equipment information of interest to the user based on the experimental tasks and related equipment information associated with the user's login information. However, from the administrator's perspective, the administrator is more concerned with whether the micro / nano fabrication laboratory equipment is operating normally or whether there are any malfunctions, and specifically includes the following steps:

[0135] Step S401: Obtain laboratory equipment information, laboratory project management information, and laboratory personnel management information.

[0136] Step S402: Based on the administrator's login timestamp and historical browsing duration, set the display priority for laboratory equipment information, laboratory project management information, and laboratory personnel management information.

[0137] Specifically, the method of setting the display priority of laboratory equipment information, laboratory project management information, and laboratory personnel management information by combining the administrator's login timestamp and historical browsing duration is as follows:

[0138] Filter laboratory management history browsing records with similar time characteristics based on the administrator's login timestamp;

[0139] Based on the laboratory management history browsing records with similar time characteristics and the historical browsing duration of each information item corresponding to the laboratory management history browsing record, the display priority of laboratory equipment information, laboratory project management information, and laboratory personnel management information is set.

[0140] For example, if the administrator's login timestamp corresponds to a weekday, retrieving the administrator's browsing history for laboratory management on weekdays determines the historical browsing time for various information. If the browsing time for equipment operation status is highest on weekdays, then the display priority for laboratory equipment information can be set to be the highest. Similarly, if the administrator's login timestamp corresponds to a holiday, retrieving the administrator's browsing history for laboratory management on holidays determines the historical browsing time for various information. If the browsing time for laboratory project management information is highest on holidays, then the display priority for laboratory project management information can be set to be the highest.

[0141] Step S403: When an emergency occurs in the laboratory equipment information, laboratory project management information, or laboratory personnel management information, the display priority of the emergency is adjusted to the highest level.

[0142] For example, in the event of emergencies such as laboratory equipment malfunction, damage to laboratory equipment, urgent completion of laboratory projects, insufficient funding for laboratory projects, or violations of operating procedures by laboratory personnel, the display priority of such emergencies will be adjusted to the highest level, thereby quickly and intuitively pushing such emergencies to the administrator and improving the response efficiency to such emergencies.

[0143] Step S404: Sort and display the laboratory equipment information, laboratory project management information, and laboratory personnel management information according to the adjusted priority.

[0144] It should be understood that, although attached Figure 1 The steps in the flowchart are shown sequentially according to the arrows, but these steps are not necessarily executed in the order indicated by the arrows. Unless otherwise specified in this document, there is no strict order requirement for the execution of these steps, and they can be executed in other orders. Furthermore, [the following is a list of steps]. Figure 1 At least some of the steps in the process may include multiple sub-steps or sub-stages. These sub-steps or stages are not necessarily completed at the same time, but can be executed at different times. The execution order of these sub-steps or stages is not necessarily sequential, but can be executed in turn or alternately with other steps or at least some of the sub-steps or stages of other steps.

[0145] The above-described embodiments of the present invention describe in detail a method for controlling information on equipment in a micro / nano fabrication laboratory. Since this method can be implemented using various types of equipment, the present invention also discloses a device for controlling information on equipment in a micro / nano fabrication laboratory. Figure 2 The following are specific embodiments for detailed explanation.

[0146] The micro / nano fabrication laboratory equipment information control device is applied at the user end and includes:

[0147] User information acquisition module 501 is used to acquire user login information;

[0148] The information retrieval module 502 is used to retrieve information about the user's project, the user's scheduled experiments, the user's historical operating equipment information, and the user's historical query information based on the user login information.

[0149] The information weight determination module 503 is used to predict the user's attention weight for various laboratory equipment management information by combining user identity and permissions, user's project information, user's reserved experiment information, user's historical equipment operation information and user's historical query information.

[0150] The information display settings module 504 is used to adjust the display order and level of detail of various laboratory equipment management information based on the attention weights.

[0151] The micro / nano fabrication laboratory equipment information control device is applied to the administrator's end and includes:

[0152] The laboratory information acquisition module is used to acquire information on laboratory equipment, laboratory project management, and laboratory personnel management.

[0153] The information priority setting module is used to set the display priority of laboratory equipment information, laboratory project management information, and laboratory personnel management information by combining the administrator's login timestamp and historical browsing duration;

[0154] The priority adjustment module is used to adjust the display priority of the emergency information, laboratory project management information or laboratory personnel management information to the highest level when an emergency occurs.

[0155] The information management terminal display module is used to sort and display the laboratory equipment information, laboratory project management information, and laboratory personnel management information according to the adjusted priority.

[0156] For details regarding the information control device for micro / nano fabrication laboratory equipment, please refer to the above description of the method; further elaboration is omitted here. Each module in the aforementioned device can be implemented entirely or partially through software, hardware, or a combination thereof. These modules can be embedded in the processor of the terminal device in hardware form or independently of it, or stored in the memory of the terminal device in software form, so that the processor can call and execute the corresponding operations of each module.

[0157] In one embodiment, the present invention also provides a computer-readable storage medium having a computer program stored thereon, wherein the computer program, when executed by a processor, implements the steps of the above-described information control method for laboratory equipment based on micro-nano fabrication.

[0158] The computer-readable storage medium may be an electronic storage device such as flash memory, EEPROM (Electrically Erasable Programmable Read-Only Memory), EPROM (Erasable Programmable Read-Only Memory), hard disk, or ROM. Optionally, the computer-readable storage medium includes a non-transitory computer-readable storage medium. The computer-readable storage medium has storage space for program code that performs any of the method steps described above. This program code can be read from or written to one or more computer program products, and the program code may be compressed in an appropriate form.

[0159] In one embodiment, the present invention provides a computer device including a memory and a processor, wherein the memory stores a computer program, and the processor executes the computer program to perform the above-described micro-nano fabrication laboratory equipment information control method.

[0160] The computer device includes a memory, a processor, and one or more computer programs, wherein the one or more computer programs can be stored in the memory and configured to be executed by one or more processors, and the one or more application programs are configured to execute the above-described micro-nano fabrication laboratory equipment information control method.

[0161] A processor may include one or more processing cores. The processor connects to various parts of the computer device using various interfaces and lines, and performs various functions and processes data by running or executing instructions, programs, code sets, or instruction sets stored in memory, and by calling data stored in memory. Optionally, the processor may be implemented using at least one hardware form of Digital Signal Processing (DSP), Field-Programmable Gate Array (FPGA), or Programmable Logic Array (PLA). The processor may integrate one or a combination of several of the following: Central Processing Unit (CPU), Graphics Processing Unit (GPU), and modem. The CPU primarily handles the operating system, user interface, and applications; the GPU is responsible for rendering and drawing the displayed content; and the modem handles wireless communication. It is understood that the modem may also be implemented separately as a communication chip, without being integrated into the processor.

[0162] The memory may include random access memory (RAM) or read-only memory (ROM). The memory can be used to store instructions, programs, code, code sets, or instruction sets. The memory may include a program storage area and a data storage area. The program storage area may store instructions for implementing an operating system, instructions for implementing at least one function (such as touch functionality, sound playback functionality, image playback functionality, etc.), and instructions for implementing the various method embodiments described above. The data storage area may also store data created by the terminal device during use.

[0163] The above embodiments are only used to illustrate the technical solutions of the present invention, and are not intended to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A micro-nano machining lab equipment information control method applied to a user end, characterized in that, The method comprises the following steps: obtaining user login information; obtaining user project information, user scheduled experiment information, user historical operation equipment information, and user historical query information according to the user login information; predicting the attention weight of each item of laboratory equipment management information in combination with the user identity permission, the user project information, the user scheduled experiment information, the user historical operation equipment information, and the user historical query information; adjusting the display order and detail level of each item of laboratory equipment management information in combination with the attention weight; obtaining a laboratory equipment reservation request of the user, the laboratory equipment reservation request comprising user intended equipment and user intended reservation time; generating and sending an experimental equipment reservation recommendation scheme in combination with the laboratory equipment reservation request of the user, the laboratory equipment management information, the attention weight of each item of laboratory equipment management information of the user, and the user query real instruction; The generation stage of the experimental equipment reservation recommendation scheme has a synergistic effect of device constraint conditions, user constraint conditions, and experimental process constraint conditions; The device reservation condition is specifically: determining the planned reservation time of the user intended equipment according to the user historical experiment information, the user historical query information, and the project fund use situation in the laboratory equipment management information, if the planned reservation time of the user intended equipment is inconsistent with the user intended reservation time, taking the user intended reservation time as the standard, and taking the planned reservation time of the user intended equipment as a backup; predicting the operation error rate of the user intended equipment according to the user historical operation equipment violation record and the user historical operation equipment yield rate of the user historical experiment information, and the device state, device historical yield rate, and device maintenance time of the user intended equipment, if the operation error rate of the user intended equipment is lower than the preset fault tolerance rate, forming an experimental equipment reservation recommendation scheme according to the intended equipment reservation time; If the operation error rate of the user intended equipment is higher than the preset fault tolerance rate, it is judged whether the planned reservation time and the intended reservation time are set with experimental auxiliary personnel, if the intended reservation time is set with experimental auxiliary personnel, an experimental equipment reservation recommendation scheme is formed according to the intended equipment reservation time; if the intended reservation time is not set with experimental auxiliary personnel, and the planned reservation time is set with experimental auxiliary personnel, an experimental equipment reservation recommendation scheme is formed according to the planned reservation time of the intended equipment; The user constraint condition is specifically: when there are two or more user conflicts in the experimental equipment reservation recommendation scheme, comparing the device reservation priority weight corresponding to the level of the user's project content and the user platform activity, and sending the experimental equipment reservation recommendation scheme to the user with the highest comprehensive device reservation priority weight and user platform activity; The experimental process constraint condition is specifically: judging whether the user intended equipment has a dependent relationship with other equipment, if there is a dependent relationship, the idle time of the dependent equipment needs to be combined to generate an experimental equipment reservation recommendation scheme.

2. The micro-nano fabrication laboratory equipment information control method according to claim 1, wherein The prediction of the attention weight of each item of laboratory equipment management information in combination with the user identity permission, the user project information, the user scheduled experiment information, the user historical operation equipment information, and the user historical query information is specifically: The user identity permission, the user's project information, the user's reserved experiment information, the user's historical operation equipment information, and the user's historical query information are input into the attention prediction model to obtain the attention weight of the user to each item of laboratory equipment management information. The user identity permission includes user viewable equipment permission and user viewable equipment information content permission, the user's project information includes user project fund balance and user project progress information, the user's reserved experiment information includes reserved experiment period and reserved experiment progress, the user's historical operation equipment information includes user historical reservation equipment record and user historical operation equipment record, and the user's historical query information includes user historical viewable equipment management information and user viewable equipment management information corresponding time length.

3. The micro-nano fabrication laboratory equipment information control method according to claim 2, wherein The display order and detail level of each item of laboratory equipment management information are adjusted according to the attention weight, specifically as follows: The original weight of each item of laboratory equipment management information is obtained; The display weight of each item of laboratory equipment management information is obtained according to the attention weight and the original weight; The display order and detail level of each item of laboratory equipment management information are obtained according to the display weight.

4. The micro-nano fabrication laboratory equipment information control method according to claim 3, wherein, Further comprising: The user's viewable time length of each item of equipment management information in the data board of laboratory equipment management information is counted; According to the historical viewable average time length of each item of equipment management information in the user's historical query information, if the viewable time length of any item of equipment management information is less than the preset threshold proportion of the historical viewable average time length, the attention prediction model parameter is adjusted.

5. The micro-nano fabrication laboratory equipment information control method of claim 1, wherein, Further comprising: The user's query instruction is obtained; The user's query real instruction is obtained according to the user's project information, the user's reserved experiment information, the user's historical operation equipment information, the user's historical query information, and the query instruction; The laboratory equipment management target data is retrieved and displayed according to the user's query real instruction.

6. The micro-nano fabrication laboratory equipment information control method according to claim 5, wherein, The user's query real instruction is obtained according to the user's project information, the user's reserved experiment information, the user's associated equipment information, the query instruction, and the user's historical query information, specifically as follows: The query keyword is obtained by inputting the query instruction into a natural language recognition model; The user's query real instruction is obtained by inputting the user's project information, the user's reserved experiment information, the user's historical operation equipment information, the user's historical query information, and the query keyword into a deep learning network model.

7. The micro-nano fabrication laboratory equipment information control method according to Claim 6, wherein The user's query real instruction includes one or more query real instructions; When the user's query real instruction is one, the laboratory equipment management target data is retrieved and displayed according to the user's query real instruction; When the user's query real instruction is more than one, the reliability of each query real instruction is calculated; The laboratory equipment management target data is retrieved and displayed according to the query real instruction with the highest reliability.

8. The micro-nano fabrication laboratory apparatus information control method according to Claim 7, wherein Further comprising: When the user's query instruction is more than one, the user's feedback information on the laboratory equipment management target data is obtained; If the feedback information is negative feedback, the reliability of each query real instruction is recalculated according to the feedback information; The laboratory equipment management target data is retrieved and displayed according to the query real instruction with the highest reliability after recalculation.

9. The micro-nano fabrication laboratory apparatus information control method of claim 5, wherein, Also comprising: Obtaining a laboratory equipment reservation request of a user, the laboratory equipment reservation request comprising a user intended equipment and a user intended reservation time; Combining the laboratory equipment reservation request of the user, each item of laboratory equipment management information, the attention weight of the user to each item of laboratory equipment management information and the user query real instruction to generate and send an experimental equipment reservation recommendation scheme. 10.A micro-nano lab equipment information control device applied to a user terminal, characterized in that, Comprising: A user information acquisition module for acquiring user login information; An information retrieval module for retrieving user project information, user reserved experiment information, user historical operation equipment information and user historical query information according to the user login information; An information weight determination module for predicting the attention weight of the user to each item of laboratory equipment management information in combination with the user identity authority, user project information, user reserved experiment information, user historical operation equipment information and user historical query information; An information display setting module for adjusting the display order and detail level of each item of laboratory equipment management information in combination with the attention weight; Obtaining a laboratory equipment reservation request of a user, the laboratory equipment reservation request comprising a user intended equipment and a user intended reservation time; Combining the laboratory equipment reservation request of the user, each item of laboratory equipment management information, the attention weight of the user to each item of laboratory equipment management information and the user query real instruction to generate and send an experimental equipment reservation recommendation scheme. The generation stage of the experimental equipment reservation recommendation scheme has the synergistic effect of device constraint condition, user constraint condition and experimental process constraint condition; The device reservation condition is as follows: according to the user historical experiment information, user historical query information and project fund use situation in the laboratory equipment management information, the planned reservation time of the user intended equipment is determined, if the planned reservation time of the user intended equipment is inconsistent with the user intended reservation time, the user intended reservation time is used as the criterion, and the planned reservation time of the user intended equipment is used as the backup; according to the user historical operation equipment violation record and user historical operation equipment yield rate of the user historical experiment information, and the device state, device historical yield rate and device maintenance time of the user intended equipment, the operation error rate of the user to the intended equipment is predicted, if the operation error rate of the user to the intended equipment is lower than the preset fault tolerance rate, the experimental equipment reservation recommendation scheme is formed according to the intended equipment reservation time; If the operation error rate of the user to the intended equipment is higher than the preset fault tolerance rate, it is judged whether the planned reservation time and the intended reservation time are set with experimental auxiliary personnel, if the intended reservation time is set with experimental auxiliary personnel, the experimental equipment reservation recommendation scheme is formed according to the intended equipment reservation time; if the intended reservation time is not set with experimental auxiliary personnel, and the planned reservation time is set with experimental auxiliary personnel, the experimental equipment reservation recommendation scheme is formed according to the planned reservation time of the intended equipment; The user constraint condition is specifically: when the experimental equipment reservation recommendation scheme exists two or more user conflicts, combining the equipment reservation priority weight corresponding to the level of the user's project content and the user platform activity, the experimental equipment reservation recommendation scheme is sent to the user with the highest comprehensive equipment reservation priority weight and user platform activity; The experimental process constraint condition is specifically: judging whether the user intended equipment has a dependency relationship with other equipment, if there is a dependency relationship, the experimental equipment reservation recommendation scheme needs to be generated in combination with the idle time of the dependent equipment.

11. A computer readable storage medium having stored thereon a computer program, characterized in that, The computer program is executed by the processor to realize the steps of the micro-nano machining laboratory equipment information control method in any one of claims 1-9.

12. A computer device comprising a memory and a processor, the memory storing a computer program, characterized in that, The processor executes the computer program to execute the micro-nano machining laboratory equipment information control method in any one of claims 1-9.

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